JP2008137733A - Conveyor for surface treating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To propose a conveyor for a surface treating device preventing mixing of a treating solution first by inclining a substrate material to allow the sticking treating solution to flow down in a space between surface treating devices, and preventing mixing of the treating solution secondly by absorbing and eliminating the sticking treating solution. <P>SOLUTION: This surface treating device 1 has a solution tank 5 for the treating solution B; a conveyor 3 for conveying the substrate material A in the solution in the solution tank 5; and a spray nozzle 4 injecting the treating solution B in the solution in the solution tank 5. The conveyor 3 comprises holding rollers 9 feeding the substrate material A while holding both side end faces thereof. The conveyor 3 in the space D between the surface treating devices 1 comprises holding rollers 9' for forming projecting shape, and the substrate material A is conveyed inclining upward and downward. The holding roller 9' has a solution absorbing property, and an air nozzle is disposed between the holding rollers 9'. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a conveyor of a surface treatment apparatus. That is, the present invention relates to a conveyor of a surface treatment apparatus that is used in a substrate manufacturing process and surface-treats a substrate material with a treatment liquid.

《Technical background》
Circuit boards used in electronic devices are remarkably progressing in miniaturization, weight reduction, ultrathinning, and flexibility, and circuits to be formed are remarkably miniaturized and densified.
In such a substrate manufacturing process, a surface treatment apparatus is used, and the substrate material is surface-treated with a treatment liquid such as a chemical liquid or a cleaning liquid.

<Conventional technology>
In this type of surface processing apparatus, the substrate material is transported through the processing chamber by the upper and lower transport rollers made of a straight roller or a wheel of the conveyor, while the processing liquid is sprayed from the spray nozzle, and the surface treatment is sequentially performed. A circuit is formed and a substrate is manufactured.
In many cases, conveyors and spray nozzles are disposed in the atmosphere and in the air, and the substrate material is surface-treated with a processing liquid sprayed in the atmosphere and in the air.
On the other hand, a surface treatment apparatus in which a conveyor and a spray nozzle are arranged in the treatment liquid has been developed. In other words, a surface treatment device has also appeared, in which a conveyor or spray nozzle is disposed in a liquid tank filled with a treatment liquid, and thus a surface treatment is performed on a very thin and flexible substrate material with a treatment liquid sprayed in the liquid. ing.

《Information on prior art documents》
Examples of such a surface treatment apparatus include those shown in the following Patent Documents 1 and 2. Patent Document 1 relates to an aerial injection method, and Patent Document 2 relates to a liquid injection method.

JP 2002-68435 A Japanese Patent Application Laid-Open No. 10-079565

<< About Japanese Patent Application No. 2006-264189 >>
The inventor and the applicant have further advanced research and development on a submerged jet surface treatment apparatus, and filed a patent application on September 28, 2006 for Japanese Patent Application No. 2006-264189.
The gist of this patent application is that, for the conveyor of the surface treatment apparatus, a pinching roller that feeds the both end surfaces without contact with the circuit forming surface of the substrate material is adopted as the conveying roller.
And, regarding the ultra-thin and flexible substrate material, the turbulent flow, liquid accumulation, and the bending accident due to its pressure and weight, which were pointed out about the air injection method, are resolved, and further, the liquid injection method The excellent effect of preventing damage of the circuit forming surface that has been pointed out is expected (the present invention is an improved invention of this patent application).

By the way, the following point was made into the subject about such a prior art example. That is, it is an important theme to prevent the processing liquid adhering to the conveyed substrate material from being mixed between the processing chambers of such a surface processing apparatus.
In particular, the processing liquid sprayed in the processing chamber of the surface processing apparatus in the previous process and adhered to the substrate material is taken out and moved, so that it is not brought into the processing chamber of the surface processing apparatus in the next process, It is an important theme.
In particular, in the surface treatment apparatus of the submerged injection method, the substrate material is surface-treated with the treatment liquid while being conveyed in the liquid, so the degree of adhesion of the treatment liquid to the substrate material is high, and the substrate material is It is completely wetted with the processing solution. Moreover, in Japanese Patent Application No. 2006-264189, a pinching roller that feeds only the both end surfaces of the substrate material is adopted as a transport roller, and the processing liquid tends to adhere and remain on the circuit forming surface in the center. For these reasons, the above-mentioned theme has been particularly emphasized.
When such processing liquid is taken out, moved, brought in, or mixed, the performance deterioration of the processing liquid becomes remarkable.
For example, between the processing chambers of a surface processing apparatus that uses the same processing liquid (for example, an etching liquid), or for a surface processing apparatus that uses different processing liquids (for example, an etching liquid and a stripping liquid, an etching liquid and a cleaning liquid). When mixing of the processing liquid occurs between the processing chambers, the performance of the processing liquid is deteriorated and the life life is shortened. Thus, prevention of such mixing of processing solutions has been an important theme.

<< About the present invention >>
The conveyor of the surface treatment apparatus of this invention is made | formed in order to solve the subject of the said prior art example in view of such a situation.
According to the present invention, in the space between the surface treatment apparatuses, first, the substrate material is tilted to flow down the treatment liquid adhering thereto, thereby preventing mixing of the treatment liquid and second. Furthermore, an object of the present invention is to propose a conveyor for a surface treatment apparatus in which the treatment liquid adhering to and removing from the surface is prevented by absorbing and removing the treatment liquid.

<About Claim>
The technical means of the present invention for solving such a problem is as follows. First, claim 1 is as follows.
The conveyor of the surface treatment apparatus of Claim 1 is used in the manufacturing process of a board | substrate. The surface treatment apparatus includes a treatment liquid tank, the conveyor disposed in the liquid tank for conveying the substrate material in the liquid, and the treatment liquid disposed in the liquid tank for injecting the treatment liquid into the liquid. A spray nozzle. An interval space is formed between the surface treatment apparatuses, and the conveyor for conveying the substrate material out of the liquid is disposed.
The conveyors are arranged such that sandwiching rollers are arranged in the conveying direction so as not to contact the circuit forming surface of the substrate material and feed only the both end surfaces of the substrate material, and the conveyor in the interval space. Is characterized in that a means for preventing mixing of the treatment liquid between the surface treatment devices is provided for the sandwiching roller.
Claim 2 is as follows. The conveyor according to claim 2, wherein the conveyor horizontally conveys the substrate material, and the sandwiching rollers form a pair of upper and lower sides and are arranged on the left and right sides. It is characterized by being sent between the two.

Claim 3 is as follows. According to a third aspect of the present invention, in the conveyor according to the second aspect, the conveyor in the gap space inclines the substrate material up and then down and directs the treatment liquid adhering to the substrate material to the surface treatment apparatus. It is made to flow down.
Claim 4 is as follows. According to a fourth aspect of the present invention, in the third aspect, the conveyor in the space is provided with the pinching rollers for forming a convex shape having a height level higher than that of the other pinching rollers. And this board | substrate material is high in the position of this pinching roller for convex-shaped formation, is low in the position of this other pinching roller, It is characterized by being conveyed incline.
Claim 5 is as follows. The conveyor according to claim 5 is characterized in that, in claim 4, the pinching rollers for forming convex shapes have variable height levels and can be set at various height levels. .

Claim 6 is as follows. According to a sixth aspect of the present invention, in the second aspect of the present invention, the conveyor in the gap space includes the sandwiching roller having the liquid absorbing property of the processing liquid.
Claim 7 is as follows. The conveyor according to claim 7 is the conveyor according to claim 6, wherein the sandwiching roller having a liquid absorbing property is disposed at a central portion in the transport direction of the space and absorbs and removes the processing liquid adhering to the substrate material. It is characterized by doing.
Claim 8 is as follows. The conveyor according to claim 8 is the conveyor according to claim 7, wherein an air nozzle for drying and removing the processing liquid adhering to the substrate material is disposed in the front-rear distance of the sandwiching roller having liquid absorption. It is characterized by.
Claim 9 is as follows. The conveyor according to claim 9, wherein the surface treatment apparatus is used in a developing process, an etching process, a peeling process, or a cleaning process in a substrate manufacturing process. The processing solution is made of a developing solution, an etching solution, a stripping solution, or a cleaning solution, and the substrate material is made of a flexible substrate material or other extremely thin flexible substrate material.

<About the action>
Since the present invention comprises such means, the following is achieved.
(1) The surface treatment apparatus is used in a substrate manufacturing process, and performs surface treatment on an ultrathin flexible substrate material.
(2) A submerged conveyor and a submerged spray nozzle are arranged in the processing liquid tank.
(3) The substrate material is sequentially conveyed between the surface treatment apparatuses by a conveyor.
(4) Now, the processing liquid adheres to the substrate material which is transported out of the liquid by the conveyor in the space between the surface processing apparatuses.
(5) Furthermore, since the substrate material is transported with both end faces sandwiched by the sandwiching rollers, the processing liquid is likely to remain in the interval space from this surface as well.
(6) Accordingly, the conveyor in the space is provided with a pinching roller for forming a convex shape, and the treatment liquid adhering to the original surface treatment apparatus flows down and is collected.
(7) Furthermore, the conveyor in the space is provided with a liquid-absorbing pinching roller and an air nozzle, and the attached processing liquid is liquid-absorbed, dried and removed.
(8) Therefore, the conveyor of the surface treatment apparatus of the present invention exhibits the following effects.

<< First effect >>
1stly, in the conveyor of this invention, the process liquid adhering in the space | interval space between surface treatment apparatuses is collect | recovered by the surface treatment apparatus with the pinching roller for convex shape formation.
Therefore, the processing liquid is prevented from being taken out, moved, and brought in between the processing chambers of the surface processing apparatus, and the mixing of the processing liquid is reliably prevented. Therefore, in each surface treatment apparatus, the performance degradation of the treatment liquid is avoided, and the life of the treatment liquid is significantly longer than that of the above-described conventional example.

<< Second effect >>
Secondly, in the conveyor according to the present invention, the adhering processing liquid is further absorbed and removed by a liquid absorbing pinching roller or an air nozzle in the space between the surface processing apparatuses.
Therefore, also from this aspect, the take-out, movement, and carry-in of the treatment liquid between the treatment chambers of the surface treatment apparatus is prevented, and the mixing of the treatment liquid is reliably prevented. Also from this aspect, the performance degradation of the treatment liquid is avoided, and the life of the treatment liquid is significantly longer than that of this type of conventional example.

《About drawing》
Hereinafter, the conveyor of the surface treatment apparatus of this invention is demonstrated in detail based on the best form for implementing invention shown in drawing.
1 to 3 are used to explain the best mode for carrying out the present invention. FIG. 1 is an explanatory side sectional view of one example, and FIG. 2 is an explanatory side sectional view of another example. FIG. 3 is a side sectional view of the surface treatment apparatus.

<About the board>
The surface treatment apparatus 1 of the present invention is used in a substrate manufacturing process. First, the substrate will be described.
Circuit boards such as printed wiring boards used in electronic devices have made remarkable progress in miniaturization and weight reduction, ultrathinning, microcircuits, high density circuits, and multilayers. The circuit board is also harder and softer than conventional rigid boards such as rigid boards, and the development and increase of flexible boards and other ultra-thin and flexible flexible boards is remarkable, and semiconductor packages in which semiconductor components are integrated with the circuit are integrated. The spread of substrates is also rapid.
Such a substrate is manufactured, for example, by following the following manufacturing process. That is, after applying or pasting a photosensitive resist on the outer surface of the substrate material A made of a copper-clad laminate, and then exposing by applying a negative film of a circuit, developing a resist other than a circuit forming portion by development After dissolving and removing the copper foil other than the circuit forming portion by etching, removing the resist of the circuit forming portion by stripping the copper foil on the outer surface of the substrate material A with the copper foil A circuit is formed and then a substrate is manufactured.
The substrate is like this.

<< About the surface treatment apparatus 1 >>
The surface treatment apparatus 1 is used in such a substrate manufacturing process, and surface-treats the substrate material A with the treatment liquid B. The surface treatment apparatus 1 will be described in detail with reference to FIG.
The surface treatment apparatus 1 is used as a developing device, an etching device, a peeling device, or a cleaning device during a substrate manufacturing process, for example, in a developing step, an etching step, a peeling step, or a cleaning step. In the processing chamber 2, for example, a processing liquid B such as a developing solution, an etching solution, a stripping solution, or a cleaning solution is sprayed from the spray nozzle 4 to the substrate material A that is transported in the transporting direction C by the conveyor 3. Accordingly, the substrate material A is subjected to surface treatment such as chemical treatment or cleaning treatment.
In many cases, the surface treatment apparatus 1 is arranged in multiples for one process. For example, in an etching process, in many cases, a plurality of etching apparatuses are continuously arranged.
And the surface treatment apparatus 1 has the liquid tank 5, the conveyor 3, the spray nozzle 4, the storage tank 6, etc. in the process chamber 2. FIG. The liquid tank 5 is formed in the upper part of the processing chamber 2 and is filled with the same processing liquid B as the processing liquid B ejected from the spray nozzle 4. A large number of spray nozzles 4 are arranged in the processing liquid B of the liquid tank 5, and face the circuit forming surface of the substrate material A to be conveyed, and spray the processing liquid B into the liquid.
The processing liquid B is pumped from the storage tank 6 at the lower part of the processing chamber 2 to each spray nozzle 4 via the pump 7 and the pipe 8 and is sprayed onto the substrate material A. Then, the processing liquid B reflected from the substrate material A and bounced back is absorbed into the processing liquid B in the liquid tank 5, and as a result, the processing liquid B overflowed from the liquid tank 5 is recovered in the storage tank 6. And used in circulation.

In the conveyor 3, a large number of pinching rollers 9 are arranged in a row along the transport direction C in the processing liquid B of the liquid tank 5 without contacting the circuit forming surface of the substrate material A and sandwiching only both end surfaces. It becomes. That is, the substrate material A is composed of a circuit forming surface at the center, and front and rear end surfaces and left and right side end surfaces of the outer peripheral edge, and the front and rear end surfaces and both side end surfaces are also referred to as groove portions and become non-circuit forming surfaces. ing.
The upper and lower sandwiching rollers 9 are used as driving and conveying rollers so as to form a pair of upper and lower sides so that the left and right end surfaces of the substrate material A are sandwiched and sent from the upper and lower sides. The conveyor 3 in the illustrated example has a method of horizontally transporting the substrate material A as described above. However, the sandwiching rollers 9 are paired on the left and right sides or inclined to form a pair so that the substrate material A is transported vertically. An inclined conveyance method is also possible.
The surface treatment apparatus 1 is as described above.

<< About the conveyor 3 of the space D >>
Hereinafter, a description will be given with reference to FIGS. The substrate material A is continuously transferred by the conveyor 3 between the processing chambers 2 of the respective surface treatment apparatuses 1, and thus the predetermined surface treatment is sequentially performed in each surface treatment apparatus 1.
An interval space D is formed between the processing chambers 2 of each surface treatment apparatus 1, and in the interval space D, the conveyor 3 that transports the substrate material A out of the liquid is provided with a mixing prevention means. ing.
That is, the conveyor 3 that conveys the substrate material A from the processing chamber 2 of the surface processing apparatus 1 of the previous process to the processing chamber 2 of the surface processing apparatus 1 of the next process in the gap space D is sandwiched between the upper and lower sandwiching rollers. About 9 ', the mixing liquid prevention means of the process liquid A is provided.
The mixing prevention means will be described in detail below.

<< About the pinching roller 9 'for forming a convex shape >>
First, in the example shown in FIG. 1, the conveyor 3 in the gap space D includes a pinching roller 9 ′ for forming a convex shape having a height level higher than that of the other pinching rollers 9, and the substrate material A has a convex shape. At the position of the forming pinch roller 9 ′, it is lifted and high, and at the position of the other pinching roller 9, it is low, and it is conveyed with an inclination.
That is, the sandwiching roller 9 ′ of the conveyor 3 in the gap space D causes the substrate material A to be inclined upward and then downward, so that the processing liquid B adhering to the substrate material A is directed toward the processing chamber 2 of the surface processing apparatus 1. , And let it flow down.

The conveyor 3 for the space D shown in FIG. 1 will be described in further detail. First, in the liquid tank 5 of the processing chamber 2 of the surface processing apparatus 1 in the previous step, the processing liquid B adhered to the surface of the substrate material A, that is, the adhering material was carried out from the outlet 10 of the processing chamber 2 to the space D. The processing liquid B flows down along the substrate material A toward the outlet 10 of the original processing chamber 2 based on the inclination gradient of the substrate material A by the upper and lower sandwiching rollers 9 ′ for forming the convex shape. And it collect | recovers by the liquid tank 5 and the storage tank 6 of the processing chamber 2. FIG.
Further, in the processing chamber 2 of the surface processing apparatus 1 in the subsequent process, the processing liquid B adhering to the surface of the substrate material A, that is, the processing liquid B overflowing from the inlet 11 of the processing chamber 2 is sandwiched between upper and lower portions for forming a convex shape. Based on the inclination of the substrate material A by the roller 9 ′, the substrate material A flows down toward the inlet 11 of the processing chamber 2. And it collect | recovers by the liquid tank 5 and the storage tank 6 of the processing chamber 2. FIG.

As the pinching roller 9 ′ for forming the convex shape of the space D, various modes are conceivable as follows. a. The sandwiching roller 9 'in the illustrated example has the same diameter size both in the upper and lower sides, and the shaft height level is fixed to be gradually higher and lower for convex formation.
b. Regardless of the illustrated example, with respect to the gap space D, such a sandwiching roller 9 ′ is employed only in the central part in the transport direction C, and a normal sandwiching roller 9 can be used before and after that.
c. Further, as for the pinching roller 9 ′, a convex shape can be formed by adopting a pinching roller having a larger diameter than the other pinching rollers 9.
d. Furthermore, it is conceivable that the height level of the sandwiching roller 9 'can be made variable and set to various height levels. In other words, an elevating mechanism is attached to the upper and lower sandwiching rollers 9 ′ so that it can move up and down in accordance with the conveying speed of the conveyor 3, and the higher the conveying speed, the steeper the slope, and the lowering speed of the processing liquid B is increased. There is an advantage that the recovery of the processing liquid B is further smoothed.
In FIG. 1, E is a wire laid around the outer peripheral grooves of the lower sandwiching rollers 9 and 9 ′ and functions to prevent the substrate material A from dripping. F is a ring that is inserted into the outer peripheral groove of the upper sandwiching rollers 9, 9 ′ and functions to prevent the substrate material A from being wound.
The pinching roller 9 ′ for forming the convex shape is as described above.

<< About the pinching roller 9 'etc. with liquid absorbency >>
Next, in the example shown in FIG. 2, the conveyer 3 for conveying outside the liquid in the gap space D includes a sandwiching roller 9 ′ having liquid absorbency of the processing liquid B.
An air nozzle 12 that dries and removes the processing liquid B adhering to the substrate material A is disposed in the front-rear interval of the sandwiching roller 9 ′ having liquid absorbency.

The conveyor 3 for the space D shown in FIG. 2 will be further described in detail. The upper and lower sandwiching rollers 9 ′ having the liquid absorbing property have, for example, a structure in which the liquid absorbing portion 13 is provided on the outer peripheral portion, and a hard foam material or the like is adopted as the liquid absorbing portion 13.
In the illustrated example, the sandwiching roller 9 ′ having liquid absorbency is employed in the central portion of the interval space D in the conveyance direction C, and ordinary sandwiching rollers 9 are used before and after the sandwiching roller 9 ′. Then, the processing liquid B adhering to the substrate material A is absorbed and removed from both side end surfaces of the substrate material A.
In addition, the air nozzle 12 faces the circuit formation surface and both side end surfaces of the substrate material A at the front and rear intervals of the upper and lower sandwiching rollers 9 ′ and the front and rear spacing between the sandwiching rollers 9 ′ and the sandwiching rollers 9. Each is lined up on the left and right. Then, the processing liquid B adhering to the substrate material A is dried and removed by air jet.
If the air nozzle 12 is slightly inclined in the left-right direction, the processing liquid B adhering to the substrate material A is flowed and collected to the liquid-absorbing sandwiching roller 9 ′, so that the processing liquid B is further removed. Smooth.
The sandwiching roller 9 ′ or the like having liquid absorption is as described above.

《Action etc.》
The conveyor 3 of the surface treatment apparatus 1 of the present invention is configured as described above. Therefore, it becomes as follows.
(1) The surface treatment apparatus 1 is used in a substrate manufacturing process. That is, it is used in the manufacturing process of an ultra-thin flexible substrate, and while the ultra-thin and flexible substrate material A is conveyed by the conveyor 3, the processing liquid B is sprayed from the spray nozzle 4 to form a surface for circuit formation. Process (see FIG. 3).

  (2) In each surface treatment apparatus 1, a conveyor 3 for transporting liquid and a spray nozzle 4 for spraying liquid are disposed in a liquid tank 5 filled with the processing liquid B. In the conveyor 3, the sandwiching rollers 9 sandwich and send both end surfaces, which are non-circuit forming surfaces of the substrate material A (see FIG. 3).

  (3) Then, the substrate material A is transferred from the processing chamber 2 of the surface processing apparatus 1 of the previous process to the processing chamber 2 of the surface processing apparatus 1 of the next process, and further to the processing chamber 2 of the surface processing apparatus 1 of the next process. Are sequentially conveyed by the conveyor 3 and passed through the space D between the processing chambers 2 (see FIGS. 1 and 2).

  (4) Now, the processing liquid B adheres to the substrate material A conveyed by the conveyor 3 in the space D between the processing chambers 2 of the surface treatment apparatus 1 as a whole in the form of water droplets. Yes. That is, the substrate material A is transported in the liquid in the processing chamber 2 of the surface treatment apparatus 1, whereas it is transported out of the liquid and wetted with the processing liquid B in the interval space D.

  (5) Further, since the substrate material A is fed with both end faces sandwiched by the sandwiching rollers 9 of the conveyor 3, the processing liquid B adheres and remains on the circuit forming surface in the central portion in the space D from this surface as well. Easy to do.

  (6) Therefore, in the surface treatment apparatus 1, the conveyor 3 in the space D is provided with a pinching roller 9 ′ for forming a convex shape, and the substrate material A is conveyed while being inclined upward and downward. Thus, in the space D, the processing liquid B adhering to the substrate material A flows down to the processing chamber 2 of the original surface processing apparatus 1 and is collected (see FIG. 1).

  (7) Further, in this surface treatment apparatus 1, the conveyor 3 in the gap space D includes a liquid-absorbing sandwiching roller 9 ′ and an air nozzle 12. Therefore, in the space D, the processing liquid B adhering to the substrate material A is absorbed, dried, and removed by the sandwiching roller 9 'and the air nozzle 12 (see FIG. 2).

  (8) In the illustrated example, the pinching roller 9 ′ (see FIG. 1) for forming the convex shape and the liquid absorbing pinching roller 9 ′ (see FIG. 2) are employed separately. Of course, it is possible to adopt a common system. That is, the sandwiching roller 9 ′ of the conveyor 3 that conveys the gap space D may be configured to have a convex shape, a liquid suction, and further an air nozzle 12.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a side cross-sectional explanatory diagram of an example of a conveyor of a surface treatment apparatus according to the present invention, which is used for explaining the best mode for carrying out the invention. It is used for description of the best form for implementing this invention, and is a sectional side view explanatory drawing of another example. It is used for description of the best form for implementing this invention, and is a side cross section of a surface treatment apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Surface treatment apparatus 2 Processing chamber 3 Conveyor 4 Spray nozzle 5 Liquid tank 6 Storage tank 7 Pump 8 Piping 9 Clamping roller 9 'Clamping roller 10 Outlet 11 Inlet 12 Air nozzle 13 Liquid absorption part A Substrate material B Processing liquid C Conveyance direction D Interval Space E Wire F Ring

Claims (9)

A conveyor for a substrate material surface treatment apparatus used in a substrate manufacturing process, wherein the surface treatment apparatus is disposed in a liquid tank for a treatment liquid and conveys the substrate material in the liquid. The conveyor, and a spray nozzle that is disposed in the liquid tank and injects the treatment liquid into the liquid,
An interval space is formed between the surface treatment apparatuses, and the conveyor for conveying the substrate material outside the liquid is disposed,
The conveyors in the gap space are arranged such that sandwiching rollers are arranged in the conveying direction without contacting the circuit forming surface of the substrate material and sandwiching only both end surfaces of the substrate material. A conveyor for the surface treatment device, wherein the sandwiching roller is provided with a means for preventing mixing of the treatment liquid between the surface treatment devices.   The conveyor of the surface treatment apparatus according to claim 1, wherein the conveyor horizontally conveys the substrate material, and the sandwiching rollers are arranged in left and right sides, and are arranged on the left and right sides. A conveyor of a surface treatment apparatus, characterized by being fed from above and below.   The conveyor of the surface treatment apparatus according to claim 2, wherein the conveyor in the gap space inclines the substrate material up and then down, and directs the treatment liquid adhering to the substrate material to the surface treatment device. The conveyor of the surface treatment apparatus characterized by making it flow down.   The conveyor of the surface treatment apparatus according to claim 3, wherein the conveyor in the space includes the pinching rollers for forming a convex shape having a height level higher than that of the other pinching rollers, A conveyor for a surface treatment apparatus, characterized in that it is high at the position of the pinching rollers for forming a convex shape and low at the position of the other pinching rollers and is conveyed at an angle.   The conveyor of the surface treatment apparatus according to claim 4, wherein the pinching rollers for forming a convex shape have variable height levels and can be set to various height levels. Conveyor for surface treatment equipment.   The conveyor of the surface treatment apparatus according to claim 2, wherein the conveyor in the space includes the pinching rollers having a liquid absorbing property of the treatment liquid. .   The conveyor of the surface treatment apparatus according to claim 6, wherein the sandwiching roller having a liquid absorbing property is disposed at a central portion in the conveyance direction of the interval space and absorbs the processing liquid attached to the substrate material, Removing the conveyor of the surface treatment apparatus.   In the conveyor of the surface treatment apparatus according to claim 7, an air nozzle for drying and removing the treatment liquid adhering to the substrate material is disposed in the front-rear interval of the sandwiching roller having liquid absorbency. The conveyor of the surface treatment apparatus characterized by the above-mentioned.   In the conveyor of the surface treatment apparatus according to claim 1, 3, or 6, the surface treatment apparatus is used in a development process, an etching process, a peeling process, or a cleaning process in a substrate manufacturing process, A conveyor for a surface treatment apparatus comprising a developing solution, an etching solution, a stripping solution, or a cleaning solution, wherein the substrate material comprises a flexible substrate material or other ultrathin soft substrate material.

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