JPS63159835U - - Google Patents
Info
- Publication number
- JPS63159835U JPS63159835U JP5256387U JP5256387U JPS63159835U JP S63159835 U JPS63159835 U JP S63159835U JP 5256387 U JP5256387 U JP 5256387U JP 5256387 U JP5256387 U JP 5256387U JP S63159835 U JPS63159835 U JP S63159835U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cassette
- contact portion
- transport
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は本考案の複数の点支持を採用した搬送
機の動きを示しており正面図である。第２図はそ
の側面図であり、ウエーハ１がホルダーベース２
に設けられたホルダーピン３の先に載つている様
子を示している。
１……ウエーハ、２……ホルダーベース、３…
…ホルダーピン、４……搬送アーム、５……キヤ
リア、６……ウエーハ処理部。
FIG. 1 is a front view showing the movement of a conveyor that employs multiple point support according to the present invention. Figure 2 is a side view of the wafer 1 and the holder base 2.
It is shown that it is placed on the tip of the holder pin 3 provided in the. 1...Wafer, 2...Holder base, 3...
...Holder pin, 4...Transfer arm, 5...Carrier, 6...Wafer processing section.
Claims (1)
有する、半導体製造装置の搬送系において、ウエ
ーハ搬送部のウエーハとの接触部に複数の点支持
を有することを特徴とする半導体ウエーハの搬送
機。 A cassette-to-cassette transport system for semiconductor manufacturing equipment having an automatic wafer transport machine, characterized in that a wafer transport section has a plurality of point supports at a contact portion with a wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5256387U JPS63159835U (en) | 1987-04-06 | 1987-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5256387U JPS63159835U (en) | 1987-04-06 | 1987-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159835U true JPS63159835U (en) | 1988-10-19 |
Family
ID=30877841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5256387U Pending JPS63159835U (en) | 1987-04-06 | 1987-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159835U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009022589A1 (en) * | 2007-08-13 | 2009-02-19 | Hirata Corporation | Automatic warehouse system and container transfer method for the same |
-
1987
- 1987-04-06 JP JP5256387U patent/JPS63159835U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009022589A1 (en) * | 2007-08-13 | 2009-02-19 | Hirata Corporation | Automatic warehouse system and container transfer method for the same |
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