JPH113924A - Linearly driving device and substrate-carrying device provided with it - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a linearly driving device from which dust produced in its driving section is not discharged to the outside and a substrate-carrying device. SOLUTION: A linear motor 10 is housed in a hollow housing cover 2, and an annular belt 3 is put around rollers so as to surround the periphery of the motor section 10. The belt 3 is made of a magnetic material and positioned, so as to close the openings 8a and 8b of the cover 2. A magnetic fluid seal is put in a gap 16 between the belt 3 and cover 2. The magnetic fluid seal prevents dust from being discharged to the outside through the gap 16 between the belt 3 and the cover 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear driving device for reciprocating a movable body which can move linearly in a predetermined direction, and a substrate transport device provided with the linear driving device.

[0002]

2. Description of the Related Art In the processing of substrates such as semiconductor wafers, glass substrates for photomasks, glass substrates for liquid crystal display devices, and substrates for optical disks, a substrate processing apparatus integrating a plurality of processing units for performing a series of processing is used. ing.

For example, in a resist process for a semiconductor device, a semiconductor wafer or a glass substrate for a liquid crystal display device is transported between processing units in a substrate processing apparatus, and the substrate is subjected to processes such as resist coating, cleaning, and development. Done.
For this reason, the substrate processing apparatus is provided with a substrate transfer device having a linear driving device for transferring a substrate between the processing units.

FIG. 8 is a schematic plan view of a conventional substrate transfer apparatus, and FIG. 9 is a cross-sectional view taken along line ZZ in FIG. The substrate transfer device shown in FIGS. 8 and 9 is disclosed in JP-A-8-293534.
No. 6,086,045. 8 and 9, the substrate transfer device 30 includes a pair of arms 31 and 3 for holding a substrate.
2 is provided. The pair of arms 31 and 32 have a hollow cover 3.
The base is integrally connected to an arm support frame 34 housed inside the cover 39. The arm support frame 34 has a guide portion 35, and the guide portion 35 is guided in a predetermined direction along a rail (not shown) formed on the upper surface of the base member 37.

[0005] A belt driving section 36 is formed on the base member 37. A part of the drive belt of the belt drive unit 36 is connected to the arm support frame 34. When the drive belt of the belt drive unit 36 rotates in a predetermined direction, the arm support frame 34 reciprocates in the predetermined direction.

Arms 31 and 32 and arm support frame 3
The vicinity of a connection portion with the arm 4 extends through a slit-shaped opening 33 provided on the upper surface of the cover 39.
Moves in the area of the opening 33 with the reciprocating movement of. Thus, the arms 31 and 32 hold the substrate and transport it to the processing unit 40, or receive the processed substrate from the processing unit 40.

When foreign matter such as dust adheres to the surface of the substrate,
A defect is generated in the element pattern, and the production yield of the substrate is deteriorated. For this reason, measures have been taken in the substrate transfer apparatus to prevent foreign matter from adhering to the substrate. In the substrate transfer device of FIGS. 8 and 9, dust is easily generated in a movable portion near the belt driving unit 36 and becomes a source of contamination of the substrate. Therefore, the belt driving unit 36 is housed inside the cover 39, and the inside of the cover 39 is exhausted using the exhaust fan 38. Thus, the dust in the cover 39 is discharged to the outside through the exhaust fan 38.

[0008]

However, in the above-mentioned conventional substrate transfer apparatus, a slit-shaped opening 33 is formed on the upper surface of the cover 39, and is always opened to allow the arms 31, 32 to reciprocate. doing. For this reason, foreign matter generated inside the cover 39 may be released to the vicinity of the arms 31 and 32 through the opening 33. For example, when the arms 31 and 32 reciprocate, the cover 39
In some cases, the arm support frame 34 reciprocates inside, and the air in the cover 39 is compressed and pushed out from the opening 33 by the pump action. When air containing foreign matter is pushed out from the opening 33, the air adheres to the substrate held by the arms 31, 32 and contaminates the substrate. As a result, defects may occur in the element pattern on the substrate, and the manufacturing yield may be reduced.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a linear driving device in which dust generated in a driving portion is not released to the outside, and a substrate transport device provided with the linear driving device.

[0010]

A linear drive device according to a first aspect of the present invention is a linear drive device for moving a movable body that can move linearly in a predetermined direction. A storage cover having an opening extending in the direction and a moving body outside the storage cover are fixed,
A moving member that moves in the moving direction of the moving body along the opening; a driving unit that is housed inside the storage cover and moves the moving member in the moving direction of the moving body along the opening; And a closing member fixed to the moving member so as to move with the movement of the moving member with the opening closed.

In the linear drive device according to the first invention, the storage cover has an opening extending in the moving direction of the moving body. Then, the driving means disposed inside the storage cover moves the moving member along the opening, so that the moving body fixed to the moving member moves. At this time, the closing member, which is disposed inside the storage cover and fixed to the moving member, moves with the movement of the moving member with the opening closed. This prevents dust generated from the vicinity of the driving means inside the storage cover from being released to the outside of the storage cover by the closing member. This makes it possible to obtain a linear drive device that does not emit dust and the like outward.

According to a second aspect of the present invention, there is provided a linear drive device according to the first aspect of the present invention, wherein a seal member is provided in a gap between a peripheral portion of the opening and the closing member.

In this case, the seal member can prevent the dust from being released from the gap between the opening of the storage cover and the closing member, and can more completely prevent the discharge of the dust to the outside of the storage cover. .

[0014] A linear drive device according to a third aspect of the present invention is the linear drive device according to the second aspect, wherein the closing member is
A magnetic material is included, and the seal member is a magnetic fluid seal.

[0015] Even fine dust can be captured by the magnetic field generated in the magnetic fluid of the magnetic fluid seal. This prevents extremely minute dust inside the storage cover from being released to the outside of the storage cover.

According to a fourth aspect of the present invention, there is provided a linear drive device according to any one of the first to third aspects, wherein the closing member is rotatably moved with the movement of the moving member. It is provided with.

In this case, since the belt is rotatably moved with the movement of the movable member as the closing member, it is possible to prevent the dust inside the storage cover from being released with a simple configuration.

A linear drive according to a fifth aspect of the present invention is the linear drive according to any one of the first to fourth aspects, wherein the drive means is disposed inside the storage cover and has a permanent magnet on its upper surface. And a driving member provided below the moving member inside the storage cover and having an induction coil in a non-contact state with the permanent magnet, and supplies a current to the induction coil. Then, the moving member is moved by moving the driving member.

In the linear drive device according to the fifth aspect of the present invention, the drive member is provided by supplying a current to the induction coil which is disposed inside the storage cover and is in non-contact with the permanent magnet disposed on the upper surface of the rail member. By moving the moving member, dust from the driving means can be suppressed.

According to a sixth aspect of the present invention, there is provided a substrate transfer apparatus having the configuration of the linear drive device according to any one of the first to fifth aspects, wherein the moving body holds the substrate. Means for transferring the substrate held by the holding means when the holding means moves.

In the substrate transport apparatus according to the sixth aspect, dust generated inside the storage cover is prevented from being discharged to the outside of the storage cover. This prevents the substrate held by the holding means from being contaminated by dust from inside the storage cover.

[0022]

FIG. 1 is a side sectional view of a linear drive device according to an embodiment of the present invention, and FIG. 2 is a sectional view taken along line X--X in FIG.
3 is a schematic plan view of the linear driving device of FIG. 1. FIG.

1 to 3, the linear driving device 1 includes a hollow storage cover 2. Openings 8 a and 8 b are formed on the upper and lower surfaces of the storage cover 2. Rollers 4 are rotatably mounted at four corners inside the storage cover 2, and the belt 3 is stretched over the four rollers 4.

The belt 3 is made of a magnetic material such as stainless steel or an elastic member having a magnetic material sealed therein and having chemical resistance, and is formed endless. The width of the belt 3 is formed larger than the width of the openings 8a and 8b of the storage cover 2. The side end of the belt 3 is an opening 8 of the storage cover 2.
a, 8b are inserted with a predetermined gap into a concave groove 2a formed on the end face. In the gap 16 between the belt 3 and the storage cover 2, a seal member described later is provided.

A moving member 15 is fixed to the surface of the belt 3 exposed in the opening 8a of the storage cover 2. The moving member 15 is provided so as to be reciprocally movable in the direction D in the opening 8a of the storage cover 2. Moving member 15
Moves, the belt 3 fixed to the moving member 15 moves by the rotation of the roller 4.

A linear motor section 10 for reciprocating the moving member 15 is disposed inside the storage cover 2.
The linear motor unit 10 includes a rail member 6 fixed to an upper portion of the base member 5 and a driving member 9 moving on the rail member 6.
It is composed of

The rail member 6 is a long member extending in the direction D, and a plurality of permanent magnets 7 are arranged on the upper surface of the rail member 6 along the direction D. Further, a plurality of induction coils 12 are provided on the frame 11 of the driving member 9. At both ends of the frame 11, rollers 1
3, 14 are rotatably mounted. One roller 13 rotates on the upper surface of the rail member 6, and the other roller 14 is a rail portion 5 a formed on the upper surface of the base member 5.
It is guided and rotated. The frame 11 is connected to the moving member 15 via the belt 3.

Although not shown in FIGS. 1 and 2, a moving body such as an arm for transporting a substrate is fixed above the moving member 15 as described later.

When an alternating current is supplied to the induction coil 12, the driving member 9 reciprocates on the rail member 6 while the induction coil 12 and the permanent magnet 7 are not in contact with each other, and the moving member 15 reciprocates at the same time. . At this time, the belt 3 is
It reciprocates with 5 and the drive member 9.

FIG. 4 is an enlarged sectional view of the boundary between the belt and the storage cover. A magnetic fluid seal 17 is provided in a gap 16 between the belt 3 and the storage cover 2 in the concave groove 2a. The magnetic fluid seal 17 has a configuration in which a permanent magnet 17a is disposed on the storage cover 2 side, and a magnetic fluid 17b is sealed between the permanent magnet 17a and the belt 3.

The magnetic fluid seal 17 is provided not only on the side of the opening 8a of the storage cover 2 but also on the side of the lower opening 8b.

A high magnetic field is generated in the magnetic fluid 17b enclosed in the magnetic fluid seal 17, thereby capturing fine dust. For this reason, fine dust generated from the linear motor unit 10 and the like inside the storage cover 2 is captured by the magnetic fluid seal 17 and is prevented from being released outside through the gap 16 between the belt 3 and the storage cover 2. .

In the above embodiment, the storage cover 2
Corresponds to the storage cover of the present invention, the moving member 15 corresponds to the moving member, the linear motor unit 10 corresponds to the driving means,
The belt 3 corresponds to a closing member, and the magnetic fluid seal 17 corresponds to a sealing member.

Further, in the linear drive device 1 described above,
The lower opening 8b of the storage cover 2 may not be provided.

Further, a suction pipe, a suction source, and the like for sucking and releasing air inside the storage cover 2 to the outside may be further provided. In this case, the amount of exhaust can be reduced as compared with a configuration using a conventional exhaust fan.

The linear driving device 1 having the above configuration can be applied to a substrate transfer device provided in a substrate processing device. Here, a schematic configuration of the substrate processing apparatus will be described.

FIG. 5 is a schematic perspective view of the substrate processing apparatus.
The substrate processing apparatus includes a substrate loading / unloading section IND for loading / unloading the cassette 30 containing the substrates W, processing areas A and B in which processing units are disposed, and a substrate transfer disposed between the processing areas A and B. And a region C.

The cassette 30 is located in the substrate loading / unloading area IND.
Indexer robot 31 for transferring a substrate W between the indexer robot 31
Is arranged. In the processing area A, a rotary coating device (spin coater) SC and a rotary developing device (spin developer) SD are arranged. Further, in the processing area B, a substrate heating device (hot plate) HP, a substrate cooling device (cooling plate) CP, and an adhesion strengthening processing device AH are arranged. Further, in the substrate transfer area C, a substrate transfer device 32 that transfers the substrate W between the indexer robot 31 and each processing unit is disposed.

FIG. 6 is a plan view of the substrate transfer apparatus, and FIG.
FIG. 6 is a sectional view taken along line YY in FIG. 5. Substrate transfer device 32
Is a main body driving unit (not shown) that moves in the horizontal and vertical directions in the substrate conveyance area C, and a substrate conveyance arm that is disposed above the main body driving unit and transfers the substrate W to and from the processing unit. And a unit 20. 6 and 7 show the substrate transfer arm unit 20.

6 and 7, the substrate transfer arm unit 20 includes a pair of linear driving devices 1 disposed on a support member 22, and arms 21a and 21b fixed to the moving member 15 of each linear driving device 1. And

Each arm 21a, 21b is fixed to the moving member 15 of each linear drive 1. The arms 21a and 21b correspond to the moving body of the present invention.

The pair of arms 21a and 21b are arranged so as to overlap in the vertical direction. The arm 21a moves forward and backward with respect to the processing unit by driving the linear driving device 1 on the left side in FIG. 6, and the arm 21b moves forward and backward with respect to the processing unit by driving the linear driving device 1 on the right side. I do.

In the linear drive 1, the opening 8 b on the lower surface of the cover 2 is closed by a support member 22. The upper opening 8a is provided between the belt 3 and the magnetic fluid seal 17.
(See FIG. 4). This prevents the dust generated inside the cover 2 from being released to the outside of the storage cover 2.

The structure of the substrate transfer arm 20 is such that the opening 8a of the linear driving device 1 is not only disposed on the support member 22 so as to face upward as shown in FIGS. A pair of linear drive devices 1 may be arranged facing each other such that the portions 8a face outward. In this case, the location of the linear drive device 1 on the support member 22 is reduced, and the size of the substrate transfer arm unit 20 can be reduced in the width direction.

The linear drive device 1 of the present invention can be applied not only to the drive system of the arms 21a and 21b of the substrate transfer device, but also to the drive system of the developing solution discharge nozzle of the developing device.

[Brief description of the drawings]

FIG. 1 is a side sectional view of a linear driving device according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along line XX in FIG.

FIG. 3 is a schematic plan view of a linear drive device.

FIG. 4 is an enlarged sectional view of a boundary portion between a belt and a cover in the linear drive device of FIG.

FIG. 5 is a schematic perspective view of a substrate processing apparatus.

FIG. 6 is a plan view of a substrate transfer arm unit using a linear driving device.

FIG. 7 is a sectional view taken along line YY in FIG.

FIG. 8 is a schematic plan view of a conventional substrate transfer device.

9 is a sectional view taken along line ZZ in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Linear drive device 2 Storage cover 3 Belt 4 Roller 6 Rail member 7 Permanent magnet 8a, 8b Opening 9 Drive member 10 Linear motor unit 12 Induction coil 15 Moving member 16 Gap 17 Magnetic fluid seal

Claims (6)

[Claims] 1. A linear drive device for moving a movable body that can move linearly in a predetermined direction, comprising: a storage cover having an opening extending in the moving direction of the mobile body; A moving member that fixes the moving body and moves in the moving direction of the moving body along the opening; and a moving member that is housed inside the storage cover and moves along the opening in the moving direction of the moving body. A drive means for moving the moving member, and a closure disposed inside the storage cover and fixed to the moving member so as to move with the movement of the moving member with the opening closed. A linear drive device comprising: a member; 2. The linear drive device according to claim 1, wherein a seal member is provided in a gap between a peripheral portion of the opening and the closing member. 3. The linear drive device according to claim 2, wherein the closing member includes a magnetic material, and the seal member is a magnetic fluid seal. 4. The linear drive device according to claim 1, wherein the closing member includes a belt that rotatably moves with the movement of the moving member. Linear drive device. 5. The linear drive device according to claim 1, wherein the drive unit is disposed inside the storage cover and a permanent magnet is disposed on an upper surface of the rail member. And a drive member provided below the moving member inside the storage cover and having an induction coil in a non-contact state with the permanent magnet, and supplying a current to the induction coil. A linear drive device, wherein the moving member is moved by moving the driving member. 6. A substrate transfer device provided with the linear drive device according to claim 1, wherein the moving body is a holding unit that holds a substrate, and the holding unit moves. The substrate transporting device transports the substrate held by the holding means.