JP2009073646A - Floating method and floating unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a floating method and a floating unit for floating a workpiece without generating a warp in the workpiece. <P>SOLUTION: This floating unit comprises a chamber 36. A ceiling wall of the chamber 36 is formed with ventilation holes communicated with an air-tight space inside of the chamber. The floating unit also comprises a porous plate fixed to the ceiling wall on a lower side thereof and formed with a conveyance path surface F. Gas is supplied to the air-tight space, and injected from the conveyance path side through air spaces of the ventilation holes and the porous plate. Further, the floating unit is arranged over the conveyance path F, and comprises a non-contact holder 170 for holding a film P as a workpiece without a contact. The non-contact holder 170 generates the negative pressure in a central part of a lower part of the holder with the Bernoulli's principle by injecting air toward the outside of the holder from a gap between the film P over the whole periphery of the lower part of the holder. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a levitation method and a levitation unit in which a workpiece such as a film or a liquid crystal display (LCD) is levitated and conveyed without contact.

  Glass substrates and films used in flat panel displays (FPD) such as LCDs and PDPs tend to increase in size in response to demands for larger screens.

  In a conventional FPD manufacturing process, a glass substrate is transported by a roller. However, due to friction between the glass substrate and the roller, a problem of stress applied to the glass substrate, etc., the glass substrate is floated by compressed air and transported. Is considered.

By the way, the levitation unit like patent document 1 employ | adopts the system which blows up air from the air blowing hole formed in the ceiling wall of a levitation | floating block, and raises a workpiece | work. For this reason, the warp occurs between the air blowing holes or in the end region of the work. This is particularly remarkable when a flexible member such as a film is lifted and transported.
JP 2004-331265 A

  This invention considers the fact which concerns, and makes it a subject to provide the levitation | floating method and the levitation | floating unit which can be floated and conveyed without generating a curvature to a workpiece | work.

  The invention according to claim 1 is a levitating method for levitating and conveying a work, wherein the work is levitated by supplying a gas to a porous body having a conveying path formed on the upper side and ejecting it to the conveying path side. And generating a negative pressure or a positive pressure in a region above the workpiece to hold the workpiece in a non-contact manner.

In the first aspect of the present invention, on the upper side of the porous body, that is, on the conveyance path side, the gas is ejected from the entire surface and the entire surface becomes the air bearing surface, so that the workpiece can be lifted and conveyed.
In addition, the work can be held in a non-contact manner by generating a negative pressure on the upper side of the work or generating a positive pressure. Accordingly, the workpiece transfer state can be made more stable. In addition, since the gas is ejected from the entire surface on the conveying path side, the work is prevented from coming into contact with the porous body even if the positive pressure is slightly too high when the work is held in a non-contact manner.

According to a second aspect of the present invention, when a negative pressure is generated in a region above the workpiece, the negative pressure is generated by Bernoulli's principle by ejecting a gas above the workpiece.
Thereby, it is possible to generate a positive pressure and a negative pressure by blowing out the gas.

The invention described in claim 3 is characterized in that the workpiece is a flexible sheet, and the edge portion of the workpiece is conveyed in a non-contact manner.
In the invention described in claim 3, the workpiece is, for example, a film. According to the third aspect of the invention, the workpiece can be transported in a state in which the deformation of the workpiece is further suppressed. In addition, it is possible to prevent a work portion that is not located on the transfer surface from hanging down.

  According to a fourth aspect of the present invention, there is provided a chamber in which an airtight space is formed, a vent hole communicating with the airtight space is formed in the ceiling wall, a lower side is fixed to the ceiling wall, and a conveyance path is provided on the upper side. A porous body that is formed, a gas supply means for supplying gas to the airtight space, and ejecting gas from the transport path side through the air holes and the voids of the porous body, and disposed above the transport path And pressure generating means for generating a negative pressure or a positive pressure with the workpiece.

  In the invention according to claim 4, when gas is supplied to the airtight space of the chamber by the gas supply means, the gas is ejected from the vent hole formed in the ceiling wall. Since the porous body is fixed to the ceiling wall, gas is ejected from the voids of the porous body.

  That is, on the upper side of the porous body, that is, on the conveyance path side, the gas is ejected from the entire surface and the entire surface becomes the air bearing surface, so that the workpiece can be lifted and conveyed without causing warpage.

  Further, since the negative pressure or positive pressure is generated and held with the work by the pressure generating means, the work transport state can be made more stable. Further, since the gas is ejected from the entire surface on the conveying path side, the workpiece is prevented from coming into contact with the porous body even if the positive pressure generated by the pressure generating means is slightly too high.

The invention described in claim 5 is characterized in that a plurality of the pressure generating means are provided and the arrangement position can be changed.
By providing a plurality of pressure generating means, the holding state can be further stabilized. In addition, since the arrangement position of the pressure generating means can be changed, the arrangement position can be changed in accordance with a preferable portion to be held of the work in accordance with the dimensions and material of the work.

  According to a sixth aspect of the present invention, the pressure generating means generates a negative pressure downward by Bernoulli's principle by ejecting gas outwardly from between the work over the entire periphery of the lower part of the pressure generating means. It is characterized by.

  Thereby, a negative pressure can also be generated by generating a positive pressure, and the configuration of the non-contact holder can be simplified.

  In addition, the porous body may be configured to include graphite. Thereby, weight reduction of a porous body can be achieved. In addition, the function of electrostatic grounding due to the conductivity of the porous body can be added.

  Moreover, the protective film may be formed in the conveyance path side of the porous body. The method for forming the protective film is not particularly limited. For example, known methods such as painting, electroplating, electroless plating, physical vapor deposition (PVD, vacuum deposition, ion plating, sputtering, etc.), chemical vapor deposition (CVD), ion plantation, etc. By doing so, a protective film is formed. By forming this protective film, the porous body can be prevented from being peeled off and the strength can be improved.

  Since this invention set it as the said structure, it can be floated and conveyed, without giving a curvature to a workpiece | work.

  Hereinafter, an example of conveying a film as a workpiece will be described as an embodiment, and an embodiment of the present invention will be described. In the second and subsequent embodiments, the same components as those already described are denoted by the same reference numerals, and description thereof is omitted.

[First Embodiment]
First, the first embodiment will be described. FIGS. 1 to 3 show an inspection apparatus 12 in which the floating unit according to the first embodiment is incorporated.

  The inspection device 12 includes an assembly frame 18 configured in a long frame shape with rails 14 and cross members 16. The assembly frame 18 is supported above the frame-like base frame 22 by the post 20.

  A plurality of beam members 28 are bridged between the rails 14. An air supply box 29 to which negative pressure and positive pressure air is supplied from the first compressor 32 via the tube 34 is disposed on the beam member 28 on one end side of the chamber 36. On the air supply box 29, three rows of the floating units 10 according to the first embodiment are set along the rails 14. Note that what is supplied from the compressor is not limited to air, but may be an inert gas such as nitrogen, argon, or helium, or a gas such as carbon dioxide. Moreover, liquids, such as water, may be sufficient.

  Further, a height adjusting member 30 for adjusting the height of the chamber 36 is disposed on the beam member 28 on which the air supply box 29 is not disposed. The air supply box 29 may be an ejector that generates a negative pressure and a positive pressure with the pressurized air supplied from the first compressor 32.

  The bottom plate of the chamber 36 of the levitation unit 10 is formed with three supply ports (not shown) connected to the air supply box 29 and supplied with negative and positive pressure air.

  Further, a support plate 38 is bridged between the rails 14 on the right side of the rails 14 shown in FIG. A floating unit 40 according to a second embodiment to be described later is set on the support plate 38. From the lower surface side of the support plate 38, negative pressure and positive pressure air are supplied from the second compressor 44 through the tube 46. Then, negative pressure and positive pressure air are supplied to three supply ports (not shown) formed in the bottom plate of the chamber 80 of the levitation unit 40.

  Further, a linear transport device 50 is mounted on the rail 14 on the near side. The transport device 50 includes a plurality of suction cups 52, and chucks the film P (workpiece) that floats and transports it in the direction of the arrow.

  The film P levitated above the levitation unit 10 is levitated and conveyed in the direction of the levitation unit 40 by the conveying device 50. The film P that has been levitated and conveyed is subjected to a predetermined inspection by image processing means (not shown) while the levitating state is maintained above the levitating unit 40.

  The chamber 36 is formed with a flow path (not shown) through which a cooling medium (for example, water) flows along the longitudinal direction. This flow path is directed downward at a position slightly downstream of the adjustment member 30 disposed on the upstream side of the workpiece conveyance of the levitation unit 10 in the conveyance direction, and a water supply port is formed at the lower end of the water supply pipe. 55 (see FIG. 1) is connected. Further, this flow path is directed downward at a position slightly upstream of the air supply box 29 disposed on the downstream side of the work transfer of the levitation unit 10, and a drain outlet is formed at the lower end. A drain pipe 57 (see FIG. 1) is connected. Thereby, the cooling effect is greater on the upstream side of the flow path in the workpiece conveyance direction than on the downstream side of the workpiece conveyance direction.

  The levitation unit 10 is provided with a plurality of Bernoulli-type non-contact holders 170 that hold the film P from above the film in a non-contact manner. When the film P is transported, air is blown out from below the film to float the film P, and the film P is held in a non-contact manner from above by the non-contact holder 170 and transported in the transport direction.

  Next, a specific configuration of the levitation unit 10 according to the first embodiment will be described.

  As shown in FIGS. 4 to 9, the chamber 36 of the levitation unit 10 is a long cylindrical body having a rectangular cross section, and the inner space is formed by two partition walls 54 provided on the inner side and has a rectangular cross section at the center. It is divided into a suction chamber 56 and ejection chambers 58 and 60 having a rectangular cross section. Then, by joining the side plate 62 to the end face of the chamber 36, the suction chamber 56 and the ejection chambers 58, 60 of the chamber 36 become an airtight space.

  As shown in FIG. 6, a pedestal portion 152 in which a screw hole 150 is formed is provided on the end surface of the chamber 36. Further, a mounting hole 154 is formed in the side plate 62. The screw hole 150 and the attachment hole 154 are formed in a positional relationship where the screw hole 150 and the attachment hole 154 face each other when the side plate 62 is overlapped on the end face of the chamber 36. Then, the screw 36 is inserted into the mounting hole 154 and the screw hole 150 with the screw hole 150 and the mounting hole 154 facing each other, whereby the chamber 36 and the side plate 62 are screwed.

  The chamber 36 and the side plate 62 can be joined by other means such as an adhesive in addition to screwing with the screw 156.

  However, when the chamber 36 and the side plate 62 are joined together by an adhesive, the curing time of the adhesive is required, so that the production efficiency cannot be improved, and it is difficult to disassemble after joining. Therefore, it is difficult to perform maintenance or replacement of parts. Therefore, it is preferable to join the chamber 36 and the side plate 62 with the screw 156 as described above.

  Negative pressure air is supplied to the suction chamber 56 from the aforementioned supply port, and positive pressure air is supplied to the ejection chambers 58 and 60.

  A long groove 64 is formed on the side surface of the chamber 36 along the longitudinal direction in order to reduce the weight.

  On the other hand, the ceiling wall of the chamber 36 is divided into four sections, each having a lattice-like lattice groove 68. The reason why the lattice groove portions 68 are formed in each of the sections is that air can be uniformly supplied to the porous plate 76 joined to the ceiling wall. However, in the present invention, the number of compartments in which the lattice groove 68 is formed is not limited, and the chamber 36 may be configured by one compartment.

  A plurality of ventilation holes 74 pass through the groove bottom of the lattice groove 68 and are arranged in a straight line. The ventilation hole 74 communicates with the ejection chamber 60. An air intake hole 70 is formed in the groove bottom of the lattice groove portion 68 and communicates with the suction chamber 56. A ventilation hole 72 is formed at the groove bottom of the lattice groove 68. The vent hole 72 communicates with the ejection chamber 58.

  A porous plate 76 processed into a plate shape is joined to the ceiling wall of the chamber 36 in which the groove portion is formed in this way. The porous plate 76 can be made of, for example, porous graphite, sintered metal, porous ceramics, porous resin, or the like.

  When it is made of porous graphite, the weight can be improved, the mechanical strength can be improved, the manufacturing cost can be reduced, the flatness of the surface can be improved, and the film P can be damaged if it comes into contact with the film P. Can be reduced.

  In addition, the weight of the porous plate can be reduced. In addition, the function of electrostatic grounding due to the conductivity of the porous plate 76 can be added.

When the air permeability of the porous plate 76 is in the range of 0.2 to 6.0 cm ² / s, the workpiece conveyed by the levitation unit 10 can be effectively levitated. Moreover, a workpiece | work can be levitated more effectively as the porosity of the porous board 76 is 5-25 vol%.

  The upper surface side of the porous plate 76 is covered with a protective film 77 (see FIG. 6) in order to prevent peeling of the porous plate 76 and improve strength. Suitable for use in a clean room because particle generation due to peeling can be suppressed. The protective film 77 is formed so as not to block the space opened on the upper surface of the porous plate 76. A transport path surface F is formed by the porous plate 76 and the protective film 77.

  The protective film 77 is made of, for example, a resin. Thereby, the weight of the protective film can be reduced and the protective film can be easily formed. In this case, the resin may be composed of at least one resin selected from an epoxy resin, a phenol resin, a furan resin, a fluororesin, and nylon.

  The protective film 77 is made of a metal or a metal compound. Thereby, the strength of the protective film 77 can be improved. Further, since the protective film 77 becomes conductive, the function of electrostatic grounding can be added to the protective film 77. Further, the protective film 77 may be composed of at least one of glassy carbon and diamond-like carbon. As a result, the protective film 77 becomes conductive, thereby adding the function of electrostatic grounding. Moreover, since the reflectance of light can be reduced, it is possible to provide a floating unit that is more suitable for a line that requires a low-reflectance conveyance path in the exposure process.

  In a state where the chamber 36 and the porous plate 76 are joined, the suction hole 70 formed in the chamber 36 and the suction hole 78 formed in the porous plate 76 and the protective film 77 are opposed to and communicate with each other.

  As a joining method, the surface which becomes the air bearing surface of the porous plate 76 is placed on the surface plate, the adhesive is applied to the ceiling wall of the chamber 36, and the weight is placed on the porous plate 76. An example is a method of fixing. The adhesive is preferably applied so as not to protrude into the lattice groove 68.

  Here, the lattice grooves 68 are not formed on the back surface of the porous plate 76 but are formed on the ceiling wall of the chamber 36. Compared to the case where the groove portions are formed on the back surface of the porous plate 76, the ceiling of the chamber is formed. This is because the groove portion can be easily formed with high accuracy when the groove portion is formed in the portion.

  In particular, in order to reduce the variation in the flying height of the film P and stably float it, it is necessary to reduce the flatness of the bearing surface of the porous plate 76 (more flat). When the groove is formed on the back surface, it becomes difficult to reduce the flatness of the bearing surface of the porous plate 76.

  On the other hand, in the present invention, since the groove portion is not formed on the back surface of the porous plate, the flatness of the bearing surface of the porous plate can be reduced, so that the flying height of the film P varies. It is possible to float stably with less.

  Here, a mechanism in which air is ejected from the gap of the porous plate 76 to make the entire surface an air bearing surface will be briefly described.

  In the porous plate 76, a plurality of fine voids communicating with each other are formed. The air ejected from the lattice groove portion 68 passes through the air gap formed by the lattice groove portion 68 and the lower surface of the porous plate 76 and passes through the gap of the porous plate 76, and from the bearing surface of the porous plate 76 to the outside. It spouts towards. At this time, since the minute gaps communicate with each other, the fine gaps are ejected not only from above the air passage but also from the entire bearing surface.

(Non-contact holder)
As shown in FIGS. 1, 2, and 12 to 14, the levitation unit 10 is provided with a number of Bernoulli-type non-contact holders 170 that hold a workpiece (for example, a film) in a non-contact manner.

  As shown in FIGS. 11 and 12, the non-contact holder 170 includes an outer frame part 184 in which a hollow part 182 is formed, and a discharge head part 186 fixed to the hollow part 182.

  As shown in FIG. 11, in the hollow portion 182, a connected portion 190 to which a positive pressure supply line L (see FIG. 1) is connected from above, an upper hollow portion 192, and a middle hollow portion 194, in order from above. The lower hollow portion 196 is formed. The connected portion 190, the upper hollow portion 192, and the middle hollow portion 194 are all circular holes, and the lower hollow portion 196 is a substantially disk-shaped concave portion. The connected portion 190, the upper hollow portion 192, and the middle hollow portion 194 are formed with concentric cylindrical zones having diameters that increase sequentially from above to below. The lower hollow portion 196 is formed with a substantially disc-shaped zone having a diameter larger than that of the cylindrical zone of the middle hollow portion 194.

  The discharge head portion 186 includes a substantially cylindrical head upper portion 200 fixed to the upper hollow portion 192 and a substantially disk-shaped head lower portion 202 continuous to the lower end of the head upper portion 200. A ring-shaped recess 196R is formed on the upper end side of the lower hollow portion 196, and the outer peripheral side upper portion 200U of the head lower portion 202 is disposed in the recess 196R. Further, the lower surface 185S of the outer frame portion lower portion 185 forming the lower portion of the outer frame portion 184 and the lower surface 202S on the peripheral side of the head lower portion 202 are located on substantially the same plane. Note that a recessed portion 202D that is slightly recessed is formed in the lower surface side central portion of the lower portion 202 of the head.

  In the middle hollow portion 194, a middle space MZ is formed by the head upper portion 200 and the head lower portion 202. The head upper portion 200 is formed with an opening 201 that allows communication between the inner space UZ of the head upper portion 200 and the middle space MZ.

  A ring-shaped groove 203 that communicates with the middle space MZ is formed in the head lower portion 202. Further, in the head lower portion 202, discharge pores 202 </ b> H that communicate with the ring-shaped groove 203 and open to the outer peripheral side of the head lower portion 202 and communicate with the hollow zone of the lower hollow portion 196 are formed. A plurality of the discharge pores 202H are formed and arranged so as to be radial from the center point C as shown in FIG.

  Here, the inner peripheral wall forming the substantially disk-shaped zone of the lower hollow portion 196 is a mortar-shaped wall surface 196W whose diameter increases downward. Therefore, the air ejected from the discharge pore 202H is guided by the mortar-shaped wall surface 196W, passes between the film P and the outer frame portion 184, and flows out toward the outer periphery of the non-contact holder 170. (Refer to the discharge air flow G in FIG. 11).

  The positive pressure supply line L connected to the connected portion 190 may be supplied with positive pressure air from the first compressor 32 or the second compressor 44, or may be provided with a separate compressor. .

(Function, effect)
Next, the operation of the levitation unit 10 according to the first embodiment will be described.

  From the first compressor 32, positive pressure air (for example, 50 to 400 kPa) is supplied to the ejection chambers 58 and 60, and negative pressure air (for example, 0 to −50 kPa) is supplied to the suction chamber 56 (air is supplied from the suction chamber 56). Suction.

  The air supplied to the ejection chambers 58, 60 is ejected from the vent holes 72, 74, travels through the air passage formed by the lower surface of the porous plate 76 and the lattice grooves 68, and is evenly applied to the lower surface of the porous plate 76. And then ejected from the gap of the porous plate 76.

  That is, since air blows out from the entire surface of the porous plate 76 and the entire surface of the porous plate 76 becomes an air bearing surface, the film P is levitated while suppressing warpage, and is transported without contact with the porous plate 76. Is possible. The sucker 52 chucks the floated film P and the conveying device 50 conveys it in the direction of the arrow.

  The negative pressure air supplied to the suction chamber 56 generates a force for sucking the film P through the suction hole 78 formed in the porous plate 76 through the suction hole 70. The suction force generated by the intake holes 70 regulates the flying height of the film P that has been lifted by the air ejected from the porous plate 76. Therefore, the flying height of the film P can be controlled by controlling this suction force.

  Further, a protective film 77 is formed on the upper side of the porous plate 76, and the protective film 77 prevents peeling of the porous plate 76 and improves the strength.

Further, the positive pressure air supplied from the positive pressure supply line L is ejected radially from the discharge pores 202H through the opening 201, the middle space MZ, and the groove 203 in order. The ejected air is guided by the mortar-shaped wall surface 196 </ b> W, passes between the upper surface of the film P and the lower surface of the outer frame portion 184, and flows out to the outer peripheral side of the non-contact holder 170. That is, the discharge airflow G shown in FIG. 11 is formed. As a result, according to Bernoulli's principle, the air located below the lower head portion 202, particularly below the ejection port of the discharge orifice 202 </ b> H, is sucked upward, that is, an ascending air flow J is generated. Negative pressure is generated. Therefore, the film P is held without contacting the non-contact holder 170 having a simple structure, and the portion bent downward of the film P is pulled upward by the negative pressure, so that the deformation of the film P is further suppressed. It is conveyed by. In the region (zone) where the discharge airflow G is formed, the pressure is basically positive.
Therefore, depending on the positive-pressure air flow G, a portion bent upward of the film P is pressed downward, so that deformation of the film P can be suppressed. By adjusting the distance between the non-contact holder 170 and the film P, only the positive pressure air flow G can be applied to the film P.

  In the present embodiment, as shown in FIGS. 1 and 13, the film center portion PM and the film edge portion PE along the transport direction are held in a non-contact manner by the non-contact holders 170, respectively. Transport P. Therefore, as shown in FIG. 13, even if the film edge portion PE is not located on the transport surface of the floating unit 10, it is avoided that the film edge portion PE hangs downward.

  In addition, since the film P is transported while the air is ejected from the lower surface side of the film P by the levitation unit 10, even if the amount of air ejected from the non-contact holder 170 is a little too large, the film P is protected from the porous plate 76 (protection). Contact with the membrane 77) is prevented.

[Second Embodiment]
Next, the levitation unit 40 according to the second embodiment will be described.

  Since the basic configuration of the levitation unit 40 is the same as that of the levitation unit 10 of the first embodiment, the configuration of the groove of the chamber 80 shown in FIGS. 14 and 15 and the configuration and shape of the porous plate 82 will be described.

  On the ceiling wall of the chamber 80, four vertical groove portions 97 in the longitudinal direction and a plurality of horizontal groove portions 102 are formed in the width direction, and a plurality of islands 86 are formed at predetermined intervals by the vertical groove portions 97 and the horizontal groove portions 102. Has been. A vent hole 92 is formed in the groove bottom of the lateral groove portion 102. The vent hole 92 communicates with an ejection chamber (not shown). The remote island 86 has an intake hole 90 communicating with the suction chamber.

  On the other hand, when the porous plate 82 is overlapped with the ceiling wall of the chamber 80, an air intake hole 96 is formed at a position corresponding to the air intake hole 90. Further, through holes 101 are formed on both sides of the porous plate 82, and the porous plate 82 can be fixed to the chamber 80 by inserting screws into the mounting holes 94 formed in the chamber 80. Yes.

  Further, a protective film 83 is formed on the surface of the porous plate 82 on the conveyance path surface side, as in the first embodiment.

  As shown in FIG. 1, a plurality of non-contact holders 170 are also provided on the upper side of the porous plate 82 as in the first embodiment.

  In the floating unit 40 having the above-described configuration, the through holes 101 are formed on the surface of the porous plate 82 to enable screwing. Further, since the groove is not formed in the porous plate 82, the flatness of the porous plate 82 can be maintained. Furthermore, by arranging the intake holes at equal intervals, the flying height of the film P can be regulated in a well-balanced manner.

  Further, the protective film 83 formed on the porous plate 82 prevents the porous plate 82 from being peeled off and improves the strength. The protective film 83 can be formed using the same material and method as the protective film 77 described in the first embodiment. In particular, a black nickel plating film, a needle-like plating film, glassy carbon, and diamond-like carbon are suitable for the exposure process because of a decrease in reflectance.

  Further, as in the first embodiment, a positive pressure region is formed around and near the lower portion of the non-contact holder 170 according to the Bernoulli principle by the ejection of air from the non-contact holder 170. A negative pressure region is formed inside. That is, the film P is held without contacting the non-contact holder 170 having a simple structure, and is transported in a state in which the deformation of the film P is further suppressed.

  In the embodiment shown in FIGS. 1 to 9, the levitation unit 10 is configured by joining four porous plates 76 to the ceiling wall of the chamber 36. In the embodiment shown in FIGS. 14 and 15, the levitating unit 40 has a single porous plate 82 joined to the ceiling wall of the chamber 80. However, in the present invention, the number of porous plates is not limited. Moreover, not only a porous board but a general porous body may be sufficient as long as a conveyance path can be formed in the upper surface side.

  Furthermore, in embodiment shown in FIGS. 1-15, although demonstrated using the film P as an example of the to-be-conveyed body conveyed by the floating units 10 and 40, this invention is not limited to this, For example, You may convey a to-be-conveyed body, such as a glass plate, a nonwoven fabric, and also a resin plate and a metal plate.

  In the embodiment shown in FIGS. 1 to 15, the levitation units 10 and 40 of the present invention are incorporated in an inspection apparatus, but the present invention is not limited to this, and an apparatus other than the inspection apparatus. It can be used for.

  Moreover, although the non-contact holding | maintenance tool 170 demonstrated in the form which hold | maintains the film edge part PE and film center part PM, this invention is not limited in the number and holding | maintenance position of the non-contact holding tool 170. FIG.

Moreover, in this embodiment, when conveying, the form which the conveyance apparatus 50 and the non-contact holder 170 move to a conveyance direction with the film P (work) may be sufficient, and the non-contact holder 170 is the The form by which the conveying apparatus 50 moves to a conveyance direction without moving and the film P is conveyed may be sufficient.
When the transport device 50 and the non-contact holder 170 move in the transport direction together with the film P, the four corners and the center of the film P can be held and transported by the non-contact holder 170, respectively. It becomes. Further, when the transport device 50 moves in the transport direction and the film P is transported without moving the non-contact holder 170, the arrangement position of the non-contact holder 170 is set to an arbitrary position according to the workpiece size or the like. It may be configured to be settable to.

  Further, the floating units 10 and 40 may be provided in place of the non-contact holding tool 170. In this case, the porous plates 76 and 82 of the upper and lower levitation units 10 and 40 are arranged so as to face each other, and the work is positioned between the upper and lower porous plates 76 and 82. The deformation of the workpiece can be suppressed by the air blown from the floating units 10 and 40 to the upper side.

It is a perspective view which shows the inspection apparatus with which the floating unit which concerns on 1st Embodiment, and the floating unit which concerns on 2nd Embodiment were assembled | attached. It is a side view which shows the inspection apparatus with which the floating unit which concerns on 1st Embodiment, and the floating unit which concerns on 2nd Embodiment were assembled | attached. It is a top view which shows the inspection apparatus with which the floating unit which concerns on 1st Embodiment, and the floating unit which concerns on 2nd Embodiment were assembled | attached (drawing of a non-contact holder is abbreviate | omitted). It is a floating unit which concerns on 1st Embodiment, and is a perspective view of the unit part which ejects air from the workpiece | work lower surface side. FIG. 3 is an exploded perspective view of a unit portion that ejects air from the work lower surface side in the floating unit according to the first embodiment. It is a perspective view which shows the attachment structure of the side plate of the floating unit which concerns on 1st Embodiment. FIG. 3 is an enlarged plan view of a unit portion that ejects air from the work lower surface side in the floating unit according to the first embodiment. FIG. 3 is a side sectional view of a unit portion that ejects air from the work lower surface side in the floating unit according to the first embodiment. FIG. 3 is a side sectional view of a unit portion that ejects air from the work lower surface side in the floating unit according to the first embodiment. It is a perspective view of the non-contact holder of the levitation unit concerning a 1st embodiment. It is a sectional side view of the non-contact holding tool of the levitation unit concerning a 1st embodiment. It is a plane sectional view of the head lower part which constitutes the non-contact holder of the floating unit concerning a 1st embodiment. In 1st Embodiment, it is the side view seen from the conveyance direction side which shows conveying a workpiece | work with a floating unit. It is a top view of the chamber of the levitation unit concerning a 2nd embodiment. It is a top view of the porous board of the levitation unit concerning a 2nd embodiment.

Explanation of symbols

32. First compressor (air supply means)
36 Chamber 72 Ventilation hole 74 Ventilation hole 76 Porous plate (porous body)
77 Protective film F Conveyance surface (conveyance route)
170 Non-contact holder (pressure generating means)

Claims (6)

A method of ascending and transporting a workpiece,
While supplying a gas to the porous body forming the transport path on the upper side and ejecting it to the transport path side, the work is levitated,
A levitation method, wherein the work is held in a non-contact manner by generating a negative pressure or a positive pressure in a region above the work.   2. The levitation method according to claim 1, wherein when a negative pressure is generated in a region above the workpiece, the negative pressure is generated by Bernoulli's principle by ejecting a gas above the workpiece.   The levitation method according to claim 1 or 2, wherein the workpiece is in a flexible sheet shape, and the edge portion of the workpiece is conveyed in a non-contact manner. A chamber in which an airtight space is formed, and a ventilation hole communicating with the airtight space is formed in the ceiling wall;
A porous body having a lower side fixed to the ceiling wall and an upper side forming a conveyance path;
Gas supply means for supplying a gas to the airtight space, and for ejecting the gas from the conveyance path side through the vent hole and the void of the porous body;
A pressure generating means disposed above the conveying path and generating a negative pressure or a positive pressure with the workpiece;
A levitation unit characterized by comprising   The levitation unit according to claim 4, wherein a plurality of the pressure generating means are provided and an arrangement position thereof is changeable.   6. The pressure generating means generates a negative pressure downward on the basis of Bernoulli's principle by ejecting gas outwardly from between the work over the entire circumference of the lower part of the pressure generating means. The levitation unit described in

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