KR20120058703A - Stacker robot for transfering cassette - Google Patents

Abstract

PURPOSE: A stacker robot for cassette transfer is provided to prevent a foreign substance generated in the inner side of a lifting post to be distributed to the inner side of a stoker by including an air exhaustion apparatus consisting of a particle elimination device and a suction device. CONSTITUTION: A traveling unit moves along a trolley rail. A pair of lifting posts(232) is stood up to be faced with each other. A particle elimination device(300) discharges air of the lifting post from the inside to the outside. A lifting frame(234) is included between the pair of lifting posts. The lifting frame goes up and down along a longitudinal direction of the lifting post. The lifting frame is connected with a chain. An arm unit(240) is installed at a lifting unit and directly supports a cassette.

Description

Stacker robot for transfer cassette

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a rack master or a cassette transport cart for carrying a cassette in a flat panel display manufacturing facility. In particular, a foreign matter generated during driving of the rack master or cassette transport cart is scattered into a stocker or a clean room. It is to prevent that.

Cathode ray tube (CRT), one of the widely used display devices, has been mainly used for monitors such as TVs, measuring devices, information terminal devices, etc., but the miniaturization of electronic products due to the large weight and size of CRT itself It could not respond actively to the demand for weight reduction.

In order to replace the CRT, flat display devices such as liquid crystal display devices (LCDs) and plasma display panel devices (PDPs), which have advantages of small size and light weight, have been actively developed.

Here, the liquid crystal display device has a flat display panel in which a pair of transparent substrates are bonded to each other with a unique fluorescent or polarizing layer therebetween as an essential component. Such a panel forms a thin film of a predetermined material. The deposition process, the photolithography process, and the etching process are repeated several times. In addition, various different processes such as cleaning, bonding, and cutting are involved.

On the other hand, the manufacturing process of the liquid crystal display device consisting of a number of such unit processes are generally performed in a clean room, and a plurality of substrates that are completed by a specific process equipment in the clean room is loaded in a cassette (cassette) It is stored in a clean room by the logistics transport system or transferred to other process equipment.

Here, the logistics transport system refers to an automatic transport system for maximizing the productivity of the entire manufacturing system by organically connecting the storage and transport of substrates generated between processes in the clean room, and the representative transport transport system of the clean room is a stocker (stocker). ), Overhead Shuttle (OHS), Overhead Hoist Transport (OHT), Automated Guided Vehicle (AGV), Rail Guided Vehicle (RGV), Handling robot, Overhead Conveyor, Overhead Carrier Vehicle.

The stocker is a device that is in charge of a function of temporarily storing a substrate loaded in a cassette or a process that is already being performed in other process equipments, and is an essential equipment for a manufacturing process of a liquid crystal display device.

Such stockers are provided with a plurality of shelves for cassette storage therein, and a stacker robot, a so-called rack master, slides on a rail across the bottom of the stocker.

On the other hand, the inside of the stocker must be kept extremely clean so that the substrate contained in the cassette is not contaminated by particles such as fine dust or particles. Fine dust or particles are introduced into the stocker, or the dust or particles generated by the foreign matter itself in the stocker due to the movement of the stacker robot.

In particular, in the process of stacking and loading and unloading the cassette according to the desired room, a large number of foreign matters are generated during vertical movement by lifting and lowering of the lifting frame of the lifting unit.

Although, inside the stocker to install a fan filter unit (fan filter unit) to maintain the cleanliness of the internal environment of the stocker, to discharge the fine dust or particles by the foreign matter to the outside, the fine dust through the fan filter unit B. Particles are discharged through the bottom of the stocker, so before the particles or particles are discharged through the bottom of the stocker, some particles or particles are scattered inside the stocker and contaminate the substrate. It causes a problem.

The present invention is to solve the above problems, and an object of the present invention is to prevent particles or particles generated by the stacker robot from scattering in the stocker.

In order to achieve the above object, the present invention provides a cassette transport stacker robot of the flat panel display device, the main body; A traveling part disposed below the main body and moving along a trolley rail; A pair of lifting posts (lifting posts) upright on both sides of the main body facing each other; An air piping device for discharging the air inside the lifting post to the outside; A lifting frame provided horizontally between the pair of lifting posts and lifting up and down along the longitudinal direction of the lifting posts; Provided is a cassette transfer stacker robot including an arm part that is rotatable, retractable, and extendable on the lifting frame.

Herein, the air piping device includes first and second pipes connected to first and second exhaust holes respectively provided at both ends in the longitudinal direction of the lifting post, and suction connected to one end of the first and second pipes. And a first and second particle removing device each including a filter between the first and second exhaust holes and the first and second pipes, respectively.

The air piping device includes a third pipe connecting the third exhaust hole provided in the center of the lifting post and the suction device, and a third filter including a filter between the exhaust hole and the third pipe. Particle removal apparatus is provided.

In this case, the air piping device is provided at both ends in the longitudinal direction of the lifting post, each consisting of a first and second fan filter unit including a filter, each lifting post is formed in one direction facing each other opening The opening is provided with a dustproof film.

Here, each of the lifting post is built with a chain that rotates in the longitudinal direction, the lifting frame is connected to the chain is raised and lowered.

At this time, the arm portion is a rotating disk mounted on the lifting frame, an arm that contracts and extends in a state where one end is coupled to the rotating disk, and a catch plate coupled to the distal end of the arm to support the cassette It includes.

As described above, in accordance with the present invention, the stacker robot is provided by a pair of lifting posts provided with a circulation chain therein so as to vertically move the lifting frame by lifting an air exhaust device comprising a particle removal device and an intake device. When the vertical movement by the lifting and lowering of the frame there is an effect that can prevent the separation foreign matters generated in the lifting post into the stocker.

As a result, there is an effect of preventing the substrate located inside the stocker from being contaminated or the clean room from being contaminated by fine dust or particles generated by the foreign matter.

1 is a perspective view showing a stocker according to the present invention.
Figure 2 is a perspective view schematically showing the structure of a stacker robot according to an embodiment of the present invention.
Figure 3 is an enlarged front view showing the structure of the lifting post according to the first embodiment of the present invention.
Figure 4 is an enlarged front view showing the structure of the lifting post according to the second embodiment of the present invention.
5 is an enlarged front view illustrating a structure of a lifting post according to still another embodiment of FIG. 4;

Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings.

1 is a perspective view of a stocker according to the present invention.

As shown in the stocker 100, at least one side of a trolley rail 136 arranged along the bottom surface of the stocker 100 includes a plurality of shelves 112 on which a cassette C is seated. (Iii) is provided, the receiving port 132 and the delivery port 134 is provided, a stacker robot (200), a so-called rack master (stacker robot) for carrying a cassette while sliding along the trolley rail (136) master).

At this time, the stacker robot 200 carries the cassette (C) delivered to the stocking port 132 of the stocker 100 by an AGV (auto guided vehicle (not shown)), etc., which is an external transport system, to the appropriate shelf 112. It loads or unloads the cassette C from an arbitrary shelf 112 and unloads it to the delivery port 134 so that it can be carried out by AGV (not shown) etc., and it arranges the cassette C in the shelf 112, and arranges it. Do this.

At this time, the entry and exit port (132, 134) is a conveyor or transfer robot (pick and place (P & P) (not shown)) is configured, when the cassette (C) is seated on the entry and exit ports (132, 134) stocker 100 It serves to transfer to the internal stacker robot 200 or to the outside.

That is, for example, when the cassette C is transferred into the stocker 100, the cassette C is loaded onto the designated shelf 112 through the arm 243 of the stacker robot 200, and the cassette is loaded. Even when (C) is moved to the next process, the arm 243 of the stacker robot 200 unloads the cassette C from the designated shelf 112 and moves it to the delivery port 134 of the stocker 100. It is conveyed to a target place by an external AGV (not shown) etc.

Here, the stacker robot 200 of the present invention is characterized in that it is provided with an air exhaust device (not shown), so that a large number of foreign matter is generated during vertical movement by the lifting of the lifting frame 234 of the stacker robot 200 In addition, the foreign matter can be prevented from scattering in the stocker 100.

Therefore, it is possible to prevent the substrate (not shown) located inside the stocker 100 from being contaminated by fine dust or particles generated by the foreign matter. This will be described in more detail with reference to FIG. 2.

Figure 2 is a perspective view schematically showing the structure of a stacker robot according to an embodiment of the present invention.

As shown in the drawing, the stacker robot 200 includes a main body 210 and a traveling part 220 provided therein, a lifting part 230 and a lifting part which are lifted from the main body 210. And an arm part 240 mounted to 230 to directly support the cassette C. As shown in FIG.

Looking at each in more detail, first the main body 210 serves as a base frame (base frame) supporting the entire stacker robot 200, a pair of lifting upright to the left, right edge of the main body 210 A lifting unit 230 including a post (lifting post: 232) is provided.

At this time, the lifting unit 230 is lifted up and down in a state in which the lifting frame 234 is positioned between the pair of lifting posts 232 to maintain a horizontal, for this purpose, the servo is internally inside each lifting post 232 Circulating chains 231 (see Fig. 3) circulated by a driving means such as a motor (not shown) are mounted along each longitudinal direction, and the lifting frame 234 is connected to these circulating chains 231 (see Fig. 3). It is. Accordingly, the lifting frame 234 is raised and lowered along the circulation direction of these circulation chains 231 (see FIG. 3).

The arm unit 240 includes a rotating disk 241 mounted on the lifting frame 234 and a pair of arms 243 contracting and extending in a multi-joint manner in which one end is connected to the rotating disk 241. At the ends of these arms 243, a catch plate (245) may be coupled to directly support the cassette (C).

In addition, the driving unit 220 provided in the main body 210 is a part for moving the stacker robot 200 to a desired position, and closely adheres along the trolley rail 136 formed across the bottom surface of the stocker (100 in FIG. 1). It includes a traveling wheel 222 for supporting and moving the entire stacker robot 200 by rotating, although not shown clearly in the drawings, driving means such as a motor and a driving wheel for rotating the traveling wheel 222 ( And a break that can forcibly stop rotation of 222.

At this time, the outer surface of the driving wheel 222 in contact with the trolley rail 136 may prevent the vibration and noise surrounding the tread member (not shown) made of urethane or rubber material to reduce the vibration and noise.

The stacker robot 200 exhibiting the above-described configuration moves horizontally along the trolley rail 136 by the traveling unit 220, and moves vertically by lifting and lowering the lifting frame 234 and the arm 243. By connecting the operation by rotation, water, and extension, the cassette C can be transported, loaded and unloaded as desired.

Here, the process of loading and unloading the cassette C to the shelf (112 of FIG. 1) which is performed by the arm 243 of the stacker robot 200 will be described in more detail.

First, the cassette C transfer operation is started by transferring the cassette C to the receiving port 132 of FIG. 1 of the stocker 100.

Accordingly, the stacker robot 200 moves horizontally along the trolley rail 136 by the traveling wheel 222 of the driving unit 220 and then lifts the lifting frame 234 from the main body 210 by the lifting frame 234. Cassette C loaded in the receiving port (132 in FIG. 1) through a two-dimensional vertical movement and a three-dimensional horizontal movement and a rotational movement by the rotating disk 241 by the contracting and stretching operation of the arm 243. Is seated on the catch plate 245.

Here, looking at the process of seating the cassette (C) on the catch plate 245 in more detail, the arm (243) with the front facing so that the cassette (C) from the receiving port (132 of Figure 1) It stretches and contracts, and during this process, the cassette C loaded on the receiving port (132 of FIG. 1) by the catch plate 245 is seated.

The stacker robot 200 then contracts the arm 243 and moves along the trolley rail 136 to reach the desired shelf (112 in FIG. 1) and then rotates by the rotating disk 241 to move the cassette C. The shelf 2 is to be aligned toward the shelf (112 in FIG. 1) to be loaded, and an arm 243 extends on the shelf (112 in FIG. 1) to transfer the cassette C to the shelf (112 in FIG. 1) for loading.

At this time, the method of taking out and transporting the cassette C from an arbitrary shelf (112 in FIG. 1) proceeds in reverse with the above description, and catches the cassette C seated in the shelf (112 in FIG. 1) by the catch plate 245. After mounting on the top, the cassette C may be seated on the delivery port (134 in FIG. 1) of the stocker (100 in FIG. 1).

All of the operation of the stacker robot 200 is driven by electricity, and adopts a contactless power supply system so as to be stably supplied with power even while driving. To this end, a power track (not shown) to which external power is supplied along the moving path of the stacker robot 200 is disposed in the stocker 100, so that the stacker robot 200 supplies power therefrom. Will receive.

On the other hand, one of the most important role in the stacker robot 200 of the present invention may be referred to as each lifting post 232 of the lifting unit 230. Here, the structure of each lifting post 232 of the present invention will be described in more detail with reference to FIG. 3.

3 is an enlarged front view illustrating a structure of a lifting post according to a first embodiment of the present invention.

As shown, the lifting post 232 for fixing one end of the lifting frame 234 equipped with the arm portion 240 for supporting the cassette (C) has a circulation chain 231 therein, respectively, circulation The chain 231 is connected to the lifting frame 234 to serve to lift the lifting frame 234 up and down.

At this time, a spool (233a) serving as a driven gear is provided at the upper end of the lifting post 232 of each lifting post 232, and a chain sprocket rotated by a servo motor (not shown) at the lower end. : 233b), the circulation chain 231 is provided in two rows to wrap and connect the upper and lower spool 233a and the chain sprocket 233b inside each lifting post 232, chain sprocket 233b In the process of transmitting the rotational force of the servo motor (not shown) output to the spool 233a is cyclically rotated.

Through this, the lifting frame 234 connected to the circulation chain 231 is to be moved up and down along the longitudinal direction of the pair of lifting posts 232.

At this time, the balance weight 237 for stable up and down driving of the lifting frame 234 on one side of the circulation chain 231 is connected to the circulation chain 231 is moved in the opposite direction to the lifting frame 234. In addition, an auxiliary circulation belt 235 is further provided to assist linear movement of the lifting frame 234 and the balance weight 237.

The lifting posts 232 are formed in a pair, and one direction facing each other along the longitudinal direction of the circulation chain 231 and the lifting frame 234 built in each lifting post 232 are connected to each other in an opening (see FIG. 2). 232a), and foreign matter inside each lifting post 232 flows out to the opening (232a of FIG. 2) to the outside of the lifting post 232, or the foreign matter is introduced into each lifting post 232 from the outside. In order to prevent the dustproof film (250 of FIG. 2) is provided.

That is, when the vertical movement by the lifting of the lifting frame 234, a large number of foreign matters are generated from the circulation chain 231 made of a metal material such as aluminum or stainless steel embedded in each lifting post 232.

Thus, a dustproof film (250 of FIG. 2) is provided to cover the openings (232a of FIG. 2) of each lifting post 232, so that fine dust or particles due to the debris generated inside each lifting post 232 are stalker ( 100 is to prevent scattering (100) inside.

However, even though the dustproof film (250 of FIG. 2) is provided, some of the fine dust or particles generated inside each lifting post 232 flows into the stocker (100 of FIG. 1), and the stocker (100 of FIG. 1). Fine particles or particles due to the foreign matter introduced into the inside is scattered in the stocker (100 of FIG. 1), causing a problem of contaminating the substrate.

Thus, the present invention is provided with an air exhaust device 300 in order to prevent the fine dust or particles from scattering foreign matter generated in each lifting post 232 to be scattered into the stocker (100 of FIG. 1). Characterized in that.

The air exhaust device 300 according to the first embodiment of the present invention includes first and second fan filter units 310a and 310b provided at upper and lower portions of each lifting post 232.

Here, the first and second fan filter units 310a and 310b are respectively provided at both ends of the lifting post 232 in the longitudinal direction, respectively, and the first and second fan filter units 310a and 310b are fine dust. Or a filter (not shown) in which particles accumulate.

Accordingly, the first and second fan filter units 310a and 310b are devices for removing fine dust or particles generated in each lifting post 232 by using a self-purifying capacity by a filter (not shown). The air inside the lifting post 232 is purified and the air is discharged to the outside.

That is, the air inside the lifting post 232 including the fine dust or particles caused by the debris generated in the lifting post 232 is lifted through the first and second fan filter units 310a and 310b. In the process of being discharged to the outside of the upper and lower portions of the 232, fine dust or particles are purified by a filter (not shown), so that only clean air is discharged to the outside of the lifting post 232.

Therefore, it is possible to prevent fine dust or particles from scattering into the stocker (100 in FIG. 1) through the openings (232a in FIG. 2) of each lifting post 232.

At this time, some air inside the lifting post 232 which is not discharged to the outside through the first and second fan filter units 310a and 310b may contain fine dust or particles, and may contain such fine dust or particles. Some air may also be prevented from scattering into the stocker (100 in FIG. 1) through the openings (232a in FIG. 2) of each lifting post 232.

That is, the air inside the lifting post 232 has a pressure difference from the air outside the lifting post 231 through the first and second fan filter units 310a and 310b. As the air inside the lifting post 232 is discharged to the outside through the 310a and 310b, the pressure of the air inside the lifting post 231 has a lower pressure than that of the outside air.

Therefore, the air inside the lifting post 232 does not flow out of the lifting post 232 through the opening of the lifting post 232 (232a of FIG. 2).

As a result, some air in the interior of the lifting post 232 which is not discharged to the outside through the first and second fan filter units 310a and 310b may also be stocked through the opening (232a in FIG. 2) of each lifting post 232. (100 of FIG. 1) can be prevented from scattering inside.

Table 1 below shows the pressure difference between the air pressure inside the lifting post 232 and the air pressure outside the lifting post 231 according to the presence of the fan filter units 310a and 310b and the air inside the lifting post 232. This shows the flow rate of.

Measuring position of lifting post
(Height from the bottom) Lifting post without fan filter unit Lifting post with fan filter unit Differential pressure (mmAq) Flow rate (m / s) Differential pressure (mmAq) Flow rate (m / s) 4.5m +0.02 0 -0.18 0.51 3.0m -0.01 0 -0.14 0.39 1.5m -0.02 0 -0.26 0.76

Referring to Table 1, it can be seen that the pressure difference between the air pressure inside the lifting post 232 and the air outside the lifting post 232 is generated by the fan filter units 310a and 310b.

In particular, when the fan filter units 310a and 310b are provided, the pressure of the air inside the lifting post 232 is negative from the pressure of the outside air, so the air inside the lifting post 232 is lifted. It does not leak out of the lifting post 232 through the opening 232a of the post 232.

In this case, the first and second fan filter units 310a and 310b provided with a filter (not shown) are not limited to a specific structure and installation type as long as the air inside each lifting post 232 can be discharged to the outside. For example, the HEPA (High Efficiency Particulate Arrestor) filter is made of synthetic fibers and has a range of efficacy for removing particles of 0.3 micron or more. By guiding to one side, the flow and purification of air can be performed simultaneously.

The air is thus cleanly purified in the course of these at least one filter (not shown).

As described above, the stacker robot 200 according to the present invention includes a first and a second lifting posts 232 which are provided with a circulation chain 231 therein to vertically move the lifting frame 234. By providing the air exhaust device 300 consisting of the fan filter unit (310a, 310b), the vertical movement by lifting the lifting frame 234 made of a metal material such as aluminum or stainless steel provided in each lifting post 232 Even if a large number of foreign matters are generated from the circulation chain 231, it is possible to prevent such foreign matters from scattering into the stocker (100 in FIG. 1).

Accordingly, the substrate located inside the stocker (100 of FIG. 1) or the clean room may be prevented from being contaminated by fine dust or particles generated by the foreign matter.

4 is an enlarged front view illustrating a structure of a lifting post according to a second embodiment of the present invention.

Meanwhile, in order to avoid duplicate descriptions, the same reference numerals are given to the same parts that play the same role as the above-described first embodiment, and only the characteristic contents to be described in the second embodiment will be described.

As shown, the lifting post 232 for fixing one end of the lifting frame 234 equipped with the arm portion 240 for supporting the cassette (C) has a circulation chain 231 therein, respectively, circulation The chain 231 is connected to the lifting frame 234 to serve to lift the lifting frame 234 up and down.

At this time, at the lower end of each lifting post 232, a chain sprocket (233b) rotated by a servo motor (not shown) is provided. As there is a spool (spool: 233a) serving as a gear, the circulation chain 231 is provided in two rows to wrap and connect the upper and lower chain sprockets 233b and the spool 233a inside each lifting post 232, In the process of transmitting the rotational force of the servomotor (not shown) output to the chain sprocket 233b to the spool 233a, the circular rotation is performed.

Through this, the lifting frame 234 connected to the circulation chain 231 is to be moved up and down along the longitudinal direction of the pair of lifting posts 232.

At this time, on one side of the circulation chain 231, the balance weight 237 for stable up and down driving of the lifting frame 234 is connected to the circulation belt 231 is moved in the opposite direction to the lifting frame 234. In addition, an auxiliary circulation belt 235 is further provided to assist linear movement of the lifting frame 234 and the balance weight 237.

The lifting posts 232 are formed in a pair, and one direction facing each other along the longitudinal direction of the circulation chain 231 and the lifting frame 234 built in each lifting post 232 are connected to each other in an opening (see FIG. 2). 232a), and foreign matter inside each lifting post 232 flows out to the opening (232a of FIG. 2) to the outside of the lifting post 232, or the foreign matter is introduced into each lifting post 232 from the outside. In order to prevent the dustproof film (250 of FIG. 2) is provided.

However, even though the dustproof film (250 of FIG. 2) is provided, some of the fine dust or particles generated inside each lifting post 232 flows into the stocker (100 of FIG. 1), and the stocker (100 of FIG. 1). Fine particles or particles due to the foreign matter introduced into the inside is scattered in the stocker (100 of FIG. 1), causing a problem of contaminating the substrate.

Thus, the present invention is provided with an air exhaust device 300 in order to prevent the fine dust or particles from scattering foreign matter generated in each lifting post 232 to be scattered into the stocker (100 of FIG. 1). Characterized in that.

The air exhaust device 300 according to the second embodiment of the present invention includes the first and second particle removal devices 320a and 320b and the first and second particle removal devices 320a for collecting fine dust or particles suspended therein. And a suction device 340 connected to the first and second pipes 330a and 330b to discharge the air inside the lifting post 232 to the outside.

Specifically, first and second exhaust holes 239a and 239b are formed at both ends of the lifting post 232 in the longitudinal direction, and one end of the first and second exhaust holes 239a and 239b is provided at the suction device ( The other ends of the first and second pipes 330a and 330b connected to the 340 are connected to each other so that lifting posts are formed through the first and second exhaust holes 239a and 239b and the first and second pipes 330a and 330b. The inside of 232 and the suction device 340 are connected to each other.

That is, the first and second particle removal devices 320a and 320b are respectively provided in the first and second exhaust holes 239a and 239b, which are the connecting portions of the lifting post 232 and the first and second pipes 330a and 330b. It is provided.

Accordingly, the air inside the lifting post 232 including the fine dust or particles caused by the debris generated in the lifting post 232 may be discharged by the pressure of the suction device 340. In the process of being sucked into the suction device 340 through 330b, fine dust or particles are filtered by the first and second particle removal devices 320a and 320b.

Therefore, since there is no fine dust or particles inside the lifting post 232, fine dust or particles are scattered into the stocker (100 in FIG. 1) through the opening (232a in FIG. 2) of each lifting post 232. (飛散) can be prevented.

In this case, the first and second particle removal devices 320a and 320b include filters (not shown) in which fine dust or particles are accumulated.

Here, the first and second particle removal devices 320a and 320b having a filter (not shown) may be used to filter fine dust or particles in the process of discharging the air inside each lifting post 232 to the outside. Although not limited to the structure and installation form, for example, a built-in HEPA (High Efficiency Particulate Arrestor) filter is made of synthetic fibers and has an effective range of removing particles of 0.3 micron or more. You may.

In addition, the filter (not shown) may be at least one selected from a filtration filter having a microstructure structure and a photocatalyst filter including titanium dioxide (TiO 2) in addition to the HEPA filter, or a combination thereof.

At this time, the filtration filter has a microstructure structure made of synthetic resin and the like, and serves to filter out dust having relatively large particles from the atmosphere. It contains titanium dioxide with oxidizing power to decompose and remove organic compounds such as nitrogen oxide, exhaust gas and various bacteria in the atmosphere.

The air is thus cleanly purified in the course of these at least one filter (not shown).

In addition, the suction device 340 is generally used in the construction site, and used to discharge the smog or flow gas, the second embodiment of the present invention uses the first and second particle removal device (320a, 320b) By further provided, it can be used for a clean room, and by sucking the air inside the lifting post 232 by the pressure generated during the rotation of the motor of the suction device 340 to discharge to the outside.

At this time, the first and second pipes 330a and 330b connecting the first and second particle removing devices 320a and 320b and the suction device 340 are lifted by the pressure of the suction device 340. In the process of sucking the air therein serves as a passage that the air is transferred to the suction device 340.

Here, the air exhaust device 300 is preferably operated when the lifting frame 234 is vertically moved by lifting, it is preferable to operate for a predetermined period periodically even when there is no movement of the lifting frame 234.

As described above, the stacker robot 200 of the present invention is provided at both ends along the longitudinal direction of the pair of lifting posts 232 provided with a circulation chain 231 therein to vertically move the lifting frame 234 by lifting. Each of the first and second particle removal devices 320a and 320b is provided, and the first and second particle removal devices 320a and 320b are connected to the first and second pipes 330a and 330b, respectively. 232) by providing an air exhaust device 300 consisting of a suction device 340 for discharging the air to the outside, the aluminum provided inside each lifting post 232 during vertical movement by lifting the lifting frame 234 or Even if a large number of foreign matters are generated from the circulation chain 231 made of a metal material such as stainless steel, it is possible to prevent such foreign matters from scattering into the stocker (100 of FIG. 1).

Accordingly, the substrate located inside the stocker (100 of FIG. 1) or the clean room may be prevented from being contaminated by fine dust or particles generated by the foreign matter.

At this time, some air inside the lifting post 232 which is not discharged to the outside through the air exhaust device 300 may contain fine dust or particles, and some air containing such fine dust or particles may also be lifted from each lifting post. It is possible to prevent scattering into the stocker (100 in FIG. 1) through the opening 232a in FIG. 2.

That is, the air inside the lifting post 232 is sucked into the suction device 340 through the first and second pipes 330a and 330b to have a pressure difference with the air outside the lifting post 232. As the air inside the post 232 is discharged to the outside, the pressure of the air inside the lifting post 232 has a lower pressure than the pressure of the outside air.

Thus, the air inside the lifting post 232 does not flow out of the lifting post 232 through the opening (232a of FIG. 2) of the lifting post 232.

Accordingly, some air in the interior of the lifting post 232 which is not discharged to the outside through the air exhaust device 300 is also inside the stocker (100 in FIG. 1) through the opening (232a in FIG. 2) of each lifting post 232. It is possible to prevent scattering.

Meanwhile, when the length of the lifting post 232 is long, when the first and second pipes 330a and 330b are connected only to both ends of the reporting post 232 in the longitudinal direction, the air inside the reporting post 232 is supplied. Since it may not be smoothly discharged, as shown in FIG. 5, the third exhaust hole 239c including the third particle removing device 320c is formed in the middle region of the reporting post 232, and a third thereof is formed. One end of the exhaust hole 239c may further connect the third pipe 330c connected to the suction device 340.

The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.

231: circulation chain, 232: lifting post, 233a: spool, 233b: chain sprocket
234: lifting frame, 235: auxiliary loop belt, 237: counterweight
239a and 239b: first and second exhaust holes and 240 arm portions
300: air exhaust device, 320a, 320b: first and second particle removal device
330a, 330b: first and second pipes, 340: suction device

Claims (10)

A stacker robot for transferring cassettes of a flat panel display device,
A main body;
A traveling part disposed below the main body and moving along a trolley rail;
A pair of lifting posts (lifting posts) upright on both sides of the main body facing each other;
An air piping device for discharging the air inside the lifting post to the outside;
A lifting frame provided horizontally between the pair of lifting posts and lifting up and down along the longitudinal direction of the lifting posts;
Arm parts rotatable, retractable and stretchable on the lifting frame
Stacker robot for cassette transport comprising a.
The method of claim 1,
The air piping device includes first and second pipes connected to first and second exhaust holes respectively provided at both ends in the longitudinal direction of the lifting post, and suction devices connected to one end of the first and second pipes. Stacker robot for cassette transport.
The method of claim 2,
A stacker robot for cassette transfer, wherein a first and a second particle removing device including a filter are respectively provided between the first and second exhaust holes and the first and second pipes, respectively.
The method of claim 1,
The air piping device cassette stacker robot including a third exhaust hole provided in the center of the lifting post and the third pipe connecting the suction device.
The method of claim 4, wherein
A stacker robot for cassette transport, comprising a third particle removal device including a filter between the exhaust hole and the third pipe.
The method of claim 1,
The air piping device is provided at both ends in the longitudinal direction of the lifting post, the cassette transfer stacker robot consisting of a first and a second fan filter unit, each including a filter.
The method of claim 1,
Each lifting post has an opening in one direction facing each other, and the opening is provided with a dustproof film cassette stacker robot.
The method of claim 1,
Stacker robot for cassette transport having a chain that rotates in the longitudinal direction in each of the lifting post.
The method of claim 8,
The lifting frame is connected to the chain stacker robot for lifting and lowering.
The method of claim 1,
The arm portion includes a rotating disk mounted on the lifting frame, an arm contracting and extending in a state where one end is coupled to the rotating disk, and a catch plate coupled to the distal end of the arm to support a cassette. Stacker robot for cassette transport.

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