CN103303676A - Automation equipment for picking and placing large-sized liquid crystal substrate - Google Patents

Automation equipment for picking and placing large-sized liquid crystal substrate Download PDF

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Publication number
CN103303676A
CN103303676A CN2013102410862A CN201310241086A CN103303676A CN 103303676 A CN103303676 A CN 103303676A CN 2013102410862 A CN2013102410862 A CN 2013102410862A CN 201310241086 A CN201310241086 A CN 201310241086A CN 103303676 A CN103303676 A CN 103303676A
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CN
China
Prior art keywords
pallet
cushion rubber
card casket
substrate
picks
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2013102410862A
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Chinese (zh)
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CN103303676B (en
Inventor
汪永强
吴俊豪
林昆贤
齐明虎
杨卫兵
陈增宏
蒋运芍
舒志优
杨国坤
李晨阳子
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Priority to CN201310241086.2A priority Critical patent/CN103303676B/en
Priority to PCT/CN2013/077808 priority patent/WO2014201706A1/en
Publication of CN103303676A publication Critical patent/CN103303676A/en
Application granted granted Critical
Publication of CN103303676B publication Critical patent/CN103303676B/en
Expired - Fee Related legal-status Critical Current
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

The embodiment of the invention discloses automation equipment for picking and placing a large-sized liquid crystal substrate, which comprises a cartridge lifting module, a cartridge pushing and pulling module, a cushion pick-and-place module and a substrate jacking mechanism. According to the embodiment of the invention, the large-sized liquid crystal substrate can be picked and placed automatically, so that the manpower is saved, the productivity is increased, and breakage probability of the liquid crystal substrate is reduced.

Description

A kind of automation equipment that picks and places the large scale liquid crystal substrate
Technical field
The present invention relates to thin film transistor (Thin Film Transistor, TFT) technology, particularly a kind of automation equipment that picks and places the large scale liquid crystal substrate.
Background technology
In recent years, market is increasing to the demand of large scale liquid crystal substrate more than 55 cun.But; because the large size panel size is large; thin thickness; when the remote conveyance large size panel of needs; for example test demand or the far apart situation of front and back process apparatus, need trans-regional, stride floor, stride, stride factory's conveyance, conveyance instrument smoothness planeness relatively poor or ground when motion is relatively poor and cause the vibrations of jolting; if protect badly, very easily cause panel ruptures.
The general tool (such as pallet) that adopts is placed the large scale liquid crystal substrate on the manufacturing line at present, but, if by manually crystal liquid substrate being put into to pallet, perhaps from pallet, take out, operating process is very difficult, not only needs to expend a lot of time and a lot of manpowers, and careless slightly, will damage crystal liquid substrate, therefore how to realize that safety picks and places the large scale liquid crystal substrate and becomes a technical matters anxious to be resolved.
Summary of the invention
Technical matters to be solved by this invention is, a kind of automation equipment that picks and places the large scale liquid crystal substrate is provided, and can safely and automatically pick and place or carry the large scale liquid crystal substrate.
In order to solve the problems of the technologies described above, the one side of embodiments of the invention provides a kind of automation equipment that picks and places the large scale liquid crystal substrate, comprising:
Card casket lifting module, its inside is provided with the card casket for a plurality of pallets of stacked placement, but described pallet level skids off or slips into described card casket;
Card casket push-and-pull module, be positioned at over against the pallet of described card casket lifting module and skid off on the operator's station of direction, it is used for adsorbing a pallet of described card casket, and drives described pallet and slip into or skid off, and makes the movement between described service platform and described card casket of described pallet;
Cushion rubber picks and places module, be positioned at described operator's station one side, be provided with the cushion rubber fetching device on it, described cushion rubber fetching device can move to described operator's station top, be used for to be positioned at the second cushion rubber that the pallet on the operator's station is covered on the crystal liquid substrate and take out, perhaps the second cushion rubber is positioned in the described pallet on the crystal liquid substrate;
The substrate lifting body, be positioned at described operator's station below, comprise at least a plurality of jacking pins that can above-below direction move, the penetrable described pallet that is positioned on the operator's station of described jacking pin, and be held in the bottom of the crystal liquid substrate in the described pallet, described crystal liquid substrate is separated with described pallet.
Wherein, described card casket lifting module specifically comprises:
Lifting module frame, it is provided with opening in a side at least;
The card casket, be arranged at described lifting module frame inner, be provided with the strut member with the first roller on its two lateral walls, the described pallet that is placed with crystal liquid substrate can be positioned on the described strut member, and described pallet can slip into or skid off described card casket with respect to described strut member;
Elevating drive mechanism is fixed in described lifting module frame bottom, is used for supporting described card casket, and drives described card casket up-and-down movement to adjust the position of described card casket.
Wherein, described elevating drive mechanism includes a lifting table, be provided be used to the card casket horizontal alignment cylinder of adjusting described card casket level attitude in four ends of described lifting table, and in lifting table and the place that the card casket contacts, evenly be provided with a plurality of floating support devices be used to adjusting described card casket upright position.
Wherein, described pallet is the box body of upper opening, and its bottom is provided with a plurality of jacking pin via holes, and the jacking pin of substrate lifting body passes; Be provided with at least one magnetic attracting device on the one side, for described card casket push-and-pull module absorption;
Be placed with crystal liquid substrate on the described pallet, be provided with the first cushion rubber between described crystal liquid substrate and described pallet, relevant position, described the first cushion rubber bottom also is provided with a plurality of jacking pin via holes; The top of described crystal liquid substrate is coated with described the second cushion rubber.
Wherein, described card casket push-and-pull module comprises:
Be arranged at the slide unit of the frame top both sides of described operator's station, be provided with the second roller on it, slide thereon for pallet;
Magnetic chuck is used for adsorbing the magnetic attracting device on the described pallet side wall when energising;
The magnetic chuck telescopic cylinder is used for driving described magnetic chuck and moves, so that its pallet that adsorbs slides at described slide unit.
Wherein, described substrate lifting body comprises:
Jacking pin adapter plate is equipped with a plurality of jacking pins on it;
The jacking cylinder is arranged at the downside of described jacking adapter plate, and itself and described operator's station frame fix, and is used for driving the lifting of described jacking pin adapter plate;
A plurality of jacking guide pillars are arranged at the downside of described jacking pin adapter plate, match with guide pin bushing on being arranged at described operator's station frame, make between described jacking pin adapter plate and the described operator's station frame to be flexibly connected.
Wherein, described cushion rubber picks and places module and comprises:
Pick and place the module frame, wherein can deposit a plurality of the second cushion rubbers;
The cushion rubber fetching device, be arranged at the described top that picks and places the module frame, this cushion rubber fetching device can move to the top of operator's station, the second cushion rubber that is used for being arranged in the pallet crystal liquid substrate top on the operator's station takes out to be put in and picks and places the module frame, and second cushion rubber that perhaps will pick and place in the module frame takes out on the crystal liquid substrate that is positioned in the described pallet;
Pick and place the module lifting mechanism, be fixedly installed on the described bottom that picks and places the module frame, be used for supporting picking and placeing the second cushion rubber that the module frame is deposited, and can drive the lifting of described the second cushion rubber, to adjust the position of described the second cushion rubber.
Wherein, described cushion rubber fetching device further comprises:
Sliding support, it matches with linear slide rail on the erection support, with described mobile between picking and placeing above module frame and the described operator's station, wherein, described erection support is arranged at the both sides that cushion rubber picks and places the module top, and extend to the top of described operator's station, and be provided with a linear slide rail at each erection support;
Linear motor is used for driving described sliding support mobile at described linear slide rail;
Pressing plate, itself and described sliding support are flexibly connected, and are arranged under the described sliding support, and it is used for the location and compresses the pallet that is positioned on the described operator's station;
Suction disc, itself and described pressing plate are flexibly connected, and are positioned at described pressing plate below, are used for the second cushion rubber of adsorbing tray or absorption and pick and place the second cushion rubber in the module frame.
Wherein, described pressing plate is formed with locating plate in four sides, is used for pallet is positioned and compresses, and is fixed with a pressing plate cylinder at the middle part of described pressing plate, is used for driving described pressing plate and carries out dipping and heaving
Described suction disc comprises many pressing plate grooves, described pressing plate groove is the trough body structure under shed, the interval arranges a plurality of suckers for absorption the second cushion rubber on described pressing plate groove, on described suction disc, also be provided with at least one suction disc cylinder, be used for the switching that drives the lifting of described suction disc and control described sucker.
Wherein, further comprise:
The substrate fetching device, it comprises a cross bar and is arranged at a plurality of parallel supporting blade on the described cross bar, wherein, described a plurality of supporting blades are roughly in the same plane, are provided with a plurality of bumper rings on each supporting blade and the one side that crystal liquid substrate contacts.
Implement the embodiment of the invention, have following beneficial effect:
According to embodiments of the invention, liquid crystal panel automatically can be moved between card casket and process work bench, and safety is good;
It places pallet by crystal liquid substrate is rotated, and adopts the first cushion rubber and the second cushion rubber to fix, and can guarantee the safety of liquid crystal panel in transportation;
When from pallet, taking out crystal liquid substrate, play crystal liquid substrate by the jacking needle holder on the lifting body, can hold in the palm very reposefully and get crystal liquid substrate, and the mode of substrate fetching device employing bottom pick, the damage to crystal liquid substrate further can be reduced;
The present invention can save manpower, promotes automatization level (lifting of stay in grade type), promotes production capacity, reduces fragmentation.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, accompanying drawing in the following describes only is some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is according to a kind of principle of work schematic diagram that picks and places the automation equipment of large scale liquid crystal face substrate of the present invention;
Fig. 2 is the package assembly schematic diagram among a kind of embodiment of automation equipment that picks and places large scale liquid crystal face substrate according to the present invention;
Fig. 3 is the integral structure schematic diagram of card casket lifting module among Fig. 2;
Fig. 4 is the STRUCTURE DECOMPOSITION schematic diagram of card casket lifting module among Fig. 3;
Fig. 5 is that the card casket is positioned over the partial result schematic diagram on the elevating drive mechanism;
Fig. 6 is the STRUCTURE DECOMPOSITION schematic diagram of card casket among Fig. 4;
Fig. 7 is the enlarged drawing of the local A among Fig. 6;
Fig. 8 is the STRUCTURE DECOMPOSITION schematic diagram of pallet among Fig. 6;
Fig. 9 is positioned at card casket push-and-pull module on the operator's station and the structural representation of substrate lifting body in the one embodiment of the invention;
Figure 10 is the lateral plan of operator's station in the one embodiment of the invention;
Figure 11 is that cushion rubber picks and places module from the view of operator's station crawl cushion rubber in the one embodiment of the invention;
Figure 12 is the cushion rubber fetching device integral structure schematic diagram in the one embodiment of the invention;
Figure 13 is the structural representation of sliding support among Figure 12;
Figure 14 is the structural representation of Figure 12 center platen;
Figure 15 is the structural representation of suction disc among Figure 12;
Figure 16 be Figure 11 A-A to cross-sectional schematic;
Figure 17 is the enlarged drawing of the local B among Figure 16;
Figure 18 is the structural representation that cushion rubber picks and places the lifting mechanism of module in the one embodiment of the invention;
Figure 19 is the effect schematic diagram of placing in frame in the one embodiment of the invention behind the lifting mechanism;
Figure 20 is the structural representation of the substrate fetching device in the one embodiment of the invention.
The specific embodiment
Below with reference to accompanying drawing the preferred embodiments of the present invention are described.
As shown in Figure 1, show a kind of principle of work schematic diagram that picks and places the automation equipment of large scale liquid crystal face substrate of the present invention, therefrom can find out, this automation equipment comprises:
Card casket lifting module 1, its inside is provided with the card casket for a plurality of pallets of stacked placement, but this pallet level skids off or slips into the card casket;
Operator's station 2, its pallet over against described card casket lifting module 1 skids off direction, is provided with card casket push-and-pull module 3 on this operator's station, and it is used for a pallet of absorption card casket, and drive this pallet and slip into or skid off, make this pallet mobile between service platform and card casket; In addition, this operator's station below also is provided with substrate lifting body 4, and this substrate lifting body 4 is used for being positioned at the steady jacking of crystal liquid substrate of the pallet on the operator's station 2, will break away from this pallet;
Cushion rubber picks and places module 5, be positioned at operator's station 2 one sides, be provided with cushion rubber fetching device 6 on it, this cushion rubber fetching device 6 can move to operator's station 2 tops, the cushion rubber that is covered on the crystal liquid substrate for the pallet that will be positioned on the operator's station 2 takes out, and perhaps cushion rubber is positioned on this crystal liquid substrate;
In addition, also comprise a substrate fetching device 7, this substrate fetching device 7 is after substrate lifting body 4 is with the crystal liquid substrate jacking, can move into the pallet that is arranged on the operator's station, and hold the crystal liquid substrate in this pallet and be moved in the process work bench 8, or the crystal liquid substrate that process work bench 8 places have been handled well is returned to the pallet that is arranged on the operator's station 2.
As shown in Figure 2, be according to the present invention the package assembly schematic diagram among a kind of embodiment of automation equipment that picks and places large scale liquid crystal face substrate.Therefrom can find out, card casket lifting module 1 and operator's station 2 over against, and cushion rubber picks and places the side that module 5 is positioned at operator's station 2.The card casket can shift between card casket lifting module 1 and operator's station 2, and cushion rubber can pick and place transfer between the module 5 at operator's station 2 and cushion rubber.
Following in connection with accompanying drawing 3 to accompanying drawing 20, all parts that the present invention is picked and placeed among embodiment of automation equipment of large scale liquid crystal face substrate is elaborated.
As shown in Figure 3, be the integral structure schematic diagram of card casket lifting module 1 among Fig. 2.Therefrom can find out, this card casket lifting module 1 specifically comprises:
Lifting module frame 10, it is framed structure, and is provided with opening in a side at least;
Card casket 12 is arranged at lifting module frame 10 inside, and its inside is placed with a plurality of pallets 121;
Elevating drive mechanism 14 is fixed in the bottom of lifting module frame 10, is used for support card casket 12, and can driver card casket 12 up-and-down movements to adjust the position of this card casket 12.
Again please in conjunction with shown in Figure 4, it is the STRUCTURE DECOMPOSITION figure of card casket lifting module 1 among Fig. 3, therefrom can find out, card casket 12 is similar drawer basket structure, it comprises card casket framework 120 and at least one pallet 121 that is placed therein, and pallet 121 is used for placing crystal liquid substrate, wherein, pallet 121 can slip into or skid off card casket framework 120, is provided with at least one magnetic attracting device 1217 in each pallet 121 side outwardly.
And elevating drive mechanism 14 includes a lifting table 144, it is used for support card casket 12, these lifting table 144 both sides are connected with feed screw nut 149, be arranged at the first motor 142 of bottom by driving adapter shaft 142, effect by deflector 145 is rotated screw mandrel 147, thereby drive moving up and down of feed screw nut 149, lifting table 144 is moved up and down along the slide rail (not shown) in the slide rail bearing 150, for example in one embodiment, the first motor 142 forwards, then lifting table 144 rises, and 142 counter-rotatings of the first motor, then lifting table 144 descends.
Again please by reference to the accompanying drawings shown in 5, it is positioned over partial result schematic diagram on the elevating drive mechanism 14 for card casket 12.In order to make card casket 12 accurate in level or vertical direction position, on elevating drive mechanism 14, also be provided with the device that to finely tune blocking casket 12 level attitudes and upright position.Particularly, be provided with card casket horizontal alignment cylinder 148 in four ends of lifting table 144, it is used for holding four base angles of card casket 12, and can block casket 12 residing level attitudes by the adjustment that is used for of cylinder; In addition, in lifting table 144 and the place that card casket framework 120 contacts, evenly be provided with a plurality of floating support devices 146, by this floating support device 146, can finely tune the upright position of card casket 12.
As shown in Figure 6, it is the STRUCTURE DECOMPOSITION schematic diagram of card casket 12 among the present invention, for the ease of seeing the structure of card casket 12 inside clearly, card casket framework 120 has in the figure been removed top cover, and only show a pallet 121, when being understandable that, in the application of reality, this card casket framework 120 can be provided with top cover, and can place a plurality of pallets 121 in the card casket framework 120.In the lump in conjunction with the partial enlarged drawing among Fig. 7.In the present embodiment, be provided with at least one group of strut member 1204 on the two lateral walls of card casket framework 120, pallet 121 is positioned on the strut member 1204.Pallet 121 can slide at strut member 1204, for example, slips into or skid off card casket framework 120 with respect to this strut member 1204.Pallet 121 adopts the rigidity hard materials, for the crystal liquid substrate that is arranged at wherein provides the flat support face, and increases the strong point to the crystal liquid substrate panel, can reduce Oscillation Amplitude in the process of moving, and effectively prevents crystal liquid substrate distortion or fragmentation.Simultaneously, relative sliding between pallet 121 and the strut member 1204 has adopted the pull principle of drawer, pallet 121 is positioned on the strut member 1204, at first spur pallet 121, make pallet 121 skid off card casket framework 120, after being placed on crystal liquid substrate in the pallet 121, promote pallet 121, make pallet 121 slip into card casket framework 120, so, when crystal liquid substrate being positioned in the pallet 121 or it is taken out, only need push-and-pull pallet 121, the application of force on pallet 121 from pallet 121, drive crystal liquid substrate by pallet 121 and slip into or skid off card casket framework 120, such operation can not cause external force to crystal liquid substrate, can effectively avoid when placing or take out crystal liquid substrate, causes the situation of crystal liquid substrate fragmentation to occur because the application of force is improper.Wherein, by adsorbing and apply driving being arranged at magnetic attracting device 1217 on each pallet 121 sidewall, namely can this pallet 121 of push-and-pull.In order to make steadily turnover card casket framework 120 of pallet 121, be provided with a plurality of the first rollers 1202 on the strut member 1204 of the present invention.And the rear side (opposite side relative with a side of opening) in card casket framework 120 is provided with positive stop strip 1206.
As shown in Figure 8, be the STRUCTURE DECOMPOSITION schematic diagram of the pallet 121 among this Fig. 6.In the present embodiment, pallet 121 is the box body of upper opening, and the bottom of pallet 121 is provided with the first cushion rubber 1214, and crystal liquid substrate 1212 is positioned on the first cushion rubber 1214 of pallet 121 bottoms.The first cushion rubber 1214 can adopt the material such as dustless foam, its can to the bottom of crystal liquid substrate 1212/and sidepiece buffering is provided, with protection crystal liquid substrate 1212 in the process of moving.Be understandable that, in one embodiment, this first cushion rubber 1214 can comprise bottom bumper pad and sidewall cushion rubber particularly.
In addition; pallet 121 also can comprise the second cushion rubber 1210 that is positioned at the top; the second cushion rubber 1210 also adopts dustless foam; when crystal liquid substrate 1212 is positioned on first cushion rubber 1214 of bottom of pallet 121; the second cushion rubber 1210 is positioned over crystal liquid substrate 1212 tops; with the first cushion rubber 1214 holding liquid crystal substrates 1212 of bottom, to provide omnibearing protection to crystal liquid substrate 1212.
Wherein, the correspondence position on pallet 121 and the first cushion rubber 1214 is provided with a plurality of corresponding jacking pin via holes 1218.
As shown in Figure 9, show the card casket push-and-pull module 3 that is positioned in the one embodiment of the invention on the operator's station and the structural representation of substrate lifting body 4.Therefrom can find out, this card casket push-and-pull module 3 comprises:
Be arranged at the slide unit 30 of both sides, operator's station frame 20 top, be provided with a plurality of the second rollers 32 on the above-mentioned slide unit 30, slide thereon for pallet 121;
Magnetic chuck 34 is used for the magnetic attracting device 1217 on 121 sidewalls of adsorbing tray after the energising;
Magnetic chuck telescopic cylinder 36 is used for driving magnetic chuck 34 and moves, so that its pallet that adsorbs 121 slides at slide unit 30.
By this card casket push-and-pull module 3, can adsorbing tray 121, and draw it and from card casket 12, skid off and slide at slide unit 3, thus pallet 121 can be positioned over the top of operator's station frame 20.Otherwise, also pallet 121 can be pushed into the card casket 12 from operator's station frame 20 tops.
In conjunction with shown in Figure 10, figure 10 illustrates the lateral plan of operator's station 2 in the lump.Also be provided with substrate lifting body 4 below card casket push-and-pull module 3, this its plate lifting machine structure 4 comprises:
Jacking pin adapter plate 40 is equipped with a plurality of jacking pins 42 on it;
Jacking cylinder 44 is arranged at the downside of jacking adapter plate 40, and itself and operator's station frame 20 fix, and is used for driving 40 liftings of jacking pin adapter plate, particularly, promotes jacking pin adapter plates 40 by a cylinder conductive post 46 and rises or descend;
In addition, also comprise a plurality of jacking guide pillars 48, be arranged at the downside of jacking pin adapter plate 40, match with the guide pin bushing on being arranged at operator's station frame 20, make between jacking pin adapter plate 40 and the operator's station frame 20 and be flexibly connected, only move at above-below direction with restriction jacking adapter plate 40, and can not move in the horizontal direction.
Wherein, when the 40 driven rising of jacking pin adapter plate, the jacking pin 34 that is installed on it, can pass the jacking pin via hole 1218 in pallet 121 and the first cushion rubber 1214, be resisted against the bottom of crystal liquid substrate 1214, and with this crystal liquid substrate 1214 pulsation-frees picking-up, make crystal liquid substrate 1214 break away from these pallets 121.
Following in connection with accompanying drawing 11 to Figure 20, illustrate that the cushion rubber in the embodiment of the invention picks and places the detailed structure of module 5.
As shown in figure 11, it shows cushion rubber in the one embodiment of the invention and picks and places module 5 from the view of operator's station crawl cushion rubber.In the present embodiment, this cushion rubber picks and places module 5 and comprises:
Pick and place module frame 50, wherein can deposit a plurality of the second cushion rubbers 1210;
Cushion rubber fetching device 6, be arranged at the top that this picks and places module frame 50, this cushion rubber fetching device 6 can move to the top of operator's station 2, the second cushion rubber 1210 that is used for being arranged in the pallet 121 crystal liquid substrate tops on the operator's station 2 takes out to be put in and picks and places module frame 50, and second cushion rubber 1210 that perhaps will pick and place in the module frame 50 takes out on the crystal liquid substrate that is positioned in this pallet 121;
Pick and place module lifting mechanism 52, be fixedly installed on the bottom that picks and places module frame 50, be used for supporting picking and placeing the second cushion rubber that module frame 50 is deposited, and can drive the lifting of these the second cushion rubbers, to adjust the position of these the second cushion rubbers.
In conjunction with shown in Figure 12, Figure 12 is the integral structure schematic diagram of the cushion rubber fetching device 6 in the embodiment of the invention in the lump.Therefrom can find out, this cushion rubber fetching device 6 comprises:
Sliding support 61, it matches with linear slide rail 53 on the erection support 51 by a plate 54, this sliding frame 61 can be mobile between picking and placeing above module frame 50 and the operator's station 2, wherein, this erection support 51 is arranged at the both sides that cushion rubber picks and places module 5 tops, and extend to the top of operator's station 2, and be provided with linear slide rail 53 at each erection support 51; Wherein, this sliding support 61 is driven by a linear motor (not shown), with mobile at linear slide rail 53;
Pressing plate 62, itself and this sliding support 61 is flexibly connected, and is arranged under this sliding support 61, and it is used for the location and compresses the pallet 121 that is positioned on the operator's station 2;
Suction disc 64, itself and this pressing plate 62 is flexibly connected, and is positioned at this pressing plate 62 belows, is used for the second cushion rubber 1210 of adsorbing tray 121 or adsorbs the second cushion rubber that picks and places in the module frame 50.
Following in conjunction with Figure 13 to Figure 16, the structure of this cushion rubber fetching device 6 is described in detail.
As shown in figure 13, be the structural representation of Figure 12 sliding support 61.In the present embodiment, this sliding support 61 is the framed structure of a square, and it is comprised of some cross bars (plate) 611 and montant 610.Its cross bar 611 at both ends is provided with connecting panel 54, and this connecting panel 54 is used for matching with linear slide rail 53 on the erection support 51; Be provided with cylinder via hole 613 at the middle part of this sliding support 61, it also is provided with a plurality of the first guide pillar holes 612.
As shown in figure 14, be the structural representation of Figure 12 center platen 62.In the present embodiment, this pressing plate 62 is framed structure, and it is formed with locating plate 621 in four sides, is used for pallet 121 is positioned and compresses.Be fixed with a pressing plate cylinder 624 at the middle part of this pressing plate, be used for driving pressing plate 62 and carry out dipping and heaving.This pressing plate lift cylinder 624 is arranged in the cylinder via hole 613 at sliding support 61 middle parts, in addition, on this pressing plate 62, also be provided with a plurality of first and lead village 622, it can wear the first corresponding on the sliding support 61 guide pillar hole 612, and fix with guide pin bushing in the upper end, thereby this pressing plate 62 and sliding support 61 are flexibly connected.In addition, on this pressing plate 62, also be provided with a plurality of the second guide pillar holes 623.
As shown in figure 15, be the structural representation of suction disc in the present embodiment 63.In the present embodiment, this suction disc 63 is framed structure, and it comprises many pressing plate grooves 630, and this pressing plate groove 630 is the trough body structure under shed, and the interval arranges a plurality of suckers 633 on this pressing plate groove 630, and wherein, these suckers 633 are used for the adsorption-buffering pad; A plurality of the second guide pillars 631 also are set on this pressing plate groove 630, and this second guide pillar 631 matches with the second guide pillar hole 623 on the pressing plate 62, so that suction disc 63 is flexibly connected with pressing plate 62; In addition, on this suction disc 63, also be provided with at least one suction disc cylinder 632, be used for driving the lifting of suction disc 63 and the switching of control sucker 633.
Again please in conjunction with shown in Figure 16, its be Figure 11 A-A to cross-sectional schematic, come together to illustrate in the lump the principle of work of cushion rubber fetching device in conjunction with the partial enlarged drawing among Figure 17.Below, describe as example to get cushion rubber from the pallet 121 of operator's station 2;
When 6 work of cushion rubber fetching device, at first, linear motor driven sliding support 61 arrives work station (for example top of operator's station);
At this moment, pressing plate lift cylinder 624 drives pressing plate 62 and suction disc 63 descends together, it is spacing that the locating plate 621 of pressing plate 62 is pushed down the edge of pallet 121, can be referring to shown in Figure 17, wherein show locating plate 621 end of pallet 121 and the first cushion rubber 1214 of having pressed simultaneously the position, with the location and compress this pallet 121;
Then suction disc cylinder 632 drives suction disc 63 declines, and sucker 633 vacuum are started, and the sucker of suction disc 63 is adsorbed the second cushion rubber 1210;
Pressing plate lift cylinder 624 is retracted, and drives pressing plate 62 and suction disc 63 and rises to together most significant bit;
What linear motor driven sliding support 61 arrived that cushion rubbers pick and place module slows down die head station (namely picking and placeing the top of module frame 50);
Pressing plate lift cylinder 624 stretches out, and drives pressing plate 62 and suction disc 63 and descends together, and remove the vacuum of sucker 623 by suction disc cylinder 632, allows the second cushion rubber 1210 put into and picks and places module frame 50;
Need this moment the integral body of control cushion rubber to descend (falling head=cushion rubber thickness), be in all the time sustained height so that cushion rubber picks and places the position; Simultaneously, pressing plate lift cylinder 624 and suction disc cylinder 2 are retracted, and are reset to initial state, wait for next actuation cycle.
And the process of cushion rubber being taken out from pick and place module frame 50 and being positioned in the pallet of operator's station 2 is opposite with above-mentioned steps, does not describe in detail at this.
As shown in figure 18, be that cushion rubber picks and places the structural representation that picks and places module lifting mechanism 52 in the module in the one embodiment of the invention.In the lump in conjunction with shown in the effect schematic diagram among Figure 19.This picks and places module lifting mechanism 52 and comprises a cushion rubber placement platform 520, is used for placing cushion rubber.Be provided with the second motor (not shown) below this cushion rubber placement platform 520, it is by driving adapter shaft 521, effect by cross deflector 522 is rotated adapter shaft 523, effect by coupler 524 and turbine box 526, the scroll bar 526 that is positioned at four jiaos of cushion rubber placement platform 520 bottoms is rotated, under the effect of a plurality of scroll bars 526, can make cushion rubber placement platform 520 rise or descend, for example in one embodiment, the second motor forward, then cushion rubber placement platform 520 rises, and the counter-rotating of the second motor, then cushion rubber placement platform 520 descends.
As shown in figure 20, be the structural representation of the substrate fetching device 7 in the one embodiment of the invention.In this embodiment,
, the large scale liquid crystal panel easily and safely can be transferred between card casket and process work bench by the automation equipment that picks and places the large scale liquid crystal panel of the present invention the introduction about the construction that picks and places the automation equipment of large scale liquid crystal panel of the present invention according to above-mentioned.
In a kind of application scenarios, take out crystal liquid substrate from card the casket, and be passed to process work bench and process, roughly workflow is as follows for it:
To block casket 12 is positioned on the lifting module frame 10, carry out the horizontal direction location by the card casket 12 horizontal alignment cylinders 148 in the elevating drive mechanism 14, and carry out vertical direction in conjunction with floating support device 146 and locate, make certain pallet 121 in the card casket 12 be in suitable position;
The magnetic attracting device 1217 of magnetic chuck 34 on 121 sidewalls of adsorbing tray after the energising of card casket push-and-pull module 3, and this pallet 121 pulled out from card casket 12, make it slide out to the top of operator's station 2;
Cushion rubber picks and places moving operator's station 2 tops of cushion rubber fetching device 6 translations of module 5, the second cushion rubber 1210 on the pallet 2 is taken out and is put in pick and place in module 5 frames, and detailed process sees the description of preamble for details;
Substrate lifting body 4 will be arranged in crystal liquid substrate 1212 jackings of the pallet 12 of operator's station 2, break away from pallet 121;
Substrate fetching device 7 stretches in the space between crystal liquid substrate 1212 and the pallet 121, crystal liquid substrate 1212 is taken out deliver to process work bench 8.
In the Another application scene, will process the crystal liquid substrate that has processed at process work bench, move back in the card casket, roughly workflow is as follows for it:
Substrate fetching device 7 takes out worked-out crystal liquid substrate from process work bench 8, be put on the jacking pin 42 of jacking of lifting body 4;
Lifting body 4 descends, and crystal liquid substrate is positioned on the first cushion rubber 1214 of pallet 121 interior lower floors;
The cushion rubber fetching device 6 that cushion rubber picks and places module 5 takes out cushion rubber from pick and place module frame 50, and moves to operator's station 2 tops, and is put in pallet 121 interior crystal liquid substrates 1212 tops;
The pallet 121 that card casket push-and-pull module 3 will have been placed crystal liquid substrate 1212 and the first cushion rubber 1214 pushes back in the card casket 12.
Implement the embodiment of the invention, have following beneficial effect:
In summary it can be seen that a kind of automation equipment that picks and places the large scale liquid crystal panel that the embodiment of the invention provides liquid crystal panel automatically can be moved, and safety is good between card casket and process work bench;
It places pallet by crystal liquid substrate is rotated, and adopts the first cushion rubber and the second cushion rubber to fix, and can guarantee the safety of liquid crystal panel in transportation;
When from pallet, taking out crystal liquid substrate, play crystal liquid substrate by the jacking needle holder on the lifting body, can hold in the palm very reposefully and get crystal liquid substrate, and the mode of substrate fetching device employing bottom pick, the damage to crystal liquid substrate further can be reduced;
The present invention can save manpower, promotes automatization level (lifting of stay in grade type), promotes production capacity, reduces fragmentation.
Above disclosed is preferred embodiment of the present invention only, certainly can not limit with this interest field of the present invention, so equivalent variations, still belongs to the scope that the present invention is contained.

Claims (10)

1. an automation equipment that picks and places the large scale liquid crystal substrate is characterized in that, comprising:
The card casket lifting module (1), its inside is provided with the card casket (12) for a plurality of pallets of stacked placement (121), described pallet (121) but level skids off or slips into described card casket (12);
Card casket push-and-pull module (3), be positioned at over against the pallet of described card casket lifting module (1) and skid off on the operator's station (2) of direction, it is used for adsorbing a pallet (121) of described card casket (12), and drive described pallet (121) and slip into or skid off, make described pallet (121) mobile between described service platform (2) and described card casket (12);
Cushion rubber picks and places module (5), be positioned at described operator's station (2) one sides, be provided with cushion rubber fetching device (6) on it, described cushion rubber fetching device (6) can move to described operator's station (2) top, the second cushion rubber (1210) that is covered on the crystal liquid substrate (1212) for the pallet (121) that will be positioned on the operator's station (2) takes out, and perhaps the second cushion rubber (1210) is positioned on the middle crystal liquid substrate (1212) of described pallet (121);
Substrate lifting body (4), be positioned at described operator's station (2) below, at least comprise a plurality of jacking pins (42) that can above-below direction move, the penetrable described pallet (121) that is positioned on the operator's station (2) of described jacking pin (42), and be held in the bottom of the crystal liquid substrate (1212) in the described pallet (121), described crystal liquid substrate (1212) is separated with described pallet (121).
2. the automation equipment that picks and places the large scale liquid crystal substrate as claimed in claim 1 is characterized in that, described card casket lifting module (1) specifically comprises:
Lifting module frame (10), it is provided with opening in a side at least;
Card casket (12), be arranged at described lifting module frame (10) inside, be provided with the strut member (1204) with the first roller (1202) on its two lateral walls, the described pallet (121) that is placed with crystal liquid substrate (1212) can be positioned on the described strut member (1204), and described pallet (121) can slip into or skid off described card casket (12) with respect to described strut member (1204);
Elevating drive mechanism (14) is fixed in described lifting module frame (10) bottom, is used for supporting described card casket (12), and drives described card casket (12) up-and-down movement to adjust the position of described card casket (12).
3. the automation equipment that picks and places the large scale liquid crystal substrate as claimed in claim 2, it is characterized in that, described elevating drive mechanism (14) includes a lifting table (144), be provided be used to the card casket horizontal alignment cylinder (148) of adjusting described card casket (12) level attitude in four ends of described lifting table (144), and in lifting table (144) and the place that card casket (12) contacts, evenly be provided with a plurality of floating support devices (146) be used to adjusting described card casket (14) upright position.
4. the automation equipment that picks and places the large scale liquid crystal substrate as claimed in claim 3, it is characterized in that, described pallet (121) is the box body of upper opening, and its bottom is provided with a plurality of jacking pin via holes (1218), and the jacking pin (42) of substrate lifting body (4) passes; Be provided with at least one magnetic attracting device (1217) on the one side, for described card casket push-and-pull module (3) absorption;
Be placed with crystal liquid substrate (1212) on the described pallet (121), be provided with the first cushion rubber (1214) between described crystal liquid substrate (1212) and described pallet (121), relevant position, described the first cushion rubber (1214) bottom also is provided with a plurality of jacking pin via holes (1218); The top of described crystal liquid substrate (1212) is coated with described the second cushion rubber (1210).
5. the automation equipment that picks and places the large scale liquid crystal substrate as claimed in claim 4 is characterized in that, described card casket push-and-pull module (3) comprising:
Be arranged at the slide unit (30) of frame (20) both sides, top of described operator's station (2), be provided with the second roller (32) on it, slide thereon for pallet (121);
Magnetic chuck (34) is used for adsorbing the magnetic attracting device (1217) on described pallet (121) sidewall when energising;
Magnetic chuck telescopic cylinder (36) is used for driving described magnetic chuck (34) mobile, so that its pallet that adsorbs (121) slides at described slide unit (30).
6. the automation equipment that picks and places the large scale liquid crystal substrate as claimed in claim 1 is characterized in that, described substrate lifting body (4) comprising:
Jacking pin adapter plate (40) is equipped with a plurality of jacking pins (42) on it;
Jacking cylinder (44) is arranged at the downside of described jacking adapter plate (40), and itself and described operator's station frame (20) fix, and is used for driving described jacking pin adapter plate (40) lifting;
A plurality of jacking guide pillars (48) are arranged at the downside of described jacking pin adapter plate (40), match with guide pin bushing on being arranged at described operator's station frame (20), make between described jacking pin adapter plate (40) and the described operator's station frame (20) to be flexibly connected.
7. the automation equipment that picks and places the large scale liquid crystal substrate as claimed in claim 1 is characterized in that, described cushion rubber picks and places module (5) and comprising:
Pick and place module frame (50), wherein can deposit a plurality of the second cushion rubbers (1210);
Cushion rubber fetching device (6), be arranged at the described top that picks and places module frame (50), this cushion rubber fetching device (6) can move to the top of operator's station (2), the second cushion rubber (1210) that is used for being arranged in pallet (121) crystal liquid substrate (1212) top on the operator's station (2) takes out to be put in and picks and places module frame (50), perhaps will pick and place the second cushion rubber (1210) taking-up in the module frame (50) and be positioned on the crystal liquid substrate (1212) in the described pallet (121);
Pick and place module lifting mechanism (52), be fixedly installed on the described bottom that picks and places module frame (50), be used for supporting and pick and place the second cushion rubber (1210) that module frame (50) is deposited, and can drive the lifting of described the second cushion rubber (1210), to adjust the position of described the second cushion rubber (1210).
8. the automation equipment that picks and places the large scale liquid crystal substrate as claimed in claim 7 is characterized in that, described cushion rubber fetching device (6) further comprises:
Sliding support (61), it matches with linear slide rail (53) on the erection support (51), to move described picking and placeing between module frame (50) and described operator's station (2) top, wherein, described erection support (51) is arranged at the both sides that cushion rubber picks and places module (5) top, and extend to the top of described operator's station (2), and be provided with a linear slide rail (53) at each erection support (51);
Linear motor is used for driving described sliding support (61) mobile at described linear slide rail (53);
Pressing plate (62), itself and described sliding support (61) are flexibly connected, and are arranged under the described sliding support (61), and it is used for the location and compresses the pallet (121) that is positioned on the described operator's station (2);
Suction disc (64), itself and described pressing plate (62) are flexibly connected, and are positioned at described pressing plate (62) below, are used for second cushion rubber (1210) of adsorbing tray (121) or adsorb the second cushion rubber (1210) that picks and places in the module frame (50).
9. the automation equipment that picks and places the large scale liquid crystal substrate as claimed in claim 8 is characterized in that,
Described pressing plate (62) is formed with locating plate (621) in four sides, is used for pallet (121) is positioned and compresses, and is fixed with a pressing plate cylinder (624) at the middle part of described pressing plate (62), is used for driving described pressing plate (62) and carries out dipping and heaving
Described suction disc (63) comprises many pressing plate grooves (630), described pressing plate groove (630) is the trough body structure under shed, at the upper interval of described pressing plate groove (630) a plurality of suckers (633) for absorption the second cushion rubber (1210) are set, on described suction disc (63), also be provided with at least one suction disc cylinder (632), be used for driving the lifting of described suction disc (63) and the switching of controlling described sucker (633).
10. such as each described automation equipment that picks and places the large scale liquid crystal substrate of claim 1-9, it is characterized in that, further comprise:
Substrate fetching device (7), it comprises a cross bar (70) and is arranged at a plurality of parallel supporting blade (72) on the described cross bar (70), wherein, described a plurality of supporting blade (72) is roughly in the same plane, is provided with a plurality of bumper rings (72) on each supporting blade (72) and the one side that crystal liquid substrate (1212) contacts.
CN201310241086.2A 2013-06-18 2013-06-18 A kind of automation equipment picking and placeing large scale liquid crystal substrate Expired - Fee Related CN103303676B (en)

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* Cited by examiner, † Cited by third party
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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI664130B (en) * 2016-01-29 2019-07-01 旺矽科技股份有限公司 Wafer cassette
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1179388A (en) * 1997-09-16 1999-03-23 Mitsui Eng & Shipbuild Co Ltd Glass sheet handling device
CN1504396A (en) * 2002-11-29 2004-06-16 ������������ʽ���� Chip delivery device , method of taking out chip and holding chip
JP2005145628A (en) * 2003-11-14 2005-06-09 Shiraitekku:Kk Cassette for glass substrate
CN200992434Y (en) * 2006-09-20 2007-12-19 阳程科技股份有限公司 Thin-sheet accessing apparatus
CN102642716A (en) * 2012-04-11 2012-08-22 深圳市华星光电技术有限公司 Picking and placing device of glass substrate

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002059961A1 (en) * 2001-01-24 2002-08-01 Takehide Hayashi Single semiconductor wafer transfer system and transfer unit
KR101411620B1 (en) * 2007-02-16 2014-06-25 엘아이지에이디피 주식회사 Load lock chamber structure for device manufacturing FPD
CN101181958A (en) * 2007-12-12 2008-05-21 友达光电股份有限公司 Substrate transfer-machine and substrate take-in box thereof
CN101740451B (en) * 2009-12-23 2011-12-07 广东志成华科光电设备有限公司 Ejector pin mechanism of chip sorting equipment

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1179388A (en) * 1997-09-16 1999-03-23 Mitsui Eng & Shipbuild Co Ltd Glass sheet handling device
CN1504396A (en) * 2002-11-29 2004-06-16 ������������ʽ���� Chip delivery device , method of taking out chip and holding chip
JP2005145628A (en) * 2003-11-14 2005-06-09 Shiraitekku:Kk Cassette for glass substrate
CN200992434Y (en) * 2006-09-20 2007-12-19 阳程科技股份有限公司 Thin-sheet accessing apparatus
CN102642716A (en) * 2012-04-11 2012-08-22 深圳市华星光电技术有限公司 Picking and placing device of glass substrate

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