JP2553857Y2 - Light cleaning device - Google Patents

Description

[Detailed description of the invention] [Industrial application field] The invention is a light cleaning that performs dry cleaning by decomposing and vaporizing organic substances attached to a glass substrate, a silicon wafer, an aluminum mirror surface, a lens, and the like. Related to the device.

[Problems to be Solved by Conventional Techniques and Inventions] A light cleaning apparatus for decomposing and vaporizing organic substances adhered to a glass substrate, a silicon wafer, an aluminum mirror surface, a lens, etc. is generally shown in FIG. Light cleaning equipment is used.

FIG. 5 is a plan view, partly cut away, showing a main part of a conventional optical cleaning device for a glass substrate of a liquid crystal display element. This optical cleaning device is arranged near the transport mechanism or in the main body. The transport mechanism includes a rotatable drive shaft (34) connected by a connecting member (35) at a partition (33) section that partitions the processing tanks (31) and (32), and an axial direction of the drive shaft (34). Driven shafts (36) arranged at regular intervals at right angles to
A helical gear (37) attached to the drive shaft (34), a helical gear (38) attached to the driven shaft (36), meshing with the helical gear (37), and attached to the driven shaft (36). Transport rollers (39)
It is composed of

Above the substrate (40) conveyed by the conveying roller (39), an ultraviolet lamp (41) of the optical cleaning device is provided, and ultraviolet rays are emitted from the ultraviolet lamp (41).
The ultraviolet lamp (41) of the optical cleaning device has a long shape and is disposed above the transport path of the substrate (40). Since no effective ultraviolet light is generated from both ends of the long ultraviolet lamp (41), the effective portion of the ultraviolet lamp (41) is located over the entire conveyance path, so that the length of the ultraviolet lamp (41) is long. The width is larger than the width of the transport path. The ultraviolet lamp (41) is arranged in a direction perpendicular to the direction of transport of the substrate (40).

However, in this optical cleaning device, since the ultraviolet lamp (41) is longer than the width of the substrate (40), the substrate (40)
Ultraviolet rays from both sides of the ultraviolet lamp (41), which do not correspond to the width of the substrate, have no effect on the decomposition and vaporization of organic substances attached to the substrate (40). Therefore, the ultraviolet lamp (41) cannot be used effectively, and there is much waste in energy.

In addition, since the efficiency of decomposition and vaporization of organic substances attached to the substrate (40) depends on the wattage of the ultraviolet lamp (41), the speed of the substrate (40) depends on the wattage of the ultraviolet lamp (41).
Need to be transported.

SUMMARY OF THE INVENTION An object of the present invention is to provide a light cleaning apparatus that can effectively act on a light beam and efficiently clean even if the width of a substrate to be transported is different.

Means for Solving the Problems In order to achieve the above object, the present invention provides a transport processing substrate that emits a light beam while transporting the transport processing substrate while supporting the transport processing substrate on a transport path formed by transport rollers. An apparatus for decomposing and cleaning organic substances adhered to a U-shaped lamp, wherein a U-shaped lamp is disposed obliquely at an angle of 30 to 60 ° with respect to the transport direction of the transport processing base material, and An optical cleaning device is provided in which an effective portion traverses a transport path.

[Operation] In the present invention, since the light is emitted while conveying the processing base material while supporting the processing base material with the transfer roller, the movable portion is located below the processing base material, and there is no risk of contamination due to dust generation. In addition, since the processing is performed while transporting, the processing substrate can be uniformly and efficiently processed. In particular, since the U-shaped lamp is disposed obliquely at a specific angle with respect to the transport direction of the transport processing base material and the effective portion of the lamp crosses the transport path, a light beam of a practical length is used. By the lamp, the processing substrate can be processed evenly, and the effective radiation area of the light beam per unit time with respect to the transport processing substrate can be increased. That is, assuming that the width of the transport path is X and the arrangement angle of the light beam lamp with respect to the transport direction is θ, the length L of the light lamp that crosses the transport path obliquely.
Is L = X / sin θ, L> X (30 ° ≦ θ ≦ 60 °). Therefore, the light beam can be made to act effectively on the transport processing substrate being transported. In addition, since the radiation range with respect to the transfer processing base material is wider than when the transfer processing base material is disposed in a direction perpendicular to the transfer direction, the same cleaning effect can be obtained even if the transfer speed of the transfer processing base material is increased.

Furthermore, since the lamp is U-shaped and disposed in an oblique direction, it is only necessary to fix one end and perform wiring processing, unlike a straight tube lamp which needs to fix both ends and wire. . Therefore, the width in the direction traversing the transport path can be reduced, the device can be downsized, and maintenance is facilitated.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a schematic perspective view of an essential part showing an optical cleaning apparatus according to an embodiment of the present invention, FIG. 2 is a plan view of a partly cutaway essential part showing the optical cleaning apparatus of FIG. 1, and FIG. It is a schematic side view which shows the optical cleaning apparatus of the figure.

The transport mechanism for transporting the substrate (1) includes a plurality of drive shafts (5) extending through a partition (4) partitioning the plurality of clean processing tanks (2) and (3), and a plurality of drive shafts (5). ) In the axial direction. Drive shaft (5) connected by connecting member (6)
Is rotatably disposed in each of the processing tanks (2) and (3) by a bearing (not shown). The drive shaft (5) is rotatable by a rotary drive source (not shown).

Helical gears (7) are mounted at predetermined pitches in the axial direction of the drive shafts (5), and the helical gears (7) are driven shafts (8) disposed orthogonal to the drive shaft (5). Meshes with the helical gear (9). The pitch of the driven shaft (8) defines the transport pitch of the substrate (1). The driven shaft (8) is rotatably supported by a bearing (10). Further, transport rollers (11a) (11b) for transporting the substrate (1) while supporting the substrate (1) are attached to the driven shaft (8).

Above the transport path of the substrate (1), a U-shaped ultraviolet lamp (12) is disposed obliquely at an angle of 30 to 60 ° with respect to the transport direction, in this example, at an angle of 45 °. Have been. An effective portion of the ultraviolet lamp (12) that emits ultraviolet light of a predetermined wavelength traverses the transport path and covers the surface of the substrate (1) on the transport path. The ultraviolet lamp (12) is fixed to an ultraviolet cleaning device (13) and connected to a circuit or device for stabilizing discharge.

When installing such an ultraviolet lamp (12),
Since the UV lamp (12) is U-shaped, not only the output is large, but also the substrate (1) can be cleaned with two UV lamps instead of the four UV lamps as in the conventional case, which is economical. It is advantageous. In the dry cleaning of the substrate (1), the radiation of ultraviolet rays and the atomic oxygen generated therewith act on the substrate (1) to decompose organic substances adhering to the substrate (1) in a gas phase. It is performed by conversion. Also, since the effective portion of the ultraviolet lamp (12) covering the transport path is disposed in an oblique direction, the substrate (1) being transported is compared with a case where the ultraviolet lamp (12) is disposed in a direction perpendicular to the transport direction. Therefore, the same cleaning effect can be obtained even if the transport speed of the substrate (1) is increased.

In order to efficiently clean even substrates of different sizes, an effective portion of an ultraviolet lamp that emits ultraviolet light of a predetermined wavelength is traversed across the entire width of the transport path, and is not moved in the transport direction. It may be arranged at an angle of up to 60 °. The arrangement angle of the ultraviolet lamp can be appropriately selected from the above range according to the substrate transfer speed, the intensity of the ultraviolet lamp, and the like.

The ultraviolet lamps need not be provided from one side of the transport path, and may be provided alternately from both sides of the transport path. Furthermore, even when the ultraviolet lamps are alternately arranged from both sides of the transport path, it is necessary to use an ultraviolet lamp whose effective portion of the lamp traverses the transport path obliquely at an angle of 30 to 60 °. I just need.

FIG. 4 is a plan view, partly cut away, showing a main part of an optical cleaning apparatus according to another embodiment of the present invention. The same elements as those in the embodiment shown in FIGS. 1 to 3 are denoted by the same reference numerals. In this example, a U-shaped ultraviolet lamp (22a) is provided on both sides of the transport path.
(22b) are arranged alternately across the oblique direction at an angle of 30 to 60 ° with respect to the transport direction of the substrate (1).

Even in the ultraviolet lamp having such an arrangement structure, the entire surface of the substrate (1) on the transfer path can be covered by the plurality of ultraviolet lamps (22a) (22b), and the ultraviolet lamps (22a) (22)
Since b) is disposed obliquely at an angle of 30 to 60 °, not only the same effects as in the above-described embodiment can be obtained, but also the arrangement is alternately performed, so that more uniform processing can be performed.

The ultraviolet lamp may be attached to the ultraviolet cleaning device such that the angle with respect to the transport direction of the substrate is variable.

The internal structure of the ultraviolet lamp in the light cleaning device, the connection structure between the ultraviolet lamp and a circuit or device for stabilizing the discharge, and the like can be a conventionally known structure.

Further, in the above-described embodiment, an ultraviolet lamp has been described, but the lamp may be any lamp as long as the substrate can be optically cleaned.

Further, the transfer processing base material may be a glass substrate, a substrate such as a silicon wafer, an aluminum mirror surface, a lens, or the like.

 The preferred embodiments of the present invention are as follows.

(A) A light cleaning device in which the lamp is a U-shaped ultraviolet lamp.

The present specification discloses a light cleaning method that emits a light beam and decomposes and cleans organic substances attached to the transport processing substrate while transporting the transport processing substrate while supporting the transport processing substrate in a transport path formed by transport rollers. A light cleaning method in which a U-shaped lamp is disposed obliquely at an angle of 30 to 60 ° with respect to the transfer direction of the transfer processing base material, and an effective portion of the lamp is traversed in a transfer path. Are also disclosed.

The optical cleaning apparatus of the present invention can be applied to various transport systems, but is suitably used for a transport system that continuously performs precision dry cleaning of a transport processing substrate.

[Effects of the Invention] As described above, according to the light cleaning device of the present invention, the U-shaped light lamp is disposed obliquely at a specific angle with respect to the transport direction of the transport processing base material, and Since the effective portion of the lamp traverses the conveyance path, a practical length of the light lamp increases the effective radiation area of light per unit time, even if the width of the conveyance processing base material is slightly different. There is no waste of energy, the light beam can be made to act effectively, and the substrate to be treated can be treated uniformly. In particular, the processing substrate can be efficiently cleaned even if the transport speed of the processing substrate is increased despite the small number of lamps. In addition, since the processing substrate is transported while being supported by the transport roller, not only is there no risk of contamination due to dust generation, but the processing is performed while transporting, so that the processing substrate can be uniformly and efficiently processed. Further, since the lamp is U-shaped and disposed in an oblique direction, one end of the lamp may be fixed and wiring may be performed, and the width in the direction traversing the transport path may be reduced, and the apparatus may be reduced in size. It can be downsized and maintenance is easy.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view of a main part of an optical cleaning device according to an embodiment of the present invention, FIG. 2 is a plan view of a partly cutaway main part of the optical cleaning device of FIG. 1, and FIG. FIG. 4 is a schematic side view showing a light cleaning apparatus shown in FIG. 4. FIG. 4 is a plan view showing a main portion of a light cleaning apparatus according to another embodiment of the present invention, and FIG. It is a notch principal part top view. (1) ... substrate, (12) (22a) (22b) ... ultraviolet lamp

 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-62-190730 (JP, A) JP-A-63-204729 (JP, A) JP-A-63-15710 (JP, A) JP-A 62-190730 278283 (JP, A) Japanese Utility Model Showa 63-93671 (JP, U) JP-B 54-31993 (JP, B2)

Claims (1)

(57) [Scope of request for utility model registration] An apparatus for decomposing and cleaning organic substances adhering to a transport processing substrate by radiating light while transporting and supporting the transport processing substrate in a transport path formed by transport rollers. Wherein a U-shaped lamp is disposed obliquely at an angle of 30 to 60 ° with respect to the transfer direction of the transfer processing base material, and an effective portion of the lamp crosses the transfer path. Light cleaning equipment.