CN1289218C - Ultraviolet radiation light cleaning machine - Google Patents
Ultraviolet radiation light cleaning machine Download PDFInfo
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- CN1289218C CN1289218C CN 03149541 CN03149541A CN1289218C CN 1289218 C CN1289218 C CN 1289218C CN 03149541 CN03149541 CN 03149541 CN 03149541 A CN03149541 A CN 03149541A CN 1289218 C CN1289218 C CN 1289218C
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Abstract
The present invention relates to an ultraviolet radiation light cleaning machine which is a technology processing device used for the atom cleanness of organic matter attached to the surfaces of various substrates (chips) of high-tech products needing fine processing. The present invention is a novel ultraviolet radiation light cleaning device composed of a novel light source irradiation system, a gear shaft rod type work piece driving system, a water cooling and air cooling composite cooling system, a multi-sensor control system, etc. The ultraviolet radiation light cleaning machine has the characteristics of stable and reliable work, favorable cleaning effect, high efficiency, flexible and convenient use and control and friendly man-machine interface.
Description
(1) technical field
The present invention relates to a kind of ultraviolet radiant light cleaning machine, specifically, is a kind of being used for the processes equipment that the atom level cleanliness factor cleans to be carried out on the surface of all kinds of substrates (chip) of the high-tech product that needs retrofit.
(2) background technology
As everyone knows, in the process of production and processing new high-tech product precise part, high to the surface cleanliness requirement of workpiece (as the parts of high density substrate classes such as semiconductor integrated circuit, liquid crystal device, surface wave device, printed circuit board).Chemical cleaning in the traditional handicraft can not meet the demands, and is developing the ultraviolet radiant light cleaning technique in recent years.
The characteristics that ultraviolet radiant light cleans are: the cleanliness factor after please washing can reach atom level, it is clean the thorough removing of each type organic that substrate surface adheres to by the gentle effect of light, be a kind of contactless dry method surface clean technology, it is also free from environmental pollution that it does not touch the surface.
The basic principle that ultraviolet radiant light cleans is: photosensitive process takes place in the organic matter (hydrocarbon) that shines the subtegulum surface adhesion at the ultraviolet radiant light of specific wavelength (253.7nm) and intensity, after being the molecule absorption specific wavelength photon energy of organic compound, strand is torn, and is decomposed into ion, free state atom, excited molecule or neutral molecule; In addition can ozonize (O3) and elemental oxygen (O) after airborne oxygen molecule (O2) absorbs photon energy under the irradiation of the ultraviolet radiant light of specific wavelength (184.9nm) and intensity; The chemical property of elemental oxygen is lived and is dialled, has very strong oxidation, can be the whole oxidations of organic photosensitive analyte that adhere on the substrate surface, become steam (H2O) and carbon dioxide volatile gases such as (CO2) ease from substrate surface, discharge with air-flow, reach the purpose of thorough clean substrate surfaces.
Begin to sprout the existing industrial ultraviolet light cleaning machine of making based on above principle in recent years.Patent as Japan: flat-12743; Flat-120950; 00105842.8 etc. of clear 61-194830 and China.
Light cleaned transform into from principle that practical equipment is essential breaks through many key technologies, particularly will design the cleaning environment (running status of the configuration of light source in the irradiation cabin, workpiece, the duration of cleaning process, control program or the like) of high efficiency, highly reliable light source and an optimization.The key of optimal design is that " photosensitive " and " oxidation " these two depends on each other for existence and the physics and the chemical process of restriction each other match rightly, coordinate and synthetically make good use of in the cabin in irradiation, cleaning.Two wavelength (184.9nm that the ultraviolet source fluorescent tube sends; 253.7nm) intensity, the spacing that a plurality of fluorescent tubes are put, the orientation that distance between fluorescent tube and workpiece, fluorescent tube are arranged (direction that moves with respect to the process line workpiece) waits the intensity and the uniformity that all can influence the workpiece exposure, the also intensity of ozone generation in the influence irradiation cabin.Because ozone has certain blocking to ultraviolet light, thereby the ozone concentration in the cabin also is sensitive parameter, and ozone amount too much can hinder photosensitive effect, very fewly is not enough to finish oxidation again, must regulation and control in appropriate scope.So the temperature in the irradiation cabin and the control of exhaust air rate are also most important.It is the multi-variable system process of a complexity that ultraviolet light cleans, and just can reach the operation and the production of high-quality, high efficiency and steady ordered through well-designed and test.
Electronics and control technology that adopt to upgrade, optimal design becomes a kind of production efficiency height, good product quality, and the working stability of equipment is reliable, uses easy to operately, moves and the cheap ultraviolet light cleaning machine of maintenance cost is a target of the present invention.
(3) summary of the invention
A kind of ultraviolet radiant light cleaning machine of the present invention is to be used for the organic matter that all kinds of substrate surfaces adhere to is carried out the processes equipment that atom level is cleaned, and comprising:
Source illumination system, adopt the angle setting of direction of motion inclination of long ultraviolet lamp tube along workpiece, perhaps adopt snakelike fluorescent tube configuration, and in the ultraviolet lamp tube of this source illumination system, be provided for " cold spot " of mercury vapor pressure transverse to the workpiece motion s direction;
Gear shaft rod-type transmission system is a power with the reducing motor, drives the roller shaft that a row rotates synchronously through gear train and kinematic link, steadily moves so that workpiece is held up forward by roller;
The air-cooled compound cooling system of water-cooled, wherein water-cooling system is made up of flat coldplate that is located at fluorescent tube array top in the illumination cabin and the cooling water tank that is located in the equipment compartment; Air cooling system mainly adopts exhaust blower, to be used for accurately controlling the temperature of each parts and to control ozone concentration in the illumination cabin independently; With
The multisensor control system, it comprises:
Illuminance sensor, whether the illumination power that is used to monitor each fluorescent tube is up to standard, and reports to the police automatically when deviation is arranged;
Ozone concentration sensor is used to detect the ozone concentration at air outlet place, illumination cabin, to be used to regulate and control the power of ventilation, so that ozone concentration automatically remains on optimum state all the time;
A plurality of temperature sensors are to be used to monitor the temperature of illumination cabin, equipment compartment, lamp tube wall, illumination cabin exhaust outlet and cooling water etc.;
Workpiece running status sensor adopts the transient position of corresponding position sensor perception workpiece, and computing draws the running status of workpiece through microprocessor, and is steadily orderly to guarantee the motion of work piece in the illumination cabin.
(4) description of drawings
The embodiment of the cleaning machine of the pipeline system that the present invention proposes as shown in Figure 1.
Fig. 1 a is the front section view of this cleaning machine.
Fig. 1 b is the side sectional view of this cleaning machine.
Fig. 1 c is the vertical view of the upper-deck cabin inside (unlatching loam cake) of this cleaning machine.
Fig. 1 d is that the inner fluorescent tube of the upper-deck cabin of this cleaning machine is installed the view of arranging.
Fig. 2 is the embodiment of the cleaning machine that uses of suitable single lots processed that the present invention proposes.
Fig. 3 is the control functional block diagram of this cleaning machine.
(5) specific embodiment
The present invention proposes a kind of heavy duty detergent ultraviolet radiant light cleaning machine, carries system, cooling system, control system etc. by source illumination system, workpiece and partly forms.The characteristics of each system of the present invention are as follows:
(1) source illumination system: light source is the core component of cleaning machine, and machine performance is had decisive influence.The light source of the present invention's development has following characteristics:
Be provided with " cold spot " in the 1/ light source quartz ampoule.The luminous principle of ultraviolet lamp tube be the liquid mercury in the quartz ampoule because heating becomes steam, mercuryvapour is excited just to produce ultraviolet light, the pressure size of mercuryvapour is the sensitive parameter of luminescent properties, should keep constant.The pressure of mercuryvapour is very responsive to temperature in the used general ultraviolet lamp tube, thereby unstable.Accomplish the fluorescent tube that makes itself to generate heat, be in again under the complicated thermal source environment that remaining constant temperature is to be difficult to realize.For solving instability problem, thinking of the present invention is to quote the pressure that the another one controlled variable is regulated mercuryvapour.Way is to be provided with " cold spot " at tube inner wall, its function is to make unnecessary mercuryvapour meet cold energy enough to be reduced to liquid state, condense in " cold spot " above, what thereby the mercury vapor pressure in the adjusting fluorescent tube avoided that the fluorescent tube environment temperature changes pins down, and luminescent properties is reached and remains on stable optimum state.
The ultraviolet lamp tube that 2/ cleaning machine is used is special development, and it is bigger with power of lamp tube than sterilization commonly used, is difficult for finding suitable electric ballast on the market, mates the frequent root of not good fault often.The present invention has designed the tailored version great-power electronic ballast supporting with the ultra-violet radiation fluorescent tube voluntarily.Good coupling makes fluorescent tube can keep steady operation and long-life.
3/ in order to make ultraviolet radiant light be evenly distributed to the surface irradiation amount of workpiece, must adopt many fluorescent tubes to lay side by side, so that form approximate area source irradiation.The short fluorescent tube of fluorescent tube aligning method that known light cleaning machine is adopted or use is according to the direction horizontally-arranged (workpiece motion s is vertical with fluorescent tube) of workpiece motion s, or the long fluorescent tube of use is according to the direction of motion in-line arrangement (workpiece motion s is parallel with fluorescent tube) of workpiece.Using the shortcoming of short fluorescent tube is that luminous efficiency is low; The long fluorescent tube shortcoming of using in-line arrangement is that the exposure skewness to surface of the work is strip.The way of the present invention's design is: both adopted the high long fluorescent tube of efficient; Eliminated the problem that exposure is inhomogeneous strip again.Concrete way is: along the direction of the workpiece motion s angle (spacing of fluorescent tube and length ratio) that tilts, perhaps adopt transversely arranged snakelike fluorescent tube; Two kinds of ways all can reach the exposure uniformity that workpiece adds up at the volley.
(2) workpiece carries system: the workpiece load mode that the present invention adopts is: be power with the reducing motor, through gear train and kinematic link, drive the roller shaft that a row rotates synchronously, workpiece is held up forward by roller and steadily moves.Workpiece movement speed is by the frequency-variable controller control of reducing motor.The motion of workpiece steadily, do not have extrusion and collision, zero lap phenomenon between each workpiece, for the technological process (cooperate and load and shift out workpiece automatically) that cooperates automatic assembly line, workpiece will will keep a fixing spacing mutually.For this reason specialized designs of the present invention workpiece running status sensing device.Concrete way is to adopt the transient position of position sensor perception workpiece, and the computing of process microprocessor draws the running status of workpiece, and accurately controls.
(3) cooling system: the normal light cleaning machine adopts the air draft measure that cools.In order to control temperature more accurately and to control ozone concentration independently, the ultraviolet radiant light cleaning machine that the present invention proposes has exceptionally adopted the water-cooled cooling measure, and what reality was used is water-cooled and air-cooled compound cooling system.Water-cooling system is made up of flat coldplate (heat collector) that is located at fluorescent tube array top in the illumination cabin and the cooling water tank that is located in the equipment compartment, and the circulation of water is driven by water pump.The unnecessary heat that fluorescent tube sends is absorbed by coldplate, is transferred in the cooling water tank through connecting water pipe again, leaves then.The advantage that has adopted water-cooling system is that the load of exhaust system is greatly alleviated, and the purposes of exhaust blower mainly is ozone concentration.Cooling system reaches on the whole that volume is little, noise is low, temperature control is more accurate like this.
(4) control system: the automatic operating control system that has thickly designed cleaning machine week of the present invention.Carry out the generation of collection, processing, demonstration and corresponding control signal of setting, the critical data of duty by computer and microprocessor.Make cleaning machine automaticity height, man-machine interface close friend, safe and reliable to operation, production efficiency is high, good product quality.
Best and the reliablely and stablely operation for the duty that keeps cleaning machine is selected for use among the present invention and has been designed the multiple sensors part, has carried out reasonable configuration in machine, as:
1, illuminance sensor: lamp works in a row must be provided with testing circuit in order in time to find and change inefficacy person in the irradiation cabin (outside be cannot see), customary way is the power supply parameter (curtage) of monitoring fluorescent tube.Obviously power supply parameter is normal, and not exclusively shows luminous normal.The detection method of the present invention design is that each fluorescent tube all is furnished with an independently illuminance sensor, and whether the illumination power that is used to monitor this fluorescent tube is up to standard, reports to the police automatically when deviation is arranged.The detection method of the present invention's design makes the work of equipment more reliable.
2, ozone concentration sensor: detect the ozone concentration of illumination cabin air outlet, this signal is used to regulate and control the power of ventilation, makes ozone concentration automatically remain at optimum state;
3, temperature sensor: temperature is to clean the fruit sensitive parameter of imitating, and needs strict control, therefore is provided with a plurality of points for measuring temperature, as: the temperature in illumination cabin, the equipment compartment, the temperature of lamp tube wall, the temperature of illumination cabin exhaust outlet, temperature of cooling water or the like;
4, workpiece running status sensor: steadily orderly in order to ensure the motion of work piece in the illumination cabin, the present invention adopts the transient position of corresponding position sensor perception workpiece, and computing draws the running status of workpiece through microprocessor.
(5) system synthesis feature: the ultraviolet radiant light cleaning machine that the present invention proposes owing to adopted the above-mentioned several subsystems that differ from one another, is in operation complete machine and can solves the optimal control problem of cleaning process better.
For example: each fluorescent tube of uv radiation source all be send simultaneously " photosensitive " (253.7nm) with " exciting ozone " (184.nm) wavelength and the corresponding luminous intensity of two different purposes.Make these parameters remain on stable optimization state.The interior pressure of the fluorescent tube of must controlling well to the very responsive mercury vapour of temperature.The way that general light cleaning machine adopts is that the result is that the ozone concentration in the illumination cabin also changes with exhaust air rate by air draft cooling method control temperature, and it is stable that control procedure is difficult for, and is difficult to reach the duty of optimization.The present invention is provided with " cold spot " pressure in order to the control mercury vapour in fluorescent tube, make the luminescent properties of fluorescent tube no longer responsive to environment temperature; In cooling system, quoted the water-cooled measure, made the exhaust system Reduction of Students' Study Load, and be mainly used in the regulation and control ozone concentration.So just avoided adjusting an input quantity, affected the situation of two above output quantities.Make control procedure be easy to reach the duty of optimization.
For another example: workpiece carrier system of the present invention and multisensor control system make this cleaning machine have the automaticity height, and working stability is reliable, and cleaning performance is good, efficient is high, control characteristics flexible and convenient to use, that man-machine interface is friendly.
(6) complete machine framework: complete machine of the present invention is desk-top cleaning equipment, is divided into two cabins up and down, and illumination is cleaned the cabin on top, and the bottom is an equipment compartment.A cleaning machine is the production and processing cleaning equipment of pipeline system, and the batch parts that the are cleaned illumination that enters and shift out of formula in single file clean the cabin; Another money is single batch and adds the cleaning equipment that uses man-hour on a small quantity that the mode that the parts that are cleaned are put into illumination cleaning cabin and taking-up can adopt open-close type or push-and-pull drawer type.The physical and chemical performance that employed all material and parts all have absolute stability and safety in the illumination cleaning cabin to ultraviolet light and ozone.
Introduce the first-selected embodiment of cleaning machine below in conjunction with Fig. 1: cleaning machine is that mesa structure is supported by frame 4, and top is that cabin 1 is cleaned in illumination, and the bottom is that the lining bucket made from stainless steel in the middle of 2, two cabins of equipment compartment 3 is the boundary.
The topology layout design in cabin is cleaned in illumination, be related to ultraviolet light to the exposure intensity of surface of the work, pollutant by the photoactivated uniformity and sophistication, also directly influence the generating capacity of ozone and the degree of perfection of oxidizing process.The present invention is in order to improve the luminous efficiency of light source, adopted long (150cm) luminous lamp tube, illumination is cleaned every size in cabin and is all passed through meticulous optimization selection design with relevant parameter, reach that illumination is even, intensity is suitable, the generating capacity of ozone matches, and makes cleaning machine efficient height, working stability reliable.
The loam cake 5 in this cleaning machine illumination cabin, go to the bottom (lining bucket 3) all adopt corrosion resistant plate, and the travelling gear 6 of workpiece conveyer in the cabin (seeing Fig. 1 c), roller 7, roller shaft 8 etc. are all made with stainless steel.In order to make transmission mechanism damping, noise elimination and lubricated, bearing portions has adopted the north material of poly-tetrafluoro.
The equipment such as ballast 10, cooling water tank 11, electric appliance control box 12, exhaust duct 13, reducing motor 20 of ultraviolet lamp tube is housed in the equipment compartment (seeing Fig. 1 a, Fig. 1 b).Alarm lamp 14 is established in the place that is higher than table top, so that eye-catching.
Fig. 2 is the cleaning machine embodiment that is fit to small lot processing, adopts compact mesa structure.For exposure that surface of the work is subjected to is even, the work piece that illumination is cleaned in the cabin is placed on the dish bearing matter that can swing.
Fig. 3 is the control functional block diagram and the external interface relation of this cleaning machine.
As Fig. 3, microprocessor (center control) uses a computer, and carries out the generation of collection, processing, demonstration and corresponding control signal of setting, the critical data of duty.Be connected: workpiece motion s detection, ozone concentration detection, multi-point temperature measurement module, warning and system interlink output input and panel and man-machine interface.
The method of operation of main module is as follows:
Workpiece motion s detects: by workpiece running status sensor, adopt the transient position of corresponding position sensor perception workpiece, computing draws the running status of workpiece through microprocessor, and is steadily orderly to guarantee the motion of work piece in the illumination cabin.Ozone concentration detects: pass through ozone concentration sensor: detect the ozone concentration of illumination cabin air outlet, this signal is used to regulate and control the power of ventilation, makes ozone concentration automatically remain at optimum state; Multi-point temperature measurement: because temperature is to clean the fruit sensitive parameter of imitating, need strict control, therefore be provided with following several point for measuring temperature: the temperature in illumination cabin, the equipment compartment, the temperature of lamp tube wall, the temperature of illumination cabin exhaust outlet, the temperature of cooling water.
Claims (1)
1, a kind of ultraviolet radiant light cleaning machine is to be used for the organic matter that all kinds of substrate surfaces adhere to is carried out the processes equipment that atom level is cleaned, and comprising:
Source illumination system, adopt the angle setting of direction of motion inclination of long ultraviolet lamp tube along workpiece, perhaps adopt snakelike fluorescent tube configuration, and in the ultraviolet lamp tube of this source illumination system, be provided for " cold spot " of mercury vapor pressure transverse to the workpiece motion s direction;
Gear shaft rod-type transmission system is a power with the reducing motor, drives the roller shaft that a row rotates synchronously through gear train and kinematic link, steadily moves so that workpiece is held up forward by roller;
The air-cooled compound cooling system of water-cooled, wherein water-cooling system is made up of flat coldplate that is located at fluorescent tube array top in the illumination cabin and the cooling water tank that is located in the equipment compartment; Air cooling system mainly adopts exhaust blower, to be used for accurately controlling the temperature of each parts and to control ozone concentration in the illumination cabin independently; With
The multisensor control system, it comprises:
Illuminance sensor, whether the illumination power that is used to monitor each fluorescent tube is up to standard, and reports to the police automatically when deviation is arranged;
Ozone concentration sensor is used to detect the ozone concentration at air outlet place, illumination cabin, to be used to regulate and control the power of ventilation, so that ozone concentration automatically remains on optimum state all the time;
A plurality of temperature sensors are to be used to monitor the temperature of illumination cabin, equipment compartment, lamp tube wall, illumination cabin exhaust outlet and cooling water etc.;
Workpiece running status sensor adopts the transient position of corresponding position sensor perception workpiece, and computing draws the running status of workpiece through microprocessor, and is steadily orderly to guarantee the motion of work piece in the illumination cabin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03149541 CN1289218C (en) | 2003-07-16 | 2003-07-16 | Ultraviolet radiation light cleaning machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03149541 CN1289218C (en) | 2003-07-16 | 2003-07-16 | Ultraviolet radiation light cleaning machine |
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| Publication Number | Publication Date |
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| CN1569348A CN1569348A (en) | 2005-01-26 |
| CN1289218C true CN1289218C (en) | 2006-12-13 |
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| CN 03149541 Expired - Lifetime CN1289218C (en) | 2003-07-16 | 2003-07-16 | Ultraviolet radiation light cleaning machine |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103316574A (en) * | 2012-03-20 | 2013-09-25 | 北京航天宏达光电技术股份有限公司 | Intelligent type ultra violet radiation oil smoke purifying device |
| JP6101508B2 (en) * | 2013-02-18 | 2017-03-22 | 株式会社日立メディアエレクトロニクス | Optical component bonding structure, manufacturing method, and video output apparatus |
| CN108950935B (en) * | 2018-07-30 | 2020-12-15 | 盐城帝佳妮服饰有限公司 | A cloth sterilization removes mould device for clothing production |
| CN109894433A (en) * | 2019-03-29 | 2019-06-18 | 唐军 | Surface inspection cleaning device and system |
| CN114558848A (en) * | 2022-02-28 | 2022-05-31 | 歌尔股份有限公司 | Full-automatic UV cleaning equipment |
| CN114682569A (en) * | 2022-02-28 | 2022-07-01 | 歌尔股份有限公司 | UV cleaning verification device and cleaning verification method |
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Denomination of invention: Ultraviolet radiation light cleaning machine Effective date of registration: 20140519 Granted publication date: 20061213 Pledgee: Zhongguancun Beijing technology financing Company limited by guarantee Pledgor: BEIJING AEROSPACE HONG DA OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2014990000369 |
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