CN1111899C - Ultraviolet surface cleaning machine - Google Patents
Ultraviolet surface cleaning machine Download PDFInfo
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- CN1111899C CN1111899C CN00105842A CN00105842A CN1111899C CN 1111899 C CN1111899 C CN 1111899C CN 00105842 A CN00105842 A CN 00105842A CN 00105842 A CN00105842 A CN 00105842A CN 1111899 C CN1111899 C CN 1111899C
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Abstract
The invention discloses a kind of ultraviolet surface cleaning machine that utilizes ultraviolet light to remove the substrate surface organic pollution; it is by the ultraviolet source system; transfer system; exhaust system; safeguard protection and fault display system and compositions such as electrical equipment control and power-supply system; light-source system adopts one group can emission wavelength be the high-intensity ultraviolet light fluorescent tube of 185nm and 254nm; with the parallel or vertical arrangement of direction of transfer that is cleaned substrate (4); form the area source (3) that an area is of moderate size; be installed in the top that operating room (1) is cleaned substrate (4), catoptrical speculum (2) is equipped with in light source (3) top.It has reasonable in design, simple in structure, and is easy and simple to handle, safe and reliable and good, the high conformity of cleaning performance, and characteristics such as cleaning rate is fast, the substrate after the present invention cleans can reach " atomic cleanliness degree ".Can be widely used in the surface clean of liquid crystal display device, semiconductor device, large scale integrated circuit and quartz resonator, SAW (Surface Acoustic Wave) device and printed circuit board (PCB) etc.
Description
1. technical field:
The present invention relates to a kind of surface cleaning machine, especially utilize ultraviolet light to remove the ultraviolet surface cleaning machine that sticks to substrate (semiconductor and semiconductor device, integrated circuit, liquid crystal display device, quartz resonator, SAW (Surface Acoustic Wave) device, printed circuit board etc.) surface organic matter.
2. background technology:
Ultraviolet light surface clean technology is the contactless high cleanliness dry method cleaning surfaces treatment technology that grows up the late nineteen eighties in the world, and it utilizes photon that the photosensitive and oxidation of organic compound is reached the purpose that removing sticks to the substrate surface organic substance.It cleans principle: after organic compound (hydrocarbon) has absorbed the ultraviolet photon energy, be decomposed into ion, free state atom, excited molecule or neutral molecule, the photosensitive process of so-called organic substance that Here it is.Oxygen in the atmosphere produces ozone (O after having absorbed ultraviolet light
3), elemental oxygen (O).Ozone has strong absorption equally to ultraviolet light, and under the photon effect, ozone can be decomposed into oxygen (O again
2) and elemental oxygen (O).Because elemental oxygen (O) is extremely active, the photosensitive analyte of carbon on the substrate surface and hydrocarbon is combined to volatilizable gas (carbon dioxide, nitrogen and water vapour etc.) effusion substrate surface under its oxidation, thereby reaches the purpose that thorough removing sticks to the substrate surface organic substance.The flat 4-127430 of Japan Patent has proposed a ultraviolet light ozone clean device, in order to shorten the start-up time of the ultraviolet source in this device, designed a kind of thermal-arrest plate, luminous site near low pressure mercury lamp, the heat that its absorption modulation wall is sent, and this heat conducted socket to mercury lamp, thus in the operating room, do not have under the condition of heater means, make the temperature of fluorescent tube mouth rise to minimum start-up temperature rapidly.And for example flat 9-120950 of Japan Patent and clear 61-194830 have been equipped with ozone generator at the ultraviolet light cleaning device, and ozone is sent into the operating room by ajutage.Purpose is ozone directly to be decomposed produce elemental oxygen under UV-irradiation, increases the quantity of the elemental oxygen that participates in oxidation, strengthens the oxidation to the organic substance analyte.In fact, such measure is difficult to guarantee to reach excellent cleaning effect.According to the working mechanism of ultraviolet light ozone clean, ultraviolet light is being taken on photosensitive and dual role oxidation.Therefore, for the ozone amount that is in ultraviolet source and be cleaned between the substrate compromise is arranged.That is to say that ozone amount therebetween can not be too much, can not be very few.If the ozone amount deficiency, under action of ultraviolet light, the elemental oxygen lazy weight that ozone decompose to produce, the analyte that is cleaned substrate surface can not be oxidized in time and generate the volatile gas surface of overflowing.Make that thus cleaning rate slows down.On the contrary, ozone amount is too much, and a large amount of ultraviolet lights are absorbed by ozone, produce a large amount of elemental oxygens, finally shine the ultraviolet light illumination that is cleaned on the substrate surface and reduce, make lip-deep organic compound can not fully decompose the participation oxidation, its result equally also can have influence on cleaning rate.Therefore, can draw such conclusion, in cleaning process, the quantity of ozone is not The more the better, and should take all factors into consideration illumination intensity of light source, light source and be cleaned distance between the substrate etc. all multifactor, to obtain best cleaning rate.
3. summary of the invention:
Purpose of the present invention be exactly for can to society provide a kind of reasonable in design, simple in structure, easy and simple to handle, safe and reliable, cleaning performance is good, cleaning rate is fast, the ultraviolet surface cleaning machine of high conformity.
For achieving the above object, the present invention's technical scheme of dealing with problems is: ultraviolet surface cleaning machine mainly by the ultraviolet source system, transmit the transfer system, exhaust system, safeguard protection and the fault display system that are cleaned substrate and electrical equipment control and power-supply system and form.Light-source system adopts the high-intensity ultraviolet light fluorescent tube with specific wavelength, or vertical arrangement parallel with the direction of transfer that is cleaned substrate formed the area source that area is of moderate size.Its intensity should be able to be taken into account organic photosensitive and oxidation, to reach best light cleaning performance.By science measuring and calculating, correctly select distance and the light source between the fluorescent tube for use and the distance that is cleaned between the substrate, feasiblely be cleaned the existing enough strong illumination of substrate surface, uniformity of illuminance is preferably arranged again.Catoptrical speculum is equipped with in the light source top, is used for assembling and light reflection ultraviolet, is cleaned the illumination of substrate surface with increase.Mix the leakage inductance transformer that aims at this light source design again, it is fast that it is started in normal operational environment, can reach normal operating conditions at short notice.Transfer system adopts two groups of trundle kinds of drive that driven by sprocket wheel and chain, trundle only be cleaned substrate edge parts at both sides point and contact.And trundle is selected preventing ultraviolet, anti-ozone material for use, in case connecting gear is to being cleaned the pollution of substrate surface.The motor rotary speed of connecting gear is controlled by variable-frequency governor, its transfer rate can not fluctuateed because of the fluctuating of line voltage, and speed adjustable range is big, and is reliable and stable.Exhaust system mainly is made up of air inlet, air channel partition, air channel buffering plate washer, air regulator, air pipe, current limliting valve, ventilation duct joint and air exhausting device, in air channel design, should consider light source and the important relationship that is cleaned ozone amount between the substrate, make it keep light source in working order down and be cleaned stablizing of air mass flow between the substrate.Flow-limiting valve makes its ozone amount be in optimum state all the time in order to the size of control exhaust air rate.Three look alarm lamps are equipped with in the top of operating room.Safeguard protection and fault display system comprise detection and warning circuit and the laminate patch detection and warning circuit two parts that ultraviolet tube opens circuit, and the former adopts Hall sensor to detect heater current, does not influence the electric parameter of circuit of light sources.By setting, not only can detect opening circuit of filament, but also can realize also reporting to the police when fluorescent tube is aged to a certain degree adjustable comparative voltage.The latter adopts incorporate diffuse type optoelectronic switch and solid-state relay, has high reliability and high sensitivity.Two circuit are independent, be arranged in parallel, and install concentratedly on the electrical control circuit plate of electrical equipment control and power supply room.Complete machine is divided into operating room and electrical equipment control and power supply room two large divisions, the high-intensity ultraviolet light fluorescent tube with specific wavelength of parallel or vertical arrangement is housed in the operating room, form a ultraviolet light area source that area is of moderate size, catoptrical speculum is equipped with in the light source top.Be positioned at the below that is cleaned substrate two groups of transfer systems by the trundle kind of drive of sprocket wheel and chain drive are set, trundle only be cleaned substrate edge parts at both sides point and contact, sprocket wheel is by the motor driven that is installed in electrical equipment control and the power supply room, and motor rotary speed is controlled by variable-frequency governor.The both sides of operating room have import and the outlet that is cleaned substrate, and the both sides of import and export are provided with air inlet, the air channel is housed between two air inlets cuts off, and are used for the route of guides wind to form the air channel.The bottom of operating room has air regulator, and air regulator is provided with the buffering plate washer in air channel, and air regulator links to each other with air pipe, and air pipe is equipped with the current limliting valve.The joint of air pipe is housed in the back lower place of electrical equipment control and power supply room housing, interiorly is connected, link to each other with air exhausting device outward with air pipe.Electrical control circuit plate, leakage inductance transformer and variable-frequency governor also are housed in electrical equipment control and power supply room.
Compared with prior art, good effect of the present invention is:
(1) reasonable in design, simple in structure.
Because ultraviolet source of the present invention system adopts the high-intensity ultraviolet light fluorescent tube with specific wavelength, parallel or vertical arrangement is formed area source, catoptrical speculum is equipped with in the light source top, is used for assembling and light reflection ultraviolet, is cleaned the illumination of substrate surface with increase.By science measuring and calculating, distance and light source and the distance that is cleaned between the substrate between the preferred again fluorescent tube make to be cleaned the existing enough strong illumination of substrate surface that uniformity of illuminance is preferably arranged again, to reach the cleaning performance of the best.Mix the leakage inductance transformer that aims at this light source design, it is fast that it is started in normal operational environment, can reach normal operating conditions at short notice.In air channel design, taken into full account light source again and the important relationship that is cleaned ozone amount between the substrate, made it keep light source in working order down and be cleaned stablizing of air mass flow between the substrate.Flow-limiting valve makes its ozone amount be in optimum state all the time in order to the size of control exhaust air rate.Therefore, needn't be as flat 9-120950 of Japan Patent and clear 61-194830, in the operating room, be equipped with ozone generator, and ozone sent into the operating room by ajutage, ozone directly decomposes the generation elemental oxygen under UV-irradiation, increase the quantity of the elemental oxygen that participates in oxidation, strengthen oxidation the organic substance analyte.Also not be used in and be cleaned substrate top configuration heating system, to improve cleaning efficiency.More needn't in the operating room, increase the thermal-arrest plate and just make ultraviolet tube reach normal working temperature rapidly as the flat 4-127430 of Japan Patent.
(2) cleaning performance is good, and cleaning rate is fast, high conformity.
Because above-mentioned same, its result makes cleaning performance of the present invention good.Ito glass test piece after ultraviolet surface cleaning machine of the present invention cleans send the Auger electron spectrometer of department of chemistry, tsinghua university, analysis center to detect, and its result reaches " atomic cleanliness degree ".And, being cleaned the cleaning performance high conformity of substrate surface, cleaning rate is fast, and cleaning rate is 2～3 slices/minute.
(3) safety, reliable.
Because transfer system of the present invention adopts the trundle kind of drive that is driven by sprocket wheel and chain, trundle only contacts with being cleaned substrate edge parts at both sides point, and contact area is little.And trundle adopts preventing ultraviolet, anti-ozone material, has prevented that effectively connecting gear is to being cleaned the pollution of substrate.In addition, the machine structural parts of operating room all adopts the stainless steel material manufacturing that can not produce dirt source and organic pollutants source.Therefore, can not produce dust, can guarantee that being cleaned substrate is to work in nonpollution environment.The CD-ROM drive motor of connecting gear is controlled by variable-frequency governor, and its transfer rate can not fluctuate because of the fluctuating of line voltage.And speed adjustable range is big, and is reliable and stable.The present invention also has been equipped with automatic safety protection and fault display system, can detect the automatic warning of chip select, supervision light source works state and complete machine fault automatically.
4. description of drawings:
Fig. 1 is the front view of ultraviolet surface cleaning machine of the present invention;
Fig. 2 is the vertical view of ultraviolet surface cleaning machine of the present invention;
Fig. 3 is the left view of ultraviolet surface cleaning machine of the present invention;
Fig. 4 detects and the warning circuit functional-block diagram for ultraviolet surface cleaning machine ultraviolet tube of the present invention opens circuit;
Fig. 5 detects and the warning circuit functional-block diagram for ultraviolet surface cleaning machine laminate patch of the present invention;
Fig. 6 is for ultraviolet surface cleaning machine ultraviolet tube of the present invention and be cleaned substrate transfer direction vertical arrangement schematic diagram;
Fig. 7 is another kind of embodiment---the slide type connecting gear schematic diagram of ultraviolet surface cleaning machine transfer system of the present invention.
5. embodiment:
Ultraviolet surface cleaning machine of the present invention mainly is made up of ultraviolet source system, transfer system, exhaust system, safeguard protection and fault display system and electrical equipment control and power-supply system.In the present embodiment, complete machine is divided into operating room 1 and electrical equipment control and power supply room 14 two large divisions.From Fig. 1, Fig. 2 and Fig. 3 as can be seen, be positioned in the operating room 1 top that is cleaned substrate 4 be equipped with one group be cleaned the high-intensity ultraviolet light fluorescent tube that substrate 4 direction of transfers are arranged in parallel with 185nm and 254nm specific wavelength, form a ultraviolet light area source 3 that area is of moderate size.By the science measuring and calculating, the distance between the preferred light source fluorescent tube is 5～10mm, and fluorescent tube and the distance that is cleaned between the substrate 4 are 10～20mm, to guarantee the being cleaned existing enough strong illumination in substrate 4 surfaces, uniformity of illuminance is preferably arranged again.Ultraviolet tube is furnished with custom-designed leakage inductance transformer 19, is installed in electrical equipment control and the power supply room 14, and it starts soon ultraviolet tube in normal operation circumstances, can reach normal operating conditions at short notice.The catoptrical speculum 2 of a monoblock is equipped with in the light source top, is used for assembling and light reflection ultraviolet, is cleaned the illumination on substrate 4 surfaces with increase.Be positioned at the below that is cleaned substrate 4 and be provided with two groups of transfer systems by trundle 9 kinds of drive of sprocket wheel 17 and chain 18 drives, trundle 9 is with anti-ultraviolet, and the rubber ring of anti-ozone is to increase frictional force.Trundle 9 only contacts with being cleaned substrate 4 edge parts at both sides points, and sprocket wheel 17 is driven by the motor 16 that is installed in electrical equipment control and the power supply room 14, and motor 16 rotating speeds are controlled by variable-frequency governor.The both sides of operating room 1 have import 5 and the outlet 6 that is cleaned substrate 4, and the both sides of import 5 and outlet 6 are provided with is equipped with the air channel and cuts off 8 between air inlet 7, two air inlets 7, are used for the route of guides wind to form the air channel.The bottom of operating room 1 has an air regulator 21, and air regulator 21 is provided with the buffering plate washer 10 in air channel, and air regulator 21 links to each other with air pipe 11, and air pipe 11 is equipped with current limliting valve 12.The joint 13 of air pipe is housed in the back lower place of electrical equipment control and power supply room 14 housings, interiorly links to each other, be connected with air exhausting device outward, constitute exhaust system of the present invention thus with air pipe 11.Three look alarm lamps 20 are equipped with in the top of operating room 1.Safeguard protection and fault display system mainly comprise detection and warning circuit and the laminate patch detection and warning circuit two large divisions that ultraviolet tube opens circuit; as can be seen from Figure 4; detection that ultraviolet tube opens circuit and warning circuit mainly are provided with circuit, comparison circuit, impedance inverter circuit, solid-state relay and three look alarm lamps (20, red light) by testing circuit, comparative voltage and form; adopt the heater current of Hall sensor detection ultraviolet tube, do not influence the electric parameter of circuit of light sources.By the setting of adjustable comparative voltage, not only can detect the electric current of filament, but also can realize that fluorescent tube is aged to a certain degree the time, also can report to the police; As can be seen from Figure 5, laminate patch detects with warning circuit mainly by the optoelectronic switch testing circuit, preset pulsewidth circuit, comparison circuit, solid-state relay and three look alarm lamps (20, green light) forms, adopt incorporate diffuse type optoelectronic switch and solid-state relay, have high reliability and high sensitivity, the continuous adjustable extent in its time interval is 1～30 second.When being cleaned substrate 4 generation laminate patches for two, the width of the photosignal that optoelectronic switch detects increases, this photosignal width corresponding with being cleaned substrate 4 width is different, and both relatively produce a pulse signal in the back, goes to control solid-state relay and realizes reporting to the police.Two circuit are independent, be arranged in parallel, and install concentratedly on the electrical control circuit plate 15 of electrical equipment control and power supply room 14.
During real work, open the air in the ventilation blower shedder earlier.Then light ultraviolet tube, hotwire 16 after the preheating, and motor 16 drives trundle 9 by sprocket wheel 17 and chain 18.Be cleaned substrate 4 automatic (or manually) and enter operating room 1, fall on the trundle 9, be sent to outlet 6 reposefully by inlet 5.In the transport process, under the irradiation of ultraviolet light, after the organic substance that is cleaned substrate 4 surfaces has absorbed the ultraviolet photon energy, be decomposed into ion, free state atom, excited molecule and neutral molecule.Oxygen in the atmosphere produces ozone O after having absorbed ultraviolet light
3, elemental oxygen O.Under the photon effect, ozone O
3Can be decomposed into oxygen O again
2With elemental oxygen O.Because elemental oxygen is extremely active, the photosensitive analyte that is cleaned substrate 4 lip-deep carbon and hydrocarbon is combined to the surface that volatilizable gas (carbon dioxide, nitrogen and water vapour etc.) effusion is cleaned substrate 4 under its oxidation, outside exhaust system discharge machine, stick to the purposes that are cleaned the last organic substance in substrate 4 surfaces thereby reach thorough removing.
Fig. 6 is the light-source system 3 another kind of embodiment of ultraviolet surface cleaning machine of the present invention.As can be seen from Figure 6, the light-source system 3 of this machine adopt one group be cleaned the high-intensity ultraviolet light fluorescent tube that substrate 4 direction of transfer vertical arrangements have 185nm and 254nm specific wavelength, form a ultraviolet light area source 3 that area is of moderate size, distance between the fluorescent tube and fluorescent tube are the same with preceding embodiment with the distance that is cleaned between the substrate 4.
Fig. 7 is another embodiment of ultraviolet surface cleaning machine transfer system of the present invention.As can be seen from Figure 7, this transfer system can be designed as the slide type connecting gear, slide plate 22 places in the chute 24 of 1 both sides, operating room, rotational workpieces platform 23 by motor driven is housed on the slide plate 22, slide plate 22 can be manual or electronic, is placed on being cleaned substrate 4 and can obtaining more ultraviolet light illumination uniformly on the work stage 23.
The present invention can be widely used in the cleaning in the manufacturings such as semiconductor and semiconductor device, integrated circuit, liquid crystal display device, quartz resonator, SAW (Surface Acoustic Wave) device, CCD device, printed circuit board and CD, DVD, LD CD, this is to improve technological level, guarantees the important technological equipment of product quality.
Claims (2)
1. ultraviolet surface cleaning machine, mainly by the ultraviolet source system, transfer system and exhaust system are formed, it is characterized in that: light-source system adopts one group can emission wavelength be the high-intensity ultraviolet light fluorescent tube of 185nm and 254nm, ultraviolet tube and the parallel or vertical arrangement of direction of transfer that is cleaned substrate (4), form the ultraviolet light area source (3) that an area is of moderate size, distance between the fluorescent tube is 5～10mm, fluorescent tube is 10～20mm with the distance that is cleaned substrate (4), be installed in the top that operating room (1) is cleaned substrate (4), ultraviolet tube is furnished with leakage inductance transformer (19), be installed in electrical equipment control and power supply room (14), the catoptrical speculum of a monoblock (2) is equipped with in light source (3) top; The below that is cleaned substrate (4) is provided with transfer system, transfer system adopts two groups of kinds of drive that driven trundle (9) by sprocket wheel (17) and chain (18), trundle (9) is with the rubber ring of anti-ultraviolet, anti-ozone, with be cleaned substrate (4) edge parts at both sides point and contact, sprocket wheel (17) is driven by the motor that is installed in electrical equipment control and power supply room (14) (16), and motor (16) rotating speed is controlled by variable-frequency governor; Exhaust system is mainly by air inlet (7), the air channel cuts off (8), air regulator (21), air channel buffering plate washer (10), air pipe (11), current limliting valve (12), ventilation duct joint (13) and air exhausting device are formed, both sides in import that is cleaned substrate (4) (5) and outlet (6) are provided with air inlet (7), the air channel is housed between two air inlets (7) cuts off (8), bottom, operating room (1) has an air regulator (21), air channel buffering plate washer (10) is housed on the air regulator (21), air regulator (21) links to each other with air pipe (11), air pipe is equipped with current limliting valve (12), ventilation duct joint (13) is equipped with in the back lower place at electrical equipment control and power supply room (14) housing, in link to each other with ventilation duct (11), be connected with air exhausting device outward; Three look alarm lamps (20) are equipped with in the top in operating room (1); Ultraviolet surface cleaning machine also is provided with detection that ultraviolet tube opens circuit and warning circuit and laminate patch and detects automatic safety protection and fault display system with warning circuit, the former mainly by testing circuit, relatively circuit, comparison circuit, impedance inverter circuit, solid-state relay and three look alarm lamps (20, red light) are set and form, adopt Hall sensor to detect the heater current of ultraviolet tube, setting by adjustable comparative voltage, not only can detect the electric current of filament, but also can realize that fluorescent tube is aged to a certain degree the time, also can report to the police; The latter mainly by the optoelectronic switch testing circuit, preset pulsewidth circuit, comparison circuit, solid-state relay and three look alarm lamps (20, green light) and form, adopt incorporate diffuse type optoelectronic switch and solid-state relay, two circuit are independent, be arranged in parallel, and install concentratedly on the electrical control circuit plate (15) of electrical equipment control and power supply room (14).
2. ultraviolet surface cleaning machine according to claim 1, it is characterized in that: transfer system also can adopt the slide type connecting gear, slide plate (22) places in the chute (24) of both sides, operating room (1), rotational workpieces platform (23) by motor driven is housed on the slide plate (22), slide plate (22) can be manual or electronic, is placed on being cleaned substrate (4) and can obtaining more ultraviolet light illumination uniformly on the work stage (23).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN00105842A CN1111899C (en) | 2000-04-11 | 2000-04-11 | Ultraviolet surface cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN00105842A CN1111899C (en) | 2000-04-11 | 2000-04-11 | Ultraviolet surface cleaning machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1269602A CN1269602A (en) | 2000-10-11 |
| CN1111899C true CN1111899C (en) | 2003-06-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN00105842A Expired - Fee Related CN1111899C (en) | 2000-04-11 | 2000-04-11 | Ultraviolet surface cleaning machine |
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| CN (1) | CN1111899C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108015075A (en) * | 2017-03-02 | 2018-05-11 | 上海继伟制药设备有限公司 | Vessel-cleaning machine |
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| KR100840700B1 (en) * | 2001-01-15 | 2008-06-24 | 가부시키가이샤 지에스 유아사 코포레이션 | Optical treatment device |
| CN1706566B (en) * | 2004-06-09 | 2010-04-07 | 上海国达特殊光源有限公司 | Ultraviolet cleaner |
| CN100428419C (en) * | 2004-12-08 | 2008-10-22 | 中国电子科技集团公司第四十六研究所 | Method for cleaning gallium arsenide crystal chip |
| CN103311094A (en) * | 2012-03-16 | 2013-09-18 | 中国科学院微电子研究所 | Method for treating surface of wafer |
| CN103962346B (en) * | 2014-05-21 | 2016-08-24 | 深圳市华星光电技术有限公司 | The method of the ultraviolet rays cleaning substrate of adjustable ultraviolet radiation energy |
| CN106972029B (en) * | 2017-03-23 | 2020-04-14 | 武汉华星光电技术有限公司 | Substrate structure comprising unit screen and electrostatic protection method of cleaning machine |
| WO2019124321A1 (en) * | 2017-12-18 | 2019-06-27 | 積水化学工業株式会社 | Surface treatment method and surface treatment apparatus |
| CN109395998A (en) * | 2018-12-05 | 2019-03-01 | 苏州威格尔纳米科技有限公司 | A kind of online surface disposal facility and method of roll-to-roll coating machine substrate |
| CN109894433A (en) * | 2019-03-29 | 2019-06-18 | 唐军 | Surface inspection cleaning device and system |
| US20210128762A1 (en) * | 2019-11-01 | 2021-05-06 | Phonesoap Llc | Systems, methods, and apparatus for device sanitization |
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| JPS5925223A (en) * | 1982-08-02 | 1984-02-09 | Nippon Telegr & Teleph Corp <Ntt> | Method for cleaning of substrate and device therefor |
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| CN108015075A (en) * | 2017-03-02 | 2018-05-11 | 上海继伟制药设备有限公司 | Vessel-cleaning machine |
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| CN1269602A (en) | 2000-10-11 |
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