WO2009004882A1 - Levitation device and levitation transportation device - Google Patents

Levitation device and levitation transportation device Download PDF

Info

Publication number
WO2009004882A1
WO2009004882A1 PCT/JP2008/060181 JP2008060181W WO2009004882A1 WO 2009004882 A1 WO2009004882 A1 WO 2009004882A1 JP 2008060181 W JP2008060181 W JP 2008060181W WO 2009004882 A1 WO2009004882 A1 WO 2009004882A1
Authority
WO
WIPO (PCT)
Prior art keywords
levitation
plate
chamber
transportation device
fluid
Prior art date
Application number
PCT/JP2008/060181
Other languages
French (fr)
Japanese (ja)
Inventor
Tomoo Mizuno
Kai Tanaka
Original Assignee
Ihi Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corporation filed Critical Ihi Corporation
Priority to CN200880021700A priority Critical patent/CN101711217A/en
Priority to KR2020127000029U priority patent/KR20120005263U/en
Publication of WO2009004882A1 publication Critical patent/WO2009004882A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
    • B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Abstract

A levitation transportation device for transporting an object with a lower surface while levitating the object by fluid. The levitation transportation device has a levitation device, a fluid supply device, and a transportation device. The levitation device has a plate and a frame member. The plate has a base by which a chamber through which the fluid passes is defined, an upper surface, and one or more nozzles communicating with the chamber and opened in the upper surface, and the plate is placed to cover the chamber. The frame member has an inner surface converging toward the upper end of the frame member and is placed above the plate such that the inner surface and the upper surface of the plate surround a cavity communicating with the nozzles and open upward. The fluid supply device supplies the fluid to the chamber after pressurizing it. The transportation device transports the object.
PCT/JP2008/060181 2007-06-29 2008-06-03 Levitation device and levitation transportation device WO2009004882A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN200880021700A CN101711217A (en) 2007-06-29 2008-06-03 Levitation device and levitation transportation device
KR2020127000029U KR20120005263U (en) 2007-06-29 2008-06-03 Levitation device and levitation transportation device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-173423 2007-06-29
JP2007173423A JP2009012872A (en) 2007-06-29 2007-06-29 Floating unit and floating carrying device

Publications (1)

Publication Number Publication Date
WO2009004882A1 true WO2009004882A1 (en) 2009-01-08

Family

ID=40225938

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060181 WO2009004882A1 (en) 2007-06-29 2008-06-03 Levitation device and levitation transportation device

Country Status (5)

Country Link
JP (1) JP2009012872A (en)
KR (2) KR20100018612A (en)
CN (1) CN101711217A (en)
TW (1) TW200914352A (en)
WO (1) WO2009004882A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015522254A (en) * 2012-05-16 2015-08-06 アルトリア クライアント サービシーズ インコーポレイテッドＡｌｔｒｉａ Ｃｌｉｅｎｔ Ｓｅｒｖｉｃｅｓ Ｉｎｃ． Cigarette wrapper with novel pattern

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6213951U (en) * 1985-07-03 1987-01-28
JPH0359926U (en) * 1989-10-13 1991-06-12
JP2000100896A (en) * 1998-09-21 2000-04-07 Rohm Co Ltd Method and device for carrying wafer
JP2001010724A (en) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk Floating carrier device
JP2006182563A (en) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd Floating device and carrying device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6213951U (en) * 1985-07-03 1987-01-28
JPH0359926U (en) * 1989-10-13 1991-06-12
JP2000100896A (en) * 1998-09-21 2000-04-07 Rohm Co Ltd Method and device for carrying wafer
JP2001010724A (en) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk Floating carrier device
JP2006182563A (en) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd Floating device and carrying device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015522254A (en) * 2012-05-16 2015-08-06 アルトリア クライアント サービシーズ インコーポレイテッドＡｌｔｒｉａ Ｃｌｉｅｎｔ Ｓｅｒｖｉｃｅｓ Ｉｎｃ． Cigarette wrapper with novel pattern

Also Published As

Publication number Publication date
JP2009012872A (en) 2009-01-22
CN101711217A (en) 2010-05-19
TW200914352A (en) 2009-04-01
KR20100018612A (en) 2010-02-17
TWI355364B (en) 2012-01-01
KR20120005263U (en) 2012-07-18

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