KR20060099958A - Apparatus for jetting fluid - Google Patents

Abstract

The present invention discloses a fluid ejection device capable of reducing drying defects by removing the cleaning liquid remaining on the substrate after cleaning the substrate in the substrate processing apparatus through the injection of compressed air. The substrate processing apparatus of the present invention includes a first injector for injecting a fluid and a second injector coupled to the first injector for injecting the fluid. Accordingly, the present invention provides a configuration in which an injector capable of injecting compressed air to a substrate is doublely coupled, so that the washing water of the substrate is primarily dried by the compressed air discharged from the first injector, and the mist may remain on the substrate. The mist and the water film may be continuously dried with compressed air injected from the second injector to maximize the drying efficiency of the substrate.

Substrate, Plate, Injector, Nozzle, Clean, Dry, Chamber

Description

Apparatus for jetting fluid

1 is a perspective view for explaining an embodiment according to the present invention.

2 is a block diagram for explaining a configuration according to the present invention.

3 is a cross-sectional view taken along the line A-A of FIG. 1.

4 is a view for explaining the operation of the present invention.

5 is a cross-sectional view for describing another exemplary embodiment of the present invention corresponding to FIG. 3.

The present invention relates to a fluid ejection apparatus, and more particularly, to a fluid ejection apparatus capable of reducing drying defects of a large-area substrate by removing the cleaning liquid remaining on the substrate after the substrate is cleaned in the substrate processing apparatus through the injection of compressed air. It is about.

In general, the fluid injection device is used to remove the cleaning liquid remaining on the substrate after cleaning the substrate by spraying compressed air onto the substrate. Such a fluid injection device has a structure in which two layers of plates are arranged to overlap each other so that a flow path can be provided in the middle portion, and the compressed air can be injected through the flow path. Such a fluid spray device is disposed on the substrate to remove the cleaning liquid and the like deposited on the surface of the substrate by spraying compressed air on the surface of the substrate as the substrate moves.

However, the conventional fluid spray device uses a plurality of fluid spray devices as the size of the substrate increases, and mist occurs due to the airflow generated between the respective fluid spray devices, and the mist is again used as a substrate. There is a problem in that productivity is reduced while poor drying of the substrate occurs.

Accordingly, the present invention has been proposed to solve the above problems, and an object of the present invention is to sufficiently reduce drying efficiency by suppressing occurrence of mist or the like when drying a substrate using compressed air after cleaning the substrate of a large area. It is to provide a fluid injection that can be increased.

In order to achieve the above object, the present invention includes a first injector for supplying and injecting fluid from a fluid supply device, a second injector coupled to the first injector and supplied with a fluid from the fluid supply device, The nozzles provided in the first injector and the second injector provide a fluid ejection device having different intervals.

The first and second injectors may be coupled to a fastening member.

Preferably, the first and second injectors are sequentially disposed along a direction in which the substrate is advanced.

It is preferable that the interval between the nozzles provided in the first injector is larger than the interval between the nozzles provided in the second injector.

The first injector is a first plate, a second plate coupled to a state in which a fluid passage through which a fluid can pass through the fastening member is provided in the first plate, the first and second plates are different from the tip portion to which the fluid is injected It is preferred to be placed in position.

The second injector includes a third plate and a fourth plate coupled to the third plate in a state in which a conduit through which fluid can pass through the fastening member is provided.

The fastening member may be made of a bolt and nut or may be made of a screw.

The apparatus may further include a controller configured to adjust an amount and a pressure of the fluid supplied to the first and second injectors.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view illustrating an embodiment according to the present invention, and FIG. 3 is a cross-sectional view of the AA part of FIG. 1, and discharges compressed air to the surface of the substrate G to display the washing water DI in FIG. 4. Figure 2 shows a fluid jet that can be removed to dry the substrate.

The fluid injection device includes a first injector 1 and a second injector 3 coupled to the first injector 1.

The first injector 1 is coupled to overlap the first and second plates 11 and 13, and a conduit 15 through which compressed air can move is provided at the center thereof.

In addition, the second injector 3 may be coupled by overlapping the third and fourth plates 31 and 33, and a second conduit 35 through which compressed air may move is provided at the center thereof. The first and second injectors 1 and 3 may be coupled to each other by fastening members 5 such as a bolt 51 and a nut 53. However, in the embodiment of the present invention, the first and second injectors 1 and 3 are not limited to being coupled by the bolt 51 and the nut 53, but are coupled by various coupling means such as screws (screws). It is possible.

Preferably, the first and second injectors 1 and 3 are sequentially arranged in a direction in which the substrate G is moved. That is, the first injector 1 is arranged to inject compressed air in a direction crossing with respect to the moving direction of the substrate G, and the second injector 3 has the same shape as the first injector 1. To be combined. The first and second injectors 1 and 3 are formed on the surface of the substrate G when the substrate G is moved in the arrow direction (shown in FIG. 1) by a conveying means such as a roller R or the like. Compressed air is continuously blown to remove the washing water and the like to dry the substrate G.

Preferably, the intervals (denoted D1 and D2) of the nozzles (ends of the pipe lines) provided to the first and second injectors 1 and 3 are different from each other. That is, the spacing D1 (shown in FIG. 3) of the nozzle (end of the pipe) provided to the first injector 1 is the spacing D2 of the nozzle provided to the second injector 3 (FIG. 3). It is preferable to make it large compared with the illustration). This is for injecting a larger amount of compressed air to the substrate G as compared to the second injector 3.

Preferably, the first and second injectors 1 and 3 are inclined at a constant inclination θ, so that compressed air is injected. This configuration is intended to increase the drying efficiency by more quickly removing the washing water on the substrate G that has passed through the cleaning process.

Meanwhile, the first and second injectors 1 and 3 are connected to receive compressed air from a separate compressed air supply device AS. The compressed air supply device AS includes a controller C having a first flow rate control unit C1 and a first pressure control unit C2 to control the flow rate or pressure of the compressed air injected from the first injector 1. Is connected. In addition, the controller C further includes a second flow controller C3 and a third pressure controller C4 to control the flow rate and pressure of the compressed air injected from the second injector 3. That is, in the present invention, the first and second flow control units C1 and C3 and the first and second pressure control units C2 and C4 are provided separately and discharged from the nozzles of the first and second injectors 1 and 3. To change the flow rate and pressure of the compressed air. In the present invention, it is preferable that the flow rate and pressure of the compressed air discharged from the nozzle of the first injector 1 are made higher in flow rate and lower in pressure than the flow rate and pressure of the compressed air discharged from the nozzle of the second injector 3. Do. Therefore, the sheet G is first dried by compressed air injected from the nozzle of the first injector 1 while being passed through the cleaning process, and is continuously compressed by the nozzle of the second injector 3. The substrate G is dried by air. At this time, the compressed air is injected from the first injector 1 and hit the substrate G, and the compressed air is injected from the second injector 3 and hit the substrate G (A1 in FIG. 4). Mist, which may be generated, is sucked into the compressed air injected from the nozzle of the first injector 1 to further increase the drying effect.

In the exemplary embodiment of the present invention, an example in which the first and second flow control units C1 and C3 and the first and second pressure control units C2 and C4 are divided and controlled by the controller C has been described. The present invention can achieve the object and effect even if one flow controller and one pressure controller. That is, in the present invention, since the intervals between the nozzles (tips at which the cleaning liquid is injected) of the first and second injectors 1 and 3 are different from each other, the flow rate of the washing water is proportional to the cross-sectional area (cross-sectional area of the nozzle end). A large flow rate is injected in the first injector 1 having a large interval, and the injection pressure of the washing water is inversely proportional to the cross-sectional area (the cross-sectional area of the nozzle end), so that the second injector 3 is injected at a large pressure.

And the first injector 1 is preferably made of a different length of the front end portion of the first, second plates (11, 13). That is, the tip portion of the first and second plates 11 and 13 is formed to protrude more than the tip portion of the tip portion of the first plate 11 and the second plate 13 with respect to the traveling direction of the substrate G. desirable. Such a structure is such that when compressed air is injected onto the substrate G, the curved air is bent at the surface of the substrate G to reduce vortices and the like and to increase the efficiency of removing the washing water.

FIG. 5 is a cross-sectional view corresponding to FIG. 3 and illustrating another embodiment of the present invention, and illustrates a fluid injection device. In the above embodiment, the shape of the tip end of the first injector 1 is illustrated with different shapes, but in another embodiment of the present invention, the length of the tip end of the second injector 3 may be different. That is, in the present invention, the length of the tip of the second injector 3 as well as the first injector 1 is different from each other, so as to bend in a streamlined shape on the surface of the substrate G to reduce vortices and the like, and to remove the washing water. To increase. In the other embodiment of the present invention, the same description as the above-described embodiment is replaced by the description.

Description of the operation of the present invention made as described above will be described in more detail with reference to FIG. 4.

The board | substrate G which passed the washing process is moved to the arrow direction (shown in FIG. 4) through the conveying means, such as the roller R. As shown in FIG. At this time, the compressed air is simultaneously sprayed from the nozzles of the first injectors 1 and 3. Compressed air is injected from the first injector 1 to the substrate G to remove the washing water DI. Then, the remaining water film is the drying of the substrate G while compressed air is injected from the second injector 3.

At this time, the compressed air injected through the first and second injectors 1 and 3 is supplied from the compressed air supply device AS, and the first and second flow control units C1 and C3 and the first and second pressure control units C2 , The flow rate is higher and the pressure is lower than the flow rate and pressure injected from the first injector 1 as compared to the flow rate and pressure injected from the nozzle of the second injector 3 under the control of C4. Then, mist that may occur in a section A1 in which the compressed air injected from the first injector 1 and the second injector 3 strikes the substrate G is injected from the first injector 1. It is sucked out by the compressed air. Therefore, by removing the mist and water film that may remain on the surface of the substrate (G) to increase the drying efficiency. In addition, it is possible to reduce the cost of manufacturing by using two fluid spray devices to one module for good drying in the case of poor drying of the substrate.

As such, the present invention provides a configuration in which an injector capable of injecting compressed air to a substrate is doublely coupled, so that the washing water of the substrate is primarily dried by the compressed air discharged from the first injector, and may remain on the substrate. Mist and water film can be continuously dried with compressed air injected from the second injector to maximize the drying efficiency of the substrate.

In addition, the present invention is the first through the technology that the pressure and the flow rate of the compressed air injected from the first injector disposed first along the moving direction of the substrate is lower than the pressure and the flow rate of the second injector and the injection is more flow rate By the compressed air injected from the injector is injected from the second injector to absorb the air after hitting the substrate to suppress the generation of mist has the effect of improving the productivity by increasing the yield by preventing drying failure.

Claims (10)

A first injector for injecting fluid; A second injector coupled to the first injector for injecting fluid; The first injector and the second injector is provided with a nozzle for injecting a fluid, the fluid injection device is made of a different interval of the nozzle. The method of claim 1, wherein the first and second injectors Fluid injection device coupled to the fastening member. The method of claim 1, wherein the first and second injectors Fluid ejection device is arranged sequentially along the direction in which the substrate proceeds. The fluid ejection apparatus of claim 1, wherein an interval between the nozzles provided in the first injector is larger than an interval between the nozzles provided in the second injector. The method of claim 1, wherein the first injector First plate; A second plate coupled to the first plate in a state in which a conduit through which fluid can pass through the fastening member is provided; The first and second plates, the fluid injection device in which the distal end portion to which the fluid is injected are disposed at different positions. The method of claim 1, wherein the second injector Third plate; A fourth plate coupled to the third plate in a state in which a conduit through which fluid can pass through the fastening member is provided; Fluid injection device comprising a. The method of claim 2, wherein the fastening member Fluid injection device consisting of bolts and nuts or consisting of screws. The fluid ejection apparatus of claim 1, further comprising a controller configured to adjust an amount and a pressure of the fluid injected from the first and second injectors. The fluid spray apparatus of claim 1, wherein the first injector and the second injector are connected to a fluid supply device for supplying compressed air. A first injector for injecting fluid; A second injector coupled to the first injector for injecting fluid; A fluid supply device connected to the first injector and the second injector to supply compressed air; And Controller to adjust the amount and pressure of the fluid injected from the first and second injectors Fluid injection device comprising a.

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