200841935 九、發明說明： 【發明所屬之技術領域】 本發明係有關基板材用輸送帶。即，係有關於電路基 板之製程中所使用，且爲基板材的表面處理裝置的輸送帶。 【先前技術】 《技術背景》 電子機器所使用之電路基板，係小型且輕量化、極薄 化 '可撓性化，且多層化、半導體封裝化等之進展急速， 又，所形成的電子電路亦明顯細微化、高密度化。 再者，此種電路基板之製程中，係使用表面處理裝置， 且基板材係以藥液或洗淨液等之處理液來進行表面處理。 《習知技術》 此種表面處理裝置中，基板材係邊以輸送帶之上下滾 子而水平搬送，邊由噴嘴噴射處理液，而依次施行表面處 理，形成電子電路而製造電路基板。 又，習知係將輸送帶及噴嘴配設在大氣中、空氣中， 且基板材係以在大氣中、空氣中經噴射之處理液而進行表 面處理，惟，伴隨近來的極薄化發展，基板並無法承受處 理液之噴射壓及處理液之重量，經常發生撓曲、捲曲、掉 落之事故。 因此，爲對應前述情事，係藉由表面處理裝置，即， 此表面處理裝置係將輸送帶及噴嘴配設於充滿處理液之藥 液槽中，以於液體中邊搬送極薄且強度較弱之基板材，邊 藉由在液體中經噴射處理過之處理液來進行表面處理，而 冀求解決發生前述事故之問題。 200841935 《習知技術文獻資料》 此種表面處理裝置，可例舉如下之專利文獻： 揭示者。專利文獻1係有關於空氣中進行噴射方 利文獻2係有關於液體中進行噴射方式者。 【專利文獻1】日本專利特開2002-68435號< 【專利文獻2】日本專利特開平1 0-079565號 《有關側面搬送方式之輸送帶》 本案發明人進而硏究有關於液體中進行噴射 面處理裝置，並於平成1 8年（2006年）9月28日 2006-264 1 89號之專利申請。此專利申請案中，有 輸送帶，其要旨係在於將不碰觸基材板之電路形 由上下挾住兩側端面而加以運送，且進行側端面 之滾子，配設於液體中。 亦即，習知之此種輸送帶中，由上下挾住基 個表面而加以運送的滾子係配設於液體中，因此 電路形成面上易產生擦傷、傷痕、損傷等破壞， 度及成品率發生問題，但前述專利申請案可解決 (本發明係改良此一專利申請案之發明）。 【發明內容】 【發明欲解決之課題】 然而，有關此種在液體中進行噴射方式，且 搬送方式的表面處理裝置用輸送帶，近來有以下 即，所搬送之基板材會搖晃且蛇行，導致搬送精® 而對基板材之穩定搬送造成影響。 有關前述情事，進一步詳述。此種輸送帶中 【、2中所 式者，專 >報 公報 方式的表 提出特願 關前述之 成面而僅 搬送方式 板材之整 基板材之 使得可靠 如此問題 爲側端面 之課題。 丨度降低， ，持續極 200841935 薄化而強度較弱的基板材，係僅有撓曲裕度、抓取裕度只 爲1 0mm程度之寬度的狹窄兩側端面，是挾於左右的上下 滾子之間並在液體中加以搬送，且在液體中噴射處理液。 因此，基板材受到處理液之噴射壓及重量的影響，易上下 搖晃、起伏、撓曲、鬆脫，而有產生掉落等搬送問題之疑 慮。 進而，基板材在液體中之搬送會達數公尺至數十公 尺，欲均質地（譬如讓因滾子而形成的挾持壓力一律均等） φ 組裝跨基板材全長而設置之樹脂製的輸送帶，並非易事。 因此，除前述之噴射壓等所造成的影響，此種輸送帶本身 的問題亦會造成影響，讓基板材在搬送途中易左右偏離而 產生蛇行，故由此面觀之，亦有產生掉落等搬送問題之疑 慮。 再者，亦有人認爲因前述搬送問題而導致基板材之表 面處理精確度降低。 《有關本發明》 血 本發明之基板材用輸送帶，係有鑑於上述實情而欲解 響 決前述習知例之課題，經發明人銳意硏究所完成者。 又，本發明之目的係提出一種基板材用輸送帶，該輸 送帶第一係可防止基板材之搖晃及蛇行，再者第二’前述 情事可在不對基板材造成破壞的情形下實現。 【用以解決課題之手段】 《有關申請專利範圍》 解決前述課題之本發明之技術手段，係如下所述。首 先，申請專利範圍第1項係如下所示。 200841935 申請專利範圍第1項之基板材用輸送帶，其係使用於 基板材之表面處理裝置。此表面處理裝置包含有裝滿處理 液之藥液槽、於該藥液槽內在液體中搬送基板材之前述輸 送帶、及於該藥液槽內在液體中對基板材噴射處理液之噴 嘴。 前述輸送帶中，不碰觸基板材之電路形成面，且由上 下僅挾住基板材之左右兩側端面而加以運送的滾子，係列 設於搬送方向上。又，前述滾子之特徵在於組合採用朝向 Φ 搬送方向之直進式滾子，與相對於搬送方向而略朝向外側 之傾斜式滾子。 有關申請專利範圍第2項，係如下述。申請專利範圍 第2項之基板材用輸送帶，係於申請專利範圍第1項中， 前述直進式滾子係將基板材朝搬送方向運送，又，前述傾 斜式滾子，係相對於搬送方向而略朝向傾斜外側，邊拉展 基板材邊運送基板材。因此特徵在於基板材係在拉展開之 狀態下，於搬送方向上水平搬送。 φ 有關申請專利範圍第3項，係如下述。申請專利範圍 第3項之基板材用輸送帶，係於申請專利範圍第2項中， 特徵在於前述直進式滾子與傾斜式滾子之組合，係可爲於 上下之組合方式、於左右之組合方式、該等組合方式之倂 用方式，抑或於搬送方向上之單數個或複數個設置的交互 混合方式。 《有關作用等》 因本發明係由前述之手段構成，故如下所述。 (1)此表面處理裝置係使用於電路基板之製程中，對基 200841935 板材施予表面處理。 (2) 且處理液之藥液槽中，配設有輸送帶及噴嘴。 (3) 前述輸送帶中，左右的上下滾子係挾住基板材之左 右兩側端面進行運送。 (4) 作爲上下滾子，係採用直進式滾子及傾斜式滾子。 (5) 因此基板材在左右的寬度方向上受到張力，於拉緊 的狀態下邊維持在水平姿勢，邊於搬送方向上加以搬送。 (6) 無論基板材係極薄化而強度較弱，且於液體中搬 φ 送、液體中進行噴射時，僅挾住兩側端面加以運送，仍可 防止產生搖晃及蛇行現象。 (7) 再者，爲阻止產生前述搖晃及蛇行，直進式滾子及 傾斜式滾子之組合方式，可自由地適宜選擇。 (8) 故，本發明之基板材用輸送帶，可發揮如下之功效。 【發明之功效】 《第1功效》 第一，可防止基板材之搖晃及蛇行，故可提高搬送精 0 確度，並實現穩定搬送。 即，本發明之基板材用輸送帶，藉由組合採用直進式 滾子與傾斜式滾子，可讓極薄化且強度較弱的基板材，無 論是在液體中搬送、液體中進行噴射、側端面搬送時，可 防止基板材之搖晃、起伏、撓曲、鬆脫等，亦可防止基板 材偏移、蛇行，故，可避免基板材掉落等搬送問題的發生。 由該等面觀之，相較於前述習知例，基板材之表面處 理精確度更進一步提高。 《第2功效》 -10- 200841935 第二，且此種穩定搬送之實現，係可在不對基板材造 成損傷之下實現。 即，本發明之基板材用輸送帶，係藉由組合採用直進 式滾子與傾斜式滾子，而實現前述第一功效。亦即，因實 現穩定搬送，故無接觸到基板材之電路形成面的風險，與 電路形成面係無碰觸，不會給予擦傷、傷痕、損傷等破壞， 因而可靠度及成品良率亦優異。 如此，習知例所存有之問題可全獲得解決等，本發明 Φ 可發揮之功效係爲顯著。 【實施方式】 《有關圖式》 以下，依用以實施圖面所示之發明的較佳形態，詳細 說明本發明之基板材用輸送帶。 第1圖、第2圖、第3圖係供以用於說明實施本發明 之較佳形態。且第1圖之（1)圖係正剖視圖，（2)圖係左側滾 子之俯視說明圖，（3)圖係右側滾子之平面說明圖。 ^ 第2圖係滾子之組合方式的俯視說明圖，（1)圖係顯示 其一例之重要部分，（2)圖係顯示其他例之重要部分。第3 圖係側剖視說明圖。 《有關電路基板》 本發明之表面處理裝置1，係使用於電子電路用之電 路基板的製程中。因此，首先說明電路基板。 用於電子機器之印刷配線基板等之電子電路基板，係 小型且輕量化、極薄化，並且細微電路化、高密度電路化、 多層化等之進展顯著。有關其軟硬度，相較於習知之剛性 -11- 200841935 基板等的硬性基板，可撓性基板及其他極薄且柔軟的軟性 基板之進展、增加係爲顯著，且半導體零件與電路一體地 組裝埋入之半導體封裝基板之普及，亦爲急速。 因此’近來對於電路基板之要求度，其板厚爲100/zm 〜25/zm左右，電路厚Η爲10/zm左右，電路寬度L及電 路間間隔S爲至30/zm〜20/zm左右，持續極薄化、細微 化。 電路基板係如上所述。 《有關表面處理裝置1》 表面處理裝置1係用於如前述之電路基板的製程中， 並以處理液B對基板材A進行表面處理。有關表面處理裝 置1，參照第1圖、第3圖更詳細敘述。 表面處理裝置1中，在其處理室2內，對輸送帶3所 搬送之基板材A，由噴嘴4噴射譬如顯像液、蝕刻液、剝 離液、或洗淨液等之處理液B，以對基板材A施予藥液處 理及洗淨處理等，而進行表面處理。 且表面處理裝置1於其處理室2內，設有藥液槽5、輸 送帶3、噴嘴4、及儲存槽6等。首先，藥液槽5係充滿處 理液B。即，藥液槽5在處理室2之上部，係使用兼用作 爲輸送帶框體的框體區隔壁7而形成，且塡滿與噴嘴4噴 射出的處理液B相同的處理液B。 輸送帶3係配設於藥液槽5之處理液B內，且於液體 中將基板材A朝搬送方向C搬送，包含有多數滾子8，9。 噴嘴4係多數配設於藥液槽5之處理液B內，且於液體中 對所搬送之基板材A的電路形成面D，噴射處理液B。 -12- 200841935 處理液B係由處理室2下部之儲存槽6’經泵10及配 管11而加壓送至各噴嘴4，並噴射於基板材A上。且’由 基板材A反射濺回之處理液B，被吸收回藥液槽5內的處 理液B中，由該結果，溢出於藥液槽5之處理液B，係回 收至儲存槽6並加以儲藏，且之後再次循環使用。 又，第.3圖中所示之噴嘴4，係朝向基板材A之正反 兩面而對向配設，惟，基板材A之電路形成面D爲僅有一 面的單面基板之情形時，亦可考慮僅朝向此單一面而對向 φ 配設。 表面處理裝置1係如上所述。 《有關輸送帶3之槪要》 以下，參照第1圖、第2圖說明前述表面處理裝置1 之輸送帶3。輸送帶3中，與基板材A之電路形成面D無 碰觸而由上下僅挾住基板材A之左右兩側端面E加以運送 之多數滾子8，9，在藥液槽5內係沿搬送方向C而加以列設。 基板材A係由中央部較廣之電路形成面D，及其外周 0 緣較窄之前後端面與左右兩側端面E所構成，前後端面與 兩側端面E，係由寬度1 0mm左右構成，係稱爲耳部而爲非 電路形成面。 再者，上側之滾子8與下側之滾子9，係將基板材A 之左右兩側端面E作爲挾住裕度、抓住裕度由上下挾住搬 運而上下成對，且左右列設於搬送方向C上。滾子8，9係 由旋轉驅動之驅動滾子組成，且經由軸1 2 1，1 2 2、傳動齒輪 13、驅動齒輪14、驅動軸15等，而與電動機等之驅動機構 (未予圖示）連接。 -13- 200841935 輸送帶3之槪略係如上所述。 《有關直進式滾子R1及傾斜式滾子R2》 說明第1圖、第2圖所示之直進式滾子R1及傾斜式滾 子R2。此輸送帶3中，作爲左右之上下滾子8,9，係組合 直進式滾子1 R及傾斜式滾子R2而加以採用。 直進式滾子R1係朝搬送方向直進式旋轉，將基板材A 朝搬送方向C直線地運送。傾斜式滾子R2係相對於搬送方 向C而略朝向外側旋轉，讓基板材A相對於搬送方向C略 φ 朝向傾斜外側，邊拉展而邊於搬送方向C上運送。因此， 基板材A係在受到拉展之狀態下，在搬送方向C上水平地 搬送。 更詳細敘述前述動作。直進式滾子R1係其軸12:位在 水平面，且如第1圖的（2,)圖、（3)圖等所示，正確地朝向左 右寬度方向F。因此直進式滾子R1與此類習知例之一般的 滾子相同地，係朝左右寬度方向F與直角的前後方向，即 搬送方向C旋轉。 φ 相較於此，傾斜式滾子R2係其軸1 22位在水平面，且 如第1圖的（2)圖所示，左側之軸122係由左右寬度方向F 僅以若干角度而偏於外側，又，如第1圖的（3)圖所示，左 側的軸1 22係由左右寬度方向F僅以若干角度而偏於外 側。因此傾斜式滾子R2係相對於搬送方向C，略朝左右外 側僅偏離若千角度，此與習知例之一般的滾子不同，係由 搬送方向C略朝向外側旋轉。 又，傾斜式滾子R2亦可合倂使用兩種類的角度者、或 進而複數的角度者。 •14- 200841935 直進式滾子R1及傾斜式滾子R2係如前述。 《有關各種組合方式》 又，此輸送帶3係組合採用如前述之直進式滾子R1與 傾斜式滾子R2，以作爲左右的上下滾子8,9，惟此組合方 式有各種可能。 即，直進式滾子R1與傾斜式滾子R2的組合，可係將 其中任一者作爲上滾子8或下滾子9，又，亦可將其中任 一者作爲右側或左側，藉由該等組合而可考慮各種方式。 • 進而，有關上下滾子8,9,亦可爲於搬送方向C上的單數及 複數設置之相互混合方式。 有關前述組合方式，將進一步詳述。首先，第2圖之 (1)圖所示的方式中，左側所有的上滾子8係使用傾斜式滾 子R2，且左側所有的下滾子9係使用直進式滾子R1。右側 的上下滾子8,9均使用直進式滾子R1。當然亦可爲讓其左 右相反之方式，及讓其上下相反的方式。 其次，第1圖的（1)圖及第2圖的（2)圖所示的方式中， φ 左右的上滾子8係使用傾斜式滾子R2，且左右的下滾子9 係使用直進式R1。當然，亦可爲讓其上下相反的方式。 即，以（a)上滾子8爲傾斜式滾子R2而下滾子9爲直 進式滾子R1之組合，反之，（b)上滾子8爲直進式滾子R1 而下滾子9爲傾斜式滾子R2的組合，又，（c)上下滾子8,9 均爲傾斜式滾子R2之組合，反之，（d)上下滾子8,9均爲直 進式滾子R 1之組合等爲基礎，藉由讓右側與左側分別逐步 適用該等（a)、（b)、（c)、（d)之組合，而考慮各種方式。 相對於此，有關上下滾子8,9，藉由以使其各自沿搬送 -15- 200841935 方向c譬如每隔一個、每隔二個、每隔三個而使直進式滾 子R 1與傾斜式滾子R2交互組合爲基礎，使其組合適用於 右側與左側則各種方式爲可能。 又，此種組合方式，可爲規則性統一之類型，亦可不 依循此而爲不規則性之分散類型，可自由選擇。 如此，可考慮各種組合方式。 《作用等》 本發明之基板材A的表面處理裝置1用輸送帶3，如 φ 前述說明般構成。故，有如下的作用。 (1) 此表面處理裝置1係使用於電子電路基板之製程 中，並以處理液B對基板材A進行表面處理。即，使用於 可撓性基板、其他極薄且強度較弱之軟性基板的製程中， 邊搬送基板材A，邊由噴嘴4噴射處理液B，進行表面處理 而形成電子電路。 (2) 且充滿處理液B之藥液槽5中，配設有輸送帶3及 噴嘴4。 I 因此，由噴嘴4於液體中噴射出之處理液B，係直接 進入藥液槽5之處理液B後，直接噴射至藉由輸送帶3而 在液體中搬送的基板材A的電路形成面D上，並進行表面 處理。其後，因處理液B反射而被吸收至藥液槽5的處理 液B中，故，亦不會在電路形成面D上形成亂流，及液體 滯留於電路形成面D上的情形。 (3) 又，其輸送帶3中，左右的上下滾子8,9，係僅挾 住基板材A的非電路形成面，即左右兩側端面E而加以運 送。因此，基板材A之電路形成面D亦不會因搬送中的接 -16- 200841935 觸而產生擦傷、傷痕、損傷。 (4) 其輸送帶3中，作爲左右之上下滾子8,9，係組合 採用朝向搬送方向C之直進式滾子R1，及由搬送方向c略 朝向傾斜外側的傾斜式滾子R2。 (5) 故’基板材A係藉由傾斜式滾子R2而朝左右的寬 度方向F給予張力，並一邊利用處理液B的浮力，一邊在 帶有張力而拉緊的狀態下，維持於水平姿勢。即，基板材 A係在至少左右任一邊爲傾斜式滾子R2，另一邊爲直進式 滾子1或傾斜式滾子R2之間，往左右拉緊。 如此，持續地維持於水平姿勢的基板材A，藉由直進 式滾子R1與傾斜式滾子R2，朝前後的搬送方向C加以搬 送。 (6) 無論基板材A係極薄化進展而強度較弱，且於液 體中進行搬送、於液體中進行噴射，同時藉由挾住狹窄的 挾持裕度、抓取裕度的兩側端面E而運送之時，都可防止 搖晃及蛇行。 基板材A係在拉緊的狀態下維持於水平姿勢而直接加 以搬送，可確實阻止因處理液B的噴射壓及重量而上下搖 動，抑或因輸送帶於組裝上的問題，而在左右寬度方向F 上蛇行。 (7) 再者，爲阻止此種搖晃及蛇行，直進式滾子R1及 傾斜式滾子R2的組合方式，可自由且適宜地選擇及採用。200841935 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a conveyor belt for a base material. That is, there is a conveyor belt for a surface treatment apparatus used in a process of a circuit board and which is a base material. [Prior Art] "Technical Background" The circuit board used in an electronic device is small, lightweight, and extremely thin, and is flexible, and the progress of multilayering and semiconductor packaging is rapidly progressing. It is also significantly finer and more dense. Further, in the process of the circuit board, a surface treatment apparatus is used, and the base material is surface-treated by a treatment liquid such as a chemical liquid or a cleaning liquid. In the surface treatment apparatus, the base material is conveyed horizontally by the lower roller on the conveyor belt, and the treatment liquid is sprayed from the nozzle, and the surface treatment is sequentially performed to form an electronic circuit to manufacture a circuit board. Further, it is conventionally known that the conveyor belt and the nozzle are disposed in the atmosphere and in the air, and the base material is surface-treated by the treatment liquid sprayed in the air or in the air, but with the recent development of extremely thinner, The substrate cannot withstand the injection pressure of the treatment liquid and the weight of the treatment liquid, and often causes an accident of deflection, curling, and falling. Therefore, in order to cope with the foregoing, the surface treatment device, that is, the surface treatment device, is configured to dispose the conveyor belt and the nozzle in the chemical liquid tank filled with the treatment liquid, so that the liquid is extremely thin and weak in the middle of the liquid. The base material is surface-treated by the treatment liquid sprayed in the liquid, and the problem of the aforementioned accident is solved. 200841935 "Practical Technical Literature" Such a surface treatment apparatus can be exemplified by the following patent documents: Rev. Patent Document 1 relates to the method of injecting air into the air. [Patent Document 1] Japanese Patent Laid-Open Publication No. 2002-68435 < Patent Document 2: Japanese Patent Laid-Open Publication No. Hei No. Hei No. 0-079565 Surface treatment device, and patent application of Heicheng 18 (2006) September 28, 2006-264 1 89. In this patent application, there is a conveyor belt in which a circuit shape that does not touch a substrate sheet is transported by gripping both end faces up and down, and a roller having a side end face is disposed in a liquid. In other words, in the conventional conveyor belt, the roller that is transported by the upper and lower surfaces is disposed in the liquid, so that the surface of the circuit is easily damaged by scratches, scratches, damage, etc., degree and yield. A problem has occurred, but the aforementioned patent application can be solved (the invention is an invention of the modified patent application). [Problems to be Solved by the Invention] However, in the case of such a conveyor belt for a surface treatment apparatus that performs the injection method in a liquid and the transportation method, the substrate to be conveyed is shaken and snaked, resulting in a recent occurrence. The transfer of Fine® affects the stable transport of the base sheet. Further details are provided in relation to the foregoing. In the case of the type of the belt, the type of the method is the one that is intended to close the surface of the sheet, and only the entire sheet of the sheet material is conveyed so that the problem is the side end surface. The degree of twist is reduced, and the base plate of the thinner and weaker strength of 200841935 is only the narrow side faces of the width of the deflection margin and the grab margin of only 10 mm, which is the upper and lower roll of the left and right sides. The sub-substrates are transported in a liquid, and the treatment liquid is sprayed in the liquid. Therefore, the base material is affected by the spray pressure and weight of the treatment liquid, and is easily shaken, undulated, flexed, and loosened, and there is a concern that the conveyance problem such as dropping occurs. Furthermore, the transfer of the base material in the liquid can be several meters to several tens of meters, and it is intended to be homogeneous (for example, the holding pressure due to the roller is uniform) φ The resin is transported across the entire length of the base plate. Belt is not an easy task. Therefore, in addition to the effects of the aforementioned injection pressure, etc., the problem of the conveyor belt itself may also be affected, so that the base plate is easily deflected to the left and right during the transportation to cause a meandering, so that there is also a drop in appearance. Do not worry about moving the problem. Furthermore, it has also been suggested that the surface treatment accuracy of the base sheet is lowered due to the aforementioned transport problem. According to the present invention, the conveyor belt for a base material of the present invention is intended to solve the problems of the above-described conventional examples in view of the above-mentioned circumstances, and has been completed by the inventors. Further, the object of the present invention is to provide a conveyor belt for a base material which can prevent the base sheet from being shaken and meandered, and the second case can be achieved without causing damage to the base sheet. [Means for Solving the Problem] "Scope of Application for Patent Application" The technical means of the present invention for solving the above problems are as follows. First, the first item of the patent application scope is as follows. 200841935 A conveyor belt for a base material according to item 1 of the patent application, which is used for a surface treatment device for a base plate. The surface treatment apparatus includes a chemical liquid tank filled with the treatment liquid, the conveyor belt that transports the base material in the liquid in the liquid medicine tank, and a nozzle that sprays the treatment liquid on the base material in the liquid in the liquid medicine tank. . In the above-mentioned conveyor belt, the rollers which are not in contact with the circuit forming surface of the base material and which are transported only by the upper and lower end faces of the base plate are placed in the conveying direction. Further, the roller is characterized in that a straight type roller that faces the Φ conveying direction and an inclined roller that faces slightly outward with respect to the conveying direction are used in combination. The second item of the scope of application for patents is as follows. The conveyor belt for a base material according to item 2 of the patent application is in the first item of the patent application scope, wherein the straight-through roller conveys the base plate in a conveying direction, and the inclined roller is in a direction relative to the conveying direction. Slightly facing the outer side of the slant, the base sheet is conveyed while the base sheet is stretched. Therefore, it is characterized in that the base sheet is conveyed horizontally in the conveyance direction in the state of being pulled out. φ The third item of the patent application scope is as follows. The conveyor belt for base plate according to item 3 of the patent application is in the second item of the patent application, characterized by the combination of the above-mentioned straight-through roller and the inclined roller, which can be combined in the upper and lower directions. The combination method, the combination method of the combination methods, or the interactive combination of a single number or a plurality of settings in the transport direction. <<Related Functions and the like>> Since the present invention is constituted by the above-described means, it is as follows. (1) This surface treatment apparatus is used in the process of circuit board, and the surface of the base 200841935 is subjected to surface treatment. (2) A conveyor belt and a nozzle are disposed in the chemical tank of the treatment liquid. (3) In the above conveyor belt, the left and right upper and lower rollers are transported by the left and right end faces of the base plate. (4) As the upper and lower rollers, straight-in rollers and inclined rollers are used. (5) Therefore, the base material is subjected to tension in the width direction of the left and right, and is maintained in a horizontal posture in a tensioned state, and is conveyed in the conveyance direction. (6) No matter how thin the base plate is, the strength is weak, and when it is sprayed in the liquid or sprayed in the liquid, it can be prevented from being shaken and meandered by only holding the end faces on both sides. (7) Further, in order to prevent the occurrence of the aforementioned shaking and meandering, the combination of the straight-through roller and the inclined roller can be freely selected as appropriate. (8) Therefore, the conveyor belt for a base material of the present invention can exert the following effects. [Effects of the Invention] "First Effect" First, it can prevent the shaking and serpentine of the base material, so that the accuracy of the conveyance can be improved and stable transportation can be realized. That is, the base material belt of the present invention can be made to be extremely thin and weak in strength by using a combination of a straight-through roller and a tilting roller, whether it is conveyed in a liquid or sprayed in a liquid. When the side end face is conveyed, the base plate can be prevented from being shaken, undulated, flexed, loosened, etc., and the base plate can be prevented from being displaced and meandered, so that the problem of conveyance such as falling of the base plate can be avoided. From the above, the surface treatment accuracy of the base material is further improved as compared with the prior art. "Second effect" -10- 200841935 Second, and the realization of such stable transfer can be achieved without causing damage to the base material. That is, the conveyor belt for a base material of the present invention achieves the aforementioned first effect by using a combination of a straight-through roller and a tilting roller. In other words, since stable transfer is achieved, there is no risk of contact with the circuit forming surface of the base plate, and there is no contact with the circuit forming surface, and scratches, scratches, damage, and the like are not caused, so reliability and product yield are excellent. . Thus, the problems existing in the conventional examples can be all solved, and the effects of the present invention Φ can be remarkable. [Embodiment] Hereinafter, a conveyor belt for a base material according to the present invention will be described in detail based on a preferred embodiment of the invention shown in the drawings. 1 , 2, and 3 are diagrams for explaining preferred embodiments of the present invention. Fig. 1 (1) is a front cross-sectional view, (2) a plan view of the left side roller, and (3) a plan view of the right side roller. ^ Fig. 2 is a plan view of the combination of the rollers, (1) the figure shows an important part of the example, and (2) the figure shows the important part of the other examples. Fig. 3 is a side cross-sectional explanatory view. <<Circuit Substrate>> The surface treatment apparatus 1 of the present invention is used in the process of a circuit board for an electronic circuit. Therefore, the circuit board will first be described. The electronic circuit board used for a printed wiring board of an electronic device is small, lightweight, and extremely thin, and has been progressing in fine circuit, high-density circuit, and multilayer. Regarding the hardness and hardness of the rigid substrate such as the rigid -11-200841935 substrate, the progress and increase of the flexible substrate and other extremely thin and flexible flexible substrates are remarkable, and the semiconductor component and the circuit are integrated. The popularity of assembling embedded semiconductor package substrates is also rapid. Therefore, the recent requirements for the circuit board have a plate thickness of about 100/zm to 25/zm, a circuit thickness of about 10/zm, and a circuit width L and an inter-circuit spacing S of about 30/zm to 20/zm. It continues to be extremely thin and subtle. The circuit board is as described above. <<Surface Treatment Apparatus 1>> The surface treatment apparatus 1 is used for the surface treatment of the base material A with the treatment liquid B in the process of the circuit board as described above. The surface treatment apparatus 1 will be described in more detail with reference to Figs. 1 and 3. In the surface treatment apparatus 1, in the processing chamber 2, the base material A conveyed by the conveyor belt 3 is sprayed with the processing liquid B such as a developing liquid, an etching liquid, a peeling liquid, or a cleaning liquid from the nozzle 4, The base material A is subjected to a chemical treatment, a washing treatment, or the like, and subjected to surface treatment. Further, the surface treatment apparatus 1 is provided with a chemical solution tank 5, a conveyor belt 3, a nozzle 4, a storage tank 6, and the like in the processing chamber 2. First, the chemical tank 5 is filled with the treatment liquid B. In other words, the chemical solution tank 5 is formed in the upper portion of the processing chamber 2 by using the casing partition wall 7 which serves as the casing frame of the conveyor belt, and is filled with the same treatment liquid B as the treatment liquid B sprayed from the nozzle 4. The conveyor belt 3 is disposed in the treatment liquid B of the chemical tank 5, and conveys the base material A in the liquid in the conveyance direction C, and includes a plurality of rollers 8, 9. Most of the nozzles 4 are disposed in the processing liquid B of the chemical solution tank 5, and the processing liquid B is sprayed on the circuit forming surface D of the substrate A to be transferred in the liquid. -12- 200841935 The treatment liquid B is pressurized and sent to the respective nozzles 4 by the pump 10 and the piping 11 from the storage tank 6' at the lower portion of the processing chamber 2, and is sprayed onto the base material A. And the treatment liquid B which is reflected back and splashed by the base material A is absorbed into the treatment liquid B in the chemical solution tank 5, and as a result, the treatment liquid B overflowing into the chemical liquid tank 5 is recovered into the storage tank 6 and It is stored and then recycled again. Further, the nozzle 4 shown in Fig. 3 is disposed opposite to the front and back surfaces of the base material A, but when the circuit forming surface D of the base material A is a single-sided substrate having only one surface, It is also conceivable to arrange the opposite φ only toward this single face. The surface treatment apparatus 1 is as described above. <<Simulation of Conveyor Belt 3>> Hereinafter, the conveyor belt 3 of the surface treatment apparatus 1 will be described with reference to Figs. 1 and 2 . In the conveyor belt 3, a plurality of rollers 8, 9 which are transported by the upper and lower end faces E of the base plate A, which are not only in contact with the circuit forming surface D of the base plate A, are transported in the liquid chemical tank 5 The transport direction C is listed. The base plate A is formed by a circuit D having a wide central portion, and a front end surface and a left and right end faces E which are narrower than the outer circumference 0. The front and rear end faces and the side end faces E are formed by a width of about 10 mm. It is called the ear and is a non-circuit forming surface. Further, the upper roller 8 and the lower roller 9 have the right and left end faces E of the base material A as the squat margin, and the catch margin is held up and down by the upper and lower sides, and the left and right columns are arranged. Set in the transport direction C. The rollers 8, 9 are composed of a drive roller that is rotationally driven, and are driven by a shaft, such as a shaft 1 2 1,1 2 2, a transmission gear 13, a drive gear 14, a drive shaft 15, and the like, and a drive mechanism (not shown) Show) connection. -13- 200841935 The strategy of conveyor belt 3 is as described above. <<For the straight-through roller R1 and the inclined roller R2>> The straight-through roller R1 and the inclined roller R2 shown in Figs. 1 and 2 will be described. In the conveyor belt 3, the left and right upper rollers 8, 9 are combined with the straight-through roller 1 R and the inclined roller R2. The straight-through roller R1 rotates straight in the conveying direction, and conveys the base material A linearly in the conveyance direction C. The inclined roller R2 is rotated slightly outward with respect to the conveyance direction C, and the base sheet A is conveyed in the conveyance direction C while being stretched outward with respect to the conveyance direction C. Therefore, the base sheet A is conveyed horizontally in the conveyance direction C while being stretched. The above operation will be described in more detail. The straight-through roller R1 has its axis 12: in the horizontal plane, and is correctly oriented in the left-right width direction F as shown in Fig. 1 (2), (3), and the like. Therefore, the straight-through roller R1 rotates in the front-rear direction of the right and left width direction F and the right-angle direction, that is, the conveyance direction C, in the same manner as the conventional roller of the conventional example. φ is compared to this, the inclined roller R2 has its axis 1 22 in the horizontal plane, and as shown in the (2) diagram of Fig. 1, the left axis 122 is biased by the angle from the left and right width directions F. On the outer side, as shown in the figure (3) of Fig. 1, the left shaft 1 22 is biased outward by only a few angles in the left-right width direction F. Therefore, the inclined roller R2 is slightly shifted from the left and right sides with respect to the conveyance direction C, and is slightly shifted from the outer side to the outer side, and is different from the conventional roller in that the conveyance direction C is slightly rotated outward. Further, the inclined roller R2 may be used in combination with two types of angles, or a plurality of angles. • 14- 200841935 Straight-in roller R1 and inclined roller R2 are as described above. <<Regarding various combinations>> Further, the conveyor belt 3 is a combination of the straight roller R1 and the inclined roller R2 as described above, and serves as the left and right upper and lower rollers 8, 9, but the combination has various possibilities. That is, the combination of the straight-through roller R1 and the inclined roller R2 may be any one of the upper roller 8 or the lower roller 9, or any one of them may be the right side or the left side. Various ways can be considered for such combinations. Further, the upper and lower rollers 8, 9 may be a mutual mixing method in which the singular and plural numbers in the conveying direction C are set. The foregoing combination will be further described in detail. First, in the mode shown in Fig. 2 (1), all the upper rollers 8 on the left side use the inclined roller R2, and all the lower rollers 9 on the left side use the straight-through roller R1. The upper and lower rollers 8, 9 on the right side use straight-through rollers R1. Of course, it can be done in the opposite way, and the way it is upside down. Next, in the modes shown in (1) of FIG. 1 and (2) of FIG. 2, the upper roller 8 of φ is the inclined roller R2, and the left and right lower rollers 9 are straight forward. Formula R1. Of course, it can also be used in the opposite way. That is, (a) the upper roller 8 is the inclined roller R2 and the lower roller 9 is the combination of the straight roller R1, whereas (b) the upper roller 8 is the straight roller R1 and the lower roller 9 For the combination of the inclined rollers R2, (c) the upper and lower rollers 8, 9 are all combinations of the inclined rollers R2, and conversely, (d) the upper and lower rollers 8, 9 are straight rollers R 1 Based on the combination and the like, various methods are considered by gradually applying the combination of the above (a), (b), (c), and (d) to the right side and the left side, respectively. On the other hand, the upper and lower rollers 8, 9 are made to have the straight-moving rollers R1 and the inclined by the respective directions of transporting -15-200841935, such as every other, every second, every third. Roller R2 interactive combination is based on the combination of the right side and the left side. Moreover, such a combination method may be a type of regularity uniformity, or may be a dispersion type of irregularity without being followed, and may be freely selected. As such, various combinations can be considered. <<Operation and the like>> The surface treatment apparatus 1 of the base material A of the present invention is constituted by the conveyor belt 3 as described above. Therefore, it has the following effects. (1) The surface treatment apparatus 1 is used in a process of an electronic circuit board, and the base material A is surface-treated with the treatment liquid B. In other words, in the process of using a flexible substrate or another flexible substrate having a very thin and weak strength, the substrate B is transferred while the processing liquid B is ejected from the nozzle 4, and surface treatment is performed to form an electronic circuit. (2) The transfer tank 3 and the nozzle 4 are disposed in the chemical solution tank 5 filled with the treatment liquid B. Therefore, the treatment liquid B ejected from the liquid by the nozzle 4 directly enters the treatment liquid B of the chemical solution tank 5, and is directly ejected to the circuit formation surface of the base material A conveyed by the conveyance belt 3 in the liquid. D, and surface treatment. Thereafter, the treatment liquid B is absorbed and absorbed into the treatment liquid B of the chemical solution tank 5, so that turbulent flow does not occur on the circuit formation surface D, and the liquid stays on the circuit formation surface D. (3) Further, in the conveyor belt 3, the left and right upper and lower rollers 8, 9 are transported only by the non-circuit forming faces of the base material A, that is, the left and right end faces E. Therefore, the circuit forming surface D of the base material A does not cause scratches, scratches, or damage due to contact with the conveyor during the transportation. (4) In the conveyor belt 3, as the right and left upper rollers 8, 9, a straight-type roller R1 that faces the conveyance direction C and an inclined roller R2 that is slightly inclined toward the outer side by the conveyance direction c are used. (5) Therefore, the base plate A is tensioned in the width direction F in the left and right directions by the inclined roller R2, and is maintained at a level while being tensioned by tension with the buoyancy of the treatment liquid B. posture. That is, the base material sheet A is an inclined roller R2 on at least one of the left and right sides, and the other side is a straight roller 1 or a tilted roller R2, and is pulled to the left and right. In this manner, the base material sheet A which is continuously maintained in the horizontal posture is conveyed toward the front and rear conveyance directions C by the straight-through roller R1 and the inclined roller R2. (6) Regardless of the progress of the base plate A, the strength of the base plate A is extremely thin, and it is transported in the liquid, and is ejected in the liquid, while at the same time, the end faces E of both sides are gripped by the narrow holding margin and the gripping margin. When transporting, it can prevent shaking and snakes. The base sheet A is directly conveyed while being held in a horizontal posture in a tensioned state, and can be surely prevented from being shaken up and down by the injection pressure and weight of the treatment liquid B, or in the left and right width directions due to the problem of assembly of the conveyor belt. Snake on F. (7) Further, in order to prevent such shaking and meandering, the combination of the straight-through roller R1 and the inclined roller R2 can be freely and appropriately selected and used.
譬如，基板材A的搬送可達數公尺至數十公尺，不易 跨其全長而均質地組裝輸送帶3，因此基板材A多會在中 途往左右而產生蛇行。此時，爲矯正蛇行情況，基板材A -17- 200841935 譬如在易偏向右側時，可在左側採用傾斜式滾子R2等，& 狀況而由眾多的組合方式中，選擇採用適切的組合方式。 (8)又，可不依前述組合，僅採用傾斜式滾子R2作爲 上下滾子8,9，故，藉由讓基板材A朝向搬送方向c進行 搬送，並且相對於搬送方向C而略朝向傾斜外側拉緊，基 板材A可在拉緊的狀態下，於搬送方向C上進行水平搬送。 【圖式簡單說明】 第1圖係提供說明有關本發明之基板材用輸送帶，用 φ 以實施發明的較佳形態，（1)圖係正剖視圖，（2)圖係左側滾 子的俯視說明圖，（3)圖係右側滾子的俯視說明圖。 第2圖係提供說明用以實施同一發明的較佳形態，且 係滾子之組合方式的俯視說明圖，（1)圖係顯示其一例之重 要部分，（2)圖係顯示其他例的重要部分。 第3圖係提供說明用以實施同一發明的較佳形態’且 係側剖視說明圖。 【主要元件符號說明】 φ 1 表面處理裝置 2 處理室 3 輸送帶 4 噴嘴 5 藥液槽 6 儲存槽 7 框體區隔壁 8 滾子（上） 9 滾子（下） -18-For example, the transfer of the base sheet A can be several meters to several tens of meters, and it is difficult to uniformly assemble the conveyor belt 3 across its entire length, so that the base sheet A is likely to be meandering in the middle to the left and right. At this time, in order to correct the snake condition, the base plate A -17- 200841935, for example, when it is easy to be biased to the right side, the inclined roller R2 can be used on the left side, and the condition can be selected by a combination of a plurality of combinations. . (8) Further, the inclined roller R2 can be used as the upper and lower rollers 8, 9 instead of the above-described combination, so that the base material A is conveyed toward the conveyance direction c, and is slightly inclined with respect to the conveyance direction C. When the outer side is tensioned, the base material sheet A can be horizontally conveyed in the conveying direction C while being tensioned. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a preferred embodiment of a conveyor belt for a base material according to the present invention, wherein φ is used to carry out the invention, (1) a front sectional view of the drawing, and (2) a plan view of the left side roller. Explanatory diagram, (3) A plan view of the right side roller. Fig. 2 is a plan view showing a preferred embodiment of the same invention, and a combination of rollers, (1) showing an important part of an example, and (2) showing the importance of other examples. section. Fig. 3 is a cross-sectional explanatory view showing a preferred embodiment for carrying out the same invention. [Description of main component symbols] φ 1 Surface treatment equipment 2 Processing chamber 3 Conveyor belt 4 Nozzle 5 Chemical tank 6 Storage tank 7 Partition wall 8 Roller (top) 9 Roller (bottom) -18-
200841935 10 11 12ι 122 13 14 15 A200841935 10 11 12ι 122 13 14 15 A
C D E F R1 R2 泵 配管 軸 軸 傳動齒輪 驅動齒輪 驅動軸 基板材 處理液 搬送方向 電路形成面 兩側端面 寬度方向 直進式滾子 傾斜式滾子 -19C D E F R1 R2 Pump Piping Shaft Shaft Drive Gear Drive Gear Drive Shaft Base Plate Processing Fluid Transfer Direction Circuit Forming Surface Both Sides Width Direction Straight-Roller Roller Tilt Roller -19