KR101064893B1 - Plate flotation system - Google Patents

Abstract

The present invention relates to a flat plate floating system for supporting a flat plate with a fluid (gas or liquid), the flat portion and parallel to the conveying direction of the flat plate to form a support gap with the flat plate and the flat plate A nozzle block having a pair of inclined portions having upper and left corner portions formed to be inclined; A pair of nozzle plates formed to surround the inclined portion and the outer circumferential surface of the nozzle block at a position equal to or slightly below the height of the pair of inclined portions opposed to the nozzle block; An inclined jet fluid (gas or liquid), comprising a pair of inclined nozzle portions formed by an opposite pair of inclined portions of the nozzle block and a pair of inclined nozzle portions formed by the pair of nozzle plates; To incline upwardly toward the bottom of the flat plate, and support the flat plate at regular intervals by a pressure (floating force) formed at an upper portion of the nozzle block flat part where the oppositely discharged jetted jet fluid (gas or liquid) meets each other. It relates to a flat plate floating system using a gradient jet fluid.

Flat Plate, Plate, Floating, Air Float, Inclined Nozzle, Inclined Jet, Coanda Jet

Description

Flat Panel Floating System {PLATE FLOTATION SYSTEM}

The present invention relates to a flat plate floating system for supplying a fluid (gas, liquid) to form a flotation force to support the flat plate at a constant interval, and specifically, is formed parallel and flat with respect to the conveying direction of the flat plate and the lifting interval with the flat plate A nozzle block having a flat portion forming a recess and an opposite pair of inclined portions formed at an upper left and right corner portions inclined with respect to the flat plate; A pair of nozzle plates formed surrounding the nozzle block inclined portion and the outer circumferential surface at a position equal to or slightly below the height of the pair of inclined portions opposed to the nozzle block; An inclined jet fluid (gas or liquid), comprising a pair of inclined nozzle portions formed by an opposite pair of inclined portions of the nozzle block and a pair of inclined nozzle portions formed by the pair of nozzle plates; To incline upwardly toward the bottom of the flat plate, and support the flat plate at regular intervals by a pressure (floating force) formed at an upper portion of the nozzle block flat part where the oppositely discharged jetted jet fluid (gas or liquid) meets each other. It relates to a flat plate floating system using a gradient jet fluid.

In addition, the present invention relates to a flat plate floating system for supporting a flat plate with a fluid (gas or liquid), the flat portion and parallel to the conveying direction of the flat plate to form a support interval with the flat plate and the flat plate A coanda bar having an opposing pair of coanda curve surfaces formed with round upper and left edges thereof; A pair of nozzle plates formed surrounding the outer circumferential surface of the coanda bar at a position below a height of a pair of opposite coanda curve surfaces of the coanda bar; A pair of opposed coanda nozzles formed of a pair of opposite coanda curve surfaces of the coanda bar and a pair of nozzle plates; and the coanda jets discharged through the opposite pair of coanda nozzles. The fluid (gas or liquid) flows toward the bottom of the flat plate, and the flat plate is fixed by the pressure (floating force) formed at the top of the coanda bar flat part where the oppositely discharged coanda jet fluid (gas or liquid) meets each other. The present invention relates to a flat plate floating system using a coanda jet fluid.

Floating of flat plates (glass substrates, films, etc.) is the flatness of flat panels in the manufacturing process of flat panel displays such as thin film transistor-liquid crystal displays (TFT-LCDs), plasma display panels (PDPs), and electroluminescent (EL). It is mainly used in the process of floating or conveying the plate at regular intervals while maintaining or adjusting the degree precisely.

For example, the flat plate floating conveyer is not required for motors, gears, belts, conveying rollers, etc. in addition to the advantages of non-contact conveying, compared to conveying devices through conveyor belts or conveying rollers. This is most often applied in the field of transferring sensitive plates, which are mainly vulnerable to impact and must be kept clean due to various advantages such that they do not occur and do not cause generation of various dusts or foreign substances due to contact between components.

In a conventional air floating apparatus, air is supplied to a single flow path and distributed to a plurality of air supply holes, thereby maintaining or flattening the flat plate to a certain height.

1 and 2 are a partial perspective view and a cross-sectional view of a conventional air floating device.

1 and 2, the conventional air floating apparatus comprises a lower table 10, a gasket 20, an air floating filter 30, the upper table 40, the air supply device ( The air supplied from 5 passes through the air sharing passage 11 of the lower table 10, and the air supplied from the air floating filter 30 of the air floating filter 30 is prevented from leaking to the outside by the gasket 20. After passing through the fine hole 31, the air buoyancy force is transmitted to the plate via the air hole 41 of the upper table 40.

However, in the conventional air floating apparatus, even when the air floating filter 30 is used to solve the deviation of the air supply, the air pressure is increased in the area close to the flow path where air is supplied, and the air pressure is decreased in the area far from the flow path. There is a problem that the flatness of the flat plate is not uniform because the air pressure is not uniformly transmitted over the entire area of the flat plate because it is not completely eliminated.

In addition, in the air hole 41 of the conventional air-floating device, as shown in the following figure, the air pressure is rapidly reduced at the center of the air hole. Increasing or increasing the air supply pressure has the disadvantages of increased cost and reduced efficiency

Meanwhile, in addition to the conventional air floating apparatus, a flat air floating conveying apparatus using a Coanda jet is known.

That is, Korean Laid-Open Patent Publication No. 10-2007-0109222 has a flat plate input end 111 formed in a normal direction with respect to the conveying direction of the flat plate, as shown in FIGS. A transfer block 110 having an upper edge of the input terminal 111 rounded over the entire period; And adjacent to the flat plate input end 111 below the upper surface of the transfer block so as to form the nozzle unit 121 of the normal line with respect to the conveying direction of the flat plate, and through the nozzle unit 121. Discharge air in a direction in contact with the outer surface to induce the discharged air flows along the round portion 112 of the flat plate input terminal 111 to the upper surface of the transfer block 110 to generate a Coanda jet BACKGROUND ART An air-floating flat plate conveying device which simultaneously provides a flotation force and a conveying force is known.

However, in the conventional airborne flatbed conveying apparatus using the coanda jet, the coanda bar and the coanda nozzle are formed only in one direction so that the flat plate cannot be suspended, and the coanda jet is difficult to generate sufficient pressure. There is a problem and the problem that the flat plate can only be transferred in one direction.

In addition, when the support interval between the transfer block 110 and the plate P is wider than the support interval in a stable state due to external factors, the air discharged from the nozzle unit 121 passes through the plate P while receiving less resistance. Therefore, the flow rate of the air flowing between the transport block 110 and the plate (P) is increased and according to Bernoulli's principle, the static pressure decreases as the flow rate is increased, and eventually between the transfer block (110) and the plate (P) In this case, the flotation force is significantly reduced, so the flotation interval is narrowed and there is a risk of damage to the plate due to the disappearance of the flotation force.

Therefore, in order to compensate for the reduction of the flotation force and the flotation interval, the output of the Coanda jet is increased, or the flotation interval between the transport block 110 and the plate P is further narrowed so that the Coanda jet receives a large resistance and receives the flat plate P. Since the flow rate of the jet flowing between the transfer block 110 and the plate (P) is reduced because of this, according to Bernoulli's principle, the static pressure is increased as the flow rate is reduced between the transfer block 110 and the plate (P). As described above, in the conventional airborne flatbed conveying apparatus using a coanda jet, a coanda bar and a nozzle are formed only in one direction so that a coanda jet of sufficient pressure is hardly generated, and a coanda jet is used. Since it is dispersed in one direction, there is a problem that it is difficult to quickly recover the buoyancy.

In addition, the conventional air-floating device or a flat air-floating conveying device using a Coanda jet has a problem that the vibration is generated and the unstable flotation at the flat plate edge due to the fluid turbulence due to the nonuniformity of the fluid flow and interference.

Accordingly, the present invention is to solve the above problems, by using a pressure generated by supplying a uniform gradient jet fluid or coanda jet fluid throughout the plate to maintain a flatness of the flat plate while giving a stable flotation force The problem is to provide a flat floating system that can finely adjust the floatation interval.

The present invention is a flat plate floating system for supplying a fluid (gas, liquid) to form a flotation force to support the flat plate at regular intervals, the flat is formed parallel and flat with respect to the conveying direction of the flat plate to form a support interval with the flat plate A nozzle block having an inclined portion having an upper portion and an upper left and right corner portions inclined with respect to the plate; A nozzle plate surrounding the nozzle block inclined portion and an outer circumferential surface at a position equal to or slightly below the height of the opposite inclined portion of the nozzle block; And an inclined nozzle portion formed by opposing inclined portions and nozzle plates of the nozzle block, such that the inclined jet fluid (gas or liquid) discharged through the inclined nozzle portions is inclined upwardly toward the bottom of the flat plate. A flat plate using a gradient jet fluid, which flows and floats the flat plate at a predetermined interval by a pressure (floating force) formed at an upper portion of the nozzle block flat part where the oppositely discharged jet liquids (gas or liquid) meet each other. The floating system is used as a problem solving means.

Another solution of the present invention is a flat plate floating system for supporting a flat plate with a fluid (gas or liquid), the flat portion is formed parallel and flat with respect to the conveying direction of the flat plate and the support gap and the A coanda bar having opposing coanda curve surfaces formed to round the upper left and right corners with respect to the flat plate; A nozzle plate formed to close the outer circumferential surface of the coanda bar at a position lower than an opposite coanda curve surface height of the coanda bar; An opposite coanda nozzle portion formed by an opposite coanda curve surface of the coanda bar and a nozzle plate; and configured to include a coanda jet fluid (gas or liquid) discharged through the opposite coanda nozzle portion. It is characterized in that to flow toward the lower portion of the plate, and the coanda jet fluid (gas or liquid) opposed to each other to support the plate at regular intervals by the pressure (floating force) formed in the upper portion of the flat portion of the coanda bar. A flat panel floating system using a coanda jet fluid is a problem solving means.

Flat plate floating system using the gradient jet fluid or coanda jet fluid according to the present invention supplies a uniform air pressure throughout the flat plate, and provides a flattening of the flat plate while giving a stable flotation force using the gradient jet fluid or coanda jet fluid Since it can maintain precisely and finely adjust the flotation interval, there is a unique effect to produce a more precise plate.

The present invention relates to a flat plate floating system for supporting a flat plate with a fluid (gas or liquid), wherein the flat plate is formed parallel and flat with respect to the transfer direction of the flat plate to form a support gap with the flat plate. A nozzle block having opposing inclined portions formed with inclined corners; A nozzle plate covering the inclined portion and the outer circumferential surface of the nozzle block at a position equal to or slightly below the height of the opposite inclined portion of the nozzle block; And an inclined nozzle portion formed by opposing inclined portions and nozzle plates of the nozzle block, such that the inclined jet fluid (gas or liquid) discharged through the inclined nozzle portions is inclined upwardly toward the bottom of the flat plate. A flat plate using a gradient jet fluid, which flows and floats the flat plate at a predetermined interval by a pressure (floating force) formed at an upper portion of the nozzle block flat part where the oppositely discharged jet liquids (gas or liquid) meet each other. The floating system is characterized by its technical configuration.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Referring to FIG. 5, the flat plate floating system 800 using the inclined jet fluid according to the present invention has a flat portion 302 which is formed parallel and flat with respect to the conveying direction of the flat plate P to form a support interval with the flat plate. And a nozzle block 301 having an opposite inclined portion 303 having an upper left and right corner portions inclined with respect to the plate. A nozzle plate 304 surrounding the inclined portion 303 and the outer circumferential surface 306 of the nozzle block at a position equal to or slightly below the height of the opposite inclined portion 303 of the nozzle block; And an inclined nozzle portion 305 formed by opposing inclined portions of the nozzle block and nozzle plates, wherein the inclined jet fluid (gas or liquid) discharged through the inclined nozzle portions is disposed on the lower portion of the plate. To raise the flat plate P at a constant interval by a pressure (floating force) formed at an upper portion of the nozzle block flat portion 302 where the oppositely discharged inclined jet fluid (gas or liquid) meets each other. It features.

In this case, the inclination angle α of the inclined portion 303 and the inclined nozzle portion 305 with respect to the flat plate P is preferably 5 to 45 degrees. When the inclined angle α is less than 5 degrees, the inclined portion 303 and the inclined nozzle portion ( 305) There is a disadvantage in that it is very difficult to form, and if it exceeds 45 degrees, there is a problem in that the flotation force is lost and there is no difference from the flotation force by the conventional air hole.

The planar shape of the inclined nozzle part 305 formed by the nozzle block 301 and the nozzle plate 304 may be a closed circular, elliptical or rectangular, or may be an open parallel type of bar type as shown in FIG. 6.

In addition, as shown in FIG. 7, it is preferable to form a serrated nozzle 307 in the nozzle plate 304 forming the inclined nozzle part 305, which is used to form the inclined nozzle part 305. This is because the interval between the inclined portion 303 and the nozzle plate 304 of the nozzle block 301 can be easily formed.

As shown in FIG. 8, the nozzle block flat portion 202 is formed in which the inclined jet fluid (gas or liquid) discharged from the pair of opposed inclined nozzle portions 305 facing the lower portion of the flat plate meet each other. After raising the plate (P) at regular intervals by the pressure (floating force) is formed in, the fluid flow (H) flowing out to the outside flows along the plate. This flow disturbs the air outside the edge of the plate. This causes vibration and unstable flotation of the plate.

In order to prevent the fluid flow H that causes the disturbance, as shown in FIG. 9, a separate nozzle 700 is formed in the middle of the nozzle plate 304 and the jet discharged through the nozzle 700. By the fluid to change the direction of the fluid flow (H).

The nozzle 700 is preferably formed as a Coanda nozzle in order to improve the direction change effect of the fluid flow (H).

Another embodiment of the present invention is the inclined jet fluid (gas or liquid) by the inclined nozzle portion 305 formed of the nozzle block 301 and the nozzle plate 304 having the inclined portion 303 in the configuration of the embodiment Instead of using, a Coanda jet fluid (gas or liquid) by a Coanda nozzle unit formed of a Coanda bar and a nozzle plate is used.

That is, in a flat plate floating system for supporting a flat plate with a fluid (gas or liquid), the flat plate is formed parallel and flat with respect to the conveying direction of the flat plate to form a support gap with the flat plate. A coanda bar having opposing coanda curve surfaces having rounded corners; A nozzle plate formed surrounding the outer circumferential surface of the coanda bar at a position lower than an opposite coanda curve surface height of the coanda bar; An opposite coanda nozzle portion formed by an opposite coanda curve surface of the coanda bar and a nozzle plate; and configured to include a coanda jet fluid (gas or liquid) discharged through the opposite coanda nozzle portion. It is characterized in that to flow toward the lower portion of the plate, and the coanda jet fluid (gas or liquid) opposed to each other to support the plate at regular intervals by the pressure (floating force) formed in the upper portion of the flat surface of the coanda bar. .

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

First of all, the Coanda effect refers to the property that the fluid tries to flow along the curved surface as shown in the following figure.

Referring to the buoyancy generation process according to the coanda jet applied in the present invention, as shown in the figure below, the coanda jet fluid (gas or liquid) discharged through the nozzle portion is flat along the rounded corner of the coanda bar When it flows negatively and meets the plate surface, the flow no longer flows along the rounded corners. This phenomenon also occurs on the opposite side. In other words, the speed of the flow becomes zero and the pressure near the center increases, so the flotation force occurs. This phenomenon is proved by the computational fluid analysis results as shown below.

라고 하고, h는 만곡면을 따라 흐르다가 흐름이 만곡면에서 떨어지는 박리점(separation point)에서 평판 면까지라고 한다면 그 압력에 의해서 젯트를 옆으로 밀어내는 힘이 발생하는데 이 힘은 momentum flux 방정식에 의해 표기된다. 즉, 젯트흐름에 대해 왼쪽으로 작용하는 힘은 다음과 같은 식으로 표시된다.In the above figure, the pressure of 2 zones (floating pressure)

If h flows along the curved surface and the flow is from the separation point to the flat surface falling from the curved surface, the force that pushes the jet to the side is generated by the pressure. Is indicated by. In other words, the force acting on the jet flow to the left is expressed by

In addition, in order to change the direction of the jet flow, a force expressed as follows is required.

 However, since the two forces must be the same, the lifting pressure is expressed by the following equation.

Thus, the smaller the h, the higher the flow rate, the higher the density, and the higher the flow rate (the smaller the jet width, the larger the flow rate, if the flow rate is constant), the greater the lifting pressure.

In addition, since the pressure distribution shown in the present invention has a tendency as shown in the following figure, the wider the flat portion of the coanda bar, the greater the buoyancy force, and it can be seen that the effect is much better than the buoyancy force according to the distribution of the shape shown in the conventional air hole. have. That is, it is the biggest feature and advantage of the present invention that the flotation force is proportional to the width of the coanda bar under all conditions.

     On the other hand, the shape of the coanda bar and the nozzle plate of the present invention can be made in a variety of circles, ovals, squares, parallel lines, etc. according to the arrangement of the coanda bar and the nozzle plate, and maintains the buoyant force effectively without loss of the coanda jet It gives a float on the flat surface.

A flat panel floating system according to another embodiment of the present invention will be described in detail with reference to FIG. 10.

Referring to FIG. 10, in a flat plate floating system for supporting a flat plate P with a fluid (gas or liquid), the flat plate floating system is formed parallel and flat with respect to the conveying direction of the flat plate to form a support gap with the flat plate P. A coanda bar (201) having a flat portion (202) and an opposite coanda curve surface (203) formed at an upper left and right corners with respect to the flat plate; A nozzle plate 204 formed surrounding the outer circumferential surface of the coanda bar 201 at a position below the height of the opposite coanda curve surface 203 of the coanda bar; An opposite coanda nozzle portion 205 formed of an opposite coanda curve surface 203 and a nozzle plate 204 of the coanda bar 201, and configured to include the opposite coanda nozzle portion 205. Coanda jet fluid (gas or liquid) discharged through) flows toward the lower portion of the flat plate (P), and the coanda bar flat portion where the opposite discharged coanda jet fluid (gas or liquid) meet each other ( 202) It characterized in that the plate (P) to support at a constant interval by the pressure (floating force) formed in the upper portion.

The planar shape of the coanda nozzle unit 205 formed by the coanda bar 201 and the nozzle plate 204 may be a closed circle, an ellipse, or a quadrangle, and may be an open bar parallel type as shown in FIG. 11. have.

In addition, as shown in FIG. 12, the nozzle plate 204 forming the coanda nozzle unit 205 is preferably formed with a toothed nozzle 307, which forms the coanda nozzle unit 205. This is because, in forming, the distance between the coanda bar 201 and the nozzle plate 204 can be easily formed.

Further, as shown in FIG. 13, the coanda bar flat portion 202 where the coanda jet fluid (gas or liquid) discharged from the pair of opposing coanda nozzle portions 205 facing the lower portion of the plate meet with each other. After raising the plate P at regular intervals by the pressure (floating force) formed at the top, the fluid flow H flowing outward flows sideways along the plate. This flow disturbs the air outside the edge of the plate, which causes the plate to vibrate and become unstable.

In order to prevent the fluid flow H that causes the disturbance, as shown in FIG. 14, a separate nozzle 700 is formed in the middle of the nozzle plate 204 and the jet discharged through the nozzle 700. By the fluid to change the direction of the fluid flow (H).

The nozzle 700 is preferably formed as a Coanda nozzle in order to improve the direction change effect of the fluid flow (H).

Alternatively, the fluid discharge hole 206 may be formed in the flat portion 202 of the coanda bar 201.

That is, if there is no flotation plane surface, as shown in FIG. 15, the Coanda jet meets near the center and is scattered upward, thereby increasing the defective rate as particles are contaminated on the glass substrate due to the turbulence generated in the clean room. In addition to lowering productivity and increasing production costs, Coanda jets can strike the plate surface upward when the plate approaches, causing vibration or damaging the plate.

In order to solve this problem, as shown in FIGS. 16A, 16B, and 16C, the fluid discharge hole 206 is formed in the flat part 202 of the bar. When the 203 is formed to extend, the flow of the fluid is collected at the center and flows downward, so that the Coanda jet does not fly upward, so that the flat surface does not hit the flat surface.

However, when the plate P approaches, as shown in FIG. 16B, the fluid discharge hole 206 in the center needs to be closed in order to form a flotation force on the plate surface. This method may use various known methods.

For example, if a sensor is installed in the coanda bar 201 and the flat plate P approaches, the sensor may detect the proximity and close the fluid discharge hole 206 in conjunction with an actuator (not shown). As shown in FIG. 16C, when the plate P approaches, the pressure in the vicinity of A changes, so that the pilot valve (= hydraulic servo mechanism is operated according to the external pressure as an external pressure as it detects such a pressure change). Valves (not shown) for controlling the high pressure oil supplied to the piston and the cylinder may also be used.

On the other hand, a flat plate floating system consisting of a nozzle block 301 and a nozzle plate 304 of the flat plate floating system according to the two types of embodiments of the present invention or a flat plate composed of a coanda bar 201 and a nozzle plate block 204 The basic arrangement of the floating system is preferably arranged in a grid at regular intervals to maintain a uniform flotation force, as shown in Figure 17a, in some cases can also be arranged in vertical and horizontal rows, if the length of the plate is long 17b may be formed in the longitudinal direction.

In addition, in the case of supporting the plate inclined according to necessity in the transfer or manufacturing process of the plate (P), as shown in Figure 18a, 18b, by installing a drive roller 208 for the transfer to the lower side of the plate You can also help with the transfer.

In addition, as shown in Figure 19a, 19b, it is also possible to add a conventional air hole type air floating device 300 to the flat plate floating system of the present invention.

That is, as shown in Figs. 19A and 19B, in the case of feeding and feeding a thin flat plate, the corner of the B region is not buoyant, so that the deflection may increase, which may cause a problem. Air hole type air floating device 300 of the arrangement is used in the longitudinal direction

In addition, the flat plate floating system according to the present invention has a limit even if the flotation interval and vibration of the plate is prevented by precise control of the inclined jet fluid or Coanda jet, so as to increase the flotation stiffness of the plate (Fig. 5) 10 and 20, each of the flat panel floating system 800 or the coanda bar 201 and the nozzle plate 204 composed of the nozzle block 301 and the nozzle plate 304, respectively When the vacuum is used together with the fluid inlet 209 formed between the plate floating system 200, the repulsive force (floating force) by the inclined jet or the Coanda jet acts on the plate P and at the same time through the fluid inlet 209. Since the vacuum attraction force by the fluid exiting to the outside acts, the plate has a high degree of flotation in a very stable state as a whole.

Here, the degree of flotation accuracy is a measure of how stable the position of the plate (float height) is maintained when the force acting in the vertical direction (float direction) of the plate changes. Is expressed. Therefore, the high degree of levitation is stable because there is almost no change in the height of levitation under external influences.

In addition, the conventional flat plate floating device or the air-floating flat plate conveying apparatus using a Coanda jet adopts a method of supplying air by a single pipe and a single blower, resulting in pressure loss and uneven air supply of the long pipe. Individual control of each air supply hole or Coanda jet nozzle is impossible, and when a failure occurs, it is very difficult to find the cause quickly.

In addition, when the weight of the plate to be conveyed becomes large, there is a problem that expandability, variability, and compatibility are very disadvantageous in the conventional plate floating apparatus or the air floating flat plate conveying apparatus using a Coanda jet.

Therefore, in the present invention for solving the above problems, the air supply pipe is the shortest, the pressure loss in the pipe is minimized, the individual control of the gradient jet nozzle or the Coanda jet nozzle is not only easy, but also the installation area of the flotation device is increased. As shown in FIG. 21, the nozzle block 301 and the nozzle plate 304 or the coanda bar 201 and the nozzle plate 204 are provided at the bottom to minimize and increase the variability of the flotation device. A turbo fan 210 and a lower portion of the turbo fan 210 for discharging air to the inclined nozzle unit 305 or the Coanda nozzle unit 205 are axially coupled to the turbo fan 210 to provide rotational force. A blower in which the motor 211 to be generated is composed of a single module is formed integrally with the nozzle block 301 and the nozzle plate 304 or the coanda bar 201 and the nozzle plate 204.

In addition, as shown in FIG. 22, vibration transmission is performed to prevent transmission of vibration to the nozzle block 301 and the nozzle plate 304 or the coanda bar 201 and the nozzle plate 204 provided with the integrated blower. The non-coil spring 212 or the hose coil is inserted into the nozzle plate 204, 304 in the middle.

In addition, the present invention, as shown in Figure 23 and 24, the upper portion of the turbo fan 210 is mounted in the interior of the air filter case air filter 213 for filtering the fine dust contained in the air introduced from the lower It is characterized by further comprising).

On the other hand, in the manufacturing process and transfer process of the flat display (Flat display), the deionized water (deionized water) or foreign matter, etc. on the plate should be removed by drying through the Air Jet Knife-Impact drying process shown in FIG. As described above, the air jet knife-impact dryer 214 may be further provided on one or both sides of the flat panel floating system of the present invention.

The present invention described above can be variously substituted and changed within the scope without departing from the spirit of the present invention for those skilled in the art to which the present invention pertains, which is not limited to the above-described embodiments and drawings. no.

1 is a partially exploded perspective view of a conventional air floating apparatus

2 is a partial cross-sectional view of a conventional air floating apparatus

3 is a partial perspective view of a conventional air-floating flat plate feeder

4 is a partial cross-sectional view of a conventional air-floating flatbed conveying apparatus

5 is a plan view and a cross-sectional view showing a nozzle block and a nozzle plate of a flat plate floating system according to an embodiment of the present invention.

6 is a perspective view illustrating a parallel nozzle block and a nozzle plate of a flat plate floating system according to an exemplary embodiment of the present invention.

7 is a perspective view showing a serrated nozzle formed in a parallel nozzle plate of a flat plate floating system according to an exemplary embodiment of the present invention.

8 is a state diagram showing the vibration of the flat plate edge portion appearing in the flat plate floating system according to an embodiment of the present invention

9 is a state diagram showing the vibration prevention of the flat plate edge portion appearing in the flat plate floating system according to an embodiment of the present invention

10 is a plan view and a cross-sectional view showing a coanda bar and a nozzle plate of a flat plate floating system according to another embodiment of the present invention.

11 is a perspective view showing a parallel coanda bar and a nozzle plate of a flat plate floating system according to another embodiment of the present invention.

12 is a perspective view showing a serrated nozzle formed in a parallel nozzle plate of a flat plate floating system according to another embodiment of the present invention.

13 is a state diagram showing the vibration of the flat plate edge portion appearing in the flat plate floating system according to another embodiment of the present invention

14 is a state diagram showing the vibration prevention of the flat plate edge portion shown in the flat plate floating system according to another embodiment of the present invention

15 is a cross-sectional view showing a coanda bar and a nozzle plate when there is no plate in a plate floating system according to another embodiment of the present invention and a behavior state diagram of the coanda jet fluid

16A is a cross-sectional view illustrating a coanda bar and a nozzle plate having a fluid discharge hole formed in a flat panel floating system according to another exemplary embodiment of the present invention.

16B is a cross-sectional view illustrating a state in which the fluid discharge hole of the plate floating system according to another embodiment of the present invention is closed;

16C is a cross-sectional view illustrating a state in which a fluid discharge hole is operated by using a pilot valve in a flat plate floating system according to another exemplary embodiment of the present invention.

17A is a plan view showing a lattice arrangement of a flat panel floating system according to one embodiment and another embodiment of the present invention.

17B is a plan view showing the length arrangement of a flat panel floating system according to one embodiment and another embodiment of the present invention.

18A and 18B are plan views showing a feed roller of a flat plate floating system according to one embodiment and another embodiment of the present invention.

19A and 19B are plan views showing the use of a conventional flotation device together with a flat panel floating system according to one embodiment and another embodiment of the present invention.

20 is a cross-sectional view showing a fluid inlet formed between a nozzle block and nozzle plates or a coanda bar and nozzle plates of a flat panel floating system according to an embodiment of the present invention.

FIG. 21 is a cross-sectional view illustrating a blower integrally formed with a nozzle block and a nozzle plate or a coanda bar and a nozzle plate of a flat panel floating system according to an embodiment of the present invention.

FIG. 22 is a cross-sectional view illustrating insertion of a coil spring or a hose coil in the middle of a nozzle plate to prevent vibration of a flat plate floating system according to an exemplary embodiment of the present invention.

23 and 24 are cross-sectional views showing further comprising an air filter in FIGS. 21 and 22.

25 is a conceptual diagram showing the Air Jet Knife-Impact drying process

FIG. 26 is a cross-sectional view showing that an air jet knife-impact drying device is further provided on one or both sides of a flat panel floating system according to one embodiment and another embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

200, 800: Flat Panel Floating System

201: Coanda Bar

202, 302: flat part

203: Coanda curve surface

204, 304: Nozzle Plate

205: Coanda nozzle unit

206: fluid discharge hole

208: feed roller

209: fluid inlet

210: turbofan

211: motor

212 coil coil or hose coil

213: Air Filter

214: Air Jet Knife

300: conventional flotation device

301: nozzle block

303: slope

305: inclined nozzle part

307: semi-circular serrated nozzle

Claims (32)

delete delete delete delete delete delete delete delete delete delete delete delete delete delete delete In a flat plate floating system for supporting a flat plate P with a fluid (gas or liquid), the flat portion 202 is formed parallel to and flat with respect to the conveying direction of the flat plate to form a support gap with the flat plate P. And a coanda bar 201 having an opposite coanda curve surface 203 having a rounded upper left and right corners with respect to the flat plate. A nozzle plate 204 formed surrounding the outer circumferential surface of the coanda bar 201 at a position below the height of the opposite coanda curve surface 203 of the coanda bar; An opposite coanda nozzle portion 205 formed of an opposite coanda curve surface 203 of the coanda bar 201 and a nozzle plate 204; The turbo fan 210 is provided below the coanda bar 201 and the nozzle plate 204 to discharge air to the nozzle unit 205 and the turbo fan 210 is provided below the turbo fan 210. A blower in which the motor 211 axially coupled with the 210 to generate a rotational force is configured as a single module; And a coil spring 212 or a hose coil inserted in the middle of the nozzle plate 204 to prevent transmission of vibrations to the coanda bar 201 and the nozzle plate 204. The coanda jet fluid (gas or liquid) discharged through the unit 205 flows toward the lower portion of the flat plate P, and the coanda jet fluid (gas or liquid) discharged oppositely meets each other. Flat floating system, characterized in that to support the flat plate (P) at regular intervals by the pressure (floating force) formed on the flat portion (202) The method of claim 16, The flat shape of the coanda nozzle unit 205 formed by the coanda bar 201 and the nozzle plate 204 is a flat, floating, linear, oval, rectangular or parallel open linear type of bar type. The method of claim 16, Flat plate floating system, characterized in that formed in the nozzle plate 204 forming the nozzle unit 205 as a toothed nozzle 307 The method of claim 16, In order to prevent the fluid flow (H) that causes vibration of the flat plate (P) and unstable support, a separate nozzle (700) is formed in the middle of the nozzle plate (204) and discharged by the jet fluid discharged through the nozzle. Flat floating system, characterized in that for changing the direction of the fluid flow (H) The method of claim 19, The nozzle 700 is a flat floating system, characterized in that formed by the Coanda nozzle The method of claim 16, The flat portion 202 of the coanda bar 201 is formed with a fluid discharge hole 206 flat floating system, characterized in that to discharge the flow of the coanda jet to the fluid discharge hole 206 The method of claim 21, When the flat plate P approaches the flat floating system, a sensor is installed in the coanda bar 201 to close the fluid discharge hole 206. Flat floating system, characterized in that for closing the fluid discharge hole 206 The method of claim 21, When the plate P approaches the plate floating system, when the plate approaches to close the fluid discharge hole 206, the fluid discharge hole 206 is detected by using a pilot valve that detects a pressure change near the plate A and opens and closes. Flat floating system, characterized in that delete delete The method of claim 16, The upper portion of the turbo fan 210 is mounted on the inside of the air filter case further comprises an air filter 213 for filtering the fine dust contained in the air introduced from the lower flat floating system, characterized in that The method of claim 16, Each flat floating system composed of the coanda bar 201 and the nozzle plate 204 is arranged in a lattice form at regular intervals. The method of claim 16, Each flat floating system comprising the coanda bar 201 and the nozzle plate 204 is disposed in the longitudinal direction. The method of claim 16, Flat plate floating system characterized in that the drive roller 208 for transporting is provided on the lower side of the plate in order to give the feed force in the case of feeding while feeding the plate (P) inclined The method of claim 16, In the flat plate floating system, a flat plate floating system, which is used by adding a conventional air hole type air floating device 300 in order to prevent the flat plate from sagging when the thin plate is supported and transported. The method of claim 16, In order to impart a strong flotation accuracy to the flat plate P, a fluid suction port 209 is formed between each flat floating system including the coanda bar 201 and the nozzle plate 204 to form the fluid suction port 209. Flat floating system characterized in that the vacuum attraction due to the fluid flowing out through the action The method of claim 16, Flat floating system, characterized in that further comprising an Air Jet Knife-Impact drying device 214 on one or both sides of the flat floating system

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