CN107600965A - A kind of apparatus for transporting substrate - Google Patents

A kind of apparatus for transporting substrate Download PDF

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Publication number
CN107600965A
CN107600965A CN201710720898.3A CN201710720898A CN107600965A CN 107600965 A CN107600965 A CN 107600965A CN 201710720898 A CN201710720898 A CN 201710720898A CN 107600965 A CN107600965 A CN 107600965A
Authority
CN
China
Prior art keywords
nacelle
air
equipment
transmission
exhaust
Prior art date
Application number
CN201710720898.3A
Other languages
Chinese (zh)
Inventor
陈建锋
Original Assignee
武汉华星光电半导体显示技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 武汉华星光电半导体显示技术有限公司 filed Critical 武汉华星光电半导体显示技术有限公司
Priority to CN201710720898.3A priority Critical patent/CN107600965A/en
Publication of CN107600965A publication Critical patent/CN107600965A/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G45/00—Lubricating, cleaning, or clearing devices
    • B65G45/10—Cleaning devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Abstract

The invention provides a kind of apparatus for transporting substrate, the transmission equipment includes nacelle, conveyer and exhaust apparatus；Nacelle is provided with air inlet；Conveyer includes transmission mechanism, and transmission mechanism is arranged inside nacelle；Exhaust apparatus, exhaust apparatus are used to draw air and the discharge inside nacelle；Wherein, when exhaust apparatus works, the air pressure inside nacelle is less than the air pressure outside nacelle, strongly to take away dust particle caused by the work of the transmission mechanism of conveyer, and the air outside nacelle is entered inside nacelle from the air inlet of nacelle.By this equipment, the present invention enables to dust particle caused by transmission mechanism not to be adsorbed on the substrate of conveyer transmission, improves the quality of substrate.

Description

A kind of apparatus for transporting substrate

Technical field

The present invention relates to display device processing procedure field, more particularly to a kind of apparatus for transporting substrate.

Background technology

In display technology field, liquid crystal display device (Liquid Crystal Display, LCD) and organic light-emitting diodes The flat-panel display devices such as tube display part (Organic Light Emitting Diode, OLED) have become the display of main flow Device, and substrate is self-evident as indispensable part in LCD and OLED display device, the importance of its quality.

In the prior art, in the manufacturing process of substrate, many processing procedures can produce granular dust particle, such as substrate In transmit process, at work, dust particle occurs in phase mutual friction for gear and bearing on conveyer, these dust particles It is readily adsorbed on substrate, so as to cause substrate contaminated and quality decline.

The content of the invention

The present invention is mainly to provide a kind of apparatus for transporting substrate, it is intended to solves caused dust particle in substrate transmit process The problem of being easily adsorbed onto on substrate and cause substrate quality decline.

In order to solve the above technical problems, one aspect of the present invention is：A kind of apparatus for transporting substrate, institute are provided Stating transmission equipment includes nacelle, and the nacelle is provided with air inlet；Conveyer, the conveyer includes transmission mechanism, described Transmission mechanism is arranged inside the nacelle；Exhaust apparatus, the air that the exhaust apparatus is used to draw inside the nacelle is simultaneously Discharge；Wherein, during the exhaust apparatus work, the air pressure inside the nacelle is less than the air pressure outside nacelle, strongly to take away Dust particle caused by the transmission mechanism work, and cause described in the air from air inlet entrance outside the nacelle Inside nacelle.

The beneficial effects of the invention are as follows：The situation of prior art is different from, the present invention is drawn in nacelle by exhaust apparatus The air in portion and discharge, and when exhaust apparatus works, the air pressure inside nacelle is less than the air pressure outside nacelle, strongly to take away Dust particle caused by the transmission mechanism work of conveyer, and the air outside nacelle is entered from the air inlet of nacelle Inside nacelle, and then dust particle caused by transmission mechanism will not be adsorbed on the substrate of conveyer transmission, improved The quality of substrate.

Brief description of the drawings

Fig. 1 is the structural representation of apparatus for transporting substrate embodiment provided by the invention；

Fig. 2 be in Fig. 1 A to structural representation.

Embodiment

To make those skilled in the art more fully understand technical scheme, below in conjunction with the accompanying drawings and it is embodied Mode is described in further detail to a kind of apparatus for transporting substrate provided by the present invention.

Refering to Fig. 1, apparatus for transporting substrate embodiment provided by the invention includes nacelle, conveyer 12 and exhaust apparatus 13。

Nacelle 11 includes board 111 and cover body 112, and cover body 112 is fixedly installed on board 111, and is formed with board 111 Accommodation space 113.

Optionally, cover body 112 is transparent cover, such as clear glass cover body.

Further, nacelle 11 is provided with air inlet 114.

Specifically, nacelle 11 includes the first nacelle 101 and the second nacelle 102, and air inlet 114 is arranged at the second nacelle 102, In other embodiments, air inlet 114 can also be arranged at the first nacelle 101, or the first nacelle 101 and the second nacelle 102 It is provided with air inlet 114.

Wherein, the logical of the first nacelle 101 and the second nacelle 102 is communicated between the first nacelle 101 and the second nacelle 102 Road 103.

Optionally, the quantity of air inlet 114 can be one, or it is multiple, it is not limited herein.

Further, filter 115 is provided with air inlet 114, optionally, filter 115 be arranged at the outside of nacelle 11 with Nacelle 11 is fixedly connected, and in the present embodiment, filter 115 is arranged at the outside of nacelle 11 and is fixedly connected with the second nacelle 102；When So, filter 115 can also be arranged at the inside of nacelle 11 and is fixedly connected with nacelle 11.

Conveyer 12 includes transmission mechanism 121, further comprises transport mechanism 122.

Transmission mechanism 121 includes the main drive gear inside the inside of the first nacelle 101 and the second nacelle 102 respectively 1211 and auxiliary transmission mechanism 1212.

Wherein, main drive gear 1211 includes the first travelling gear 1213 and the second travelling gear 1214, the first driving cog Wheel 1213 is relatively fixed with transport mechanism 122, and the second travelling gear 1214 engages with the first travelling gear 1213, to pass through first Travelling gear 1213 drives transport mechanism 122 to transmit substrate, in this course, the first travelling gear 1213 and the second driving cog Wheel 1214 can rub, and then produce granular dust particle inside the first nacelle 101 in friction process；Auxiliary transmission Mechanism 1212 is bearing, and the bearing is rotatably assorted with transport mechanism 122, with the mistake transmitted in transport mechanism 122 to substrate Rotated in journey relative to bearing friction, and then granular dust particle is produced in the second nacelle 102.

Further, conveyer 12 also includes drive mechanism 123, and drive mechanism 123 includes drive gear 1231, driving Gear 1231 is engaged with the second travelling gear 1214 to drive the second travelling gear 1214 to rotate, and with second during driving Travelling gear 1214 can rub, and then granular dust thing can be produced inside the first nacelle 101 in friction process Matter.

Exhaust apparatus 13 is used to draw air and the discharge inside nacelle 11.

Optionally, exhaust apparatus 13 is extended to inside nacelle 11 outside nacelle 11, in the present embodiment, exhaust apparatus 13 Extended to inside the second nacelle 102 outside second nacelle 102 to draw air inside the second nacelle 102 and by the second nacelle Air discharge inside 102.

Wherein, when exhaust apparatus 13 works, the air pressure inside nacelle 11 is less than the air pressure outside nacelle 11, with reinforced belt Walk transmission mechanism 121 to work caused dust particle, and cause air outside nacelle 11 from the entrance nacelle 11 of air inlet 114 It is internal.

Optionally, in the present embodiment, at work, the air pressure inside the second nacelle 102 is less than second to exhaust apparatus 13 Air pressure outside nacelle 102, worked caused dust particle so as to which strength takes away auxiliary transmission mechanism 1212, and cause the second cabin Air outside body 102 enters inside the second nacelle 102 from air inlet 114, in this course, inside the first nacelle 101 Air can enter inside the second nacelle 102 from the passage 103 connected with the second nacelle 102, to be discharged by exhaust apparatus 13, and then So that discharged when main drive gear 1211 works in dust particle caused by the inside of the first nacelle 101 by exhaust apparatus 13.

Wherein it is possible to before the work of exhaust apparatus 13, the air pressure inside the second nacelle 102 is caused to be less than the second cabin in advance Air pressure outside body 102, the air inside the second nacelle 102 can also be drawn during exhaust apparatus 13 works so that Air inside second nacelle 102 is reduced and air pressure is decreased up to less than the air pressure outside the second nacelle 102.

Further, during above-mentioned exhaust apparatus works, filter 115 at air inlet 114 can be Inside nacelle 11 air from air inlet 114 by when the air inside nacelle 11 is filtered, to prevent inside nacelle 11 Dust particle from air inlet 114 by polluting to the substrate transmitted in transport mechanism 122.

Refering to Fig. 2, the present embodiment further comprises water injecting mechanism 14, and water injecting mechanism 14 is arranged inside the first nacelle 101 For injecting water to main drive gear 1211 when main drive gear 1211 works, and then main drive gear 1211 is produced Dust particle it is washed away, the first nacelle 101 is additionally provided with delivery port 1011, to wash away caused by main drive gear 1211 The water of dust particle is discharged from delivery port 1011.

Optionally, delivery port is arranged on board 111, and the quantity of delivery port 1011 can be one, or and it is multiple, This is not restricted.

Prior art is different from, the present invention draws air and the discharge inside nacelle by exhaust apparatus, and is filled in exhaust When putting work, the air pressure inside nacelle is less than the air pressure outside nacelle, when being worked with strongly taking away the transmission mechanism of conveyer Caused dust particle, and the air outside nacelle is entered inside nacelle from the air inlet of nacelle, and then cause driver Dust particle caused by structure will not be adsorbed on the substrate of conveyer transmission, improve the quality of substrate.

Embodiments of the invention are the foregoing is only, are not intended to limit the scope of the invention, it is every to utilize this hair The equivalent structure or equivalent flow conversion that bright specification and accompanying drawing content are made, or directly or indirectly it is used in other related skills Art field, is included within the scope of the present invention.

Claims (10)

1. a kind of apparatus for transporting substrate, it is characterised in that the transmission equipment includes：
Nacelle, the nacelle are provided with air inlet；
Conveyer, the conveyer include transmission mechanism, and the transmission mechanism is arranged inside the nacelle；
Exhaust apparatus, the exhaust apparatus are used to draw air and the discharge inside the nacelle；
Wherein, during the exhaust apparatus work, the air pressure inside the nacelle is less than the air pressure outside nacelle, strongly to take away institute Dust particle caused by transmission mechanism work is stated, and causes the air outside the nacelle to enter the cabin from the air inlet Internal portion.
2. equipment according to claim 1, it is characterised in that filter is provided with the air inlet, the filter is used In the air inside the nacelle from the air inlet by when the air inside the nacelle is filtered, to prevent Dust particle is stated from the air inlet to pass through.
3. equipment according to claim 2, it is characterised in that the filter be arranged at outside the nacelle and with it is described Nacelle is fixedly connected.
4. equipment according to claim 1, it is characterised in that the nacelle includes the first nacelle and the second nacelle, described Transmission mechanism includes the main drive gear inside first nacelle and second nacelle and auxiliary transmission mechanism respectively, institute State the passage for being provided between the first nacelle and second nacelle and connecting first nacelle and second nacelle, the exhaust Device is used to draw the air inside second nacelle, and the air described in when drawing inside the first nacelle passes through described lead to Road enters inside second nacelle.
5. equipment according to claim 4, it is characterised in that the equipment further comprises water injecting mechanism, described first Nacelle is provided with delivery port, and the water injecting mechanism is arranged inside first nacelle for being injected to the main drive gear Water, and then cause dust particle caused by the main drive gear to follow the water of the water injecting mechanism injection to be arranged from the delivery port Go out.
6. equipment according to claim 4, it is characterised in that the conveyer also includes transport mechanism, the main biography Motivation structure includes the first travelling gear and the second travelling gear, and first travelling gear is relatively fixed with the transport mechanism, Second travelling gear engages with first travelling gear, to drive the transport mechanism by first travelling gear Rotate, and the dust particle is produced during driving.
7. equipment according to claim 6, it is characterised in that the conveyer further comprises drive mechanism, described Drive mechanism includes drive gear, and the drive gear is engaged with second travelling gear to drive second travelling gear Rotate, and the dust particle is produced during driving.
8. equipment according to claim 6, it is characterised in that the auxiliary transmission mechanism is bearing, the bearing with it is described Transport mechanism is rotatably assorted, and the dust particle is produced in rotation process.
9. equipment according to claim 1, it is characterised in that the nacelle includes cover body and board, the cover body and institute State board to be fixedly connected, and the accommodation space for accommodating the transmission mechanism is formed with the board.
10. equipment according to claim 9, it is characterised in that the cover body is transparent cover.
CN201710720898.3A 2017-08-18 2017-08-18 A kind of apparatus for transporting substrate CN107600965A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710720898.3A CN107600965A (en) 2017-08-18 2017-08-18 A kind of apparatus for transporting substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201710720898.3A CN107600965A (en) 2017-08-18 2017-08-18 A kind of apparatus for transporting substrate
PCT/CN2017/102645 WO2019033507A1 (en) 2017-08-18 2017-09-21 Substrate transfer equipment

Publications (1)

Publication Number Publication Date
CN107600965A true CN107600965A (en) 2018-01-19

Family

ID=61065682

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710720898.3A CN107600965A (en) 2017-08-18 2017-08-18 A kind of apparatus for transporting substrate

Country Status (2)

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CN (1) CN107600965A (en)
WO (1) WO2019033507A1 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1449980A (en) * 2002-04-10 2003-10-22 株式会社Orc制作所 Sustrate olelivery mechanism
CN1511773A (en) * 2002-12-27 2004-07-14 石川岛播磨重工业株式会社 Conveyer for plate
CN1629061A (en) * 2003-12-16 2005-06-22 株式会社大福 Transporting apparatus
CN1799963A (en) * 2004-12-28 2006-07-12 株式会社杰维思 Work conveying apparatus
CN105668192A (en) * 2016-01-12 2016-06-15 京东方科技集团股份有限公司 Substrate conveying system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001060610A (en) * 1999-06-17 2001-03-06 Tokyo Electron Ltd Substrate transfer device, treating unit, treating system of substrate, transfer method, housing device and housing box
KR20060043647A (en) * 2004-10-08 2006-05-15 삼성전자주식회사 Cassette stocking system
KR100918588B1 (en) * 2007-09-19 2009-09-28 세메스 주식회사 Unit for exhausting particles and apparatus for transferring a substrate having the unit
CN101958264B (en) * 2010-05-06 2012-06-20 东莞宏威数码机械有限公司 Dustless vacuum power transfer unit
KR20140139667A (en) * 2013-05-27 2014-12-08 삼성디스플레이 주식회사 A side roller and substrate transport device comprising the same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1449980A (en) * 2002-04-10 2003-10-22 株式会社Orc制作所 Sustrate olelivery mechanism
CN1511773A (en) * 2002-12-27 2004-07-14 石川岛播磨重工业株式会社 Conveyer for plate
CN1629061A (en) * 2003-12-16 2005-06-22 株式会社大福 Transporting apparatus
CN1799963A (en) * 2004-12-28 2006-07-12 株式会社杰维思 Work conveying apparatus
CN105668192A (en) * 2016-01-12 2016-06-15 京东方科技集团股份有限公司 Substrate conveying system

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Application publication date: 20180119