1354761 九、發明說明： 【發明所屬之技術領域】 本發明是關於一種對被處理物進行熱處理的熱處理裝 置。 ’ 【先前技術】1354761 IX. Description of the Invention: [Technical Field] The present invention relates to a heat treatment apparatus for heat-treating a workpiece. [prior art]
一般習知的熱處理裝置可在被處理物收納於熱處理部 内的狀態下，一邊使上述熱處理部内的空氣循環，一邊進 行加熱，藉由此加熱空氣對上述被處理物進行熱處理。 此種熱處理裝置在FPD(平面顯示器）等的製造過程 中有時會被使用在光阻、有機物薄膜的預洪製程、後供 製程等。在這些製程中’當由玻璃基板等所組成的被處理 物”熱處理時，光阻等所含有的揮發性成分會汽化，產 生多量的昇華物，q華物會再結晶，造成散佈於熱處理 裝置周圍或附著於其周圍等問題。 為此問題的對策，特開平1〇 —141868公報揭露一種 裝置，其加熱外部空氣，將其送入上述熱處理部内，另一 二面，’使上述熱處理部㈣空氣流至導出管内，藉此，進 订上述熱處理部内的換氣。如此，可藉由進行熱處理部内 的換氣’阻止昇華物的再結晶及其在周圍的附著。 々不過，如上所述，在換氣之後，從熱處理部流出的空 氣在導出管内流動時合 予3冷部，有昇華物在導出管内堆積的 疑慮。 2〇14-8933^PF;Ahddub 5 1354761 ' 【發明内容】 本發明的目的在提供一種用來解決上述問題的熱處理 • 裝置。又，本發明的另一目的在提供一種可阻止昇華物在 導出管内堆積的熱處理裝置。 根據本發明的其十一種構造，可在被處理物收納於熱 處理部内的狀態下，一邊使上述熱處理部内的空氣循環， 一邊進行加熱，藉此，對上述被處理物進行熱處理，並且， _ —邊加熱外部空氣’將其送入上述熱處理部内，一邊使上 述熱處理部内的空氣流至導出管内，藉此，進行上述熱處 理部内的換氣，其中，上述導出管上設有觸媒，其可分解 對上述被處理物進行熱處理時從該被處理物產生的昇華 物。 又，本發明的另一種構造為一種熱處理裝置，其進一 步包括可將被處理物收納於内部的熱處理部、連接至上述 熱處理部的導出管及加熱外部空氣並將其送入上述熱處理 # °卩内以對上述被處理物進行熱處理的空調部，其中，上述 空調部可藉由將外部空氣送入上述熱處理部内，在不將上 述熱處理部内的空氣送回該空調部的情況下，使其流至上 述導出管内，上述導出管具有將從上述熱處理部流出的空 氣全部排放至外部的構造，此導出管上設有觸媒，其可分 解對上述被處理物進行熱處理時從該被處理物產生的昇華 物。 【實施方式】 2014-8933-PF;Ahddub 6 1354761In the conventional heat treatment apparatus, while the object to be processed is stored in the heat treatment unit, the air in the heat treatment unit is heated while circulating, whereby the object to be processed is heat-treated by the heated air. Such a heat treatment apparatus may be used in a pre-flux process of a photoresist, an organic thin film, a post-feed process, or the like in the manufacturing process of an FPD (flat display) or the like. In these processes, when a material to be treated is composed of a glass substrate or the like, the volatile components contained in the photoresist or the like are vaporized, and a large amount of sublimate is generated, and the recrystallized material is recrystallized to cause dispersion in the heat treatment device. There is a problem of surrounding or adhering to the surroundings. For the problem of the problem, Japanese Laid-Open Patent Publication No. Hei-141- 868-86 discloses a device which heats outside air and feeds it into the heat treatment portion, and the other two sides, 'the heat treatment portion (4) The air flows into the outlet pipe, thereby ventilating the gas in the heat treatment portion. Thus, the re-crystallization of the sublimate and the adhesion to the periphery can be prevented by performing the ventilation in the heat treatment portion. However, as described above, After the air is ventilated, the air flowing out from the heat treatment portion is combined with the third cold portion when flowing in the outlet pipe, and there is a concern that the sublimate is deposited in the outlet pipe. 2〇14-8933^PF; Ahddub 5 1354761 'The present invention The object is to provide a heat treatment apparatus for solving the above problems. Further, another object of the present invention is to provide a method for preventing sublimation from accumulating in a discharge pipe. According to the eleventh structure of the present invention, the object to be treated is heat-treated while circulating the air in the heat treatment portion while the workpiece is stored in the heat treatment portion. And __heating the outside air to send it into the heat treatment portion, and performing air in the heat treatment portion while flowing air in the heat treatment portion, wherein the outlet tube is provided with a touch And a medium for decomposing the sublimate material generated from the object to be treated when the object to be treated is heat-treated. Further, another configuration of the present invention is a heat treatment apparatus further including a heat treatment unit that can house the object to be processed inside. And an outlet pipe connected to the heat treatment unit and an air conditioning unit that heats the outside air and feeds the heat treatment to the workpiece to heat the workpiece, wherein the air conditioning unit can send the outside air to the air conditioner. In the heat treatment unit, when the air in the heat treatment unit is not returned to the air conditioning unit, Flowing into the outlet pipe, the outlet pipe has a structure for discharging all of the air flowing out of the heat treatment portion to the outside, and the outlet pipe is provided with a catalyst that decomposes the material to be treated from the workpiece Sublimation produced. [Embodiment] 2014-8933-PF; Ahddub 6 1354761
型態的圖。如同一圖所示，第1實施型態之熱處理裝置u 被使用於FPD的製程，此熱處理裝置1A設置於無塵室，稱 以下 最佳型態 第 為無塵烤箱。Type diagram. As shown in the same figure, the heat treatment apparatus u of the first embodiment is used in the process of FPD, and the heat treatment apparatus 1A is installed in a clean room, and is referred to as a clean oven.
上述熱處理裝置 壁圍繞空間的隔熱室 24隔開’相對於隔板24為左側的部分為熱處理部21，右 側的邛刀為空調部2 3。隔板2 4上形成開口，此開口内配 設有過遽器31。藉此，可透過過濾器31使之通風。又， 在圖示中雖省略，但在裝置本體2上設有連通路徑，用來 連通熱處理部21的内部和空調部23的内部。 在上述熱處理部21的内部，設有工作物支持部22。 作物支持。卩2 2可維持由玻璃基板等所組成的複數個 :皮處理物(以下僅稱為工作物)w維持在上下並列的狀態。 藉由在此工作物支持部22上支持工作物w，該工作物评被 收納於熱處理部21内。 在上述空調部23上，設有加熱器32及送風機33。加 ”，'器32用來加熱空調部23内的空氣，送風機33可透過過 濾器3"字空調部23内的空氣送入熱處理部21内。然後， 田藉由送風機33將空氣送入熱處理部21内時，熱處理部 21内的空氣經過省略圖示的連通路徑，回到空調部23内。 …後，回到空調部23内的空氣藉由再度加熱器32加熱。 2014-8933-PF；Ahddub 7 1354761 •換言之，熱處理部21内的线—邊受到循環，—邊受到加 熱’藉此’收納於熱處理部21内的工作物w受到熱處理。 • 再者’在上述空調部23上，連接有吸氣管4，又，在 •上述熱處理部21上，連接有導出管5。然後，從吸氣管4 吸入的的外部空氣經過空調部23及過濾器31被送入熱處 理邛21内，並且，熱處理部21内的空氣流至導出管5内， 藉此，熱處理部21的内部得以換氣。 •上述導出管5的其中一端部連接至熱處理部以。導出 管5具有開放至外部的排氣管51及從此排氣管51分支出 去且連接至上述吸氣管4的回流管52。排氣管51用來將 從上述熱處理部21流出的空氣直接排放至外部，回流管 52可透過上述吸氣管4將從上述熱處理部21流出的空氣 送至再度熱處理部21内。 在上述回流管52的中途，設有吹風機7和觸媒6。觸 媒6在上述排氣管51中’配置於相對於上述回流管5 2所 φ 分支出來的位置為上游的部分。此外，觸媒6如第1圖中 的虛線所示，在回流管52中，可設置於吹風機7的上游的 部分。 上述觸媒6可在上述對工作物W進行熱處理時促進從 該工作物W產生的昇華物的氧化分解反應。在本實施型態 中，構成觸媒6的活性金屬可採用鉑（Pt)、鈀（Pd)等貴金 屬或這些貴金屬的合金之類的物質。這些觸媒6在約 15 0〜200°C的溫度環境下展現觸媒活性。經過觸媒6的空氣 的溫度隨著熱處理溫度、管子的彎曲方式而變化，所以， 8 2014-8933-PF/Ahddub 1354761 G ’可在觸媒6 升到觸媒活性溫 有稱為觸媒毒的 ’會有觸媒6被 的前側（上游）配 若未以足以啟動觸媒活性的溫度通過觸媒 的前端安裝加熱裝置1〇,使空氣的溫度上 度。又，若從工作物w所產生的昇華物中 物質（含有Si、P、s等的有機化合物）進入 毒化的情1在此種情況下，可在觸媒6 设則處理材料（鋁、陶瓷等）。The heat treatment device wall is spaced apart from the heat insulating chamber 24 of the space. The portion on the left side with respect to the partition plate 24 is the heat treatment portion 21, and the blade on the right side is the air conditioning portion 23. An opening is formed in the partition 24, and a filter 31 is disposed in the opening. Thereby, it can be ventilated through the filter 31. Further, although not shown in the drawings, a communication path is provided in the apparatus main body 2 for communicating the inside of the heat treatment portion 21 and the inside of the air conditioning portion 23. A workpiece support portion 22 is provided inside the heat treatment portion 21. Crop support.卩2 2 can maintain a plurality of sheets of a glass substrate or the like: the skin processed material (hereinafter simply referred to as a workpiece) w is maintained in a state of being vertically aligned. The work item w is supported by the work object support portion 22, and the work object is housed in the heat treatment portion 21. A heater 32 and a blower 33 are provided in the air conditioning unit 23. The "upper" 32 is used to heat the air in the air conditioning unit 23, and the blower 33 can pass the air in the filter 3" word air conditioning unit 23 into the heat treatment unit 21. Then, the air is sent to the heat treatment by the blower 33. In the portion 21, the air in the heat treatment portion 21 passes through the communication path (not shown) and returns to the air conditioning unit 23. After that, the air returned to the air conditioning unit 23 is heated by the reheater 32. 2014-8933-PF Ahddub 7 1354761 • In other words, the line-side in the heat treatment unit 21 is circulated, and the workpiece w stored in the heat treatment unit 21 is heated by the heat treatment. The intake pipe 4 is connected, and the outlet pipe 5 is connected to the heat treatment unit 21. Then, the outside air taken in from the intake pipe 4 is sent to the heat treatment port 21 through the air conditioning unit 23 and the filter 31. Further, the air in the heat treatment portion 21 flows into the discharge pipe 5, whereby the inside of the heat treatment portion 21 is ventilated. • One end portion of the above-described discharge pipe 5 is connected to the heat treatment portion. The discharge pipe 5 has an open to the outside. Exhaust pipe 51 and The exhaust pipe 51 branches off and is connected to the return pipe 52 of the intake pipe 4. The exhaust pipe 51 is for directly discharging the air flowing out from the heat treatment portion 21 to the outside, and the return pipe 52 is permeable to the intake pipe 4 The air flowing out from the heat treatment unit 21 is sent to the reheating unit 21. In the middle of the return pipe 52, a blower 7 and a catalyst 6 are provided. The catalyst 6 is disposed in the exhaust pipe 51 with respect to the above. The position at which the φ branch of the return pipe 52 is branched is the upstream portion. Further, the catalyst 6 may be provided in the return pipe 52 at the upstream portion of the blower 7 as indicated by a broken line in Fig. 1. The oxidative decomposition reaction of the sublimate produced from the workpiece W can be promoted when the workpiece W is heat-treated as described above. In the present embodiment, the active metal constituting the catalyst 6 may be platinum (Pt) or palladium (Pd). a material such as a noble metal or an alloy of these noble metals. These catalysts 6 exhibit catalytic activity at a temperature of about 150 to 200 ° C. The temperature of the air passing through the catalyst 6 varies with the heat treatment temperature and the bending of the tube. And change, so, 8 2014 -8933-PF/Ahddub 1354761 G 'Can be used when the catalyst 6 is raised to the catalytic activity temperature. There is a kind of catalyst poisoning. The front side (upstream) of the catalyst 6 is not equipped with a temperature sufficient to activate the catalyst activity. The heating device 1 is installed at the front end of the catalyst to make the temperature of the air rise. In addition, if the substance (the organic compound containing Si, P, s, etc.) from the sublimate produced by the work w is poisoned, In this case, the material (aluminum, ceramics, etc.) can be treated in the catalyst 6.
設二 =:::4及_5 上’— …、、後，進行前述的熱處理’同時，當吹風機？被驅動 時，熱處理部21内的空氣從排氣管51的其中一端部被吸 引’流入排氣管51内。流入排氣管51内的空氣中含有從 工作物W所產生的昇華物，不過，此昇華物和觸媒接觸而 又到刀解。之後，空氣的一部分從排氣管51的中途流入回 抓管52内，被吸至吹風機7，剩下的空氣從排氣管η的 另一個端部排放至外部。又，當熱處理部21内的空氣流至 排氣官51内時，外部空氣隨即從吸氣管4吸入，被送至空 調部23内。在此，外部空氣藉由加熱器32加熱，之後通 過過濾'器31，送至熱處理部21内。換言之，加熱器32具 有2個功能’其中一個是對外部空氣加熱的功能，另一個 疋如刚所述的一邊使熱處理部21内的空氣循環一邊對其 加熱的功能。 此外’從吹風機7排出的空氣從回流管52供給至吸氣 管4’送入再度熱處理部21内。 如此’在第1實施型態之熱處理裝置1A中，當熱處理 2014-8933-PF；Ahddub 9 1354761 部2丨内的空氣流過導出管5時，和觸媒6接 媒6，空氣中的昇華物受到分解。因此，可:由此觸 導出管5中的觸媒6所設置的位置堆積至下:華物從 觸媒6設置於相對於吹風機7為上游 1刀所以，亦可 阻止昇華物堆積在吹風機7内。 再者，從熱處理部21流出的空氣和觸媒6接觸後，透 過回流管52及吸氣管4再度被送人熱處理部21内所以， 可再利用從熱處理部21流出的空氣。藉此，可—起將被吸 入吸氣管4的外部空氣的吸氣量及從排氣管51排放至外部 的排氣量變少，於是可節省能源。 接著，參照第2圖，說明本發明第2實施型態之熱處 理裝置1Β。此外’在以下所示的第2至第4實施型態中， 和第1實施型態之熱處理裝置1Α相同的構造部分，附加相 同的符號’並省略說明。 在第2實施型態之熱處理裝置16中，導出管5單獨由 鲁1根排氣管51所構成。換言之，在此導出管5中，回流管 52不從排氣r 51 >支。因此’在第2實施型態中，從熱 處理部21流出的空氣藉由排氣管51，完全排放至熱處理 裝置1B的外部。又，在排氣管5丨的下游附近，設有吹風 機7’在此吹風機7的上游，設有觸媒6。 再者’在第2實施型態之熱處理裝置iB上，設有熱交 換Is 9°此熱交換器9位於排氣管51的吹風機7和觸媒6 之間’並且’位於吸氣管4的中途。此熱交換器9在流過 吸氣營4内的外部空氣和流過相對於排氣管内5丨的觸媒6 2014-8933-PF;Ahddub 10 1354761 為下游的部分的空氣之間進行熱交換。 ^以此種方式設置熱交換器9’可由熱交換器9利用 從”’、處理部21流出的空氣的熱對外部空氣加熱，所以，可 即省能源。並且，藉由熱交換器9和外部空氣進行熱交換 的二氣為昇華物已受到觸媒6分解的空氣，所以，即使因 為熱交換而使上述空氣冷卻下來’也可阻止昇華物堆積在 熱交換器9内。 在這裡的第1實施型態中’設置了回流管52，以便將 和觸媒6接觸後的空氣再次送入熱處理部？！内，在觸媒6 因任何理由劣化的情況下，可能會因含有昇華物的空氣再 次被送入熱處理部21内而導致熱處理部21内的昇華物濃 度上升。相對於此，在第2實施型態中，從熱處理部21流 出的空氣藉由排氣管51完全被排放至熱處理裝置1β的外 部，所以，和觸媒6接觸後的空氣不再被送入熱處理部Η 内。因此，即使觸媒6劣化，熱處理部21内的昇華物濃度 也不會上升。並且，常有新鮮的外部空氣通過吸氣管4而 被導入隔熱室20。 。者’在第1實施型態中’為了使回流管52内的風 為單向，一S要有吹風機7,不過，在第2實施型態中 由於構造上的關係，亦可省略吹風機7。 接著’參照第3圖’說明本發明第3實施型態之熱 理裝置1C。帛3實施型態之熱處理裝置κ為組合第卜 施型態之熱處理裝置1A之構造和第2實施型態之熱處理』 置1B之構造的裝置。在第3實施型態中，可利用從熱處; 2014-8933-PF/Ahddub 11 部21流出的空氣的熱對外部空氣加熱。 換言之，在第3實施型態中，觸媒6設置於相對於排 虱管51中的回流管52分支 足出來的位置為上游的部分， 風機7設置於相對於排氣營y 士认 铆矾s 51中的回流管52分支出來的 位置為下游的部分。再者， ^熟父換态9位於排氣管51中的 回流管52所分支出凌gg上 叉出I的位置和設置吹風機7的位置之間， 並且，位於吸氣管4的十途。 如此不僅可得到第i實施型g 2 果，還可得到更有效率地以熱交換器9進行熱交換的效 果。換言之’藉由使從熱處理部21流出的空氣通過回流管 52及吸氣管4以再利用，減少了吸氣量，戶斤以，只需加熱 夕量的外βΛ氣’可有效率地藉由熱交換器9進行熱交換。 t此外在本實施型態+，於相對於排氣管51巾的回流 s 52所刀1出來的位置為上游的部分設置觸媒6，不過， 觸媒6亦可m免置於相對於回流管52及排氣管5i中的 回流管52所分支出央沾#里& # 出來的位置為下游並且為熱交換器9的上 游的部分。 接者’參照第4圖，說明本發明第4實施型態之熱處 理裝置1D。在第4實施型態之熱處理裝置1D中，藉由隔 板24將隔熱至20分隔為上下兩部分。然後，在裝置本體 2的側壁上’以與空調部23連通的方式連接吸氣管4，並 且，以與熱處理部21連通的方式連接導出管5。吸氣管4 和導出管5連接在相同側（在第4圖中的右側）的側壁。又， 在第4實施型態中，不設置帛j實施型態中省略圖示的連 2014-8933-PP；Ahddub 12 1354761 通路徑’隔板24連接至上述側壁中的吸氣管4的附近。然 後’在隔板24和隔熱室20的内壁面之間形成通風口 25， 單獨藉由此通風口 25連通空調部23的内部和熱處理部21 的内部。 導出管5和第2實施型態相同’單獨由排氣管η構 成從熱處理部21流出的空氣全部排放至熱處理裳置ip 的外部。此外’在排氣管51上，不設置吹風機7，僅設置 觸媒6及加熱器丨〇。 在此種構造的熱處理裝置1D上，當使設置於空調部 23的送風機33運轉時，外部空氣從吸氣管吸入，被送進 空調部23内。外部空氣在空調部23内由加熱器32加熱。 之後’加熱後的外部空氣藉由送風機33通過通風口 25, 被送進熱處理部21内。藉此，省略圖示的工作物受到熱處 理，並且，熱處理部21内的空氣流至排氣管51内。換言 之，在第4實施型態中，如圖中的箭頭&所示，不使熱處 理部21内的空氣循環而使其在單一方向上流動，全部流至 排氣管51内。如此，第4實施型態的空調部23將通過吸 氣管4導入的外部空氣送入熱處理部21内，藉此，具有一 功能，亦即，可在不使熱處理部21内的空氣返回該空調部 Μ的情況下使其流至排氣管51内。然後’熱處理部21内 的空氣全部流至排氣管51内，所以，含有在熱處理部21 内所產生之昇華物的空氣不會流至空調部23。 在此種構造令也是一樣，可藉由在排氣管51上設置觸 媒6’阻止昇華物在排氣管5]内堆積。 2014-8933-PP；Ahddub 13 1354761 早獨由排氣管51構成的導出管5的效果和 實施型態相同。 在此說明實施型態的概要。 ⑴根據本實施型態的構造，當熱處理部的空氣流過導 出管時，和觸媒接觸m中含有從被處理物產生的昇 華物，但此昇華物被觸媒分解，所以，可阻止昇華物在導 出管内堆積。Set two =:::4 and _5 on '- ..., after, carry out the aforementioned heat treatment ‘and at the same time, when the hair dryer? When driven, the air in the heat treatment portion 21 is sucked into the exhaust pipe 51 from one end portion of the exhaust pipe 51. The air flowing into the exhaust pipe 51 contains the sublimate generated from the work W, but the sublimate and the catalyst come into contact with each other. Thereafter, a part of the air flows into the gripper tube 52 from the middle of the exhaust pipe 51, is sucked to the blower 7, and the remaining air is discharged to the outside from the other end portion of the exhaust pipe η. Further, when the air in the heat treatment portion 21 flows into the exhaust gas 51, the outside air is sucked from the intake pipe 4 and sent to the air conditioning portion 23. Here, the outside air is heated by the heater 32, and then sent to the heat treatment portion 21 through the filter unit 31. In other words, the heater 32 has two functions, one of which is a function of heating the outside air, and the other, for example, a function of heating the air in the heat treatment portion 21 while circulating the air in the heat treatment portion 21. Further, the air discharged from the blower 7 is supplied from the return pipe 52 to the intake pipe 4' and sent to the reheating portion 21. Thus, in the heat treatment apparatus 1A of the first embodiment, when the air in the heat treatment 2014-8933-PF; Ahddub 9 1354761 is passed through the outlet pipe 5, the catalyst 6 is mixed with the catalyst 6, and the sublimation in the air is performed. The object is broken down. Therefore, the position where the catalyst 6 in the lead-out tube 5 is disposed can be stacked to the bottom: the Chinese material is disposed from the catalyst 6 to the upstream of the blower 7, so that the sublimate can be prevented from accumulating in the blower 7 Inside. Further, the air flowing out of the heat treatment portion 21 comes into contact with the catalyst 6, and is again sent to the heat treatment portion 21 through the return pipe 52 and the intake pipe 4, so that the air flowing out from the heat treatment portion 21 can be reused. Thereby, the amount of intake of the outside air to be sucked into the intake pipe 4 and the amount of exhausted from the exhaust pipe 51 to the outside can be reduced, so that energy can be saved. Next, a heat treatment apparatus 1 according to a second embodiment of the present invention will be described with reference to Fig. 2 . In the second to fourth embodiments described below, the same components as those of the first embodiment of the heat treatment apparatus 1A are denoted by the same reference numerals, and the description thereof will be omitted. In the heat treatment apparatus 16 of the second embodiment, the discharge pipe 5 is constituted by a single exhaust pipe 51. In other words, in this outlet pipe 5, the return pipe 52 is not branched from the exhaust r 51 > Therefore, in the second embodiment, the air flowing out of the heat treatment portion 21 is completely discharged to the outside of the heat treatment apparatus 1B by the exhaust pipe 51. Further, a blower 7' is provided in the vicinity of the downstream of the exhaust pipe 5', and a catalyst 6 is provided upstream of the blower 7. Further, in the heat treatment apparatus iB of the second embodiment, a heat exchange Is 9 is provided. This heat exchanger 9 is located between the blower 7 of the exhaust pipe 51 and the catalyst 6 and is located at the suction pipe 4. halfway. The heat exchanger 9 exchanges heat between the outside air flowing through the air suction camp 4 and the air flowing through the catalyst 6 2014-8933-PF with respect to the inside of the exhaust pipe; Ahddub 10 1354761 is the downstream portion of the air. . The heat exchanger 9' is disposed in such a manner that the heat of the air flowing out from the "", the processing portion 21 can be heated by the heat exchanger 9 to the outside air, so that energy can be saved, and by the heat exchanger 9 and The two gases that exchange heat with the outside air are the air that the sublimate has been decomposed by the catalyst 6, so that even if the air is cooled down by heat exchange, the sublimate can be prevented from accumulating in the heat exchanger 9. In the embodiment, the return pipe 52 is provided so that the air that has come into contact with the catalyst 6 is again sent to the heat treatment portion. In the case where the catalyst 6 is deteriorated for any reason, it may be due to the inclusion of the sublimate. The air is again sent into the heat treatment portion 21, and the concentration of the sublimate in the heat treatment portion 21 is increased. In contrast, in the second embodiment, the air flowing out from the heat treatment portion 21 is completely discharged to the exhaust pipe 51 to the exhaust pipe 51. Since the air which is in contact with the catalyst 6 is not sent to the heat treatment unit 外部 outside the heat treatment apparatus 1β, even if the catalyst 6 is deteriorated, the concentration of the sublimate in the heat treatment unit 21 does not rise. The fresh outside air is introduced into the heat insulating chamber 20 through the intake pipe 4. In the first embodiment, in order to make the wind in the return pipe 52 unidirectional, a S has a blower 7, but In the second embodiment, the hair dryer 7 may be omitted due to the structural relationship. Next, a heat treatment device 1C according to a third embodiment of the present invention will be described with reference to Fig. 3. The heat treatment device κ of the 帛3 embodiment is a combination. The structure of the heat treatment apparatus 1A of the first embodiment and the heat treatment of the second embodiment. The apparatus of the structure of 1B. In the third embodiment, the heat is available; 2014-8933-PF/Ahddub 11 The heat of the outflowing air is heated to the outside air. In other words, in the third embodiment, the catalyst 6 is disposed at a portion upstream of the branching portion of the return pipe 52 in the drain pipe 51, and the fan 7 is disposed. The portion branched from the return pipe 52 in the exhaust camp is the downstream portion. Further, the mature returning valve 9 is located in the exhaust pipe 51. Gg is forked between the position of I and the position of the hair dryer 7, and is located at the suction In this way, not only the effect of the first embodiment g 2 but also the effect of heat exchange by the heat exchanger 9 can be obtained more efficiently. In other words, the air flowing out from the heat treatment portion 21 is passed through the reflux. The tube 52 and the suction pipe 4 are reused to reduce the amount of inhalation, and the heat can be efficiently exchanged by the heat exchanger 9 only by heating the outer beta helium gas. The type + is provided with the catalyst 6 at a portion upstream of the position where the knife 1 is out of the recirculation s 52 of the exhaust pipe 51. However, the catalyst 6 can also be exempted from the return pipe 52 and the exhaust gas. The return pipe 52 in the pipe 5i branches out of the center and the position where the outlet is downstream is the portion upstream of the heat exchanger 9. The heat treatment apparatus 1D of the fourth embodiment of the present invention will be described with reference to Fig. 4. In the heat treatment apparatus 1D of the fourth embodiment, the heat insulating layer 20 is partitioned into upper and lower portions by the partition plate 24. Then, the intake pipe 4 is connected to the side wall of the apparatus main body 2 so as to communicate with the air conditioning unit 23, and the delivery pipe 5 is connected to communicate with the heat treatment portion 21. The suction pipe 4 and the outlet pipe 5 are connected to the side walls on the same side (on the right side in Fig. 4). Further, in the fourth embodiment, the connection 2014-8933-PP (not shown) is not provided in the 帛j implementation type; the Ahddub 12 1354761 passage path baffle 24 is connected to the vicinity of the intake pipe 4 in the above-mentioned side wall. . Then, a vent 25 is formed between the partition 24 and the inner wall surface of the heat insulating chamber 20, and the inside of the air-conditioning portion 23 and the inside of the heat-treating portion 21 are communicated by the vent 25 alone. The outlet pipe 5 is the same as the second embodiment. The air which is formed by the exhaust pipe η from the heat treatment portion 21 is discharged to the outside of the heat treatment skirt ip. Further, the blower 7 is not provided on the exhaust pipe 51, and only the catalyst 6 and the heater 设置 are provided. In the heat treatment apparatus 1D of such a configuration, when the blower 33 provided in the air-conditioning unit 23 is operated, the outside air is taken in from the intake pipe and sent to the air-conditioning unit 23. The outside air is heated by the heater 32 in the air conditioning unit 23. Thereafter, the heated outside air is sent into the heat treatment portion 21 through the vent 25 through the blower 33. Thereby, the workpiece (not shown) is subjected to heat treatment, and the air in the heat treatment portion 21 flows into the exhaust pipe 51. In other words, in the fourth embodiment, as shown by the arrow & in the figure, the air in the heat treatment portion 21 is not circulated, and flows in a single direction, and all flows into the exhaust pipe 51. In this manner, the air-conditioning unit 23 of the fourth embodiment feeds the outside air introduced through the intake pipe 4 into the heat treatment portion 21, thereby having a function of not returning the air in the heat treatment portion 21 to the air. When the air conditioning unit is turned on, it flows into the exhaust pipe 51. Then, all of the air in the heat treatment portion 21 flows into the exhaust pipe 51, so that the air containing the sublimate generated in the heat treatment portion 21 does not flow to the air conditioning portion 23. Also in this configuration, the sublimate is prevented from accumulating in the exhaust pipe 5] by providing the catalyst 6' on the exhaust pipe 51. 2014-8933-PP; Ahddub 13 1354761 The effect of the outlet pipe 5 composed of the exhaust pipe 51 alone is the same as that of the embodiment. An outline of the implementation form will be described here. (1) According to the configuration of the present embodiment, when the air of the heat treatment portion flows through the discharge pipe, the contact with the catalyst m contains the sublimate generated from the object to be treated, but the sublimate is decomposed by the catalyst, so that the sublimation can be prevented. The material accumulates in the outlet tube.
:2 :本實施型態的熱處理裝置包括用來吸入外部空氣 ^吸乱S。上述導出管具有用來將從上述熱處理部流出的 空氣直接排放至外料排氣f和從此排氣管分支出來連接 至=述吸氣管、透過上述吸氣管將從上述熱處理部流出的 空氣再度送至熱處理部内的回流管。上述觸媒設置於相對 ^述排氣f之㈣f所分支出來的位置為上游的部分或 回流管上。於是，從熱處理部流出的空氣和觸媒接觸之後， 透過回流管及吸氣管再度被送至處理部内，所以，從熱處 ，部流出的空氣被再利帛。藉此’可使吸人至吸氣管的外 部空氣的吸氣量及從排氣管排放至外部的排氣量均能變 少’於是得以節省能源。 (3)在本實施型態的熱處理裝置中，上述觸媒設置於相 對於上述排氣管之回流管所分支出來的位置為上游的部 分。另外，包括的熱交換器，對流過上述吸氣管的外部空 氣和流過相對於上述排氣管之回流管所分支出來之位置為 下游部分的空氣進行熱交換。於是，藉由熱交換器，可利 用從熱處理部流出的空氣的熱對外部空氣加熱，所以，得 2014-8933-PF；Ahddub 14 以節省能源。並且，由熱交換 空氣為和館'和外部空氣進行熱交換的 孔為和觸媒接觸之後的空氣， 後的办备 _ 疋昇華物已經被分解之: 2 : The heat treatment apparatus of this embodiment includes a suction air for inhaling external air. The outlet pipe has a function for discharging air flowing out from the heat treatment portion directly to the external material exhaust gas f and branching from the exhaust pipe to the air intake pipe, and the air flowing out from the heat treatment portion through the suction pipe It is sent to the return pipe in the heat treatment unit again. The above-mentioned catalyst is disposed on a portion upstream of the position where the branch of the exhaust gas f is branched, or on the return pipe. Then, the air which has flowed out from the heat treatment portion comes into contact with the catalyst, and is again sent to the processing portion through the return pipe and the intake pipe. Therefore, the air flowing out from the heat portion is further retracted. By this, it is possible to reduce the amount of suction of the outside air sucked into the intake pipe and the amount of exhaust gas discharged from the exhaust pipe to the outside, thereby saving energy. (3) In the heat treatment apparatus of the present embodiment, the catalyst is provided upstream of a position branched from a return pipe of the exhaust pipe. Further, the heat exchanger includes heat exchange between the outside air flowing through the intake pipe and the air flowing downstream through a branch pipe that is branched with respect to the exhaust pipe. Thus, the heat of the air flowing out from the heat treatment portion can be used to heat the outside air by the heat exchanger, so that 2014-8933-PF; Ahddub 14 is obtained to save energy. In addition, the heat exchange air is the air that exchanges heat with the museum's and the outside air, and the air after contact with the catalyst, the latter _ 疋 华 华 has been decomposed
俊的工虱，所以，即使上述 畔I 阻止戽筮私+ 、因.，，、乂換而被冷卻，也可 阻止汁華物在熱交換器内堆積^ 瞢斜户拍老 了错由回流管及吸氣 熱處理部流出的空氣進行再利用，所以，得以節： “、又卜部導入的吸氣量被減少，所以，可有效妯 藉由熱交換器來進行熱交換。 / (4)在本實施型態的熱 介名从Τ 包括用來吸入外部 二孔的吸氣管和對流過上述 ^ ......, 風s的外部空氣和流過相對 於上述導出管中之觸媒被設 广舳^ & 置為下游部分的空氣進 仃…父換的熱交換器。於是， 一 未^、ά , 韁由熱父換器，可利用從埶 處理。Ρ奴出的空氣的熱能對外 、 名n ^ 1孔體加熱，所以，得以節 二。、且’藉由熱交換器和外部空氣進行熱交換的空 觸媒接觸、已經使昇華物分解的空氣，所以，即使 上述空氣因熱交換而被冷卻， 也了阻止昇華物在熱交換器 内堆積。 (5)在本實施型態的妖虚搜社$ ^ 们熱慝理裝置中，空調部將外部空氣 送入熱處理部内，藉此，可尤丈+ 在不使熱處理部内的空氣流回 空調部的情況下，使之流至導出管 ▼ 。換5之，藉由此構 造，不使誠料㈣Μ循環，使其全部流至導出管内。 在此種構造中也是-樣，可藉由在導出管上設置觸媒阻 止昇華物在導出管内堆積。並且，從熱處理部流至導出管 内的空氣全部排放至外部，所以，和觸媒接觸之後的空氣 不會再被送至熱處理部内。因此，即使觸媒劣化，熱處理 2014-8933-PP；Ahddub 15 1354761 部内的昇華物濃度也不會上升。 【圖式簡單說明】 第1圖為本發明第1實施型態之熱處理裝置的概略構 造圖。 第2圖為本發明第2實施型態之熱處理裝置的概略構 造圖。 第3圖為本發明第3實施型態之熱處理裝置的概略構 造圖。 第4圖為本發明第4實施型態之熱處理裝置的概略構 造圖。 主要元件符號說明】Jun's work, so even if the above-mentioned I stop the smuggling +, because,,,,,, and are cooled, it can also prevent the juice from accumulating in the heat exchanger. Since the air flowing out from the tube and the inhalation heat treatment unit is reused, it is possible to save the amount of intake air introduced by the portion, and therefore, it is possible to efficiently exchange heat by the heat exchanger. The heat medium name of the present embodiment includes a suction pipe for sucking the outer two holes and an external air flowing through the above, the wind s, and flowing through the catalyst in the above-mentioned outlet pipe. The air is set to the downstream part of the air inlet...the heat exchanger that the father exchanges. Then, the one that is not ^, ά, 缰 is replaced by the hot parent, and can be used to treat the air from the 埶 slave. The heat is heated to the outside, and the n ^ 1 hole body is heated, so that the air is contacted by the air with the heat exchanger and the outside air, and the air has been decomposed by the sublimate, so even the above air Cooling by heat exchange also prevents the sublimate from accumulating in the heat exchanger. (5) In the enchanting device of the present embodiment, the air conditioning unit sends the outside air to the heat treatment unit, whereby the air in the heat treatment unit is not returned to the air conditioning unit. In the case of the flow, the flow is made to the outlet tube ▼. By this configuration, by this configuration, the material (4) is not circulated, so that all of it flows into the outlet tube. In this configuration, the same can be obtained by The catalyst is disposed on the tube to prevent the sublimate from accumulating in the outlet tube, and all the air flowing from the heat treatment portion to the outlet tube is discharged to the outside, so that the air after contact with the catalyst is not sent to the heat treatment portion. Catalyst deterioration, heat treatment 2014-8933-PP; Ahddub 15 1354761 The concentration of the sublimate in the section does not increase. [Brief Description] Fig. 1 is a schematic structural view of the heat treatment apparatus according to the first embodiment of the present invention. 2 is a schematic structural view of a heat treatment apparatus according to a second embodiment of the present invention. Fig. 3 is a schematic structural view of a heat treatment apparatus according to a third embodiment of the present invention. Fig. 4 is a heat treatment of a fourth embodiment of the present invention. Device Schematic diagram of the construction. Description of the main components
1A，1B，1C，ID〜熱處理裝置； 2〜裝置本體； 4 ~吸氣管； 5〜導出管； 6〜觸媒； 7〜吹風機； 9〜熱交換器； 10〜加熱裝置； 20〜隔熱室； 21〜熱處理部； 2 2〜工作物支持部； 2 3 ~空調部； 24〜隔板； 25〜通風口； 31〜過濾器； 32~加熱器； 33〜送風機； 51~排氣管； 5 2〜回流管； W〜工作物。 2014-8933-PF;Ahddub 161A, 1B, 1C, ID ~ heat treatment device; 2 ~ device body; 4 ~ suction pipe; 5 ~ outlet tube; 6 ~ catalyst; 7 ~ hair dryer; 9 ~ heat exchanger; 10 ~ heating device; Hot chamber; 21~ heat treatment section; 2 2~work support section; 2 3 ~ air conditioning section; 24~ partition; 25~ vent; 31~ filter; 32~ heater; 33~ blower; Tube; 5 2 ~ reflux tube; W ~ work. 2014-8933-PF; Ahddub 16