CN1321756C - Optical treatment device - Google Patents
Optical treatment device Download PDFInfo
- Publication number
- CN1321756C CN1321756C CNB028000803A CN02800080A CN1321756C CN 1321756 C CN1321756 C CN 1321756C CN B028000803 A CNB028000803 A CN B028000803A CN 02800080 A CN02800080 A CN 02800080A CN 1321756 C CN1321756 C CN 1321756C
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- China
- Prior art keywords
- lamp house
- light irradiation
- irradiation device
- fluorescent tube
- rotating shaft
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- Expired - Fee Related
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Cleaning In General (AREA)
- Liquid Crystal (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
Abstract
An optical treatment device, wherein two sheets of lamp houses (12) are disposed so as to close the upper surface of a body (11), a transfer device is installed in the body (1) to transfer a glass substrate, the left side lamp house (12) is provided with both longitudinal end parts at the left side edge thereof supported on the body (11) through a hinge mechanism (16) and the right side lamp house (12) is provided with both longitudinal end parts at the right side edge thereof supported on the body (11) through a hinge mechanism (16), each hinge mechanism (16) is provided with a longitudinally extending lateral rotating shaft (163), each lamp house (12) is openable in both lateral directions, and lamps (19) are fixed to each lamp house (12) and the base parts (191) of the lamps (9) are arranged in one row at the front side of the lamp house.
Description
Technical field
The present invention relates to the light processor of a kind of apparatus for ultraviolet light treamtent that for example is used for organic cleaning or polishing (ァ Star シ Application ダ) etc. and so on.
Background technology
For example, constituting the coloured filter of color LCD board, is coated red, green, blue resist and produced on glass substrate, will clean in its manufacturing process.In order to make cleaning performance better, adopt wet-cleaned method and the UV/O that uses pure water simultaneously
3Ablution cleans.This UV/O
3Ablution is to utilize ultraviolet ray to make organic matter degradation, ultraviolet ray make the principle of active group that airborne oxygen produces ozone and oxygen with organic matter removal, is a kind of ultraviolet light treatment method.
Figure 10 is the summary construction diagram of an example that is used for carrying out the cleaning device of above-mentioned matting, and Figure 11 is the stereogram when employed apparatus for ultraviolet light treamtent is in open mode in this cleaning device.This cleaning device, it is front in the face of apparatus for ultraviolet light treamtent 50, disposing infrared ray continuously preheats treating apparatus 60 and cooling processing device 70 mutually in the left and right sides, the conveyer conveying-type treating apparatus that disposes wet clean process device 80 continuously mutually on the right side of cooling processing device 70 again and constitute connects the treating apparatus that is used for carrying out other operation again and can constitute continuous production line about it.
As shown in figure 11, in the body 51 of apparatus for ultraviolet light treamtent 50, be provided with conveying device, like this, the multi-disc glass substrate (not shown) as object being treated can be placed on to carry on the roller 52 and carry in proper order to the direction of arrow of Figure 10 and Figure 11 with a plurality of conveying rollers 52.Peristome above the body 51 can be opened or closed by lamp house 53, said lamp house 53 is provided with the many quartz burners 54 that are used for carrying out UV treatment.Lamp house 53 is installed in by hinge 55 on the rear wall of body 51 and can the free backward folding from the front of body 51, is used for air damping formula pole 56 that open mode is kept, is across between the antetheca of the leading edge of lamp house 53 and body 51 and be provided with.
Yet, for this light processor, need regularly carry the operation such as cleaning, inspection, replacing of roller 52 and fluorescent tube 54, these upkeep operations are to carry out under the state of as shown in figure 11 lamp house 53 being opened.In addition, be when being difficult for that the glass substrate as object being treated caused the conveying roller 52 of resin manufacture of damage, under effects such as ultraviolet ray, heat, ozone, wearing out easily, thereby have to frequently change when what adopt.
And existing light processor, its lamp house 53 are rearward opened from the front, and therefore, upkeep operation can only carry out from front one side of body 51.Particularly in recent years, along with the maximization of glass substrate for liquid crystal panel, light processor integral body is also developing to the maximization direction, in the face of such development, if can only carry out operation from the front of device, hand can't get at the rear portion of device, bring great difficulty to upkeep operation.In addition, make lamp house 53 stay open the pole 56 of state, across above the object being treated conveyor zones, therefore, existing the dust that falls from this pole 56 can be attached to the problem on the object being treated.
Summary of the invention
The present invention is intended to address the above problem, and its objective is, even provide a kind of bulk volume also to be convenient to carry out the inner cleaning and the light processor of upkeep operations such as inspection and part replacement greatly.
For this reason, the invention provides a kind of light irradiation device, it has body, the lamp house that covers peristome that peristome is arranged, the conveying device that is placed in the fluorescent tube in the described lamp house and carries light-struck object being treated of accepting described fluorescent tube in the above, it is characterized in that, lamp house is the center folding with the rotating shaft, the direction of rotating shaft is perpendicular to the direction of the throughput direction of object being treated, and the direction of rotating shaft is parallel to the face that makes described conveying device carry described object being treated.
According to such structure, lamp house can laterally be opened, and therefore, can carry out upkeep operation from the back side of device body and can not blocked by lamp house, even device volume is bigger, also is easy to safeguard.In addition, owing to can carry out upkeep operation, therefore,, also can form the production line that can not influence the upkeep operation ease for operation even about light processor, dispose other treating apparatus from former and later two directions of body.
Description of drawings
Fig. 1 is the whole front elevation of glass substrate washing device.
Fig. 2 is the stereogram under the lamp house open mode of the related light processor of present embodiment.
Fig. 3 is the partial side view of the light processor under the lamp house open mode.
Fig. 4 is the enlarged side view of linkage.
Fig. 5 is the front view of the light processor under the lamp house open mode.
Fig. 6 is the local amplification view under the lamp house closed condition.
Fig. 7 is a local amplification view of showing the mounting structure of lamp tube end.
Fig. 8 is the local amplification view of closed condition of showing the lamp house of another embodiment.
Fig. 9 is the partial side view that shows light processor another embodiment, under the lamp house open mode.
Figure 10 is the whole front elevation of existing cleaning device.
Figure 11 is the stereogram of existing light processor.
The specific embodiment
Below, the present invention will be described, is that example describes in conjunction with Fig. 1 to Fig. 7 with a form of implementation that is adopted in the ultraviolet burnishing device 10 that is used for liquid crystal display is cleaned with glass substrate.
As shown in Figure 1, cleaning product line, be to see over from the front of ultraviolet burnishing device 10, infrared ray preheating apparatus 31 is configured in the left side continuously, dispose cooling device 32 continuously on the right side, dispose wet type washing device 33 continuously on the right side of cooling device 32 again and constitute, the not shown glass substrate that will be equivalent to object being treated is carried to the right successively from the left side shown in arrow among the figure.
The body 11 of ultraviolet ray burnishing device 10 is box-shaped, opening above it, and disposing can be with two lamp house 12 of peristome sealing.Inside at body 11, be provided with two conveyor frame walls 13 that be arranged in parallel in pairs along its antetheca 111 and rear wall 112, many transmission arbors 14 that extend along fore-and-aft direction between this conveyor frame wall 13 obtain the support of not shown bearing and can rotate freely.Transmit on the arbor 14 at each, be separately installed with the roller 15 that a plurality of for example fluororesin are made,, can carry the glass substrate that is placed on the roller 15 by making it rotation with the drive unit driving transmission arbor 14 that is arranged in the body 11.
See over from the front of body 11 be positioned at the left side lamp house 12 as shown in Figure 3, former and later two ends of its left side edge obtain the support of the antetheca 111 and the rear wall 112 of body 11 by linkage 16, and the left-half of the top peristome of body 11 can be carried out folding to left by this lamp house 12.This linkage 16 as shown in Figure 4, be will from lamp house 12 sides extend come a pair of circle round arm 161 and, from body 11 sides extend the supporting arm of coming 162 the two, link by the horizontal rotating shaft 163 that extends along the fore-and-aft direction of body 11 and to constitute, therefore, the lamp house 12 in left side, can be the center with this horizontal rotating shaft 163, the closed position in Fig. 5 shown in the double dot dash line and, rotate and folding along the direction of arrow 121 between the open position shown in the solid line among this figure.In addition, laterally be inserted with lubricated part 164 between rotating shaft 163 and the supporting arm 162.
On the other hand, see over from the front of body 11 be positioned at the right side lamp house 12 too, former and later two ends of its right side edge obtain the support of the antetheca 111 and the rear wall 112 of body 11 by linkage 16, and the right half part of the top peristome of body 11 can be by this lamp house 12 by to laterally carrying out folding.This linkage 16 is same with the linkage in left side, has the horizontal rotating shaft 163 that extends along the fore-and-aft direction of body 11, therefore, the lamp house 12 on right side, can be the center with this horizontal rotating shaft 163, closed position in Fig. 5 shown in the double dot dash line and, among this figure between the open position shown in the solid line, rotate and folding along the direction of arrow 122.
In addition, in the middle part of the left and right directions of the peristome of body 11 and linkage 16 1 sides of two lamp houses 12, be respectively arranged with dismountable in front and back upwardly extending intermediate bar 17, as shown in Figure 6, in these between two seals 171 extending before and after being provided with of the left and right sides of end face of bar 17.When each lamp house 12 turns on the closed position, its bottom panel 123 will closely contact (for the intermediate bar 17 of middle part, its enlarged drawing shown in Figure 6) with the seal 171 of each intermediate bar 17.In addition, with respect to the bottom panel 123 of this lamp house 12, be configured in the also closely contact with it of not shown seal of the end face of two conveyor frame walls 13.Like this, the following side space (conveying space of glass substrate) of fluorescent tube 19 can be sealed, prevent leakages such as ultraviolet ray and ozone.
In addition, between the antetheca 111 and rear wall 112 of former and later two ends of each lamp house 12 and body 11, be respectively arranged with pole 18.This pole 18 is that axostylus axostyle 182 is slidably received within the cylinder barrel 181 and the known air damping formula pole that constitutes, on cylinder barrel 181 outwardly directed directions, always be applied with active force at axostylus axostyle 182, this active force helps lamp house 12 to rotate to opening direction, and can make lamp house 12 stay open state.
When lamp house 12 in the closed position, become on the position of bottom surface, dispose the many fluorescent tubes 19 that are used for irradiation ultraviolet radiation.This fluorescent tube 19 as shown in Figures 2 and 3, it is the strip shape that approximately equates at interval in opposite directions between length and the said conveyor frame wall 13 on the whole, and cap part 191 is positioned at the front side of body 11, glass tube part 192 is after the rear side of body 11 is the sigmoid of turning back, be the sigmoid of turning back in the front side once more, be at rear side again and turn back sigmoid and constitute the tortuous lamp of M shape.Its cap part 191 is fastened on by screw on the fixed part 20 that is arranged on the lamp house 12, and the rearward end of glass tube part 192 is leaned on to be fixed on the bottom panel 123 of lamp house 12 by the fastening fixation clamp 21 of screw as shown in Figure 7.What be connected with cap part 191 one concentrates on front side in the lamp house 12 to lead (not shown), after passing in the leading section that is arranged on lamp house 12 and the flexible flexible metal conduit 22 between the body 11, is connected on the interior not shown supply unit of body 11.
In addition, be provided with cooling water channel 23 in the lamp house 12, feed pipe 24 that is connected with this cooling water channel 23 and drainpipe 25 from drawing with the rearward end of the lamp house 12 of the opposition side of above-mentioned flexible metal conduit 22, are connected on the not shown apparatus for supplying cool water in the body 11 as shown in Figure 2.
As the light processor 10 of the present embodiment that as above constitutes,, the liquid crystal display that is attached with resist as object being treated can be carried to the right with the left side of glass substrate from Fig. 1 by conveying device is driven.Be heated when glass substrate moves to infrared ray preheating apparatus 31 places, this heated glass substrate enters have been used in the light processor 10 of the present invention, carries out the polishing of resist therein.Then, the glass substrate of finishing polishing enters and carries out wet-cleaned in the cooling device 32.In addition, in the light processor 10 of present embodiment, also the ozone generator that is used for supplying with high-concentrated ozone can be set, thereby polish with higher efficient.And,, can also be provided with the heating function that impels glass substrate intensification and ozone to generate the active group of oxygen simultaneously in order to improve disposal ability as light processor.
For this light processor 10, the upkeep operation of conveying device, for example, the replacing of the repairing of the bearing of transmission arbor 14 and inspection, conveying roller 15 etc. also have the replacing of fluorescent tube 19, open lamp house 12 and carry out.Each lamp house 12 is that the center rotation is opened with the horizontal rotating shaft 163 that extends along front and back of linkage 16, therefore, will be in as shown in Figure 2 about the horizontal open mode opened.Therefore, when carrying out the safeguarding of the bearing of front side and roller 15, the front side that the operating personnel stands in body 11 is carried out operation and is got final product, and when safeguarding the bearing of rear side and roller 15, the operating personnel can carry out operation from rear side around the rear side to body 11.
In addition, leading section at each lamp house 12, being used for cap part 191 with fluorescent tube 19 is fixed on screw hole on the lamp house 12, and the direction in fixed part 20 upper edges perpendicular to the horizontal rotating shaft 16 of lamp house 12 is arranged, and fluorescent tube 19 is fixed on this fixed part by mounting screw.Therefore, as this device,, also can carry out the replacing operation of fluorescent tube 19 at an easy rate even device volume is bigger.For example, when the size as the glass substrate of object being treated is the conveying width of this class of 1m, for existing apparatus shown in Figure 10, because a plurality of quartz burners 54 are being parallel to folding axle 55 with folding axle 55 opposite sides and arranging and fix with screw at lamp house 50, therefore, when lamp house 50 was opened, the height at this screw position uprised (even opening angle is 30 degree～45 degree, also reach about 1.9m～2.5m), thereby footing plate need be set; By contrast, as this device, even the open angle of lamp house 12 is 90 degree, the position of screw is also only located about 1.5m.
As mentioned above, device of the present invention is particularly suitable for carrying the treating apparatus of the object being treated of wider width as handling conveyer.
In addition, the light processor of present embodiment, different with structure in the past shown in Figure 10, the pole 18 of lamp house 12 is not to be across on the transport path of object being treated, but be positioned at the top of the antetheca 111 and the rear wall 112 of body 11, therefore, even fall the grounds travel or the lubricating oil mist of oil of axostylus axostyle 182 from this pole 18, can be attached on the object being treated yet.And, compare with the situation of installing across transport path in the past, also have the advantage that can irrespectively design pole 18 with the width of transport path, therefore, in the present embodiment, can use its length pole shorter than existing apparatus.In addition, the connecting portion of pole 18 on body 11 can be any position of antetheca 111 and rear wall 112, also comprises can being fixed on the conveyor frame wall 13.In addition, pole 18 both can be installed on former and later two positions of lamp house 12 as present embodiment, also can only be installed in any side in front side and the rear side.
In addition, in the above-described embodiments, two lamp houses 12 be with about paired clamshell type be provided with, the intermediate bar 17 that extends before and after being provided with on body 11 makes it to contact with the limit end with linkage 16 opposite sides of lamp house 12, therefore, lamp house 12 can be airtight fully with the top peristome of body 11.Therefore, can prevent conscientiously such as the ozone supplied with in the transport path of body 11 leaks, fluorescent tube 19 sends ultraviolet ray generation to phenomenons such as external leakages.
In addition, what the fluorescent tube 19 of present embodiment used is the meander configuration fluorescent tube that is M shape, and therefore, all cap parts 191 of many fluorescent tubes 19 can lean on end configuration.Its result can will be provided in an end of lamp house 12 in the electric wiring segment set, and at the water-feeding ﹠ drainaging pipeline of other end configuration cooling water, can accomplish safety and reasonably design that electric wiring part and water cyclic part are separated.
The present invention is not limited to the foregoing description, for example can as described belowly carry out all changes in the scope that does not change invention main idea of the present invention and is implemented.
(1) in above-mentioned form of implementation, be provided with two lamp houses 12, but not limited by this, also can do the structure that paired whole body 11 carries out folding with a slice lamp house, can also make the structure of carrying out folding with the lamp house more than three.It is many more to cover its sheet number of lamp house of the same area, and width can be done more for a short time, thereby the height dimension under the open mode can be low more.In addition, the occasion of a plurality of lamp houses is being set, both can making each other and open, also can make the clamshell type of opening round about to same direction.As the structure that the multi-disc lamp house is provided with like this and since lamp house to the left and right direction open thereby be feasible.
(2) in the above-described embodiments, two lamp houses 12 are made clamshell type, simultaneously, configuration intermediate bar 17 between each lamp house 12, thus bottom surface one side seal of lamp house 12 can be got up; But for example also can be as shown in Figure 8, with for example bottom panel 123 of lamp house 12 in left side make the latter half with the edge of linkage 16 opposite sides along front and back whole removed shape, and with the bottom panel 123 of the lamp house 12 on right side, make the first half with the edge of its linkage 16 opposite sides along front and back whole removed shape, and go up therein one or both of the seal 17 that configuration extends along front and back and form.By making such structure, the zone (conveying of glass substrate and processing space) of lamp house 12 belows can be sealed, thereby prevent that ultraviolet ray and ozone from leaking.
(3) in the above-described embodiments, fluorescent tube 19 is M shape pipes, but is not limited to this, also can be the U-shaped pipe, can also be the straight shape pipe that two ends have cap part.In addition, in the present embodiment, the cap part 191 of fluorescent tube 19 is fixed on the lamp house 12 with screw, but also can fix by gold utensil is installed.The wavelength of ultraviolet lamp is different because of the difference of purposes, and in the occasion of polishing and cleaning, be advisable with wavelength, for example, can use the Cooper-Hewitt lamp and protected type (バ リ ヤ) discharge lamp of wavelength with 185nm and 254nm with wavelength of 172nm with 150～300nm.Like this, in the occasion of using this fluorescent tube, the good maintainability of apparatus of the present invention can be fully played.In addition, in the less occasion of power of lamp tube,, the heater means of heating object being treated is set preferably from improving the angle of processing speed.
(3) about the placement scheme of fluorescent tube 19, be not limited to arranging shown in the present embodiment towards same direction, for example also can arrange on the contrary towards each other as shown in Figure 9.Here, before and after the cap part 191 of fluorescent tube 19 alternately is positioned at.Like this, can adapt with about 2 times of transport path width, even large-scale especially glass substrate also can be handled to fluorescent tube 19 pipe ranges.Even make the structure of the non-constant width of this width because the cap part 191 of fluorescent tube 19 is positioned at the front-end and back-end of lamp house 12, therefore, the most suitable employing lamp house laterally open type present embodiment structure and bring into play good maintainability.
(4) in the above-described embodiments, be to apply the present invention to ultraviolet ray is radiated in the ultraviolet burnishing device that polishes on the object being treated, but the present invention can be widely used in, infrared ray no matter, ultraviolet ray, visible light, all by with the light direct irradiation on object being treated or be radiated at object being treated around utilize the light that is shone the device directly or indirectly object being treated handled of effect in, for example can be applied to lithographic equipment, film forming device, semiconductor-fabricating device, printing equipment, cleaning device, the ultraviolet cleaning device that uses in the oxidation unit etc., ultraviolet curing device, in the various devices such as infrared heating device.
Particularly, when light processor is when carrying out the apparatus for ultraviolet light treamtent of the oxidation of organic cleaning, polishing, surfacing or activation, under action of ultraviolet ray, phenomenons such as aging take place easily in the process chamber, need frequently carry out upkeep operation, therefore be fit to adopt device of the present invention.In addition, as for example having the apparatus for ultraviolet light treamtent that effect ozone generator, that utilize ultraviolet lamp and ozone is handled object being treated, also because the effect of ozone, phenomenons such as aging take place in the process chamber easily, need frequently carry out upkeep operation, therefore device of the present invention is the most suitable.
(5) in the above-described embodiments, be in body 11, to constitute conveying device, carry the limit irradiation ultraviolet radiation to being placed on object being treated limit on its conveyer roller 15, and no matter the position of placing object being treated is fixedly or movable all can, but if the conveyer that will carry object being treated then can make up the higher production line of efficient directly as the mounting table of object being treated.In this occasion, as light processor of the present invention, preferably, conveyer is configured to see past tense in the face of the front of light processor can be carried object being treated on left and right directions, by other treating apparatus of configuration on left and right directions, can set up and be easy to safeguard and production line that efficient is high.In addition,, be not limited to the roller type conveyer, also can use belt conveyer and manipulator as conveying device.
(6) lamp house 12 is to install to be used for the support of fluorescent tube 19 of irradiates light, both can be as present embodiment, and fluorescent tube 19 is the structure that exposes the state installation, also the light illumination window can be set and constitute chamber structure with the whole covering of fluorescent tube.Laying the occasion of many fluorescent tubes, the fixed part that preferably will be used for fixing fluorescent tube is arranged on the lamp house like this, that is, its horizontal rotating shaft with respect to the folding lamp house is arranged in vertical direction.This be because, by such setting, can make the fixed part of fluorescent tube all be positioned at the front or back one side of device, the fixed part of fluorescent tube is configured on the most close operating personnel's the position, thereby even device volume is bigger, fluorescent tube is changed operation and also is easy to carry out.Therefore, preferably, need pull down in the time of will safeguarding, other fixed part such as for example illumination window mounting screw hole is arranged on the lamp house with respect to the horizontal rotating shaft of folding lamp house too with arranging in vertical direction.
(7) in the above-described embodiments, employing be air damping formula pole, but be not limited to this, also can utilize oil damping formula pole, in addition, the occasion of, Heavy Weight big at the lamp house volume also can be utilized pneumatic linear actuator so that the folding operation is easy to carry out.In addition, pole being not limited to is arranged on the both sides, front and back of lamp house, also can only be arranged on a certain side in front side and the rear side.
The possibility of utilizing on the industry
In the light processor of the present invention, lamp house is arranged to see in the face of the light processor front Can be take the axle of fore-and-aft direction as to the left and right folding of rotating shaft, therefore, can be from the front and back of device Safeguard, even the device that maximizes, to body interior and the lamp house part replacement Also be easy to carry out Deng upkeep operation.
Claims (9)
1. light irradiation device, it has body, the lamp house that covers described peristome that peristome is arranged, the conveying device that is placed in the fluorescent tube in the described lamp house and carries light-struck object being treated of accepting described fluorescent tube in the above, it is characterized in that, described lamp house is the center folding with the rotating shaft, the direction of described rotating shaft is perpendicular to the direction of the throughput direction of described object being treated, and the direction of described rotating shaft is parallel to the face that makes described conveying device carry described object being treated.
2. light irradiation device as claimed in claim 1 is characterized in that, described lamp house can be that 90 modes of spending are opened with open angle.
3. light irradiation device as claimed in claim 1 is characterized in that, described light irradiation device also comprises the pole of the open mode that is used for keeping described lamp house, and described pole is not across above described conveying device.
4. light irradiation device as claimed in claim 3 is characterized in that, described pole be arranged between the antetheca of the leading edge portion of described lamp house and said body and/or be arranged on the rear edge portion of described lamp house and the rear wall of described body between.
5. light irradiation device as claimed in claim 1 is characterized in that, described light irradiation device has a plurality of described lamp houses, described a plurality of lamp houses with about paired mode be the clamshell type setting.
6. light irradiation device as claimed in claim 5, it is characterized in that, described light irradiation device has the intermediate bar of frame on described peristome, and when a pair of lamp house was closed, this marginal portion to a side opposite with described rotating shaft of lamp house all contacted with described intermediate bar.
7. light irradiation device as claimed in claim 5 is characterized in that, when a pair of lamp house was closed, this marginal portion to a side opposite with described rotating shaft of lamp house overlapped each other.
8. as each described light irradiation device in the claim 1 to 7, it is characterized in that described lamp house has a plurality of described fluorescent tubes, described fluorescent tube is the meander configuration fluorescent tube, and the cap part of described fluorescent tube is near an end setting of described lamp house.
9. as each described light irradiation device in the claim 1 to 7, it is characterized in that described lamp house has a plurality of described fluorescent tubes, described fluorescent tube chamber meander configuration fluorescent tube, the cap part alternate configurations of described fluorescent tube is in the both sides of described lamp house.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001006698 | 2001-01-15 | ||
| JP6698/01 | 2001-01-15 | ||
| JP6698/2001 | 2001-01-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1455709A CN1455709A (en) | 2003-11-12 |
| CN1321756C true CN1321756C (en) | 2007-06-20 |
Family
ID=18874550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB028000803A Expired - Fee Related CN1321756C (en) | 2001-01-15 | 2002-01-15 | Optical treatment device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4193494B2 (en) |
| KR (1) | KR100840700B1 (en) |
| CN (1) | CN1321756C (en) |
| TW (1) | TW541569B (en) |
| WO (1) | WO2002055224A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008302354A (en) * | 2007-05-10 | 2008-12-18 | Harison Toshiba Lighting Corp | Optical cleaning apparatus |
| CN112023073B (en) * | 2020-06-30 | 2024-03-26 | 广州市莱帝亚照明股份有限公司 | Angle-variable sterilizing lamp and control method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2553857Y2 (en) * | 1990-04-20 | 1997-11-12 | 株式会社 芝浦製作所 | Light cleaning device |
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2002
- 2002-01-15 JP JP2002555946A patent/JP4193494B2/en not_active Expired - Fee Related
- 2002-01-15 WO PCT/JP2002/000174 patent/WO2002055224A1/en active Application Filing
- 2002-01-15 CN CNB028000803A patent/CN1321756C/en not_active Expired - Fee Related
- 2002-01-15 TW TW091100841A patent/TW541569B/en not_active IP Right Cessation
- 2002-01-15 KR KR1020027011898A patent/KR100840700B1/en active IP Right Grant
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|---|---|---|---|---|
| JPH0686961A (en) * | 1992-09-09 | 1994-03-29 | Hikari Dento Kogyosho:Yugen | Method and apparatus for drying metal subjected to surface treatment |
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| JPH09120950A (en) * | 1995-10-24 | 1997-05-06 | Shimada Phys & Chem Ind Co Ltd | Ultraviolet cleaning equipment |
| JPH1092709A (en) * | 1996-09-10 | 1998-04-10 | Shibaura Eng Works Co Ltd | Ultraviolet rays irradiating device |
| JPH11347506A (en) * | 1998-06-05 | 1999-12-21 | Clean Technology Kk | Uv cleaning apparatus |
| JP2000001217A (en) * | 1998-06-16 | 2000-01-07 | Clean Technology Kk | Transport roller in uv cleaning apparatus |
| JP2000189916A (en) * | 1998-12-28 | 2000-07-11 | Iwasaki Electric Co Ltd | Cleaning and modification device |
| CN1269602A (en) * | 2000-04-11 | 2000-10-11 | 北京高力通科技开发公司 | Ultraviolet surface cleaning machine |
Also Published As
| Publication number | Publication date |
|---|---|
| TW541569B (en) | 2003-07-11 |
| CN1455709A (en) | 2003-11-12 |
| JP4193494B2 (en) | 2008-12-10 |
| JPWO2002055224A1 (en) | 2004-05-13 |
| KR20020093838A (en) | 2002-12-16 |
| WO2002055224A1 (en) | 2002-07-18 |
| KR100840700B1 (en) | 2008-06-24 |
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