TW541569B - Photo treatment device - Google Patents

Photo treatment device Download PDF

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Publication number
TW541569B
TW541569B TW091100841A TW91100841A TW541569B TW 541569 B TW541569 B TW 541569B TW 091100841 A TW091100841 A TW 091100841A TW 91100841 A TW91100841 A TW 91100841A TW 541569 B TW541569 B TW 541569B
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TW
Taiwan
Prior art keywords
lampshade
processing device
light processing
patent application
lamp
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Application number
TW091100841A
Other languages
Chinese (zh)
Inventor
Hiromi Sakamoto
Yutaka Hasegawa
Original Assignee
Japan Storage Battery Co Ltd
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Application filed by Japan Storage Battery Co Ltd filed Critical Japan Storage Battery Co Ltd
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Publication of TW541569B publication Critical patent/TW541569B/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Cleaning In General (AREA)
  • Liquid Crystal (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)

Abstract

The present invention provides an photo treatment device capable of easily performing maintenances such as internal cleaning or inspection, and exchanging parts even though its main body is enlarged. A lamp mask is disposed on the opening of the upper surface of a main body, and the lamp arranged in the lamp mask emits light on the processed object in the main body, thereby providing a feature in that the lamp mask can be rotated to open/close by taking a lateral rotating axis extended to the front and back direction of the main body. Accordingly, because the lamp mask can be laterally opened, it is able to perform maintenance operation from the back of the device body without being shielded by the lamp mask, so as to easily perform maintenance even the size of the device is enlarged. In addition, because it is able to perform maintenance operation in the front and back directions of the main body, the photo treatment device can be arranged with other processing devices in its left and right directions without damaging the convenience of the maintenance operation, so as to form a suitable manufacturing line.

Description

541569 A7 B7 五、發明説明(1 ) 【技術領域】 本發明係關於例如有機物淸洗或淸除等所使用之紫外 線處理裝置等之光處理裝置。 【背景技術】 例如,構成彩色液晶顯示面板之濾色器,乃是在玻璃 基板塗敷紅,綠,藍色之抗蝕劑所製成,並在其製作工程 中進行淸洗。該淸洗爲更提高淸洗效果卻被拼用使用純水 之濕式淸洗法及U V /〇3淸洗法予以進行。該U V /〇3 淸洗法則是利用紫外線之低分子化有機物,與紫外線所致 自空氣中氧氣生成臭氧及氧氣之活性基團以除去有機物, 爲一種紫外線處理。 第1 0圖爲該種淸洗工程所需之淸洗裝置一例示槪略 構成圖,第1 1圖爲該淸洗裝置所用紫外線處理裝置之開 放狀態立體顯示圖。本淸洗裝置係爲針對紫外線處理裝置 5 0正面,於其左右兩側連接分別設有紅外線預熱處理裝 置6 0與冷卻處理裝置7 0,並在冷卻處理裝置7 0右側 連接予以配置濕式淸洗處理裝置8 0所構成之輸送帶搬運 式處理裝置,復在其左右連接另別工程所需處理裝置而構 成一連串之生產線。 如第1 1圖所示,紫外線處理裝置5 0之本體5 1內 則設有具多數搬送滾輪5 2之搬送裝置,藉此能將被處理 物之多數張玻璃基板(未圖示)載置於搬送滾輪5 2上, 依序向第10圖及第11圖之箭頭方向予以搬運。本體 本纸張尺度適用中國國家標準(CNS ) Α4規格(21 〇 X 297公釐) -* i- I - I -I— - I - - - - I (請先閱讀背面之注意事項再填寫本頁) 訂 -觀- 經濟部智慧財產^員工消費合作社印製 -4- 541569 A7 B7 五、發明説明(2 ) 5 1上面開口部乃由燈罩5 3可加以開閉,且該燈罩5 3 裝設有爲紫外線處理所需之多數紫外線燈管5 4。而該燈 罩5 3可自本體5 1正面向後方開閉自如地介由鉸鏈5 5 被裝設於本體5 1後側壁部,並爲維持啓開狀態,在燈罩 5 3前緣部與本體5 1前側壁部之間,跨過開口部設有氣 體阻尼式之支撐桿5 6。 惟,如此光處理裝置需要進行搬送滾輪5 2及燈管 5 4之定期性淸掃,檢查,更換作業,且該等保養作業卻 如圖1 1所示需以燈罩5 3呈開放狀態加以進行。又,採 用不易損傷被處理物之玻璃基板之樹脂製搬送滾輪5 2時 ,由於易受紫外線,熱,臭氧等所致之劣化作用,故需要 頻繁進行更換。 然,習知光處理裝置係呈將燈罩5 3自正面向後方開 放,致保養作業僅能由本體5 1前面側進行。尤其,近年 ,由於液晶面板用玻璃基板在進行大型化,光處理裝置全 體亦呈大型化之傾向,而在如此傾向中,僅能由裝置前面 側進行作業時,變成手無法到達裝置後部,乃有保養作業 極爲困難之問題。又,將燈罩5 3保持於開放狀態之支撐 桿5 6由於呈跨越被處理物上方之形態,故尙有自該支撐 桿5 6掉落塵埃附著於被處理物之問題。 本發明則是因應如上述問題而開放者,以提供一種本 體雖被大型化,亦能容易進行內部淸掃或檢查,零件更換 等保養作業之光處理裝置爲目的。 本紙張尺度適用中國國家標準(CNS ) A4規格(210X 297公釐) L---------·!裝—— (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產苟員工消費合作社印製 -5- 541569 A7 __ B7 五、發明説明(3 ) 【發明之開示】 i (請先閲讀背面之注意事項再填寫本頁) 本發明係爲在本體頂面所具開口部予以被覆配置燈罩 ,且使該燈罩所設燈管對本體內被處理物進行光線照射之 光處理裝置,而具有以延伸於本體前後方向之橫型旋轉軸 爲中心使燈罩可轉動開閉之特徵。 依據該構成,由於能將燈罩予以橫向啓開,不被燈罩 所遮住可自裝置本體背面進行保養作業,致裝置被大型化 時亦能容易進行保養。又,由於能自本體前後兩方向進行 保養作業,故在光處理裝置左右方向配置其他處理裝置, 亦能不損及保養作業之容易性,而予以組成生產線。 【圖示之簡單說明】 第1圖爲玻璃基板淸洗裝置全體之正視顯示圖 第2圖爲本實施例有關光處理裝置之燈罩呈開放狀態 之立體圖 第3圖爲燈罩呈開放狀態顯示之光處理裝置部分側視 圖 經濟部智慧財產局員工消費合作社印製 第4圖爲鉸鏈機構擴大側視圖 第5圖爲燈罩呈開放狀態顯示之光處理裝置正視圖 第6圖爲燈罩呈關閉狀態顯示之部分擴大剖面圖 第7圖爲顯示燈管端部裝設構造之部分擴大剖面圖 第8圖爲顯示不同實施例之燈罩呈關閉狀態之部分擴 大剖面圖 第9圖爲更不同實施例之燈罩呈開放狀態顯示之光處 本紙張尺度適用中國國家標準(CNS ) A4規格(210X 297公釐) -6- 541569 A7 B7 五、發明説明(4 ) 理裝置部分側視圖 第1 0圖爲習知淸洗裝置全體之正視顯示圖 第11圖爲習知淸洗裝置之立體顯示圖 主要元件對照表 10 紫外線灰化裝置 11 本體 111 前側壁部 112 後側壁部 12 燈罩 12 1 箭頭方向 1 2 3 底面板 13 輸送帶框架 14 輸送帶轉軸 15 搬送浪輪 16 纟父鍵機構 161 旋轉臂 162 支承臂 163 橫型旋轉軸 164 潤滑構件 17 中間桿 171 密封構件 18 支撐桿 18 1 缸體 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) L---.-----·!裝·— I (請先閲讀背面之注意事項再填寫本頁) 、\吕 經濟部智慧財產局員工消費合作社印製 541569 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明(5 ) 18 2 桿體 19 燈管 191 封口部 1 9 2 玻璃管部 2 0 固定部 2 1 保持夾 2 2 伸縮管 23 冷卻水路 2 4 供水管 2 5 排水管 3 1 紅外線預熱裝置 3 2 冷卻裝置 3 3 濕式淸洗裝置 50 紫外線處理裝置 5 1 本體 5 2 搬送浪輪 5 3 燈罩 54 紫外線燈管 5 5 鉸鏈 5 6 支撐桿 60 紅外線預熱處理裝置 7 0 冷卻處理裝置 80 濕式淸洗處理裝置 L---.-----·!裝-- (請先閱讀背面之注意事項再填寫本頁) 、11 本紙張尺度適用中國國家標準(CNS ) A4規格(210X 297公釐) -8- 541569 A7 B7 五、發明説明(6 ) 【發明之最佳實施形態】 (請先閲讀背面之注意事項再填寫本頁) 以下就將本發明適用於淸洗液晶顯示器用玻璃基板之 紫外線灰化裝置1 0的一實施形態參照第1圖乃至第7圖 加以說明。 如第1圖所示,淸洗作業線自紫外線灰化裝置1 0予 以正視,係在其左側接連設置紅外線預熱裝置3 1,及在 其右側接連設置冷卻裝置3 2,更在冷卻裝置3 2右側接 連配設濕式淸洗裝置3 3所構成,且將相當於被處理物之 未圖示玻璃基板如同圖中箭頭所示自左側依序搬運至右側 〇 經濟部智慧財產局員工消費合作社印製 紫外線灰化裝置1 0之本體1 1乃呈頂面爲開口之箱 形,閉塞於其開口部配置有兩個燈罩1 2。在本體1 1內 部則沿其前側壁部1 1 1及後側壁部1 1 2平行成對設有 兩輸送帶框壁1 3,且在輸送帶框壁1 3間介由未圖示之 軸承將前後方向延伸之多數輸送帶轉軸1 4予以轉動自如 地支承。各輸送帶轉軸1 4卻分別被裝設多數個氟樹脂製 滾輪1 5,而藉本體1 1內所設驅動裝置予以轉動驅動輸 送帶轉軸1 4,係可搬運載置於滾輪1 5上之玻璃基板。 自本體1 1前面視之,位於左側之燈罩1 2如第3圖 所示,其左側緣之前後兩端部乃介鉸鏈機構1 6被本體 1 1之前側壁部1 1 1及後側壁部1 1 2加以支承,本體 1 1頂面開口部之左半部即由該燈罩1 2可予以開閉於左 向。3亥纟父鍵機構1 6則如第4圖所市,由沿本體1 1 _後 方向延伸之橫型旋轉軸1 6 3予以連接自燈罩1 2側延伸 本紙張尺度適用中國國家標準(CNS ) A4規格(210X 297公釐) -9- 541569 A7 B7 五、發明説明(7 ) L---------·'衣丨丨 (請先閲讀背面之注意事項再填寫本頁) 之一對旋轉臂1 6 1,與自本體1 1側延伸之支承臂 1 6 2所構成,於是,以該橫型旋轉軸1 6 3爲中心,目亥 左側之燈罩1 2在第5圖以兩點鎖線所示關閉位置與同圖 以實線所示開放位置之間可沿箭頭方向1 2 1轉動開閉。 又,橫型旋轉軸1 6 3與支承臂1 6 2間卻被插設潤滑構 件 1 6 4。 另,自本體1 1前面視之,位於左側之燈罩1 2亦同 樣,其右側緣之前後兩端部乃介鉸鏈機構1 6被本體1 1 之前側壁部1 1 1及後側壁部1 1 2所支承,本體1 1頂 面開口部之右半部即由該燈罩1 2可予以開閉於橫向。該 鉸鏈機構1 6則與左側者相同具有沿本體1 1前後方向延 伸之橫型旋轉軸1 6 3,因此,以該橫型旋轉軸1 6 3爲 中心,該右側之燈罩1 2在第5圖以兩點鎖線所示關閉位 置與同圖以實線所示開放位置之間可沿箭頭方向1 2 2轉 動開閉。 經濟部智慧財產局員工消費合作社印製 又,本体1 1開口部之左右方向中間部及兩燈罩1 2 之鉸鏈機構1 6側係分別設有裝脫自如之前後方向延伸之 中間桿1 7,如第6圖所示,該等中間桿1 7上面左右兩 側設有前後延伸之兩條密封構件1 7 1。當各燈罩1 2被 轉動於關閉位置時,其底面板1 2 3即密著於各中間桿 1 7之密封構件1 7 1 (中央之中間桿1 7在第6圖有擴 大顯示)。又,該燈罩1 2之底面板1 2 3亦呈可密著於 未圖示之配置於兩輸送帶框壁1 3上面之密封構件,藉此 予以密封燈管1 9下方空間(玻璃基板搬運空間)以防止 本紙張尺度適用中國國家標準(CNS ) A4規格(210X 297公釐) 10- 541569 Α7 Β7 五、發明説明(8 ) 紫外線之外浅或臭氧之漏出。 L---.-----·!裝-- (請先閱讀背面之注意事項再填寫本頁) 各燈罩1 2之前後兩端部與本體1 1之前側壁部 1 1 1及後側壁部1 1 2之間分別設有支撐桿1 8。該支 撐桿1 8爲在缸體1 8 1內滑動自如收容桿體1 8 2所構 成之眾知氣體阻尼式者,其桿體1 8 2經常被激勵於自缸 體1 8 1突出之方向,且可保持燈罩1 2之開放狀態。 經濟部智慧財產局員工消費合作社印製 燈罩1 2中之位於關閉位置時呈下面之部分,則配置 有紫外線照射所需之多數燈管1 9。如第2圖及第3圖所 示,該燈管1 9全體雖呈略等長於上述輸送帶框壁1 3間 之對向間隔之長件形狀,惟封口部1 9 1卻位在本體1 1 前側,其玻璃管部1 9 2於本體1 1後側彎曲折返後,又 在前側彎曲折返,復再於後側折返狀彎曲,而呈Μ字形狀 之彎曲型燈管。該封口部1 9 1乃螺扣於燈罩1 2所設之 固定部2 0被予以固定,該玻璃管部1 9 2後端部如第7 圖所示,藉螺定之保持夾2 1加以卡止於燈罩1 2之底面 板1 2 3。封口部1 9 1所連接之電線群(未圖示)即被 集合於燈罩1 2內1前側,通過燈罩1 2前端部與本體之 間所設撓性伸縮管2 2內,而與本體1 1內之未圖示電源 裝置相接。 又,燈罩1 2內尙設有冷卻水路2 3,該冷卻水路 23之供水管24及排水管25係如第2圖所示,自上述 伸縮管2 2反側之燈罩1 2後端部被予以引出後,與本體 1 1內之未圖示冷卻水供應裝置相連接。 被設成上述構成之本實施例光處理裝置1 0,當被驅 本紙張尺度適用中國國家標隼(CNS ) Α4規格(210Χ297公釐) -11 - 541569 A7 B7 五、發明説明(9 ) (請先閱讀背面之注意事項再填寫本頁) 動其搬送裝置時,被處理物之附著抗蝕劑之液晶顯示器用 玻璃基板即自第1圖之左側被搬運至右側。玻璃基板在紅 外線預熱裝置3 1搬送時被加熱,該加熱之玻璃基板則被 搬送至適用本發明之光處理裝置1〇,在其中進行抗鈾劑 之灰化處理。接著,將經過灰化處理之玻璃基板搬送至冷 卻裝置3 2內予以冷卻,再將已冷卻玻璃基板搬送至濕式 淸洗裝置3 3內加以濕式淸洗。又,本實施例光處理裝置 1 0亦可予以設置供應高濃度臭氧之臭氧發生器以更有效 進行灰化處理。且,爲更加提昇光處理裝置之處理能力, 亦可拼用促進玻璃基板之昇溫或自臭氣之氧氣活性基生成 之加熱功能。 經濟部智慧財產局員工消費合作社印製 在如此光處理裝置,欲進行搬送裝置之保養作業,例 如輸送帶轉軸1 4之軸承修理.檢查,搬送滾輪1 5之更 換等,或燈管1 9之更換時,係掀開燈罩1 2進行。各燈 罩1 2由於以沿鉸鏈機構1 6前後延伸之橫型旋轉軸 1 6 3爲中心予以轉動開放,致如第2圖所示呈左右方向 掀開之橫開狀態。因此,例如前側之軸承或搬送滾輪1 5 之保養,操作者可站在本體1 1前側進行作業,後側之軸 承或搬送滾輪1 5之保養,操作者可轉入本體1 1後側加 以進行作業。 又,各燈罩1 2前端部乃將燈管1 9之封口部1 9 1 固定於燈罩1 2所用螺孔之固定部2 0沿與燈罩1 2之橫 型旋轉軸1 6 3呈垂直方向予以排列,且將燈管1 9以裝 設螺絲固定於該固定部2 0。因此,本裝置,雖裝置被大 本紙張尺度適用中國國家標準(CNS ) A4規格(210 X 297公釐) -12- 541569 A7 B7 五、發明説明(1〇 ) (請先閱讀背面之注意事項再填寫本頁) 型化亦通谷易進行燈管1 9之更換作業。例如,被處理物 之玻璃基板大小爲搬送寬幅1 m時,針對第1 〇圖所示習 知裝置,將多數紫外線燈管5 4與燈罩5 0之開閉轉軸 5 5平行排列以螺絲予以配設於開閉轉軸5 5之反側,致 燈罩50啓開時螺定部變高(啓開角度30。〜45。, 亦略呈1 · 9 m〜2 · 5m),需要腳凳,本裝置在燈罩 5〇啓開角度爲9 0°時,亦能僅使螺定位置變高1 . 5 m左右。如是,本發明裝置特別適於輸送帶搬運幅度對應 較寬被處理物之處理裝置。 經濟部智慧財產局員工消費合作社印製 又,本實施例之光處理裝置異於第1 〇圖所示習知構 造,燈罩1 2之支撐桿1 8並非呈跨越於被處理物之搬運 路上之形態,而是呈位於本體1 1之前側壁部1 1 1及後 側壁部1 1 2上方之形態,致自支撐桿1 8掉落桿體 1 8 2之磨損粉或潤滑油之油霧,亦不會附著於被處理物 。且,.比起習知跨過搬運路予以裝設,由於具有不必受制 於搬運路寬幅可將支撐桿1 8適當設計之優點,故本實施 例之長度可使用比習知裝置較短者。又,支撐桿1 8之本 體1 1側連結處所爲前側壁部1 1 1及後側壁部1 1 2之 任一處所均可,亦包括固定於輸送帶框壁1 3。又,支撐 桿1 8如本實施例可予以裝設於燈罩1 2前後雙方,或僅 裝設於前後任一方。 又,上述實施例由於將兩燈罩1 2以左右成對設成雙 向啓開型,且在本體1 1設置前後延伸之中間桿1 7並予 以接觸於燈罩1 2之鉸鏈機構1 6反側端緣,故能將本體 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) -13- 541569 Α7 Β7 五、發明説明(11 ) 1 1頂面開口部以燈罩1 2加以完全密閉。藉此,可確實 防止供給本體1 1之搬運路內之臭氧洩漏,及燈管1 9之 紫外線外漏。 況且,本實施例之燈管1 9係使用Μ字形狀之彎曲型 燈管,致能將多數燈管1 9之所有封口部1 9 1予以聚集 於一端側配置。其結果,可將電氣配線部分集中於一端側 配置,在另端側配置冷卻水之供應.排出管路,以進行將 電氣配線部分與水環流部分予以分開之安全合理的設計。 又,本發明並非被限定於上述實施例,例如下述在不 變更本發明要旨之範圍內予以各種變更加以實施。 經濟部智慧財產局員工消費合作社印製 (1 )上述實施形態雖將燈罩1 2設成兩個,惟不限 於此,予以設成以一個燈罩開閉本體1 1全體之構造亦可 ,或予以設成以三個以上燈罩開閉之構造亦可。且由於將 被覆於同一面積開口部之燈罩數愈增加愈能使其寬幅狹窄 ,致能減低其啓開狀態時之高度。又,設置多數燈罩時, 予以設成互相同向啓開,或予以設成成對互相反向啓開之 雙向啓開型均可。如此設置多數燈罩之構造卻是將燈罩設 成可左右向掀開才爲可能。 (2 )上述實施例乃將兩燈罩1 2設成雙向啓開型同 時,在各燈罩1 2間配置中間桿1 7以密閉燈罩1 2底面 側,惟如第8圖所示,例如將左側燈罩1 2之底面板 1 2 3設成位於鉸鏈機構1 6反側之前端緣下半部全體沿 前後被予以切開,將右側燈罩1 2之底面板1 2 3設成位 於鉸鏈機構1 6反側之前端緣上半部全體沿前後予以切開 本紙張尺度適用中國國家標準(CNS ) Α4規格(210X 297公釐) 14- 541569 A7 B7 五、發明説明(12 ) (請先閱讀背面之注意事項再填寫本頁) ,且形成爲任一方或雙方沿前後延伸被設置密封構件 1 7 1之構造亦可。藉此,能密閉燈罩1 2下方領域(玻 璃基板之搬送·處理空間)以防止紫外線及臭氧之漏出。 (3 )上述實施例雖將燈管1 9設成Μ字管,但不限 於此,亦可爲U字管,或兩端具有封口部之直管型。又, 本實施例雖將燈管1 9之封口部1 9 1予以螺定於燈罩 1 2,惟介由裝設件加以固定亦可。紫外線之波長隨著用 途雖有異,然灰化或淸洗時,卻使用具1 5 0〜3 0〇 nm波長者較宜,例如可使用具1 8 5 nm與2 5 4 nm 波長之低壓水銀燈,或具1 7 2 n m波長之可變放電燈。 且,使用如此燈管時,能充分發揮本發明裝置之保養性優 點。又,燈管之輸出較小時,予以設置被處理物加熱用之 加熱手段,以提昇處理速度而言較宜。 經濟部智慧財產局員工消費合作社印製 (3 )燈管1 9之配置模式,亦不限於如本實施例之 同向排列,例如第9圖所示互相予以反向並排亦可。在此 ,卻將燈管1 9之封口部1 9 1予以交錯處於前後之位置 。藉此,由於能應付燈管1 9管長約兩倍之搬運路寬幅, 故亦可處理特別大型之玻璃基板。如是雖予以設成寬幅非 常大之構造,由於燈管1 9之封口部1 9 1位於燈罩1 2 之前面壁部及後面壁部,致最適合於將燈罩設成橫向開閉 型之本實施例構造以發揮優異之保養性。 (4 )在上述實施例,雖適用於將紫外線照射於被處 理物以進行灰化之紫外線灰化裝置,惟本發明卻可廣泛使 用於藉對被處理物予以照射不管紅外線,紫外線,或可見 本紙張尺度適用中國國家標準(CNS ) A4規格(21〇χ 297公釐) -15- 541569 A7 B7 五、發明説明(13 ) L---.-----·ι^衣-- (請先閎讀背面之注意事項再填寫本頁) 光線,由所照射光之作用以直接或間接處理被處理物之裝 置,例如可適用於光蝕裝置,薄膜形成裝置,半導體製造 裝置,印刷裝置,淸洗裝置,氧化裝置等所需之紫外線淸 洗裝置,紫外線硬化裝置,紅外線加熱裝置等各中種裝置 〇 尤其是光處理裝置爲進行有機物淸洗,灰化,表面材 料氧化或活性化之紫外線處理裝置時,由於紫外線之作用 致易發生處理室內之劣化等,需要頻繁進行保養作業,故 宜適用本發明裝置。又,例如具有臭氧發生器,且藉紫外 線燈管與臭氧之作用以進行被處理物處理之紫外線處理裝 時,由於臭氧之作用更加易發生處理室內之劣化等,需要 頻繁進行保養作業,故本發明裝置最爲適用。 經濟部智慧財產局員工消費合作社印製 (5 )上述實施例雖在本體1 1內構成搬送裝置,將 載置於其搬送滾輪1 5上之被處理物予以搬運並照射紫外 線,且載置該被處理物之部位可爲固定式或可動式,惟藉 將搬運被處理物之輸送帶本身設爲被處理物之載置台,卻 可構築有效之生產線。此時,本發明之光處理裝置將輸送 帶予以配置呈可將被處理物搬運於光處理裝置正面之左右 方向較宜,藉在其左右方向再設置其他處理裝置而可構築 保養容易且有效率之生產線。又,以搬送裝置並不限於滾 輪輸送帶,亦可利用傳送帶或機器人。 (6 )燈罩1 2則是被裝設實施光照射之燈管1 9之 支承體,雖如本實施例之將燈管1 9以拉裸露狀態予以裝 設之構造亦可,惟設有光照射窗將燈管全體加以被覆之房 本紙張又度適用中國國家標準(CNS ) A4規格(210X 297公釐) -16- 541569 A7 B7 五、發明説明(14 ) (請先閱讀背面之注意事項再填寫本頁) 間構造亦無妨。載置多數燈管時,將燈管固定於燈罩用之 固定部針對燈罩開閉之橫型旋轉軸以垂直方向排列予以裝 設於燈罩較宜。因爲藉此可使所有燈管之固定部位於裝置 前面側或後面側,予以配置於最接近於作業者之位置,而 雖大型化裝置亦能容易進行燈管之更換作業。於是,保養 時需要拆卸之例如照射窗螺定孔等其他固定部,亦以針對 燈罩開閉之橫型旋轉軸以垂直方向排列予以裝設於燈罩較 宜。 (7 )上述實施例雖將支撐桿以氣體阻尼式爲之,但 不限於此,亦可利用油壓阻尼式,或燈罩雖大型化重量卻 不重時,亦可利用氣壓筒予以容易進行開閉操作。且,支 撐桿不一定設置於燈罩之前後兩側,亦可僅設於前後任一 方。 【產業上之可利用性】 經濟部智慧財產局員工消費合作社印製 本發明之光處理裝置,由於將燈罩針對光處理裝置正 面以前後方向爲旋轉軸予以設成可左右開閉,致可自裝置 前後加以保養,故雖被大型化亦能容易進行本體內部或燈 罩零件更換等之保養作業。 本紙張尺度適用中國國家標準(CNS ) A4規格(210X 297公釐) -17-541569 A7 B7 V. Description of the Invention (1) [Technical Field] The present invention relates to a light processing device such as a UV processing device used for cleaning or removing organic matter. [Background Art] For example, a color filter constituting a color liquid crystal display panel is made by coating a glass substrate with red, green, and blue resists, and washing it in a manufacturing process thereof. This washing was performed in combination with a wet washing method using pure water and a UV / 〇3 washing method in order to improve the washing effect. The U V / 〇3 cleaning method is to use ultraviolet-low molecular organic compounds and ultraviolet rays to generate ozone and oxygen active groups from oxygen in the air to remove organic substances. It is a kind of ultraviolet treatment. Fig. 10 is a schematic diagram showing an example of a cleaning device required for this type of cleaning project, and Fig. 11 is a stereoscopic display view of an open state of an ultraviolet treatment device used in the cleaning device. The cleaning device is for the front of the ultraviolet treatment device 50, and the infrared pretreatment device 60 and the cooling treatment device 70 are connected to the left and right sides, and the wet treatment device 70 is connected to the right side to configure a wet type. The belt conveyor-type processing device constituted by the washing processing device 80 is connected to the left and right with processing devices required for other projects to form a series of production lines. As shown in FIG. 11, the main body 5 1 of the ultraviolet processing device 50 is provided with a plurality of conveying rollers 5 2, so that a plurality of glass substrates (not shown) of the object to be processed can be placed thereon. On the conveying roller 5 2, they are sequentially conveyed in the directions of the arrows in FIG. 10 and FIG. 11. The paper size of the body applies the Chinese National Standard (CNS) Α4 specification (21 〇X 297 mm)-* i- I-I -I—-I----I (Please read the notes on the back before filling in this (Page) Order-View-Intellectual Property of the Ministry of Economic Affairs ^ Printed by Employee Consumer Cooperatives -4- 541569 A7 B7 V. Description of the Invention (2) 5 1 The upper opening can be opened and closed by the lampshade 5 3, and the lampshade 5 3 is installed There are many UV lamps 5 4 required for UV treatment. The lampshade 5 3 can be opened and closed freely from the front of the body 5 1 to the rear via a hinge 5 5 and is installed on the rear side of the body 5 1 to maintain the opened state. Between the front side wall portions, a gas damping support rod 56 is provided across the opening portion. However, such a light processing device needs to perform periodic cleaning, inspection, and replacement operations of the conveying roller 5 2 and the lamp tube 5 4, and such maintenance operations need to be performed with the lamp cover 5 3 open as shown in FIG. 11 . In addition, when the resin-conveying roller 52 using a glass substrate that does not easily damage the object to be processed is used, it is susceptible to deterioration caused by ultraviolet rays, heat, ozone, etc., and therefore needs to be replaced frequently. However, the conventional light processing device is to open the lamp cover 5 3 from the front to the rear, so that maintenance work can only be performed from the front side of the body 51. In particular, in recent years, as the glass substrates for liquid crystal panels are becoming larger, the entire light processing device tends to become larger. In such a tendency, when the work can only be performed from the front side of the device, it becomes impossible to reach the back of the device by hand. There is a problem that maintenance work is extremely difficult. In addition, since the support rod 56 holding the lampshade 5 3 in an open state crosses over the object to be processed, there is a problem that dust falling from the support rod 56 is attached to the object to be processed. The present invention has been developed in response to the above-mentioned problems, and aims to provide a light processing device capable of easily performing internal cleaning or inspection, replacement of parts, and other maintenance work even though the body is enlarged. This paper size applies to China National Standard (CNS) A4 specification (210X 297 mm) L --------- ·! Packing-(Please read the precautions on the back before filling this page) Order the wisdom of the Ministry of Economy Printed by the property consumer cooperative -5- 541569 A7 __ B7 V. Description of the invention (3) [Disclosure of the invention] i (Please read the precautions on the back before filling this page) This invention is provided on the top surface of the body A light processing device that covers the opening and arranges a lamp cover, and makes the lamp tube provided by the lamp cover irradiate the object to be treated in the body, and has a feature that the lamp cover can be opened and closed around a horizontal rotation axis extending in the front-back direction of the body. . According to this configuration, since the lamp cover can be opened laterally, maintenance work can be performed from the back of the device body without being covered by the lamp cover, so that the device can be easily maintained even when the device is enlarged. In addition, since maintenance work can be performed from the front and back directions of the main body, arranging other processing devices in the left and right directions of the light processing device can also constitute a production line without compromising the ease of maintenance operations. [Brief description of the diagram] Figure 1 is a front view of the entire glass substrate cleaning device. Figure 2 is a perspective view of the light processing device in the open state of the embodiment. Figure 3 is a light display in the open state of the lamp cover. Partial side view of the processing device Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Figure 4 is an enlarged side view of the hinge mechanism. Figure 5 is a front view of the light processing device showing the lamp cover in an open state. Figure 6 is a part showing the lamp cover in a closed state. Enlarged sectional view. Fig. 7 is a partially enlarged sectional view showing the mounting structure of the lamp tube end. Fig. 8 is a partially enlarged sectional view showing the closed state of the lamp cover of different embodiments. Fig. 9 is an opened lamp cover of a more different embodiment. The light of the status display The paper size is in accordance with the Chinese National Standard (CNS) A4 (210X 297 mm) -6- 541569 A7 B7 V. Description of the invention (4) Side view of the part of the physical device Figure 10 shows the conventional cleaning Front view display of the entire device. Figure 11 is a three-dimensional display of a conventional cleaning device. The main components are compared. 10 UV ashing device 11 Body 111 Front side wall 112 Rear Wall 12 Lampshade 12 1 Arrow direction 1 2 3 Bottom panel 13 Conveyor frame 14 Conveyor shaft 15 Conveyor 16 Parent key mechanism 161 Rotating arm 162 Support arm 163 Horizontal rotary shaft 164 Lubricating member 17 Intermediate rod 171 Sealing member 18 Support rod 18 1 Cylinder body This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) L ---.----- ·! Loading · — I (Please read the precautions on the back before filling (This page), printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed by 541569 A7 B7 printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, V. Description of the invention (5) 18 2 Rod body 19 Light tube 191 Sealing section 1 9 2 Glass Pipe section 2 0 Fixing section 2 1 Holding clip 2 2 Telescopic pipe 23 Cooling water channel 2 4 Water supply pipe 2 5 Drain pipe 3 1 Infrared preheating device 3 2 Cooling device 3 3 Wet cleaning device 50 Ultraviolet treatment device 5 1 Body 5 2 Transporting wave wheel 5 3 Lamp cover 54 UV lamp tube 5 5 Hinge 5 6 Support rod 60 Infrared pre-heat treatment device 7 0 Cooling treatment device 80 Wet cleaning treatment device L ---.----- ·!- -(Please read the notes on the back first (Fill in this page), 11 This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm) -8- 541569 A7 B7 V. Description of the invention (6) [Best practice of the invention] (Please read the back first (Notes for filling in this page, please fill in this page) An embodiment of the ultraviolet ashing device 10 for cleaning the glass substrate for liquid crystal displays of the present invention will be described below with reference to FIGS. 1 to 7. As shown in Figure 1, the cleaning operation line is viewed from the ultraviolet ashing device 10, and an infrared preheating device 3 1 is successively arranged on the left side, and a cooling device 3 2 is successively arranged on the right side, and the cooling device 3 is further arranged. 2 The right side is equipped with a wet cleaning device 3 3, and the unillustrated glass substrate corresponding to the object to be processed is sequentially transferred from the left to the right as shown by the arrow in the figure. The body 11 of the printed ultraviolet ashing device 10 has a box shape with an open top surface, and two lamp covers 12 are arranged to close the opening. Inside the body 11, two conveyor belt frame walls 13 are arranged in parallel along the front side wall portion 11 and the rear side wall portion 1 12, and a bearing (not shown) is interposed between the belt frame wall 13. A plurality of conveyor shafts 14 extending in the front-rear direction are rotatably supported. Each of the conveyor shafts 14 is equipped with a plurality of fluororesin rollers 15 and the drive device provided in the body 11 is used to rotate and drive the conveyor shafts 14 to be carried on the rollers 15 Glass base board. Seen from the front of the main body 1 1, the lampshade 12 on the left side is shown in FIG. 3, and the front and rear ends of the left side edge are hinged by the hinge mechanism 1 6 by the front side wall portion 1 1 1 and the rear side wall portion 1 1 of the main body 1 1. 2 to support, the left half of the opening on the top surface of the body 11 can be opened and closed in the left direction by the lampshade 12. 3 The parent key mechanism 16 is as shown in Figure 4. It is connected by a horizontal rotation axis 1 6 3 extending in the rear direction of the body 1 1 _. It is extended from the lamp cover 1 2 side. The paper dimensions are applicable to Chinese national standards (CNS ) A4 specification (210X 297 mm) -9- 541569 A7 B7 V. Description of invention (7) L --------- · 'clothing 丨 丨 (Please read the precautions on the back before filling this page) A pair of rotating arms 1 6 1 and a supporting arm 1 6 2 extending from the side of the main body 11 are formed. Therefore, with the horizontal rotating shaft 1 6 3 as the center, the lampshade 1 2 on the left side of Mu Hai is shown in FIG. 5. The closed position shown by the two-point lock line and the open position shown by the solid line in the figure can be opened and closed in the direction of the arrow 1 2 1. A lubricating member 1 6 4 is interposed between the horizontal rotation shaft 1 6 3 and the support arm 16 2. In addition, when viewed from the front of the main body 11, the same is true for the lampshade 12 on the left side. The front and rear ends of the right edge are interposed by the hinge mechanism 16 by the front side wall portion 1 1 1 and the rear side wall portion 1 1 2 of the main body 1 1. The right half of the opening on the top surface of the main body 11 can be opened and closed in the lateral direction by the lampshade 12. The hinge mechanism 16 has the same horizontal rotation axis 1 6 3 extending in the front-back direction of the main body 11 as the left side. Therefore, the horizontal rotation axis 1 6 3 is the center, and the right lampshade 12 is at the fifth position. The closed position shown by the two-point lock line in the figure and the open position shown by the solid line in the same figure can be opened and closed in the direction of the arrow 1 2 2. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the left and right middle part of the opening of the body 11 and the hinge mechanism 16 of the two lampshades 12 are provided with intermediate rods 17 that can be detached from the front and rear directions. As shown in FIG. 6, two sealing members 1 71 extending forward and backward are provided on the left and right sides of the intermediate rods 17. When each lampshade 12 is turned to the closed position, its bottom panel 1 2 3 is tightly sealed to the sealing member 1 7 1 of each middle rod 17 (the middle middle rod 17 is enlarged and shown in Fig. 6). In addition, the bottom panel 1 2 3 of the lampshade 12 is also a sealing member which can be tightly arranged on the frame wall 13 of the two conveyor belts (not shown), thereby sealing the space below the lamp tube 19 (glass substrate handling). Space) to prevent this paper size from applying the Chinese National Standard (CNS) A4 specification (210X 297 mm) 10-541569 A7 B7 V. Description of the invention (8) Leakage from ultraviolet light or ozone. L ---.----- ·! ---- Please read the precautions on the back before filling in this page) Each lampshade 1 2 Front and rear ends and body 1 1 Front side wall 1 1 1 and Rear side wall Supporting rods 18 are respectively provided between the sections 1 1 2. The support rod 18 is a well-known gas damping type composed of a sliding rod housing 1 8 2 which can slide freely in the cylinder body 1 1. The rod body 1 8 2 is often excited in a direction protruding from the cylinder body 1 8 1. , And can keep the lampshade 12 open. The lower part of the lampshade 12 printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs when it is in the closed position is provided with most of the lamps 19 required for ultraviolet irradiation. As shown in FIG. 2 and FIG. 3, although the whole of the lamp tube 19 is in the shape of a long piece which is slightly longer than the opposite interval between the belt frame walls 13 described above, the sealing portion 1 9 1 is located in the body 1 1 On the front side, the glass tube portion 192 is bent and folded back on the rear side of the body 1 1 and then bent and folded back on the front side, and then folded back and bent on the rear side to form an M-shaped curved lamp tube. The sealing portion 1 9 1 is screwed to the fixing portion 20 provided in the lamp cover 12, and the rear end portion of the glass tube portion 1 9 2 is shown in FIG. 7. Stop at the bottom panel 1 2 of the lampshade 12. The electric wire group (not shown) connected to the sealing portion 1 9 1 is gathered in the front side of the lamp cover 12 and passes through the flexible telescopic tube 22 provided between the front end portion of the lamp cover 12 and the main body, and is connected to the main body 1 The power supply unit (not shown) is connected. In addition, a cooling water path 23 is provided inside the lampshade 12, and the water supply pipe 24 and the drainage pipe 25 of the cooling water passage 23 are as shown in FIG. 2, and the rear end portion of the lampshade 12 on the opposite side of the telescopic pipe 22 is covered. After being drawn out, it is connected to a cooling water supply device (not shown) in the main body 11. The light processing device 10 of this embodiment, which is configured as described above, is driven to a paper size of China National Standard (CNS) A4 (210 × 297 mm) when driven. -11-541569 A7 B7 V. Description of the invention (9) ( (Please read the precautions on the back before filling in this page.) When the conveying device is moved, the glass substrate for liquid crystal display with resist on the object to be processed is transferred from the left side to the right side of Figure 1. The glass substrate is heated when it is transported by the infrared preheating device 31, and the heated glass substrate is transported to the light processing device 10 to which the present invention is applied, and the ashing treatment of the uranium-resistant agent is performed therein. Next, the glass substrate subjected to the ashing treatment is transferred to the cooling device 32 to be cooled, and the cooled glass substrate is transferred to the wet cleaning device 32 to be wet-washed. In addition, the light processing device 10 of this embodiment may be provided with an ozone generator that supplies high-concentration ozone to perform the ashing treatment more efficiently. In addition, in order to further improve the processing capability of the light processing device, a heating function that promotes the temperature rise of the glass substrate or the generation of oxygen-active groups from odorous gases can also be used. The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs has printed such a light processing device, and it is necessary to perform maintenance operations on the conveying device, such as repairing the bearings of the conveyor shaft 14, inspecting, replacing the conveying roller 15, etc., or the lamp tube 19 During replacement, the lamp cover 12 is lifted. Each of the lampshades 12 is opened in a horizontally opened state centered on a horizontal rotation axis 16 that extends back and forth along the hinge mechanism 16 and is opened horizontally as shown in FIG. 2. Therefore, for example, the maintenance of the front bearing or the transfer roller 15 can be performed by the operator standing on the front side of the main body 11 and the rear bearing or the transfer roller 15 can be maintained by the operator. operation. In addition, the front end of each lampshade 12 is a sealing portion 19 for fixing the lamp tube 19 to the lampshade 12 and a fixing portion 20 for screw holes used in the lampshade 12. The vertical rotation direction of the lampshade 12 with the horizontal rotation axis 1 6 3 is provided. Align, and fix the lamp tube 19 to the fixing part 20 with mounting screws. Therefore, although the device is large-scale, the paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) -12- 541569 A7 B7 V. Description of the invention (1〇) (Please read the precautions on the back first (Fill in this page again) Modeling also allows Guyi to perform lamp replacement work. For example, when the size of the glass substrate of the object to be processed is 1 m in width, for the conventional device shown in FIG. 10, most of the ultraviolet lamp tubes 5 4 and the opening and closing shafts 5 5 of the lamp cover 50 are arranged in parallel with screws. It is set on the opposite side of the opening and closing shaft 55, which causes the screw fixing part to become higher when the lamp cover 50 is opened (opening angle 30. ~ 45., Also slightly 1 · 9m ~ 2 · 5m), which requires a footstool. This device When the opening angle of the lampshade 50 is 90 °, the screw-fixing position can be raised only by about 1.5 m. If so, the apparatus of the present invention is particularly suitable for a processing apparatus in which a conveyor belt can handle a wide range of objects to be processed. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The light processing device of this embodiment is different from the conventional structure shown in FIG. 10. The support rods 18 of the lampshade 12 are not across the transportation path of the processed object. It is in the form of being located above the front side wall portion 11 and the rear side wall portion 1 12 of the main body 11 so that the self-supporting rod 18 drops the wear powder of the rod body 18 or the oil mist of the lubricating oil. Does not adhere to the object. And, compared with the conventional installation and installation across the conveyance road, because it does not have to be limited by the width of the conveyance road, the support rod 18 can be appropriately designed, so the length of this embodiment can be shorter than the conventional device. . In addition, the connection space of the main body 11 side of the support rod 18 may be any of the front side wall portion 11 and the rear side wall portion 1 12 and may also include a frame wall 13 fixed to the conveyor belt. In addition, the support rod 18 may be installed on both the front and rear sides of the lampshade 12 or only on the front and back sides as in this embodiment. In addition, in the above embodiment, the two lampshades 12 are set in a two-way opening type in a pair of left and right, and a middle rod 17 extending forward and backward is provided on the body 11 and contacts the opposite end of the hinge mechanism 16 of the lampshade 12. For this reason, the paper size of the body can be applied to the Chinese National Standard (CNS) A4 specification (210X297 mm) -13- 541569 Α7 Β7 V. Description of the invention (11) 1 1 The top opening is completely sealed with a lampshade 12. Thereby, it is possible to surely prevent leakage of ozone in the conveyance path of the main body 11 and leakage of ultraviolet rays from the lamp tube 19. Moreover, the lamp tube 19 of this embodiment is an M-shaped curved lamp tube, so that all the sealing portions 19 1 of most of the lamp tubes 19 can be gathered at one end side and arranged. As a result, the electrical wiring portion can be arranged on one end side, and the cooling water supply and discharge pipes can be arranged on the other end side, so that the electrical wiring portion and the water circulation portion can be safely and reasonably designed. The present invention is not limited to the above-mentioned embodiments. For example, various modifications can be made and implemented without changing the gist of the present invention. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (1) Although the above-mentioned embodiment is provided with two lampshades 12 but is not limited to this, it may be provided with a single lampshade opening and closing body 1 1 It is also possible to have a structure in which three or more lamp covers are opened and closed. And as the number of lamp shades covering the openings of the same area increases, the width can be narrowed, which can reduce the height in the opened state. In addition, when most of the lampshades are provided, they can be set to open in the same direction as each other, or a two-way open type that can be set in pairs to open in opposite directions. In this way, it is only possible to set the lampshade so that the lampshade can be opened from left to right. (2) In the above embodiment, the two lampshades 12 are set to a two-way opening type. At the same time, an intermediate rod 17 is arranged between each of the lampshades 12 to seal the bottom side of the lampshade 12. However, as shown in FIG. 8, for example, the left side is The bottom panel 1 2 3 of the lampshade 12 is set to be located on the reverse side of the front end of the hinge mechanism 16 and the lower half of the front edge is cut along the front and back. The bottom panel 1 2 3 of the right lampshade 12 is set to be located on the reverse side of the hinge mechanism 16 The upper half of the front edge of the side is cut along the front and back. The paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) 14- 541569 A7 B7 V. Description of the invention (12) (Please read the precautions on the back first Fill in this page again), and it is also possible to form a structure in which one or both sides are provided with a sealing member 1 7 1 extending back and forth. As a result, the area under the lampshade 12 (the glass substrate transfer and processing space) can be sealed to prevent leakage of ultraviolet rays and ozone. (3) Although the lamp tube 19 is provided as an M-shaped tube in the above embodiment, it is not limited to this, and may be a U-shaped tube or a straight tube type having sealing portions at both ends. In addition, although the sealing portion 19 1 of the lamp tube 19 is screw-fixed to the lamp cover 12 in this embodiment, it may be fixed by an installation member. Although the wavelength of the ultraviolet rays varies according to the application, when ashing or washing, it is more suitable to use a wavelength of 150 to 300 nm. For example, the low voltage of the wavelengths of 18 5 nm and 25 4 nm can be used. Mercury lamps, or variable discharge lamps with a wavelength of 17 2 nm. In addition, when such a lamp is used, the advantages of the device of the present invention can be fully utilized. In addition, when the output of the lamp tube is small, it is more appropriate to provide a heating means for heating the object to be processed to increase the processing speed. Printed by the Intellectual Property Bureau of the Ministry of Economy's Employee Cooperative Cooperative (3) The arrangement of the lamp tubes 19 is not limited to the same arrangement as in this embodiment, for example, it can be reversed side by side as shown in Figure 9. Here, the sealing portions 19 1 of the lamp tube 19 are staggered to the front and rear positions. With this, since it can cope with the width of the conveying path that is about twice the length of the 19 tubes, it can also handle particularly large glass substrates. If it is set to have a very wide structure, the sealing portion 19 of the lamp tube 19 is located in the front wall portion and the rear wall portion of the lamp cover 1 2. Therefore, this embodiment is most suitable for setting the lamp cover to a horizontal opening and closing type. Structured for superior maintainability. (4) In the above embodiment, although it is applicable to an ultraviolet ashing device that irradiates ultraviolet rays to an object to be ashed, the present invention can be widely used to irradiate an object to be processed regardless of infrared rays, ultraviolet rays, or visible light. This paper size applies to Chinese National Standard (CNS) A4 specification (21〇χ 297 mm) -15- 541569 A7 B7 V. Description of the invention (13) L ---.----- · ι ^ clothing-( Please read the precautions on the reverse side before filling out this page.) Light, a device that directly or indirectly processes the object to be processed by the action of the irradiated light, such as photo-etching devices, thin-film forming devices, semiconductor manufacturing devices, and printing devices UV cleaning equipment, ultraviolet curing equipment, infrared heating equipment and other various types of equipment required for cleaning equipment, oxidation equipment, etc. Especially the light processing equipment is used for organic material cleaning, ashing, surface material oxidation or activation. In the case of an ultraviolet treatment device, degradation of the treatment chamber is likely to occur due to the action of ultraviolet rays, and frequent maintenance work is required. Therefore, the device of the present invention is suitable. In addition, for example, in the case of an ultraviolet treatment device having an ozone generator and utilizing the action of an ultraviolet light tube and ozone to process an object to be processed, since the action of ozone is more likely to cause degradation in the processing chamber, maintenance work is frequently performed. The inventive device is most suitable. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (5) Although the above embodiment constitutes a conveying device in the body 11, the object to be processed placed on its conveying roller 15 is transported and irradiated with ultraviolet rays, and the The part of the object to be processed can be fixed or movable. However, by setting the conveyor belt for carrying the object to be processed as a mounting table for the object to be processed, an effective production line can be constructed. At this time, the light processing device of the present invention is more suitable for arranging the conveyor belt in a left-right direction capable of carrying the object to be processed on the front of the light processing device. By setting other processing devices in the left-right direction, it is easy to construct and maintain. Production line. The conveying device is not limited to a roller conveyor, and a conveyor or a robot may be used. (6) The lampshade 12 is a support body to which a lamp tube 19 for light irradiation is installed. Although the lamp tube 19 may be installed in a bare state in this embodiment, it may be provided with light. The paper used to cover the entire lamp tube with the irradiation window is again applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) -16- 541569 A7 B7 V. Description of the invention (14) (Please read the notes on the back first Fill out this page again). When mounting a large number of lamps, the fixing part for fixing the lamp to the lamp cover is preferably arranged in a vertical direction with respect to the horizontal rotation axis of the lamp cover opening and closing. This is because the fixtures of all the lamps can be located on the front or rear side of the device and can be arranged closest to the operator, and the lamp can be easily replaced even with a large-sized device. Therefore, other fixing parts, such as the irradiated window screw fixing holes, which need to be disassembled during maintenance, are also preferably installed in the lampshade by arranging the vertical rotation axis for the opening and closing of the lampshade in a vertical direction. (7) Although the above embodiment uses the gas damping type as the support rod, it is not limited to this. An oil pressure damping type can also be used, or when the lampshade is large and the weight is not heavy, it can also be easily opened and closed by using a pneumatic cylinder. operating. Moreover, the supporting rods are not necessarily provided on the front and rear sides of the lamp cover, and may be provided only on either of the front and rear sides. [Industrial availability] The light processing device of the present invention is printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, because the lamp cover is set to the left and right rotation axis for the front and back direction of the light processing device, so that it can be opened and closed by itself. Maintenance is carried out before and after, so maintenance work such as replacement of the inside of the body or parts of the lamp cover can be easily performed even though it is enlarged. This paper size applies to China National Standard (CNS) A4 (210X 297 mm) -17-

Claims (1)

541569 A8 B8 C8 D8 六、申請專利乾圍1 (請先閱讀背面之注意事項再填寫本頁) 1 . 一種光處理裝置,係爲本體頂面所具開口部被予 以被覆配置燈罩,且使該燈罩所設燈管對本體內被處理物 進行光線照射,並可自上述本體前面或後面操作該燈罩之 開閉,而其特徵乃在:上述燈罩能以延伸於上述本體前後 方向之橫型旋轉軸爲中心進行轉動開閉。 2 .如申請專利範圍第1項之光處理裝置,其中上述 燈罩保持開放狀態所用之支撐桿係被設呈位於上述燈罩前 緣部與上述本體前側壁部間,及/或,上述燈罩後緣部與 上述本體後側壁部間。 3 .如申請專利範圍第1項之光處理裝置,其中上述 燈罩係左右成對被偶數張設成兩啓開型同時,上述本體開 口部則設有前後延伸之與上述成對各燈罩之上述橫型旋轉 軸反側端緣接觸之中間桿。 4 .如申請專利範圍第2項之光處理裝置,其中上述 燈罩係左右成對被偶數張設成兩啓開型同時,上述本體開 口部則設有前後延伸之與上述成對各燈罩之上述橫型旋轉 軸反側端緣接觸之中間桿。 經濟部智慧財產局員工消費合作社印製 5 .如申請專利範圍第1項之光處理裝置,其中上述 燈罩係左右成對被偶數張設成兩啓開型同時,且將該等成 對各燈罩之與上述橫型旋轉軸之反側端緣部亍以設成互相 重疊狀態。 6 .如申請專利範圍第2項之光處理裝置,其中上述 燈罩係左右成對被偶數張設成兩啓開型同時,且將該等成 對各燈罩之與上述橫型旋轉軸之反側端緣部予以設成互相 本^張尺度適用中國國家標準(〇奶)八4規格(21(^297公釐) — -18- 541569 Α8 Β8 C8 D8 六、申請專利範圍2 重疊狀態。 7 .如申請專利範圍第1乃至6項之任一項光處理裝 置,其中上述燈管係爲將其封口部集設於一端側,且將其 玻璃管部另端側予以設成折返彎曲狀之U字形或Μ字形之 彎曲型燈管。 8 .如申請專利範圍第7項之光處理裝置,其中上述 燈管之上述封口部係被交錯配置於上述燈罩之前後兩側。 9 .如申請專利範圍第1乃至6項之任一項光處理裝 置,其中上述本體內係設有將上述被處理物予以搬運於左 右方向之搬送裝置。 1 0 .如申請專利範圍第7項之光處理裝置,其中上 述本體內係設有將上述被處理物予以搬運於左右方向之搬 送裝置。 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家橾準(CNS ) Α4規格(210X 297公釐) -19-541569 A8 B8 C8 D8 VI. Apply for patent dry enclosure 1 (Please read the precautions on the back before filling out this page) 1. A light processing device is a cover for the opening on the top surface of the body, and The lamp tube provided by the lampshade irradiates the object to be treated in the body, and can open and close the lampshade from the front or the back of the body, and is characterized in that the lampshade can be a horizontal rotation axis extending in the front-back direction of the body as The center turns to open and close. 2. The light processing device according to item 1 of the scope of patent application, wherein the support rod used for keeping the lamp cover open is provided between the front edge portion of the lamp cover and the front side wall portion of the body, and / or the rear edge of the lamp cover And the rear wall portion of the body. 3. The light processing device according to item 1 of the scope of patent application, wherein the above-mentioned lampshade is paired left and right and is evenly opened to form two openings. At the same time, the opening of the main body is provided with the above-mentioned horizontal type extending forward and backward with each of the pair of lampshades. The middle rod with the opposite end edge of the rotating shaft in contact. 4. The light processing device according to item 2 of the scope of patent application, wherein the above-mentioned lampshade is paired left and right and is evenly opened to form two openings. At the same time, the opening of the main body is provided with the above-mentioned horizontal type extending forward and backward with each of the pair of lampshades. The middle rod with the opposite end edge of the rotating shaft in contact. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. If the light processing device of the first patent application scope, the above-mentioned lampshade is paired left and right by two even-opened models, and the paired lampshades are combined with each other. The opposite end edge portions 亍 of the horizontal-type rotation shaft are provided to overlap each other. 6. The light processing device according to item 2 of the scope of patent application, wherein the above-mentioned lampshade is paired left and right by an even number of sheets to be opened at the same time, and the opposite end edges of each pair of the lampshade and the horizontal rotation axis are opposite The ministry has set the mutual standard to be in accordance with the Chinese National Standard (〇 奶) 8 4 specifications (21 (^ 297 mm) — -18- 541569 Α8 Β8 C8 D8 6. The scope of patent application 2 overlapped status. 7. If applied The light processing device according to any one of the first to sixth aspects of the patent, wherein the above-mentioned lamp tube is a U-shaped or a U-shaped or M-shaped curved lamp tube. 8. The light processing device according to item 7 of the scope of patent application, wherein the sealing portions of the lamp tube are staggered at the front and rear sides of the lamp cover. 9. If the scope of patent application is the first The light processing device according to any one of items 6 to 6, wherein the main body is provided with a conveying device for conveying the object to be treated in the left-right direction. 10. The light processing device according to item 7 of the scope of patent application, wherein the present In vivo system The above to-be-processed object is transferred to the left and right conveying device. (Please read the precautions on the back before filling in this page.) Printed on the paper by the Intellectual Property Bureau Staff Consumer Cooperatives of the Ministry of Economic Affairs. (210X 297 mm) -19-
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JPH07185489A (en) * 1993-12-28 1995-07-25 Toshiba Lighting & Technol Corp Ultraviolet irradiation type modifying apparatus
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JP3570013B2 (en) * 1995-05-23 2004-09-29 日本電池株式会社 UV treatment equipment
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