KR101421435B1 - Chamber for Storaging Substrates - Google Patents

Chamber for Storaging Substrates Download PDF

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Publication number
KR101421435B1
KR101421435B1 KR1020130023592A KR20130023592A KR101421435B1 KR 101421435 B1 KR101421435 B1 KR 101421435B1 KR 1020130023592 A KR1020130023592 A KR 1020130023592A KR 20130023592 A KR20130023592 A KR 20130023592A KR 101421435 B1 KR101421435 B1 KR 101421435B1
Authority
KR
South Korea
Prior art keywords
cassette
substrate
substrate stocker
stocker
fixing
Prior art date
Application number
KR1020130023592A
Other languages
Korean (ko)
Inventor
이현성
김성호
Original Assignee
주식회사 선익시스템
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 선익시스템 filed Critical 주식회사 선익시스템
Priority to KR1020130023592A priority Critical patent/KR101421435B1/en
Application granted granted Critical
Publication of KR101421435B1 publication Critical patent/KR101421435B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette

Abstract

The present invention relates to a substrate storage apparatus capable of stably loading a substrate in a cassette, facilitating an operator in loading or unloading the cassette into and out of a substrate stocker, and capable of raising and lowering a cassette A cassette having a plurality of slots for loading a substrate thereon; a substrate stocker for loading or unloading the cassette; and when the cassette is carried into or out of the substrate stocker, A cassette moving device installed on the inner bottom surface of the substrate stocker for easily moving the substrate stocker; a cassette lifting and lowering device disposed at a lower portion of the substrate stocker and penetrating the center of the substrate stocker to elevate the cassette to a predetermined height; , And a cassette provided at the upper end of the cassette elevating device Which comprises a plate.
According to the present invention, it is possible to provide a cassette which is easy to move and handle, and it is possible to carry the cassette to the substrate stocker or to carry it out easily, thereby improving the efficiency of the operator.

Description

{Chamber for Storaging Substrates}

The present invention relates to a substrate storage chamber, and more particularly, to a substrate storage chamber, in which a substrate used for an OLED deposition process is loaded on a cassette stably without shaking, and a cassette To a substrate storage chamber capable of adjusting the height of the cassette when the cassette is carried in the substrate stocker.

A cassette loaded with a plurality of substrates is loaded into a substrate storage chamber contained in a cluster vacuum deposition apparatus to load a substrate into a process chamber in which an OLED vacuum deposition process is performed. The cassette is provided with a plurality of slots in which a plurality of substrates can be loaded. The cassette is loaded into a substrate stocker for loading the substrate into the chamber in which the deposition process is performed after the substrate is loaded in the cassette.

Korean Laid-Open Patent Application No. 10-2009-0069544 discloses a cassette loading device. However, since the conventional cassette has no structure capable of fixing the substrate when the substrate is loaded in the slot of the cassette, the substrate is not fixed in position There was a problem that it was pushed.

Korean Patent Laid-Open Publication No. 10-1999-025710 discloses a cassette structure for an LCD panel. However, since the cassette has a structure in which all the surfaces except for the opening portion into which the substrate is inserted are closed, There were difficulties for workers when bringing in or out of stocker.

Korean Patent Laid-Open No. 10-2007-0054311 discloses a semiconductor manufacturing facility for preventing wafer contamination caused by particles generated in a load lock chamber. However, since there is no means for the cassette to be easily loaded into the load lock chamber when the cassette is loaded into the load lock chamber, the operator loads a large number of substrates and loads the heavy cassette into the load lock chamber .

It is an object of the present invention to provide a substrate storage chamber in which a step is formed in a slot of a cassette so that the substrate can be stably loaded without being shaken by the cassette.

Further, by providing a roller on the bottom surface of the substrate stocker, the cassette on which the substrate is mounted can be brought into the substrate stocker before the substrate used during the OLED deposition process is transferred to the process chamber, or after the deposition process, And to provide a substrate storage chamber in which the operator can move the cassette with less force when taking out the cassette.

There is provided a substrate storage chamber capable of raising and lowering the cassette to a predetermined height so that the cassette lifting device is installed at the lower part of the substrate stocker and the substrate loaded on the cassette is put into each process chamber one by one at the position where the process is performed It has its purpose.

In order to achieve the above object, according to the present invention, there is provided a cassette comprising: a cassette having a plurality of slots for loading a substrate; a substrate stocker on which the cassette is loaded or unloaded; A cassette moving means provided on an inner bottom surface of the substrate stocker so that the cassette can be easily moved when the cassette is taken out from the substrate stocker; And a plate provided on an upper end of the cassette elevating device and on which the cassette is mounted.

In the present invention, a step may be formed in the slot of the cassette so that the substrate does not slip and is loaded without shaking.

In addition, a lower center of the cassette front is provided with a latching device which engages with the plate so that the cassette to be mounted on the plate in the substrate stocker does not come off the plate when the cassette is loaded into the substrate stocker through the moving means. Can be installed.

In addition, the cassette may be provided with a handle for the convenience of the user when carrying or moving the cassette.

In order to minimize the weight of the cassette, the cassette may have a through portion formed on the upper and lower sides and left and right sides.

In addition, three perforations may be formed on the top, bottom, left and right sides of the cassette.

In the present invention, the cassette moving means may be provided on the bottom surface of the inside of the substrate stocker with a plurality of rollers in a block provided at a distance corresponding to the width of the cassette.

Here, the roller may be provided with a horizontal movement roller contacting both edges of the lower surface of the cassette, and a guide roller contacting the lower side of the cassette.

The moving means may further include a fixing device for fixing the cassette loaded through the moving means.

In addition, the fixing device may be provided in a form of a rod that is hinged to a fixed block provided at one side of the block and rotatable.

In the present invention, the cassette lifting and lowering mechanism comprises a driving means disposed at the lower portion, a driving shaft for driving the cylinder by a driving force by the driving means, a supporting shaft for supporting the driving shaft, And may comprise a wrapping tube.

Here, the support shafts may be provided at four equal intervals around the drive shaft.

In addition, a sealing device may be provided on the bottom of the substrate stocker to block external air from entering the inside of the substrate stocker in a vacuum state at the upper end of the tube.

In addition, the upper surface of the plate may be provided with a plurality of fixing pins for fixing the position of the cassette.

According to the present invention as described above, a step is formed in a slot of a cassette, and the substrate can be stably loaded on the cassette without shaking.

In addition, the structure is modified to minimize the weight of the cassette within a range in which a plurality of substrates can be loaded, thereby reducing the weight of the cassette and providing a handle on the cassette, thereby facilitating an operator's work.

In addition, when rollers are mounted on the bottom surface of the substrate stocker to load a large number of substrates and carry the heavy cassettes to or from the substrate stocker, the operator can reduce the force and carry the cassettes or carry them out. There is an effect that can be increased.

In addition, a cassette lifting device capable of adjusting the height of the cassette carried in the substrate stocker is provided, and the height of the cassette can be adjusted so that the substrate is aligned with the position where each process chamber is to be inserted.

1 is a perspective view showing a cassette of the present invention.
2 is a perspective view showing a substrate storage chamber of the present invention.
3 is a perspective view showing the fixing device of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view showing a cassette of the present invention, FIG. 2 is a perspective view showing a substrate storage chamber of the present invention, and FIG. 3 is a perspective view showing a fixing apparatus of the present invention.

A substrate storage chamber according to an embodiment of the present invention includes a cassette 10 having a plurality of slots for loading substrates, a substrate stocker 20 for loading or unloading the cassettes 10, Cassette moving means provided on an inner bottom surface of the substrate stocker 20 so that the cassette 10 can be easily moved when the cassette 10 is carried into or out of the substrate stocker 20; A cassette lifting and lowering device 30 disposed at a lower portion of the stocker 20 and extending through the center of the bottom surface of the substrate stocker 20 to raise and lower the cassette 10 to a predetermined height, And a plate 40 provided at an upper end of the cassette 10 on which the cassette 10 is mounted.

As shown in FIG. 1, the cassette 10 is formed with a plurality of slots so that a plurality of substrates can be stacked.

A step 12 is formed in the slot so that when the substrate is loaded, the substrate can be fixed without slipping or shaking.

In addition, since the cassette 10 has a large weight when a plurality of substrates are loaded, it is difficult for the operator to move the cassette 10 on which the substrate is loaded.

Therefore, in order to minimize the weight of the cassette 10, a penetration portion 14 is formed on the upper and lower sides and left and right sides of the cassette 10.

In the embodiment of the present invention, the penetration portion 14 of the cassette 10 is formed into a rectangular shape having rounded corners, and three penetrating portions 14 are formed on each side.

The shape and the number of the penetrating portions 14 may be determined in consideration of the weight of the cassettes 10 mounted on the cassette 10, And the number and size of the penetration portions 14 may be different depending on the size of the cassette 10. [

The plurality of through portions formed in the cassette 10 not only minimizes the weight of the cassette 10, but also maximizes the efficiency of use of the cassette.

For example, it is possible to manually insert the substrates one by one without replacing the cassette, and it is possible to visually confirm the substrates when the substrates are introduced and discharged, and it is easy to ascertain the rising and falling positions or the right and left positions of the substrates.

In addition, by minimizing the weight of the cassette 10, when the operator loads and unloads the cassette 10 to the substrate stocker 20, it is possible to reduce the force and work on the cassette 10 I will let you.

In addition, the cassette 10 is provided with a handle 16 for facilitating the transportation or handling of the cassette 10. In the embodiment of the present invention, two cassettes 10 are provided at the same height.

2, in order to allow the cassette 10 to move easily within the substrate stocker 20 when the cassette 10 is carried into and out of the substrate stocker 20, 20 is provided with a cassette moving means.

In the embodiment of the present invention, the cassette moving means is provided with two blocks 22 on the bottom surface of the inside of the substrate stocker 20 at intervals of the width of the cassette 10, And a plurality of rollers 24 and 26 are provided.

The rollers 24 and 26 include a guide roller 26 contacting the lower side of the cassette 10 to set the moving direction when the cassette 10 is loaded and unloaded through the cassette moving means, And a horizontal movement roller 24 contacting both edges of the lower surface of the cassette 10 so that the cassette 10 is moved inside the substrate stocker 20. [

In the embodiment of the present invention, the guide rollers 26 and the horizontal movement rollers 24 are provided with a plurality of rollers at equal intervals. When the rollers 24 and 26 are installed too far apart, The cassette 10 is not pushed or pushed out by the rollers 24 and 26 and the horizontal movement roller 24 can not be supported by the weight of the cassette 10, It is preferable that the size of the rollers 24 and the number of the rollers 26 are designed in consideration of the weight and size of the rollers 10.

The moving means is provided with a fixing device 28 for fixing the cassette 10 carried in the substrate stocker 20 through the moving means.

3, the fixing device 28 is provided with a fixing block 28a protruding from one side of the block 22 of the cassette moving means and hinged to the upper end of the fixing block 28a There is provided a rod 28b which can be rotated.

The fixed bar 28b is vertically fixed to the fixed block 28a when the cassette 10 is loaded and then rotated when the cassette 10 is loaded into the substrate stocker 20, So that the cassette 10 is fixed at the lower part of the front surface of the cassette 10.

The cassette 10 is mounted on the plate 40 in the substrate stocker 20 when the cassette 10 is brought into the substrate stocker 20 through the moving means in the lower center of the cassette 10 A hooking device 18 is provided to engage the front surface of the plate 40 so that the cassette 10 does not come off the plate 40.

In the present invention, the cassette lifting device 30 is disposed below the substrate stocker 20, and is installed through the center of the bottom surface of the substrate stocker 20.

The cassette lifting device 30 installed in this way is provided with a driving means 32 positioned at the bottom, a driving shaft (not shown) driving the driving means 32 by a driving force, A shaft 34 and a tube 36 surrounding the drive shaft exposed to the outside of the substrate stocker 20.

The drive shaft is installed to penetrate the bottom surface of the substrate stocker 20 so as to raise and lower the cassette 10 carried in the substrate stocker 20 to a predetermined height.

Here, the drive shaft is disposed inside the substrate stocker 20 in a vacuum state and outside the substrate stocker 20 exposed to the atmosphere.

Therefore, in order to block the inflow of outside air into the substrate stocker 20 in a vacuum state, the drive shaft located outside the substrate stocker 20 is wrapped with the tube 36, and the upper end of the tube 36 A sealing device (not shown) for sealing the bottom surface of the tube 36 and the substrate stocker 20 is provided.

In addition, a support shaft 34 for supporting the drive shaft is installed between the drive means 32 and the substrate stocker 20.

In addition, in the embodiment of the present invention, the support shafts 34 are provided at four equal intervals about the drive shaft.

A plate 40 on which the cassette 10 is mounted is installed on the upper end of the driving shaft of the substrate stocker 20. The plate 40 has a plurality of fixed A pin 42 is provided.

In the embodiment of the present invention, the plurality of fixing pins 42 are provided at the positions where the front and rear edges of the lower surface of the cassette 10 are positioned, thereby fixing the cassette 10 mounted on the plate 40 .

The lower portion of the fixing pin 42 is formed in a cylindrical shape so as to fix the cassette 10 mounted thereon in a shape of a truncated cone so that the fixing pin 42 can be easily mounted at a position where the cassette 10 is mounted. The shape and the number of the fixing pins 42 can be changed and changed as long as the cassette 10 can be stably fixed to the plate 40.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation in the embodiment in which said invention is directed. It will be understood by those skilled in the art that various changes and modifications may be made without departing from the scope of the appended claims.

10: cassette 12: step
14: penetration part 16: handle
18: Hanging device 20: Substrate stocker
22: Block 24: Horizontal moving roller
26: Guide roller 28: Fixing device
28a: Fixing block 28b: Fixing rod
30: elevating device 32: driving means
34: support shaft 36: tube
40: plate 42: fixing pin

Claims (14)

A cassette having a plurality of slots for loading substrates thereon;
A substrate stocker through which the cassette is loaded or unloaded;
Cassette moving means installed on an inner bottom surface of the substrate stocker so that the cassette is easily moved when the cassette is carried into or out of the substrate stocker;
A cassette lifting and lowering device disposed at a lower portion of the substrate stocker and installed to penetrate the center of the bottom surface of the substrate stocker to elevate the cassette to a predetermined height; And
And a plate provided on an upper end of the cassette elevator and on which the cassette is mounted,
And a latching device that engages with the plate so that the cassette to be mounted on the plate in the substrate stocker does not come off the plate when the cassette is loaded into the substrate stocker through the cassette moving means, Wherein the substrate holding chamber is provided with a substrate holding chamber. The method according to claim 1,
Wherein a stepped portion is formed in a slot of the cassette such that the substrate is not slipped and is loaded without shaking. delete The method according to claim 1,
Wherein the cassette is provided with a handle for user's convenience when transporting or moving the cassette. The method according to claim 1,
Wherein the cassette is provided with a penetrating portion on the upper and lower sides and lateral sides to minimize the weight of the cassette. The method of claim 5,
And three through-holes are formed on the upper and lower surfaces of the cassette and on the right and left sides, respectively. The method according to claim 1,
Wherein the cassette moving means is provided with a plurality of rollers on a block provided on a bottom surface of the substrate stocker at a distance corresponding to the width of the cassette. The method of claim 7,
Wherein the rollers are provided with a horizontal moving roller which is in contact with both edges of the lower surface of the cassette, and a guide roller which abuts the lower side of the cassette. The method according to claim 1,
Wherein the cassette moving means further comprises a fixing device for fixing the cassette carried through the moving means. The method according to claim 7 or 9,
Wherein the fixing device is hinged to a fixing block provided at one side of the block and is provided in a form of a rod capable of rotating. The method according to claim 1,
Wherein the cassette lifting and lowering mechanism comprises:
A drive shaft for driving the cylinder by the drive force by the drive means,
A support shaft for supporting the drive shaft,
And a tube surrounding the drive shaft exposed to the outside of the substrate stocker. The method of claim 11,
Wherein the support shafts are provided at four equal intervals around the drive shaft. The method of claim 11,
Wherein a sealing device is provided at the bottom of the substrate stocker to block external air from entering the interior of the substrate stocker in a vacuum state at the top of the tube. The method according to claim 1,
And a plurality of fixing pins for fixing the position of the cassette on the upper surface of the plate.
KR1020130023592A 2013-03-05 2013-03-05 Chamber for Storaging Substrates KR101421435B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020130023592A KR101421435B1 (en) 2013-03-05 2013-03-05 Chamber for Storaging Substrates

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Application Number Priority Date Filing Date Title
KR1020130023592A KR101421435B1 (en) 2013-03-05 2013-03-05 Chamber for Storaging Substrates

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101804721B1 (en) 2017-01-06 2017-12-06 정해만 Cassette for LCD substrate loading with rear opening/closing function for substrate inspection

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005145628A (en) * 2003-11-14 2005-06-09 Shiraitekku:Kk Cassette for glass substrate
KR20070112568A (en) * 2006-05-22 2007-11-27 엘지.필립스 엘시디 주식회사 Stocker system and method for controlling the same
KR20080048364A (en) * 2006-11-28 2008-06-02 엘지디스플레이 주식회사 Inter stk conveyor for inter bay system using thereof
KR20080074275A (en) * 2007-02-08 2008-08-13 박재홍 Cassette system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005145628A (en) * 2003-11-14 2005-06-09 Shiraitekku:Kk Cassette for glass substrate
KR20070112568A (en) * 2006-05-22 2007-11-27 엘지.필립스 엘시디 주식회사 Stocker system and method for controlling the same
KR20080048364A (en) * 2006-11-28 2008-06-02 엘지디스플레이 주식회사 Inter stk conveyor for inter bay system using thereof
KR20080074275A (en) * 2007-02-08 2008-08-13 박재홍 Cassette system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101804721B1 (en) 2017-01-06 2017-12-06 정해만 Cassette for LCD substrate loading with rear opening/closing function for substrate inspection

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