JP2010241510A - Automatic warehouse system and container transfer method for the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an automatic warehouse system achieving a compact clean room and high cleanliness; and a container transfer method for the same. <P>SOLUTION: In the automatic warehouse system installed in the clean room 11, a plurality of shelves 13 for storing the containers 14 are disposed vertically; a transfer means 16 for transferring the containers 14 between the shelves 13 and a loading/unloading port 12 is disposed parallel to the shelves 13; and a base member 24 extendable toward the shelves 13 is disposed in the transfer means 16. The base member 24 includes a stationary base 71; a sliding member 72 extendable in the longitudinal direction of the base 71; and a liftable claw member 73 disposed on the upper surface of the sliding member 72 and slidable in the longitudinal direction of the sliding member 72. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

The present invention relates to an automatic warehouse system and a container transfer method thereof, and more particularly to an automatic warehouse system and a container transfer method for transferring a container stored in a shelf to a carry-in / out port by a transfer means.

For an object to be treated with which dust and bacteria are not preferably adhered, for example, a glass substrate for FPD, a semiconductor wafer, food, medicine, and the like, various treatments may be performed in a clean room. When performing these processes, a plurality of objects to be processed are stored in advance in a container, the container is stored in a shelf in a clean room, and the container stored in the shelf is transferred to a loader by transfer means. There is an automatic warehouse system that loads and supplies workpieces in containers one by one to each processing apparatus (see, for example, Patent Document 1). Each object processed by the processing apparatus is collected in a container by an unloader, and the container is transported to another different automatic warehouse by a transfer means.

Here, as other prior art documents of the present application, there are Patent Documents 2 to 4 shown below.
JP 2006-256844 A JP-A-7-285615 JP 7-215414 A Japanese Patent Laid-Open No. 6-257311

By the way, in a conventional automatic warehouse system, a load raising / lowering type stacker crane is often used as a transfer means. The stacker crane includes a drive unit that moves along a travel guide rail, a guide frame unit that is provided perpendicular to the drive unit, and a fork that moves up and down along the guide frame unit. The fork that actually takes in and out the baggage (container), almost lifts the fork under the baggage (inserts) and lifts it, then lifts the fork and then pulls out the baggage. ing. For this reason, in order to lift a load with a fork, it was necessary to provide a space for lifting and a fork insertion space above and below the load. That is, there is a problem that a large space (dead space) is required above and below the luggage, which inevitably increases the size of the shelf. In an automatic warehouse system arranged in a clean room, the larger the size of the clean room, the higher the running cost. Therefore, space saving and compactness are required, and the smaller the size of the shelf, the better.
However, when a load raising / lowering stacker crane using a fork is used as a transfer means of an automatic warehouse system, there is a limit to the space saving and compactness of the clean room.

In addition, a guide roller may be provided on a shelf in which a luggage (container) is stored in order to facilitate loading and unloading and transportation of the luggage. There is dust. In an automatic warehouse system placed in a clean room, the small amount of dust generated during the transportation of this load adversely affects the cleanliness (cleanness) in the clean room. Yes.

An object of the present invention created in view of the above circumstances is to provide an automatic warehouse system capable of achieving a compact clean room and a high cleanliness, and a container transfer method thereof.

In order to achieve the above object, an automatic warehouse system according to the present invention is an automatic warehouse system provided in a clean room, storing a container for storing an object to be processed on a shelf, and transferring the container to a loading / unloading port. Is,
A plurality of the shelves for storing the containers are provided in a vertical direction,
The transfer means for transferring the container between the shelf and the carry-in / out port is provided in parallel with the shelf, and the transfer means is provided with a base member that is extensible toward the shelf side,
The base member is provided on a fixed base body extending toward the shelf side, a slide member that is extendable in the longitudinal direction of the base body, an upper surface of the slide member, and is slidable in the longitudinal direction of the slide member, and A claw member that can freely move up and down,
When the slide member is extended, the claw member is slid and the claw member is raised, the claw member is engaged with an engagement portion provided in advance on the bottom surface of the container on the transfer means side, and the container Is taken out.

According to the above configuration, when the container stored in the shelf is taken out by the base member, it is not necessary to lift the container like a conventional fork, so the dead space above and below the container is reduced and the size of the shelf is reduced. Can be reduced.

Here, the transfer means is a stacker crane, a travel guide rail provided parallel to the shelf, a drive unit that moves along the travel guide rail, and a portal shape provided perpendicular to the drive unit. A guide frame part, a lift that is engaged with the guide frame part and that can be raised and lowered along the guide frame part, the base member that is provided integrally with the lift, and a plurality of base members that are provided in parallel with the base member The guide member may be provided.

The shelf includes a column member extending vertically, a beam member extending horizontally, and a container support member supported by the beam member on which the container is placed, the container support member being hollow on both sides. A guide roller for guiding the transfer of the container to the both side frame members of the container support member is combined with the frame member so that the hollow frame member at the center is orthogonal to the frame member and communicated with each other. The first suction duct may be provided in the central frame member while being embedded at a predetermined interval with the portion exposed.

Further, a suction means may be connected to the first suction duct to suck the atmospheric gas in the container support member.

In addition, a second suction duct is provided at the tip of the slide member of the base member, the first suction duct and the second suction duct are provided so as to be connectable, suction means is connected to the second suction duct, and the container support is provided. You may make it attract | suck the atmospheric gas in a member.

On the other hand, the container transfer method of the automatic warehouse system according to the present invention is an automatic warehouse system provided in a clean room, storing a container for storing an object to be processed on a shelf, and transferring the container to a loading / unloading port. Is what
A plurality of the shelves for storing the containers are provided in a vertical direction,
The transfer means for transferring the container between the shelf and the carry-in / out port is provided by engaging with a traveling guide rail provided in parallel with the shelf, and the transfer means can be extended toward the shelf side. A base member,
The base member is provided on a fixed base body extending toward the shelf side, a slide member that is extendable in the longitudinal direction of the base body, an upper surface of the slide member, and is slidable in the longitudinal direction of the slide member, and A claw member that can freely move up and down,
A first alignment step of moving the base member of the transfer means to a predetermined position on the shelf;
The base member slide member is extended to cause the tip of the slide member to enter the bottom of the container, and the claw member is slid to the tip of the slide member, and the engagement portion provided in advance on the bottom of the container on the transfer means side; A sliding step of moving the claw member to an opposing position;
An engaging step of raising the claw member and engaging the claw member and the engaging portion;
An unloading step of sliding the claw member to the slide member base side, contracting the slide member, and transferring the container from the shelf to the transfer means,
Is included.

According to the above method, the container stored in the shelf can be transferred to the transfer means only by pulling out the container with the base member, and a step of lifting the container unlike the conventional fork is not required.

Here, after the unloading step, a second alignment step of moving the base member of the transfer means to a predetermined position of the loading / unloading port;
A loading step of extending the sliding member of the base member and placing the tip of the container on the top surface of the loading / unloading port, and sliding the claw member to the sliding member tip side to transfer the container to the loading / unloading port;
An engagement releasing step of releasing the engagement between the claw member and the engaging portion and lowering the claw member;
It is preferable that it is further included.

According to this invention, the outstanding effect that the container storage space of a shelf can be formed in the grade which does not change so much with the magnitude | size of a container is exhibited.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a preferred embodiment of the invention will be described with reference to the accompanying drawings.
FIG. 1 shows an overall perspective view of an automatic warehouse system according to a preferred embodiment of the present invention.
As shown in FIG. 1, the automatic warehouse system according to the present embodiment includes a carry-in / out port 12, a shelf 13 provided above the carry-in / out port 12, a container 14 stored in the shelf 13, and a carry-in / out port. 12 and parallel to the shelf 13, and mainly includes transfer means 16 for transferring the container 14 between the shelf 13 and the loading / unloading port 12. The carry-in / out port 12, the shelf 13, and the transfer means 16 are covered with a shell 11, and the inside of the shell 11 becomes a clean room. A plurality of objects to be processed (for example, glass substrates for FPD) 15 are accommodated in a container (for example, a wire cassette) 14, and a chuck 73 described later is engaged with the bottom surface of the container 14 on the transfer means side. An engaging portion (not shown) is formed. In addition, a processing apparatus 10 is provided outside the shell 11 at a location adjacent to the carry-in / out port 12.

As shown in FIG. 5, the carry-in / out port 12 includes a loader 51 that supplies the glass substrate 15 in the container 14 to the processing apparatus 10 in the direction of the arrow 53, and the processing glass substrate 15 in the direction of the arrow 54. 10 and an unloader 52 that is collected from the container 10 and accommodated in the container 14. A loader 51 and an unloader 52 are provided in parallel to face the processing apparatus 10.
As shown in FIGS. 2 and 3, the shelf 13 includes a column member 45 that extends vertically, a beam member 46 that extends horizontally, and a container support member 47 that is supported by the beam member 46. The upper part of 12 is provided in two rows in the vertical direction and in two rows in the horizontal direction. The number of rows and the number of rows of the shelves 13 are arbitrary, and may be 3 or more, 3 or more, and is appropriately increased or decreased according to the installation space.

The container support member 47 includes hollow side frame members 48 and 48 extending in the directions of the arrows 53 and 54 described above and a hollow central frame member 50 orthogonal to the side frame members 48 and 48. 48, 48 and the central frame member 50 are combined in an H shape, and the hollow portions are communicated with each other. The attachment position of the central frame member 50 with respect to each side frame member 48, 48 is a position close to the transfer means 16 side. A first suction duct 75 described later is provided on the surface of the central frame member 50 facing the transfer means 16.

As shown in FIG. 12, in each side frame member 48, 48, a large number of guide rollers 49 are arranged at predetermined intervals along the longitudinal direction (the left-right direction in FIG. 12), and the roller surface of the guide roller 49 Is disposed in a state of being exposed from a gap 205 formed on the upper surface of each side frame member 48, 48. Further, a fixed stopper 201 is provided on the back side of the shelf (left side in FIG. 12) of each side frame member 48, 48, and a movable stopper is provided on the front side of the shelf (transfer means 16 side, left side in FIG. 12). 202 is provided. The movable stopper 202 is provided with a stopper plate 204 on a cylinder 203 that can be raised and lowered in the direction of an arrow 207. The guide roller 49 is a driven roller and does not drive itself. Further, instead of the movable stopper 202, a stopper mechanism (not shown) such as a spring stopper may be attached to several guide rollers 49 on the front side of the shelf so as to rotate only in the direction of the arrow 208. . In this case, the stopper mechanism is unlocked when a first suction duct 75 and a second suction duct 76 described later are connected. As a drive source of the cylinder 203, air, electricity or the like is preferable.

As shown in FIG. 2, the transfer means 16 is provided in parallel with the carry-in / out port 12 and the shelf 13, and moves along the first travel guide rail 20 laid on the floor and the first travel guide rail 20. Driving part 21, a gate-shaped guide frame part 23 provided perpendicular to the driving part 21, and a lift that is provided to engage with the guide frame part 23 and that can be raised and lowered along the guide frame part 23. 32, a base member 24 provided integrally with the lift 32, and guide members 25, 25 provided in parallel with the base member 24. On the drive unit 21, drive / control means 22 for driving and controlling the drive unit 21 and raising and lowering and controlling the lift 32 is provided. In addition, a suction unit (vacuum pump) 29 described later is provided on the drive unit 21. In addition to the first travel guide rail 20, a second travel guide rail 33 is laid on the ceiling, and the second travel guide rail 33 extends from the top of the frame body 30 as shown in FIG. , 35 are sandwiched from both sides, and the second travel guide rail 33 and the arms 34, 35 are engaged. The first travel guide rail 20 incorporates a power supply line (not shown). Electric power is taken out via the power supply line and supplied to various drive devices. Since the method for taking out the electric power is used in a clean room, the non-contact method is preferable, and the power supply line may be incorporated in the second traveling guide rail 33 instead of the first traveling guide rail 20.

As shown in FIG. 6, the guide frame portion 23 is provided with guide members 31, 31 on the inner vertical portion of the gate-shaped frame body 30. The lift 32 includes slider portions 62 and 62 erected at both ends of the horizontal portion 61. The slider members 62 and 62 of the lift 32 are engaged with the guide members 31 and 31 of the guide frame portion 23, and the lift 32 can be raised and lowered along the guide members 31 and 31. Further, the base member 24 and the guide members 25, 25 are placed and fixed on the horizontal portion 61 of the lift 32.

As shown in FIG. 7, the base member 24 is placed on the base body 71 of the fixed system fixed to the horizontal portion 61 (lift 32), in the longitudinal direction of the base body 71 (in the direction of arrow 77 in FIG. 7). An extendable slide member 72 is provided, and a chuck (claw member) 73 that is slidable in the longitudinal direction of the slide member 72 (in the direction of arrow 78 in FIG. 7) and that can be raised and lowered is provided on the upper surface of the slide member 72. It becomes. Examples of the slide mechanism of the slide member 72 and the chuck 73 include a screw mechanism, a belt mechanism, a rack and pinion mechanism, and the like. Examples of the lifting mechanism of the chuck 73 include a rack and pinion mechanism, a screw mechanism, and a belt mechanism. Further, the chuck 73 is not particularly limited as long as it can reliably grip the engaging portion of the container 14.

In addition, as shown in FIG. 2, a large number of guide rollers 42 are arranged in the hollow frame 41 of the guide members 25, 25 at a predetermined interval along the longitudinal direction, and a part of the roller surface of the guide roller 42 is formed. It arrange | positions in the state exposed from the upper surface of the hollow frame 41. FIG. The guide members 25 and 25 have the same configuration as the side frame members 48 and 48 described above, and the guide roller 42 is a driven roller like the guide roller 49 and does not drive itself. The number of guide members 25 is not limited to two, and may be three or more. Further, a part of the fixed portion between the guide members 25 and 25 and the horizontal portion 61 of the lift 32 is opened, and the guide members 25 and 25 and the lift 32 are provided in communication with each other.

The base member 24 will be described in more detail. For example, as shown in FIG. 7, a first ball screw 102 is rotatably provided along a longitudinal direction in a base body frame 101 constituting a base body 71. A first motor 103 is connected to the first ball screw 102. A first guide rail 104 is provided in the base body frame 101 along the longitudinal direction thereof. Further, a slit 111 is formed in the base body frame 101 along the longitudinal direction thereof. Then, the first slider 105 is screwed into the first ball screw 102 and engaged with the first guide rail 104, and its tip protrudes from the slit 111. As the first ball screw 102 (first motor 103) rotates, the first slider 105 slides in the direction of the arrow 77 along the first guide rail 104. The tip of the first slider 105 protruding from the slit 111 is fixed to the slider body frame 106 of the slide member 72, and the slide member 72 is expanded and contracted by the sliding movement of the first slider 105. The slit 111 is covered with a cover member (not shown) in order to block dust from entering the base body frame 101. This cover member is capable of keeping the inside of the base body frame 101 airtight without interfering with the sliding movement of the first slider 105 and during suction described later.

A second ball screw 107 is rotatably provided along the longitudinal direction in the slider body frame 106 constituting the slide member 72, and the second motor 108 is connected to the second ball screw 107. A second guide rail 109 is provided in the slider body frame 106 along the longitudinal direction thereof. Further, a slit 112 is formed in the slider body frame 106 along the longitudinal direction thereof. The second slider 110 is provided so as to be engaged with the second guide rail 109 by being screwed to the second ball screw 107 and having its tip projecting from the slit 112. As the second ball screw 107 (second motor 108) is driven to rotate, the second slider 110 slides along the second guide rail 109. Then, the tip of the second slider 110 protruding from the slit 112 is fixed to the chuck 73, and the slide movement of the second slider 110 causes the chuck 73 to slide in the direction of the arrow 78. The first motor 103 and the second motor 108 are connected to control means (not shown), and their rotational driving is controlled. Similarly to the slit 111, the slit 112 is also covered with a cover member (not shown) in order to block dust from entering the base body frame 106.

For example, as shown in FIG. 8, the chuck 73 is provided with a lifting mechanism 81 on the second slider 110 and a chuck opening / closing mechanism 82 on the lifting mechanism 81.
More specifically, the elevating mechanism 81 is provided with elevating means (for example, a cylinder) 84 in the main body 83 of the bottomed rectangular cylindrical body, a piston plate 85 is connected to the cylinder 84, and the lower surface of the piston plate 85 is provided. A cylindrical body 86 having a rectangular cross section that is in contact with the inner wall of the main body 83 with a slight gap is provided. A chuck opening / closing mechanism 82 is provided on the piston plate 85. By driving the cylinder 84, the cylindrical body 86 is guided along the inner wall of the main body portion 83, and the piston plate 85 moves up and down in the direction of the arrow 88. As a drive source of the cylinder 84, air, electricity or the like is preferable.

The chuck opening / closing mechanism 82 is provided with two guide rails 91, 91 at a distance in the same direction as the sliding direction of the chuck 73 in the main body 87 of the rectangular box. A center member 93 is engaged and provided across the guide rails 91 and 91, and slide members 94 and 95 are engaged across the guide rails 91 and 91 so as to sandwich the center member 93. And the front-end | tip protrudes from the slit 100, and is provided. On the slide members 94 and 95, chuck bodies 98 and 99 having a U-shaped cross section are provided facing each other. In addition, a shaft 96 is rotatably provided perpendicular to the center member 93, and a motor 90 is connected to the shaft 96. A rack support member 120 is connected to the shaft 96 below the center member 93. Similarly to the slits 111 and 112, the slit 100 is also covered with a cover member (not shown) so as to block the entry of dust into the main body 87.

A hole 121 is formed in the rack support member 120 at a position connected to the shaft 96, and a hole 122 is formed in parallel with the guide rails 91 and 91 at a position sandwiching the hole 121. A pinion 92 is fitted into the hole 121, rack members 123 and 124 are inserted into the hole 122, and a shaft 96 is connected to the pinion 92. A rack 97 is formed in a portion of the rack members 123 and 124 facing the hole 121, and the pinion 92 and the rack members 123 and 124 constitute a rack and pinion. Only one end of the rack member 123 is fixed to the slide member 94, and the other end is free. On the other hand, the rack member 124 is slidable, and both ends are fixed to the slide members 94 and 95. As the shaft 96 is rotated by the motor 90, the rack and pinion is operated, and the chuck bodies 98 and 99 are opened and closed in the direction of the arrow 89.

On the other hand, as shown in FIG. 10, an enlarged perspective view of the main part (portion surrounded by a broken line) in FIG. 7 is connected to the first suction duct 75 provided in the central frame member 50 at the tip of the slide member 72. A second suction duct 76 is provided.

The first suction duct 75 is provided with a lid-like cylindrical connecting portion 141 at the tip of a thick disk-like base portion 142, and a first hole 131 is formed in the center of the lid of the connecting portion 141. A plurality (three are shown in FIG. 10) of first pin holes 132 are formed at regular intervals around one hole 131. As shown in FIGS. 11A and 11B, an annular suction hole 143 is formed in the base portion 142, and one end of a biasing member (spring) 140 is formed in the inner portion of the suction hole 143 in the base portion 142. And the first lid member 136 is provided at the other end of the spring 140. The first lid member 136 includes a convex portion 137 at the center of one end surface side of the disc portion 147, and the other end surface side of the disc portion 147 is connected to the spring 140. The tip of the convex portion 137 is provided so as to protrude from the first hole 131. An O-ring 135a is provided on the peripheral edge of the disk portion 147 on one end surface side, and the O-ring 135a surrounds the outer periphery of the first pin hole 132 via the disk portion 147 biased by the spring 140. In this way, it is brought into contact with the back of the connection part 141. The O-ring 135a may be provided on the peripheral edge of the lid back of the connecting portion 141.

The second suction duct 76 is provided with a lid-like cylindrical connecting portion 144 at the tip of a thick disk-like base portion 145, and a second hole 133 is formed at the center of the lid of the connecting portion 144. A second pin hole 134 is formed around the two holes 133 at a position facing the first pin hole 132. An arcuate suction hole 146 is formed in the base 145, one end of a biasing member (spring) 150 is connected to an inner portion of the suction hole 146 in the base 145, and the second lid member 138 is connected to the other end of the spring 150. Is provided. The second lid member 138 is provided with a pin 152 at a position facing the second pin hole 134 on one end surface side of the disc portion 139, and the other end surface side of the disc portion 139 is connected to the spring 150. . The tip of each pin 152 is provided protruding from each second pin hole 134. O-rings 135b and 135b are provided on the inner peripheral portion and outer peripheral portion of the second pin hole 134 on the back of the connection portion 144, and the disk portions urged by the spring 150 to the O-rings 135b and 135b. The peripheral edge of 139 is brought into contact. An O-ring 135 c is provided on the peripheral edge of the lid of the connection portion 144. The length of each pin 152 is formed to be equal to or approximately equal to the length of the convex portion 137. As the biasing means, a cylinder may be used instead of the spring 150. The O-rings 135b and 135b may be provided on the peripheral edge of one end side of the disc part 139, and the O-ring 135c may be provided on the peripheral edge of the lid of the connection part 141.

As shown in FIG. 7, an annular hole 173 is formed in the attachment portion of the first suction duct 75 in the central frame member 50, and the suction hole 143 of the base portion 142 and the central frame are formed through the annular hole 173. The hollow portion 174 of the member 50 is communicated. In addition, an arc-shaped hole 171 is formed at the tip of the slider main body frame 106 in the slide member 72, and the suction hole 146 of the base portion 145 and the inside of the slider main body frame 106 are connected via the arc-shaped hole 171. Is communicated. In addition, an opening 172 for communicating the slide member 72 and the base body 71 is provided in a fixed portion between the slider body frame 106 and the first slider 105. Thereby, the inside of the slider main body frame 106 and the inside of the base main body frame 101 are communicated. The inside of the base main body frame 101 and the inside of the horizontal portion 61 in the lift 32 are communicated with each other through an opening 175.

Further, as shown in FIG. 8, an opening 115 for communicating the slide member 72 and the elevating mechanism 81 is provided in a fixing portion between the second slider 110 and the main body 83. In addition, an opening 116 for communicating the elevating mechanism 81 and the chuck opening / closing mechanism 82 is provided in a fixed portion between the piston plate 85 and the main body 87. Thereby, the inside of the slider body frame 106 and the inside of the chuck 73 are communicated.

Regarding the suction mechanism between the movable part (lift 32) and the fixed part (guide frame 23 and vacuum pump 29), a patent application (for example, Japanese Patent Application Laid-Open No. 2000-243808) previously filed by the present applicants, etc. However, the suction mechanism is not particularly limited, and a conventionally used suction mechanism can be applied. By adopting these suction mechanisms, the base member 24 including the container support member 47 and the chuck 73, both guide members 25 and 25, the lift 32, the guide frame 23, and the vacuum pump 29 are communicated to enable suction.

Next, a container transfer method using the automatic warehouse system according to the present embodiment will be described.
<Process for transferring the container 14 from the shelf 13 to the transfer means 16>
(First alignment process)
First, the transfer means 16 is moved along the first travel guide rail 20 and the second travel guide rail 33 to be positioned in front of the predetermined row of the shelf 13. Next, the lift 32 of the transfer means 16 is raised, and the base member 24 and the both guide members 25 and 25 are positioned at a predetermined stage of the shelf 13. At this time, positioning means such as a control means and a sensor is used to accurately position the transfer means 16 and the lift 32. As a result of this positioning, as shown in FIG. 13A, the guide members 25, 25 are positioned at positions facing the side frame members 48, 48 of the container support member 47, and the first suction duct of the central frame member 50 is placed. The second suction duct 76 of the base member 24 is located at a position facing the 75.

(Slide process)
The motor 103 shown in FIG. 7 is rotationally driven in a certain direction to extend the slide member 72 of the base member 24 in the left direction of the arrow 77, and as shown in FIG. A second suction duct 76 provided at the front end of the slide member 72 is connected to a first suction duct 75 provided in the central frame member 50 of the container support member 47 by being embedded in the bottom surface of the container 14 placed on the support member 47. Is done.

At the time of these connections, as shown in FIG. 11 (b), the pin 152 of the second suction duct 76 is inserted into the first pin hole 132 and the convex portion 137 of the first suction duct 75 is inserted into the second hole 133. Is inserted. The pin 152 is brought into contact with the disk portion 147 of the first lid member 136 by the guide of the first pin hole 132. Further, the convex portion 137 is brought into contact with the disc portion 139 of the second lid member 138 by the guide of the second hole 133. The disc portion 147 is biased in the direction of the arrow 162 by the spring 140, but is pushed in the direction of the arrow 161 by the contact of the pin 152, and the seal of the connecting portion 141 by the first lid member 136 is released. . Further, the disc portion 139 is biased in the direction of the arrow 161 by the spring 150, but is pushed in the direction of the arrow 162 by the contact of the convex portion 137, and the sealing of the connecting portion 144 by the second lid member 138 is performed. It is released and the connection is completed. The connection portion between the first suction duct 75 and the second suction duct 76 is sealed by an O-ring 135c. After the connection of the first suction duct 75 and the second suction duct 76 is completed, the suction by the vacuum pump 29 is started, and as shown in FIG. 12, the atmosphere gas 206 inside and around each side frame member 48, 48, and The atmosphere gas inside and around the hollow frame 41 in both guide members 25, 25 is sucked by the vacuum pump 29.

After this connection is completed, the movable stopper 202 in the container support member 47 is driven, the stopper plate 204 is lowered in the downward direction of the arrow 207, the stopper of the container 14 is released, and the container 14 can be pulled out.

Next, the motor 108 is driven to rotate in a certain direction to slide the chuck 73 to the distal end side (left direction of the arrow 78) of the slide member 72, and the engaging portion provided in advance on the bottom surface of the container 14 on the transfer means side. The chuck 73 is positioned at a position facing the (not shown).
As in the first positioning step described above, the positioning in the sliding step uses positioning means such as a control unit and a sensor to accurately position the chuck 73 and the second suction duct 76 (sliding member 72).

(Engagement process)
The cylinder 84 shown in FIG. 8 is driven to raise the chuck 73 in the upward direction of the arrow 88, and the chuck 73 is inserted into the engaging portion. Next, the motor 90 is rotationally driven in a certain direction, the slide members 94 and 95 are slid in the direction in which the chuck main bodies 98 and 99 are close to each other, and the chuck 73 is closed. As a result, the engaging portion is sandwiched between the chucks 73 and “locked”.

(Unloading process)
The motor 108 was rotationally driven in the reverse direction, and the chuck 73 was slid to the base side of the slide member 72 (right direction of the arrow 78) and placed on the container support member 47 as shown in FIG. The container 14 is pulled out toward the slide member 72, and a part of the container 14 is placed on the guide members 25 and 25. Next, the motor 103 is driven to rotate in the reverse direction, the slide member 72 is slid in the right direction of the arrow 77, and the slide member 72 is contracted. As a result, the container 14 is transferred from the container support member 47 of the shelf 13 onto both guide members 25, 25 of the transfer means 16. When the container 14 is pulled out, the container 14 is in contact with the guide rollers 49 of the side frame members 48 and 48 and the guide rollers 42 of the guide members 25 and 25, and the guide rollers 49 and 42 are rotated. The container 14 is easily taken out and carried out.

<Process for transferring the container 14 from the transfer means 16 to the loading / unloading port 12>
(Second alignment process)
As shown in FIG. 4, the transfer means 16 on which the container 14 is placed is moved along the first travel guide rail 20 and the second travel guide rail 33 and is positioned in front of the carry-in / out port 12. Next, the lift 32 of the transfer means 16 is raised, and the base member 24 and both guide members 25, 25 are positioned at a predetermined height of the carry-in / out port 12. At this time, positioning means such as a control means and a sensor is used to accurately position the transfer means 16 and the lift 32.

(Import process)
The motor 103 shown in FIG. 7 is rotationally driven in a certain direction to extend the slide member 72 of the base member 24 in the left direction of the arrow 77, the tip end portion of the slide member 72 is brought close to the carry-in / out port 12, and the base member 24. The container 14 placed on the guide members 25 and 25 is pushed out toward the loading / unloading port 12, and a part of the container 14 is placed on the loading / unloading port 12.
Next, the motor 108 is rotationally driven in a certain direction, and the chuck 73 is slid to the tip side of the slide member 72 (left direction of the arrow 78). As a result, the container 14 is transferred from the transfer means 16 to the carry-in / out port 12.

(Disengagement process)
The motor 90 shown in FIG. 8 is rotationally driven in the reverse direction, the slide members 94 and 95 are slid in the direction in which the chuck main bodies 98 and 99 are separated, the chuck 73 is opened, and the “lock” of the engaging portion by the chuck 73 is performed. Is released. Next, the cylinder 84 is driven to lower the chuck 73 in the downward direction of the arrow 88.

Thereafter, the motor 108 is rotationally driven in the reverse direction to slide the chuck 73 to the base side of the slide member 72 (right direction of the arrow 78), and then the motor 103 is rotationally driven in the reverse direction to move the slide member 72 to the arrow. 77 is slid rightward to contract the slide member 72. As a result, the transfer process of the container 14 ends, and the process moves to the next transfer process.

According to the automatic warehouse system according to the present embodiment, it is sufficient if there is a necessary minimum gap (space) above and below the container 14 stored in the shelf 13, and the container is like a conventional fork-type transfer means. Large dead space above and below 14 is not required. That is, the storage space for each container in the shelf 13 can be reduced as compared with the conventional automatic warehouse system using the fork-type transfer means, and the container storage space in the shelf 13 is not much different from the size of the container 14. It can be formed to the extent that it is not. As a result, the size of the shelf 13 can be reduced, and consequently, the shell 11, that is, the clean room can be saved in space and compact, and the running cost of the clean room can be reduced.

In the present embodiment, when the container 14 is taken out of the shelf 13, only the distal end portion of the slide member 72 in the base member 24 has to be submerged under the container 14, and like a conventional fork-type transfer means. It is not necessary for the fork to be submerged under the container 14 over almost the entire length. For this reason, in the present embodiment, even when the attachment position of the central frame member 50 to the side frame members 48, 48 of the container support member 47 is a position closer to the transfer means 16, when the container 14 is taken out. The slide movement of the slide member 72 is not hindered. As a result, a large space can be secured inside the container support member 47 although the height is not so high. Therefore, various devices can be arranged in this space. For example, a gas tank such as an inert gas for purging the inside of the container 14 can be arranged for each container support member 47.

Normally, when the container 14 is transported on the guide roller, a slight amount of dust is generated at the contact portion thereof. However, in the present embodiment, the atmosphere gas in and around the side frame members 48, 48 and the guide members 25, 25 is sucked by the vacuum pump 29, so that the container 14 is guided in the carry-out process. Dust generated when the rollers 49 and 42 carry the rollers is sucked into the side frame members 48 and 48 and the guide members 25 and 25. As a result, the generation of dust in the clean room can be significantly reduced, the cleanliness in the cleanroom can be further increased, and the running cost for maintaining the cleanliness can be reduced.

Next, a modification of the present embodiment will be described.
The first suction duct 75 is provided not on the central frame member 50 of the container support member 47 but on either one of the side frame members 48, 48, and the second suction duct 76 is not on the tip of the base member 24 but on both guides. You may make it provide in either one of the front-end | tip of the members 25 and 25. FIG. In this case, the passage and the line for suction may be provided not inside the base member 24 but inside the guide member 25, so that the structure becomes simple.

Further, the first suction duct 75 is provided not on the central frame member 50 of the container support member 47 but on each of the side frame members 48, 48, and the second suction duct 76 is not on the tip of the base member 24 but on both guides. You may make it provide in each of the front-end | tip of the members 25 and 25. FIG. In this case, the number of suction systems is two, but it is possible to use an inexpensive vacuum pump 29 having a small capacity as compared with the case where the number of suction systems is one. Further, it is not necessary to communicate the side frame members 48, 48 of the container support member 47 with the central frame member 50. For this reason, it is not necessary to comprise the center frame member 50 with a hollow frame member, and various shaped steels (H-shaped steel, T-shaped steel, angle steel, etc.) can be used, and weight reduction can be achieved.

The container support member 47 has been described by taking the case where the hollow frame member is combined in an H shape as an example. However, the container support member 47 is not limited to this, and the container support member 47 is combined in a ladder shape using a plurality of central frame members 50. The member 47 may be used. Thereby, the container 14 can be supported more stably.

The installation location of the shelf 13 does not necessarily need to be above the carry-in / out port 12 and is appropriately selected according to the installation space. For example, the installation location on the opposite side of the carry-in / out port 12 with the travel guide rail 20 interposed therebetween. A shelf 13 may be provided at the position. Further, a partition plate may be used instead of the beam member 46 of the shelf 13 so that the shelf 13 is completely partitioned for each stage.
Further, in the present embodiment, the FPD glass substrate has been described as an example of the processing object 15 accommodated in the container 14, but a semiconductor wafer, food, medicine, etc. are accommodated as the processing object. It can be applied to containers that have been used.

Next, another embodiment of the present invention will be described with reference to the accompanying drawings.
In the automatic warehouse system according to the previous embodiment, the shelf 13 provided at the upper part of the carry-in / out port 12 is provided only on one side of the travel guide rail 20. On the other hand, the automatic warehouse system according to the present embodiment is provided with shelves 13 on both sides of the travel guide rail 20, and is shown in FIG. It has the same configuration as the automatic warehouse system. Therefore, only the differences will be described below.

The base member 224 of the automatic warehouse system according to the present embodiment transfers the container 14 stored in the shelves 13 provided on both sides of the travel guide rail 20 and sucks the container support members 47 of the shelves 13 and 13 on both sides. Is possible.

Specifically, as shown in FIG. 14, the base member 224 is mainly composed of a base main body 71, a slide member 72, and a chuck 73, and second suction ducts 76, 76 are provided at both longitudinal ends of the slide member 72. Provided. As the second suction ducts 76 are provided at both ends of the slide member 72, the motor 108 for sliding the chuck 73 shown in FIG. 7 moves the slide of the slide member 72 and the second suction duct 76 and the second suction duct 76. The attachment position is appropriately changed so as not to hinder the connection with the one suction duct 75.

According to the present embodiment, the base member 224 is extended in a certain direction with respect to the container 14 stored in one shelf 13, and after the container 14 is taken out, the base member 224 is moved in the opposite direction. By extending, the container 14 can be carried into another shelf 13 provided on the opposite side of the one shelf 13 with the travel guide rail 20 interposed therebetween, and the efficiency of carrying in / out the container 14 is greatly improved. be able to.

As described above, the present invention is not limited to the above-described embodiment, and it goes without saying that various other things are assumed.

1 is an overall perspective view of an automatic warehouse system according to a preferred embodiment of the present invention. It is the figure which removed all the containers in FIG. FIG. 3 is a three-direction arrow view of FIG. 2. It is a side view of FIG. It is a top view of FIG. It is a front view of FIG. It is a longitudinal cross-sectional view of a base member. It is a longitudinal cross-sectional view of the chuck | zipper in a base member. FIG. 9 is a sectional view taken along line 9-9 in FIG. 8. It is a principal part expansion perspective view of FIG. It is a figure for demonstrating the connection state of a 1st suction duct and a 2nd suction duct. FIG. 11A shows a state immediately before connection, and FIG. 11B shows a state after connection. It is a longitudinal cross-sectional view of a side frame member. It is a figure for demonstrating the process which transfers a container to a transfer means from a shelf. FIG. 13A shows a first alignment process, FIG. 13B shows a slide process, and FIG. 13C shows an unloading process. It is a longitudinal cross-sectional view of the base member in the automatic warehouse system which concerns on other preferable one Embodiment of this invention.

Explanation of symbols

11 Shell (clean room)
12 carry-in / out port 13 shelf 14 container 16 transfer means 24 base member 71 base body 72 slide member 73 chuck (claw member)

Claims (7)

In an automatic warehouse system provided in a clean room, storing containers to be processed on shelves, and transferring the containers to a carry-in / out port,
A plurality of the shelves for storing the containers are provided in a vertical direction,
The transfer means for transferring the container between the shelf and the carry-in / out port is provided in parallel with the shelf, and the transfer means is provided with a base member that is extensible toward the shelf side,
The base member is provided on a fixed base body extending toward the shelf side, a slide member that is extendable in the longitudinal direction of the base body, an upper surface of the slide member, and is slidable in the longitudinal direction of the slide member, and A claw member that can freely move up and down,
When the slide member is extended, the claw member is slid and the claw member is raised, the claw member is engaged with an engagement portion provided in advance on the bottom surface of the container on the transfer means side, and the container Automatic warehouse system characterized by taking out The transfer means is a stacker crane, a travel guide rail provided in parallel with the shelf, a drive unit that moves along the travel guide rail, and a portal guide frame provided perpendicular to the drive unit , A lift that is engaged with the guide frame portion and can be moved up and down along the guide frame portion, the base member provided integrally with the lift, and a plurality of guide members provided in parallel with the base member The automatic warehouse system of Claim 1 provided with these. The shelf includes a column member extending vertically, a beam member extending horizontally, and a container support member supported by the beam member, on which the container is placed, and the container support members are hollow frame members on both sides. The central hollow frame member is orthogonal to each other and communicated with each other, and a guide roller for guiding the transfer of the container to the both side frame members of the container support member, and a part of the roller surface. The automatic warehouse system according to claim 1, wherein the first warehouse duct is provided in the central frame member while being buried at a predetermined interval in an exposed state. The automatic warehouse system according to claim 3, wherein a suction means is connected to the first suction duct to suck the atmospheric gas in the container support member. A second suction duct is provided at the tip of the slide member of the base member, and the first suction duct and the second suction duct are provided so as to be connectable, and suction means is connected to the second suction duct. The automatic warehouse system according to claim 3, wherein the atmospheric gas is sucked. In an automatic warehouse system provided in a clean room, a container for storing an object to be processed is stored in a shelf, and the container is transferred to a loading / unloading port.
A plurality of the shelves for storing the containers are provided in a vertical direction,
The transfer means for transferring the container between the shelf and the carry-in / out port is provided by engaging with a traveling guide rail provided in parallel with the shelf, and the transfer means can be extended toward the shelf side. A base member,
The base member is provided on a fixed base body extending toward the shelf side, a slide member that is extendable in the longitudinal direction of the base body, an upper surface of the slide member, and is slidable in the longitudinal direction of the slide member, and A claw member that can freely move up and down,
A first alignment step of moving the base member of the transfer means to a predetermined position on the shelf;
The base member slide member is extended to cause the tip of the slide member to enter the bottom of the container, and the claw member is slid to the tip of the slide member, and the engagement portion provided in advance on the bottom of the container on the transfer means side; A sliding step of moving the claw member to an opposing position;
An engaging step of raising the claw member and engaging the claw member and the engaging portion;
An unloading step of sliding the claw member to the slide member base side, contracting the slide member, and transferring the container from the shelf to the transfer means,
A container transfer method for an automatic warehouse system, comprising: A second positioning step of moving the base member of the transfer means to a predetermined position of the loading / unloading port after the unloading step;
A loading step of extending the sliding member of the base member and placing the tip of the container on the top surface of the loading / unloading port, and sliding the claw member to the sliding member tip side to transfer the container to the loading / unloading port;
An engagement releasing step of releasing the engagement between the claw member and the engaging portion and lowering the claw member;
The container transfer method of the automatic warehouse system of Claim 6 further including these.

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