JP2005145628A - Cassette for glass substrate - Google Patents

Cassette for glass substrate Download PDF

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Publication number
JP2005145628A
JP2005145628A JP2003384458A JP2003384458A JP2005145628A JP 2005145628 A JP2005145628 A JP 2005145628A JP 2003384458 A JP2003384458 A JP 2003384458A JP 2003384458 A JP2003384458 A JP 2003384458A JP 2005145628 A JP2005145628 A JP 2005145628A
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cassette
wire
seat
glass substrate
frame
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JP2003384458A
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Japanese (ja)
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Akira Shirai
明 白井
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Shirai Tech Ltd
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Shirai Tech Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To load a plurality of glass substrates in a multi-stage state to prevent the occurrence of distortion, and to deliver the substrates one by one. <P>SOLUTION: A cassette receiving seat 11 with an opening 4 with open upper and lower faces, which is guided by a guide means in a vertical direction on a seat material 2 is provided, and the outside upper edge of the opening of the cassette receiving seat is configured to receive and suspend the lower edge thereof. Furthermore, a wire cassette B is formed of a frame 10 in which at least the delivering side face and the lower face are open in the opposed two anteroposterior faces, and wire 11 extended in a multi-stage state in the vertical direction while supporting each end juxtaposed with prescribed intervals left in the anteroposterior direction in the opposed left and right sides of the frame. Roller conveyors 21 with rollers disposed in parallel between the wire are provided above the seat material without blocking the upward and downward move of the cassette receiving seat and the wire cassette, and a proper lift 12 lifting the receiving seat in the vertical direction at a pitch equal to the extension pitch of the vertical wire is provided. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

この発明は、多段状に搭載してある複数板のガラス基板を一枚毎払い出したり、多段状に複数枚のガラス基板を取り上げるガラス基板用カセットに関する。   The present invention relates to a glass substrate cassette that pays out a plurality of glass substrates mounted in multiple stages one by one or picks up a plurality of glass substrates in multiple stages.

ガラス基板の取り扱い(例えば、次工程で切断線を入れ、入れた切断線の部分を折割する加工や辺縁の面取り研磨する加工のため)に際しては、各ガラス基板を互いに接触しないようにカセットに出入収容することが必要になる。   When handling glass substrates (for example, cutting lines in the next step, for processing to break the inserted cutting lines or chamfering the edges), cassettes should be used so that the glass substrates do not touch each other. It is necessary to enter and exit.

そこで、この目的のカセットとして、箱形フレームの対向する1対の側面を溝付側板で形成する。   Therefore, as a cassette for this purpose, a pair of opposite side surfaces of the box-shaped frame is formed by grooved side plates.

この溝付側板としては、カセット内部側に向けて所定のピッチで上下に並行する多段のリブ状の棚片を張り出して形成する。   The grooved side plate is formed by projecting multi-stage rib-shaped shelf pieces that are parallel to each other at a predetermined pitch toward the inside of the cassette.

上記の棚片を張り出して形成する要因は、左右の棚片間にロボットアームを出入することにある。   The reason for forming the above-mentioned shelf pieces by extension is that the robot arm is moved in and out between the left and right shelf pieces.

そして、ロボットアームによって取り上げたガラス基板の二辺の下面を棚片により受架(支えて)して、カセット内に多段にガラス基板を収容するようになっている(例えば、特許文献1)。   And the lower surfaces of the two sides of the glass substrate picked up by the robot arm are supported (supported) by shelf pieces, and the glass substrates are accommodated in multiple stages in the cassette (for example, Patent Document 1).

勿論、多段に収容してあるガラス基板は、ロボットアームによって払い出される。   Of course, the glass substrates accommodated in multiple stages are paid out by the robot arm.

特許第3366502号公報Japanese Patent No. 3366502

ところで、特許文献1の構造のものは、近時ガラス基板の大型化にともない棚片の張り出し形式のカセットでは、ガラス基板を受架する棚片の面積が小さいため、大型化による重量の増加のためガラス基板に歪みが発生する。   By the way, the thing of the structure of patent document 1 is because the area of the shelf piece which supports a glass substrate is small in the cassette of the shelf extension type | formula with the recent enlargement of a glass substrate, Therefore The increase of the weight by enlargement is carried out. Therefore, distortion occurs in the glass substrate.

このため、大型化なガラス基板に使用することができない。   For this reason, it cannot be used for a large glass substrate.

なお、最近では上記の歪みの発生を解消するため昇降フレーム内に(払い出し方向に対し直角に交差し、かつ前後並列するワイヤを多段状に張設したものがあり、そしてガラス基板の次加工の手前のローラコンベヤの途中に設置され、昇降フレームは、ローラコンベヤの下の昇降台にセットして、バッファ用と使用されている。   Recently, in order to eliminate the occurrence of the above-mentioned distortion, there is a lifting frame (in which a wire crossing at a right angle to the paying-out direction and parallel in the front-rear direction is stretched in multiple stages, and the next processing of the glass substrate It is installed in the middle of the front roller conveyor, and the lifting frame is set on a lifting platform below the roller conveyor and used as a buffer.

しかしながら、このような構造によると、ローラコンベヤの途中に組み込んであるので、ワイヤカセットとして他の場所への移動ができない。すなわち、昇降フレームを移動(撤去)しようとしても昇降台がコンベヤフレーム内に据え付けてあることが起因する。   However, according to such a structure, since it is incorporated in the middle of the roller conveyor, it cannot be moved to another place as a wire cassette. In other words, even if it is attempted to move (remove) the lifting frame, the lifting platform is installed in the conveyor frame.

そこで、この発明の課題は、大型なガラス基板であってもガラス基板に歪みが発生することなく多段にガラス基板を取り上げ、また払い出すことができるカセットを提供することにある。   Accordingly, an object of the present invention is to provide a cassette capable of picking up and discharging glass substrates in multiple stages without causing distortion of the glass substrate even if it is a large glass substrate.

上記のような課題を解決するために、この発明は、座材上で適宜のガイド手段により上下方向に案内されると共に、上下面が開放する開口を有するカセット受座を設け、このカセット受座の上記開口の外側上縁によって下縁を受架すると共に、前後の対向二面の少なくとも払い出し側面及び下面が開放するフレームと、このフレームの左右対向二辺に前後に所定の間隔を存して並列するそれぞれの端を支持して上下に多段状に張設したワイヤとでワイヤカセットを形成し、上記座材の上方に上記カセット受座及びワイヤカセットの昇降を阻害しないように上記ワイヤ間に並列各ローラを配置したローラコンベヤを設け、上記受座を上記上下ワイヤの張設ピッチに等しいピッチで上下方向に昇降させる適宜の昇降装置を設けた構成を採用する。   In order to solve the above-described problems, the present invention provides a cassette seat that is guided in the vertical direction on a seating material by appropriate guide means and has an opening that opens up and down. The frame has a lower edge that is supported by the outer upper edge of the opening, and at least the payout side surface and the lower surface of the two front and rear opposing surfaces, and a predetermined interval in the front and rear sides of the two left and right opposing sides of the frame. A wire cassette is formed by wires extending in a multi-stage shape, supporting each end in parallel, and above and below the seating material, so that the cassette seat and the wire cassette are not hindered from rising and falling. A configuration is provided in which a roller conveyor in which the rollers are arranged in parallel is provided, and an appropriate lifting device for moving the seat up and down at a pitch equal to the tension pitch of the upper and lower wires is provided.

この発明において、ワイヤカセットの各段のワイヤによってガラス基板の下面を支承して、フレーム内に多数枚のガラス基板を収納する。   In this invention, the lower surface of the glass substrate is supported by the wire of each stage of the wire cassette, and a large number of glass substrates are accommodated in the frame.

ガラス基板の収納ずみワイヤカセットの周囲下縁をカセット受座の周囲上縁(上面)に受架させる。   The lower peripheral edge of the glass substrate storage wire cassette is placed on the upper peripheral edge (upper surface) of the cassette seat.

この状況下で昇降装置の運転によりワイヤカセットと共にカセット受座を1ピッチ降送する。   Under this circumstance, the cassette seat is moved down by 1 pitch together with the wire cassette by the operation of the lifting device.

すると、最下位ガラス基板の下面はローラコンベヤによって受け止められ、受け止めたガラス基板は、駆動ローラコンベヤによって払い出される。   Then, the lower surface of the lowest glass substrate is received by the roller conveyor, and the received glass substrate is discharged by the driving roller conveyor.

以上のように、この発明のガラス基板用カセットによれば、カセット受座上にワイヤカセットを載置し、昇降装置の運転によってワイヤカセットを間歇的に降送することによってワイヤ上のガラス基板の最下位から順次ローラコンベヤによって払い出すことができると共に、並列多数本のワイヤの支承によってガラス基板に歪みが発生しない。   As described above, according to the glass substrate cassette of the present invention, the wire cassette is placed on the cassette seat, and the wire cassette is intermittently moved down by the operation of the lifting device, whereby the glass substrate on the wire is placed. The glass substrate can be discharged sequentially from the lowest position, and the glass substrate is not distorted due to the support of the parallel wires.

また、下流側コンベヤと上流側との間にガラス基板用カセットを据え付けると、下流側加工機(切断機や折割機など)にトラブルが発生した際、上流から下流方向に搬送途中のガラス基板をフレームの間歇上昇によってフレームの各ワイヤ上に多段状にガラス基板を取り入れることもでき、そしてワイヤカセットを撤去し、かつローラコンベヤの下方にカセット受座を待避させておくと、ガラス基板用カセットのローラコンベヤが搬入路として使用することもできる。   In addition, if a glass substrate cassette is installed between the downstream conveyor and the upstream side, when a trouble occurs in the downstream processing machine (such as a cutting machine or a folding machine), the glass substrate being transferred from the upstream to the downstream direction. The glass substrate can be taken in multiple stages on each wire of the frame by raising the frame intermittently, and when the wire cassette is removed and the cassette seat is retracted below the roller conveyor, the glass substrate cassette The roller conveyor can also be used as a carry-in path.

以下、この発明の実施形態を図1乃至図4に基づいて説明する。   Hereinafter, an embodiment of the present invention will be described with reference to FIGS.

図1から図3は、この発明のガラス基板用カセットAを示すもので、1は座材2上で適宜のガイド手段3で上下方向に案内する受座で、この受座1には、周縁部を残して上下面を開放させた開口4が設けてある。   FIGS. 1 to 3 show a glass substrate cassette A according to the present invention. Reference numeral 1 denotes a seat guided on a seat member 2 in a vertical direction by an appropriate guide means 3. An opening 4 is provided in which the upper and lower surfaces are opened leaving a portion.

上記のガイド手段3は、例えば図示の場合(図2及び図3参照)、座材2の辺縁から立設した側材5の四隅内側面に垂直なレール材6を設けて、このレール材6に受座1の四隅に設けてある溝車7を係合してある。   In the illustrated case (see FIGS. 2 and 3), the guide means 3 is provided with rail members 6 perpendicular to the inner surfaces of the four corners of the side member 5 erected from the edge of the seat member 2. 6 is engaged with a grooved wheel 7 provided at the four corners of the seat 1.

また、受座1上には、受座1の上面周縁部により下面周縁部を受架させてワイヤカセットBが載置してある。   In addition, on the seat 1, the wire cassette B is placed with the lower surface periphery thereof supported by the upper surface periphery of the seat 1.

上記のワイヤカセットBは、前後の対向二面の少なくとも払い出し側面及び下面に周縁以外を開放させた開口8、9を有するフレーム10と、このフレーム10の左右対向二辺に両端を支持させて前後に所定の間隔を存して並列状に、かつ上下に多段のガラス基板aの下面支承(受止め)のワイヤ11とで構成されている。   The above-described wire cassette B has a frame 10 having openings 8 and 9 that are open at least on the dispensing side surface and the lower surface of the two front and rear facing surfaces except for the periphery, and both ends are supported by the two left and right facing sides of the frame 10 Are arranged in parallel with a predetermined distance between them and a wire 11 for supporting the lower surface (receiving) of the multistage glass substrate a vertically.

すると、ワイヤカセットB内に多数枚のガラス基板aを収納することができる。   Then, a large number of glass substrates a can be stored in the wire cassette B.

上記の開口8は、図示の場合フレーム10の前後両面に設けて、前面を払い出し用とし、後面を取り上げ用としてある。   In the illustrated case, the openings 8 are provided on both front and rear surfaces of the frame 10 so that the front surface is used for dispensing and the rear surface is used for picking up.

さらに、上記の受座1は、適宜の昇降装置12によって上下の張設ワイヤ11のピッチに等しいピッチで昇降させるようになっている。   Further, the seat 1 is moved up and down at a pitch equal to the pitch of the upper and lower tension wires 11 by an appropriate lifting device 12.

上記の昇降装置12は、図示の場合座材2上の四隅に可逆回転可能に軸承して立設した雄ネジ13と、フレーム10の下部四隅に取付けてそれぞれの雄ネジ13にねじ込む雌ネジ14と、第1モーター15の可逆運転によって歯車(図示省略)、回転軸、雄ネジ14のスプロケット間にかけ渡したチェーンからなる伝達機構16とで構成したが、その他の伝達方式で昇降させることもできる。   In the illustrated case, the elevating device 12 includes male screws 13 that are erected and supported at four corners of the seating member 2 so as to be reversibly rotatable, and female screws 14 that are attached to the lower four corners of the frame 10 and are screwed into the male screws 13. And a transmission mechanism 16 composed of a gear (not shown), a rotating shaft, and a chain spanned between the sprockets of the male screw 14 by reversible operation of the first motor 15, but can be moved up and down by other transmission methods. .

そして、昇降は、払い出し後フレーム10を1ピッチ降下させ、取り入れ後フレーム10を1ピッチ上昇させるように制御させるようにしてある。   The raising / lowering is controlled such that the frame 10 is lowered by 1 pitch after being dispensed and the frame 10 is raised by 1 pitch after being taken in.

また、座材2の上方には、受座1及びワイヤカセットBの昇降を阻害しないで開口4の下方に納まり、かつ所定のワイヤ11間に(図示の場合は、各ワイヤ11間の下方に配置したが、限定されない)位置するローラコンベヤ21が(図示の場合回転ロールの並列する)設けてある。   Further, above the seating material 2, the seat 1 and the wire cassette B are not hindered from rising and falling, and are placed below the opening 4, and between predetermined wires 11 (in the illustrated case, below each wire 11. A roller conveyor 21 is provided (although arranged but not limited) (in the case of rotating rolls in parallel).

図中22は、各ローラコンベヤ21の可逆運転の第2モーター23からの伝達機構、24はローラコンベヤ21の支持脚材である。   In the figure, 22 is a transmission mechanism from the second motor 23 for reversible operation of each roller conveyor 21, and 24 is a support leg of the roller conveyor 21.

上記のように構成すると、受座1上にワイヤカセットBを載置する(このとき、受座1の上面受架部に対しワイヤカセットBの下面との重なり面が正確に位置されるよう位置決めを設けておくとよい)。   If comprised as mentioned above, the wire cassette B is mounted on the receiving seat 1 (At this time, it positions so that the overlapping surface with the lower surface of the wire cassette B may be correctly located with respect to the upper surface receiving part of the receiving seat 1. Should be provided).

次に、昇降装置12の運転によってワイヤカセットBのフレーム10と共に受座1を間歇的に1ピッチ降下する。   Next, the seat 1 is intermittently lowered by 1 pitch together with the frame 10 of the wire cassette B by the operation of the lifting device 12.

降下にともない最下位のガラス基板aがローラコンベヤ21上に荷受けされ、その後にローラコンベヤ21の運転により図4に示すようにローラコンベヤ21上のガラス基板aが払い出され、コンベヤ31上に搬出される。   As the glass substrate a descends, the lowest glass substrate a is received on the roller conveyor 21, and then the glass substrate a on the roller conveyor 21 is discharged as shown in FIG. Is done.

以上の繰り返しによりワイヤカセットB内のガラス基板aを順次払い出す。   By repeating the above, the glass substrates a in the wire cassette B are sequentially discharged.

上記ガラス基板用カセットAの使用は、例えば、図5に示すように、ガラス基板aの切断機Xの手前に入れ替え移動可能に設置し、払い出したガラス基板aをコンベヤ31から切断機Xに供給して切断線を入れ、この切断線の入ったガラス基板aを前方の折割機Yに供給する以外に、ガラス基板aの次加工に供給するコンベヤの途中に介在し、次加工の部分でトラブルが発生したとき、フレーム10の後面開口8から進入したガラス基板aをローラコンベヤ21上に荷受けし、その後に受台1と共にフレーム10を1ピッチ上昇させてワイヤ11上にガラス基板aを受け取る繰り返しによって、ワイヤカセットB内にガラス基板aをストックする使用もできる。   For example, as shown in FIG. 5, the glass substrate cassette A is installed so that it can be replaced and moved in front of the cutting device X for the glass substrate a, and the discharged glass substrate a is supplied from the conveyor 31 to the cutting device X. In addition to supplying a cutting line and supplying the glass substrate a containing the cutting line to the front folding machine Y, it is interposed in the middle of the conveyor that supplies the next processing of the glass substrate a, When trouble occurs, the glass substrate a that has entered from the rear opening 8 of the frame 10 is received on the roller conveyor 21, and then the frame 10 is raised by one pitch together with the cradle 1 to receive the glass substrate a on the wire 11. The glass substrate a can be stocked in the wire cassette B by repetition.

この発明の実施の形態を示す縦断正面図Longitudinal front view showing an embodiment of the present invention 同上の平面図Same as above 同縦断側面図Same vertical side view 払い出しを示す縦断拡大側面図Longitudinal enlarged side view showing payout 使用例を示す平面図Plan view showing usage example

符号の説明Explanation of symbols

A ガラス基板用カセット
a ガラス基板
B ワイヤカセット
1 受座
2 座材
3 ガイド手段
4 開口
5 側材
6 レール材
7 溝車
8、9 開口
10 フレーム
11 ワイヤ
12 昇降装置
13 雄ネジ
14 雌ネジ
15 第1モーター
16 伝達機構
21 ローラコンベヤ
22 伝達機構
23 第2モーター
A Glass substrate cassette a Glass substrate B Wire cassette 1 Seat 2 Seat material 3 Guide means 4 Opening 5 Side material 6 Rail material 7 Groove wheel 8, 9 Opening 10 Frame 11 Wire 12 Lifting device 13 Male screw 14 Female screw 15 First 1 motor 16 transmission mechanism 21 roller conveyor 22 transmission mechanism 23 second motor

Claims (1)

座材上で適宜のガイド手段により上下方向に案内されると共に、上下面が開放する開口を有するカセット受座を設け、このカセット受座の上記開口の外側上縁によって下縁を受架すると共に、前後の対向二面の少なくとも払い出し側面及び下面が開放するフレームと、このフレームの左右対向二辺に前後に所定の間隔を存して並列するそれぞれの端を支持して上下に多段状に張設したワイヤとでワイヤカセットを形成し、上記座材の上方に上記カセット受座及びワイヤカセットの昇降を阻害しないように上記ワイヤ間に並列各ローラを配置したローラコンベヤを設け、上記受座を上記上下ワイヤの張設ピッチに等しいピッチで上下方向に昇降させる適宜の昇降装置を設けたことを特徴とするガラス基板用セット。
A cassette seat is provided that is guided in the vertical direction on the seat by appropriate guide means and has an opening that opens up and down, and the lower edge is supported by the outer upper edge of the opening of the cassette seat. A frame having at least two payout side surfaces and a lower surface of the front and rear facing surfaces open, and two ends facing the left and right facing sides of the frame are arranged in parallel at a predetermined interval in the front and back, and are stretched in a multi-stage manner. A wire cassette is formed with the provided wire, and a roller conveyor in which parallel rollers are arranged between the wires is provided above the seat so as not to hinder the raising and lowering of the cassette. A glass substrate set comprising an appropriate lifting device that moves up and down at a pitch equal to the tension pitch of the upper and lower wires.
JP2003384458A 2003-11-14 2003-11-14 Cassette for glass substrate Pending JP2005145628A (en)

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CN102308376A (en) * 2009-02-06 2012-01-04 夏普株式会社 Cassette
JP2012222051A (en) * 2011-04-05 2012-11-12 Kawasaki Heavy Ind Ltd Plate-like member transfer system, plate-like member transfer method, plate-like member housing system and plate-like member housing method
CN103303676A (en) * 2013-06-18 2013-09-18 深圳市华星光电技术有限公司 Automation equipment for picking and placing large-sized liquid crystal substrate
KR101421435B1 (en) * 2013-03-05 2014-08-13 주식회사 선익시스템 Chamber for Storaging Substrates
CN114318278A (en) * 2021-12-24 2022-04-12 南通玖方新材料科技有限公司 Silicon chip bearing device with adjustable flatness

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KR100711290B1 (en) 2005-09-26 2007-04-25 세메스 주식회사 Apparatus for transferring glass substrate
JP2008164390A (en) * 2006-12-27 2008-07-17 Toppan Printing Co Ltd Wire cassette inspection method, its inspection device, loader device, unloader device
CN102308376A (en) * 2009-02-06 2012-01-04 夏普株式会社 Cassette
JPWO2010090276A1 (en) * 2009-02-06 2012-08-09 シャープ株式会社 cassette
JPWO2010134492A1 (en) * 2009-05-20 2012-11-12 シャープ株式会社 cassette
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WO2010134492A1 (en) * 2009-05-20 2010-11-25 シャープ株式会社 Cassette
CN102009846A (en) * 2010-09-30 2011-04-13 东莞宏威数码机械有限公司 Locking type turning transmission platform device
CN102001525A (en) * 2010-09-30 2011-04-06 东莞宏威数码机械有限公司 Locked elevating translational transmission equipment
CN102009846B (en) * 2010-09-30 2013-04-03 东莞宏威数码机械有限公司 Locking type turning transmission platform device
JP2012222051A (en) * 2011-04-05 2012-11-12 Kawasaki Heavy Ind Ltd Plate-like member transfer system, plate-like member transfer method, plate-like member housing system and plate-like member housing method
KR101421435B1 (en) * 2013-03-05 2014-08-13 주식회사 선익시스템 Chamber for Storaging Substrates
CN103303676A (en) * 2013-06-18 2013-09-18 深圳市华星光电技术有限公司 Automation equipment for picking and placing large-sized liquid crystal substrate
CN114318278A (en) * 2021-12-24 2022-04-12 南通玖方新材料科技有限公司 Silicon chip bearing device with adjustable flatness

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