JP2003214772A - Heating furnace - Google Patents
Heating furnaceInfo
- Publication number
- JP2003214772A JP2003214772A JP2002011557A JP2002011557A JP2003214772A JP 2003214772 A JP2003214772 A JP 2003214772A JP 2002011557 A JP2002011557 A JP 2002011557A JP 2002011557 A JP2002011557 A JP 2002011557A JP 2003214772 A JP2003214772 A JP 2003214772A
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- binder
- exhaust
- heat treatment
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/60—Production of ceramic materials or ceramic elements, e.g. substitution of clay or shale by alternative raw materials, e.g. ashes
Landscapes
- Chimneys And Flues (AREA)
- Tunnel Furnaces (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、バインダーを含む
被熱処理物の焼成、乾燥、脱バインダー等を行う連続式
の熱処理炉に関するものであり、特に脱バインダー排ガ
スの脱臭装置を組み込んだ熱処理炉に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a continuous heat treatment furnace for baking, drying, debinding, and the like of a heat-treated material containing a binder, and more particularly to a heat treatment furnace incorporating a deodorizing device for debinding binder exhaust gas. It is a thing.
【０００２】[0002]
【従来の技術】上記のようなバインダーを含む被熱処理
物の焼成炉、乾燥炉、脱バインダー炉などの熱処理炉で
は、被熱処理物から発生する脱バインダー排ガスの脱臭
を行う必要がある。そのための脱臭装置としては別置型
の脱臭炉を用いるのが普通であり、省エネルギーのため
に蓄熱燃焼バーナーを備えたＨＲＳ脱臭炉等が用いられ
ていた。ところがこのような別置型の脱臭炉を用いる場
合には、その設置スペースが必要となるうえ、脱臭炉へ
の排ガスダクト中に凝結したバインダーが付着すること
があった。また、一般的には脱バインダー排ガスの温度
を排ガスファンの耐熱温度である３００℃以下にまで下
げる必要があるため、一般に大気導入による脱バインダ
ー排ガスの希釈が行われるが、このために排ガス処理風
量が多くなり、従って脱臭設備が大きくなるうえ、脱臭
炉内で８００℃前後まで再加熱を行わねばならないため
に多くの熱エネルギーを必要とし、運転コストも高くな
るという問題があった。2. Description of the Related Art In a heat treatment furnace such as a firing furnace, a drying furnace, and a debinding furnace for heat-treating an object to be heat-treated containing a binder as described above, it is necessary to deodorize debinding binder exhaust gas generated from the object to be heat-treated. As a deodorizing device therefor, a separate deodorizing furnace is usually used, and an HRS deodorizing furnace equipped with a heat storage combustion burner has been used for energy saving. However, when such a separate type deodorizing furnace is used, a space for installing the deodorizing furnace is required, and the condensed binder may adhere to the exhaust gas duct to the deodorizing furnace. Moreover, since it is generally necessary to lower the temperature of the debinding binder exhaust gas to 300 ° C. or lower, which is the heat resistant temperature of the exhaust gas fan, the debinding binder exhaust gas is generally diluted by introducing it into the atmosphere. Therefore, there is a problem in that the deodorizing equipment becomes large and a large amount of heat energy is required because the reheating must be performed up to around 800 ° C. in the deodorizing furnace, resulting in a high operating cost.
【０００３】また、加熱手段としてガスバーナーを用い
た連続式熱処理炉では、入口側から高温側に脱バインダ
ー排ガスを吸引し、酸化分解を行わせるに適した８００
℃以上の場所で排ガスを炉外に排出して酸化分解脱臭を
行っている。しかしこの方式では、バインダーガスが炉
内の高温側に流れて炉内雰囲気が崩れるため、バインダ
ーガスによる汚染を広げるおそれがあり、被熱処理物が
バインダーガスと接触しても差し支えのない場合にしか
使用できないという問題があった。In a continuous heat treatment furnace using a gas burner as a heating means, 800 is suitable for sucking debinding binder exhaust gas from the inlet side to the high temperature side for oxidative decomposition.
Exhaust gas is discharged to the outside of the furnace for oxidative decomposition and deodorization at a temperature above ℃. However, in this method, since the binder gas flows to the high temperature side in the furnace and the atmosphere in the furnace collapses, contamination by the binder gas may spread, and it is possible only when the object to be heat-treated is in contact with the binder gas. There was a problem that it could not be used.
【０００４】このほか、脱バインダー排ガスを冷却して
ミストコレクターによりバインダー成分を除去する方法
もあるが、この冷却・ミスト分離方式ではバインダー濃
度をその温度の飽和状態以下に下げられないため、ウエ
ーバフェフナーの法則に言われる如くかなりの臭気が残
るという問題があった。In addition, there is also a method of cooling the debinding binder exhaust gas and removing the binder component with a mist collector. However, in this cooling / mist separation method, the binder concentration cannot be lowered below the saturated state of the temperature, so the wafer buffet There was a problem that a considerable odor remained as Hunner's law says.
【０００５】[0005]
【発明が解決しようとする課題】 本発明は前記のよう
な問題点を解決して、余分の設置スペースが不要であ
り、排ガスダクト中にバインダーが付着することもな
く、再加熱のためのエネルギーを削減できるうえ、バイ
ンダーガスによる炉内汚染を広げるおそれがなく、しか
も臭気を確実に除去することができる熱処理炉を提供す
るためになされたものである。SUMMARY OF THE INVENTION The present invention solves the above problems, does not require an extra installation space, does not deposit a binder in an exhaust gas duct, and is an energy source for reheating. The present invention is intended to provide a heat treatment furnace that can reduce the amount of odors, can prevent the contamination of the furnace by the binder gas, and can reliably remove the odor.
【０００６】[0006]
【課題を解決するための手段】前記の課題を解決するた
めになされた本発明の熱処理炉は、バインダーを含む被
熱処理物の連続式熱処理炉であって、その脱バインダー
温度領域の排気部に脱臭装置を組み込んだことを特徴と
するものである。なお、加熱方式が電気加熱式又は間接
加熱式であることが好ましく、脱臭装置が触媒燃焼式の
ものであることが好ましい。無論直火式であっても良
い。また、排気部に間接加熱装置を設け、脱臭装置の温
度維持を行うことが好ましく、この場合に排気部の排気
管にヒーターを設けるとともに、連続して脱臭触媒を設
けた構造とすることができる。排気部の排気管の先端と
排気ダクトとの間に、外気に連通する開放空間を設けれ
ば、炉圧の変動を防止することができる。The heat treatment furnace of the present invention, which has been made to solve the above problems, is a continuous heat treatment furnace for a heat-treated object containing a binder, which is provided in the exhaust section in the debinding temperature range. It is characterized by incorporating a deodorizing device. The heating system is preferably an electric heating system or an indirect heating system, and the deodorizing device is preferably a catalytic combustion system. Of course, it may be an open flame type. In addition, it is preferable to provide an indirect heating device in the exhaust part to maintain the temperature of the deodorizing device. In this case, a heater can be provided in the exhaust pipe of the exhaust part and a deodorizing catalyst can be continuously provided. . If an open space that communicates with the outside air is provided between the tip of the exhaust pipe of the exhaust unit and the exhaust duct, fluctuations in the furnace pressure can be prevented.
【０００７】本発明の熱処理炉は、脱バインダー温度領
域の排気部に脱臭装置を組み込んだものであるから、バ
インダーガスは炉内を大きく流動することなく発生場所
から直ちに炉外に排出され、脱臭装置により脱臭され
る。このため別置きの脱臭炉は不要となり、バインダー
ガスが脱臭炉までのダクト内に付着することもなく、バ
インダーガスが炉内を流れて被熱処理物を汚染すること
もない。また排ガス温度の低下もないため、再加熱のた
めのエネルギーを削減することができる。In the heat treatment furnace of the present invention, the deodorizing device is incorporated in the exhaust portion in the debinding temperature range, so that the binder gas is immediately discharged from the generation place to the outside of the furnace without largely flowing in the furnace to deodorize. Deodorized by the device. Therefore, a separate deodorizing furnace is not required, the binder gas does not adhere to the duct leading to the deodorizing furnace, and the binder gas does not flow in the furnace to contaminate the object to be heat treated. Further, since the exhaust gas temperature does not decrease, the energy for reheating can be reduced.
【０００８】[0008]
【発明の実施の形態】次に、本発明の実施形態を説明す
る。図１は本発明の熱処理炉の概念図であり、セラミッ
ク電子部品のようなバインダーを含む被熱処理物が、矢
印のように炉体１の入口２から出口３に向かって連続的
に移動され、焼成などの熱処理が行われる。被熱処理物
の移動は例えばローラーによって行われるが、これに限
定されるものではなく台車式又は台板プッシャー式とし
てもよい。この実施形態では炉体１は電気加熱式又は間
接加熱式として、バーナー排ガスが直接被熱処理物と接
触することを防止している。BEST MODE FOR CARRYING OUT THE INVENTION Next, an embodiment of the present invention will be described. FIG. 1 is a conceptual diagram of a heat treatment furnace of the present invention, in which an object to be heat treated including a binder such as a ceramic electronic component is continuously moved from an inlet 2 to an outlet 3 of a furnace body 1 as indicated by an arrow, Heat treatment such as firing is performed. The object to be heat-treated is moved by, for example, a roller, but is not limited to this and may be a trolley type or a base plate pusher type. In this embodiment, the furnace body 1 is of an electric heating type or an indirect heating type to prevent the burner exhaust gas from directly contacting the object to be heat treated.
【０００９】入口２から炉内に入った被熱処理物は次第
に加熱され、脱バインダー温度領域４で３００〜４００
℃前後の熱分解温度（脱バインダー温度）に達すると、
多量のバインダーガスを発生する。バインダーガスを放
出した被熱処理物は更に加熱されて焼成域５において焼
成され、冷却域６を経て出口３から取り出されることは
従来の熱処理炉と同様である。炉体１には複数の排気部
７が設けられているが、本発明では脱バインダー温度領
域４の排気部７に、脱臭装置８を組み込んである。The object to be heat-treated, which has entered the furnace through the inlet 2, is gradually heated, and the debinding temperature range 4 is set to 300 to 400.
When the thermal decomposition temperature (debinding temperature) around ℃ is reached,
Generates a large amount of binder gas. The object to be heat-treated, which has released the binder gas, is further heated, fired in the firing zone 5, and taken out from the outlet 3 through the cooling zone 6, as in the conventional heat treatment furnace. Although the furnace body 1 is provided with a plurality of exhaust portions 7, in the present invention, the deodorizing device 8 is incorporated in the exhaust portion 7 of the debinding temperature region 4.
【００１０】この脱臭装置８は図２に示すように、炉体
１の排気口９に連設した排気管１０内に、脱臭触媒１１
を装入した触媒燃焼式のものである。脱臭触媒１１は好
ましくはハニカム構造体に担持させたものである。脱臭
触媒としては、例えばＰｔ、Ｐｄ、Ａｇ2Ｏ、Ｃｏ
3Ｏ4、ＣｕＯ等を用いることができる。As shown in FIG. 2, the deodorizing device 8 has a deodorizing catalyst 11 in an exhaust pipe 10 connected to an exhaust port 9 of a furnace body 1.
It is of the catalytic combustion type charged with. The deodorizing catalyst 11 is preferably supported on a honeycomb structure. As the deodorizing catalyst, for example, Pt, Pd, Ag 2 O, Co
3 O 4 , CuO or the like can be used.
【００１１】図２に示すように排気管１０には外部から
の間接加熱装置１５を設け、温度センサー１２により排
気管１０内を流れる脱バインダーガスの温度を常に検出
しながら、脱バインダーガスが脱臭触媒１１の活性温度
に保たれるように加熱して脱臭装置８の温度維持を行う
ことが好ましい。この実施形態では加熱効率を高めるた
めに、管内面にフィンを設けている。なお、排気管１０
内に直接ヒーターを設けることはバインダー付着のおそ
れがあるため好ましくない。As shown in FIG. 2, an exhaust pipe 10 is provided with an indirect heating device 15 from the outside, and while the temperature sensor 12 constantly detects the temperature of the debinding gas flowing in the exhaust pipe 10, the debinding gas is deodorized. It is preferable to maintain the temperature of the deodorizing device 8 by heating so that the activation temperature of the catalyst 11 is maintained. In this embodiment, fins are provided on the inner surface of the tube in order to improve heating efficiency. The exhaust pipe 10
It is not preferable to provide the heater directly inside because the binder may be attached.
【００１２】脱臭触媒１１を通過した排ガスは上部の排
気ダクト１７から排出されるが、直接吸引を行うと炉圧
の変動を招き好ましくない。そこでこの実施形態では、
脱臭装置８の上部にエジェクター１３を設置して排気ダ
クト１７の方向に空気を供給し、脱バインダーガスの吸
引を行わせるとともに、排気部７の出口と排気ダクト１
７との間に外気に連通する開放空間１６を設けてある。
これによって排気部７の出口圧力を常に大気圧に保ち、
炉圧変動を抑制しつつ脱バインダーガスの吸引を行って
いる。なお１４は排気ダクト１７の下部に設けられたダ
ンパーである。The exhaust gas that has passed through the deodorizing catalyst 11 is discharged from the upper exhaust duct 17, but direct suction is not preferable because it causes fluctuations in the furnace pressure. So in this embodiment,
The ejector 13 is installed on the upper part of the deodorizing device 8 to supply air in the direction of the exhaust duct 17 to suck debinding gas, and at the same time, the outlet of the exhaust unit 7 and the exhaust duct 1
An open space 16 that communicates with the outside air is provided between the open space 16 and the air.
As a result, the outlet pressure of the exhaust unit 7 is always kept at atmospheric pressure,
The binder removal gas is sucked in while suppressing fluctuations in the furnace pressure. Reference numeral 14 is a damper provided below the exhaust duct 17.
【００１３】この実施形態では脱臭装置８を触媒燃焼式
としたが、排気管１０内にバーナーを設置してバインダ
ー成分を燃焼させる直火式とすることもできる。In this embodiment, the deodorizing device 8 is of the catalytic combustion type, but it may be of a direct fire type in which a burner is installed in the exhaust pipe 10 to burn the binder component.
【００１４】このように構成された本発明の熱処理炉で
は、被熱処理物が脱バインダー温度領域４に達したとき
に発生する脱バインダーガスは、脱バインダー温度領域
４に設けられた排気部７に直ちに吸引されて脱臭装置８
によって脱臭される。このため従来のように脱バインダ
ーガスが炉内を流れることがないため、被熱処理物を汚
染することがない。従ってセラミック電子部品のような
脱バインダーガスとの接触を嫌うセラミック電子部品の
熱処理にも適している。電子部品はバーナー排ガスとの
接触も嫌うことがあり、その場合には電気加熱式又は間
接加熱式とするために炉内ガスが流動しにくく脱バイン
ダーガスの滞留も発生し易いのであるが、本発明によれ
ば脱バインダーガスは発生地点から直ちに排出されるた
め、電気加熱式又は間接加熱式の熱処理炉にも適してい
る。In the heat treatment furnace of the present invention configured as described above, the debinder gas generated when the object to be heat treated reaches the debinder temperature region 4 is supplied to the exhaust portion 7 provided in the debinder temperature region 4. Immediately sucked and deodorizer 8
Deodorized by. Therefore, unlike the conventional case, the binder removal gas does not flow in the furnace, so that the object to be heat treated is not contaminated. Therefore, it is also suitable for the heat treatment of ceramic electronic components such as ceramic electronic components which are unfavorable to contact with the binder removal gas. Electronic parts may dislike contact with burner exhaust gas, in which case it is difficult to flow the gas in the furnace because it is an electric heating type or an indirect heating type, and it is easy for retention of debinding gas to occur. According to the invention, the binder removal gas is immediately discharged from the generation point, and is therefore suitable for an electric heating type or indirect heating type heat treatment furnace.
【００１５】また本発明の熱処理炉では、排気部７に直
接脱臭装置８を設けたため、従来のように脱臭炉を別置
きする必要がない。このため余分に設置スペースを確保
する必要がなく、脱臭炉まで脱バインダーガスを排ガス
ダクトを通じて導く必要がないので、排ガスダクト内面
にバインダー成分が付着することもない。しかも排ガス
吸引ファンの耐熱温度まで脱バインダーガスを冷却する
必要がなく、ガスボリュームが増加することがないの
で、脱臭装置８は小型で安価なものとすることができ
る。Further, in the heat treatment furnace of the present invention, since the deodorizing device 8 is directly provided in the exhaust portion 7, there is no need to separately install the deodorizing furnace as in the conventional case. Therefore, it is not necessary to secure an extra installation space and it is not necessary to guide the debinder gas to the deodorizing furnace through the exhaust gas duct, so that the binder component does not adhere to the inner surface of the exhaust gas duct. Moreover, since it is not necessary to cool the debinding gas to the heat resistant temperature of the exhaust gas suction fan and the gas volume does not increase, the deodorizing device 8 can be made small and inexpensive.
【００１６】このように本発明の熱処理炉では、脱バイ
ンダーガスを冷却する必要がないため脱臭装置８におい
てガスの再加熱に要するエネルギーは少なくて済み、省
エネルギーとなる。しかも冷却・ミスト分離方式とは異
なり、バインダー成分をほぼ完全に燃焼させることがで
き、十分な脱臭効果を挙げることができる。As described above, in the heat treatment furnace of the present invention, it is not necessary to cool the debinder gas, so that the energy required for reheating the gas in the deodorizing device 8 can be small and energy can be saved. Moreover, unlike the cooling / mist separation method, the binder component can be burned almost completely, and a sufficient deodorizing effect can be achieved.
【００１７】[0017]
【発明の効果】以上の説明から明らかなように、本発明
は連続式熱処理炉の脱バインダー温度領域の排気部に脱
臭装置を組み込んだものであるから、余分の設置スペー
スが不要であり、排ガスダクト中にバインダーが付着す
ることもなく、再加熱のためのエネルギーを削減でき
る。またバインダーガスを発生位置から直接排出するた
め、バインダーガスによる炉内汚染を広げるおそれがな
いから、特にバインダーガスとの接触を嫌う電子部品等
の熱処理に適したものである。As is apparent from the above description, since the present invention incorporates a deodorizing device in the exhaust section of the debinding temperature range of the continuous heat treatment furnace, no extra installation space is required and the exhaust gas The binder does not adhere to the duct, and the energy for reheating can be reduced. Further, since the binder gas is directly discharged from the generation position, there is no fear of spreading the contamination of the furnace by the binder gas, and therefore it is particularly suitable for the heat treatment of electronic parts and the like which are unfavorable to contact with the binder gas.
【図１】本発明の実施形態を示す概略側面図である。FIG. 1 is a schematic side view showing an embodiment of the present invention.
【図２】本発明の実施形態の要部を示す概略断面図であ
る。FIG. 2 is a schematic cross-sectional view showing a main part of an embodiment of the present invention.
１ 炉体、２ 入口、３ 出口、４ 脱バインダー温度
領域、５ 焼成域、６冷却域、７ 排気部、８ 脱臭装
置、９ 排気口、１０ 排気管、１１ 脱臭触媒、１２
温度センサー、１３ エジェクター、１４ ダンパ
ー、１５ 間接加熱装置、１６ 外気に連通する開放空
間、１７ 排気ダクトDESCRIPTION OF SYMBOLS 1 furnace body, 2 inlet, 3 outlet, 4 debinding temperature range, 5 baking zone, 6 cooling zone, 7 exhaust part, 8 deodorizing device, 9 exhaust port, 10 exhaust pipe, 11 deodorizing catalyst, 12
Temperature sensor, 13 ejector, 14 damper, 15 indirect heating device, 16 open space communicating with outside air, 17 exhaust duct
───────────────────────────────────────────────────── フロントページの続き (72)発明者 青木 道郎 愛知県名古屋市瑞穂区須田町２番56号 日 本碍子株式会社内 Ｆターム(参考） 3K070 DA01 DA26 DA58 4K050 AA02 BA16 CA07 CD01 CD05 CG02 CG04 CG12 DA06 DA08 4K056 AA09 BA02 BB03 BB05 CA18 DB08 DC05 DC15 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Michio Aoki 2-56, Sudacho, Mizuho-ku, Nagoya-shi, Aichi Inside Hon insulator Co., Ltd. F-term (reference) 3K070 DA01 DA26 DA58 4K050 AA02 BA16 CA07 CD01 CD05 CG02 CG04 CG12 DA06 DA08 4K056 AA09 BA02 BB03 BB05 CA18 DB08 DC05 DC15
Claims (6)
処理炉であって、その脱バインダー温度領域の排気部に
脱臭装置を組み込んだことを特徴とする熱処理炉。1. A continuous heat treatment furnace for a heat-treated material containing a binder, wherein a deodorizing device is incorporated in an exhaust portion of a debinding temperature region of the heat treatment furnace.
ある請求項１に記載の熱処理炉。2. The heat treatment furnace according to claim 1, wherein the heating system is an electric heating system or an indirect heating system.
である請求項１又は２に記載の熱処理炉。3. The heat treatment furnace according to claim 1, wherein the deodorizing device is of a catalytic combustion type or an open flame type.
の温度維持を行う請求項１〜３のいずれかに記載の熱処
理炉。4. The heat treatment furnace according to claim 1, wherein the exhaust unit is provided with an indirect heating device to maintain the temperature of the deodorizing device.
もに、連続して脱臭触媒を設けた請求項４に記載の熱処
理炉。5. The heat treatment furnace according to claim 4, wherein the exhaust pipe of the exhaust unit is provided with a heater and continuously provided with a deodorizing catalyst.
間に、外気に連通する開放空間を設けた請求項１〜５の
いずれかに記載の熱処理炉。6. The heat treatment furnace according to claim 1, wherein an open space communicating with outside air is provided between the tip of the exhaust pipe of the exhaust section and the exhaust duct.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002011557A JP2003214772A (en) | 2002-01-21 | 2002-01-21 | Heating furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002011557A JP2003214772A (en) | 2002-01-21 | 2002-01-21 | Heating furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003214772A true JP2003214772A (en) | 2003-07-30 |
Family
ID=27649003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002011557A Pending JP2003214772A (en) | 2002-01-21 | 2002-01-21 | Heating furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003214772A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007001843A (en) * | 2005-06-27 | 2007-01-11 | Ngk Insulators Ltd | Degreasing method |
| JP2007292362A (en) * | 2006-04-24 | 2007-11-08 | Koyo Thermo System Kk | Exhaust gas treatment unit |
| JP2009243879A (en) * | 2006-07-13 | 2009-10-22 | Espec Corp | Heat treatment device |
| CN100573011C (en) * | 2004-06-30 | 2009-12-23 | 爱斯佩克株式会社 | Annealing device |
| KR101037990B1 (en) * | 2008-09-05 | 2011-05-30 | 허혁재 | Continuous furnace |
| KR101308278B1 (en) | 2005-12-15 | 2013-09-13 | 고요 써모시스템 주식회사 | Continuous burning furnace |
-
2002
- 2002-01-21 JP JP2002011557A patent/JP2003214772A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100573011C (en) * | 2004-06-30 | 2009-12-23 | 爱斯佩克株式会社 | Annealing device |
| JP2007001843A (en) * | 2005-06-27 | 2007-01-11 | Ngk Insulators Ltd | Degreasing method |
| JP4523499B2 (en) * | 2005-06-27 | 2010-08-11 | 日本碍子株式会社 | Degreasing method |
| KR101308278B1 (en) | 2005-12-15 | 2013-09-13 | 고요 써모시스템 주식회사 | Continuous burning furnace |
| JP2007292362A (en) * | 2006-04-24 | 2007-11-08 | Koyo Thermo System Kk | Exhaust gas treatment unit |
| CN101063571B (en) * | 2006-04-24 | 2010-12-08 | 光洋热系统株式会社 | Exhaust gas treatment unit |
| JP2009243879A (en) * | 2006-07-13 | 2009-10-22 | Espec Corp | Heat treatment device |
| KR101037990B1 (en) * | 2008-09-05 | 2011-05-30 | 허혁재 | Continuous furnace |
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