JP2003129281A - Device and process for electrolytic treatment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the running cost and improve the efficiency and stability of electrolytic treatment, to reduce the generation of vibration (flapping) of a material to be treated, and to reduce the amount of a treatment solution required. SOLUTION: The treatment solution is drooped between electrodes 3 and 4 hung in mutually opposing states by rectifier means 7 and 7, while moving the material to be treated S in a nearly horizontal direction between the electrodes 3 and 4 to conduct surface treatment of the material to be treated S.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention reduces the amount of treatment liquid required when performing electrolytic treatment such as plating treatment and degreasing treatment on a long workpiece such as a plate, and also improves the uniformity of treatment. The present invention relates to a technique suitable for use in an electrolytic treatment apparatus and an electrolytic treatment method for improvement.

[0002]

2. Description of the Related Art Conventionally, when a long member (object to be processed) is continuously subjected to electrolytic treatment such as plating, the object to be processed is placed in a liquid tank having a shape corresponding to the shape of the object to be processed. The solution has been passed through the filled processing solution and electrolysis such as plating has been performed therein. With such a configuration, a very large space is basically required, and it is difficult to increase the flow rate of the processing liquid with respect to the object to be processed.

As one example thereof, by flowing a large amount of processing liquid over the object to be processed, the flow rate of the processing liquid to the object to be processed is increased to shorten the processing time and reduce the running cost. there were. Further, as shown in FIG. 7, the electrodes 61, 61 immersed in the treatment liquid 60 in the liquid tank
In some cases, the electrolytic treatment is performed on the workpiece 65 moving vertically between the electrodes 62, 62.

In addition to this, there is known a structure in which a treatment liquid is flown into an electrode portion having vertically opposed electrodes, and an object to be treated which has been passed through the treatment liquid is vertically moved to perform electrolytic treatment. There is.

[0005]

However, in the method of pouring a large amount of processing liquid over the object to be processed, a large amount of processing liquid is required, and moreover, the amount of processing liquid used can be reduced without reducing the processing efficiency. Since it is difficult to reduce the running cost, there is a problem that further running cost reduction cannot be measured. Further, even in the above-described conventional method of passing the object to be processed between the electrodes, the gap between the electrodes is large and the processing liquid needs to be filled between the electrodes, so that the flow rate of the processing liquid between the electrodes can be reduced. There was a problem that it was difficult.

Further, when the treatment liquid is flowed between the electrodes in a direction (countercurrent or cocurrent) parallel to the moving direction of the object to be treated,
The flow rate of the treatment liquid may be different on both sides of the object to be treated,
In this case, a negative pressure is generated on one side, causing vibration (fluttering phenomenon) of the object to be processed and product quality to deteriorate, or damage due to the object being adhered to the electrodes between the electrodes and causing a short circuit. There was a problem that there is a possibility.

Further, in recent years, in order to improve the efficiency of electrolytic treatment, the flow velocity of the treatment liquid in the electrode is increased, the current density is increased, and the power consumption is reduced as much as possible, from the object to be treated to the electrode surface. Tends to be small, and at the same time,
The thickness of the object to be processed is becoming thinner and thinner, and vibration (fluttering phenomenon) is likely to occur. Moreover,
There are various kinds of materials to be treated, and there is a problem that vibration (fluttering phenomenon) depending on the material causes factors such as bending and wrinkles to cause product defects. If the distance between the electrodes is increased to prevent this vibration (fluttering phenomenon), the required amount of processing liquid will increase and the possibility that air bubbles will enter between the electrodes will cause non-uniform electrolytic processing. There was a problem that it would be easier to do.

Further, when the moving direction of the object to be processed and the flowing down direction of the processing solution between the electrodes are vertical, the processing solution leaks from the width direction side of the object to be processed. was there. At the same time, the flow rate of the treatment liquid may differ in the width direction of the object to be treated, and in such a state, there is a problem that the uniformity of the electrolytic treatment in the width direction of the object to be treated is reduced.

The present invention has been made in view of the above circumstances, and is intended to achieve the following objects. To reduce the running cost in electrolytic treatment. To reduce the occurrence of vibration (fluttering phenomenon) on the object to be processed. To reduce the amount of processing liquid. To improve the efficiency of electrolytic treatment. To achieve high stability of electrolytic treatment.

[0010]

According to the electrolytic treatment apparatus of the present invention, the treatment liquid is made to hang down between the electrodes which are vertically provided in a facing state, and the object to be treated is made to run substantially horizontally between the electrodes. The above problems were solved by performing the surface treatment of the object to be treated. In the present invention, the distance between the electrodes is 1
More preferably, it is set to 2 mm to 0.1 mm or less. The Reynolds number of the treatment liquid is 200 so that the flow of the treatment liquid between the electrodes of the present invention is turbulent.
It can be set to 0 or more. Further, in the present invention, it may be provided with a traveling means for traveling the object to be treated in a substantially horizontal direction, and a liquid supply means for supplying the treatment liquid substantially evenly in the traveling direction. . Further, it is possible to employ a means in which the liquid supply means is provided above the electrode. In the present invention, circulation means for circulating the treatment liquid from the electrode lower position to the liquid supply means can be provided. Further, it is desirable that a rectifying means for suspending the treatment liquid is provided. In addition, the rectifying means may be a rectifying member including a plurality of ridges of insulators provided in parallel with each other on the electrode surface. In the present invention, it is preferable to include an ultrasonic wave applying means for applying ultrasonic waves to the object to be processed between the electrodes. In the present invention, the frequency of the ultrasonic wave may be set such that the wavelength of the ultrasonic wave is smaller than ¼ of the interval dimension of the electrodes. In the present invention, the liquid supply means is provided with the ultrasonic wave applying means, or the ultrasonic wave applying means is located outside the electrode and applies ultrasonic waves from the outer surface of the electrode. be able to. In the electrolytic treatment method of the present invention, the above problem is solved by using the above electrolytic treatment apparatus.

In the electrolytic treatment apparatus of the present invention, the treatment liquid is made to hang down between the electrodes which are vertically provided, and the object to be treated is allowed to run in a substantially horizontal direction between the electrodes so that the surface treatment of the object to be treated is performed. By performing the, it is possible to perform a electrolytic treatment by moving a long object to be processed in a state substantially orthogonal to the flow direction of the processing liquid, it is difficult for bubbles to be mixed in the processing liquid, and, It is possible to reduce the liquid leakage from the side of the electrodes to reduce the distance between the electrodes and to reduce the required amount of processing liquid. At the same time, it is possible to prevent the flow rate of the treatment liquid from varying in the width direction of the object to be treated, and to prevent the reduction of the electrolytic treatment uniformity in the object width direction to be treated.

In the present invention, the distance between the electrodes is 12 m.
When the thickness is set to m or less, the treatment liquid between the electrode and the object to be treated is stabilized by the surface tension, it is possible to reliably prevent the inclusion of bubbles, and the distance between the electrodes can be reduced. In the state where it is possible to reduce the amount of liquid leakage from the side and further reduce the amount of processing liquid, it is possible to prevent a short circuit phenomenon due to vibration (fluttering) of the object to be processed or contact with the electrode. When the electrode gap (gap) is less than 0.1 mm, the flow velocity required to obtain turbulent flow becomes very large, the pressure loss becomes large, and further, the electrode and the object to be electrolyzed come into contact with each other. This is not preferable because the possibility of doing so increases.

According to the present invention, the Reynolds number of the treatment liquid is 2 so that the flow of the treatment liquid between the electrodes becomes turbulent.
By setting it to about 000 or more, it becomes possible to supply a larger amount of fresh treatment liquid to the surface of the object to be treated while preventing the flow of the treatment liquid on the surface of the object to be treated from becoming a laminar flow. Here, “fresh” means a state in which necessary components are not reduced or by-products are not increased by the electrolytic treatment.

Here, the Reynolds number is a length L (m) and a velocity U (m / m) in a flow such as a distance between an object to be processed and an electrode.
s), density ρ (kg / m ³ ), viscosity η (Pa · s),
It is a dimensionless number R made from the kinematic viscosity ν = η / ρ (m ² / s) and is represented by the following equation (1). R = ρLU / η = LU / ν (1) The Reynolds number R can be considered as the ratio of the magnitude of inertia to the magnitude of viscosity, and even if the size of the object, the flow velocity, and the type of fluid are different, the shapes of the objects are similar, and if the Reynolds numbers R are the same. The state of the flow does not change, so the Reynolds number R is extremely important as a characterizing flow. The Reynolds number in this treatment liquid is 200
When set to about 0 or less, the treatment liquid becomes a laminar flow between the electrodes, fresh liquid is not supplied to the surface side of the object to be treated, and the liquid flowing at a position away from the object contributes to the electrolytic treatment. It is not preferable because it does not happen.

Further, in the present invention, it is provided with a traveling means for traveling the object to be treated in a substantially horizontal direction, and a liquid supply means for supplying the treatment liquid substantially uniformly in the traveling direction. As a result, the running direction of the long workpiece is substantially horizontal, and the flow direction of the processing liquid is substantially vertical,
These can be made substantially orthogonal to each other, and when performing electrolytic treatment in this state, by supplying the treatment liquid substantially evenly along the traveling direction of the object to be treated, there is a difference in the electrolytic treatment in the traveling direction. It is possible to prevent the occurrence of. Here, the liquid supply means is a liquid supply pipe extending to the upper end position or the lower end position of the electrode along the traveling direction of the object to be processed, and this liquid supply pipe is provided along the extending direction. It is possible to have a slit that continuously penetrates or a liquid supply hole that intermittently penetrates, and a treatment liquid supply unit such as a pressurizing unit connected to both ends of the liquid supply pipe. Further, the liquid supply pipe can be housed inside, and a liquid supply outer pipe for feeding the processing liquid supplied from the liquid supply pipe between the opposite electrode ends can be provided. The liquid supply outer tube and the opposite electrode end can be sealed.

Further, by adopting the means for providing the liquid supply means at the upper position of the electrode, the processing liquid is supplied substantially uniformly in the traveling direction of the object to be processed at the upper position of the electrode, so that By flowing the treatment liquid between the electrodes, it becomes possible to supply the treatment liquid substantially evenly along the traveling direction of the object to be treated.

In the present invention, since the circulating means for circulating the treating liquid from the lower position of the electrode to the liquid supplying means is provided, the treating liquid flowing down between the electrodes is re-supplied to the upper position of the electrode again. Therefore, it is possible to reduce the total amount of treatment liquid required for electrolytic treatment,
Even when the electrolytic processing time is shortened by increasing the flow rate of the processing liquid, it is possible to prevent the total amount of the processing liquid from increasing.

Further, since the rectifying means for causing the processing liquid to hang down is provided on the facing surfaces of the electrodes, the flow direction of the processing liquid is set to be substantially horizontal with respect to the traveling direction of the processing object. It is possible to regulate in a substantially vertical direction and maintain these directions substantially orthogonal to each other, and at the same time, it is possible to supply fresh treatment liquid evenly to each portion along the traveling direction of the object to be treated. . As a result, it is possible to prevent reduction in the uniformity of electrolytic treatment in the traveling direction of the object to be processed, and to vibrate the object (flutter phenomenon).
It is possible to further prevent a short circuit phenomenon due to contact with the electrodes.

Since the rectifying means is a rectifying member composed of a plurality of ridges of insulators which are vertically provided in parallel with each other on the electrode surface, the flow direction of the processing liquid is defined as a substantially vertical direction. In addition, even if the object to be processed vibrates (flutters), it only contacts the ridges of the insulator and does not contact the electrode, so the electrode and the object to be processed are short-circuited. It can be prevented that the distance between the electrodes is reduced, and the required amount of the processing liquid can be reduced. At the same time, the flow direction of the processing liquid can be restricted to the vertical direction to further reduce the liquid leakage from the side of the electrode, and the distance between the electrodes can be reduced to reduce the required processing liquid amount. Is possible.

In the present invention, since the ultrasonic wave applying means for applying ultrasonic waves to the object to be processed between the electrodes is provided, the ultrasonic wave applied between the electrodes and the processing liquid cooperate with each other. Since the electrolytic treatment can be performed in this state, the efficiency of the electrolytic treatment can be improved. Furthermore, a large amount of fresh treatment liquid can be supplied to the surface of the object to be treated by the micro jet due to cavitation caused by ultrasonic waves, and the efficiency of electrolytic treatment can be improved.

[0021] In the present invention, the frequency of the ultrasonic wave is such that the wavelength of the ultrasonic wave is 1 / n of the interval dimension in the electrode.
When the ultrasonic wave is applied from the electrode upper end portion and / or the electrode lower end portion, the ultrasonic wave can be propagated to a sufficient position in the vertical direction between the electrodes. It will be possible. As a result, it is possible to apply sufficient ultrasonic waves to the object to be processed at a position separated from the grounding position of the ultrasonic wave applying means, which is the upper end of the electrode and / or the lower end of the electrode. Can be achieved.

According to the present invention, the liquid supply means is provided with the ultrasonic wave applying means, so that the ultrasonic wave applying means at the electrode upper end portion and / or the electrode lower end portion are separated from the grounded position. Sufficient ultrasonic waves can be applied to the object to be processed, and the efficiency of reliable electrolytic processing can be improved. Further, the ultrasonic wave applying means is located outside the electrode, and by applying ultrasonic waves from the electrode outer surface side, ultrasonic waves are applied from the electrode surface toward the object to be treated, and the ultrasonic wave and the treatment liquid are Since the electrolytic treatment can be performed in a cooperating state, the efficiency of the electrolytic treatment can be improved.

In the electrolytic treatment method of the present invention, since the electrolytic treatment apparatus described above is used, a small amount of treatment liquid can be used.
Uniform electrolytic treatment can be performed over the entire surface of the object to be treated.

[0024]

BEST MODE FOR CARRYING OUT THE INVENTION A first embodiment of an electrolytic treatment apparatus and an electrolytic treatment method according to the present invention will be described below with reference to the drawings. [First Embodiment] FIG. 1 is a front view showing an electrolytic treatment apparatus according to this embodiment, and FIG. 2 is a sectional view taken along the line II-II in FIG. In the figure, reference numeral 1 is an electrolytic treatment apparatus and S is an object to be treated.

As shown in FIG. 1, the electrolysis apparatus 1 according to the present embodiment has at least two rotatably erected as traveling means for traveling the strip (object to be processed) S in a substantially horizontal direction. A traveling roll 2, a pair of electrodes 3 and 4 located between the traveling rolls 2 and located on both front and back surface sides of the strip S and facing each other and spaced apart from each other, and upper end portions 3a of the electrodes 3 and 4, Liquid supply outer pipe 6 connected to 4a
And the liquid supply pipe 5 housed inside the liquid supply outer pipe 6.

Although only one traveling roll 2 is shown in the drawing, the electrodes 3, 2 are controlled by a control means (not shown).
Two pieces installed in parallel at both ends of 4 are rotated in synchronization with each other so that the strip (object to be processed) S travels in a substantially traveling direction indicated by an arrow T in the figure. It should be noted that the object S to be processed is not limited to one having flexibility, and in the case of a non-flexible object such as a silicon substrate, the object to be processed is used as the traveling means instead of the traveling roll 2. Any structure is possible as long as the object S can be traveled in the traveling direction T, such as a structure in which is pressed from both front and back surfaces.

The pair of electrodes 3 and 4 are erected so as to cover the entire width of the strip S, and as shown in FIG. 2, the electrode distance Da, which is the distance between the electrodes 3 and 4, is set to 12 mm or less. Has been done. The liquid supply outer pipe 6 is connected to the upper ends 3a and 4a of the electrodes 3 and 4 over the entire length of the electrodes 3 and 4 in the traveling direction T. A slit 6a having a width equal to the electrode interval Da between the electrodes 3 and 4 is provided on the bottom surface of the liquid supply outer tube 6 over the entire length of the electrodes 3 and 4, and the upper ends 3a and 4a of the electrodes 3 and 4 are formed. The slits 6a are connected to each other in a watertight state. Inside the liquid supply outer pipe 6, the liquid supply pipe 5 having a pipe diameter larger than the width dimension of the slit 6a is accommodated over its entire length,
At both ends of the liquid supply outer pipe 6, the outside of the liquid supply pipe 5 and the liquid supply outer pipe 6 are connected in a sealed state.

The liquid supply pipe 5 has a slit 5a which continuously penetrates the entire length of the electrodes 3 and 4 in the traveling direction T.
Is provided, and the slit 5a is set to the upper position of the liquid supply pipe 5, that is, the position opposite to the slits 6a of the liquid supply outer pipe 6 on the electrodes 3 and 4 side. A pressurizing unit (not shown), a treatment liquid storage tank, and the like are connected to both ends of the liquid supply pipe 5 so that the treatment liquid can be supplied into the liquid supply pipe 5. The liquid supply pipe 5, the liquid supply outer pipe 6, the pressurizing means, and the like, the processing liquid storage tank, and the like constitute liquid supply means.

In the liquid supply means of this embodiment, the Reynolds number of the processing liquid to be supplied is set to about 2000 or more. This makes it possible to supply more fresh processing liquid to the surface of the object to be processed S by making the flow of the processing solution on the surface of the object S not to be a laminar flow, that is, to be a turbulent flow. There is.

Here, the Reynolds number R is dimensionless,
Distance De between the object S to be processed and the electrodes 3 and 4 which are representative dimensions
On the other hand, the kinematic viscosity coefficient ν (m ² / s) of the processing liquid and the flow velocity U (m / s) of the processing liquid are expressed by the following formula (1 ′). R = ρU · De / η = U · De / ν (1 ′) The Reynolds number R can be regarded as the ratio of the magnitude of inertia to the magnitude of viscosity and can be said to characterize the state of flow.

When the Reynolds number in the treatment liquid is set to about 2000 or less, the treatment liquid becomes a laminar flow between the electrodes, and no fresh liquid is supplied to the surface side of the object S to be treated.
Further, the liquid flowing at a position away from the object to be treated S does not contribute to the electrolytic treatment, which is not preferable.

In order to set the Reynolds number, for example, the viscosity and the density of the processing liquid, the distance De which is the gap size between the electrodes 3 and 4 and the object S to be processed, and the flow velocity of the processing liquid are controlled to be predetermined values. Set the Reynolds number of. Here, Table 1 shows an example of a state in which these parameters are specifically set.

[0033]

[Table 1]

In Table 1, the gap De and the flow velocity U are set.

On the opposing surfaces of the electrodes 3 and 4, there are provided a plurality of ridges 7 as rectifying means for vertically flowing down the treatment liquid.
7 over the entire length of the electrolytic treatment region in the traveling direction T,
It is provided. The plurality of ridges 7, 7 are made of PTFE (Poly
tetrafluoroethylene), PVC (polyvinyl chloride)
) Or the like, or an insulating material such as ceramics, and extends in a vertical direction orthogonal to the traveling direction T larger than the width dimension of the strip S, and these are provided in parallel with each other. The thickness dimension Dw of the ridge 7 in the traveling direction T is set as shown in FIG. 1, and is set to about 1 mm. The height dimension Dt of the protrusion 7 protruding from the surfaces of the electrodes 3 and 4 is set as shown in FIG.
It is set to about 0.3 mm. The ridge distance Dp, which is the distance between the ridges 7 in the traveling direction T, is set as shown in FIG. 1 and is set to about 5 mm.

In the electrolytic treatment apparatus 1 of this embodiment, the treatment liquid is supplied to the liquid supply pipe 5 as the liquid supply means. Then, the processing liquid fills the liquid supply outer pipe 6 from the slit 5a substantially uniformly in the traveling direction T, and the processing liquid is filled between the slit 6a and the electrodes 3 and 4 and flows down in the vertical direction. In this state, the traveling means travels the workpiece S in the traveling direction T, and the electrodes 3 and 4 are energized by a power feeding means (not shown) to perform electrolytic treatment. As the electrolytic treatment, treatments such as plating treatment, electrolytic degreasing, electrolytic etching, and anodic oxidation can be applied.

At this time, the processing liquid supplied by the liquid supply means is provided between the electrodes 3 and 4 as the ridges 7, 7 as rectifying means.
And the object S to be processed is caused to travel in a substantially horizontal direction orthogonal to the flow direction of the processing liquid by the travel means, so that the side ends 3b and 4b of the electrodes 3 and 4 which are lateral to the direction T of travel. It is possible to reduce the amount of processing liquid required by reducing the liquid leakage of No. 2 and reducing the electrode distance Da, which is the distance between the electrodes 3 and 4. At the same time, it is possible to prevent the flow rate of the treatment liquid from varying in the width direction of the object to be treated S, to prevent the reduction of the electrolytic treatment uniformity in the object to be treated width direction, and to reduce the electrolytic treatment in the traveling direction T. It is possible to prevent a difference from occurring.

In the present embodiment, the electrode distance Da between the electrodes 3 and 4 is set to 12 mm or less, so that the treatment liquid between the electrodes 3 and 4 and the workpiece S is stabilized by the surface tension, Since it is possible to reliably prevent the inclusion of air bubbles and reduce the distance between the electrodes 3 and 4, it is possible to reduce liquid leakage from the side end portions 3b and 4b and further reduce the amount of processing liquid. In a possible state, it is possible to prevent vibration (fluttering) of the object S to be processed and a short circuit phenomenon due to contact with the electrodes 3 and 4.

By setting the Reynolds number of the treatment liquid to about 2000 or more, the flow of the treatment liquid on the surface of the object S to be treated can be made turbulent instead of being laminar, and more fresh. The treatment liquid can be supplied to the surface of the object S to be treated. For this reason, since the treatment liquid containing a sufficient amount of components necessary for the electrolytic treatment is constantly flowing down on the surface of the object S to be treated, the efficiency of the electrolytic treatment is not reduced.

As the liquid supply means, a liquid supply pipe 5 extending along the traveling direction T to the positions of the upper ends 3a, 4a of the electrodes 3, 4 is provided.
Is housed in the liquid supply outer tube 6, and the electrodes 3, 4 upper end portions 3 a, 4
Since the processing liquid supplied from the liquid supply pipe 5 is sent between the electrodes 3 and 4 facing each other by the liquid supply outer pipe 6 which is sealed between the electrodes 3 and 4, It is possible to reliably prevent the mixture of at the same time,
Since the treatment liquid supply amount in the traveling direction T can be set uniformly, it is possible to prevent a difference in electrolytic treatment in the traveling direction T.

Further, since the ridges 7 and 7 as the rectifying means are provided on the facing surfaces of the electrodes 3 and 4, the processing liquid is substantially horizontal with respect to the traveling direction T of the object S to be processed. Is defined as a substantially vertical direction, and these directions can be maintained in a state of being substantially orthogonal to each other, and at the same time, a treatment liquid containing a sufficient amount of components necessary for electrolytic treatment is provided in each portion along the traveling direction T. It is possible to supply it evenly.
As a result, it is possible to prevent reduction in the electrolytic treatment uniformity in the traveling direction T of the object to be processed S, and to further prevent vibration (fluttering phenomenon) of the object to be processed S. At the same time, even when the object S to be processed vibrates (flutters), direct contact with the electrodes 3 and 4 can be prevented by the protrusions 7 and 7 that are insulators.
4 and the object S to be processed can be prevented from being short-circuited. This makes it possible to reduce the distance between the electrodes 3 and 4 and to reduce the required amount of processing liquid. At the same time, the flow direction of the processing liquid is regulated in the vertical direction, and the electrode side end portions 3b, 4
It is possible to further reduce the liquid leakage from b, and further reduce the distance between the electrodes 3 and 4 to reduce the required amount of processing liquid.

The liquid supply pipe 5 and the liquid supply outer pipe 6 as liquid supply means may be provided so as to be in close contact with the lower ends 3c and 4c of the electrodes 3 and 4, instead of the upper ends 3a and 4a.

A second embodiment of the electrolytic treatment apparatus and electrolytic treatment method according to the present invention will be described below with reference to the drawings. [Second Embodiment] FIG. 3 is a view showing an electrolytic treatment apparatus according to the present embodiment and is a cross-sectional view taken along the line II-II in FIG. In the present embodiment, the first shown in FIG. 1 and FIG.
What is different from the embodiment is the point relating to the circulation means 8,
The other substantially corresponding components are designated by the same reference numerals, and the description thereof will be omitted.

In the present embodiment, as shown in FIG. 3, as the circulation means for circulating the processing liquid from the electrode lower end portions 3c and 4c to the liquid supply pipe 5 as the liquid supply means, the processing liquid is provided below the electrodes 3 and 4. Circulation container 8a located and this container 8a
There is provided a circulation unit 8 for sucking the processing liquid out of and supplying it to the end of the liquid supply pipe 5.

The container 8a can be made of the same material as the ridges 7 and 7. The container 8a has an edge portion 8b which surrounds the electrodes 3, 4 lower end portions 3c, 4c. The upper end 8c of the edge 8b is positioned higher than the lower ends 3c, 4c of the electrodes 3, 4 and the upper end 8c of the edge 8b is positioned lower than the lower end position of the workpiece S. It is set.

The circulation unit 8 is connected to the container 8a and sucks the processing liquid from the container 8a, and is connected to the end of the liquid supply pipe 5 to suck the processing liquid sucked from the container 8a. And pressurizing means for supplying to the end of the. This pressurizing means is also used as a pressurizing means in the liquid supply means, and the circulating processing liquid is mixed with new processing liquid and supplied to the liquid supply pipe 5. Here, the suction means is set to remove unnecessary components contained in the treatment liquid that has been subjected to the electrolytic treatment between the electrodes 3 and 4, and the pressurizing means circulates the electrodes. The treatment liquid re-supplied between 3 and 4 is set so that the concentrations of the components necessary for the electrolytic treatment have predetermined values.

In this embodiment, the same effects as those of the above-described embodiments can be obtained, and the container 8a and the circulation portion 8 are provided as the circulation means, so that the electrodes 3 and 4 flow down. Since the treatment liquid can be supplied again from the liquid supply pipe 5 to the upper positions of the electrodes 3 and 4, the total amount of the treatment liquid required for the electrolytic treatment can be reduced and the total amount of the treatment liquid used can be increased. It is possible to increase the flow rate of the treatment liquid in the non-operating state, and it is possible to prevent the total amount of the treatment liquid from increasing even when the flow velocity is increased to shorten the electrolytic treatment time.

The circulating means has a structure in which the treatment liquid flowing down between the electrodes 3 and 4 can be re-supplied from the lower end portions 3c and 4c of the electrodes 3 and 4 to the upper end portions 3a and 4a of the electrodes 3 and 4. Any structure may be used as long as it is not limited to the above configuration.

A third embodiment of the electrolytic treatment apparatus and electrolytic treatment method according to the present invention will be described below with reference to the drawings. [Third Embodiment] FIG. 4 is a view showing an electrolytic treatment apparatus according to the present embodiment, and is a sectional view corresponding to the line II--II in FIG. The present embodiment is different from the first and second embodiments shown in FIGS. 1 to 3 in that it relates to ultrasonic wave applying means, and other substantially corresponding components are designated by the same reference numerals. And its description is omitted.

In this embodiment, as shown in FIG. 4, the electrodes 3, 4 are formed on the outer surface of the electrode 3 during the electrolytic treatment.
An ultrasonic transducer 9A is provided as an ultrasonic wave imparting means for imparting ultrasonic vibration to the object S in the treatment liquid in between.

The ultrasonic vibrator 9A is an electrostrictive element such as PZT and is connected to an oscillator (not shown), and the ultrasonic vibrator 9A is fixed to the outer surface of the electrode 3. The ultrasonic oscillator 9A is provided on the outer surface of the electrode 3 so as to cover the object S to be processed between the electrodes 3 and 4. Specifically, it can be set corresponding to the range in which the rectifying means 7, 7 are provided. Here, the ultrasonic transducer 9A may cover the above range as a single structure, but may be provided corresponding to the above range as a plurality of parts.

Further, the ultrasonic transducer 9A is about 20 kHz.
It is preferable to be able to output ultrasonic vibrations having a frequency in the range of about 10 MHz from the point of being practical when performing electrolytic treatment, and in particular, between the electrodes 3, 4 and the portion to be treated and S. From the viewpoint of the thickness of the treatment liquid that can be held, a frequency of 0.2 MHz or higher is preferable, and a treatment of about 1 MHz is sufficiently possible.

During the electrolytic treatment, an ultrasonic frequency electric signal is oscillated from the oscillator and in response to this, the ultrasonic vibrator 9A
Generate ultrasonic vibrations, which are radiated from the surface of the electrode 3 and / or the ridges 7, 7 between the electrodes 3, 4. As a result, the electrolytic treatment is performed in a state where the ultrasonic waves applied between the electrodes 3 and 4 and the treatment liquid cooperate with each other. Distance De between the electrode 3 and the object S to be processed in ultrasonic processing
Is preferably 8 mm or less and not in contact with the workpiece S,
It is preferably 6 mm or less and a range in which the object S to be processed does not contact the electrode 3, and more preferably about 3 mm in a range in which the object S to be processed does not contact the electrode 3 or the ridge 7.

In this embodiment, the same effects as those of the above-described respective embodiments can be obtained, and ultrasonic waves for applying ultrasonic waves toward the object S to be processed between the electrodes 3 and 4 during the electrolytic treatment. By providing the vibrator 9A, the electrolytic treatment can be performed in a state where the ultrasonic waves applied between the electrodes 3 and 4 and the treatment liquid cooperate with each other, so that the efficiency of the electrolytic treatment can be improved. it can. That is, it is possible to supply a larger amount of fresh treatment liquid to the surface of the object S to be treated by the micro jet due to the cavitation caused by the ultrasonic waves, and it is possible to improve the efficiency of the electrolytic treatment.

The ultrasonic transducer A can be provided only on the outer surface of the electrode 4, or can be provided on both outer surfaces of the electrodes 3 and 4.

Furthermore, in the electrolytic treatment apparatus 1 of this embodiment,
It is also possible to provide the circulation means in the second embodiment together.

A fourth embodiment of the electrolytic treatment apparatus and electrolytic treatment method according to the present invention will be described below with reference to the drawings. [Fourth Embodiment] FIG. 5 is a view showing an electrolytic treatment apparatus according to the present embodiment and is a cross-sectional view taken along the line II-II in FIG. The present embodiment is different from the third embodiment shown in FIG. 4 in that it relates to an ultrasonic wave applying means, and other substantially corresponding components are designated by the same reference numerals and the description thereof will be omitted. .

In the present embodiment, the ultrasonic vibrator 9 as ultrasonic wave applying means is provided in the liquid supply outer tube 6 which is the liquid supply means.
B is provided. Like the ultrasonic transducer 9A, the ultrasonic transducer 9B is an electrostrictive element such as PZT, and an oscillator (not shown) is connected to the ultrasonic transducer 9B.
It is fixed on the upper surface of the liquid supply outer tube 6 in a mounted state. The liquid supply pipe 5 is made of a material and structure that allows ultrasonic waves to pass therethrough. It is also possible to dispose the liquid supply pipe 5 and use only the liquid supply outer pipe 6.

The ultrasonic oscillator 9B is provided so as to cover between the upper ends 3a and 4a between the electrodes 3 and 4. In particular,
The width Db is set to be larger than the electrode distance Da between the electrodes 3 and 4, and the traveling direction T is set.
In, the length dimension can be set corresponding to the range in which the rectifying means 7, 7 are provided. Here, the ultrasonic vibrator 9B may cover the above range as a single configuration, but may be provided corresponding to the above range as a plurality of parts.

Further, in the ultrasonic transducer 9B, the frequency of the ultrasonic vibration to be oscillated and the wavelength λ of the ultrasonic wave are the electrodes 3,
It is set to be smaller than 1/4 of the electrode interval Da which is the interval dimension in 4. That is, as shown in Expression (2), 4λ ≦ Da (2) is set. This indicates that the wavelength λ of the ultrasonic wave is set to 1/2 or less of the distance De between the electrodes 3 and 4 and the object S to be processed. 2λ ≤ De (2 ')

Further, the ultrasonic vibrator 9B may be constructed so as to be intermittently installed in the traveling direction T and fixed to the upper side of the liquid supply outer tube 6, and the ultrasonic vibration is made to flow down between the electrodes 3 and 4. Other configurations can be adopted as long as they can irradiate the liquid.

During the electrolytic treatment, an ultrasonic frequency electric signal is oscillated from the oscillator, and in response to this, the ultrasonic vibrator 9B is received.
Are radiated by generating ultrasonic vibrations. At this time, the wavelength λ of the ultrasonic wave is set to be smaller than 1/4 of the electrode distance Da which is the distance dimension in the electrodes 3 and 4, that is, between the electrodes 3 and 4 and the processing object S. By setting the distance De to be 1/2 or less, the ultrasonic vibration can be propagated as a traveling wave between the electrodes 3 and 4. As a result, the electrolytic treatment is performed on the object S to be processed in a state where the ultrasonic waves applied between the electrodes 3 and 4 cooperate with the processing liquid.

In this embodiment, the same effects as those of the above-described respective embodiments can be obtained, and ultrasonic waves for applying ultrasonic waves toward the object S to be processed between the electrodes 3 and 4 during the electrolytic treatment. By providing the vibrator 9B, the electrolytic treatment can be performed in a state in which the ultrasonic waves applied between the electrodes 3 and 4 and the treatment liquid cooperate with each other, so that the efficiency of the electrolytic treatment can be improved. . That is, it is possible to supply a larger amount of fresh treatment liquid to the surface of the object S to be treated by the micro jet due to the cavitation caused by the ultrasonic waves, and it is possible to improve the efficiency of the electrolytic treatment.

Here, the wavelength λ of the ultrasonic wave is set to be smaller than 1/4 of the electrode distance Da in the electrodes 3 and 4, that is, the distance between the electrodes 3 and 4 and the object S to be processed. Since it is set to 1/2 or less of De, the ultrasonic waves are sufficiently propagated to the position vertically separated from the ultrasonic vibrator 9B grounding position, which is the upper end portions 3a and 4a of the electrodes 3 and 4. It becomes possible. As a result, it is possible to apply sufficient ultrasonic waves to the object S to be processed at positions separated from the ground position of the ultrasonic transducer 9B, that is, in the vertical positions of the electrodes 3, 4 in the vertical direction. Therefore, it is possible to surely improve the efficiency of the electrolytic treatment.

Further, since the ultrasonic transducer 9B is located above the upper ends 3a, 4a of the electrodes 3, 4 along the entire length of the slit 6a in the traveling direction T, ultrasonic waves are applied substantially uniformly over the entire length of the traveling direction T. It becomes possible to
Since ultrasonic waves can be applied from the electrode surface toward the object to be treated and the ultrasonic waves and the treatment liquid can cooperate with each other to perform electrolytic treatment, a difference in electrolytic treatment in the traveling direction T is prevented. be able to.

Furthermore, in the electrolytic treatment apparatus 1 of this embodiment,
It is also possible to provide the circulation means in the second embodiment together. Further, it is possible to provide the electrolytic treatment apparatus 1 of the present embodiment with the ultrasonic transducer 9A of the third embodiment, and in this case, it is possible to reliably apply ultrasonic vibration to the object to be treated. Become.

A fifth embodiment of the electrolytic treatment apparatus and electrolytic treatment method according to the present invention will be described below with reference to the drawings. [Fifth Embodiment] FIG. 6 is a front view showing an electrolytic treatment apparatus according to the present embodiment. The present embodiment is different from the first embodiment shown in FIGS. 1 and 2 in that an electrolytic treatment apparatus 1 ′ that performs different electrolytic treatments along the traveling direction T is provided, and other substantially corresponding configurations are provided. The same symbols are attached to the elements and the description thereof is omitted.

In the present embodiment, the electrolytic treatment apparatus 1 and the electrolytic treatment apparatus 1 ′ are arranged in parallel along the traveling direction T of the object S to be treated, and the electrolytic treatment apparatus 1 ′ is substantially the same as the electrolytic treatment apparatus 1. It has the same configuration. Here, traveling rolls 2 as traveling means are provided on the upstream side of the electrolytic treatment apparatus 1 in the traveling direction T and on the downstream side of the electrolytic treatment apparatus 1 '. Although not shown, a draining mechanism and a rinsing mechanism are provided between the electrolytic treatment apparatus 1 and the electrolytic treatment apparatus 1 ′ so that the treatment liquid of the electrolytic treatment apparatus 1 is not brought into the electrolytic treatment apparatus 1 ′. It has become. In the electrolytic treatment apparatus 1, it is assumed that degreasing treatment is performed as electrolytic treatment, and the electrolytic treatment apparatus 1 ′ can be set to perform plating treatment, and different processes of these degreasing treatment and plating treatment can be performed. It is possible to carry out continuously.

As the treatment liquid used in the plating treatment, a nickel plating liquid containing nickel sulfate as a main component is applied, and the current condition at that time is 1 to
It is set to about 10 A / dm ² . A sodium hydroxide solution or the like is applied as the treatment liquid used in the degreasing treatment, and the current condition at that time is 1 to 10
It is set to about A / dm ² .

In this embodiment, the same effects as those of the above-described embodiments can be obtained, and in both the electrolytic treatment apparatus 1 and the electrolytic treatment apparatus 1 ', the flow direction of the treatment liquid supplied by the liquid supply means. Is set to be vertically downward by the ridges 7 and 7 as the rectifying means between the electrodes 3 and 4, and the traveling direction of the object S to be processed is set in the substantially horizontal direction orthogonal to the flow direction of the treatment liquid by the traveling means. By being able to set, it is possible to continuously perform different processes on the workpiece S, and
In each of the electrolytic treatment apparatuses 1 and 1 ', since the liquid leakage from the end portions 3b and 4b on the side of the electrodes 3 and 4 can be reduced, different processes are continuously performed on the workpiece S without the treatment liquid being mixed. You can do it.

In a state where different processes are continuously performed, it is possible to reduce the electrode interval Da, which is the distance between the electrodes 3 and 4, to reduce the required amount of processing liquid.
At the same time, it is possible to prevent vibration (fluttering) of the object S to be processed and a short circuit phenomenon due to contact with the electrodes 3 and 4 in a state where different processes are continuously performed. Further, even when the object S to be processed vibrates (flutters) in a state in which different processes are continuously performed, it is possible to prevent the protrusions 7 and 7 which are insulators from directly contacting the electrodes 3 and 4. Therefore, it is possible to prevent the electrodes 3 and 4 and the object to be processed S from being short-circuited. By these, in each process, the distance between the electrodes 3 and 4 can be reduced,
Since it is possible to reduce the required amount of the processing liquid, it is possible to further reduce the liquid leakage from the electrode side end portions 3b and 4b by regulating the flow direction of the processing liquid to the vertical direction. Therefore, it is possible to reduce the required amount of processing liquid.

In the present embodiment, the two different processes are set to be continuously performed, but the same process may be performed a plurality of times or two or more types of processes may be continuously performed. It is also possible to do so. In this case, for example, electrolytic degreasing, base nickel plating, silver strike plating, and silver plating can be continuously performed.

Further, in the present embodiment, the circulation means in the second embodiment can also be provided side by side in each electrolytic treatment apparatus 1, 1 '. Also, the electrolytic treatment apparatus 1, 1 ′ of the present embodiment is provided with the ultrasonic transducer 9A of the third embodiment or the ultrasonic transducer 9B of the fourth embodiment, or these are provided together. Is also possible.

[0074]

According to the electrolytic treatment apparatus and the electrolytic treatment method of the present invention, the treatment liquid is made to hang down between the electrodes which are vertically provided in a facing state, and the object to be treated is made to travel in a substantially horizontal direction between the electrodes. By performing the surface treatment of the object to be treated, it becomes possible to carry out the electrolytic treatment by moving a long object in a state substantially orthogonal to the flow direction of the treatment liquid, so that bubbles in the treatment liquid Is less likely to mix, and liquid leakage from the side of the electrodes can be reduced, the distance between the electrodes can be reduced, and the required amount of processing liquid can be reduced. At the same time, it is possible to prevent the flow rate of the treatment liquid from varying in the width direction of the object to be treated and to prevent the reduction of the electrolytic treatment uniformity in the width direction of the object to be treated.

[Brief description of drawings]

FIG. 1 shows a first electrolytic treatment apparatus according to the present invention.
It is a front view showing an embodiment.

FIG. 2 is a II-I of the electrolytic treatment apparatus in FIG.
It is a cross-sectional arrow view showing the I cross section.

FIG. 3 is a second part of the electrolytic treatment apparatus according to the present invention.
It is sectional drawing which shows embodiment.

FIG. 4 is a third part of the electrolytic treatment apparatus according to the present invention.
It is sectional drawing which shows embodiment.

FIG. 5 is a fourth embodiment of the electrolytic treatment apparatus according to the present invention.
It is sectional drawing which shows embodiment.

FIG. 6 is a fifth part of the electrolytic treatment apparatus according to the present invention.
It is a front view showing an embodiment.

FIG. 7 is a sectional view showing an example of a conventional electrolytic treatment apparatus.

[Explanation of symbols]

1, 1 '... Electrolytic treatment device 2 ... Traveling roll (traveling means) 3, 4 ... Electrodes 3a, 4a ... upper end 3b, 4b ... Side end 3c, 4c ... lower end 5 ... Liquid supply pipe 5a ... slit 6 ... Liquid supply outer tube 6a ... slit 6b ... Element fixing part 7 ... Ridge (rectifying means) 8 ... Circulation section (circulation means) 8a ... Container (circulation means) 8b ... edge 8c ... upper end 9A ... Ultrasonic transducer (ultrasonic wave applying means) 9B ... Ultrasonic transducer (ultrasonic wave applying means) Da ... Electrode spacing Dp ... ridge spacing S ... Strip (processing object)

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Shinichi Nagano             1-7 Aki, Otsuka-cho, Yukiya, Ota-ku, Tokyo             Su Electric Co., Ltd. F term (reference) 4K024 CA12 CB03 CB11 CB15 EA04

Claims (13)

[Claims] 1. The surface treatment of the object to be processed is carried out by causing the object to be processed to run substantially horizontally between the electrodes while the processing liquid is made to hang down between the electrodes which are provided in a facing state. Electrolytic treatment device. 2. The distance between the electrodes is 12 mm to 0.1 m
The electrolytic treatment apparatus according to claim 1, wherein the electrolytic treatment apparatus is set in a range of m. 3. The Reynolds number of the treatment liquid is 200 so that the flow of the treatment liquid between the electrodes becomes turbulent.
The electrolytic treatment apparatus according to claim 1, wherein the electrolytic treatment apparatus is set to 0 or more. 4. A traveling means for traveling the object to be treated in a substantially horizontal direction, and a liquid supply means for supplying the treatment liquid substantially evenly in the traveling direction. The electrolytic treatment apparatus according to claim 1. 5. The electrolytic processing apparatus according to claim 4, wherein the liquid supply unit is provided at an upper position of the electrode. 6. The electrolytic processing apparatus according to claim 5, further comprising a circulation means for circulating the processing liquid from the lower position of the electrode to the liquid supply means. 7. The electrolytic treatment apparatus according to claim 1, further comprising rectifying means for suspending the treatment liquid. 8. The electrolytic treatment apparatus according to claim 7, wherein the rectifying means is a rectifying member including a plurality of ridges of insulators provided on the electrode surface in parallel with each other. 9. The electrolytic processing apparatus according to claim 1, further comprising ultrasonic wave applying means for applying ultrasonic waves to the object to be processed between the electrodes. 10. The electrolytic treatment apparatus according to claim 9, wherein the frequency of the ultrasonic wave is set such that the wavelength of the ultrasonic wave is smaller than ¼ of the interval dimension of the electrodes. 11. The ultrasonic wave applying means is provided in the liquid supply means.
Or the electrolytic treatment apparatus according to 10. 12. The electrolytic treatment apparatus according to claim 9, wherein the ultrasonic wave applying means is located outside the electrode and applies ultrasonic waves from the outer surface side of the electrode. 13. An electrolytic treatment method using the electrolytic treatment apparatus according to claim 7.