200821526 九、發明說明： 【發明所屬之技術領域】 本發明是關於一種對被處理物進行熱處理的熱處理褒 置。 ’ 【先前技術】 一般習知的熱處理裝置可在被處理物收納於熱處理部 内的狀態下，一邊使上述熱處理部内的空氣循環，一邊進 行加熱，藉由此加熱空氣對上述被處理物進行熱處理。 此種熱處理裝置在FPD(平面顯示器）等的製造過程 中，有％會被使用在光阻、有機物薄膜的預供製程、後供 製程等。在這些製程中，當由玻璃基板等所組成的被處理 物受職處理時，絲等所含有的揮發性成分會汽化，產 生多里的幵華物’ &昇華物會再結晶，造成散佈於熱處理 裝置周圍或附著於其周圍等問題。200821526 IX. Description of the Invention: [Technical Field] The present invention relates to a heat treatment apparatus for heat-treating a workpiece. [Prior Art] The heat treatment apparatus of the prior art heats the air in the heat treatment unit while the workpiece is stored in the heat treatment unit, and heats the object to be processed by the heated air. In the manufacturing process of such an FPD (Flat Panel Display), such a heat treatment device is used in a photoresist, a pre-supply process of an organic film, a post-feed process, and the like. In these processes, when a processed object composed of a glass substrate or the like is subjected to a treatment, volatile components contained in the filaments and the like are vaporized, and a plurality of smelting materials are generated, and the sublimate is recrystallized to cause scattering. Problems around or around the heat treatment device.
作為此問題的對策’特開平1(M41868公報揭露— 裝置’其加熱外部空氣’將其送入上述熱處理部内，另 方面’使上述熱處理部内的空氣流至導出管内，藉此， 行上述熱處理部内的拖今 曰 ㈣換乳°如此’可藉由進行熱處理部 的換乳’阻止昇華物的再結晶及其在周圍的附著。 /不過：如上所述，在換氣之後，從熱處理部流出的 氣在導出管内流動時會^^ . ^ _ 疑慮。 p，有幵華物在導出管内堆積 2014-8933-PF;Ahddub 5 200821526 【發明内容】 冬月的目的在提供一種用來解 裝置。 、工逆同碭的熱處理 ’本發明的另一目的太接 導出營_ 力目的在&供一種可阻止昇華物在 、 内堆積的熱處理裝置。 根據本發明的並中一 声疎邱免 中種構以’可在被處理物收納於埶 處理部内的狀態下，一邊 … 邊使上述熱處理部内的空氣循環， 邊進"ί亍加執，蕤士卜斜u 一、良 猎此對上述被處理物進行熱處理，並且， 、加熱外部空氣，將其送入上 诫埶卢Μ 4…蜒理邛内，一邊使上 过”、、她理邛内的空氣流 理部内的_ ^ 冑此，進行上述熱處 斟F、+、；占 守2=1 &上口又有觸媒，其可分解 對上述被處理物進行埶慮 仃”、、羼理呀攸该被處理物產生的昇華 物0 〒 其進一 至上述 熱處理 ，上述 不將上 流至上 出的空 其可分 的昇華 本毛明的另一種構造為一種熱處理裝置， 步包括可將被處理物收納於内部的熱處理部、連接 熱處理部的導出管及加熱外部空氣並將其送入上述 邛内以對上述被處理物進行熱處理的空調部，其中 空調部可藉由將外部空氣送人上述熱處理部I在 述，處理部内的空氣送回該空調部的情況下，使其 述^ S内’上述導出管具有將從上述熱處理部流 氣全部排放至外部的構造，此導出管上設有觸媒， 解對上述被處理物進行熱處理時從該被處理物產生 物0 【實施方式】 2014-8933-PF；Ahddub 200821526 以下一邊參照圖面，_邊詳細說明用來 最佳型態。 只她本發明之 弟1圖為概略表*本發明之熱處理裝 型態的圖。如同一 m — /、中一 K施As a countermeasure against this problem, the opening of the heat treatment unit is disclosed in the above-mentioned heat treatment unit. (4) Changing the milk so that 'removing the milk in the heat treatment section' can prevent the recrystallization of the sublimate and its adhesion around. / However: as described above, after the ventilation, the heat is discharged from the heat treatment section. When the gas flows in the outlet tube, it will be ^^. ^ _ doubts. p, there is a stack of materials in the outlet tube 2014-8933-PF; Ahddub 5 200821526 [Invention content] The purpose of the winter moon is to provide a device for solving the problem. Another object of the present invention is to provide a heat treatment device for preventing the sublimation from accumulating in the interior of the present invention. In the state in which the object to be processed is stored in the enamel processing unit, the air in the heat treatment unit is circulated, and the enthalpy is added to the 热处理 卜 蕤 蕤 蕤 一 一 一 一The object to be treated is heat-treated, and the outside air is heated and sent to the upper 诫埶 Μ 蜒 蜒 , , , , , , , 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 空气 空气 空气 空气 空气Therefore, the heat is performed 斟F, +,; 占2=1 & the upper mouth has a catalyst, which can decompose the above-mentioned object to be treated, and the object is produced. The sublimate material 〒 进 进 进 进 进 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一 另一An outlet pipe connecting the heat treatment unit and an air-conditioning unit that heats the outside air and feeds the inside into the crucible to heat the workpiece, wherein the air-conditioning unit can be sent to the heat treatment unit I by the outside air, and the processing unit When the air is returned to the air-conditioning unit, the above-mentioned outlet pipe has a structure in which all of the gas is discharged from the heat-treating portion to the outside, and the catalyst is provided on the outlet pipe to solve the above-mentioned treatment. When the heat treatment is performed, the material to be processed 0 is obtained. [Embodiment] 2014-8933-PF; Ahddub 200821526 The following is a detailed description of the image for use in the best mode. Only her brother 1 of the present invention is a summary table. * Figure of the heat treatment type of the present invention, such as the same m - /, medium one K
圖所不，第1實施型態之熱處 被使用於FPD的掣$ tL ^ 处理衣置1A 〇氣私，此熱處理裝置1A設置於無 為無塵烤箱。 塵至梆 上述熱處理裝置1人包括一妒 壁圍繞空間_室2乂 …、至20。上述隔熱室20的内部藉由隔板 開’相對於隔板24為左側的部分為熱處理部2卜右 側的部分為空調部23。隔板24上形成開口，此開口内配 没有過濾1 31。藉此，可透過過濾器31使之通風。又， 在圖不中雖省略’但在裝置本體2上設有連通路徑，用來 連通熱處理部21的内部和空調部23的内部。 在上述熱處理部21的内部，設有工作物支持部22。 此工作物支持部22可維持由玻璃基板等所組成的複數個 1皮處理物（以下僅稱為工作物）w維持在上下並列的狀態。 藉由在此工作物支持部22上支持工作物w，該工作物？被 收納於熱處理部21内。 在上述空調部23上，設有加熱器32及送風機33。加 熱器32用來加熱空調部23内的空氣，送風機33可透過過 濾1§ 31將空調部23内的空氣送入熱處理部21内。然後， 田藉由送風機33將空氣送入熱處理部21内時，熱處理部 21内的空氣經過省略圖示的連通路徑，回到空調部2 3内。 然後’回到空調部23内的空氣藉由再度加熱器32加熱。 2 014-8933 -PP；Ahddub 7 200821526 : '之Μ處理部21内的空氣-邊受到循環，一邊受到加 熱’藉此，收納於熱處理部21内的工作物w受到熱處理。 再者在上述空調部23上，連接有吸氣管4，又，在 上述熱處理部21上，連接有導出管5。然後，從吸氣管4 吸入的的外邛空氣經過空調部23及過濾器”被送入熱處 里口P 21内，並且，熱處理部21内的空氣流至導出管$内， 藉此，熱處理部21的内部得以換氣。In the figure, the heat of the first embodiment is used for the FPD's 掣$tL^ treatment of the garment 1A, and the heat treatment apparatus 1A is set to the non-dust oven. Dust to 梆 One of the above heat treatment devices includes a wall surrounding the space _ chamber 2 乂 ..., to 20. The portion of the heat insulating chamber 20 which is open to the left side of the partition plate 24 with respect to the partition plate 24 as the left side of the heat treatment portion 2 is the air conditioning portion 23. An opening is formed in the partition 24, and there is no filter 1 31 in this opening. Thereby, it can be ventilated through the filter 31. Further, although not shown in the drawings, a communication path is provided in the apparatus main body 2 for communicating the inside of the heat treatment portion 21 and the inside of the air conditioning portion 23. A workpiece support portion 22 is provided inside the heat treatment portion 21. The workpiece supporting portion 22 can maintain a state in which a plurality of skin treatments (hereinafter simply referred to as workpieces) composed of a glass substrate or the like are maintained in the vertical direction. By supporting the work w on the work support portion 22, the work object? It is housed in the heat treatment unit 21. A heater 32 and a blower 33 are provided in the air conditioning unit 23. The heater 32 is for heating the air in the air conditioning unit 23, and the blower 33 can feed the air in the air conditioning unit 23 into the heat treatment unit 21 through the filter 1 § 31. When the air is sent into the heat treatment unit 21 by the air blower 33, the air in the heat treatment unit 21 passes through a communication path (not shown) and returns to the air conditioning unit 23. Then, the air returned to the air conditioning unit 23 is heated by the reheater 32. 2 014-8933 -PP; Ahddub 7 200821526 : 'The air in the processing unit 21 is circulated and heated while being heated', whereby the workpiece w accommodated in the heat treatment portion 21 is subjected to heat treatment. Further, an air intake pipe 4 is connected to the air conditioning unit 23, and a discharge pipe 5 is connected to the heat treatment portion 21. Then, the outside air sucked from the intake pipe 4 is sent into the heat port P 21 through the air conditioning unit 23 and the filter ", and the air in the heat treatment portion 21 flows into the discharge pipe $, whereby The inside of the heat treatment portion 21 is ventilated.
上述$出官5的其中一端部連接至熱處理部21。導出 吕5具有開放至外部的排氣管51及從此排氣管η分支出 去且連接至上述吸氣管4的回流管52。排氣管51用來將 從上述熱處理部21流出的空氣直接排放至外部，回流管 52可透過上述吸氣管4將從上述熱處理部21流出的空氣 送至再度熱處理部21内。 在上述回流管52的中途，設有吹風機7和觸媒6。觸 媒6在上述排氣管51中，配置於相對於上述回流管52所 刀支出末的位置為上游的部分。此外，觸媒6如第1圖中 的虛線所示，在回流管52中，可設置於吹風機7的上游的 部分。 上述觸媒6可在上述對工作物ψ進行熱處理時促進從 該工作物W產生的昇華物的氧化分解反應。在本實施型態 中’構成觸媒6的活性金屬可採用鉑（pt)、鈀（Pd)等貴金 屬或這些貴金屬的合金之類的物質。這些觸媒6在約 1 5 0〜2 0 0 C的溫度環境下展現觸媒活性。經過觸媒6的空氣 的度卩边者熱處理溫度、管子的彎曲方式而變化，所以， 2014-8933-PF；Ahddub 8 200821526 若未以足以啟動觸媒活性的溫度通過觸媒口 、 ，可在觸媒 6 的前端安裝加熱裝置！。’使空氣的溫度上升到觸媒… 度。又，若從工作物w所產生的昇華物中有稱為觸婵毒: 物質（含有Sl、P、s等的有機化合物）進入，會有觸媒6被 毒化的情況。在此種情況下，可在觸媒6的前側(上游)配 设说處理材料（紹、陶竟等）。 此外’在上述吸氣管4及導出管5上，於適當的位置 設置風量調整用的風閥8。 f 然後，進行前述的熱處理，同時，當吹風機7被驅動 時，熱處理部21内的空氣從排氣f 51的其中—端部被吸 引’流人排氣管51内。流人排氣f 51内的空氣中含有從 工作物W所產生的昇華物，不過，此昇華物和觸媒接觸而 f 2分解。之後，空氣的一部分從排氣管51的中途流入回 抓g 52内，被吸至吹風機7，剩下的空氣從排氣管51的 另-個端部排放至外部。又，當熱處理部21内的线流至 排氣笞51内日守，外部空氣隨即從吸氣管4吸入，被送至空 凋邛23内。在此，外部空氣藉由加熱器犯加熱，之後通 過過濾态31，送至熱處理部21内。換言之，加熱器32具 有2個功能，其中一個是對外部空氣加熱的功能，另一個 是如W所述的一邊使熱處理部21内的空氣循環一邊對其 加熱的功能。 此外，從吹風機7排出的空氣從回流管52供給至吸氣 ’送入再度熱處理部21内。 如此，在第1實施型態之熱處理裝置1A中，當熱處理 2014-8933~pF；Ahddub 9 200821526 2:内的空氣流過導出管5時’和觸媒6接觸，藉 藤+氣華物受到分解。因此，可阻止昇華物從 導出管5中的觸據A < 外举物攸 “所設置的位置堆積至下游的部分。又， 觸媒6設置於相對於★ 、 阻止曰。 、人風機7為上游的部分，所以，亦可 幵爭物堆積在吹風機7内。 f i 再者，從熱處理部21流出的空氣和觸媒6接觸後，透 "流管52及吸氣管4再度被送人熱處理部21内，所以， 可二用從熱處理部21流出的空氣。藉此，可一起將被吸 吸孔S 4的外部空氣的吸氣量及從排氣管51排放至外部 的排氣量變少，於是可節省能源。 接著，參昭镇 9 IS! … 圖’說明本發明第2實施型態之熱處 里:⑽。此外，在以下所示的第2至第4實施型態中， Μ K %型怨之熱處理裝置i A相同的構造部分，附加相 同的符號，並省略說明。 在第2貝施型恕之熱處理裝置1B中，導出管5單獨由 “氣& 51所構成。換言之，在此導出管5中，回流管 不：排矶官51分支。因此，在第2實施型態中，從熱 ^ P 21 /;,L出的空氣藉由排氣管51，完全棑放至熱處理 乂 的外°卩°又’在排氣管51的下游附近，設有吹風 機7,在此吹風機7的上游，設有觸媒6。 再者在第2貫施型態之熱處理裝置丨3上，設有熱交 、$ 9、此熱父換器9位於排氣管51的吹風機7和觸媒6 門並且，位於吸氣管4的中途。此熱交換器g在流過 吸氣s 4内的外部空氣和流過相對於排氣管内51的觸媒6 2〇14-8933-PF；Ahddub 10 200821526 為下游的部分的空氣之間進行熱交換。 若以此種方式設置熱交換器9，可由熱交換 1流，出的空氣_外部空氣加熱，：以:可 卩：:、亚且’藉由熱交換器9和外部空氣進行熱交換 的空氣為昇華物已受到觸媒6分解的空氣 ：、、、 v工札，尸以，即使 為熱交換而使上述空氣冷卻下來， 熱交換器9内。 也了阻止升華物堆積在One end portion of the above-mentioned $5 is connected to the heat treatment portion 21. The lead L5 has an exhaust pipe 51 that is open to the outside and a return pipe 52 that branches off from the exhaust pipe η and is connected to the intake pipe 4. The exhaust pipe 51 is for directly discharging the air flowing out from the heat treatment portion 21 to the outside, and the return pipe 52 can send the air flowing out of the heat treatment portion 21 to the reheat treatment portion 21 through the intake pipe 4. A blower 7 and a catalyst 6 are provided in the middle of the above-mentioned return pipe 52. The catalyst 6 is disposed in the exhaust pipe 51 at a position upstream of the position where the return pipe 52 has been exhausted. Further, the catalyst 6 can be disposed in the upstream portion of the blower 7 in the return pipe 52 as indicated by a broken line in Fig. 1 . The catalyst 6 can promote the oxidative decomposition reaction of the sublimate produced from the workpiece W when the workpiece is heat-treated as described above. In the present embodiment, the active metal constituting the catalyst 6 may be a noble metal such as platinum (pt) or palladium (Pd) or an alloy of these noble metals. These catalysts 6 exhibit catalytic activity at a temperature of about 150 to 200 C. The temperature of the air passing through the catalyst 6 varies depending on the heat treatment temperature and the bending mode of the tube. Therefore, 2014-8933-PF; Ahddub 8 200821526, if it is not passed through the catalyst port at a temperature sufficient to activate the catalytic activity, Install the heating unit on the front end of the catalyst 6! . ' Increase the temperature of the air to the catalyst... degrees. Further, if there is a scorpion venom in the sublimate produced by the work w: a substance (an organic compound containing S1, P, s, etc.) enters, the catalyst 6 may be poisoned. In this case, the processing material (Shao, Tao Jing, etc.) can be disposed on the front side (upstream) of the catalyst 6. Further, the air flow adjusting valve damper 8 is provided at an appropriate position on the intake pipe 4 and the outlet pipe 5. f Then, the aforementioned heat treatment is performed, and at the same time, when the blower 7 is driven, the air in the heat treatment portion 21 is sucked from the end portion of the exhaust gas f 51 into the exhaust pipe 51. The air in the exhaust gas f 51 contains the sublimate generated from the workpiece W, but the sublimate is in contact with the catalyst and f 2 is decomposed. Thereafter, a part of the air flows into the grip g 52 from the middle of the exhaust pipe 51, is sucked to the blower 7, and the remaining air is discharged from the other end of the exhaust pipe 51 to the outside. Further, when the line in the heat treatment portion 21 flows into the exhaust port 51, the outside air is sucked from the intake pipe 4 and sent to the empty dam 23 . Here, the outside air is heated by the heater, and then sent to the heat treatment portion 21 through the filtered state 31. In other words, the heater 32 has two functions, one of which is a function of heating the outside air, and the other is a function of heating the air in the heat treatment portion 21 while circulating it as described in W. Further, the air discharged from the blower 7 is supplied from the return pipe 52 to the intake air into the reheating portion 21. As described above, in the heat treatment apparatus 1A of the first embodiment, when the air in the heat treatment 2014-8933 to pF; Ahddub 9 200821526 2: flows through the outlet pipe 5, the contact with the catalyst 6 is received, and the rattan + gasification is subjected to break down. Therefore, it is possible to prevent the sublimate from accumulating from the position where the substrate A in the outlet pipe 5 is disposed to the downstream portion. Further, the catalyst 6 is disposed to be opposite to the ★, and the damper is blocked. In the upstream part, it is also possible to accumulate the object in the hair dryer 7. Further, after the air flowing out from the heat treatment unit 21 comes into contact with the catalyst 6, the flow tube 52 and the suction pipe 4 are again sent. Since the air flows out from the heat treatment unit 21, the air flowing out from the heat treatment unit 21 can be used together. Thereby, the amount of intake of the outside air by the suction hole S 4 and the exhaust gas discharged from the exhaust pipe 51 to the outside can be collectively exhausted. In the second embodiment of the present invention, the following description shows the second to fourth embodiments in the following description of the heat of the second embodiment of the present invention: In the heat treatment device 1B of the second type, the outlet tube 5 is composed of "gas & 51". . In other words, in this outlet pipe 5, the return pipe is not: the branch of the row of officers 51. Therefore, in the second embodiment, the air from the heat P 21 /;, L is completely discharged to the outside of the heat treatment crucible by the exhaust pipe 51, and 'below the downstream of the exhaust pipe 51. A blower 7 is provided, and a catalyst 6 is provided upstream of the blower 7. Further, in the second heat treatment device 丨3, a heat exchange, $9, the blower 7 and the catalyst 6 located in the exhaust pipe 51 are provided, and the suction pipe 4 is located. Midway. This heat exchanger g performs heat between the outside air flowing through the suction s 4 and the catalyst 6 2 〇 14-8933-PF flowing relative to the inside of the exhaust pipe 51; Ahddub 10 200821526 is the air of the downstream portion. exchange. If the heat exchanger 9 is arranged in this manner, it can be heated by the heat exchange 1 and the air taken out by the outside air can be heated to: heat exchange air through the heat exchanger 9 and the outside air The air that has been decomposed by the catalyst 6 for the sublimation material is: ,, v, and the body is cooled, and the air is cooled down in the heat exchanger 9 even for heat exchange. Also prevented the accumulation of sublimate
在這裡的第1實施型態中，設置了回流管52,以便將 和觸媒6接觸後的空氣再次送入熱處理部21内，在觸媒6 因任何理由劣化的情況下，可能會因含有昇華物的空氣再 次被送入熱處理部21内而導致熱處理部21内的昇華物濃 度上升。相對於此，在第2實施型態中，從熱處理部21流 :的空氣藉由排氣管51完全被排放至熱處理裝置1B的外 邛’所以’和觸媒6接觸後的空氣不再被送入熱處理部21 内。因此’即使觸媒6劣化’熱處理部21内的昇華物濃度 也不會上升。並且’常有新鮮的外部空氣通過吸氣管4而 被導入隔熱室2〇。 、再者’在第1實施型態中，為了使回流管52内的風向 為單向，一定要有吹風機7，不過，在第2實施型態中， 由於構k上的關係，亦可省略吹風機7。 接著，參照第3圖，說明本發明第3實施型態之熱處 理I置1C。第3實施型態之熱處理裝置lc為組合第i實 施型態之熱處理裝置u之構造和第2實施型態之熱處理裝 置1B之構造的裝置。在第3實施型態中，可利用從熱處理 2014-8933-PF;Ahddub 11 200821526 部21流出的空氣的熱對外部空氣加熱。 換。之’在第3實施型態中，觸媒6設置於相對於排 氣管51中的回流管52分支出來的位置為上游的部分，吹 風機7設置於相對於排氣管51中的回流管52分支出來的 位置，下游的部分。再者，熱交換器9位於排氣管Η中的 口52所分支出來的位置和設置吹風機7的位置之間， 並且’位於吸氣管4的中途。 如此’不僅可得到第1實施型態及第2實施型態的效 果’還可得到更有效率地以熱交換器9進行熱交換的效 果。換言之，藉由使從熱處理部21流出的空氣通過回流管 52旦及吸氣管4以再利用，減少了吸氣量，所以，只需加熱 少里的外部空氣，可有效率地藉由熱交換器9進行熱交換。 ”此外’在本實施型態中，於相對於排氣管51中的回流 管5 2所分支出來的位詈Α卜金 7位置為上游的部分設置觸媒0，不過， 觸媒6亦可分別設置於相對於回流管52及排氣管51中的 回流管52所分支出來的位詈糸 旳位置為下耜並且為熱交換器9的上 游的部分。 接著，參照第4圖，說明本發明第4實施型態之熱處 理裝置Π)。在第4實施型態之熱處理裝置U中，藉由隔 板24將隔熱室2。分隔為上下兩部分。然後，在裝置本體 2的側壁上，以與空調部23連通的方式連接吸氣管4,並 且，以與熱處理部21連通的方式連接導出管5。吸氣管4 和導出管5連接在相同側（在第4圖中的右側）的側壁。又， 在第4實施型態中，不設置第1實施型態中省略圖示的連 2014-8933-PF;Ahddub 12 200821526 通路徑，隔板24連接至上述側壁中 ,,^ τ日7及虱官4的附近。然In the first embodiment, the return pipe 52 is provided so that the air that has come into contact with the catalyst 6 is again sent into the heat treatment portion 21, and if the catalyst 6 is deteriorated for any reason, it may be contained. The air of the sublimate is again sent into the heat treatment portion 21, and the concentration of the sublimate in the heat treatment portion 21 rises. On the other hand, in the second embodiment, the air flowing from the heat treatment unit 21 is completely discharged to the outer side of the heat treatment apparatus 1B by the exhaust pipe 51, so that the air after contact with the catalyst 6 is no longer It is sent into the heat treatment unit 21. Therefore, the concentration of the sublimate in the heat treatment portion 21 does not rise even if the catalyst 6 is deteriorated. And 'frequently fresh outside air is introduced into the heat insulating chamber 2 through the suction pipe 4. Further, in the first embodiment, in order to make the wind direction in the return pipe 52 unidirectional, the blower 7 is required. However, in the second embodiment, the relationship in k may be omitted. Hair dryer 7. Next, referring to Fig. 3, a heat treatment I of the third embodiment of the present invention will be described. The heat treatment apparatus 1c of the third embodiment is a device which combines the structure of the heat treatment apparatus u of the i-th embodiment and the structure of the heat treatment apparatus 1B of the second embodiment. In the third embodiment, the outside air can be heated by the heat of the air flowing out from the heat treatment 2014-8933-PF; Ahddub 11 200821526 portion 21. change. In the third embodiment, the catalyst 6 is disposed at a portion upstream of a position branched from the return pipe 52 in the exhaust pipe 51, and the blower 7 is disposed at a return pipe 52 with respect to the exhaust pipe 51. Branch out of the location, downstream part. Further, the heat exchanger 9 is located between the position where the port 52 in the exhaust pipe is branched and the position where the blower 7 is disposed, and is located "in the middle of the intake pipe 4. Thus, not only the effects of the first embodiment and the second embodiment can be obtained, but also the effect of heat exchange by the heat exchanger 9 can be obtained more efficiently. In other words, by allowing the air flowing out of the heat treatment portion 21 to pass through the return pipe 52 and reusing the intake pipe 4, the amount of intake air is reduced, so that only a small amount of outside air is heated, and heat can be efficiently utilized. The exchanger 9 performs heat exchange. In addition, in the present embodiment, the catalyst 0 is disposed at a portion upstream of the position of the returning tube 5 2 branched from the return pipe 52 in the exhaust pipe 51, but the catalyst 6 may be The position of the position which is branched from the return pipe 52 in the return pipe 52 and the exhaust pipe 51 is a lower portion and is a portion upstream of the heat exchanger 9. Next, the fourth embodiment will be described with reference to FIG. According to a fourth aspect of the present invention, in the heat treatment apparatus U of the fourth embodiment, the heat insulating chamber 2 is partitioned into upper and lower portions by the partition plate 24. Then, on the side wall of the apparatus body 2 The intake pipe 4 is connected to communicate with the air conditioning unit 23, and the outlet pipe 5 is connected to communicate with the heat treatment unit 21. The intake pipe 4 and the outlet pipe 5 are connected to the same side (on the right side in Fig. 4) Further, in the fourth embodiment, the connection 2014-8933-PF and the Ahddub 12 200821526 passage path, which are not shown in the first embodiment, are not provided, and the partition plate 24 is connected to the side wall, ^ τ 日 7 and the vicinity of 虱官4.
ί二隔板24和隔熱室2〇的内壁面之間形成通風口 25, 平蜀精由此通風口 25連通空調部23的内部 U 的内部。 導出管5和第2實施型態相同，單獨由排氣管5"籌A vent 25 is formed between the partition wall 24 and the inner wall surface of the heat insulating chamber 2, and the vent 25 communicates with the inside of the interior U of the air conditioning portion 23. The outlet pipe 5 is the same as the second embodiment, and is separately provided by the exhaust pipe 5"
成，從熱處理部21流出的空氣全部排放至熱處理裝置U 的外部。此外，在排氣管51上，不# 不σ又置吹風機7，僅設置 觸媒6及加熱器1 〇。 在此種構造的熱處理裝置1D上，當使設置於空調部 23的送風機33運轉時，外部空氣從吸氣管吸入，被送進 空調部23内。外部空氣在空調部23内由加熱器32加熱。 之後’加熱後的外部空氣藉由送風機33通過通風口巧， 被送進熱處理部21内。蕻此，少、^门 、 ^猎此，名略圖示的工作物受到熱處 理，並且，熱處理部21内的空氣流至排氣管η内。換言 之，在第4實施型態中，如圖令的箭頭a所示，不使孰處 理内的空氣循環而使其在單一方向上流動，全部流至 《吕1内如此’第4貫施型態的空調部23將通過吸 氣管4導入的外部空氣送入熱處理部21内，藉此，具有一 功能’亦即，可在不使熱處理部21内的空氣返回該空調部 23的f月況下使其流至排氣管51内。然後，熱處理部w内 的空氣全部流至排氣管51内，所以，含有在熱處理部2] 内所產生之昇華物的空氣不會流至空調部2 3。 在匕種構le中也是一樣，可藉由在排氣管5】上設置觸 媒6，阻止昇華物在排氣管51内堆積。 2014-8933-PF；Ahddub 13 200821526 此外’單獨由排氣管51構成的導出管5的效果和第 實施型態相同。 在此說明實施型態的概要。 (1)根據本實施型態的構造，當熱處理部的空氣流過導 出官時，和觸媒接觸。此空氣中含有從被處理物產生的昇 華物，但此幵華物被觸媒分解，所以，可阻止昇華物在導 出管内堆積。 (2)本實施型態的熱處理裝置包括用來吸入外部空氣 的吸氣管。上述導出管具有用來將從上述熱處理部流出的 空氣直接排放至外部的排氣管和從此排氣管分支出來連接 至上述吸氣管、透過上述吸氣管將從上述熱處理部流出的 空氣再度送至熱處理部内的回流f。上述觸媒設置於相對 於上述排氣管之回流管所分支出來的&置為上游的部分或 回流管上。於是，從熱處理部流出的空氣和觸媒接觸之後， 透過回流管及吸氣管再度被送至處理部内，所以，從熱處 理部流出的空氣被再利用。藉此，可使吸入至吸氣管的外 部空氣的吸氣量及從排氣管排放至外部的排氣量均能變 少，於是得以節省能源。 (3)在本實施型態的熱處理裝置中，±述_設置於相 對於上述排氣管之回流管所分支出來的位置為上游的部 分。另外，包括的熱交換器，對治 對過上述吸氣管的外部空 氣和流過相對於上述排氣管之汐技 < 口机官所分支出來之位置為 下游部分的空氣進行熱交換。 .. 於疋，精由熱交換器，可利 用從熱處理部流出的空氣的埶對 …、對外邛空氣加熱，所以，得 2〇14-8933~PF；Ahddub 200821526 以節省能源。並且，由熱交換器和外部空氣進行熱交換的 二氣為和觸媒接觸之後的空氣，也是昇華物已經被分解之 後的二氣，所以，即使上述空氣因熱交換而被冷卻，也可 阻止昇華物在熱交換器内堆積。x，可藉由回流管及吸氣 管對從熱處理部流出的空氣進行再㈣，所以，得以節省 此源。又，從外部導入的吸氣量被減少，所以，可有效地 藉由熱交換器來進行熱交換。 ^ (4)在本實施型態的熱處理裝置中，包括用來吸入外部 二氣的吸氣官和對流過上述吸氣管的外部空氣和流過相對 於上述導出管中之觸媒被設置的位置為下游部分的空氣進 灯熱又換的熱父換器。於是’藉由熱交換器，可利用從熱 處理部流出的空氣的熱能對外部氣體加熱，所以，得以節 省能源。並且，藉由熱交換器和外部空氣進行熱交換的空 氣為和觸媒接觸、已經使昇華物分解的空氣，戶斤以，即使 上述空氣因熱交換而被冷卻’也可阻止昇華物在熱交換器 内堆積。 Μ (5)在本實施型態的熱處理裝置中，空調部將外部空氣 L入…、處理口W ’藉此’可在不使熱處理部内的空氣流回 空調部的情況下，使之流至導出管内。換言之，藉由此構 造’不使熱處理部内的空裔低卢杜#入 7工礼^ ^，使其全部流至導出管内。 在=種構造中也是一樣，可藉由在導出管上設置觸媒，阻 止昇華物在導出管内堆積。並且，從熱處理部流至導出管 内的空氣全部排放至外部，％以，和觸媒接觸之後的空氣 不會再被送至熱處理部内。因此，即使觸媒劣& ,熱處理 2014-8933-PF；Ahddub 15 200821526 部内的昇華物濃度也不會上升 【圖式簡單說明】 第1圖為本發 造圖。 第2圖為本發 造圖。 第3圖為本發 造圖。 第4圖為本發 造圖。 明第1實施型態之熱處縣置的概略構 明第2實施型態之熱處理裝置的概略構 明第3實施型態之熱處理裝置的概略構 明弟4實施型態之熱處理裝置的概略構 【主要元件符號說明】 1A，1B，1C， 4〜吸氣管； 6〜觸媒； 1D〜熱處理褒置 9〜熱交換器； 20〜隔熱室； 22〜工作物支持部； 24〜隔板； 31〜過濾器； 33〜送風機； 5 2〜回流管； 2〜裝置本體； 5〜導出管； 7〜吹風機； 10〜加熱裝置； 21〜熱處理部； 2 3〜空調部； 25〜通風口； 32〜加熱器； 51〜排氣管； W〜工作物。 2014-8933-PF;Ahddub 16The air flowing out from the heat treatment portion 21 is all discharged to the outside of the heat treatment device U. Further, on the exhaust pipe 51, the blower 7 is not placed, and only the catalyst 6 and the heater 1 are provided. In the heat treatment apparatus 1D of such a configuration, when the blower 33 provided in the air-conditioning unit 23 is operated, the outside air is taken in from the intake pipe and sent to the air-conditioning unit 23. The outside air is heated by the heater 32 in the air conditioning unit 23. Thereafter, the heated outside air is sent into the heat treatment portion 21 by the blower 33 through the vent. In this case, the workpieces shown in the figure are subjected to heat treatment, and the air in the heat treatment portion 21 flows into the exhaust pipe η. In other words, in the fourth embodiment, as shown by the arrow a in the figure, the air in the helium treatment is not circulated and flows in a single direction, and all flows to the "fourth type" in "L1". The air-conditioning unit 23 of the state introduces the outside air introduced through the intake pipe 4 into the heat-treating portion 21, thereby having a function 'that is, the month in which the air in the heat-treating portion 21 is not returned to the air-conditioning portion 23 In this case, it flows into the exhaust pipe 51. Then, all of the air in the heat treatment portion w flows into the exhaust pipe 51, so that the air containing the sublimate generated in the heat treatment portion 2] does not flow to the air-conditioning portion 23. The same is true for the crucible structure, and the sublimate is prevented from accumulating in the exhaust pipe 51 by providing the catalyst 6 on the exhaust pipe 5]. 2014-8933-PF; Ahddub 13 200821526 Further, the effect of the outlet pipe 5 composed of the exhaust pipe 51 alone is the same as that of the first embodiment. An outline of the implementation form will be described here. (1) According to the configuration of this embodiment, when the air of the heat treatment portion flows through the conductor, it comes into contact with the catalyst. This air contains the sublimate produced from the object to be treated, but this material is decomposed by the catalyst, so that the sublimate can be prevented from accumulating in the outlet pipe. (2) The heat treatment apparatus of the present embodiment includes an intake pipe for taking in outside air. The discharge pipe has an exhaust pipe for directly discharging air flowing out from the heat treatment portion to the outside, and is branched from the exhaust pipe and connected to the intake pipe, and the air flowing out from the heat treatment portion is re-transmitted through the intake pipe. The reflux f sent to the heat treatment section. The catalyst is disposed on a portion which is branched upstream of the return pipe of the exhaust pipe or on the return pipe. Then, the air flowing out of the heat treatment portion comes into contact with the catalyst, and is again sent to the processing portion through the return pipe and the intake pipe. Therefore, the air flowing out from the heat treatment portion is reused. Thereby, the amount of intake of the outside air sucked into the intake pipe and the amount of exhausted from the exhaust pipe to the outside can be reduced, so that energy can be saved. (3) In the heat treatment apparatus of the present embodiment, the portion which is disposed upstream of the branch pipe with respect to the exhaust pipe is upstream. Further, the heat exchanger is included to exchange heat between the outside air that has passed through the intake pipe and the air that flows downstream of the exhaust pipe with respect to the exhaust pipe. .. Yu Yu, the heat exchanger can use the air from the heat treatment unit to heat the air, so it can get 2〇14-8933~PF; Ahddub 200821526 to save energy. Further, the air which is exchanged by the heat exchanger and the outside air is air which is in contact with the catalyst, and is also the second gas after the sublimate has been decomposed, so that even if the air is cooled by heat exchange, it can be prevented. The sublimate accumulates in the heat exchanger. x, the air flowing out of the heat treatment portion can be re-used by the return pipe and the suction pipe, so that the source can be saved. Further, the amount of intake air introduced from the outside is reduced, so that heat exchange can be efficiently performed by the heat exchanger. (4) In the heat treatment apparatus of the present embodiment, the inhaler for sucking the external two gas and the outside air flowing through the suction pipe and flowing through the catalyst in the outlet pipe are provided The position is the downstream part of the air into the lamp heat and replaced by the hot parent converter. Thus, by the heat exchanger, the external air can be heated by the heat energy of the air flowing out from the heat treatment portion, so that energy can be saved. Moreover, the air exchanged by the heat exchanger and the outside air is the air that is in contact with the catalyst and has decomposed the sublimate, so that even if the air is cooled by heat exchange, the sublimate can be prevented from being heated. Stacked inside the exchanger. (5) In the heat treatment apparatus of the present embodiment, the air-conditioning unit introduces the outside air L into the processing port W', thereby allowing the air in the heat-treating portion to flow back to the air-conditioning portion without flowing it to the air-conditioning portion. Export inside the tube. In other words, by this construction, the vacancies in the heat treatment section are not allowed to enter the 7th ceremony, and all of them flow into the outlet pipe. The same is true in the construction of the type, and the sublimate is prevented from accumulating in the outlet tube by providing a catalyst on the outlet tube. Further, all of the air flowing from the heat treatment portion to the outlet pipe is discharged to the outside, and the air after contact with the catalyst is not sent to the heat treatment portion. Therefore, even if the catalyst is inferior, the heat treatment 2014-8933-PF; Ahddub 15 200821526 will not rise in the concentration of the sublimate. [Simplified illustration] Figure 1 is the current diagram. Figure 2 is a diagram of this development. Figure 3 is a diagram of this development. Figure 4 is a diagram of this development. The heat treatment apparatus of the first embodiment is a schematic diagram of the heat treatment apparatus of the second embodiment. The schematic configuration of the heat treatment apparatus of the third embodiment is a schematic configuration of the heat treatment apparatus of the fourth embodiment. [Main component symbol description] 1A, 1B, 1C, 4~ suction pipe; 6~ catalyst; 1D~ heat treatment device 9~ heat exchanger; 20~ heat insulation room; 22~work support part; Plate; 31~filter; 33~ blower; 5 2~ return tube; 2~ device body; 5~ outlet tube; 7~ hair dryer; 10~ heating device; 21~ heat treatment unit; 2 3~ air conditioning unit; Mouth; 32 ~ heater; 51 ~ exhaust pipe; W ~ work. 2014-8933-PF; Ahddub 16