JP2010036999A - Conveying unit for glass substrate, conveying device for glass substrate, and conveying method for glass substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a conveying unit for a glass substrate for preventing the glass substrate from being slid on a packaging shock-absorbing material even if a conveying speed is raised and a large size glass substrate is conveyed with the packaging shock-absorbing material, a conveying device in which the conveying units are continuously arranged, and a conveying method for the glass substrate. <P>SOLUTION: The conveying unit (1) for the glass substrate includes: an endless belt (4) placed with the glass substrate (3) through the packing shock-absorbing material (2) with permeability; a suction hole (5) formed on the endless belt; a vacuum chamber (6) having an opening part (61) corresponding to the suction hole of the endless belt on an upper surface and provided at an inner side of the endless belt; and a vacuum generation source (7) for making the inside of the vacuum chamber in the negative pressure state. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a transport unit that transports a large glass substrate such as a glass substrate for a flat panel display, a transport device that continuously arranges these transport units, and a method of transporting a glass substrate.

  From the viewpoint of space saving, a flat panel display such as a liquid crystal display or a plasma display has recently been used in place of the CRT type display which has been widely used. In the production of glass panels used in these flat panel displays, a technique in which a plurality of glass panels are cut out from a single glass substrate has been adopted. Along with this, the present situation is that the glass substrates manufactured by glass manufacturers and the like are being increased in size.

  In general, when glass or a glass and a metal come into contact with each other, a scratch occurs at a contact portion on the glass side. When tensile stress is concentrated on the tip of the scratch, the glass is broken. For this reason, it is necessary to pack the glass substrate for flat panel displays so that the distance which a glass substrate does not mutually contact during conveyance can be maintained. As a packing method, for example, when packing in a box provided with a partition, or by interposing a packing cushioning material made of paper or a synthetic resin sheet between the glass substrates, the glass substrate and the packing cushioning material Are often stacked alternately and packed.

  The packaged glass substrates are taken out one by one after unpacking and transported to the next process, but the surface of the glass substrate is easily damaged by physical contact or the like. Scratches generated on the surface of the glass substrate may cause defective formation or disconnection when a semiconductor element or wiring is formed on the substrate surface, and may also cause damage to the glass substrate as described above. Therefore, it is necessary to prevent as much as possible that an object contacts the surface at the time of taking out and conveying the glass substrate.

  Therefore, in order to transport the glass substrate, it is necessary to prevent the surface of the glass substrate from contacting the transport facility. For example, Patent Document 1 below proposes a method in which air is ejected from the bottom surface of a conveyor to float and convey a glass substrate. Moreover, in the following patent document 2, a method of supporting and transporting the periphery of a glass plate with a curved frame is proposed.

  However, in the method described in Patent Document 1 below, a device for moving the glass plate is required in addition to the device for levitating the glass plate, and various incidental facilities increase as a whole device, and this is expensive. There is a problem. In particular, when a large glass substrate with one side exceeding 2000 mm is used, the entire apparatus including the glass substrate floating equipment and the incidental equipment thereof must be enlarged, thereby saving space and reducing costs. Can not.

  Moreover, in the conveyance method described in the following Patent Document 2, in order to support the glass substrate only at the periphery, the glass substrate vibrates under the influence of the airflow around the glass substrate during conveyance, and between the glass substrate and the frame. Due to the friction, the glass substrate may be damaged. In addition, since the frame is slightly larger than the glass substrate in the present conveying method, the frame itself becomes larger when the glass substrate becomes a large plate. For this reason, the interference with the peripheral device accompanying conveyance of a glass substrate becomes a big problem.

  In order to solve this problem, in Patent Document 3 below, the glass substrate is transported to just before the cleaning process with the glass substrate placed on the packing cushioning material, and the glass substrate is under the glass substrate just before entering the cleaning process. It describes that the packing material is removed and the glass substrate is conveyed. Thereby, contact with the surface of a glass substrate and conveyance equipment can be avoided, and it can prevent that a crack arises on the surface of a glass substrate.

However, from the viewpoint of improving production efficiency, there is a need for improved transport efficiency and tact-up, and with the increase in size of the glass substrate, the glass substrate is moved at the start or stop of transport of the glass substrate in the transport process. There is a problem of sliding on the packing cushion due to inertia. If slippage occurs on the glass substrate being transferred, the glass substrate will not be properly positioned in the subsequent process, and a serious problem will occur in that the surface of the glass substrate is scratched by friction between the glass substrate and the packing cushioning material. Spill over.
JP 2008-41989 JP 2006-312511 A JP 2007-1682 A

  The present invention has been made to solve the above-described problems of the prior art, and even if the conveyance speed is increased and a large glass substrate is conveyed together with the packing cushioning material, the glass substrate is placed on the packaging cushioning material. It is an object of the present invention to provide a glass substrate transport unit capable of preventing sliding, a transport device in which these transport units are continuously arranged, and a glass substrate transport method.

  The invention according to claim 1 is an endless belt on which a glass substrate is placed via a breathable packing cushioning material, a suction hole formed in the endless belt, and suction of the endless belt on the upper surface. A glass substrate comprising: a vacuum chamber having an opening corresponding to a hole and provided inside the endless belt; and a vacuum generation source for bringing the inside of the vacuum chamber into a negative pressure state. Concerning the transport unit.

  The invention according to claim 2 relates to the glass substrate transport unit according to claim 1, wherein the packing cushioning material is paper, non-woven fabric, or a foamed resin sheet having an open cell structure.

  The invention according to claim 3 relates to the glass substrate transport unit according to claim 1 or 2, wherein the suction hole is formed in a vertically long shape along the transport direction of the glass substrate.

  The invention according to claim 4 relates to the glass substrate transfer unit according to any one of claims 1 to 3, wherein the opening of the vacuum chamber is smaller than the glass substrate.

  The invention according to claim 5 is characterized in that the inside of the vacuum chamber is divided into a plurality of chambers in the transport direction, and the division interval is ½ or less of the transport direction dimension of the glass substrate to be transported. It is related with the conveyance unit of the glass substrate in any one of Claims 1-4.

  The invention according to claim 6 relates to the glass substrate transport unit according to any one of claims 1 to 5, wherein the glass substrate is a large glass substrate having a length of at least one side of 2000 mm or more.

  The invention according to claim 7 relates to a glass substrate transfer apparatus, wherein the transfer unit according to any one of claims 1 to 6 is continuously arranged in the transfer direction of the glass substrate.

  The invention according to claim 8 is provided with an air nozzle disposed below the transport units and for generating an air flow from below to the upper surface direction of the transport unit. It is related with the conveyance apparatus of the glass substrate of description.

  The invention according to claim 9 is a glass substrate transfer apparatus to which a transfer unit in which the inside of the vacuum chamber is divided into a plurality of chambers in the transfer direction of the glass substrate is connected. 8. A transport unit in which the end chamber is located at a position equal to or less than a half of the transport direction dimension of the glass substrate to be transported, with the midpoint between the transport units as a base point. Or a glass substrate transfer apparatus according to 8;

  The invention which concerns on Claim 10 is the conveyance start part by which a glass substrate is mounted via the air-permeable packing shock absorbing material, the moving part to which the said glass substrate is moved with the said packing shock absorbing material, and the conveyed glass A glass substrate transfer apparatus comprising a transfer end unit for stopping the substrate, wherein the transfer start unit and the transfer end unit are transfer units according to any one of claims 1 to 6, wherein the moving unit is It is a conveyor which does not have the said vacuum chamber and the said vacuum generation source, It is related with the conveying apparatus of the glass substrate characterized by the above-mentioned.

  The invention according to claim 11 is a method of transporting a glass substrate, wherein a glass substrate is placed on an endless belt via a breathable packing cushioning material, and the endless belt is driven to transport the glass substrate. The suction cushion formed in the endless belt is sucked through the packing cushioning material to bring the packing cushioning material, the glass substrate, and the endless belt into close contact with each other. The present invention relates to a glass substrate transport method.

  According to the first aspect of the present invention, the endless belt on which the glass substrate is placed via the air-permeable packing cushioning material, the suction hole formed in the endless belt, and the suction of the endless belt on the upper surface A glass substrate transport unit comprising: a vacuum chamber having an opening corresponding to a hole and provided inside an endless belt; and a vacuum generation source for bringing the inside of the vacuum chamber into a negative pressure state. Therefore, the glass substrate can be sucked from the suction hole through the breathable packing cushioning material while the glass substrate is holding the packing cushioning material by its own weight. The material, the glass substrate, and the endless belt can be brought into close contact with each other. Thereby, it is possible to prevent the glass substrate from slipping on the packing cushioning material in the transporting process, and it is possible to properly position the glass substrate in the subsequent process, and the glass by friction between the glass substrate and the packing cushioning material. Micro scratches generated on the surface of the substrate can be prevented.

  According to the invention which concerns on Claim 2, since a packing cushioning material is a foamed resin sheet of paper, a nonwoven fabric, or an open-cell structure, it is excellent in cushioning properties and can be produced inexpensively.

  According to the invention of claim 3, since the suction hole is formed in a vertically long shape along the conveyance direction of the glass substrate, the endless belt is broken from the suction hole by the tension applied to the endless belt. Can be prevented more reliably.

  According to the invention of claim 4, since the opening of the vacuum chamber is smaller than the glass substrate, the glass substrate and the packing cushioning material cover all the openings at least once while the glass substrate is transported. The state can be presented. A vacuum chamber in which the opening is completely covered by the packing cushioning material and the glass substrate via the endless belt is maintained at a high negative pressure state by the vacuum generation source. Suction can be reliably performed, and the packing cushioning material, the glass substrate, and the endless belt can be more reliably brought into close contact with each other.

  According to the invention of claim 5, the inside of the vacuum chamber is divided into a plurality of chambers in the transport direction, and the division interval is ½ or less of the transport direction dimension of the glass substrate to be transported. A state of covering all the openings of at least one chamber while the substrate is being conveyed can always be exhibited. The chamber in which the opening is completely covered by the packing cushioning material and the glass substrate via the endless belt is maintained at a high negative pressure state by the vacuum generation source, so at least one of the chambers during the conveyance of the glass substrate Can be sucked more reliably through the packing cushioning material, and the packing cushioning material, the glass substrate, and the endless belt can be more closely adhered to each other. Can be made.

  According to the invention of claim 6, since the glass substrate is a large glass substrate having a length of at least one side of 2000 mm or more, even in a large glass substrate having a particularly large inertia at the start and stop of conveyance, the packing cushioning material The upper slip can be prevented more reliably, and high-speed conveyance is possible.

  According to the invention which concerns on Claim 7, since the conveyance unit mentioned above is a conveyance device of the glass substrate continuously arranged in the conveyance direction of a glass substrate, while adsorbing a glass substrate via a packing cushioning material, It can be reliably transported far away. Further, the conveyance distance can be freely changed by increasing or decreasing the number of units.

  According to the eighth aspect of the present invention, the glass substrate is disposed between the conveyance units because the air nozzle is disposed below the conveyance units and generates an air flow from below to the upper surface direction of the conveyance units. When the container is transported, the packing cushioning material can be prevented from sagging or falling off.

  According to the ninth aspect of the present invention, there is provided a glass substrate transfer apparatus to which a transfer unit in which the inside of the vacuum chamber is divided into a plurality of chambers in the transfer direction of the glass substrate is connected. Since the rear end chamber is continuously arranged with a transport unit at a position equal to or less than half the transport direction dimension of the glass substrate to be transported with the midpoint between the transport units as a base point, the glass substrate is transported by the transport unit. When transported between the two, either the front-end chamber or the rear-end chamber is covered with the glass substrate, so that the glass substrate can be more reliably adsorbed via the packing cushioning material. Even if it is a case where it is a case where it is conveyed between the conveyance units in which a board | substrate and a packing shock absorbing material are easy to slip | deviate, the slip on the packing shock absorbing material of a glass substrate can be prevented more reliably.

  According to the invention which concerns on Claim 10, the conveyance start part by which a glass substrate is mounted via the air-permeable packing shock absorbing material, the moving part to which a glass substrate is moved with a packing shock absorbing material, and the conveyed glass A glass substrate transfer apparatus comprising a transfer end unit for stopping a substrate, wherein the transfer start unit and the transfer end unit are the transfer units described above, and the moving unit is a conveyor having no vacuum chamber and no vacuum generation source. Therefore, especially at the start and end of transfer where inertia is applied, it is possible to prevent the glass substrate and the packing cushioning material from shifting, and during the constant speed movement, no suction device is required. The installation cost and running cost of the entire transport apparatus can be suppressed.

  According to the invention of claim 11, the packing cushioning material, the glass substrate, and the endless belt are brought into close contact with each other by sucking the glass substrate through the packing cushioning material from the suction hole formed in the endless belt. Since the glass substrate can hold the packing cushioning material by its own weight, the glass substrate can be sucked from the suction hole through the breathable packing cushioning material. And an endless belt can be brought into close contact with each other. By using such a transport method, slipping on the packing cushioning material of the glass substrate in the transport process can be prevented, and the glass substrate can be properly positioned in the subsequent process, and the glass substrate and Micro scratches generated on the surface of the glass substrate due to friction with the packing cushioning material can be more reliably prevented.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a glass substrate transport unit, a glass substrate transport apparatus, and a glass substrate transport method according to the present invention will be described with reference to the drawings.

  FIG. 1 is an explanatory diagram of a glass substrate transport unit according to the present invention, wherein (a) is a configuration diagram of the substrate transport unit, and (b) is a glass substrate placed on the substrate transport unit via a packing cushioning material. FIG. FIG. 2 is a cross-sectional view taken along line AA in FIG. FIG. 3 is a configuration diagram of the vacuum chamber. FIG. 4 is an enlarged cross-sectional view of a main part near the suction hole.

  The transport unit (1) for a glass substrate according to the present invention comprises an endless belt (4), a suction hole (5), a vacuum chamber (6), and a vacuum generation source (7) shown in FIG. The glass substrate (3) is mounted on the endless belt (4) via the air-permeable packing cushioning material (2) as shown in FIG.

  The endless belt (4) is a wide belt made of synthetic resin, and an upstream end and a downstream end in the transport direction are wound around rotating wheels (41) and (42), respectively. One of these rotating wheels (41) and (42) is rotationally driven as a driving wheel, and the other is driven. As shown in FIG. 1, it is preferable to use a wide endless belt because it has excellent adhesion between the packing cushioning material (2) and the glass substrate (3) and is easy to rotate synchronously. From this point of view, it is also possible to use an endless belt divided in the conveying direction.

  The suction holes (5) are provided in a plurality of rows on the endless belt (4) so as to be continuous in the belt rotation direction and in the belt width direction. For example, in FIG. 1, the suction holes (5) are arranged once in a row in the belt rotation direction, and are provided in three rows in the belt width direction.

  The shape of the suction hole (5) is preferably formed in a vertically long shape along the conveying direction of the glass substrate (3). Since the endless belt (4) is wound around the rotating wheels (41) and (42) with tension, the suction hole (5) is formed horizontally long with respect to the conveying direction of the glass substrate (3). This is because it is difficult to resist the force of breaking the suction hole (5) in the lateral width direction, and the vertically long is superior in strength.

  As shown in FIG. 1, the vacuum chamber (6) is disposed in the internal space of the endless belt (4) formed by winding the endless belt (4) around the rotating wheels (41) (42). . The openings (61) of the vacuum chamber (6) shown in FIG. 3 are parallel to the positions corresponding to the rows along the transport direction of the suction holes (5) formed on the endless belt (5) shown in FIG. And the same number of suction holes (5) formed on the endless belt (4).

  The opening (61) provided in the vacuum chamber (6) is preferably smaller than the glass substrate (3). Thereby, the glass substrate (3) and the packing cushioning material (2) have opened all the openings (61) (three rows of openings in FIG. 4) at least once while the glass substrate (3) is conveyed. A covering state can be exhibited. The packing cushioning material (2) and the glass substrate (3) completely cover the opening (6) through the endless belt (4), so that the inside of the vacuum chamber (6) is a vacuum generation source (7). Is maintained at a high negative pressure state, the glass substrate (3) can be more reliably sucked through the packing cushioning material (2), and the glass substrate (3), the packing cushioning material (2), and endless The belt (4) can be more closely attached.

  The inside of the vacuum chamber (6) is divided into a plurality of chambers in the carrying direction as shown in FIG. 2, and the division interval is not more than ½ of the carrying direction dimension of the glass substrate (3) to be carried. preferable. Thereby, the state which covers all the opening parts (61) of an at least 1 chamber can always be exhibited while a glass substrate (3) is conveyed. The chamber in which the opening (61) is completely covered by the packing cushioning material (2) and the glass substrate (3) via the endless belt (4) is maintained at a high negative pressure state by the vacuum generation source (7). Therefore, at least any one of the chambers is in a high negative pressure state during the conveyance of the glass substrate (3), and the glass substrate (3) existing immediately above the chamber is put through the packing cushioning material (2). Suction can be reliably performed, and the glass substrate (3), the packing cushioning material (2), and the endless belt (4) can be more reliably brought into close contact with each other.

  Further, the vacuum generation source (7) is connected to the vacuum chamber (6) to bring the inside of the vacuum chamber (6) into a negative pressure state. A known vacuum pump or the like is used as the vacuum generation source (7). When the vacuum chamber (6) is divided into a plurality of rooms, it is preferable to provide a vacuum generation source (7) for each room.

  Moreover, the packing cushioning material (2) is a substantially rectangular shape in a plan view and needs to be a breathable sheet. The size of the sheet needs to be one size larger than the conveyed glass substrate (3). The sheet thickness is preferably 0.1 mm to 2.0 mm. If it is less than 0.1 mm, the performance of the cushioning material is not sufficiently exerted, so that the glass substrate (3) to be transported may be damaged. If it exceeds 2.0 mm, the packing efficiency is deteriorated. It is to do.

  As the packing cushioning material (2), a sheet of paper, nonwoven fabric, open cell foamed resin sheet, felt, cloth or the like can be used. Among them, paper, nonwoven fabric, foamed resin sheet of open cell structure can be used. It is preferable in that it is inexpensive and excellent in cushioning properties.

  Further, as the glass substrate (3) to be conveyed, a display glass substrate that is particularly required to suppress the occurrence of minute scratches is preferably used. Furthermore, a large glass substrate having a length of at least one side of 2000 mm or more can be suitably conveyed. This is because, in the large glass substrate (3), there is a problem due to a large inertial force particularly when the conveyance is started or when the conveyance is stopped.

  Next, a method for transporting the glass substrate (3) according to the present invention will be described along with the operation of the transport unit.

  When the vacuum generation source (7) places the inside of the vacuum chamber (6) in a negative pressure state, the packing cushioning material (2) is sucked from the suction hole (5). Since the packing cushioning material (2) has air permeability, as shown in FIG. 4, the glass substrate (3) passes through the packing cushioning material (2) from the suction hole (5) formed on the endless belt (4). Is sucked. The packing cushioning material (2) is pressed by the weight of the glass substrate (3), and the glass substrate (3) is sucked from the suction hole (5) via the breathable packing cushioning material (2). Therefore, the packing cushioning material (2), the glass substrate (3), and the endless belt (4) can be brought into close contact with each other with a slight suction force. At this time, the packing cushioning material (2) is sandwiched between the glass substrate (3) and the endless belt (4). When the endless belt (4) is moved in this state, the glass substrate (3) is placed. The packing cushioning material (2) is reliably conveyed in accordance with the movement of the endless belt (4). That is, even if the endless belt (4) is suddenly driven or stopped, the glass substrate (3) slides on the packing cushioning material (2) due to inertia and rubs, so that micro scratches are generated on the glass substrate (3). It becomes possible to avoid the situation.

  Next, an embodiment of a transport apparatus according to the present invention using the transport unit according to the present invention will be described. FIG. 5 is a side view of the glass substrate transfer apparatus according to the first embodiment of the present invention. 6 is an enlarged cross-sectional view of a main part of FIG.

  As shown in FIG. 5, the glass substrate transport device (8) according to the first embodiment has a plurality of transport units (1) arranged in the transport direction of the glass substrate (3). By arrange | positioning in this way, the conveyance distance of a glass substrate (3) can be freely set with the arrangement | positioning number of a conveyance unit (1).

  The distance between the transport units (1) is preferably arranged as close as possible within a range where the endless belts (4) do not contact each other. This is because when the glass substrate (3) is transported between the transport units (1), the glass substrate (3) and the packing cushioning material (2) are less likely to receive an impact and prevent displacement due to the impact. When it is necessary to dispose the transport unit (1) with an interval, it is preferable to dispose the auxiliary roller (81) as shown in FIG. Thereby, a glass substrate (3) and a packing shock absorbing material (2) can be sent in the stable state to the following conveyance unit (1).

  Further, as shown in FIG. 5, an air nozzle (82) connected to a known compressor (not shown) is disposed below the transport unit (1), and air is ejected toward the transport surface direction of the transport device (8). It is preferable to make it. Thereby, when the glass substrate (3) placed on the packing cushioning material (2) is transported between the transporting units (1), the packing cushioning material (2) can be prevented from sagging or dropping off.

  In addition, as shown in FIG. 6, there is a glass substrate transfer device to which a transfer unit (1) divided into a plurality of chambers in the vacuum chamber (6) in the transfer direction of the glass substrate (3) is connected. Thus, the chamber (62) at the front end in the transport direction and the chamber (63) at the rear end are 1 in the transport direction dimension (t) of the glass substrate (3) to be transported, starting from the midpoint (C) between the transport units. It is preferable that the transport units (1) at the position of / 2 or less are continuously arranged. When the glass substrate (3) and the packing cushioning material (2) are transported across the transport unit (1), the front chamber (62) or the rear chamber (63) of the vacuum chamber (6) Since either one is always covered with the glass substrate (3) and the packing cushioning material (2), the packing cushioning material (2) and the glass substrate (3) are strongly adsorbed and held by the negative pressure. This is because the packing cushioning material (2) and the glass substrate (3) can be more reliably prevented from shifting even during transfer between the transport units (1).

  FIG. 7 is a side view of the second embodiment of the glass substrate transfer apparatus according to the present invention.

  The glass substrate transfer device (8) according to the second embodiment is composed of one transfer unit (1) as shown in FIG. Since it consists of one transport unit (1), it is not necessary to pass the glass substrate (3) between the transport units as in the first embodiment, and the glass substrate (3) and the packing cushioning material (2) It is possible to more reliably prevent the deviation.

  FIG. 8 is a diagram of a third embodiment of a glass substrate transfer apparatus according to the present invention.

  The glass substrate transfer device (8) according to the third embodiment is composed of a transfer start part (83), a moving part (84), and a transfer end part (85), as shown in FIG. The transfer start unit (83) and the transfer end unit (85) are a transfer unit (1) according to the present invention, and the moving unit (84) is a suction device such as a vacuum chamber (6) or a vacuum generation source (7). It is a known endless belt conveyor that does not have. Thus, the glass substrate (3) can be prevented from shifting between the glass substrate (3) and the packing cushioning material (2) at the start of conveyance and at the end of conveyance, which are particularly subject to inertia, and the glass substrate (3). Since the vacuum chamber (6) and the vacuum generation source (7) can be omitted in the moving part (84) that is transported by constant speed movement, the installation cost and running cost of the entire transport device (8) are suppressed. can do. The moving unit (84) is not particularly limited to the belt conveyor shown in FIG. 8, and a roller conveyor or the like may be used.

  FIG. 9 is a diagram of a fourth embodiment of a glass substrate transfer apparatus according to the present invention.

  The glass substrate transfer device (8) according to the fourth embodiment is a transfer device (8) including one transfer unit (1) as shown in FIG. Only the end part (85) is provided with a vacuum chamber (6) and a vacuum generation source (7), and the moving part (84) includes suction devices such as the vacuum chamber (6) and the vacuum generation source (7). Is not provided. Thus, the glass substrate (3) can be prevented from shifting between the glass substrate (3) and the packing cushioning material (2) at the start of conveyance and at the end of conveyance, which are particularly subject to inertia, and the glass substrate (3). Since the vacuum chamber (6) and the vacuum generation source (7) can be omitted in the moving unit (84) that is transported by constant speed movement, the installation cost and running cost of the entire transport device (1) can be suppressed. can do. Moreover, it is not necessary to pass between conveyance units to a glass substrate (3), and the shift | offset | difference of a glass substrate (3) and a packing cushioning material (2) can be prevented more reliably.

  The present invention can be suitably used for transporting large glass substrates for flat panel displays such as liquid crystal displays and plasma displays. Moreover, it can utilize also for plate glass conveyance of other fields, such as a window plate glass and a plate glass for motor vehicles.

It is explanatory drawing of the glass substrate conveyance unit which concerns on this invention, Comprising: (a) is a block diagram of a substrate conveyance unit, (b) is the figure which mounted the glass substrate on the substrate conveyance unit via the packing shock absorbing material. . It is the sectional view on the AA line of FIG.1 (b). It is a block diagram of a vacuum chamber. It is a principal part expanded sectional view of the suction hole vicinity. It is a side view of 1st Embodiment of the conveying apparatus of the glass substrate which concerns on this invention. It is a principal part expanded sectional view of FIG. It is a side view of 2nd Embodiment of the conveying apparatus of the glass substrate which concerns on this invention. It is a figure of 3rd Embodiment of the conveying apparatus of the glass substrate which concerns on this invention. It is a figure of 4th Embodiment of the conveying apparatus of the glass substrate which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Transfer unit 2 Packing cushioning material 3 Glass substrate 4 Endless belt 5 Suction hole 6 Vacuum chamber 61 Opening part 7 Vacuum generation source 8 Transfer device

Claims (11)

  An endless belt on which the glass substrate is placed via a breathable packing cushion, a suction hole formed in the endless belt, and an opening corresponding to the suction hole of the endless belt on the upper surface. A glass substrate transport unit comprising: a vacuum chamber provided inside the endless belt; and a vacuum generation source for bringing the inside of the vacuum chamber into a negative pressure state.   The said packaging cushioning material is paper, a nonwoven fabric, or the foamed resin sheet of an open cell structure, The conveyance unit of the glass substrate of Claim 1 characterized by the above-mentioned.   The glass substrate transport unit according to claim 1, wherein the suction hole is formed in a vertically long shape along a transport direction of the glass substrate.   The glass substrate transport unit according to claim 1, wherein an opening of the vacuum chamber is smaller than the glass substrate.   The inside of the vacuum chamber is divided into a plurality of chambers in the transport direction, and the division interval is ½ or less of the transport direction dimension of the glass substrate to be transported. The glass substrate transport unit described in 1.   The said glass substrate is a large sized glass substrate whose length of at least one side is 2000 mm or more, The conveyance unit of the glass substrate in any one of Claims 1-5 characterized by the above-mentioned.   A conveying unit according to any one of claims 1 to 6, wherein the conveying unit is continuously arranged in the conveying direction of the glass substrate.   The apparatus for transporting a glass substrate according to claim 7, further comprising an air nozzle that is disposed below the transport units and generates an airflow from below to the top surface of the transport unit. A glass substrate transport apparatus to which a transport unit that is divided into a plurality of chambers in the vacuum substrate transport direction is connected,
Conveying units in which the front end chamber and the rear end chamber in the transport direction are located at a position equal to or less than ½ of the transport direction dimension of the glass substrate to be transported are based on the midpoint between the transport units The glass substrate transfer device according to claim 7 or 8. A transport start unit on which the glass substrate is placed via a breathable packing cushioning material, a moving unit in which the glass substrate is moved together with the packing cushioning material, and a transport end unit to stop the transported glass substrate; A glass substrate transport device comprising:
The said conveyance start part and the said conveyance completion part are the conveyance units in any one of Claims 1-6, Comprising: The said moving part is the conveyor which does not have the said vacuum chamber and the said vacuum generation source. A glass substrate transfer device. A glass substrate carrying method for carrying the glass substrate by driving the endless belt by placing the glass substrate on the endless belt through a breathable packing cushioning material,
The glass, wherein the packing cushioning material, the glass substrate, and the endless belt are brought into close contact with each other by sucking the glass substrate through the packing cushioning material from a suction hole formed in the endless belt. Substrate transport method.

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