JP2010280925A - Surface treatment device and surface treatment system, method for surface treatment and band-shaped thin body treated thereby - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface treatment device and a surface treatment system, capable of performing high-quality surface treatment on a prescribed surface to be treated, a method for surface treatment, and a band-shaped thin body treated thereby. <P>SOLUTION: The surface treatment device 10 performs a surface treatment by flowing down a surface treatment liquid X along the surface to be treated of a band-shaped thin body S. The surface treatment device 10 includes: a wall part 12b disposed in proximate to the band-shaped thin body S through a prescribed narrow gap d provided therebetween; and a supply part 13 for supplying the surface treatment liquid X flowing down in the gap d. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a surface treatment apparatus, a surface treatment system, a surface treatment method, and a strip-like thin body treated by this, for example, performing a surface treatment including a plating treatment and a base treatment.

In recent years, surface treatment apparatuses that perform surface treatment such as plating on the surface of a thin film substrate used as a mounting substrate or the like have been used.
As such a surface treatment apparatus, for example, the object to be treated is conveyed along a substantially vertical direction with respect to the surface treatment liquid flowing down from the treatment liquid water tank surrounded by the solid side wall disclosed in Patent Document 1. A vertical processing method in which processing is performed while a horizontal processing method in which processing is performed while conveying an object to be processed along a substantially horizontal direction is employed.
Patent Document 2 discloses a treatment liquid using a metal complex as a surface treatment liquid used in such a surface treatment apparatus.
JP 61-127895 A (released on June 16, 1986) International Publication No. 2007/066460 pamphlet (International publication on June 14, 2007)

However, the conventional surface treatment method has the following problems.
That is, in the single-sided plating method disclosed in the above publication, a plurality of slits are provided in the side wall portion of the water tank in which the plating solution is stored, and the plating solution flowing down from the slits has a surface to be processed substantially along the vertical direction. It supplies with respect to the strip | belt-shaped body conveyed in a longitudinal direction in the state. Then, a flow-down passage is formed between the side wall where the slit is formed and the belt-like body, and the plating treatment is performed on the belt-like body.
However, in such a plating process, the non-uniformity of the process, which is a disadvantage of the horizontal process method, is improved by adopting the vertical process, but the process liquid is applied in the flow-down passage formed between the side wall and the strip. It is hard to say that it can be held securely. Therefore, for example, leakage of the processing liquid to a surface other than the surface to be processed such as the back surface easily occurs, and it is difficult to perform high-quality surface processing only on a predetermined surface to be processed.

  An object of the present invention is to provide a surface treatment apparatus, a surface treatment system, a surface treatment method, and a strip-like thin body treated by this, capable of performing high-quality surface treatment on a predetermined surface to be treated. It is in.

A surface treatment apparatus according to a first aspect of the present invention is a surface treatment apparatus that performs surface treatment by flowing down a surface treatment liquid along a surface to be treated of an object to be treated, and includes a supply unit and a first wall unit. I have. The supply unit supplies the surface treatment liquid. The first wall portion is disposed close to the surface to be processed with a predetermined minute gap between them, and the surface treatment liquid supplied from the supply unit is placed between the surface to be processed and the opposite surface. The surface is treated by flowing down.
Here, the 1st wall part is provided so that it may adjoin via the predetermined clearance gap with respect to the specific to-be-processed surface in a to-be-processed object. Then, the surface treatment is performed by causing the surface treatment liquid supplied from the supply unit to flow down in the gap between the first wall and the surface to be processed.
Here, the first wall portion is, for example, a plate-like member having a size corresponding to the area for performing the surface treatment on the surface to be treated, and the surface tension works according to the characteristics of the surface treatment liquid. It is arranged close to the surface to be processed through a minute gap (for example, 0.5 to 10.0 mm) set in a range. In addition, the gap between the first wall portion and the surface to be processed that are disposed close to each other may be appropriately adjusted within the range in which the surface tension acts according to the flow rate and properties of the surface treatment liquid.

  Thereby, the surface treatment liquid flowing down between the surface to be treated and the first wall can be efficiently spread in the surface direction by the surface tension. As a result, the surface treatment liquid can be held so that the surface to be treated and the first wall portion flow down in a portion facing each other with a predetermined gap. Accordingly, it is possible to suppress the surface treatment liquid from moving to a portion other than the surface to be processed in the object to be processed, and to perform a uniform and high quality surface treatment on the surface to be processed. Moreover, since the surface treatment liquid can be held in a state of being thinly spread in the gap due to surface tension, it is possible to prevent the surface treatment liquid from being diverted in the downstream portion along the first wall portion. Can do. As a result, a high-quality surface treatment can be performed by making the flow of the surface treatment liquid flowing down between the opposed surfaces of the surface to be treated and the first wall portion uniform in the surface direction.

A surface treatment apparatus according to a second invention is the surface treatment apparatus according to the first invention, further comprising a conveyance mechanism for continuously conveying a long object to be processed in a predetermined direction along the longitudinal direction. ing.
Here, when the object to be processed is, for example, a long sheet member, surface treatment is performed on the surface facing the first wall portion while continuously conveying the long object to be processed in the longitudinal direction.
Here, the transport mechanism includes a pair of transport rollers and the like arranged so as to sandwich the first wall portion on the upstream and downstream sides in the transport direction.
Thereby, a high quality surface treatment can be continuously carried out while continuously conveying a long object to be treated. Further, since the surface treatment liquid can be held by the surface tension between the opposed surfaces of the surface to be treated and the first wall portion, the conveyance rollers disposed on the upstream side and the downstream side of the portion where the surface treatment is performed are tightened. It is not necessary to drain the surface treatment liquid. Therefore, it is possible to prevent the occurrence of defects such as scratching the surface of the object to be processed by tightening the transport roller or the like, and to avoid the quality degradation of the final product and the decrease in product yield.

A surface treatment apparatus according to a third aspect of the present invention is the surface treatment apparatus according to the first or second aspect of the present invention, which is disposed above the first wall and the object to be processed and is supplied from the supply unit A storage unit is further provided that allows a predetermined amount of the surface treatment liquid to flow down while temporarily storing the treatment liquid.
Here, in order to stably supply the surface treatment liquid from above between the opposed surfaces of the object to be treated and the first wall, a reservoir is provided above the first wall. ing.
Here, the storage unit includes a water tank for storing the surface treatment liquid.
Thereby, after surface treatment liquid supplied from a supply part is once stored in a storage part, it can be made to flow stably between a to-be-processed surface and the opposed surface of the 1st wall part. As a result, even when the supply amount of the surface treatment liquid from the supply unit varies, the surface treatment liquid can flow stably between the surface to be treated and the opposing surface of the first wall portion from the storage unit. Quality surface treatment can be performed.

A surface treatment apparatus according to a fourth aspect of the present invention is the surface treatment apparatus according to any one of the first to third aspects of the present invention, wherein the surface of the object to be processed is opposite to the surface facing the first wall portion. And a backing portion disposed in the vicinity.
Here, for example, a plate-like backing portion is disposed close to the back surface (surface opposite to the surface facing the first wall portion) of the object to be processed.
As a result, when the object to be processed is a sheet-like thin body, the surface treatment liquid is thinned due to variations in the amount of surface treatment liquid flowing down in a minute gap formed between the opposed surfaces of the surface to be processed and the first wall portion. Even when the body becomes unstable, the back side of the thin body can be supported by the backing portion. As a result, it is possible to stabilize the relative position of the object to be processed with respect to the first wall portion and to perform a higher quality surface treatment.

A surface treatment apparatus according to a fifth aspect is the surface treatment apparatus according to any one of the first to fourth aspects, wherein the first wall portion is covered along the direction in which the surface treatment liquid flows down. It has a rectification | straightening part which protrudes from the surface facing a process surface.
Here, the rectification | straightening part which protruded along the flow-down direction of surface treatment liquid is provided in the surface of the 1st wall part which hold | maintains surface treatment liquid between surface treatment surfaces with surface tension.
Thereby, it can prevent that the surface treatment liquid which flows down in the clearance gap between a 1st wall part and a to-be-processed surface flows into a narrow strip | belt shape. Therefore, the surface treatment liquid can be spread uniformly over the entire surface to be processed by adjusting the flow of the surface treatment liquid.

A surface treatment apparatus according to a sixth invention is the surface treatment apparatus according to any one of the first to fifth inventions, wherein the first wall portion is a direction substantially perpendicular to the direction in which the surface treatment liquid flows down. In the vicinity of both end portions, a both-end protruding portion that protrudes from a surface that faces the surface to be processed along the flow-down direction.
Here, both end protrusions formed on both sides so as to protrude from the surface of the first wall portion facing the surface to be processed are provided along the direction in which the surface treatment liquid flows down.
Thereby, it can prevent that the surface treatment liquid which flows down from the upper side with respect to a to-be-processed surface leaks out from a right-and-left end part.

A surface treatment apparatus according to a seventh aspect of the present invention is the surface treatment apparatus according to any one of the first to sixth aspects, wherein the distance between the surface to be processed and the facing surface of the first wall portion is adjusted. And an adjusting mechanism that further includes the adjusting mechanism.
Here, the size of the gap between the surface to be processed and the first wall portion can be adjusted.
Here, the adjustment mechanism includes a mechanism that moves the workpiece, a mechanism that moves the first wall, or a mechanism that moves both the workpiece and the first wall.
Thus, for example, by adjusting the size of the gap within the range in which the surface tension works according to the flow rate or characteristics of the surface treatment liquid supplied to the gap, the efficiency can be increased using as little surface treatment liquid as possible. Surface treatment can be performed well.

A surface treatment apparatus according to an eighth aspect of the present invention is the surface treatment apparatus according to any one of the first to seventh aspects, wherein the surface to be processed is disposed opposite to the first wall portion of the object to be processed. It includes a front surface and its back surface. And it has further provided the 2nd wall part arrange | positioned in proximity with respect to the to-be-processed surface of the back side.
Here, for example, the surface treatment liquid flows down in the gap between the first wall portion and the second wall portion that are arranged close to both the front and back surfaces of the front and back surfaces of the sheet-like workpiece. And surface treatment on both sides.
As a result, high-quality surface treatment can be performed on both the front and back surfaces without any leakage of the surface treatment liquid.
A surface treatment system according to a ninth aspect is configured by arranging a plurality of the surface treatment apparatuses according to any one of the first to eighth aspects along a conveying direction of a long workpiece. .
Here, a plurality of the above-described surface treatment apparatuses are arranged along the conveying direction of the long workpiece.
As a result, a plurality of different types of surface treatments such as base treatment and plating treatment can be continuously performed by a plurality of surface treatment apparatuses.

According to a tenth aspect of the present invention, there is provided a surface treatment method in which a wide surface of a long strip-shaped thin body traveling in a longitudinal direction is maintained in a substantially vertical direction, and one or both surfaces of the strip-shaped thin body are surface-treated. This is a floating wall type surface treatment method in which a surface treatment liquid is caused to flow down between the opposing side walls by using as a floating wall.
As a result, the surface treatment liquid that flows down between the opposing surfaces of the side wall and the strip-shaped thin body can uniformly spread the surface treatment liquid on the opposing surface, and the flow resistance on both opposing surfaces. The flow rate can be kept constant. And in the flow path formed between the opposing surfaces of the side wall and the strip-shaped thin body, the flow is likely to be disturbed as the flow is further downstream, but in this method, such an unstable factor is suppressed by the effect of the floating wall. be able to.
The strip-shaped thin body according to the eleventh invention is treated by the surface treatment method according to the tenth invention.
Thereby, since it is processed by the above-mentioned surface treatment method, it is suppressed that the surface treatment liquid moves to a portion other than the surface to be treated, and a strip shape in which a uniform and high quality surface treatment is performed on the surface to be treated. A thin body can be obtained.

  According to the surface treatment apparatus of the present invention, the surface treatment liquid can be prevented from moving to a portion other than the surface to be treated in the treatment object, and uniform and high quality surface treatment can be performed on the surface to be treated. .

The surface treatment apparatus 10 according to an embodiment of the present invention will be described below with reference to FIGS.
[Configuration of entire surface treatment apparatus 10]
As shown in FIGS. 1 and 2, the surface treatment apparatus 10 according to the present embodiment applies a predetermined surface treatment liquid X to the surface of a strip-shaped thin body (object to be treated) S arranged along a substantially vertical direction. It is an apparatus that performs surface treatment by flowing down. The surface treatment apparatus 10 includes a casing unit 11, a processing unit 12, a supply unit 13, conveyance roller pairs 15 and 16, and a backing unit 17. Examples of the surface treatment include surface cleaning, surface modification, cleaning, catalyst application, activation, nickel plating, copper plating, and the like, and can handle many surface treatments.
Here, the strip-shaped thin body S as an object to be processed is a long polyimide film having a width of 50 cm and a thickness of 38 μm. The strip-shaped thin body S is subjected to surface treatment while being conveyed in a predetermined direction at a feeding speed of 0.3 m / min by a conveyance mechanism (conveyance roller pair 15 and 16) described later.

As the surface treatment liquid X, for example, various surface treatment liquids such as distilled water for washing, a degreasing liquid, and an electroless nickel liquid may be used depending on the type of surface treatment applied to the thin strip S. it can. In addition, the surface treatment liquid X circulates in the surface treatment apparatus 10 while returning to the supply unit 13 from the lower portion of the housing unit 11 by a circulation pump (not shown) in a room temperature or heated state.
As shown in FIG. 1, the housing unit 11 is a member that constitutes the outline of the surface treatment apparatus 10, and includes a processing unit 12, a supply unit 13, and the like inside. Moreover, the housing | casing part 11 stores the surface treatment liquid X which flowed down through the process part 12 in the lower part, and has returned to the supply part 13 using the pump etc. which are not shown in figure.
As illustrated in FIG. 1, the processing unit 12 is disposed inside the housing unit 11, and the processing target surface of the strip-shaped thin body S that is transported along a substantially horizontal direction (longitudinal direction of the strip-shaped thin body S). On the other hand, a predetermined surface treatment is performed using the surface treatment liquid X supplied from the supply unit 13. The configuration of the processing unit 12 will be described in detail later.

As shown in FIG. 1, the supply unit 13 is a cylindrical pipe disposed above the processing unit 12, and the processing unit includes a plurality of holes 13 a formed along the conveying direction of the strip-shaped thin body S. The surface treatment liquid X is supplied to the 12 reservoirs 12a.
As shown in FIG. 2, the pair of conveyance rollers 15 and 16 includes a pair of conveyance rollers 15 a and 15 b and conveyance rollers 16 a and 16 b arranged so as to sandwich the processing unit 12 in the conveyance direction of the thin strip S. Yes. And the conveyance roller pairs 15 and 16 convey the elongate strip | belt-shaped thin body S continuously along a longitudinal direction. Further, the transport roller pairs 15 and 16 are formed so that a minute gap d (see FIG. 4) of 0.5 to 10.0 mm is formed between the belt-like thin body S to be transported and a wall portion 12b described later. It moves in the housing part 11. Thereby, the magnitude | size of the said clearance gap d can be adjusted suitably.

As shown in FIG. 2, the backing portion 17 is a 38 μm-thick polyimide sheet attached to the transport rollers 15b and 16b, and is opposite to the surface to be processed in the strip-shaped thin body S to be transported (back surface). Side). Thereby, the surface treatment in the process part 12 can be stably implemented by supporting the strip | belt-shaped thin body S from the back surface side by the backing part 17. FIG. Further, the backing portion 17 is transported and rotated in the same direction at the same speed as the transport speed of the belt-like thin body S by the rotation of the transport rollers 15b and 16b. Thereby, the damage | wound etc. of the surface of the strip | belt-shaped thin body S by the contact with the backing part 17 can be prevented.
(Processing unit 12)
As described above, the processing unit 12 is a part that performs a surface treatment on the strip-shaped thin body S, and as illustrated in FIGS. 1 and 2, the storage unit 12 a and the wall (first wall) 12 b. And a weir portion 12c and a support portion 12d.

The storage unit 12 a is a water tank-like portion disposed on the upper part of the processing unit 12, and temporarily stores the surface treatment liquid X supplied from the supply unit 13. And the storage part 12a supplies only the predetermined amount of surface treatment liquid X beyond the dam part 12c to the clearance gap d (refer FIG. 4) between the strip | belt-shaped thin body S and the wall part 12b facing this. Thereby, the influence of the variation in the supply amount from the supply unit 13 can be suppressed, and the surface treatment liquid X can be stably supplied to the gap d to stabilize the surface treatment.
As shown in FIGS. 2 and 3, the wall portion 12b is substantially vertical so as to be substantially parallel to the surface to be processed of the strip-shaped thin body S that is conveyed in a substantially horizontal direction in a state of being substantially vertically oriented. Arranged along the direction. The wall portion 12b is disposed below the outflow side of the surface treatment liquid X in the storage portion 12a, and the surface treatment liquid X supplied from the storage portion 12a over the dam portion 12c is the surface of the wall portion 12b. It flows down along. Furthermore, as shown in FIG. 4, the wall portion 12 b is disposed close to the processing surface of the strip-shaped thin body S so as to provide a minute gap d between the strip-shaped thin body S being conveyed. . The surface treatment liquid X that has flowed into the gap d is subjected to surface tension, and at both ends of the gap d between the opposing surfaces of the strip-like thin body S and the wall portion 12b, as shown in FIG. An interface X1 that is recessed so as to be drawn into the surface is formed. Thereby, the surface treatment liquid X can be effectively prevented from leaking out from both ends of the gap d, and a uniform surface treatment can be performed in the gap d. In addition, although the magnitude | size of the clearance gap d can be suitably adjusted according to conditions, such as a viscosity and the property of the surface treatment liquid X, For example, it may be set within the range of 0.5-10.0 mm. That's fine.

Further, the height of the wall portion 12b substantially corresponds to the width of the strip-shaped thin body S, and the width is set according to the surface treatment conditions and the traveling speed of the strip-shaped thin body S. In the gap d between the wall portion 12b and the surface to be treated of the strip-shaped thin body S, the surface treatment liquid X is rectified by the lyophilic surface and the properties and flow rate of the surface treatment liquid that uniformly wets the strip-shaped thin body S. Then, the belt-like thin body S is held at a constant interval with respect to the wall portion 12b. In addition, although the magnitude | size of the clearance gap d of the strip | belt-shaped thin body S with respect to this wall part 12b changes depending on the flow volume and property of the surface treatment liquid X, generally the range of 0.3-1.0 mm is operation. This is an easy range.
The dam portion 12c is provided in the storage portion 12a and protrudes upward from the bottom surface of the storage portion 12a, and the amount of the surface treatment liquid X supplied from the storage portion 12a to the gap d is determined. It is provided for stabilization.

The support part 12 d is connected so as to intersect the wall part 12 b substantially perpendicularly, and supports the wall part 12 b so as to be coupled to the housing part 11.
<Surface treatment by the surface treatment apparatus 10>
Here, the surface treatment in the surface treatment apparatus 10 adopting a so-called floating wall system in which the belt-like thin body S to be conveyed is used as the opposing wall of the wall portion 12b will be described.
First, the surface treatment liquid X is supplied from the supply unit 13 to the storage unit 12a. Then, the surface treatment liquid X flows from the storage portion 12a over the dam portion 12c into the gap d between the opposing surfaces of the strip-shaped thin body S and the wall portion 12b and then flows downward.
At this time, the surface treatment liquid X flows down so as to moderately wet the surface to be treated of the strip-shaped thin body S spreading thinly across the entire surface of the wall portion 12b due to surface tension. If the surface treatment liquid X becomes unstable in the lower region of the wall portion 12b, for example, it becomes unstable by slightly increasing the circulation amount of the surface treatment liquid X.

In the present embodiment, the surface treatment liquid X is transported at a constant speed and the surface treatment is performed while the surface to be treated is brought into contact with the surface treatment liquid X under a situation where the surface treatment liquid X flows down stably. Although it changes with surface treatment conditions as a conveyance speed of the strip | belt-shaped thin body S, 0.1-3.0 m / min is a reasonable range. The long strip-shaped thin body S is unwound from the roll state, and after a series of surface treatments, is finally wound up again. During this time, it is conveyed while being guided by the conveying rollers 15a, 15b, etc., but in order to prevent the surface treatment liquid X from leaking, it is configured so that there are no parts that contact the surface to be treated activated by the surface treatment. Yes.
Moreover, since these series of components are housed in the housing unit 11 in a compact manner, the cleanliness in the housing unit 11 is kept high and external contamination is prevented.
In the present embodiment, as described above, the surface treatment liquid X is supplied to the gap between the surface to be treated of the strip-shaped thin body S and the wall portion 12b disposed in proximity to the surface treatment liquid X in a state where the surface tension is applied. I am letting.

Thereby, the surface treatment liquid X can be uniformly spread in the minute gap d between the surface to be treated and the strip-shaped thin body S by the surface tension. Therefore, a predetermined surface treatment can be performed uniformly on the surface to be processed of the strip-shaped thin body S.
Further, since the surface treatment liquid X can be held in the gap d by the surface tension, it is possible to prevent the surface treatment liquid X from leaking to a surface other than the surface to be treated and perform a high quality surface treatment. it can.
In addition, when the thickness of the strip-shaped thin body S is extremely thin, for example, 12.5 μm, there arises a problem that the strip-shaped thin body S is deformed due to the supply amount of the surface treatment liquid X and the flow becomes unstable. There is a fear. In this case, as shown in FIG. 1 and FIG. 2, a stable surface treatment can be performed by providing the backing portion 17 close to the back surface side of the strip-shaped thin body S. Further, since the backing portion 17 is conveyed in the same direction at the same speed as the strip-shaped thin body S, scratches or the like are formed on the surface of the strip-shaped thin body S due to contact between the strip-shaped thin body S and the backing portion 17. Can be prevented.

[Characteristics of the surface treatment apparatus 10]
(1)
The surface treatment apparatus 10 of the present embodiment is an apparatus that performs surface treatment by flowing down the surface treatment liquid X along the surface to be treated in the strip-shaped thin body S. As shown in FIG. , A wall portion 12b that is disposed in close proximity via a predetermined minute gap d, and a supply portion 13 that supplies the surface treatment liquid X flowing down in the gap d.
As a result, surface tension can be applied to the surface treatment liquid X flowing down in the minute gap d within the gap d. Therefore, the surface treatment liquid X flowing down in the gap d can be easily and uniformly spread on the surface to be treated. The surface treatment liquid X can be held in the gap d by surface tension. As a result, the surface treatment liquid X held in a uniformly spread state between the strip-shaped thin body S and the wall portion 12b prevents the surface treatment liquid from leaking to the surface other than the surface to be treated and has high quality. A surface treatment can be performed.

(2)
In the surface treatment apparatus 10 of the present embodiment, as shown in FIG. 2, the sheet-like strip-shaped thin body S is conveyed in a predetermined direction by using two pairs of conveyance rollers 15 and 16, and the gap d Surface treatment is performed.
Thereby, by carrying out surface treatment while continuously transporting the long strip-shaped thin body S, it is longer than the batch type configuration in which processing is performed by setting the objects to be processed one by one. The processing efficiency with respect to a thing can be improved significantly.
(3)
In the surface treatment apparatus 10 of the present embodiment, as shown in FIG. 1 and the like, a reservoir 12a that supplies the surface treatment liquid X to the gap d where the surface treatment is performed is provided above the wall 12b.

Thereby, since the surface treatment liquid X supplied from the supply part 13 can be stably supplied with respect to the clearance gap d, the surface treatment in the clearance gap d can be implemented stably.
(4)
In the surface treatment apparatus 10 of the present embodiment, as shown in FIGS. 1 and 4, the backing portion 17 is disposed close to the surface of the strip-shaped thin body S opposite to the surface to be treated.
Thereby, even when the belt-like thin body S is very thin, the belt-like thin body S is swollen due to the influence of the flow of the surface treatment liquid X by supporting the belt-like thin body S from the back side, and the surface treatment liquid X Can be prevented from becoming unstable. As a result, high-quality surface treatment can be performed while always transporting the strip-shaped thin body S stably.
(5)
As shown in FIG. 2, the surface treatment apparatus 10 of the present embodiment has a mechanism for moving the transport roller pairs 15 and 16 that support the belt-like thin body S while transporting the strip-shaped thin body S close to and away from the surface of the wall portion 12 b. ing.

Thereby, the relative position of the strip-shaped thin body S with respect to the wall part 12b can be adjusted appropriately according to the property etc. of the surface treatment liquid X. As a result, in the gap d between the opposing surfaces of the wall portion 12b and the strip-shaped thin body S, the surface treatment can be performed while appropriately spreading the surface treatment liquid X while holding the surface treatment liquid X by appropriately applying the surface tension. .
(6)
In the surface treatment apparatus 10 of the present embodiment, as shown in FIG. 1, the strip-like thin body S disposed close to the wall 12 b is used like a floating wall, and the surface treatment is performed in the gap d therebetween. I do.
Thereby, in the gap d, the surface treatment liquid X can be held in the gap d while being uniformly spread while the surface tension is applied. As a result, the surface treatment liquid X held in a uniformly spread state between the strip-shaped thin body S and the wall portion 12b prevents the surface treatment liquid X from leaking to other than the surface to be treated, resulting in high quality. Surface treatment can be performed.

(7)
As shown in FIG. 1 and the like, the strip-shaped thin body S of the present embodiment is subjected to a surface treatment by the surface treatment apparatus 10 described above.
Thereby, it is possible to obtain a surface-treated object that is uniform and high-quality on a desired surface to be processed.

As one embodiment according to the present invention, a surface treatment system 100 configured by arranging a plurality of the above-described surface treatment apparatuses 10 will be described below with reference to FIG.
As shown in FIG. 10, the surface treatment system 100 according to the present embodiment has different surfaces in a plurality of surface treatment apparatuses 10 a to 10 g arranged in series while continuously conveying a long thin strip S in the longitudinal direction. It is a system that performs processing continuously. In addition, the several surface treatment apparatus 10a-10g shall be provided with the substantially the same structure, and the kind of process content (process liquid) differs. Moreover, about the conveyance of the elongate strip | belt-shaped thin body S, it shall be performed by the conveyance mechanism which is not shown in each surface treatment apparatus 10a-10g.
In each of the surface treatment apparatuses 10a to 10g, for example, the surface treatment liquid X is held in the gap between the opposing surfaces of the wall portion and the strip-shaped thin body S so that the thickness is about 0.4 mm. The surface treatment was performed continuously. The length of the longitudinal direction of the wall part contained in each surface treatment apparatus 10a-10g is set to 20-70 cm.

In the surface treatment apparatus 10a, the degreasing treatment (surface treatment) of the surface of the strip-shaped thin body S was performed. As the degreasing solution (surface treatment solution), an aqueous solution containing 44% of standard mono-ethanolamine and 1.7% of polyoxyethylene alkyl ether and some chelating agents was used.
The surface treatment apparatus 10b is disposed immediately downstream of the surface treatment apparatus 10a, and has been subjected to surface purification treatment after washing with distilled water.
The surface treatment apparatus 10c is disposed immediately downstream of the surface treatment apparatus 10b, and an alkali hydrolysis treatment of the polyimide surface of the strip-shaped thin body S is performed with a surface treatment liquid having a concentration of about 3 mol / L KOH.
The surface treatment apparatus 10d is disposed immediately downstream of the surface treatment apparatus 10c, and performs a process for imparting palladium to the active surface of the thin strip S. As the surface treatment liquid, palladium was applied to the polyimide surface of the strip-shaped thin body S using a palladium complex as disclosed in WO2007 / 066460 (Japanese Patent Application No. 2005-351998).

At this time, the polyimide film subjected to a series of surface treatments was cut into a width of 20 cm every 50 m, and the distribution state of palladium was measured by ESCA. As a result, the concentration distribution of palladium was within ± 7% as a whole, although the absolute concentration was low, but no treatment bias was observed in the length direction and the width direction.
The concentration distribution on the surface of the film prepared by the conventional method of depositing palladium by electroless plating after surface treatment with KOH is quite high, and the distribution is within ± 15%. It was big.
The surface treatment apparatus 10e is disposed immediately downstream of the surface treatment apparatus 10d, and surface treatment is performed using a general commercially available electroless nickel solution made of nickel sulfate, nickel chloride, hypophosphite, or the like.

The surface treatment apparatus 10f is disposed immediately downstream of the surface treatment apparatus 10e, and the surface is cleaned with distilled water.
Here, as a result of inspecting the variation of the thin nickel film thickness of 0.1 μm on the strip-shaped thin body S using the fluorescent X-ray analysis, it was within ± 8%. That is, on the surface to be processed of the strip-shaped thin body S processed in the example, the length direction and the vertical direction were almost uniform, and no uneven concentration distribution was observed. This value was almost the same as the nickel concentration distribution in the conventional method prepared for comparison.
Furthermore, the surface treatment apparatus 10g is disposed immediately downstream of the surface treatment apparatus 10f, and is subjected to electrolytic plating (surface treatment) of copper having a thickness of about 8 μm.
Here again, the sample was cut as described above, and a peel strength test (JIS C 6471 8.1) between the copper layer and the polyimide film was performed. Specifically, the metal layer is etched to a width of 3 mm, and using a tensile strength tester (for example, TEST STAND MODEL-1310DW and FORCE ANALYZER EXPLORER II (both manufactured by Aiko Engineering Co., Ltd.)) This was confirmed by measuring the strength when the metal layer was peeled off at an angle of 90 °.

The peel strength of copper on the polyimide film is about 0.6 to 0.8 N / m immediately after the formation, and it is found that the peel strength by the sputtering method generally reported is inferior and very high. did.
The adhesion strength in the conventional liquid immersion method was significantly improved. Further, the value of about 0.4 N / m after high temperature treatment at 150 ° C. for 168 hours was maintained, and it was confirmed that the characteristic requirements of general mounting substrates were satisfied. This is the first example of immersion.
Such a result is excellent by the uniform surface treatment by the floating wall method in which the strip-like thin body S and the wall portion 12b adopted in the present embodiment are arranged close to each other and the surface treatment liquid X is held in the gap by the surface tension. It is presumed that the peel strength was obtained. Another possible cause is the elimination of scratches caused by rollers or the like on the surface to be processed.

Here, the surface scratches were evaluated by the oblique light method using the strip-like thin body S obtained in this example as a sample piece.
As a result, on the surface to be processed that was processed in the surface processing system 100 of the present example, no event that was recognized as a scratch was observed.
On the other hand, in the vertical method of tightening with a conventional roller or the like, many obvious scratches or the like were observed on the surface of the strip-shaped thin body when the roller was not accurately adjusted. After this, even if the roller was adjusted, it was difficult to eliminate surface scratches and the like.
As described above, the surface treatment liquid is held in a predetermined gap by utilizing the surface tension of the surface treatment liquid, and the conventional surface treatment liquid is drained by tightening the belt-like thin body with a roller. The difference in the number of scratches formed on the surface of the belt-like thin body between the structures is a natural result due to the difference in the fundamental principle of the processing apparatus employed.

Further, in the conventional configuration, the adjustment of the roller is very delicate, which becomes a major obstacle in the process and lowers the yield. On the other hand, in the present embodiment, since it is not necessary to adjust the roller with high accuracy, it is clear that there is no such problem.
As described above, in the surface treatment system 100 in which a plurality of the above-described surface treatment apparatuses 10a to 10g are arranged in series, different types of surface treatment can be continuously performed in each of the surface treatment apparatuses 10a to 10g. Therefore, even when it is necessary to perform a plurality of types of surface treatments on one surface to be processed, the predetermined processing can be performed very efficiently.
[Other Embodiments]
As mentioned above, although one Embodiment of this invention was described, this invention is not limited to the said embodiment, A various change is possible in the range which does not deviate from the summary of invention.

(A)
In the said embodiment, the wall part 12b arrange | positioned in proximity with the strip | belt-shaped thin body S gave and demonstrated the example which has a substantially flat surface. However, the present invention is not limited to this.
For example, as shown in FIGS. 5 and 6, both end protrusions 12e that protrude along the flow-down direction of the surface treatment liquid X from the surface of the wall 12b may be formed at both ends of the wall 12b. . According to this configuration, for example, even in the case where the surface treatment is performed while the strip-shaped thin body S is continuously conveyed in a predetermined direction, in the gap between the opposed surfaces of the strip-shaped thin body S and the wall portion 12b. It can suppress that the surface treatment liquid X hold | maintained leaks out from the both ends vicinity in a conveyance direction. As a result, a high-quality surface treatment can be more reliably performed on a predetermined surface to be treated of the thin strip S.

Further, as shown in FIG. 7, a plurality of rectifying units 12 f that are arranged at substantially equal intervals along the flow-down direction of the surface treatment liquid X on the surface of the wall 12 b and project from the surface facing the surface to be treated. It may be formed. According to this configuration, the flow of the surface treatment liquid X is such that the surface treatment liquid X flowing down in the minute gap between the wall 12b and the surface to be treated is separated into a strip shape in the lower region of the wall 12b. Disturbance can be prevented by the rectifying unit 12f.
Here, during the degreasing process in the surface treatment apparatus 10a in the above-described embodiment, the flow rate of the surface treatment liquid was increased and the thickness of the surface treatment liquid was increased to about 4 mm. It was recognized that the surface treatment liquid overflowing from the upper weir (see the weir portion 12c and the like in FIG. 1) was narrowed near the downstream, and the strip-shaped thin body S was swollen.

At this time, for example, when a total of seven rectifying plates and terminal rectifying plates having a height of about 3 mm were installed at intervals of about 5 cm as in the present embodiment, the swollen band-like thin body S was completely eliminated. At this time, since a steady flow was obtained, it is estimated that normal surface treatment was performed.
Further, when both end protrusions 12e and the rectification unit 12f are 0.5 to 2.0 mm lower than the thickness of the surface treatment liquid X, there is an effect in improving flow stability, and the surface from both ends is improved. There is an effect of preventing the flow of the processing liquid X from protruding. In addition, since the front-end | tip of the rectification | straightening part 12f is the state which sank in the surface treatment liquid X, the rectification | straightening part 12f does not contact the surface of the strip | belt-shaped thin body S directly. In particular, when the surface treatment liquid X has a thickness that exceeds the height of the weir portion 1c by about 3 to 4 mm, pulsation may be observed in the lower portion of the surface treatment liquid X that flows down, but a rectifying portion 12f is provided. Thus, the effect of suppressing the occurrence of this pulsation was recognized.

(B)
In the said embodiment, the example which performs the surface treatment using the surface treatment liquid X only on the single side | surface of the strip | belt-shaped thin body S was demonstrated and demonstrated. However, the present invention is not limited to this.
For example, as shown in FIG. 8, a processing unit 52 including a storage part 52a, a wall part (first wall part, second wall part) 52b, and a dam part 52c is arranged on each of the left and right sides of the thin strip S, A surface treatment apparatus 60 that performs simultaneous treatment on both sides using the surface treatment liquid X may be used.
In this case, the processing conditions and process conditions in the left and right processing units 52 may be the same as those in the above embodiment. Thus, it was found that the surface treatment liquid flows down very stably in the left and right gaps of the strip-shaped thin body S even when an extremely thin polyimide film of 12.5 μm is used as the strip-shaped thin body. And unlike the case of the single-sided processing described above, a stable surface treatment liquid flow and running of the strip-shaped thin body S were observed.

Here, in this embodiment, double-sided processing was performed through the same processing conditions and processes as in the above example, cut into a width of 20 cm every 50 m, and the distribution state of palladium was measured by ESCA. As a result, although the absolute density is low on both sides, there is no deviation in the length direction and the width direction in the concentration distribution, and the range is within ± 9% as a whole, and a result similar to the above example is obtained. It was.
In the case of such double-sided treatment, the surface treatment liquid flows down symmetrically from both sides of the strip-shaped thin body even when the strip-shaped thin body is very thin and easily becomes unstable during conveyance. The process could be done.
(C)
In the said embodiment, the example which performs the surface treatment using the surface treatment liquid X with respect to one strip | belt-shaped thin body S was demonstrated and demonstrated. However, the present invention is not limited to this.

For example, as shown in FIG. 9, a surface treatment apparatus 80 in which treatment units 72 including a storage unit 72 a and a weir unit 72 c are arranged on both the left and right sides around a wall (first wall) 72 b may be used. In this configuration, as shown in FIG. 9, the strip-like thin bodies S1 and S2 are arranged close to each other on the left and right sides of the wall 72b, and the surface treatment liquid X is caused to flow into the gap between the facing surfaces.
Thereby, surface treatment can be simultaneously performed with respect to the to-be-processed surface of each strip | belt-shaped thin body S1, S2. As a result, the production efficiency can be doubled in one surface treatment apparatus 80 as compared with the surface treatment apparatus 10 of the above embodiment.
(D)
In the embodiment described above, an example in which the surface treatment is performed on a predetermined surface while continuously conveying the sheet-like strip-shaped thin body S in a predetermined direction has been described. However, the present invention is not limited to this.

The workpiece to be surface-treated does not necessarily have to be continuously conveyed.
For example, it is possible to adopt a batch type processing method in which a surface treatment is performed by setting each object to be processed at a predetermined position.
However, when the object to be processed is transportable, such as in the form of a sheet, it is more preferable to adopt the processing method as in the above embodiment from the viewpoint of processing efficiency and production efficiency.
(E)
In the said embodiment, the example using the sheet-like strip | belt-shaped thin body S was given and demonstrated as a to-be-processed object. However, the present invention is not limited to this.
The object to be processed is not limited to a sheet-like object, and may be, for example, a plate-like object having a certain thickness. Or a block-shaped object may be sufficient.

Even in this case, a high-quality surface treatment is performed while utilizing the surface tension of the surface treatment liquid by arranging the treatment surface of the treatment object close to the first wall portion of the surface treatment apparatus. Can do.
(F)
In the said Example, the surface treatment apparatuses 10a-10g demonstrated and demonstrated the example which implemented the degreasing process, the purification process, the alkali hydrolysis process, the palladium provision process, the electrolytic plating process, etc., respectively. However, the present invention is not limited to this.
For example, a surface treatment other than the above may be performed using a different type of surface treatment liquid.
(G)
In the said embodiment, the example which provided the storage part 12a which temporarily stores the surface treatment liquid X supplied from the supply part 13 above the wall part 12b was demonstrated and demonstrated. However, the present invention is not limited to this.

For example, the structure which supplies a surface treatment liquid directly with respect to the clearance gap between the opposing surfaces of a to-be-processed surface and a 1st wall part from a supply part may be sufficient.
However, in order to alleviate the instability of the supply amount to the gap due to the variation in the supply amount of the surface treatment liquid from the supply unit, the surface treatment liquid is not directly supplied from the supply unit to the gap. Instead, it is more preferable to supply after having once stored in the storage part as in the above embodiment.
(H)
In the said embodiment and Example, although the example which surface-treats with respect to the to-be-processed object mentioned above was given and demonstrated by the surface-treating liquid and process conditions mentioned above, for example, the kind of surface-treating liquid and the to-be-processed object The processing conditions such as the conveyance speed can be appropriately changed according to each surface treatment.

  The surface treatment apparatus of the present invention has an effect that the surface treatment liquid can be prevented from moving to a portion other than the surface to be treated in the object to be treated, and a uniform and high quality surface treatment can be performed on the surface to be treated. Therefore, it can be widely applied to various surface treatments other than plating treatment.

Sectional drawing which shows the structure of the whole surface treatment apparatus which concerns on one Embodiment of this invention. FIG. 2 is a cross-sectional view taken along line AA in FIG. 1. The perspective view which shows the structure of the periphery of the process part contained in the surface treatment apparatus of FIG. The enlarged view which shows the Z section of FIG. The perspective view which shows the structure of the treatment part periphery containing a both-ends protrusion in the surface treatment apparatus which concerns on other embodiment of this invention. The top view which shows the structure of the both-ends protrusion periphery of FIG. The perspective view which shows the structure around the process part containing a rectification | straightening part in the surface treatment apparatus which concerns on further another embodiment of this invention. Sectional drawing which shows the structure of the surface treatment apparatus for double-sided processing which concerns on further another embodiment of this invention. Sectional drawing which shows the structure of the surface treatment apparatus which processes simultaneously to two strip | belt-shaped thin bodies based on further another embodiment of this invention. The front view which shows the structure of the surface treatment system comprised so that multiple surface treatment apparatuses of FIG. 1 might be included.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Surface treatment apparatus 10a-10g Surface treatment apparatus 11 Housing | casing part 12 Processing part 12a Storage part 12b Wall part (1st wall part)
12c Weir part 12d Support part 12e Both ends protrusion part 12f Rectification part 13 Supply part 13a Hole part 52 Processing part 52a Storage part 52b Wall part (1st wall part, 2nd wall part)
52c Weir part 60 Surface treatment apparatus 72 Processing part 72a Storage part 72b Wall part (1st wall part)
72c Weir part 80 Surface treatment apparatus 100 Surface treatment system d Crevice S, S1, S2 Strip thin body (object to be treated)
X Surface treatment solution X1 Interface

Claims (11)

A surface treatment apparatus for performing a surface treatment by flowing a surface treatment liquid along a surface to be treated,
A supply unit for supplying the surface treatment liquid;
The surface treatment liquid is disposed close to the surface to be treated with a predetermined minute gap, and the surface treatment liquid supplied from the supply unit is caused to flow down between the surface to be treated and the surface facing the surface. A first wall for surface treatment,
A surface treatment apparatus comprising: A transport mechanism for continuously transporting the long object to be processed in a predetermined direction along the longitudinal direction;
The surface treatment apparatus according to claim 1. A storage section that is disposed above the first wall section and the object to be processed, and that allows a predetermined amount of the surface treatment liquid to flow down while temporarily storing the surface treatment liquid supplied from the supply section; ing,
The surface treatment apparatus according to claim 1 or 2. A backing portion disposed in proximity to a surface opposite to the surface facing the first wall portion of the object to be processed;
The surface treatment apparatus of any one of Claim 1 to 3. The first wall portion includes a rectifying portion that protrudes from a surface facing the surface to be processed along a direction in which the surface treatment liquid flows down.
The surface treatment apparatus of any one of Claim 1 to 4. The first wall portion has both end protrusions protruding from a surface facing the surface to be processed along the flowing direction, in the vicinity of both end portions in a direction substantially perpendicular to the flowing direction of the surface treatment liquid. ing,
The surface treatment apparatus of any one of Claim 1 to 5. An adjustment mechanism for adjusting an interval between the surface to be processed and the opposing surface of the first wall portion;
The surface treatment apparatus of any one of Claim 1 to 6. The surface to be processed includes a front surface and a back surface of the surface to be processed which are opposed to the first wall portion,
A second wall portion disposed close to the surface to be processed on the back surface side;
The surface treatment apparatus of any one of Claim 1 to 7.   A surface treatment system in which a plurality of the surface treatment apparatuses according to any one of claims 1 to 8 are arranged along a conveying direction of the long object to be treated. In the method of keeping the wide surface of the long strip-shaped thin body running in the longitudinal direction substantially in the vertical direction, and surface treating one side or both sides of the strip-shaped thin body,
A surface treatment method of a floating wall system in which a surface treatment liquid is caused to flow down between side walls facing each other using the thin strip as a floating wall.   A strip-shaped thin body treated by the surface treatment method according to claim 10.

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