TW200905151A - Heat treatment equipment - Google Patents

Abstract

The invention provides heat treatment equipment, causing that it is difficult for sublimates generated from the heated treatment products to flow out through an air guide hole. The heat treatment equipment includes a main body of the equipment including a heat treatment chamber, holding the heated treatment products, which can be extracted from the heat treatment chamber; and a heating chamber, communicating with the heat treatment chamber, wherein in the heating chamber, the heat treatment air is heated through the air guide hole of the heating chamber to the heating chamber, for heat treatment on the heated treatment products, and the air after heat treatment is inducted from the heat treatment chamber through the air guide hole arranged at the heat treatment chamber.; The heat treatment equipment is provided with accelerants, jammed at an inlet of the air guide hole, which decomposes the sublimate generated from the heated treatment products included in the air after heat treatment.

Description

200905151 ' IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a heat treatment apparatus for heat treatment of a 7U i ..., a dry material.

L flawless technique J / a conventionally known heat treatment apparatus ‘the heat treatment chamber in the heat treatment chamber is heated to the heat-receiving chamber contained in the heat treatment chamber; the material is subjected to heat treatment. Such a heat treatment device can be used, for example, for the center/Phot in the manufacturing process of a Hat Panel Dlsplay. Resist) or pre-supplied organic film, post-bake process. Name;; ancient sand. In the second step, when the heat-treated material of the glass substrate I is subjected to heat treatment, the light, and the volatile components contained in the film, are formed to generate a large amount of sublimate. Among them, there is a problem that the sublimate recrystallizes and adheres to the heat treatment apparatus. . n As a solution to this problem, the Kaiping-No. Gazette discloses this special: public = outdoor air and sent it to the above-mentioned side to heat the air in the above heat treatment chamber to the inside - side through the outlet pipe to make the soil 3 J / Show off, take the breath. In this way, the inside of the heat treatment chamber is subjected to crystal change and adhered to the heat treatment apparatus p, and the sublimation material may be suppressed. Alternatively, the heat treatment chamber medium may be used instead of or in addition to the heat treatment catalyst. The ventilation in the chamber for removing the sublimate is not disposed inside. However, even with the same, it will lead to heat production.

2014-9644-PF 200905151 The sublimate material is not touched. θ Wow, the heart flows out to the gas outlet hole, and the recrystallized sublimate is attached to the gas outlet hole or the outlet tube connected thereto. Therefore, the above heat treatment apparatus leaves room for improvement. SUMMARY OF THE INVENTION The purpose of the present invention is to provide a heat treatment apparatus which makes it difficult for a raw material generated from a material to be heat-treated at a rail to be discharged through a gas outlet hole. The heat treatment device related to the local θ $ surface includes a device body having: a heat treatment chamber for accommodating the heat-treated material, the heat-treated material can be heat-treated from 4 to be taken out; and a heating chamber communicating with the heat treatment chamber, wherein In the heating chamber, the gas is introduced into the heating chamber and the inlet hole is introduced into the heating g_heat treatment t body to heat the material to be heat-treated, and the gas is heat-treated by the heat treatment. a hole for extracting a heat-treated gas from the heat treatment chamber. The main point of the heat treatment apparatus is that a catalyst is provided to block an inlet of the gas outlet hole, and the catalyst can decompose the gas contained in the heat-treated gas from the above Sublimate produced by the heat treated material. Therefore, it is difficult for the sublimate generated from the object to be heat-treated at the time of heat treatment to flow out through the gas outlet hole. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. (First Embodiment)

2014-9644-PF 6 200905151 Fig. 1 is a schematic configuration diagram of a heat treatment apparatus according to a first embodiment of the present invention. This heat treatment apparatus 1A is used, for example, in the manufacturing process of a flat panel display. This device 1A is disposed in a clean room (Clean R〇〇m) and is referred to as a dust-free oven. The heat treatment apparatus 1A includes a device main body 10 having therein a heat treatment chamber U for accommodating a heat-treated product (workpiece) w, which can be taken out from the heat treatment chamber 11; and a heating chamber 1 2 , supplying hot air to the heat treatment chamber. In the illustrated example, the heating chamber 12 is disposed above the heat treatment chamber 11. The apparatus main body 1 〇 1 has a rectangular shape in the shape of a box having four sides (side walls) of a ceiling (top) and a bottom (bottom). Here, the right side (right side wall) is 1 〇a, the inner side (inner side wall) is i 〇 b, the left side (left side wall) is 10c, the ceiling is 1 〇d, and the bottom is 1 〇e. A gas introduction hole 14 is provided at a height position of the right side surface 10a corresponding to the heating chamber 12. The gas guiding hole 14 is disposed on the side of the heating chamber 12, and the gas introducing hole 14 communicates with the introduction pipe 15 attached to the outside of the right side surface i 〇 a. Further, a gas lead-out hole 16 is provided on the right side from a height position corresponding to the heat treatment chamber u of 1〇a (a position close to the bottom surface of the heat treatment chamber u in the illustrated example). That is, the gas lead-out hole 6 is provided on the side wall of the heat treatment chamber 11. This gas lead-out hole 16 communicates with the lead-out tube I? attached to the outside of the right side surface 10a. Import g 1 5 and gas inlet holes! 4 is for introducing outdoor air into the air supply opening 16 and the outlet pipe η for discharging the air in the heat treatment chamber 11 to the outside. A split sheet 3 is disposed between the heating chamber 12 and the heat treatment chamber 上述.

2014-9644-PF 7 200905151 The plate 1 3 horizontal frame a is formed between the separation plate 13 and the right side surface 10a on the inner side surface 1 〇b and the front side surface not shown in the figure opposite to the inner side surface 1 〇b. A gap 13a' is formed with a gap between the separation plate 13 and the left side surface 10c, that is, a gap 13a close to the gas introduction hole 14 and the gas outlet hole 16 side and the deviation gas introduction hole 14 and the gas are formed in the I body 10. The gap i3b on the side of the hole 16. The heating pad above the 卞 (4) separating plate 13 is provided with a heater 2 〇 and a blower 21. The heater 2 送 returns the heated outdoor air body to the heat treatment chamber 11 by the outdoor air passing through the introduction pipe 15 and the gas introduction hole and the air circulating in the apparatus main body 1 . The air of the circle. The gap 13a is located on the wind side of the blower?!, please be located on the air supply side of the blower 21. On the right side of the heat treatment chamber n, the entrance of the touch medium outlet hole 16 is adjacent to the ground 8 m ^ female 1 The inlet of the wind 16 ^...^ The catalyst 22 blocks the other: 163 of the gas outlet hole ί6. The catalyst 22 is fixed by a fixing member (not shown). - Alternatively, it is provided inside the heat treatment chamber u, and can be held, for example. - One or two 埶, β deterministic states. In the figure ", the two-point secant table 亍 = process 4 " the catalyst 22 is used to promote the heat treatment::: the position of the component. The oxidative decomposition reaction of the object, as The catalyst 22, for example, a noble metal such as sublimation palladium (Pd) contained in III, is made of platinum (Pt), and the catalyst is an active metal such as an alloy of about 15. genus. This energy can be obtained by the right temperature of the air. Catalyst uses a heater 20 in a heat treatment apparatus having such a structure

2014-9644-PF 200905151 The air introduced into the heating chamber i2 through the introduction pipe 15 and the gas introduction hole 14 is heated, and the heated wire is supplied to the heat treatment ut through the gap by the blower 21. The hot air introduced into the heat treatment chamber n is supplied to the heating chamber through the gap 13a to perform a loop. During this loop, part of the air is exhausted through the gas outlet hole 16 and the outlet tube (4). The air that has been supplied to the heating chamber 12 through the gap 13a and that is looped is mixed with the air introduced from the gas introduction hole 14. The workpiece w in the heat treatment chamber u is heat-treated by the air thus flowing. At this time, the sublimate a is generated from the workpiece w, and the haihai sublimate A is moved in the air in which the heat treatment is completed. If the sublimate A comes into contact with the catalyst 22 disposed at the inlet 16& of the ::extraction hole 16, the sublimate A is removed by the oxidative decomposition reaction. The air from which the sublimate A is removed is discharged through the gas outlet hole 16 and the outlet pipe 17. Therefore, in the heat treatment apparatus u of the first embodiment, the following effects can be obtained. In order to block the inlet 16a of the gas outlet hole 16 by the catalyst 22, the air to be discharged through the gas outlet hole 16 is separated from the catalyst by the heat treatment of the sublimate A generated from the heat-treated material w. Μ: Contact. Therefore, it is possible to realize that the sublimated material A is difficult to "flow" from the gas outlet hole, and the heat-treated air of the package A is cooled in the outlet pipe I), and the catalyst 22 can be used to decompose the sublimate a. Therefore, The temperature of the catalyst 22 is lowered, and the processing efficiency of the catalyst 22 can be increased.

2014-9644-PF 200905151 (C) Since the catalyst 22 is disposed in the heat treatment, it cannot be accommodated in the gas outlet hole 16^, so that the heat treatment of the sublimate A can be performed. And because of the _, the working milk is looped in the heat treatment chamber 11, so it is passed through the heat treatment chamber n! 〇 — 1 1 The catalyst 2 2 ' can be used to increase the probability of contact with the catalyst 2 in the flow of the sublimate ... and the contact with the catalyst 2 2 . Accordingly, the catalyst 22 can further promote the promotion of the oxygen and h 7 decomposing reactions of the sublimate. (Second Embodiment) Fig. 2 is a schematic configuration diagram of a heat treatment apparatus according to a second embodiment of the present invention. In the drawings, the same reference numerals are attached to the same members as those in Fig. 1. This heat treatment package i 1B includes a split plate 30 disposed between the heating chamber 12 and the heat treatment chamber U in place of the separation plate 13 of the heat treatment set ia of the first embodiment. This dividing plate 3 is horizontally supported by the right side surface 1" of the apparatus main body 1" "the inner side surface 1b" and the front side surface. Further, a gap 3〇a is formed only between the partition plate 3A and the left side surface l〇c. That is, the gap 3〇& is provided on the opposite side to the right side surface 〇a where the gas introduction hole 14 and the gas lead-out hole 16 are provided. In other words, a gap is added to the air supply side of the blower 2j. On the air suction side of the air blower 21, no gap is provided. In the heat treatment apparatus 1B, the air introduced into the heating chamber 12 through the introduction pipe 15 and the gas introduction hole 14 is heated by the heater 20, and is blown by the air blower 21. The heated air is supplied to the heat treatment chamber 11 through the gap 3〇a. Further, the air is not returned to the heating chamber 12, and the sublimate a is removed by the catalyst 22 and discharged through the gas outlet hole 16 and the outlet tube 17. Because it is introduced into the device body 1 through the gas introduction hole 14

2014-9644-PF 10 200905151 The work knows: according to the chamber 〗9 ^ ..., to u, the heat treatment chamber 11, the gas moves, so as the order of the holes 16 is exported, the second gas will not be from the heat treatment chamber 11 1 2 〇王丄1 returned to the heating chamber mouth this 'in this second sound big & gentleman, the effect 'in addition' can also get the following (d) the same (a) ~,,, ' can be obtained with The effect of the first embodiment. The mouth is the air does not come from the processing room 1] The door is not smashed, from the twisting chamber to the 11th return to the heating chamber 12' household) The fresh inside of the Chinese A is not included in the male 斩^ The fresh air that has passed through the gas introduction hole 1 is subjected to heat treatment in the heat treatment room, and the meat is dip θ1 so that the contact with the U can also be removed. Further, in the heat treatment chamber, (4) the increase in the concentration of the catalyst 22 which is inferior to the U in the U is read. (Third Embodiment) Fig. 3 is a second embodiment of a heat treatment apparatus according to a third embodiment of the present invention. The same reference numerals are attached to the same members as those of Fig. 1. This heat treatment apparatus 1C, a μ striker is at 5 The point at which the return pipe 18 is placed is different from that of a heat treatment device u, which is a Leshan "U", and the return pipe 18 returns the portion of the air flowing through the guide 7 to the introduction pipe ^. It is connected to the midway portion of the introduction pipe 15, and the other end is connected to the intermediate portion of the outlet pipe 17. The blast pipe 19 is provided inside the return pipe 18, and the gas is circulated from the other end to the one end. In the heat treatment apparatus 1, the same effects as those of the first embodiment (Ο, (1), and (1) can be obtained, and further, the following can be obtained.

2014-9644-PF 11 200905151 The effect of (e). e is that the portion of the heat-treated air discharged through the gas outlet hole U is returned to the gas introduction hole 14 through the return pipe 18 (the heating chamber' can reuse the heat of the heat-treated air to the heat treatment of the heat-treated material W. Further, the heat treatment apparatus shown in Fig. 4 can also obtain this effect. (e) The processing apparatus 1D is a device in which the return pipe 1? of the present embodiment is provided in the heat treatment apparatus shown in Fig. 2. [Embodiment] Fig. 5 is a schematic configuration diagram of a heat treatment apparatus according to a fourth embodiment of the present invention. In the figure, 'the same members as those in Fig. 2 are denoted by the same reference numerals. The configuration of the head and the method of arranging the catalyst are different from those of the heat treatment apparatus 1 of the first embodiment. Hereinafter, the differences will be described in detail. The catalyst 32 is attached to the head of the discharge tube 31. The catalyst 32 passes through The illustrated tl piece is detachably attached to the outlet pipe 31. The outlet pipe 31 has a flange 31a that protrudes toward the outer peripheral surface thereof. The outlet pipe 31 is inserted into the gas outlet hole 16 at a portion closer to the head than the flange 31a. Inside. The outlet pipe 3 to which the catalyst 32 is attached to the head is inserted in order from the head to the gas outlet hole 16 so that the flange 3丨a abuts against the outer wall surface of the right side face a. In this state, the screw is passed. The flange 31a is fixed to the right side i 〇a', and the catalyst 32 is disposed at the inlet 16a of the gas outlet hole 16. The size and cross-sectional shape of the catalyst 32 is substantially the same as that of the gas outlet hole 16. The section and dimensions are the same. The position of the inlet of the catalyst 32 and the gas outlet hole 16

2014-9644-PF 12 200905151 The relationship is set such that the end face of the heat treatment chamber 11 side of the catalyst 3 2 and the inlet 16 6a of the gas lead-out hole 16 are located on the same plane, : 3⁄4 test, the catalyst 32 and the heat treatment chamber 11 The end surface opposite to the end surface of the side is located in the gas ', month, and the 孑 L 16 , and the end surface on the side of the heat treatment chamber 11 of the catalyst 32 protrudes from the inlet 16 6a of the gas café awu 16 toward the heat treatment chamber 11 side. Therefore, in the heat treatment apparatus 1E, the effects of U) to (d) which are the same as those of the second embodiment can be determined. Further, the effects of the following (1) can be obtained.

(f) By inserting the head of the outlet tube 31 into the gas outlet port, the catalyst 32 can be disposed to block the inlet of the gas outlet hole 16. Instead, the outlet tube 3 can be removed by removing the outlet tube 3 from the gas outlet hole 16. 2: The gas outlet hole 16 is disengaged, and this 'can be easily exchanged with the catalyst' 32. In addition, in the fourth embodiment, the end face of the outlet tube 31 is provided with a contact lens 32' However, it is also possible to arrange a catalyst on the inside of the head of the lead f 31. If the catalyst is to be disposed inside the shunt portion of the outlet tube 31, the gas is not allowed to be in the gas outlet hole 16 There is a gap between the outlet tube 31 and the outlet tube 31. Alternatively, the catalyst 32 separated from the outlet t 31 may be prepared, and the catalyst 3 2 is first placed in the gas outlet hole 16 and inserted into the outlet tube 31 there, using the outlet tube 31. Pushing, the catalyst 32 is disposed and covered on the inlet 16a. In this case, if a stopper having a hole is provided in the inlet 16a of the gas outlet hole 16, positional determination and prevention of falling off can be easily achieved. Heat treatment device 1A of Fig. 1, heat treatment device 1C of Fig. 3, and Fig. 4 The above-described effect (f) can of course be obtained in the same manner in the configuration of the discharge tube 31 and the catalyst 32 of the fourth embodiment in the processing apparatus 1D. 2014-9644-PF 13 200905151 In the first to fourth embodiments described above The gas introduction port 4 and the gas outlet hole 16 are disposed on the same right side face. However, the present invention is not limited thereto, and the gas introduction hole 14 and the gas lead hole may be disposed on the other three sides. On one of the sides, the gas introduction port and the gas outlet hole 16 are disposed on different sides.

Further, the first to fourth embodiments described above exemplify a heat treatment apparatus in which the heating chamber 12 is disposed above the heat treatment chamber U. However, the present invention is not limited to this, and the heating chamber may be disposed below the heat treatment chamber. Or a side heat treatment device. (Summary of the Examples) The following are summarized as follows: (1) In the present embodiment, 'the catalyst for clogging the inlet of the gas outlet hole' is provided, so that the heat-treated gas containing the sublimate material from the milk seat at the object to be heat-treated is contained. The gas to be discharged through the gas outlet hole is in contact with the catalyst. Therefore, it is possible to make it difficult for the sublimate to flow out from the gas outlet hole. Further, the heat-treated gas containing the sublimate may be decomposed by the catalyst before being cooled in the discharge tube. Thereby, J μ suppresses the temperature drop of the catalyst, and the processing efficiency of the catalyst can be improved. (2) In the above heat treatment apparatus, the above-mentioned catalyst is disposed inside the heat treatment. According to this structure, since the catalyst is disposed inside the heat treatment chamber, the hand can be placed in the heat treatment chamber to change the catalyst. Further, since it is possible to use a catalyst which cannot be accommodated in the gas outlet hole and has a large size, it is possible to increase the probability of contact with the catalyst when the heat-treated gas 7 body containing the sublimate is recirculated in the heat treatment chamber. Millenium. Thereby, the catalyst can be made to rise

2014-9644-PF 14 200905151 The promotion of the oxidative decomposition reaction of Chinese is further improved. (3) In the above-described heat treatment device, the extension tube includes a discharge tube, and the head of the outlet tube is detachably inserted from the outside of the apparatus main body to the inside of the gas outlet hole, and the catalyst blocks the gas The size of the I port of the outlet hole is '' and is disposed at the head of the above-mentioned outlet pipe. Further, the upper portion is inserted into the gas lead-out hole, and the catalyst is placed in the gas guide port. According to this configuration, the population of the gas outlet holes can be blocked by inserting the head of the outlet tube into the gas outlet opening and disposing the catalyst. Conversely, the gas outlet is removed from the outlet tube to disengage the catalyst from the gas outlet. Therefore, the exchange of the catalyst can be easily performed. D4) In the above heat treatment apparatus, a part of the oxygen discharged from the gas outlet hole is returned to the gas introduction hole. According to this configuration, the portion of the heat-treated gas discharged from the pores is returned to, and the heat of the treated gas can be reused in the heat treatment of the heat-treated material.丄5) In the above heat treatment apparatus, the apparatus main body is provided with a partition plate between the heating and heating chambers, and only gas is allowed to flow from the above-mentioned heat exchanger chamber to the heat treatment chamber. According to this configuration, since the gas introduced into the apparatus main body through the gas V inlet hole flows in the order of the heating tank, it is supplied from the heating chamber to the hot portion 2: the pore body 疋 does not contain the fresh gas of the sublimate. Thereby, it is possible to perform the reduction by using a fresh gas guided from the scorpion guide hole. ^ In the heat treatment chamber, the increase in the concentration of the sublimate in the chamber. Moreover, the sputum suppresses the gas stagnation, and therefore, the catalyst can also be suppressed.

2014-9644-PF 15 200905151 The increase in the concentration of the sublimate in the heat treatment chamber caused by the deterioration. In the heat treatment apparatus of the present invention, a gap is provided between the heating chamber and the heat treatment chamber on the air supply side where the air blower is provided in the heating chamber.裉摅 ^ According to this configuration, the M, wind, and ^1 introduced into the heating chamber through the gas introduction hole are discharged to the body outlet hole through the gap. Therefore, the name flows to the order in which the pores are led out through the milk. And (10) [Schematic Description of Schematic Configuration] Schematic Configuration of Schematic Configuration of the Schematic Configuration of the Apparatus of the First Embodiment of the Present Invention. Fig. 2 is a view showing the heat treatment of the second embodiment of the present invention. Fig. 3 is a view showing a heat treatment apparatus of a third embodiment of the present invention. Fig. 4 is a view showing another heat configuration of a third embodiment of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 3 is a schematic view showing a heat treatment structure of a fourth embodiment of the present invention. [Description of main components] W~heated material; 1A~heat treatment device; 10~device body;

2014-9644-PF 16 200905151 1 0 a~right side; 1 0 b ~ inner side; 1 0 c~ left side; 10d~ ceiling; 10e~ bottom; 13~ separation board; 11~ heat treatment room; ~ heating chamber; 13a, 13b~ gap; 14 ~ gas introduction hole; 15~ introduction tube; 16~ gas outlet hole; 1 6 ~ inlet; 17~ outlet tube; 2 0~ heater; 21 ~ blower; catalyst. 17

2014-9644-PF

Claims (1)

200905151 X. Patent application scope: ι_: a heat treatment device comprising a main body of the device, the main body of the device having: heat=to, containing the heat-treated material 'the heat-treated material can be taken out from the heat treatment to the middle; and the heating chamber, and the heat treatment described above In the room of the Bean, the heating chamber is heated by the heat treatment gas that has been introduced into the heating chamber through the gas introduction hole provided in the heating chamber, and is provided in the heat treatment chamber by the above-mentioned == heat treatment a gas "hole, the heat-treated gas is led out from the heat treatment chamber, and the temple is provided with a catalyst to block the inlet of the gas-extracting hole, and the catalyst can decompose the heat-treated gas to be sublimated by the heat-treated material. The heat treatment device according to claim 1, wherein the catalyst is disposed inside the heat treatment chamber. ', rear, wherein the size of the main body port of the device, and the scope of the patent application 帛The heat treatment of item 1 includes: a discharge tube whose head is detachably from the outer side Entering the inside of the gas lead-out hole, the 'catalyst having a gas clogging hole is disposed in a head portion of the lead-out tube to return a part of the heat treatment gas described in the catalyst item Heat treatment The above-mentioned outlet tube is inserted into the gas outlet hole and disposed at the inlet of the gas outlet hole. 4. As in the scope of claims 1 to 3, the device 'the towel' is discharged from the gas outlet hole. The gas introduction hole is as follows: 5. As claimed in any one of claims 1 to 3, in the winter, the 9644-PF 18 200905151 device 'where' is provided with a dividing plate between the processing chambers and the section VIII' The heating chamber heat chamber flows to the above-mentioned heat treatment chamber. The knife μ plate only allows gas 6. The heat treatment device described in the patent scope of the range of μ μΛ Μ ^ ^ ^ ^ is provided with a blower in the upper heating, only in the above-mentioned blower The air supply side is provided with a gap that connects the heating chamber and the chamber. The heat is added from the above, wherein the heat is 2014-9644-PF 19