JP2003309163A - Unmanned carrier system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that it is required to take a measures for reinforcing the member of a transfer arm and loading a weight on the lower part of an unmanned carrier, etc., that the weight of the unmanned carrier itself increases as a result, and there is the possibility that a clean room floor surface is deformed and curved since there is the possibility that the unmanned carrier of the form of transferring a carrying object by a transfer means such as a robot arm loaded on the main body of the unmanned carrier falls during transfer work in the case of carrying a heavy weight object. <P>SOLUTION: The unmanned carrier 23 is provided with a load carrying platform 30 without an operation part, and the carrying object 9 is mounted on it. A processor 5 is provided with a sheet transfer means 16 for transferring the carrying object mounted on the load carrying base from the unmanned carrier into the processor 5 directly. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the construction of an automated guided vehicle system for transporting articles to a processing device for processing articles by an automated guided vehicle.

[0002]

2. Description of the Related Art Conventionally, a technique of an automated guided vehicle for carrying and transferring semiconductor wafers in a clean room has been known. The automated guided vehicle is equipped with a laser guidance system that detects the laser light reflected by the reflector installed in the clean room and stops at a predetermined position in the transfer station such as semiconductor manufacturing equipment or automated warehouses. The transfer means installed in the mounting station transfers the transferred article to the transfer station, and further, the transfer means provided on the semiconductor manufacturing apparatus side transfers the transferred object placed in the transfer station into the apparatus. Was. On the other hand, it is currently under consideration to mount an arm type transfer device on an automated guided vehicle instead of providing the transfer device on the fixed side device. In addition to the transfer device, such an automated guided vehicle is used to transfer a wafer in a predetermined direction to a buffer cassette capable of accommodating a plurality of wafers and a device installed in a process such as a wafer processing device. An aligner (position adjustment device) for transferring and the like is installed.

[0003]

SUMMARY OF THE INVENTION The above-mentioned unmanned guided vehicle which is currently under study is designed to transfer the article by a transfer means such as a robot arm mounted on the main body of the unmanned guided vehicle. If the transfer means is extended to the side of the automated guided vehicle with the heavy object being fixed at the tip of the, there is a possibility of falling. In order to solve this problem, it is necessary to reinforce the member of the transfer arm and to mount a heavy weight on the lower part of the automatic guided vehicle. Alternatively, the loading platform of the automated guided vehicle is configured to have only the lifting mechanism as the operating unit instead of the transfer arm, the transfer station supports the left and right ends of the article, and the automated guided vehicle enters from the front in the center. Providing a loading table that can be projected so that the article can be raised above the loading table to allow the automated guided vehicle to enter below the loading table, and then the loading platform can be lowered to load the article onto the transfer station. Need to be placed. As a result, in any of the above methods, the automated guided vehicle and the transfer means itself mounted on the automated guided vehicle become large and heavy. In particular, since the process of handling these semiconductor wafers and liquid crystal panels is usually in a clean room, the floor surface will be deformed or deformed when a large unmanned guided vehicle travels.
Can be curved. This is because the clean room floor is usually a grating floor and the floor itself is used as an exhaust path, so it is desirable to minimize the number of reinforcing materials and the like from the viewpoint of securing an exhaust area. Deformation / curvature of the floor hinders smooth wafer transfer work and wafer transfer work, and there is a concern that the transferred objects will be damaged. Further, in recent years, as the diameter of semiconductor wafers has increased and the area of liquid crystal panels has increased, the weight of transported items has tended to increase further. Therefore, a lightweight unmanned guided vehicle capable of smoothly transporting large-sized transported items. There is a demand for an automated guided vehicle system.

[0004]

The problem to be solved by the present invention is as described above, and the means for solving this problem will be described below.

That is, according to the first aspect of the present invention, a loading platform for loading the articles is provided, and an automatic guided vehicle that travels on the floor, and a transfer for directly loading the articles loaded on the loading platform into the processing apparatus. And a processing device having means.

According to a second aspect of the present invention, the space where the automatic guided vehicle stops during the article transfer operation is used as a traveling route of the automatic guided vehicle.

According to a third aspect of the present invention, the automatic guided vehicle is equipped with a laser guiding system, and the processing device is provided with a reflector.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION Next, embodiments of the present invention will be described. FIG. 1 is a perspective view showing the overall configuration of an automated guided vehicle system according to this embodiment, and FIG. 2 is a right side view of the automated guided vehicle according to this embodiment.
FIG. 3 is a perspective view of a transported object, FIG. 4 is a perspective view showing the overall configuration of a first example of a conventional automated guided vehicle system, and FIG. 5 is a diagram of the overall configuration of a second example of a conventional automated guided vehicle system. It is a perspective view.

A first embodiment of the automated guided vehicle system of the present embodiment will be described with reference to FIGS. 1 and 2. In the present embodiment, the liquid crystal panel manufacturing process will be described as an example, but the present invention can be applied to other plate-shaped products (semiconductor wafers, etc.) and is not limited.

First, the automatic guided vehicle 23 of this embodiment will be described with reference to FIGS. 1 and 2. In the following description, the direction of arrow A in FIG. 2 is defined as the traveling direction (front) of the automated guided vehicle 23. In the automated guided vehicle 23 of the present embodiment, a control unit 25 is arranged at the rear end of the upper surface of the main body 24, and a laser guiding system 26 is provided above the control unit 25 so as to project. The automated guided vehicle 23 detects the reflectors arranged in various places in the process by the laser guidance system 26, and the control unit 25 stores the travel route map previously stored in the control unit 25 and the detection data. It is designed to run on a floor without a track. The control unit 25 recognizes the current position from the travel route map and the detection data, corrects the traveling direction by controlling the steering direction of the drive wheels so as to follow the travel route map, and is provided on the drive wheels. While controlling the traveling distance by resetting the value of the encoder for each predetermined position, the automatic guided vehicle is controlled so as to be guided to the target position along the traveling route map. .. are rotatably supported by the main body 24, and a drive motor (not shown) drives a part or all of the traveling wheels 27. A local clean cabinet 28 is mounted on the front part of the upper surface of the main body 24 of the automatic guided vehicle 23, and a lid 29 capable of blocking outside air when closed is provided on the front surface of the local clean cabinet 28 and the inside of the local clean cabinet 28. The platform 3 has no moving parts such as lifting mechanism.
0 is provided. A filter fan unit (hereinafter referred to as “FFU”) 31 is provided between the control unit 24 and the local clean cabinet 28, and the air in the local clean cabinet 28 is blown into the FFU 31 by a fan (not shown) when the lid 29 is closed. It is sucked, passed through a filter (not shown) to increase the cleanliness, and then returned to the local clean cabinet 28. With this configuration, the inside of the local clean cabinet 28 becomes a mini-environment with high cleanliness. The operation of the FFU 31 is controlled by the control unit 25.

An article 9 to be conveyed by the automatic guided vehicle 23
Is an open cassette 11 accommodating the glass plates 10, 10, ..., As shown in FIG. 3, a plurality of shelves 12, 12, ... Supporting the end of the glass plate 10 from the inner side wall of the open cassette 11. Are arranged so as to be aligned in the height direction, and a plurality of glass plates 10 can be conveyed without making contact with each other. Further, when the automatic guided vehicle 1 is used for transportation, the opening of the open cassette 11 is directed toward the front of the automated guided vehicle 1.

On the other hand, a transfer area 7 is arranged in parallel in the processing device 5 such as a liquid crystal panel manufacturing apparatus or an automatic warehouse, and the transfer area 7 is adjacent to the traveling lane 32. The transfer area 7 is movable substantially parallel to the traveling lane 6 of the automated guided vehicle 1 and has an elevating / rotating mechanism.
A single-wafer transfer means 16 for transferring one by one is installed, and the glass plates 10, 10 ... Inside the open cassettes 11, 11 ... Mounted on the loading platform 30 of the automatic guided vehicle 23. The sheets are taken out one by one and transferred into the processing device 5. As shown in FIG. 1, the processing device 5 and the transfer area 7 can be a closed container, and a gate 17 is formed at a portion facing the opening of the open cassette 11, and the opening / closing door 1 of the gate 17 is opened.
8 and an opening / closing mechanism 19 for operating the opening / closing door 18 are provided, and the air in the processing device 5 and the transfer area 7 is maintained at a predetermined cleanliness by an air cleaning device (not shown) (that is, the processing device 5). The inside and the transfer area 7 can be used as a mini environment. The automated guided vehicle system of the present embodiment is a conventional automated guided vehicle from the viewpoint of the configuration of the apparatus installed on the floor, as compared with the first and second preferred embodiments of the automated guided vehicle system described later. The difference is that the mounting area 8 required for the system can be omitted. Since the mounting area 8 is unnecessary, it has an advantage that the transfer operation between the mini-environments can be easily performed.

The unmanned transport vehicle 23 is placed on the luggage carrier 30 such that the article 9 is directed toward the front of the unmanned transport vehicle 23 (that is, the lid 9 is opposed to the lid 29) when the article is transported, and the lid 29 is moved. Is closed to operate the FFU 31, and the traveling lane 32 juxtaposed in the transfer area 7 in FIG. 1 is driven while maintaining the cleanliness of the air in the local clean cabinet 28 at a high level. The automated guided vehicle 23 uses the laser guide system 26 to mount the reflectors 13, 13 ... Arranged on various surfaces in the process and on the wall surface facing the traveling lane 32 in the transfer area 7.
The traveling position is detected and the current traveling position is grasped, and the vehicle is turned in the traveling lane 32 adjacent to the transfer area 7 and the avoidance lane 33 arranged in parallel on the opposite side of the transfer area 7 across the traveling lane 32. , Is oriented in a direction substantially perpendicular to the normal traveling direction of the traveling lane 32. Then, the automated guided vehicle 23 moves forward,
The lid 29 provided on the front surface of the automatic guided vehicle 23 and the gate 17 provided on the transfer area 7 side are aligned and brought into close contact with each other.
Rubber sealing or the like is applied to the outer edge portion 28a on the front surface of the local clean cabinet 28 and the outer peripheral portion 17a of the gate 17. With this configuration, the lid 29 and the gate 1
When they are in close contact with each other, even if the lid 29 and the opening / closing door 18 are opened, the outside air does not flow in, and the cleanliness of the air inside the local clean cabinet 28 and the transfer area 7 does not decrease. Is configured. In addition to this, by increasing the atmospheric pressure inside the local clean chamber 28 and the transfer area 7 to be higher than the atmospheric pressure, or by combining the rubber sealing and the internal pressure increase, It is possible to prevent the cleanliness of the air inside the transfer area 7 from decreasing (that is, transfer between the mini-environments). Next, the lid 29 and the opening / closing door 18 are opened by the opening / closing mechanism 19, and the glass sheet 1 stored in the open cassette 11 inside the local clean storage 28 by the single-wafer transfer means 16.
.. are transferred directly to the processing device 5. After the transfer work of the glass plates 10 ... Is completed, the lid 29 and the opening / closing door 18 are closed again by the opening / closing mechanism 19, and the automatic guided vehicle 23 retreats / turns and returns to the traveling lane 32. In the present embodiment, the open cassette 11 which is the transported object 9
Transfer device 1 for transferring glass plates 10 ...
Although it is configured to be transferred to the processing device 5 one by one by 6,
The conveyed product 9 itself may be transferred into the processing device 5, or the open cassette of the conveyed product 9 may be provided with a lid to form a sealed conveyed product. If the cleanliness of the air in the clean room and the cleanliness of the air in the processing device 5 and the transfer area 7 may be the same, the local clean cabinet 28 mounted on the automated guided vehicle 23 of the present embodiment. And FFU
Even if 31 is omitted, the same effect can be obtained.

Next, a first embodiment of the conventional automated guided vehicle system will be described with reference to FIG. The automated guided vehicle 1 in the first embodiment of the conventional automated guided vehicle system is different from the automated guided vehicle 23 of this embodiment in that the lifting mechanism 2 is provided on the upper surface thereof.
Is provided, and the upper surface of the elevating mechanism 2 serves as a loading platform 2a for the transported object. A control unit 3 is arranged at the rear end of the automatic guided vehicle 1, and a laser guiding system 4 is provided above the control unit 3 so as to project therefrom. The automated guided vehicle 1 detects the reflectors arranged at various points in the process by the laser guiding system 4, and the control unit 3 manages the traveling based on the detected data. In this embodiment, the guide system of the automatic guided vehicle is the laser guide system which is easy to construct and change the layout, but the magnetic guide system which runs along the magnetic tape laid on the floor surface and the floor surface. It may be a light guide system that runs along a reflective tape laid on the.

On the other hand, in the processing device 5 such as the liquid crystal panel manufacturing device or the automatic warehouse, the transfer area 7 is provided in parallel on the traveling lane 6 side of the automatic guided vehicle 1 as in the present embodiment.
A big difference is that a loading area 8 is further provided between the transfer area 7 and the traveling lane.

The automatic guided vehicle 1 traveling on the traveling lane 6 with the transported article 9 placed on the loading platform 2a has a wall surface facing the traveling lane 6 in various places in the process and the transfer area 7, and a mounting area. Reflectors 13 ・ 13 ・
.. is detected by the laser guidance system 4 and the current traveling position is grasped, and the vehicle travels in the traveling lane 6 in front of the mounting area 8 and the avoidance lane 14 arranged in parallel with the traveling lane 6, 6 enters the mounting area 8 in a direction substantially perpendicular to the normal traveling direction of 6. At this time, the elevating mechanism 2 of the automatic guided vehicle 1 is operated to raise the lower surface of the transported object 9 placed on the loading platform 2a to a position higher than the upper surface of the buffer platform 15. Buffer stand 15 ・ 15 ・ ・ ・
Is adjacent to the driving lane 6 and has a buffer stand 15 ...
The automated guided vehicle 1 can enter under the vehicle. When the automated guided vehicle 1 enters the loading area 8, the automated guided vehicle 1 has a shelf shape protruding inward from the left and right sides of the automated guided vehicle 1, and when the elevator mechanism 2 is lowered, the transported article 9 is conveyed. Can be placed. After the transported object 9 is placed on the buffer base 15, the automatic guided vehicle 1 moves backward and turns to return to the traveling lane 6.

On the other hand, a transfer area 7 is provided in parallel in the processing device 5 such as a liquid crystal panel manufacturing apparatus or an automatic warehouse, and the transfer area 7 is adjacent to the traveling lane 6. In the transfer area 7, there is provided a single-wafer transfer means 16 that can move substantially in parallel along the traveling lane 6 of the automated guided vehicle 1 and has an elevating / rotating mechanism, and is mounted on the buffer stands 15, 15 ... Opened cassette 11, 11 ... Inside glass plate 10, 10 ...
・ Take out and transfer to the processing device 5.

As shown in FIG. 4, also in the first embodiment of the conventional automated guided vehicle system, the processing device 5 and the transfer area 7 can be a hermetically sealed container, and the opening portion of the open cassette 11 can be opened. A gate 17 is formed in the facing portion, an opening / closing door 18 of the gate 17 and an opening / closing mechanism 19 for operating the opening / closing door 18 are provided, and the air in the processing device 5 and the transfer area 7 is cleaned by an air cleaning device (Fig. It is possible to maintain a predetermined cleanliness (not shown) (that is, the inside of the processing device 5 and the inside of the transfer area 7 are used as a mini environment). However, since the air in the open cassette 11 has the same cleanliness as the air in the clean room, even if the cleanliness of the air in the processing device 5 and the transfer area 7 is higher than the cleanliness in the clean room, the transfer work is performed. When performing the cleaning, the air in the clean room is treated by the processing device 5 and the transfer area 7
It invades inside. Also, if the open cassette 11
Even if the closed cassette has a lid on the front side, since the transported object 9 is placed on the placement area 8 by the raising and lowering of the elevating mechanism 2, the opening of the closed cassette and the gate 17 are brought into close contact with each other, and The glass plates 10 ... 10 so that air does not flow into the processing device 5 and the transfer area 7.
Is difficult to reprint.

A second embodiment of the conventional automated guided vehicle system will be described with reference to FIG. The structure of the apparatus installed on the floor is substantially the same as that of the first embodiment shown in FIG. On the other hand, the automatic guided vehicle 20 is equipped with a transfer arm 21 capable of ascending and descending and extending to the side of the automatic guided vehicle 20, and a loading platform 22 is provided at the tip of the transfer arm 21. There is. The carrier 9 is used for loading the cargo 9 at the tip of the transfer arm 21.
The automated guided vehicle 20 traveling on the traveling lane 6 in a state of being placed on the vehicle 2 is mounted on the traveling lane 6 in various places in the process or in the transfer area 7.
, Which are disposed on the wall surface facing the wall, the wall surface of the mounting area 8, and the like, are detected by the laser guiding system 4 and the current traveling position is grasped.
It stops at a predetermined position on the driving lane 6 facing the road. Next, the transfer arm 21 of the automated guided vehicle 20 is raised so that the lower surface of the object 9 on the loading platform 22 arranged at the tip of the transfer arm 21 is higher than the upper surface of the buffer platform 15. Then, the transfer arm 21 is extended and made to enter between the buffer bases 15 and 15 in the mounting area 8, and in that state, the transfer arm 2
The article 9 is placed on the buffer stands 15 and 15 by lowering 1. If necessary, a weight (not shown) is mounted on the automatic guided vehicle 20 so that the transfer arm does not fall over even if the transfer arm is extended to the side of the automated guided vehicle 20 with the transported article 9 placed on the platform 22. It The structure of the transfer arm 21 is not limited to this embodiment, and for example, a mechanism for hooking a hook or the like is provided on the upper surface of the open cassette 11 of the transferred object 9 and the transferred object 9 is hung by a crane type transfer arm. Alternatively, the system may be mounted on the buffer base 15.

A plurality of buffer bases 15 are provided adjacent to the traveling lane 6, and when the transfer arm 21 is extended in the mounting area 8, the transfer arm 21, the loading platform 22 and the transported object 9 are provided. In order not to interfere with each other, the automated guided vehicle 20 has a shelf shape that extends from the left and right in a side view from a predetermined stop position for transferring the transported object 9. After placing the transported object 9 on the buffer table 15, the automatic guided vehicle 20 returns the transfer arm 21 to the outside of the loading area 8 to make it a posture not to interfere with the surroundings, and then starts traveling toward the next stop position. .

As in the first embodiment of the conventional automated guided vehicle system of FIG. 4, as shown in FIG. 5, in the second example of the conventional automated guided vehicle system, the processing device 5 and the transfer area 7 are It may be a closed container, a gate 17 is formed in a portion facing the opening of the open cassette 11, an opening / closing door 18 of the gate 17 and an opening / closing mechanism 19 for operating the opening / closing door 18 are provided, The air in the processing device 5 and the transfer area 7 can be maintained at a predetermined cleanliness by an air cleaning device (not shown) (that is, the inside of the processing device 5 and the transfer area 7 can be used as a mini environment). It is possible. However, since the air in the open cassette 11 has the same cleanliness as the air in the clean room, even if the cleanliness of the air in the processing device 5 and the transfer area 7 is higher than the cleanliness in the clean room, the transfer work is performed. When performing the cleaning, the air in the clean room is treated by the processing device 5 and the transfer area 7
It invades inside.

Therefore, the automated guided vehicle system of the present embodiment shown in FIGS. 1 and 2 has the following advantages over the conventional automated guided vehicle system shown in FIGS. 4 and 5.

First, in the conventional automated guided vehicle system, the system is moved to the loading area 8 by the lifting mechanism 2 mounted on the automated guided vehicle 1 or the transfer arm 21 mounted on the automated guided vehicle 20. The glass plates 10, 10 ... Stored in the open cassette 11, which is the transported object 9 placed.
While the single-wafer transfer means 16 was transferred from the placement area 8 to the processing device 5, in the unmanned guided vehicle system of this embodiment, the single-wafer transfer means 16 is the transported object 9. Glass plate 10, 10 ... stored in an open cassette 11
Is configured to be transferred directly from the loading platform 30 of the automated guided vehicle 24 to the processing device 5, and as a result, the conventional automated guided vehicle 1
By removing large parts such as the lifting mechanism 2, the transfer arm 21, and a weight (not shown) mounted on the unmanned guided vehicle 20, it is possible to reduce the weight of the unmanned guided vehicle 23. Therefore, even if a heavier load 9 is carried, the floor surface of the clean room is not deformed or curved, and the article can be carried smoothly. In the automated guided vehicle system of the present embodiment, the plate-like conveyed object is directly transferred by the single-wafer transfer means 16 provided in the processing device 5, but the heavy-weight transfer other than the plate-like transfer is performed. The object may be directly transferred by the transfer means arranged in the processing device. Furthermore, although the automatic guided vehicle system is particularly preferably used in a clean room where the floor is not so strong, it is not limited to the clean room. Preventing the weight of the automated guided vehicle prevents the traveling motor used and the battery serving as its power source from increasing in size, and is also useful in an automated guided vehicle system used in other than a clean room.

Secondly, in the automatic guided vehicle system of the present embodiment, the mounting area 8 which is completely unusable as a running space is unnecessary. As a result, it is possible to increase the number of processing devices 5 that can be installed on the floor surface, increase the degree of freedom of the layout of the traveling lane 32, and flexibly deal with the case where the layout is changed in the process. Is possible. Alternatively, the number of traveling lanes can be increased to reduce the stagnation of the automated guided vehicle. When the automated guided vehicle 1 enters the loading area 8 as in the first embodiment of the conventional automated guided vehicle system, as shown in FIG. .. (including those not shown in FIG. 4) were required for the seven reflection plates 13, 13 ... This is because, in order for the automated guided vehicle 1 to accurately grasp the position by the laser guiding system 4, it is desirable that the reflectors 13 are arranged at predetermined angles when looking around. In the case of the present invention, since there is no side wall surface of the mounting area 8, the number of the reflectors 13 to be attached to the processing device 5 side may be three, and the number of the reflectors 13 can be reduced. In addition to this, the space where the loading area 8 originally existed is set as the entry space, and the automated guided vehicle 23
If it is configured to perform transfer work in this entry space,
When the automated guided vehicle 23 turns, the distance between the wall surface of the transfer area 7 on which the reflection plate 13 is provided and the automated guided vehicle 23 can be set large, so that the reflection plate 13 provided on the wall surface of the transferred area 7 is provided.
It is possible to further reduce the number of The required number of reflectors 13 varies depending on the size of the device and the like, and is not limited to the conventional example and the example of the present invention.

Thirdly, in the case of the conventional automated guided vehicle 1 or the automated guided vehicle 20, since the automated guided vehicle itself is provided with the transfer means such as the lifting mechanism 2 and the transfer arm 21,
Mini-environment of the carrier of the automated guided vehicle,
Further, while it is difficult to transfer to and from the mini-environmentalized processing apparatus 5, the automatic guided vehicle 23 of the present invention is a local clean cabinet 28 in which the transported object 9 is mini-environmentalized. It is easy to carry the transfer object 9 in a state where it is housed inside, and further to transfer the transferred object 9 between the transfer area 7 and the processing device 5 which are mini-environmental. This means that even if the cleanliness of the air in the entire clean room is not increased, the local clean storage 2 of the automated guided vehicle 23
If the cleanliness of the air in the transfer area 7, the transfer area 7 and the processing device 5 is increased, it is possible to prevent the contaminant 9 from being contaminated, and the facility / maintenance cost related to the clean room can be suppressed. Particularly when handling a large-area semiconductor wafer or a glass plate for a liquid crystal panel, higher air cleanliness is required, which greatly contributes to the manufacturing cost.

[0026]

Since the present invention is constructed as described above,
The following effects are achieved.

That is, as described in claim 1, an unmanned transporting vehicle equipped with a loading platform on which articles are placed and traveling on the floor, and a transfer for directly loading the articles placed on the loading platform into the processing apparatus are provided. Since it includes a processing device equipped with mounting means,
The transfer station provided in the processing device is eliminated, and the transfer device and the elevating device required for the automatic guided vehicle to transfer the article to the transfer station, and the weight that prevents falling during transfer No need for heavy equipment such as Therefore, it is possible to effectively use the space provided with the transfer station, and it is possible to reduce the weight of the automatic guided vehicle. For example, even if a large-weight article is transferred, the floor surface of the clean room is deformed. -It is possible to suppress bending.

As described in claim 2, since the space in which the automatic guided vehicle stops during the article transfer work is used as the traveling route of the automatic guided vehicle, the number of processing devices installed on the floor can be increased. This makes it easy to change the layout of the driving lane.

According to a third aspect of the present invention, since the automatic guided vehicle is equipped with the laser guiding system and the processing device is provided with the reflection plate, the automatic guided vehicle can be accurately mounted on the mounting area having a complicated shape. It is possible to reduce the number of reflectors that were required in large numbers to enter.

[Brief description of drawings]

FIG. 1 is a perspective view showing the overall configuration of an automated guided vehicle system according to the present embodiment.

FIG. 2 is a right side view of the automatic guided vehicle according to the present embodiment.

FIG. 3 is a perspective view of a conveyed object.

FIG. 4 is a perspective view showing an overall configuration of a first example of a conventional automated guided vehicle system.

FIG. 5 is a perspective view showing the overall configuration of a second embodiment of a conventional automated guided vehicle system.

[Explanation of symbols]

4 Laser guidance system 5 processor 9 Transported items 13 Reflector 16 Transfer means 23 Automated guided vehicles 30 cargo bed 32 driving lanes 33 Avoid Lane

Claims (3)

[Claims] 1. A loading platform for loading articles,
An unmanned guided vehicle system comprising: an unmanned guided vehicle that travels on a floor; and a processing device including a transfer unit that transfers an article placed on the loading platform directly into the processing device. 2. The automated guided vehicle system according to claim 1, wherein a space where the automated guided vehicle stops during an article transfer operation is used as a traveling route of the automated guided vehicle. 3. The automated guided vehicle system according to claim 1, wherein the guided vehicle is equipped with a laser guiding system, and the processing device is provided with a reflector.