CN109894433A - Surface inspection cleaning device and system - Google Patents
Surface inspection cleaning device and system Download PDFInfo
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- CN109894433A CN109894433A CN201910250952.1A CN201910250952A CN109894433A CN 109894433 A CN109894433 A CN 109894433A CN 201910250952 A CN201910250952 A CN 201910250952A CN 109894433 A CN109894433 A CN 109894433A
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- 238000004140 cleaning Methods 0.000 title claims abstract description 180
- 238000007689 inspection Methods 0.000 title claims abstract description 46
- 239000000428 dust Substances 0.000 claims description 28
- 238000009423 ventilation Methods 0.000 claims description 10
- 238000002360 preparation method Methods 0.000 claims description 4
- 239000000356 contaminant Substances 0.000 claims description 3
- 238000001914 filtration Methods 0.000 claims description 3
- 230000004310 photopic vision Effects 0.000 claims 1
- 238000009738 saturating Methods 0.000 claims 1
- 239000011368 organic material Substances 0.000 abstract description 30
- 230000003647 oxidation Effects 0.000 abstract description 14
- 238000007254 oxidation reaction Methods 0.000 abstract description 14
- 206010034972 Photosensitivity reaction Diseases 0.000 abstract description 11
- 230000003749 cleanliness Effects 0.000 abstract description 6
- 239000003344 environmental pollutant Substances 0.000 description 19
- 231100000719 pollutant Toxicity 0.000 description 19
- 230000000694 effects Effects 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000003760 hair shine Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 235000019580 granularity Nutrition 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Abstract
The invention discloses a kind of surface inspection cleaning device and systems, wherein the surface inspection cleaning device, including casing and ultraviolet source, casing have one to be suitable for receiving by the cleaning chamber of cleaning appliance, and cleaning chamber has air inlet and suction opening；Suction opening with exhaust equipment for connecting, to carry out exhausting to cleaning chamber by exhaust equipment；Ultraviolet source is located on casing, to the ultraviolet light to the intracavitary offer predetermined wavelength of cleaning and is exposed to by cleaning appliance.The surface inspection cleaning device and system provided according to embodiments of the present invention, ultraviolet source irradiation is intracavitary by cleaning appliance in cleaning, on the one hand, it can excite and be shone by organic material remaining on cleaning appliance, whether luminous organic material is easily observed, and then facilitate inspection clean by cleaning appliance, on the other hand, it is acted on using the photosensitized oxidation of organic material, ultraviolet light can remove the organic material being attached on by cleaning appliance surface, reach higher cleanliness.
Description
Technical field
The present invention relates to OLED manufacturing technology fields, more particularly to one kind is for Organic Light Emitting Diode preparation utensil
Carry out inspection and clean surface inspection cleaning device and system.
Background technique
It is aobvious that Organic Light Emitting Diode (Organic Light-Emitting Diode, OLED) is also known as organic electric laser
Show, organic luminous semiconductor.OLED display technology have self-luminous, wide viewing angle, almost infinite high contrast, compared with low power consumption,
The advantages that high reaction speed.
OLED is generally required in procedure for producing and is used some utensils, such as crucible, mask plate etc., these utensils make
Some organic materials can be remained in, and the required precision of OLED processing and manufacturing is high, therefore, the utensils such as crucible, mask plate need
It wants clean, next use could be used for.In the related technology, it is put into after generally being cleaned by cleaning equipment for these utensils
It uses, still, for even these utensils after over cleaning, also having still may remain some organic materials and some dusts etc.
Pollutant, and these remaining pollutants, it is difficult to be observed, especially organic material, therefore, it is also difficult to identify these
Whether pollutant is clean.
Summary of the invention
The present invention is directed to solve at least some of the technical problems in related technologies.For this purpose, of the invention
One purpose is to propose a kind of surface inspection cleaning device.
It is another object of the present invention to propose a kind of surface inspection cleaning systems.
To achieve the above object, on the one hand, surface inspection cleaning device according to an embodiment of the present invention is suitable for organic hair
Optical diode preparation is checked and is cleaned with utensil, comprising:
Casing, the casing have one to be suitable for receiving by the cleaning chamber of cleaning appliance, the cleaning chamber with air inlet and
Suction opening；The suction opening with exhaust equipment for connecting, to carry out exhausting to the cleaning chamber by the exhaust equipment；
Ultraviolet source, the ultraviolet source is set on the housing, to provide predetermined wavelength to the cleaning is intracavitary
Ultraviolet light simultaneously exposes to described by cleaning appliance.
The surface inspection cleaning device provided according to embodiments of the present invention, ultraviolet source irradiation are cleaning intracavitary cleaned
On utensil, on the one hand, can excite and be shone by organic material remaining on cleaning appliance, luminous organic material is easy observed
It arrives, and then facilitates and check, another aspect whether clean by cleaning appliance, acted on using the photosensitized oxidation of organic material,
Ultraviolet light can remove the organic material being attached on by cleaning appliance surface, reach higher cleanliness.In addition, suction opening connects
The exhaust equipment connect can carry out exhausting to cleaning chamber, and then will clean dust that is intracavitary, being adhered to by cleaning appliance surface, photosensitive
The substance and other pollutants that oxidation is decomposed are expelled to outside cleaning chamber.
In addition, surface inspection cleaning device according to the above embodiment of the present invention can also have following additional technology special
Sign:
According to one embodiment of present invention, further includes:
Loading plate, it is intracavitary and be located at the top of the suction opening, and the loading plate that the loading plate is located at the cleaning
It is equipped with multiple ventilation holes of array arrangement.
According to one embodiment of present invention, further includes:
Dust gathering arrester, the dust be located at it is described cleaning it is intracavitary and be located at the loading plate lower section, the dust gathering arrester
Open upper end forms opening, and the opening is communicated with multiple ventilation holes on the loading plate, the lower end of the dust gathering arrester
Equipped with the suction opening.
According to one embodiment of present invention, the filter plate being located above the suction opening, institute are equipped in the dust gathering arrester
Filter plate is stated suitable for filtering contaminants.
According to one embodiment of present invention, further includes:
Visible light source, the visible light source is set on the housing, to clean intracavitary offer visible light to described, to shine
The bright cleaning chamber.
According to one embodiment of present invention, the ultraviolet source includes multiple ultraviolet lamps, and multiple ultraviolet lamps are extremely
Few a part is located at the roof of the cleaning chamber, and multiple ultraviolet lamps are in the side wall for being located at the cleaning chamber at least partially.
According to one embodiment of present invention, the visible light source includes at least one headlamp, at least one described photograph
Bright lamp is located at the roof and/or side wall of the cleaning chamber.
It according to one embodiment of present invention, further include air cleaning unit, the air inlet and the air cleaning fill
Set it is connected, to carry out purified treatment to the intracavitary air of the cleaning is entered to by the air cleaning unit.
It according to one embodiment of present invention, further include door body, the door body pivotable connection is in the casing, to open
Or the cleaning chamber is closed, the door body is equipped with the transparent window for observing the cleaning chamber.
On the other hand, surface inspection cleaning systems according to an embodiment of the present invention, comprising:
Surface inspection cleaning device as described above；
Exhaust equipment, the exhaust equipment are connected with the suction opening of the surface inspection cleaning device.
The surface inspection cleaning systems provided according to embodiments of the present invention have above-mentioned surface inspection cleaning device, purple
It is intracavitary by cleaning appliance that outer light source is radiated at cleaning, on the one hand, can excite by organic material remaining on cleaning appliance
It shines, luminous organic material is easily observed, and then is facilitated and checked, another party whether clean by cleaning appliance
Face is acted on using the photosensitized oxidation of organic material, and ultraviolet light can remove the organic material being attached on by cleaning appliance surface,
Reach higher cleanliness.In addition, the exhaust equipment of suction opening connection can carry out exhausting to cleaning chamber, and then chamber will be cleaned
It is interior, be expelled to outside cleaning chamber by substance that dust that cleaning appliance surface is adhered to, photosensitized oxidation effect are decomposed and other pollutants.
Additional aspect and advantage of the invention will be set forth in part in the description, and will partially become from the following description
Obviously, or practice through the invention is recognized.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
The structure shown according to these attached drawings obtains other attached drawings.
Fig. 1 is the structural schematic diagram of surface inspection cleaning device of the embodiment of the present invention；
Fig. 2 is the cross-sectional view of surface inspection cleaning device of the embodiment of the present invention；
Fig. 3 is the structural schematic diagram at surface inspection of embodiment of the present invention cleaning device (door body opening) visual angle；
Fig. 4 is the structural schematic diagram at surface inspection of embodiment of the present invention cleaning device (door body opening) another visual angle；
Fig. 5 is the structural schematic diagram of ultraviolet source and visible light source in surface inspection cleaning device of the embodiment of the present invention；
Fig. 6 is the exploded view at one visual angle of ultraviolet source in surface inspection cleaning device of the embodiment of the present invention；
Fig. 7 is the exploded view at another visual angle of ultraviolet source in surface inspection cleaning device of the embodiment of the present invention.
Appended drawing reference:
Casing 10；
Clean chamber P10；
Air inlet 101；
Door body 11；
Transparent window 111；
Ultraviolet lamp 20；
Headlamp 21；
Loading plate 30；
Ventilation hole 301；
Dust gathering arrester 40；
Suction opening 401；
Filter plate 41；
Air cleaning unit 50.
The embodiments will be further described with reference to the accompanying drawings for the realization, the function and the advantages of the object of the present invention.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, it is intended to is used to explain the present invention, and is not considered as limiting the invention, based on this
Embodiment in invention, every other reality obtained by those of ordinary skill in the art without making creative efforts
Example is applied, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside", " up time
The orientation or positional relationship of the instructions such as needle ", " counterclockwise " " axial direction ", " circumferential direction ", " radial direction " be orientation based on the figure or
Positional relationship is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must
There must be specific orientation, be constructed and operated in a specific orientation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more of the features.In the description of the present invention, the meaning of " plurality " is two or more,
Unless otherwise specifically defined.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can be machine
Tool connection, is also possible to be electrically connected；It can be directly connected, two members can also be can be indirectly connected through an intermediary
Connection inside part.For the ordinary skill in the art, above-mentioned term can be understood in this hair as the case may be
Concrete meaning in bright.
In the present invention unless specifically defined or limited otherwise, fisrt feature second feature "upper" or "lower"
It may include that the first and second features directly contact, also may include that the first and second features are not direct contacts but pass through it
Between other characterisation contact.Moreover, fisrt feature includes the first spy above the second feature " above ", " above " and " above "
Sign is right above second feature and oblique upper, or is merely representative of first feature horizontal height higher than second feature.Fisrt feature exists
Second feature " under ", " lower section " and " following " include that fisrt feature is directly below and diagonally below the second feature, or is merely representative of
First feature horizontal height is less than second feature.
The surface inspection cleaning device and system of the present invention is described in detail embodiment with reference to the accompanying drawings.
Shown in referring to Figure 1 to Figure 7, the surface inspection cleaning device provided according to embodiments of the present invention is suitable for organic hair
Optical diode preparation is checked and is cleaned with utensil, including casing 10 and ultraviolet source.
Specifically, casing 10 has one to be suitable for accommodating by the cleaning chamber P10 of cleaning appliance, the cleaning chamber P10 with into
Air port 101 and suction opening 401, suction opening 401 for being connect with exhaust equipment, with by the exhaust equipment to the cleaning chamber
P10 carries out exhausting.
In Fig. 4 example, air inlet 101 is located at the roof of cleaning chamber P10, also, air inlet 101 is multiple, Duo Gejin
Air port 101 is arranged in array, and suction opening 401 is located at the predetermined position of the lower section of air inlet 101, and suction opening 401 is for being connected to
Exhaust equipment (such as exhaust fan) carries out exhausting to cleaning chamber P10 using exhaust equipment, and the air in external environment is from air inlet
101 enter in cleaning chamber P10, then extract out from suction opening 401 via exhaust equipment.
It should be noted that the position of air inlet 101 and suction opening 401 can according to need setting, can also be located at clear
The side wall or other rational positions of clean chamber P10 does not limit herein in addition, the quantity of air inlet 101 also can according to need setting
System.
Ultraviolet source is located on the casing 10, to provide the ultraviolet light of predetermined wavelength into the cleaning chamber P10
And it exposes to described by cleaning appliance.That is, the ultraviolet light that ultraviolet source issues can be projected in cleaning chamber P10
By on cleaning appliance, it can be excited using ultraviolet light and be shone by organic material remaining on cleaning appliance, and utilized photosensitive
Oxidation decomposes remaining organic material, and then reaches clean purpose.Optionally, the purple which provides
The wavelength of UV light can be 185um to 254um.
It should be noted that OLED device work in-process, generally carries out vapor deposition processing using organic material, these organic materials
Material part remains on the utensil used when processing, is put into cleaning chamber P10 when these utensils are used as by cleaning appliance, and by
When ultraviolet light irradiates, the organic material on surface issues fluorescence after being excited, and then is easily observed.In addition, purple
UV light has very high energy, when ultraviolet light is applied to by cleaning appliance surface, due to most of hydrocarbon in organic material
Compound has stronger absorbability to ultraviolet light, and resolves into ion, free state after the energy for absorbing ultraviolet light
Atom, excited molecule and neutron, here it is the effects of so-called photosensitized oxidation, in this way, can be to being attached on using photosensitized oxidation effect
Dismantling-cleaning is played the role of by the organic material on cleaning appliance surface.
The surface inspection cleaning device provided according to embodiments of the present invention, quilt of the ultraviolet source irradiation in cleaning chamber P10
On cleaning appliance, on the one hand, can excite and be shone by organic material remaining on cleaning appliance, luminous organic material is easy quilt
It observes, and then facilitates and check, another aspect whether clean by cleaning appliance, the photosensitized oxidation of organic material is utilized to make
With ultraviolet light can remove the organic material being attached on by cleaning appliance surface, reach higher cleanliness.In addition, exhausting
The exhaust equipments that mouth 401 connects can carry out exhausting to cleaning chamber P10, and then it is interior, attached by cleaning appliance surface to clean chamber P10
Dust, photosensitized oxidation effect decompose substance and other pollutants be expelled to cleaning chamber P10 outside.
It further include loading plate 30 in some embodiments of the invention referring to shown in Fig. 2, Fig. 3, Fig. 6 and Fig. 7, it is described to hold
Support plate 30 is located in the cleaning chamber P10 and is located at the top of the suction opening 401, and the loading plate 30 is equipped with array cloth
The multiple ventilation holes 301 set.The loading plate 30 is for carrying support by cleaning appliance, when being placed on loading plate 30 by cleaning appliance
After upper, during air flows to suction opening 401 from air inlet 101, air passes through by the surface of cleaning appliance, so that by cleaning
The substance and other pollutants that the dust of tool face attachment, photosensitized oxidation effect are decomposed fall off, and by loading plate 30
Multiple ventilation holes 301 flow to suction opening 401, finally extract out via exhaust equipment.
In the present embodiment, using the carrying support of loading plate 30 by cleaning appliance, it is convenient to by the placement of cleaning appliance, together
When, multiple ventilation holes 301 of array arrangement, are also convenient to passing through for pollutant on loading plate 30, improve the cleaning effect of pollutant
Fruit.
It further include dust gathering arrester 40, institute in some embodiments of the invention with continued reference to shown in Fig. 2, Fig. 3, Fig. 6 and Fig. 7
State the lower section that dust gathering arrester 40 is located in the cleaning chamber P10 and is located at the loading plate 30, the open upper end of the dust gathering arrester 40
Opening is formed, the opening is communicated with multiple ventilation holes 301 on the loading plate 30, and the lower end of the dust gathering arrester 40 is set
There is the suction opening 401.
It is the dust adhered to by cleaning appliance surface, photosensitive that is, dust gathering arrester 40 is located at the lower section of loading plate 30
After the substance and other pollutants that oxidation is decomposed fall off, dust gathering arrester is entered to from multiple ventilation holes 301 on loading plate 30
In 40, after collecting by dust gathering arrester 40, then it is sucked into suction opening 401, is extracted out finally by exhaust equipment, in this way, can make
Obtaining pollutant can more thoroughly be removed.
Advantageously, dust gathering arrester 40 be funnel-form, in this way, pollutant can under gravity and swabbing action, centralized collection
The collecting effect of pollutant is improved in the bottom of integrated cover.
Referring to shown in Fig. 2 and Fig. 7, in one embodiment of the invention, it is equipped in dust gathering arrester 40 and is located at the suction opening
401 top filter plate 41, the filter plate 41 be suitable for filtering contaminants, illustratively, the filter plate 41 be microwell plate (i.e. its
On be disposed with multiple micropores), in this way, can stop to filter the thicker pollutant of some granularities by the filter plate 41, keep away
Exempt from the problems such as these thick pollutants are sucked into exhaust equipment, exhaust equipment is caused to damage.
It further include visible light source in some embodiments of the invention referring to shown in Fig. 2, Fig. 4 and Fig. 5, the visible light
Source is located on the casing 10, to provide visible light into the cleaning chamber P10, to illuminate the cleaning chamber P10.
That is, the visible light source can be used for cleaning the illumination of chamber P10, work in the surface inspection cleaning device
When, it is seen that light source illuminates cleaning chamber P10, in this way, can be convenient user observes cleaning chamber P10 inner case, it especially can be with
The pollutants such as dust in cleaning chamber P10 are observed, in order to which user judges the clean conditions in cleaning chamber P10.
Optionally, which can use white light source, and white light source exposes in air, it is easier to observe on ground
Therefore the pollutants such as the dust in air have better identification effect.
Referring to shown in Fig. 2 to Fig. 5, in one embodiment of the invention, ultraviolet source includes multiple ultraviolet lamps 20, multiple
The ultraviolet lamp 20 is in the roof for being located at the cleaning chamber P10 at least partially, and multiple ultraviolet lamps 20 are at least part
It is located at the side wall of the cleaning chamber P10.
That is, it is equipped with ultraviolet lamp 20 in the roof of cleaning chamber P10 and the side wall of cleaning chamber P10 in the present embodiment,
In this way, ultraviolet light can be projected in entire cleaning chamber P10 by multiple ultraviolet lamps 20 from different angles, in order to be cleaned
Each position of utensil can be covered by ultraviolet light, and then reach preferably cleaning and Checking on effect.
Visible light source includes at least one headlamp 21, at least one described headlamp 21 is located at the cleaning chamber P10's
Roof and/or side wall.Illustratively, the visible light source white LED lamp, in Fig. 1 example, headlamp 21 is located at cleaning chamber P10
Roof, and be spaced and be arranged with ultraviolet lamp 20, in this way, can be illuminated entire cleaning chamber P10 using headlamp 21, convenient for clear
Clean conditions in clean chamber P10 are observed.
It referring to figs. 1 to 4, in some embodiments of the invention, further include air cleaning unit 50, the air inlet
Mouthfuls 101 are connected with the air cleaning unit 50, to pass through the air cleaning unit 50 to entering in the cleaning chamber P10
Air carry out purified treatment.
That is, after the air in external environment first passes through the progress purified treatment of air cleaning unit 50, such as filter
Fall the PM2.5 etc. in air, then be sucked into cleaning chamber P10 from air inlet 101, so, it can be ensured that enter to cleaning chamber P10
Interior air cleanliness with higher prevents the pollutant in air from entering in cleaning chamber P10, causes to by cleaning appliance
Further pollution.
It further include door body 11 in one embodiment of the invention, the door body 11 can with continued reference to shown in Fig. 1 to Fig. 4
It is pivotally connected to the casing 10, to open or close the cleaning chamber P10, the door body 11 is equipped with described clear for observing
The transparent window 111 of clean chamber P10.In this way, in use, can use door body 11 and open cleaning chamber P10 or close cleaning chamber
P10, in order to being placed or taken out by cleaning appliance.In addition, facilitating observation cleaning chamber by the transparent window 111 in door body 11
Clean conditions etc. in P10.
Surface inspection cleaning systems according to an embodiment of the present invention, including exhaust equipment and surface inspection as described above it is clear
Clean device, wherein exhaust equipment is connected with the suction opening 401 of the surface inspection cleaning device.
The surface inspection cleaning systems provided according to embodiments of the present invention have above-mentioned surface inspection cleaning device, purple
Outer light source be radiated at cleaning chamber P10 in by cleaning appliance, on the one hand, can excite by organic material remaining on cleaning appliance
Material shines, and luminous organic material is easily observed, and then facilitates and check, another party whether clean by cleaning appliance
Face is acted on using the photosensitized oxidation of organic material, and ultraviolet light can remove the organic material being attached on by cleaning appliance surface,
Reach higher cleanliness.In addition, the exhaust equipment that suction opening 401 connects can carry out exhausting to cleaning chamber P10, and then will be clear
It is expelled to clearly in clean chamber P10, by the substance of dust, photosensitized oxidation effect decomposition that cleaning appliance surface is adhered to and other pollutants
Outside clean chamber P10.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not
It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office
It can be combined in any suitable manner in one or more embodiment or examples.In addition, without conflicting with each other, the skill of this field
Art personnel can tie the feature of different embodiments or examples described in this specification and different embodiments or examples
It closes and combines.
The above description is only a preferred embodiment of the present invention, is not intended to limit the scope of the invention, all at this
Under the inventive concept of invention, using equivalent structure transformation made by description of the invention and accompanying drawing content, or directly/use indirectly
It is included in other related technical areas in scope of patent protection of the invention.
Claims (10)
1. a kind of surface inspection cleaning device, special suitable for Organic Light Emitting Diode preparation is checked and cleaned with utensil
Sign is, comprising:
Casing, the casing have one to be suitable for receiving by the cleaning chamber of cleaning appliance, and the cleaning chamber has air inlet and exhausting
Mouthful；The suction opening with exhaust equipment for connecting, to carry out exhausting to the cleaning chamber by the exhaust equipment；
Ultraviolet source, the ultraviolet source is set on the housing, to provide the ultraviolet of predetermined wavelength to the cleaning is intracavitary
Light simultaneously exposes to described by cleaning appliance.
2. surface inspection cleaning device according to claim 1, which is characterized in that further include:
Loading plate, it is intracavitary and be located at the top of the suction opening that the loading plate is located at the cleaning, and sets on the loading plate
The multiple ventilation holes for thering is array to arrange.
3. surface inspection cleaning device according to claim 1, which is characterized in that further include:
Dust gathering arrester, the dust be located at it is described cleaning it is intracavitary and be located at the loading plate lower section, the upper end of the dust gathering arrester
It opens wide and forms opening, the opening is communicated with multiple ventilation holes on the loading plate, and the lower end of the dust gathering arrester is equipped with
The suction opening.
4. surface inspection cleaning device according to claim 1, which is characterized in that be equipped in the dust gathering arrester described in being located at
Filter plate above suction opening, the filter plate are suitable for filtering contaminants.
5. surface inspection cleaning device according to claim 1, which is characterized in that further include:
Visible light source, the visible light source is set on the housing, to clean intracavitary offer visible light to described, to illuminate
State cleaning chamber.
6. surface inspection cleaning device according to claim 1, which is characterized in that the ultraviolet source includes multiple ultraviolet
Lamp, multiple ultraviolet lamps are in the roof for being located at the cleaning chamber at least partially, and multiple ultraviolet lamps are at least part
It is located at the side wall of the cleaning chamber.
7. surface inspection cleaning device according to claim 5, which is characterized in that the visible light source includes at least one
Headlamp, at least one described headlamp are located at the roof and/or side wall of the cleaning chamber.
8. surface inspection cleaning device according to claim 1, which is characterized in that it further include air cleaning unit, it is described
Air inlet is connected with the air cleaning unit, with by the air cleaning unit to entering to the intracavitary air of the cleaning
Carry out purified treatment.
9. surface inspection cleaning device according to claim 1, which is characterized in that further include door body, the door body can pivot
Turn to be connected to the casing, to open or close the cleaning chamber, the door body is equipped with for observing the saturating of the cleaning chamber
Photopic vision window.
10. a kind of surface inspection cleaning systems characterized by comprising
Surface inspection cleaning device as claimed in any one of claims 1-9 wherein；
Exhaust equipment, the exhaust equipment are connected with the suction opening of the surface inspection cleaning device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910250952.1A CN109894433A (en) | 2019-03-29 | 2019-03-29 | Surface inspection cleaning device and system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910250952.1A CN109894433A (en) | 2019-03-29 | 2019-03-29 | Surface inspection cleaning device and system |
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| CN109894433A true CN109894433A (en) | 2019-06-18 |
Family
ID=66954909
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| CN201910250952.1A Pending CN109894433A (en) | 2019-03-29 | 2019-03-29 | Surface inspection cleaning device and system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023010619A1 (en) * | 2021-08-05 | 2023-02-09 | 长鑫存储技术有限公司 | Device detection method and system |
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