KR20120013188A - Transport device and transport method for plate-shaped objects - Google Patents

Abstract

PURPOSE: Device and method for conveying a plate-shaped object are provided to prevent damage to a plate-shaped object by supporting the plate-shaped object with a first blowing unit and curbing the bending of the plate-shaped object. CONSTITUTION: A device for conveying a plate-shaped object comprises first and second blowing units(19,20). The air supply unit(21) of the first blowing unit is installed on a first gap(g1) at an intermediate conveying unit(B). The air supply unit of the second blowing unit is installed on a second gap(g2) at the intermediate conveying unit. If the intermediate conveying unit is converted from a sub conveying state to a main conveying state, the first blowing unit is converted to a supply state, and the second blowing unit is converted to a stop state. If the intermediate is converted from the main conveying state to the sub conveying state, then the first blowing unit is converted to a stop state, and the second blowing unit is converted to a supply state.

Description

Plate conveying apparatus and plate conveying method {TRANSPORT DEVICE AND TRANSPORT METHOD FOR PLATE-SHAPED OBJECTS}

The present invention provides a blower supporting means for supplying clean air toward a lower surface of a rectangular plate-like body to support the plate-like body in a non-contact state in a horizontal position, and by the blown-type support means. An upstream conveying unit for providing a propulsion force in contact with a lower surface of the plate member to be supported and imparting a propulsive force in a conveying direction to the plate member, and for conveying the plate member in a main conveying direction; The sub conveyance of the downstream conveying part which conveys a plate-shaped object in the sub conveyance direction orthogonal to the said main conveyance direction, and the conveyance direction of the plate body received from the said upstream conveyance part from the said main conveyance direction is said sub conveyance The plate-shaped conveyance apparatus provided with the relay conveyance part which switches to a direction, and handes it to the said downstream conveyance part, and a plate-shaped conveyance method using such a plate-shaped conveyance apparatus are provided.

Such a plate-shaped object conveying apparatus conveys a plate-shaped object along a main conveyance direction by an upstream conveyance part, receives the plate-shaped object in a relay conveyance part, and conveys the conveyance direction of a plate-shaped object in a relay conveyance part from a main conveyance direction. A device for switching a conveying direction, conveying a plate-like body along a subconveying direction in a relay conveyance part, and receiving the plate-shaped object in a downstream conveyance part, and conveying a plate-shaped object, carrying a conveyance direction of a plate-shaped object mainly It is used when changing from the direction to the subcarrier direction (see Patent Document 1, for example).

In Patent Literature 1 below, among the pair of main transport propulsion means applying means, the main transport propulsion force providing means located on the upstream side in the sub conveying direction is provided from the upstream conveying part to the relay conveying part, but the downstream side in the sub conveying direction. The main conveyance propulsion force imparting means located in is provided only in the upstream conveyance part, and is not provided in the relay conveyance part.

Moreover, although the sub conveyance propulsion force provision means located in the downstream side of a main conveyance direction among a pair of sub conveyance propulsion force provision means is provided from the relay conveyance part to the downstream conveyance part, the part located in the upstream side of a main conveyance direction The conveying propulsion force imparting means is provided only in the downstream conveying part, and is not provided in the relay conveying part.

That is, in the relay conveying unit, when conveying the plate-shaped body in the main conveying direction, only the main conveying force imparting means located on the upstream side in the sub- conveying direction is brought into contact with the lower surface of the plate-shaped object and in the main conveying direction with respect to the plate-shaped object. When the propulsion force is applied and the plate member is conveyed in the sub conveyance direction, only the sub conveyance propulsion force applying means positioned downstream of the main conveyance direction is brought into contact with the lower surface of the plate member to apply the propulsion force in the sub conveyance direction with respect to the plate member. It is supposed to grant.

Japanese Laid-Open Patent Publication No. 2005-75543

In the plate-shaped object conveying apparatus of said patent document 1 WHEREIN: The relay conveyance part is provided in the relay conveyance part by the main conveyance driving force provision means of the downstream side of a sub conveyance direction, and the sub conveyance propulsion force provision means of the upstream of a main conveyance direction, Also in the case of conveying the plate-shaped body in the main transport direction, the main transport propulsion force applying means is brought into contact with the lower surfaces of both ends of the sub-carrier direction in the plate-shaped body, and the pair of main transport propulsion forces is applied to the plate body. In the case where the propulsion force is reliably applied in the main conveying direction and the plate-shaped body is conveyed in the sub conveying direction, the sub conveyance driving force imparting means is brought into contact with the lower surfaces of both ends of the main conveying direction in the plate-shaped body, thereby providing a pair of sub conveying thrust forces. It is conceivable to impart a propulsive force to the plate-shaped body in the sub-carrier direction by the applying means and convey the plate-shaped body in the main transport direction or the sub-carrier direction. There.

Then, when the plate-shaped body is non-contacted by the blow-type support means in the vicinity of the propulsion-force applying means, the contact pressure of the propulsion force-providing means against the plate-shaped body decreases due to the floating of the plate-like body. In order to suppress the fall of the contact pressure with respect to the lower surface of the plate-shaped object of this propulsion force provision means, the relay blow-type support means provided between a pair of main conveyance propulsion force provision means, and between a pair of sub conveyance propulsion force provision means, It is necessary to install it so as to be spaced apart from the upstream side in the sub-carrier direction with respect to the main transport propulsion force providing means downstream of the sub-carrier direction, and spaced apart from the downstream side in the main transport direction with respect to the sub-carried propulsion means in the upstream side in the main transport direction. have.

However, when conveying a plate-shaped object from an upstream conveyance part to a relay conveyance part, a plate-shaped object is made the upper side of the 1st clearance gap formed between the sub conveyance propulsion force provision means of the upstream side of a main conveyance direction, and a relay blowing type support means. Is conveyed, but since the blowing support means is not provided in this first gap, the central portion of the plate conveying direction is bent downward, and the flat plate body is conveyed to the downstream side in the main conveying direction, so that the relay blowing type is supported. There is a risk of breaking in contact with the means.

In addition, also when conveying from a relay conveyance part to a downstream conveyance part, when conveying the upper part of the 2nd clearance gap formed between the main conveyance propulsion force supply means of the downstream side of a sub conveyance direction, and a relay ventilation type support means. There exists a possibility that the center part of the plate-shaped body in the main conveyance direction may be bent downward and it may be damaged.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and its object is to provide impulse to the plate body reliably and to prevent the plate body from being damaged when conveying the plate body. It is a point to provide a plate-shaped conveyance apparatus.

The plate-shaped body conveying apparatus which concerns on this invention is a support type which supplies clean air toward the lower surface of a rectangular plate-shaped object, and supports a plate-shaped object in a non-contact state in a horizontal attitude | position, and the board supported by this blown support means. Propulsion force applying means is provided for contacting the lower surface of the upper body to impart the propulsion force in the conveying direction to the plate-shaped body, and the upstream conveying portion for conveying the plate-shaped body in the main conveying direction and the plate-shaped body are orthogonal to the main conveying direction. The downstream conveying part which conveys in a sub conveyance direction, and the relay conveyance part which converts the conveyance direction of the plate-shaped object received from the said upstream conveyance part from the said main conveyance direction to the said sub conveyance direction, and hand it to the said downstream conveyance part are provided. As it is,

As said propulsion force provision means, it is provided from the upstream conveyance part to the said relay conveyance part, and comes in contact with the lower surface of the both ends of the said sub conveyance direction in a plate-shaped object, and provides the propulsion force in the said main conveyance direction with respect to the said plate-shaped object. A pair of main transport propulsion force imparting means and provided from the relay conveying section to the downstream conveying section and in contact with the lower surfaces of both ends of the main conveying direction in the plate-like body in the sub-carrier direction. A pair of sub-carrier propulsion force applying means for imparting a propulsion force of the pair is provided, and as the blow-type support means, in the sub-carrier direction from each of the pair of main transport propulsion force imparting means between the pair of main transport propulsion force applying means. The upstream side blow-type support means provided in the said upstream conveyance part in the state spaced apart, and the said pair of boards Between the downstream side blow-type support means provided in the said downstream conveyance part in the state spaced apart from each of the said pair of sub conveyance thrust force provision means in the said main conveyance direction between the propulsion force provision means, and the pair of main conveyance propulsion force provision means. In a state spaced apart from each of the pair of main transport propulsion force imparting means in the subcarrier direction and between the pair of subcarrier propulsion force imparting means from each of the pair of subcarrier propulsion force imparting means in the main transport direction. A relay blowing type support means provided in said relay conveyance part in the spaced state is provided, The said relay conveyance part raises and lowers the said pair of main conveyance propulsion force provision means and a pair of subconveyance propulsion force provision means relatively, and the said pair Contacting the main conveyance propulsion means to the lower surface of the plate The sub-conveying state in which the conveying direction of the plate-shaped object is switched to the main-feeding direction, and the pair of sub-carrier propulsion means is brought into contact with the lower surface of the plate-shaped object to switch the conveying direction of the plate-shaped object to the sub-carrier direction. It is comprised so that switching is possible, and a pair of air supply part which supplies clean air toward the lower surface of a plate-shaped object between the said pair of sub conveyance propulsion force provision means in the said relay conveyance part, and the said relay blow-type support means is carried out. A main transport auxiliary blowing means disposed at a first gap located at least upstream in the main transport direction among the gaps is provided, and the air supply unit includes the pair of main transport propulsion force applying means and the relay blower in the relay transport section. A subcarrier auxiliary blowing means disposed at a second gap located downstream of at least the subcarrier direction among the pair of gaps between the expression support means is provided. Each of the main transport auxiliary blowing means and the sub transport auxiliary blowing means includes a supply state for supplying clean air to support the plate-shaped body located above the air supply unit in a non-contact state, and from the air supply unit. It is comprised so that switching to the supply stop state which stopped supply of clean air is carried out, When the said relay conveyance part is switched from the said sub conveyance state to the said main conveyance state, the said main conveyance auxiliary blow means is switched to the said supply state, Further, when the subcarrier auxiliary blowing means is switched to the supply stopped state, and the relay conveyance section is switched from the main conveyance state to the subcarrier state, the main transport auxiliary blower means is switched to the supply stopped state. And a blowing state switching means for switching the sub-carrier auxiliary blowing means to the supply state. It can control.

That is, by switching the relay conveyance unit to the main transport state, a pair of main transport propulsion force imparting means can impart a propulsion force in the main transport direction with respect to the plate body, and convey the plate body from the upstream transport unit to the relay transport unit. Can be. Moreover, after conveying a plate-shaped object to a relay conveyance part, by switching a relay conveyance part to a sub conveyance state, a pair of sub conveyance propulsion force provision means can provide a propulsion force to a plate conveyance in a sub conveyance direction, It can convey to a downstream conveyance part from a relay conveyance part.

And when a relay conveyance part is switched to a main conveyance state, since a main conveyance auxiliary blow means is switched to a supply state, and a sub conveyance auxiliary blow means is switched to a supply stop state, a plate-shaped object is relay conveyed from an upstream conveyance part. When conveying to a part, the main conveyance auxiliary blow means is switched to the supply state, and the sub conveyance auxiliary blow means is switched to the supply stop state.

Therefore, when conveying a plate-shaped object from an upstream conveyance part to a relay conveyance part, a plate-shaped object is formed in the upper part of the 1st clearance gap formed between the sub conveyance propulsion force provision means of the upstream side of a main conveyance direction, and a relay blowing type support means. Although it conveys, the air supply part of the main conveyance auxiliary blow means is provided in the 1st clearance gap, and the main conveyance auxiliary blow means is switched to a supply state. Therefore, when the plate member conveys the upper portion of the first gap, the plate member can be supported by the main transport auxiliary blowing means, thereby suppressing the warp of the plate member when the plate member is conveyed in the main conveyance direction, and the plate member The damage can be prevented beforehand.

At this time, a second gap is located under the downstream end of the plate-shaped body in the sub-carrier direction, and the second gap is provided with an air supply part of the sub-carrier auxiliary blower, but the sub-carrier auxiliary blower is supplied. Since it is switched to the stationary state, the end portion on the downstream side in the sub-carrier direction of the plate-shaped body is not supported by the sub-carrier auxiliary blowing means. Therefore, since the contact pressure with respect to the plate-shaped object of the main conveyance propulsion force provision means which touch-supports this edge part does not fall, a pair of main conveyance propulsion force provision means can reliably convey a plate body in a main conveyance direction.

When conveying a plate-shaped object from a relay conveyance part to a downstream conveyance part, since the main conveyance auxiliary blowing means is switched to the supply stop state, and the sub conveyance auxiliary blow means is switched to a supply state, the plate-shaped object is conveyed in the sub conveyance direction Since the warpage of the plate-shaped body at the time of conveyance can be suppressed and the plate-shaped body can be prevented from being damaged due to contact with other articles, the contact pressure with respect to the plate-shaped body of the sub conveyance propulsion force applying means is not lowered. The plate conveying body can be reliably conveyed in the sub conveying direction by means of the sub conveying force.

That is, a pair of main conveyance propulsion force provision means and a pair of sub conveyance propulsion force provision means are provided in a relay conveyance part, the air supply part of a main conveyance auxiliary blow means is provided in a 1st clearance gap, and a sub conveyance auxiliary blower is provided in a 2nd clearance gap. By providing an air supply unit of the means, and switching the state of the main transport auxiliary blowing means and the sub-carrier auxiliary blowing means to the supply state and the supply stop state in accordance with the switching between the sub-carrier state and the main transport state of the relay conveyance unit, When conveying a plate-shaped object in a sub conveyance direction, it came to be able to provide the plate-shaped object conveying apparatus which can prevent damage of a plate-shaped object beforehand, giving a propulsion force with respect to a plate-shaped object suitably.

In the Example of the plate-shaped object conveyance apparatus which concerns on this invention, the said blower state switching means has the said intermediate | middle conveyance part switched from the said main conveyance state to the said sub conveyance state, and the said intermediate | middle conveyance direction of the plate-shaped object in the said relay conveyance part is carried out. It is preferable that it is comprised so that the said main conveyance auxiliary blowing means may be switched to the said supply stop state, and the said sub conveyance auxiliary blow means shall be switched to the said supply state before the conveyance with respect to a start is started.

That is, before the relay conveyance part is switched from the main conveyance state to the sub conveyance state and conveyance with respect to the sub conveyance direction of a plate-shaped object is started in a relay conveyance part, the main conveyance auxiliary ventilation means is switched to a supply stop state, and also sub conveyance is carried out. By switching the auxiliary blowing means to the supply state, since the plate-shaped body can be non-contactedly supported by the sub-carrier auxiliary blowing means immediately after the start of conveyance, the warpage of the plate-shaped body when conveying in the sub-carrier direction can be suppressed, It can prevent damage in advance.

In the Example of the plate-shaped object conveyance apparatus which concerns on this invention, the said main conveyance propulsion force provision means is comprised by providing a plurality of rotating bodies which contact the lower surface of a plate-shaped object and apply a propulsion force with respect to the said plate-shaped object along the said main conveyance direction. The sub-carrier driving force imparting means includes a plurality of the rotating bodies arranged along the sub-conveying direction, wherein the air supply unit in the main conveying auxiliary blowing means is provided from the first gap when viewed in plan view. It is provided between the said rotating bodies adjacent to the said sub conveyance direction by a conveyance propulsion force provision means, The said air supply part in the said sub conveyance auxiliary blow means is given the said main conveyance propulsion force from the said 2nd clearance gap in plan view. It is preferable to be provided between the said rotating bodies adjacent to the said main conveyance direction in a means.

That is, by providing the air supply part in the main conveyance auxiliary blower not only between a 1st clearance gap but also between the rotating bodies provided in the sub conveyance direction, the main conveyance direction with respect to the plate-shaped object conveyed in the main conveyance direction Since the plate-shaped body can be supported by the main transport auxiliary blowing means in a wide range, the warpage of the plate-shaped body can be suppressed in a wide range in the main transport direction when conveying in the main transport direction. And by providing an air supply part between rotating bodies, since an air supply part can be provided in the vicinity of the plate-shaped object contacted and supported by a rotating body, supporting a plate-shaped object in a wide range as mentioned above, a comparatively small amount of air supply parts The plate body can be supported by blowing clean air.

Moreover, similarly, by providing the air supply part in a sub conveyance auxiliary blower between a 2nd clearance gap between a rotating body, the curvature of a plate-shaped object can be suppressed in a wide range in a sub conveyance direction when conveying in a sub conveyance direction, In addition, the plate-like body can be supported by blowing a relatively small amount of clean air from the air supply unit.

In the Example of the plate-shaped object conveyance apparatus which concerns on this invention, the said air supply part of the said main conveyance auxiliary blow means is between the said upstream blower support means containing the said 1st clearance gap, and the said relay blower support means. The air supply part of the said sub conveyance auxiliary blow means is provided over the full width of the said main conveyance direction in a clearance gap of the said intermediate blow type support means and the said downstream side blow type support means containing the said 2nd clearance gap. It is preferable that it is provided over the full width of the said sub conveyance direction in the clearance gap between.

In other words, a relatively large gap is formed between the upstream side blowing support means and the relay blowing support means to provide a subordinate conveyance force applying means and to form a first gap. By providing the air supply portion over the entire width of the plate, when the plate-shaped body is conveyed in the main transport direction, the warpage of the plate-shaped body can be suppressed over the entire range between the upstream side blowing support means and the relay blowing support means. .

Further, by providing an air supply portion over the entire width of the gap between the relay blower support means and the downstream blower support means, when the plate-shaped object is conveyed in the subcarrier direction, the relay blower support means and the downstream blower The curvature of a plate-shaped object can be suppressed over the whole range with a formula support means.

In the Example of the plate-shaped object conveyance apparatus which concerns on this invention, the said air supply part in the said main conveyance auxiliary blower is relayed more than the space | interval of the said air supply parts in the center part of the said sub conveyance direction in the said relay conveyance part. In the state in which the space | interval of the said air supply part in the edge part side of the said sub conveyance direction in a conveyance part becomes wide, the air supply part in the said sub conveyance auxiliary blow means is provided in multiple numbers in the said sub conveyance direction, The plurality of air supply units at the end side of the main transport direction in the relay transport section is wider than the distance between the air supply sections at the central portion in the main transport direction, and a plurality of the air transport sections are arranged in the main transport direction. It is preferable.

That is, in the plate-shaped body conveyed in the main transport direction, both ends of the sub-carrier direction are contacted and supported by a pair of main transport propulsion force applying means, so that the plate-shaped body is in a state in which the center of the sub-conveying direction is largely slid downward. In this way, the thin plate is non-contacted by the main transport auxiliary blowing means. However, in the large center, the air supply unit is provided at a narrow interval to supply a large amount of clean air, and the air supply unit is closer to the end side where the warpage becomes smaller. By supplying a small amount of clean air at a wide interval and supplying clean air of a suitable amount to the posture with respect to the plate-shaped object, the main conveyance auxiliary blowing means in the center part of the sub-carrier direction conveyed in the main conveying direction It can support suitably by. Moreover, similarly, the center part of the main conveyance direction of the plate-shaped object conveyed in the sub conveyance direction can be appropriately supported by a sub conveyance auxiliary blower.

In the Example of the plate conveyance apparatus which concerns on this invention, it is preferable that the said air supply part is comprised by the jet nozzle which has a slit-shaped jet port.

That is, clean air is blown out from a slit-shaped blower outlet, and clean air can be blown out from this blower outlet, and clean air can be supplied to the lower surface of a plate-shaped object, and ambient clean air is blown off by the airflow of clean air blown out from this blower outlet. The suction and the suctioned surrounding clean air can also be supplied to the lower surface of the plate-shaped body.

Therefore, since a large amount of clean air can be supplied to the lower surface of a plate-shaped object by the ejection of a small amount of clean air, the air supply part can be miniaturized, ensuring the quantity of the clean air supplied to the lower surface of a plate-shaped object.

In the embodiment of the plate-shaped object conveying apparatus which concerns on this invention, the said pair of sub conveyance in the said main conveyance state is the same height as the plate-shaped body mounted and supported by the said pair of main conveyance propulsion force provision means, and in the said sub conveyance state. The restriction position which abuts on the side surface of the said downstream side of the said main conveyance direction in the plate-shaped body mounted and supported by the propulsion force provision means, and the lower surface of the plate-shaped body mounted and supported by the said pair of main transport propulsion force provision means in the said main conveyance state. And a contact movable downward in the subcarrier state and below the lower surface of the plate-shaped body mounted and supported by the pair of subcarrier propulsion force applying means and located at a downstream side of the main conveying direction from the regulating position. It is preferable that a sieve is provided.

That is, by moving a contact body to a regulation position, the plate-shaped object conveyed toward the downstream side of a main conveyance direction can be caught, and in this way, below the both ends of the main conveyance direction in a catch plate-shaped object Since a pair of sub conveyance propulsion force provision means are located, when a relay conveyance part is switched from a main conveyance state to a sub conveyance state, a pair of sub conveyance propulsion force provision means can support the lower surface of the both ends of the plate-shaped main conveyance direction. And the conveyance direction of a plate-shaped object can be switched suitably from a main conveyance direction to a sub conveyance direction.

Then, by moving the contact member to the deregulated position, the contact member does not contact the plate member when the plate member is conveyed in the sub conveyance direction by a pair of sub conveyance propulsion means, so that the plate member can be conveyed in the sub conveyance direction. When a contact body contacts a plate-shaped object at the time, damage to a plate-shaped object can be avoided.

In addition, since the contact body is located below the plate body at the deregulated position, even when the plate body is shifted in the main transport direction when the plate body is conveyed in the sub-carrier direction, the plate body does not come into contact with the contact body. . That is, since the contact body does not need to be moved to the downstream side of the main transport direction in consideration of the deviation of the plate-like body in the main transport direction, the contact body can be provided in a small space in the main transport direction.

In addition, when the contact body is linearly moved from the regulating position to the deregulating position, the contact member is moved inclined downward on the downstream side in the main transport direction. In this way, the contact is moved downward from the inclined position on the downstream side in the main transport direction and moved from the regulated position to the deregulated position, whereby no slip occurs between the contact body and the catch plate-shaped body by the contact body. It is possible to prevent damage of the plate-shaped body due to this.

Moreover, this invention includes the method corresponding to the said structure, In a method, the action and effect corresponding to the said structure can be expected.

That is, the method according to the present invention comprises: a blowing support means for supplying clean air toward the lower surface of the rectangular plate-like body to support the plate-like body in a non-contact state in a horizontal posture, and a plate-like body supported by the blown-type support means. Is provided with a propulsion force imparting means for contacting a lower surface of the plate body to impart a propulsion force in a conveying direction to the plate body, and an upstream side conveying part for conveying the plate body in the main conveying direction, and a plate body perpendicular to the main conveying direction. The downstream conveying part which conveys in a sub conveyance direction, and the relay conveyance part which converts the conveyance direction of the plate-shaped object received from the said upstream conveyance part from the said main conveyance direction to the said sub conveyance direction, and hand it to the said downstream conveyance part are provided. The propulsion force imparting means is provided from the upstream conveying part to the relay conveying part, and the sub conveying direction in the plate-shaped body is provided. A pair of main transport propulsion force applying means for contacting the lower surface of both ends to impart the propulsion force in the main conveying direction to the plate-shaped body, and provided from the relay conveying portion to the downstream conveying portion, A pair of sub conveyance propulsion means for contacting the lower surfaces of both ends in the main conveyance direction to impart a propulsion force in the subconveying direction to the plate-shaped body is provided, and the pair of main conveyance propulsion force is provided as the blowing support means. Between the imparting means, between the upstream side blow-type support means provided in the upstream conveying part in a state spaced apart from each of the pair of main conveyance propulsion force imparting means, and the pair of subconveying propulsion force imparting means. In the main conveying direction from each of the pair of sub-conveying thrust means The pair is further separated from each of the pair of main transport propulsion force applying means between the downstream blower type support means provided in the downstream conveying portion and the pair of main transport propulsion force applying means. Between the sub conveyance driving force imparting means of the relay blowing air support means provided in the relay conveying portion in a state spaced apart from each of the pair of subconveying driving force imparting means in the main conveying direction, the relay conveying portion, By relatively elevating and moving the pair of main transport propulsion force applying means and the pair of sub conveyance propulsion force applying means, the pair of main transport propulsion force applying means is brought into contact with the lower surface of the plate body to move the conveying direction of the plate body in the main transport direction. The main conveyed state which was switched, and said pair of sub conveyance driving force provision means The pair of air supply units configured to be switched to a sub-carrier state in which the conveyance direction of the plate-shaped object is switched to the sub-carrier direction by contacting a surface, and supplying clean air toward the lower surface of the plate-shaped object; A main transport auxiliary blowing means disposed at a first gap located at an upstream side in at least the main transport direction of the pair of gaps between the sub-carrier propulsion means providing means and the relay blowing-type support means, and the air supply portion And a sub-carrier auxiliary blower disposed in a second gap located downstream of at least a sub-carrier direction among a pair of gaps between the pair of main transport propulsion force applying means and the relay blowing-type support means in the relay conveying unit. Means are provided, and each of the main transport auxiliary blowing means and the sub transport auxiliary blowing means is in contact with a plate-shaped body located above the air supply part. As a plate-shaped conveyance method using the plate-shaped conveyance apparatus comprised so that switching to the supply state which supplies clean air to support in a tactile state, and the supply stop state which stopped supply of the clean air from the said air supply part,

In the switching from the subcarrier state to the main conveyance state of the relay conveyance unit, the main transport auxiliary blower is switched to the supply state, and the subcarrier auxiliary blower is switched to the supply stop state, and the In the switching from the main transport state to the sub-carrier state of the relay transport unit, the blowing state switch for switching the main transport auxiliary blowing means to the supply stop state and further switching the subcarrier auxiliary blowing means to the supply state. Process.

In the embodiment of the present invention, in the blowing state switching step, in the switching from the main conveying state to the sub conveying state of the relay conveying unit, the conveying of the plate-shaped body in the sub conveying direction in the relay conveying unit It is preferable to set it as the structure which switches the said main conveyance auxiliary blow means to the said supply stop state, and switches the said sub conveyance auxiliary blow means to the said supply state before this start.

In the embodiment of the present invention, in the main conveyance state, the pair is mounted at the same height as the plate-shaped body supported by the pair of main transport propulsion force applying means. The restriction position which abuts against the side surface of the downstream side of the said main conveyance direction in the plate-supported body mounted, and the lower surface and the sub-carried state of the plate-shaped body mounted and supported by the said pair of main conveyance driving force in the said main conveyance state. The contact member which is movable below the lower surface of the plate-shaped object mounted and supported by the said pair of sub conveyance propulsion force provision means, and is located in the regulation release position located downstream of the said main conveyance direction rather than the said regulation position is provided, In the switching from the main transport state of the relay transport unit to the sub-carrier state, the relay board Before the transport unit for the transport direction of the plate material disclosed in the unit, it is preferred to include the contact body from the regulating position the contact body position conversion step of moving to the regulation release position.

BRIEF DESCRIPTION OF THE DRAWINGS It is a top view of the plate-shaped conveyance apparatus which concerns on the Example of this invention.
2 is a plan view of the relay conveyance unit according to the embodiment of the present invention.
3 is a side view of the relay conveyance unit according to the embodiment of the present invention.
4 is a side view of the relay carrier in the main transport state according to the embodiment of the present invention.
It is a side view of the relay conveyance part of the subcarrier state which concerns on the Example of this invention.
6 is a side view of the auxiliary blowing means according to the embodiment of the present invention.
7 is a perspective view of a main lift type thrust force applying unit according to the embodiment of the present invention.
8 is a view showing a parallel air supply unit according to an embodiment of the present invention.
9 is a view showing a contact body according to an embodiment of the present invention.
It is a conveyance action figure of the plate-shaped object conveyance apparatus which concerns on the Example of this invention.
It is a conveyance action figure of the plate-shaped object conveyance apparatus which concerns on the Example of this invention.
12 is a control block diagram according to an embodiment of the present invention.
It is a control flowchart of the relay conveyance part which concerns on Example of this invention.

EMBODIMENT OF THE INVENTION Hereinafter, the plate-shaped object conveyance apparatus which concerns on this invention is demonstrated with reference to drawings.

As shown in FIG. 1, the plate-shaped conveyance apparatus supplies the clean air toward the lower surface of the glass substrate 1 for liquid crystals as a rectangular plate-shaped object, and is a blowing support means which supports the glass substrate 1 in a non-contact state. (2) and the lower surface of the glass substrate 1 are contact-supported, and the propulsion force provision means 3 which provides the propulsion force in a conveyance direction with respect to the glass substrate 1 is provided, and is comprised.

In addition, the plate-shaped object conveying apparatus conveys the upstream conveyance part A which conveys the glass substrate 1 in the main conveyance direction X, and the glass substrate 1 in the sub conveyance direction Y orthogonal to the main conveyance direction X. The conveyance direction of the glass substrate 1 received from the downstream conveyance part C and the upstream conveyance part A is switched to the sub conveyance direction Y from the main conveyance direction X, and is handed to the downstream conveyance part C. It is comprised by the relay conveyance part B, and these conveyance parts A-C are provided in the unit type by providing the blowing type support means 2 and the propulsion force provision means 3, respectively. And conveyance part (A)-(C) is provided so that the glass substrate 1 may be conveyed at the same height.

The relay conveyance part B is provided in the downstream side of the main conveyance direction X of the upstream conveyance part A, and it supports the glass substrate 1 in a non-contact state by the ventilation support means 2, and also the driving force By applying the propulsion force toward the downstream side of the main transport direction X with respect to the glass substrate 1 by the propulsion force provision means 3 in the state which supported the glass substrate 1 in contact state by the provision means 3, The said glass substrate 1 is conveyed from an upstream conveyance part A to the relay conveyance part B, and the thrust force toward the upstream side of the main conveyance direction X with respect to the glass substrate 1 by the propulsion force provision means 3 is carried out. It is comprised so that the said glass substrate 1 may be conveyed from the relay conveyance part B to an upstream conveyance part A by providing.

Moreover, the downstream conveyance part C is provided in the downstream of the sub conveyance direction Y of the relay conveyance part B, and the glass substrate 1 is supported by a non-contact state by the ventilation support means 2, Further, in the state in which the glass substrate 1 is supported in the contact state by the propulsion force applying means 3, the propulsion force is imparted by the propulsion force applying means 3 toward the downstream side of the sub-carrier direction Y with respect to the glass substrate 1. Thereby, the said glass substrate 1 is conveyed from the relay conveyance part B to the downstream conveyance part C, and the upstream side of the sub conveyance direction Y with respect to the glass substrate 1 with the propulsion force provision means 3 is carried out. It is comprised so that the said glass substrate 1 may be conveyed from the downstream conveyance part C to the relay conveyance part B by providing a propulsion force toward it.

Thus, the plate-shaped object conveying apparatus is conveyed from the upstream conveyance part A to the conveyance of the positive direction which conveys the glass substrate 1 to the downstream conveyance part C via the relay conveyance part B. In addition, it is comprised so that the conveyance of the reverse direction which conveys the glass substrate 1 to the upstream conveyance part A from the downstream conveyance part C via the relay conveyance part B is comprised.

[Pulse power provision means]

As a propulsion force provision means 3, it is provided from the upstream conveyance part A to the relay conveyance part B, and contacts the lower surface of the both ends of the sub conveyance direction Y in the glass substrate 1, and the said glass substrate 1 ) And a pair of main transport propulsion force imparting means (5) for imparting a propulsion force in the main transport direction X and a downstream transport part (C) from the relay transport part (B), A pair of sub conveyance propulsion force provision means 6 which contact the lower surface of the both ends of the main conveyance direction X, and give a propulsion force in the sub conveyance direction Y with respect to the said glass substrate 1 is provided.

As shown in FIG.2, FIG.4 and FIG.5, each of a pair of main conveyance propulsion force provision means 5 rotates as a rotating body which contact-supports the edge part of the sub conveyance direction Y in the lower surface of the glass substrate 1 A plurality of rollers 7 are arranged in parallel along the main transport direction X, and an electric motor 8 for rotationally driving the rotary rollers 7 is provided separately for each of the plurality of rotary rollers 7. And it is comprised so that a plurality of rotary rollers 7 may be rotated and driven separately by the electric motor 8, and the propulsion force in the main conveyance direction X is given with respect to the glass substrate 1 which contacts the rotary rollers 7, respectively. have.

As shown in Figs. 4 and 5, the plurality of rotary rollers 7 and the electric motor 8 for rotationally driving them are supported by a series of support frames 9, and the plurality of rotary rollers 7 are support frames. It is supported so that the blowing support means 2 of the sub conveyance direction Y may be located with respect to (9), and the some electric motor 8 is located outside of the sub conveyance direction Y with respect to the support frame 9 Is supported.

As shown in FIG. 6 and FIG. 7, each of the rotary rollers 7 provided in the main transport propulsion force applying means 5 has a small diameter portion in which an O-ring is mounted to mount and support the lower surface of the glass substrate 1. In order to restrict the movement of the glass substrate 1 in the sub-conveying direction Y by being located outside the sub-carrier direction Y and contacting the side surface of the glass substrate 1 from the small-diameter portion 7a. It is provided with the large diameter part 7b.

And as shown in FIG. 1, about the part provided in the upstream conveyance part A in the main conveyance propulsion force provision means 5 (henceforth a high regularity propulsion force imparting part 5b), it is an upstream side. It is formed in the conveyance part A in the position fixed state, and is provided in the part which is provided in the relay conveyance part B in the main conveyance propulsion force provision means 5 (henceforth a main lift type thrust force provision part 5a). About this, it is provided in the relay conveyance part B so that lifting / lowering is possible.

Moreover, each of a pair of sub conveyance propulsion force provision means 6 provides a plurality of rotation rollers 7 which contact-support the edge part of the main conveyance direction X in the lower surface of the glass substrate 1 along the sub conveyance direction Y, It is configured similarly except that the installation direction differs from the main transport propulsion force applying means 5 provided along the main transport direction X. That is, the sub conveyance driving force imparting means 6 is different from the main conveying force imparting means 5 in that it is provided along the sub conveying direction Y, but the rotary roller 7 is similar to the main conveying force imparting means 5. And the electric motor 8 is comprised. And about the part provided in the relay conveyance part B in the sub conveyance propulsion force provision means 6 (henceforth a lifting | retraction type propulsion force provision part 6a), it moves up and down to the relay conveyance part B. The downstream side conveying part C is formed so that the part (hereinafter referred to as the sub-fixed propulsion force applying part 6b) that is provided in the downstream conveying part C in the sub conveyance propulsion force applying means 6 is described below. It is installed in a fixed position.

[Ventilation support means]

In addition, as the air blowing support means 2, an upstream conveyance in the state spaced apart from each of the said pair of main conveyance propulsion force provision means 5 in the sub conveyance direction Y between each pair of main conveyance propulsion force provision means 5 is carried out. Spaced apart in each of the pair of subcarrier propulsion force applying means 6 in the main transport direction X between the upstream side blowing support means 11 provided in the portion A and the pair of subcarrier propulsion force applying means 6. Between each of the pair of main conveying force imparting means 5 between the downstream blower type support means 13 provided in the downstream conveying part C and the pair of main conveying force imparting means 5 in a state of Relay conveying part (a state spaced apart in the subcarrier direction Y and spaced apart from each of the pair of subcarrier propulsion force applying means 6 in the main transport direction X between the pair of subcarrier propulsion force applying means ( Relay installed in B) Blowing support means 12 is provided.

As shown in FIG. 3, the relay blowing type support means 12 is the vibration damping filter 14 which removes dust, and is arrange | positioned under the vibration damping filter 14, and through the said damping filter 14, The blower fan 15 as a blowing means which supplies clean air toward the lower surface of the glass substrate 1 is comprised. In addition to the description, the relay blowing type support means 12 integrally assembles the blowing fan 15 rotating around the longitudinal axis and the plate-shaped vibration damping filter 14 covering the upper part of the blowing fan 15. As shown in FIG. 1, the structured fan filter unit 16 is provided in multiple numbers by the main conveyance direction X and the sub conveyance direction Y. As shown in FIG.

The relay blowing type support means 12 draws the air below the relay blowing type support means 12 by the blowing action of the blowing fan 15 to relay the air through the vibration suppression filter 14. It is comprised so that it may eject as clean air toward the upper side of the support means 12, and, by blowing clean air in this way, clean air is supplied to the lower surface of the glass substrate 1 conveyed by the relay conveyance part B, It is comprised so that the glass substrate 1 may be supported in a horizontal attitude | position. In addition, in this specification, not only the posture (completely horizontal posture) in which the glass substrate 1 is parallel in a horizontal direction, but a "horizontal posture", the glass substrate 1 has a predetermined angle (for example, 5 with respect to a horizontal direction). It is used as a concept that includes an inclined posture (approximately horizontal posture), such as an angle of less than or equal to an angle of 10 degrees or less. And the state in which the glass substrate 1 is supported by the posture inclined with respect to the horizontal direction arises, for example by a manufacturing error, or is intentionally realized by a design.

Moreover, the relay conveyance part (12) of the relay blowing type support means in the position fixed state so that the upper surface which blows out clean air is located below the support height which supports the glass substrate 1 in the propulsion force provision means 3 ( It is installed in B).

Each of the upstream side blowing support means 11 and the downstream side blowing support means 13 also includes a vibration suppression filter 14 and a blowing fan 15 similarly to the relay blowing type support means 12. It is configured similarly except that the sizes of the fan filter units 16 are different. In addition, the upstream blower support means 11 and the downstream blower support means 13 are provided in the same height as the relay blower support means 12. As shown in FIG.

[Relay conveying part]

Next, the relay transfer section B will be described.

As shown in FIG.4 and FIG.5, the relay conveyance part B raises and lowers a pair of main conveyance propulsion force provision means 5 and a pair of sub conveyance propulsion force provision means 6, and makes a pair of main conveyances. The main conveyance state (refer FIG. 4) which made the propulsion force provision means 5 contact the lower surface of the glass substrate 1, and switched the conveyance direction of the glass substrate 1 to the main conveyance direction X, and a pair of sub conveyance propulsion force provision means It is comprised so that switching to the sub conveyance state (refer FIG. 5) which contacted 6 the lower surface of the glass substrate 1 and switched the conveyance direction of the glass substrate 1 to the sub conveyance direction Y is carried out.

Adding a description, a pair of main lift-type thrust force provision part 5a raises and lowers the support frame 9 which supports it by the main conveyance lifting operation means 17 (refer FIG. 6), and a pair of high and low formulas It is comprised so that raising / lowering movement is possible in the ascending position (refer FIG. 4) of the same height as the propulsion force provision part 5b and a pair of sub-fixed propulsion force provision part 6b, and the lowered position (refer FIG. 5) below this raised position. have.

Similarly, the pair of lifting and lowering propulsion units 6a are similarly moved by lifting and lowering the supporting frame 9 supporting them by the lifting and lowering operation unit 18 for sub-conveying. And a pair of the sub-fixed propulsion force imparting portions 6b to move up and down (see FIG. 5) and to the down position (see FIG. 4) below the raised position.

And each of the main conveyance lifting operation means 17 and the sub conveyance lifting operation means 18 is comprised by the air cylinder in this example.

And as shown in FIG. 4, the relay conveyance part B carries out the main conveyance state by raising the main lifting thrust force provision part 5a to a raise position, and also lowering the floating lifting thrust force provision part 6a to a lower position. Is switched to. Thus, in the state switched to the main conveyance state, the main lifting type thrust force provision part 5a contacts the lower surface of the glass substrate 1, and the floating type thrust force provision part 6a is the bottom surface of the glass substrate 1 Spaced downward from

In addition, as shown in FIG. 5, the relay conveyance part B is a sub conveyance state by lowering the main lifting thrust force provision part 5a to a lowered position, and raising the floating lifting thrust force provision part 6a to a raise position. Is switched to. In this state, the main lifting and lowering force imparting portion 5a is spaced downward from the bottom surface of the glass substrate 1, and the lifting and lowering thrusting force imparting portion 6a is formed on the glass substrate 1. It is in contact with the lower surface.

[Auxiliary ventilation means]

As shown in FIG. 2, in the relay transport section B, the main transport for supporting the glass substrate 1 in a non-contact state separately from the blower type support means 2 (the relay blower type support means 12). The auxiliary blowing means 19 and the sub conveyance auxiliary blowing means 20 are provided. Each of these main transport auxiliary blowing means 19 and the sub transport auxiliary blowing means 20 includes an air supply unit 21 for supplying clean air toward the lower surface of the glass substrate 1, and the air supply unit 21. A filter (not shown) and an on-off valve (not shown) provided in the middle of the piping for supplying the corrected air are provided.

Each of the main transport auxiliary blowing means 19 and the sub transport auxiliary blowing means 20 supports the glass substrate 1 positioned above the air supply unit 21 in a non-contact state by opening and closing the opening / closing valve. It is comprised so that switching to the supply state which supplies clean air, and the supply stop state which stopped supply of clean air from the air supply part 21 is carried out.

6 and 7, the air supply part 21 is comprised by the jet nozzle which has the slit-shaped jet port 21a, what is called an air knife. Moreover, the blowing port 21a is formed in the upper end part of the air supply part 21, and the air supply part 21 is comprised so that the clean air may be blown out directly from the blowing port 21a. In addition, as shown in FIG. 6, the air supply part 21 is located in the relay conveyance part B in a fixed position so that the height of the blower outlet 21a may be located below the upper surface of the ventilation type support means 2. As shown in FIG. It is installed.

The main transport auxiliary blowing means 19 is formed by the pair of sub-carrier propulsion force applying means 6 (floating type propulsion force applying portion 6a) and the relay blow-type support means 12 in the relay conveying part B. At least the first gap g1 located on the upstream side of the main transport direction X and the third gap g3 located downstream of the main transport direction X of the pair of gaps formed therebetween. It is comprised by providing the air supply part 21. In the present embodiment, as shown in FIG. 2, the main transport auxiliary blowing means 19 is configured by providing an air supply unit 21 in both the first gap g1 and the third gap g3.

In this embodiment, the air supply part 21 provided in the 1st clearance g1 in the main conveyance auxiliary blower 19 is provided in multiple numbers by the sub conveyance direction Y (in other words, many in this example, 6 in this example). . Each of the plurality of air supply units 21 has a subcarrier propulsion force which is located on the upstream side of the main transport direction X from the first gap g1 in a planar view, with the jet port 21a along the main transport direction X. It is provided between the rotating rollers 7 adjacent to the sub conveyance direction Y in the provision means 6. Moreover, the air supply part 21 provided in the 3rd clearance g3 in the main conveyance auxiliary blower 19 is also provided in multiple numbers in the sub conveyance direction Y similarly, and each of these air supply parts 21, The jet port 21a is in a posture along the main conveyance direction X, and is in the subconveying direction Y in the subcarrier driving force imparting means 6 located downstream from the third gap g3 in the planar view in the plane. It is provided over the adjacent rotating rollers 7.

6, the support body 24 which supports the air supply part 21 is located in the 1st clearance g1 (or 2nd clearance g2), and the air supply part 21 is a support body. It is supported by the cantilever type (24), and is provided in the state arrange | positioned with the rotating roller 7 and the sub conveyance direction Y. As shown in FIG.

In addition, as shown in FIG. 1, each of the air supply part 21 provided in the 1st clearance gap g1 in the main conveyance auxiliary blower 19, and the air supply part 21 provided in the 3rd clearance g3, In this embodiment, six are provided in the sub conveyance direction Y, two rotation rollers 7 are provided between the two air supply parts 21 located in the most center side of the sub conveyance direction Y, and the said air supply part ( 21, three rotary rollers 7 and the air supply part which is located outermost of the said air supply part 21 and the sub conveyance direction Y between 21 and the air supply part 21 adjacent to the outer side of the sub conveyance direction Y. Four rotary rollers 7 are located between the 21 and 21.

That is, as shown in FIG. 8, the air supply part 21 in the main conveyance auxiliary blower 19 compares the said air supply part 21 in the center part of the sub conveyance direction Y in the relay conveyance part B with each other. In the state which the space | interval of the air supply parts 21 on the edge part side of the sub conveyance direction Y in the relay conveyance part B becomes wider than the space | interval, it is provided in multiple numbers (6 in this example) in the sub conveyance direction Y.

In this way, the main transport auxiliary blowing means 19 supplies a large amount of clean air to the center portion rather than the end side of the sub-carrier direction Y, and has a higher bearing force than the end side of the sub-carrier direction Y of the glass substrate 1. It is comprised so that a non-contact support may be carried out.

In addition, about the air supply part 21 provided in the 1st clearance g1 in the main conveyance auxiliary blower 19, as shown in FIG. 6, the upstream blower type support means containing the 1st clearance g1. It is provided over the whole width | variety of the main conveyance direction X in the clearance gap between (11) and the relay blowing type support means 12. As shown in FIG. In addition, in this specification, the width | variety (gap) of the clearance gap between the upstream side ventilation support means 11 and the relay ventilation support means 12 is the width | variety of the air supply part 21 with "over the whole width." Not only coincide with the width) but also when the width of the air supply portion 21 is small with respect to the gap width, the width of the air supply portion 21 is a predetermined ratio (for example, 80% or 90%) of the gap width. Etc.) is used as a concept including the above case. In this embodiment, as shown in FIG. 6, the width | variety of the air supply part 2l is about 90% of the width | variety of the clearance gap between the upstream blower support means 11 and the relay blower support means 12. As shown in FIG. In addition, the air supply part 21 is arrange | positioned and spaced apart with respect to both the upstream blower support means 11 and the relay blower support means 12. As shown in FIG.

To add explanation, the lifting type thrust force provision part 6a is provided between the upstream blower support means 11 and the relay blower support means 12, and the 1st clearance g1 is formed. In order to achieve this, a relatively large gap is formed in the main transport direction X. However, by providing the air supply unit 21 as described above, the upstream side blowing support means 11 and the relay blowing support means 12 are provided. Also, it is comprised so that the glass substrate 1 can be appropriately supported.

The sub-conveying auxiliary blowing means 20 is provided between the pair of main conveying propulsion force applying means 5 (main lift-type propulsion force applying part 5a) and the relay blowing-type supporting means 12 in the relay conveying part B. At least a second gap g2 of the second gap g2 located on the downstream side of the subcarrier direction Y and a fourth gap g4 located on the upstream side of the subcarrier direction Y among the pair of gaps formed in the air. The supply part 21 is provided and comprised. In the present embodiment, as shown in FIG. 2, the sub-carrier auxiliary blowing means 20 is configured by providing an air supply unit 21 in both of the second gap g2 and the fourth gap g4.

The air supply part 21 provided in the 2nd clearance gap g2 in the sub conveyance auxiliary blower 20 is provided in the main conveyance direction X in multiple numbers (in other words, many in this example, 6 in this example), and the plurality of air Each of the supply portions 21 has a main conveyance driving force imparting means 5 located in the posture of the jet port 21a along the subconveying direction Y and located downstream of the subconveying direction Y from the second gap g2 in plan view. It is provided over the rotating rollers 7 adjacent to the main conveyance direction X in (). Moreover, the air supply part 21 provided in the 4th clearance gap g4 in the sub conveyance auxiliary blower 20 is also provided in multiple numbers in the main conveyance direction X similarly, and each of these air supply parts 21, The jet port 21a is in a posture along the subconveying direction Y, and is in the main conveyance direction X in the main conveyance driving force imparting means 5 located upstream of the subconveying direction Y from the fourth gap g4 in plan view. It is provided over the adjacent rotating rollers 7.

And the air supply part 21 in the sub conveyance auxiliary blow means 20 is the same as the air supply part 21 in the main conveyance auxiliary blow means 19, and the air supply part 21 of the main conveyance direction X in the relay conveyance part B is carried out. In the state in which the space | interval of the air supply parts 21 in the edge part side of the main conveyance direction X in the relay conveyance part B becomes wider than the space | interval of the said air supply parts 21 in the center part, it is a plurality ( In this example, 6 pieces are added together.

Moreover, about the air supply part 21 provided in the 2nd clearance g2 in the sub conveyance auxiliary blower 20, the air supply part 21 provided in the 1st clearance g1 in the main transport auxiliary blower 19 is carried out. ), Is provided over the entire width | variety of the sub conveyance direction Y in the clearance gap between the relay blowing type support means 12 containing the 2nd clearance gap g2, and the downstream blowing type support means 13. As shown in FIG. .

[Regulation member]

As shown in FIG. 2, in the relay conveyance part B, the glass substrate 1 conveyed by the main transport propulsion force provision means 5 to the downstream direction of the main transport direction X in the forward direction of the main transport direction X The main conveyance regulating member (corresponding to the contact member) 25 and the sub conveyance propulsion force applying means 6 control the conveyance to the downstream side of the main conveying direction X rather than the downstream end position. The sub conveyance regulation member 26 which regulates that the glass substrate 1 conveyed in the reverse direction toward an upstream side is conveyed to the upstream side of the sub conveyance direction Y rather than the upstream end position of the sub conveyance direction Y is provided.

In addition, in the state where the glass substrate 1 is located in the downstream end position of the main conveyance direction X, the lifting type thrust force provision part 6a is just under each of the both ends of the main conveyance direction X of the said glass substrate 1 ), The small diameter portion 7a of the rotary roller 7 is positioned, and the rotary roller 7 in the lifting type thrust force imparting portion 6a is positioned outside both ends of the main transport direction X of the glass substrate 1. The large diameter portion 7b of is in a state where it is located. Moreover, in the state in which the glass substrate 1 is located in the upstream end position of the sub conveyance direction Y, the main lift type thrust force provision part 5a just under each of the both ends of the sub conveyance direction Y of the said glass substrate 1 A small diameter portion 7a of the rotary roller 7 in the position of the rotary roller 7 in the main lift type thrust force imparting portion 5a is located outside both ends of the sub-carrier direction Y of the glass substrate 1. The neck 7b is in a state where it is located.

As shown in FIG. 9, the main transport regulating member 25 has the same height as the glass substrate 1 mounted and supported by the pair of main transport propulsion force applying means 5 in the main transport state and in the sub transport state. In the glass substrate 1 mounted and supported by a pair of sub-carrier propulsion means, a pair of restricted positions (see Fig. 9 (a)) abuts on the downstream side of the main transport direction X and a pair of main transport states. The lower surface of the glass substrate 1 mounted and supported by the main transport propulsion force applying means 5 and lower than the lower surface of the glass substrate 1 mounted and supported by the pair of sub transport propulsion force applying means 6 in the subcarrier state. It is configured to be movable to the deregulation position (see Fig. 9B) located on the side and located downstream of the main transport direction X from the regulation position. That is, the regulation position of the main conveyance restricting member 25 is a position which abuts on the side surface of the downstream side of the main conveyance direction X in the glass substrate 1 located in the downstream end position of the main conveyance direction X mentioned above.

Then, the main transport restriction member 25 is regulated by moving the support member 27 supporting the main transport regulation member 25 in a straight line in the inclined direction by the main regulation lifting operation means 28. It is configured to move up and down between the position and the deregulation position. That is, the main conveyance restricting member 25 moves upward from the regulated position to the downstream side of the main conveying direction X, moves downward and inclines to the deregulated position, and moves upward from the deregulated position to the upstream side of the main conveying direction X. It is comprised so that it may move to the side and incline to a regulation position.

In addition, the sub-carrier regulating member 26 also has a support member 27 for supporting the sub-carrier regulating member 26 to the elevating operation means 29 for negative regulation, similarly to the main conveying regulating member 25. By moving up and down linearly, it is comprised so that a movement to a regulation position and a regulation release position is possible. The regulation position of this sub conveyance regulation member 26 is the same height as the glass substrate 1 mounted and supported by the pair of sub conveyance propulsion force provision means 6 in a sub conveyance state, and a pair of in a main conveyance state. In the glass substrate 1 mounted and supported by the main conveyance driving force imparting means 5, it becomes a position which abuts on the side surface of the upstream side of the sub conveyance direction Y, and the regulation release position of the sub conveyance regulation member 26 is a main The lower surface of the glass substrate 1 mounted and supported by the pair of main transport propulsion force applying means 5 in a conveyance state, and the glass substrate mounted and supported by the pair of sub transport propulsion force supply means 6 in a subcarrier state ( It is located below the lower surface of 1) and becomes the position of the upstream side of the sub conveyance direction Y from a regulation position. That is, the regulation position of the sub conveyance restricting member 26 is a position which abuts on the side surface of the upstream side of the sub conveyance direction Y in the glass substrate 1 located in the upstream end position of the sub conveyance direction Y mentioned above.

〔controller〕

As shown in FIG. 12, the plate-shaped conveyance apparatus is equipped with the operation | movement of the blowing type support means 2 and the propulsion force provision means 3, and the main conveyance auxiliary blow means 19 by the relay conveyance part B, and sub conveyance. Control the operation of the auxiliary blowing means 20, the main conveyance elevating operation means 17, the sub conveyance elevating operation means 18, the main regulating elevating operation means 28 and the subregulating elevating operation means 29. The control device H is provided. And operation control of each means is performed by the software program mounted in the microcomputer with which the control apparatus H is equipped.

When switching the relay conveyance part B from the sub conveyance state to the main conveyance state, the control apparatus H switches the main conveyance auxiliary blower 19 to a supply state, and also the sub conveyance auxiliary blower 20 ) Is switched to the supply stop state, and the main transport auxiliary blowing means 19 is switched to the supply stop state when the relay conveyance unit B is switched from the main transport state to the sub transport state. It is comprised so that the air blowing means 20 may be switched to a supply state. And the control apparatus H is corresponded to ventilation state switching means.

It is comprised so that the detection information of the 1st detection sensor 31, the main conveyance 2nd detection sensor 32, the sub conveyance 1st detection sensor 33, and the sub conveyance 2nd detection sensor 34 may be input. As shown in Fig. 10, these four detection sensors 31 to 34 are in a space surrounded by a pair of main lifting and lowering force applying portions 5a and a pair of lifting and lowering propulsion force applying portions 6a in plan view. It is installed.

And the main conveyance 2nd detection sensor 32 is formed in the downstream side of the main conveyance direction X from the main conveyance 1st detection sensor 31, and is conveyed toward the downstream side of the main conveyance direction X (1). Is detected by the main transport first detection sensor 31 and then detected by the main transport second detection sensor 32.

In addition, the subcarrier 2nd detection sensor 34 is formed in the upstream side of the subcarrier direction Y rather than the subcarrier 1st detection sensor 33, and is conveyed toward the upstream side of the subcarrier direction Y (1). Is detected by the subcarrier first detection sensor 33 and then detected by the subcarrier second detection sensor 34.

And in the state where the glass substrate 1 is located in a proper position (the state in which the glass substrate 1 is a downstream end position of the main conveyance direction X, and is located in the upstream end position of the sub conveyance direction Y), All the detection sensors 31-34 are in the state which detects the glass substrate 1 located in a suitable position.

Next, operation | movement of the relay conveyance part B by the control apparatus H is demonstrated.

First, the case where the glass substrate 1 is conveyed in the positive direction will be described based on FIG. 13. In addition, when conveying the glass substrate 1 in a normal direction, before the downstream end part of the main conveyance direction X of the glass substrate 1 is conveyed to the 1st clearance gap g1, the relay conveyance part B may perform relay ventilation. The expression support means 12 is switched to an operating state, the main lifting force applying portion 5a is moved upward to the rising position, the lifting type pushing force giving portion 6a is moved downward to the lowering position, and the main transport auxiliary blowing The means 19 are switched to the supply state, the sub conveyance auxiliary blowing means 20 is switched to the supply stop state, the main transport regulating member 25 is moved to the regulation position, and the sub conveyance regulating member 26 is regulated. It moves to the release position, and is switched to the forward main conveyance state.

The glass substrate 1 is conveyed toward the downstream side of the main transport direction X at the conveyance speed by the operation of the main transport propulsion force applying means 5 (the main lift propulsion force imparting part 5a).

At this time, the main transport auxiliary blowing means 19 is switched to the supply state, and the upstream side blowing support means 11 and the relay blowing type support are made by the clean air blown out from the main transport auxiliary blowing means 19. Since the glass substrate 1 on the clearance gap formed with the means 12 can be non-contacted, the glass substrate 1 can be appropriately supported. In addition, since the subcarrier auxiliary blowing means 20 is switched to the supply stop state, since both ends of the sub conveyance direction Y in the glass substrate 1 do not easily rise from the main conveyance driving force imparting means 5, the main conveyance driving force The imparting means 5 can appropriately impart a driving force to the glass substrate 1.

When the glass substrate 1 is conveyed toward the downstream side in the main transport direction X, and the main transport first detection sensor 31 detects the glass substrate 1 as shown in FIG. Decrease the operating speed of whether or not 5a (main transport propulsion force applying means 5), decelerate the conveyance speed by the main transport propulsion force applying means 5 to a low conveyance speed, and convey the glass substrate 1 <S3> .

Then, when the main conveyance 2nd detection sensor 32 detects the glass substrate 1, from this detection, the set time for a stop (glass substrate 1 is detected by the main conveyance 2nd detection sensor 32, and a suitable position will be followed. After elapse of the time required for conveyance to the apparatus <S4>, the operation of the main lift propulsion force imparting part 5a (main conveyance propulsion force imparting means 5) is stopped <S5>. At this time, the glass substrate 1 is conveyed to the downstream end position of the main conveyance direction X, and is located in the appropriate position as shown in FIG.

In the state which positioned the glass substrate 1 as mentioned above in the appropriate position, the air blower which switches the main conveyance auxiliary blow means 19 to a supply stop state, and also switches the sub conveyance auxiliary blow means 20 to a supply state. A contact for executing the state switching process, further lowering the main lift propulsion force giving part 5a, raising the sub lift propulsion force applying part 6a, and moving the main transport regulating member 25 to the deregulated position. A sieve position switching step is executed to switch the relay transport section B to the forward subcarrier state <S6>. In addition, the main transport auxiliary blower 19 is switched to the stopped state, the sub-carrier auxiliary blower 20 is switched to the supply state, the lift-type propulsion force applying unit 6a is raised, and the main lift-type propulsion unit is not included. The order of descending whether or not 5a and the movement of the main transport regulating member 25 to the deregulation position may be set as appropriate, and some or all of these may be performed simultaneously.

Thus, before the relay conveyance part B is switched from the main conveyance state to the sub conveyance state, and conveyance to the sub conveyance direction Y of the glass substrate 1 is started in the relay conveyance part B, the main conveyance auxiliary blower means It is comprised so that 19 may be switched to a supply stop state and the sub conveyance auxiliary blower 20 may be switched to a supply state. In addition, before the relay conveyance part B is switched from the main conveyance state to the sub conveyance state, and conveyance to the sub conveyance direction Y of the glass substrate 1 is started in the relay conveyance part B, the main conveyance regulation member 25 Is moved to the deregulation position.

Thereafter, the operation of the subcarrier driving force imparting means 6 is started, and the glass substrate 1 is conveyed at a normal conveyance speed toward the downstream side in the subcarrier direction Y <S7>.

At this time, since the main transport auxiliary blowing means 19 is switched to the supply stop state, both ends of the main transport direction X in the glass substrate 1 do not easily float from the sub-carrie propulsion force applying means 6, and thus the sub-carrier The propulsion force can be appropriately imparted to the glass substrate 1 by the propulsion force applying means 6. Moreover, the sub conveyance auxiliary blow means 20 is switched to a supply state, and the relay blowing type support means 12 and the downstream side blow-type support means are carried out by the clean air blown out from this sub conveyance auxiliary blow means 20. FIG. The glass substrate 1 can be non-contactedly supported on the gap formed between (13), and the glass substrate 1 can be supported suitably.

After the start of the operation of the sub conveyance propulsion means 6, when the set time for switching (the time required for the glass substrate 1 to be conveyed from the relay conveyance part B to the downstream conveyance part C) has elapsed < S8>, the relay transport section B is switched to the forward main transport state <S9>.

Next, the case where the glass substrate 1 is conveyed in the reverse direction will be described. In addition, when conveying a glass substrate in a reverse direction, before the glass substrate 1 is conveyed from the downstream conveyance part C to the relay conveyance part B, the relay ventilation type support means 12 is switched to an operation state, , The main lift type pushing force imparting part 5a is moved downward to the lowered position, the lifting type pushing force imparting part 6a is moved upward to the rising position, and the main transport auxiliary blowing means 19 is switched to the supply stop state, The sub conveyance auxiliary blowing means 20 is switched to the supply state, the main conveyance regulating member 25 is moved to the deregulated position, the sub conveyance regulating member 26 is moved to the regulating position, and the relay conveyance part B Is switched to the reverse subcarrier state.

And the sub conveyance propulsion force provision means 6 is operated, the glass substrate 1 is conveyed toward the upstream side of the sub conveyance direction Y at a normal conveyance speed, and the sub conveyance 1st detection sensor 33 is a glass substrate 1 ), The conveying speed by the sub conveyance driving force imparting means 6 is decelerated at a low conveying speed to convey the glass substrate 1, and the sub conveying second detection sensor 34 detects the glass substrate 1. Then, the operation of the subordinate conveyance force applying means 6 is stopped after the elapse of the stop set time from this detection. At this time, the glass substrate 1 is conveyed to the upstream end position of the sub conveyance direction Y, and is located in a proper position.

In the state which positioned the glass substrate 1 as mentioned above in the appropriate position, the air blower which switches the main conveyance auxiliary blow means 19 to a supply state, and also switches the sub conveyance auxiliary blow means 20 to a supply stop state. The state switching process is executed, the main lift-type propulsion force applying unit 5a is raised, the lift-type propulsion force applying unit 6a is lowered, and the sub-carrier regulating member 26 is moved to the deregulated position, The relay carrier B is switched to the reverse main transport state.

Thereafter, the main transport propulsion force imparting means 5 is operated to convey the glass substrate 1 at a normal transport speed toward the upstream side in the main transport direction X.

After starting operation of the main transport propulsion force applying means 5, when the set time for switching (time required for the entire glass substrate 1 to be conveyed to the upstream conveying part A) elapses, the relay conveying part B Is switched to the reverse subcarrier state.

That is, the air supply part 21 of the main conveyance auxiliary blow means 19 is provided in the 1st clearance gap g1, and the air supply part 21 of the sub conveyance auxiliary blow means 20 is provided in the 2nd clearance gap g2. By switching the subcarrier auxiliary blowing means 19 and the subcarrier auxiliary blowing means 20 to the supply state and the supply stop state in accordance with the switching between the subcarrier state and the main conveyance state of the relay conveyance unit B, It is possible to prevent damage to the glass substrate 1 beforehand while conveying the glass substrate 1 reliably in the main conveyance direction X and the sub conveyance direction Y.

[Other Examples]

(1) In the said Example, the relay conveyance part B is switched to the sub conveyance state from the main conveyance state, and conveyance to the downstream side of the sub conveyance direction Y of the glass substrate 1 in a relay conveyance part B is started. Before the transfer, the main transport auxiliary blowing means 19 was switched to the supply stop state and the sub transport auxiliary blowing means 20 was switched to the supply state, but in the relay transport section B, the portion of the glass substrate 1 was Simultaneously with or immediately after the start of conveyance to the downstream side of the conveying direction Y, the main transport auxiliary blowing means 19 may be switched to the supply stop state, and the subcarrier auxiliary blower means 20 may be switched to the supply state.

Although a plurality of rotary rollers 7 in contact with the lower surface and imparting a propulsive force to the glass substrate 1 were arranged in the main conveying direction X in a roller manner, the main conveying propulsion force imparting means 5 was provided in the glass substrate 1. The endless belt which contacts the lower surface and imparts thrust force to the glass substrate 1 may be comprised by the belt type arrange | positioned along the main conveyance direction X. As shown in FIG.

When the main transport propulsion force applying means 5 is a belt type, a plurality of endless belts as a rotating body may be provided in the main transport direction X, or a single endless belt may be provided along the main transport direction X.

Similarly, you may comprise also the sub conveyance propulsion force provision means 6 in a belt type.

(3) In the said embodiment, the air supply part 21 in the main conveyance auxiliary blower 19 is provided across the rotating roller 7 from the 1st clearance g1 in planar view, and 1st clearance In the gap between the upstream side blowing support means 11 and the relay blowing type support means 12 including (g1), the upstream side blowing support means 11 and the relay blowing type support means 12 Although arranged so as to be spaced apart from both sides of the air supply unit 21 in the main transport auxiliary blowing means 19, to either or both of the upstream side blowing support means 11 and the relay blowing support means 12. You may install so that it may contact. In addition, you may provide the air supply part 21 in the main conveyance auxiliary blower 19 so that it may be located only in the 1st clearance gap g1 by planar view.

Similarly, the air supply part 21 in the sub conveyance auxiliary blow means 20 may be provided so that it may contact with either or both of the relay blow type support means 12 and the downstream blow type support means 13, and You may provide the air supply part 2l in the sub conveyance auxiliary blower 20 so that it may only be located in 2nd clearance gap g2 when it sees in plan view.

(4) In the said Example, the space | interval of the air supply part 21 in the main conveyance auxiliary blower 19 with the said air supply part 21 in the center part of the sub conveyance direction Y in the relay conveyance part B. Furthermore, although the space | interval of the said air supply part 21 comrades in the end conveyance direction Y in the relay conveyance part B became wider, it provided in multiple in the sub conveyance direction Y, but in the main conveyance auxiliary blower 19 A plurality of air supply units 21 may be provided in the sub-conveying direction Y at equal intervals. Further, even when a plurality of air supply units 21 are arranged in the sub-carrier direction Y at equal intervals, the flow rate of clean air from the air supply unit 21 located at the center side of the sub-carrier direction Y is determined by the air supply unit at the end side. You may comprise so that it may be more than the flow volume of the clean air from (21), and a non-contact support may be carried out by the support part with the center part higher than the end side of the sub conveyance direction Y of the glass substrate 1. The same applies to the air supply unit 21 in the sub-carrier auxiliary blowing means 20.

(5) In the above embodiment, the air supply unit 21 is composed of a jet nozzle having a slit jet port, but the air supply 21 has a jet nozzle having one or a plurality of annular jet nozzles. The air supply part 21 may be comprised by the small fan filter unit.

In the above embodiment, although a plurality of air supply units 21 are provided in the first gap g1 and the second gap g2, the jet nozzle 21a is provided with a jet nozzle having a slit-shaped jet port 21a. The first clearance g1 or the first gap g1 is provided in the first gap g1 in a posture along the conveyance direction Y, and the jet port 21a is provided in the second gap g2 in a posture along the main conveyance direction X. A single air supply unit 21 may be provided in the two gaps g2.

(6) In the above embodiment, the main transport regulating member 25 is provided, and the regulation release position of the main transport regulating member 25 is lower than the regulating position and downstream of the main conveying direction X from the regulating position. Although the main conveyance regulating member 25 located at the regulation position was moved to the downwardly inclined position to move to the deregulation position, the main conveyance regulating member 25 located at the regulating position was moved in the main conveyance direction X. It may be comprised so that it may move horizontally downstream, and may be moved to the regulation release position, and may be comprised so that the main conveyance regulation member 25 located in a regulation position may be moved vertically downward, and may be moved to a regulation release position. In addition, the main transport regulation member 25 may not be formed. The same applies to the sub-carrier restriction member 26.

(7) In the said Example, the upstream conveyance part A is provided in the upstream side of the main conveyance direction X of the relay conveyance part B, and it is downstream downstream of the sub conveyance direction Y of the relay conveyance part B. Although the side conveyance part C was provided and the plate-shaped conveyance apparatus was comprised in L shape, the 2nd downstream of the structure similar to an upstream conveyance part A in the downstream of the main conveyance direction X of the relay conveyance part B is carried out. The side conveyance part is provided in parallel, or the 2nd upstream conveyance part of the same structure as the downstream conveyance part C is provided in the upstream of the sub conveyance direction Y of the relay conveyance part B, and a plate-shaped conveyance apparatus is formed into a T shape. You may comprise, and you may provide both a 2nd downstream conveyance part and a 2nd upstream conveyance part in parallel, and may comprise a plate-shaped conveyance apparatus in a cross shape.

In addition, by not changing the conveyance direction of the glass substrate 1 in the relay conveyance part B, the glass substrate 1 from an upstream conveyance part A to a 2nd downstream conveyance part through the relay conveyance part B. ) And the glass substrate 1 can be conveyed from the 2nd upstream conveyance part to the downstream conveyance part C through the relay conveyance part B. FIG.

(8) In the above embodiment, the relay conveying unit B is moved in the main conveyance state and the subconveyed state by lifting and lowering both the pair of main conveyance propulsion force applying means 5 and the pair of subconveying propulsion force applying means 6. Although it is comprised so that it may be switched to, the relay conveyance part B will be made into the main conveyance state and the sub conveyance state by moving up and down either one of the pair of main conveyance propulsion force provision means 5 and the pair of sub conveyance propulsion force provision means 6. It may be configured to switch. In such a configuration, the height of supporting the plate member 1 in the main transport state and the sub transport state is different, but the height of the relay blowing type support means 12 is adjusted according to the change in the support height of the plate member 1. You may comprise the relay blowing type support means 12 so that lifting / lowering movement is possible.

(9) In the above embodiment, the case where the glass substrate 1 for liquid crystal corresponds to the "rectangular plate-shaped body" in the present invention has been described as an example, but the rectangular plate-shaped body is used for applications other than liquid crystals. It is also possible to employ | adopt the glass substrate used, and the plate-shaped object of materials (for example, a semiconductor) other than glass.

1: glass substrate (plate)
2: blowing support means
3: propulsion means
5: means for imparting main conveyance
6: Sub conveyance propulsion means
7: rotating body
11: Upstream blowing support means
12: relay blowing support means
13: downstream blowing support means
19: main transport auxiliary blowing means
20: subcarrier auxiliary blowing means
21: air supply
25: absence of main transport regulation (contact)
A: Upstream conveying part
B: relay return unit
C: downstream conveying part
g1: first gap
g2: second gap
H: blowing state switching means
X: main transport direction
Y: subcarrier direction

Claims (10)

Blowing support means for supplying clean air toward a lower surface of the rectangular plate-like body to support the plate-like body in a non-contact state in a horizontal position; and the support supported by the blowing-type support means Propulsion force applying means is provided for contacting the lower surface of the plate-like body to impart a propulsion force in a conveying direction to the plate-like body.
An upstream side conveying part which conveys the said plate-shaped body in a main conveyance direction, the downstream side conveying part which conveys the said plate-shaped object in the sub conveyance direction orthogonal to the said main conveyance direction, and the said upstream conveying part As a plate-shaped conveyance apparatus provided with the relay conveyance part which changes the conveyance direction of the said plate-shaped object received from the said main conveyance direction from the said main conveyance direction, and passes it to the said downstream conveyance part,
As said propulsion force provision means, it is provided from the upstream conveyance part to the said relay conveyance part, and it contacts with the lower surface of the both ends of the said sub conveyance direction in the said plate-shaped object, and the propulsion force in the said main conveyance direction with respect to the said plate-shaped object is given. The sub conveyance with respect to the said plate-shaped object by contacting the lower surface of the both ends of the said main conveyance direction in the said plate-shaped object provided in the said main conveyance force provision means to give, and the said downstream conveyance part from the said relay conveyance part. A pair of sub conveyance propulsion force provision means which gives the propulsion force in the direction is provided,
The upstream side provided as said blowing-type support means provided in the said upstream conveyance part in the state separated from each of the said pair of main conveyance propulsion force provision means in the said sub conveyance direction between the said pair of main conveyance propulsion force provision means. The downstream blow-type support means provided in the said downstream conveyance part in the state separated from each of the said pair of sub-carrier propulsion force provision means in the said main conveyance direction between a blower support means and the pair of sub-carrier propulsion force provision means. And the pair of subcarriers between the pair of subcarrier propulsion means in a state spaced apart from each of the pair of main transport propulsion force applying means in the subcarrier direction. In a state spaced apart from each of the propulsion force applying means in the main transport direction A relay blowing type support means provided in the relay conveying unit is provided,
The relay conveying unit relatively lifts and moves the pair of main transport propulsion force applying means and the pair of sub conveyance propulsion force applying means to contact the lower surface of the plate body by contacting the pair of main transport propulsion force applying means. In the main conveyance state which switched the conveyance direction to the said main conveyance direction, and in the sub conveyance state which contacted the lower surface of the said plate-shaped body, the said conveyance direction of the said plate-shaped object was switched to the sub conveyance direction by contacting the lower surface of the said plate-shaped object. Configured to be switchable,
At least a main conveying direction of a pair of gaps between the pair of sub-carrier propulsion means applying means and the relay blowing-type support means in the relay conveying unit, for supplying the clean air toward the lower surface of the plate-shaped object; A main transport auxiliary blowing means disposed in a first gap located upstream of the
The air supply unit is disposed in a second gap located downstream of at least a sub-carrier direction among a pair of gaps between the pair of main transport propulsion force applying means and the relay blowing type support means in the relay transport unit. Sub-conveying auxiliary blowing means is installed,
Each of the main transport auxiliary blowing means and the sub transport auxiliary blowing means includes a supply state for supplying the clean air to support the plate-shaped body positioned above the air supply part in a non-contact state, and from the air supply part. Is configured to be switched to a supply stop state in which the supply of the clean air is stopped,
When the said relay conveyance part is switched from the said sub conveyance state to the said main conveyance state, it will switch the said main conveyance auxiliary blow means to the said supply state, and will also switch the said sub conveyance auxiliary blow means to the said supply stop state, Moreover, when the said relay conveyance part is switched to the said sub conveyance state from the said main conveyance state, the air blow which switches the said main conveyance auxiliary blow means to the said supply stop state, and also switches the said sub conveyance auxiliary blow means to the said supply state The plate-shaped conveyance apparatus with which state switching means is provided. The method of claim 1,
The main transport auxiliary blower may be used for the blowing state switching means before the relay conveying unit is switched from the main conveying state to the sub conveying state and the conveying in the sub conveying direction of the plate-shaped body is started in the relay conveying unit. The plate-shaped object conveying apparatus comprised by switching a means to the said supply stop state, and switching the said sub conveyance auxiliary blowing means to the said supply state. The method according to claim 1 or 2,
The main conveying force imparting means includes a plurality of rotating bodies that are in contact with the lower surface of the plate-like body and impart a driving force to the plate-like body along the main conveying direction.
The said sub conveyance propulsion force provision means is comprised so that the said rotating body may be provided in multiple numbers along the said sub conveyance direction,
The said air supply part in the said main conveyance auxiliary blow means is provided between the said rotating bodies adjacent to the said sub conveyance direction in the said sub conveyance propulsion force provision means from the said 1st clearance in planar view,
The said air supply part in the said subcarrier auxiliary blower means is provided in between the said rotating bodies adjacent to the said main conveyance direction in the said main conveyance propulsion force provision means from the said 2nd clearance gap in planar view. Conveying device. The method according to claim 1 or 2,
The air supply part of the main transport auxiliary blowing means is provided over the entire width of the main transport direction in the gap between the upstream side blowing support means including the first gap and the relay blowing type support means. Become,
The said air supply part of the said sub conveyance auxiliary blow means is installed over the full width of the said sub conveyance direction in the clearance gap between the said relay blow type support means containing the said 2nd clearance gap, and the said downstream side blow type support means. Plate-shaped conveyance apparatus which is done. The method according to claim 1 or 2,
The said air supply part in the said main conveyance auxiliary blowing means is the said air in the edge part side of the said sub conveyance direction in the said relay conveyance part rather than the space | interval of the said air supply parts in the center part of the said sub conveyance direction in the said relay conveyance part. In the state where the space | interval of supply parts becomes wide, a plurality is provided in the said sub conveyance direction,
The said air supply part in the said sub conveyance auxiliary blow means is the said air in the edge part side of the said main conveyance direction in the said relay conveyance part rather than the space | interval of the said air supply parts in the center part of the said main conveyance direction in the said relay conveyance part. The plate-shaped conveyance apparatus which is provided in multiple numbers by the said main conveyance direction in the state which the space | interval of supply parts becomes wide. The method according to claim 1 or 2,
The said air supply part is a plate-shaped conveyance apparatus comprised by the ejection nozzle which has a slit-shaped ejection opening. The method according to claim 1 or 2,
In the plate-shaped body which is the same height as the plate-shaped body mounted and supported by the pair of main transport propulsion force applying means in the main transport state, and is mounted and supported by the pair of sub-carrier propulsion force applying means in the sub-carried state. The lower limit of the plate-like body mounted and supported by the pair of main transport propulsion means in the main transport state, and the pair of the pair in the subcarrier state. The plate-shaped conveyance apparatus which is provided with the contact body which is movable below the lower surface of the board | substrate body mounted and supported by the sub conveyance propulsion force provision means, and is moved to the deregulation position located downstream of the said main conveyance direction from the said regulation position. Blowing support means for supplying clean air toward the lower surface of the rectangular plate-like body to support the plate-like body in a non-contact state in a horizontal position, and the plate in contact with the lower surface of the plate-like body supported by the blowing-type support means. Thrust force imparting means for imparting a thrust force in the conveying direction to the upper body is provided,
The upstream conveying part which conveys the said plate-shaped body in a main conveyance direction, the downstream conveying part which conveys the said plate-shaped object in the sub conveyance direction orthogonal to the said main conveyance direction, and the said plate-shaped object received from the said upstream conveying part. The relay conveyance part which switches the conveyance direction of the said conveyance direction from the said main conveyance direction to the said sub conveyance direction, and passes to the said downstream conveyance part is provided,
As said propulsion force provision means, it is provided from the upstream conveyance part to the said relay conveyance part, and it contacts with the lower surface of the both ends of the said sub conveyance direction in the said plate-shaped object, and the propulsion force in the said main conveyance direction with respect to the said plate-shaped object is given. The sub conveyance with respect to the said plate-shaped object by contacting the lower surface of the both ends of the said main conveyance direction in the said plate-shaped object provided in the said main conveyance force provision means to give, and the said downstream conveyance part from the said relay conveyance part. A pair of sub conveyance propulsion force provision means which gives the propulsion force in the direction is provided,
The upstream side blow-type support provided in the said upstream conveyance part as said blowing support means, spaced apart from each of the said pair of main conveyance propulsion force provision means in the said sub conveyance direction between the said pair of main conveyance propulsion force provision means. Downstream blowing support means provided in said downstream conveying part in a state spaced apart from each of said pair of sub-carrier propulsion force applying means in said main conveying direction between said means and said pair of sub-carrier propulsion force applying means; The pair of sub-carrier propulsion means in a state spaced apart from each of the pair of main-carrier propulsion force applying means in the sub-carrier direction and between the pair of sub-carrier propulsion force applying means In a state spaced apart from each of the in the main transport direction Relay guns support means installed on the system transfer section is provided,
The relay conveying unit relatively lifts and moves the pair of main transport propulsion force applying means and the pair of sub conveyance propulsion force applying means to contact the lower surface of the plate body by contacting the pair of main transport propulsion force applying means. The main conveyance state which switched the conveyance direction to the said main conveyance direction, and the sub conveyance state which switched the conveyance direction of the said plate-shaped object to the sub conveyance direction by making the said pair of sub conveyance propulsion force contacting surfaces contact the lower surface of the said plate-shaped object. Configured to switch to
An air supply unit for supplying clean air toward the lower surface of the plate-like body, in at least a main transport direction of a pair of gaps between the pair of sub-carrier propulsion means applying means and the relay blow-out support means in the relay transport unit; A main transport auxiliary blowing means disposed in the first gap located on the upstream side is provided, and the air supply unit is provided between the pair of main transport propulsion force applying means in the relay transport section and the relay blowing type support means. A subcarrier auxiliary blowing means disposed at a second gap located at least downstream of the pair of gaps in a subcarrier direction,
Each of the main transport auxiliary blowing means and the sub transport auxiliary blowing means includes a supply state for supplying clean air to support the plate-shaped body positioned above the air supply part in a non-contact state, and the cleanness from the air supply part. As a plate-shaped object conveyance method using the said plate-shaped object conveyance apparatus comprised so that switching to the supply stop state which stopped supply of air,
In the switching from the subcarrier state to the main conveyance state of the relay conveyance unit, the main transport auxiliary blower is switched to the supply state, and the subcarrier auxiliary blower is switched to the supply stop state, and the In the switching from the main transport state to the sub-carrier state of the relay transport unit, the blowing state switch for switching the main transport auxiliary blowing means to the supply stop state and further switching the subcarrier auxiliary blowing means to the supply state. The plate-shaped conveyance method containing the process. The method of claim 8,
In the said blowing state switching process, in the switching from the said main conveyance state of the said relay conveyance part to the said sub conveyance state, before the conveyance with respect to the said sub conveyance direction of the said plate-shaped object is started in the said relay conveyance part, The plate-shaped object conveyance method which switches a conveyance auxiliary blower to the said supply stop state, and switches the said subcarrier auxiliary blower to the said supply state. The method according to claim 8 or 9,
In the plate-shaped body which is the same height as the plate-shaped body mounted and supported by the pair of main transport propulsion force applying means in the main transport state, and is mounted and supported by the pair of sub-carrier propulsion force applying means in the sub-carried state. The lower limit of the plate-like body mounted and supported by the pair of main transport propulsion means in the main transport state, and the pair of the pair in the subcarrier state. A contact member provided below the lower surface of the plate-shaped body mounted and supported by the sub-carrier propulsion force applying means and movable to a deregulation position located downstream of the main conveying direction from the regulating position,
In switching from the said main conveyance state to the said sub conveyance state in the said relay conveyance part, before a conveyance with respect to the sub conveyance direction of the said plate-shaped object is started in the said relay conveyance part, the said contact body is changed from the said regulating position. A plate-shaped conveyance method including the contact position switching process of moving to a deregulation position.

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