JP4508094B2 - Sterilization system - Google Patents

Description

  The present invention relates to a sterilization system for sterilizing a processing chamber with hydrogen peroxide.

  Conventionally, as a sterilization system of this type, a gas-suction passage provided with a vacuum pump for sucking a gas in the processing chamber in a sealable processing chamber (for example, a pharmaceutical manufacturing chamber) and hydrogen peroxide vapor are generated. A hydrogen peroxide supply passage provided with a hydrogen peroxide generator, an air supply passage for supplying sterile air into the processing space, and a gas circulation passage for decomposing hydrogen peroxide with a catalyst while circulating the gas in the processing chamber; Are connected to each other (for example, see Patent Document 1).

In the sterilization system disclosed in Patent Document 1, first, a vacuum pump is activated to evacuate a processing chamber, and then hydrogen peroxide is supplied into the processing chamber to perform sterilization. Next, aseptic air is introduced into the processing chamber from the air supply passage, and hydrogen peroxide is dispersed in the processing chamber. Then, when the sterilization of the processing chamber is completed by repeating the suction step by the vacuum pump, the hydrogen peroxide supply step, and the sterile air introduction step several times, the step of removing hydrogen peroxide from the processing chamber is performed. In this step, the gas in the processing chamber is circulated while decomposing hydrogen peroxide by the catalyst in the gas circulation passage. By doing so, the hydrogen peroxide concentration in the processing chamber is lowered.
JP-A-10-328276

  By the way, the above-described sterilization system is provided as a facility for circulating a small amount of air independently from an air conditioning facility. In the sterilization system, since the air-conditioning equipment capable of circulating a large amount of gas is stopped and the sterilization process is performed by circulating a small amount of air, the sterilization gas (air containing hydrogen peroxide) has a poor indoor diffusion effect. There were various problems such as variations in sterilization performance and a long time required for steady operation by lowering the hydrogen peroxide concentration in the room after sterilization.

  The present invention has been made in view of the above points, and an object of the present invention is to improve the sterilization performance and the post-treatment time after sterilization (hydrogen peroxide concentration) in a system for sterilizing a processing chamber using hydrogen peroxide. (Dilution time) can be shortened.

  1st invention presupposes the sterilization system (1) which performs the air conditioning and sterilization in a process chamber (2).

  The sterilization system (1) regulates the temperature and humidity of the outside air and is connected to the processing chamber (2) through the air supply passage (11) and the return air passage (12). ), A filter mechanism (14) such as a HEPA filter provided at the air inlet from the air supply passage (11) to the processing chamber (2), and the return air passage (12) to the air supply passage (11). Connected to the air conditioning side circulation passage (16) configured by connecting the passage (15), the sensible heat air conditioner (17) provided in the air conditioning side circulation passage (16), and the processing chamber (2) A sterilization side circulation passage (32) provided with a hydrogen peroxide generator (31), and an air supply side communication passage (39) for introducing outside air from the outside air treatment air conditioner (13) to the sterilization side circulation passage (32). ), A hydrogen peroxide decomposer (36) connected in parallel with the hydrogen peroxide generator (31) in the sterilization side circulation passage (32), and hydrogen peroxide The return air side communication passage connecting to the return air passage of the solution vessel (36) outside air processing air conditioner (13) (12) (38), is characterized in that it comprises a.

  In the first aspect of the invention, an air conditioning system circuit (10) including an outside air processing air conditioner (13), a sensible heat air conditioner (17), and a filter mechanism (14), and a hydrogen peroxide generator (31) And a circuit (30) on the sterilization system side provided with a hydrogen peroxide decomposer (36), and an air supply side communication path (39) between the air conditioning system side circuit (10) and the sterilization system side circuit (30). ) And the return air communication passage (38). Therefore, as described in the fourth invention described later, with the hydrogen peroxide generator (31) stopped, the outside air processing air conditioner (13) reduces the humidity of the processing chamber (2) to a predetermined value or less. Preparation operation to reduce, and hydrogen peroxide (hydrogen peroxide vapor) generated by the hydrogen peroxide generator (31) is circulated in the sterilization side circulation passage (32), so that hydrogen peroxide is supplied to the treatment chamber (2). Sterilization operation to supply a predetermined concentration, hydrogen peroxide generator (31) is stopped, and hydrogen peroxide decomposer (36) is circulated through the sterilization side circulation passage (32) through the gas in the processing chamber (2). ) In the first dilution operation that decomposes until the hydrogen peroxide concentration falls below the first set value, and air is supplied from the outside air treatment air conditioner (13) to the treatment chamber (2) via the filter mechanism (14). However, exhaust until the hydrogen peroxide concentration falls below the second set value, which is lower than the first set value. The second dilution operation and the steady operation of circulating the conditioned air through the sensible heat air conditioner (17) in the air conditioning side circulation passage (16) while taking in the outside air treated by the outside air treatment air conditioner (13) The operation can be performed continuously. The second dilution operation is an operation that is performed when the concentration of hydrogen peroxide that does not affect the release of air (sterilization gas) in the processing chamber (2) to the atmosphere is reached. The sterilization gas in the processing chamber (2) can be diluted with a large amount of air from (13) and the sensible heat air conditioner (17).

  The second invention is characterized in that, in the first invention, a pressure adjusting mechanism (25) for adjusting the pressure in the processing chamber (2) is provided.

  In this 2nd invention, when performing sterilization operation, 1st dilution operation, 2nd dilution operation, etc., the room pressure suitable for each operation can be maintained.

  According to a third invention, in the first or second invention, the inlet side to the processing chamber (2) in the sterilization side circulation passage (32) is connected to the filter mechanism (14) of the air supply passage (11). It is characterized by.

  In the third aspect of the invention, the hydrogen peroxide supplied into the processing chamber (2) during the sterilization operation passes through the filter mechanism (14) such as a HEPA filter. For this reason, the fungi captured by the filter mechanism (14) can be killed on the filter mechanism (14).

  According to a fourth invention, in the first, second or third invention, a control means (50) for controlling operation is provided, and the control means (50) stops the hydrogen peroxide generator (31). The preparation operation to reduce the humidity of the processing chamber (2) below a predetermined value by the outside air processing air conditioner (13) and the hydrogen peroxide (hydrogen peroxide vapor) generated by the hydrogen peroxide generator (31) Sterilization operation in which hydrogen peroxide is supplied to the treatment chamber (2) to a predetermined concentration by circulating it through the sterilization side circulation passage (32), and the hydrogen peroxide generator (31) is stopped and the treatment chamber (2 ) Gas in the sterilization side circulation passage (32), the hydrogen peroxide decomposer (36) decomposes until the hydrogen peroxide concentration falls below the first set value, and the outside air treatment air conditioner While supplying air from the (13) to the processing chamber (2) through the filter mechanism (14), the hydrogen peroxide concentration The sensible heat air conditioning in the air conditioning side circulation passage (16) while taking in the outside air treated by the outside air treatment air conditioner (13) and the second dilution operation that exhausts until the second set value lower than the set value of 1 or less And a steady operation in which conditioned air is circulated through a machine (17).

  In the fourth invention, the humidity of the processing chamber (2) during the preparatory operation, the hydrogen peroxide concentration in the processing chamber (2) during the sterilization operation, the hydrogen peroxide concentration during the first dilution operation (first setting) Value) and the hydrogen peroxide concentration (second set value) at the time of the second dilution operation are set in advance in the control means (50), so that the preparatory operation, the sterilization operation, the first dilution operation, the second A series of operation operations including a dilution operation and a steady operation can be performed automatically and efficiently.

  According to a fifth invention, in the fourth invention, when the indoor humidity of the processing chamber (2) during the sterilization operation increases or when the indoor pressure increases, the hydrogen peroxide decomposer (36) passes through the return air side communication passage (38). It is configured to return the gas in the processing chamber (2) to the outside air processing air conditioner (13).

  According to the fifth aspect of the present invention, when hydrogen peroxide is supplied to the treatment chamber (2) during sterilization operation to increase the indoor humidity or the indoor pressure, the hydrogen peroxide decomposer (36) The gas decomposed is returned to the outside air treatment air conditioner (13). Moreover, since the air which adjusted humidity and the air volume can be returned to the sterilization side circulation path (32) from the outside air processing air conditioner (13), the humidity and pressure of the processing chamber (2) can be adjusted.

  According to a sixth aspect, in the fourth aspect, when the pressure in the processing chamber (2) is reduced during the first dilution operation, the conditioned air is supplied from the outside air processing air conditioner (13) to the sterilization side circulation passage (32). It is characterized by being configured.

  In the sixth aspect of the invention, during the first dilution operation, when the amount of hydrogen peroxide in the sterilization system or the sterilization side circulation passage (32) and the processing chamber (2) is reduced, or from the processing chamber (2) to the air conditioning system side circuit When sterilization gas leaks to (10), the pressure can be prevented from dropping too much by supplying the conditioned air from the outside air processing air conditioner (13) to the sterilization side circulation passage (32).

  In a seventh aspect based on the fourth aspect, in the second dilution operation, the conditioned air is supplied from the outside air processing air conditioner (13) and the sensible heat air conditioner (17) to the processing chamber (2) via the filter mechanism (14). And a part of the gas in the processing chamber (2) is circulated in the air conditioning side circulation passage (16) while exhausting the gas in the processing chamber (2).

  In the seventh aspect of the invention, not only the return air of the processing chamber (2) is performed using the air conditioning system side circuit (10), but the sterilizing gas is diluted while circulating a part of the gas in the processing chamber (2). It can be performed.

  According to the first, second, third, fourth, fifth, sixth and seventh inventions, the outside air processing air conditioner (13), the sensible heat air conditioner (17), and the filter mechanism (14) are provided. The air conditioning system side circuit (10) and the sterilization system side circuit (30) including the hydrogen peroxide generator (31) and the hydrogen peroxide decomposer (36) are provided, and the air conditioning system side circuit (10) and the sterilization system side circuit (30) are connected by the supply side communication path (39) and the return air side communication path (38), so that the preparation operation, the sterilization operation, the first dilution operation, and the second dilution are performed. Operation and steady operation can be performed continuously as a series of operations. During the second dilution operation, the sterilization gas in the treatment chamber (2) can be diluted with a large amount of air from the outside air treatment air conditioner (13) and the sensible heat air conditioner (17), so that hydrogen peroxide diffuses indoors. In addition to preventing variations in sterilization performance due to poor effects, it is also possible to prevent problems that require a long time for steady operation. In the sterilization system (1) using hydrogen peroxide, keeping the inside of the processing chamber (2) at a low humidity is important for enhancing the sterilization effect. In the present invention, the outside air of the air conditioning system side circuit (10) is used. Since the humidity of the processing chamber (2) can be adjusted beforehand by the processing air conditioner (13), a high sterilization effect can be expected.

  According to the second aspect of the present invention, when the sterilization operation, the first dilution operation, the second dilution operation, and the like are performed by providing the pressure adjustment mechanism (25) for adjusting the pressure in the processing chamber (2). Since the indoor pressure suitable for each operation can be maintained, sterilization operation and dilution operation can be performed efficiently.

  According to the third aspect of the invention, the inlet side to the processing chamber (2) in the sterilization side circulation passage (32) is connected to the filter mechanism (14) of the air supply passage (11), so that the processing chamber can be used during sterilization operation. Hydrogen peroxide supplied into the room of (2) passes through a filter mechanism (14) such as a HEPA filter. Therefore, since the fungi captured by the filter mechanism (14) can be killed on the filter mechanism (14), the sterilization efficiency is improved.

  According to the fourth aspect, the humidity of the processing chamber (2) during the preparation operation, the hydrogen peroxide concentration in the processing chamber (2) during the sterilization operation, the hydrogen peroxide concentration during the first dilution operation, By setting the hydrogen peroxide concentration and the like at the time of two dilution operations in advance in the control means (50), a series of operation operations including a preparation operation, a sterilization operation, a first dilution operation, a second dilution operation, and a steady operation. Can be performed automatically and efficiently.

  According to the fifth aspect of the present invention, when hydrogen peroxide is supplied to the processing chamber (2) during sterilization operation and the indoor humidity increases or the indoor pressure increases, the hydrogen peroxide decomposer (36) The gas decomposed hydrogen oxide is returned to the outside air treatment air conditioner (13), and the air whose humidity and air volume are adjusted from the outside air treatment air conditioner (13) can be returned to the sterilization side circulation passage (32). The humidity and pressure of the chamber (2) can be adjusted to values suitable for sterilization.

  According to the sixth invention, when the amount of hydrogen peroxide in the sterilization system or the sterilization side circulation passage (32) and the processing chamber (2) is reduced during the first dilution operation, or from the processing chamber (2) to the air conditioning system. Supplying conditioned air from the outside air treatment air conditioner (13) to the sterilization side circulation passage (32) when sterilization gas leaks to the side circuit (10) can prevent the pressure from dropping too much. Therefore, the operation can be performed while maintaining a pressure suitable for the first dilution operation.

  According to the seventh aspect of the invention, during the second dilution operation, conditioned air is supplied from the outside air processing air conditioner (13) and the sensible heat air conditioner (17) to the processing chamber (2) via the filter mechanism (14). In addition, while exhausting the gas in the processing chamber (2), a part of the gas in the processing chamber (2) is circulated in the air conditioning side circulation passage (16), so that a uniform dilution effect can be obtained. .

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

"Implementation-shaped state of the invention"
To describe the exemplary form status of the present invention.

-Overall configuration-
This embodiment relates to a sterilization system that performs air conditioning and sterilization processing in a processing room using a manufacturing room for pharmaceuticals or the like as a processing room. As shown in FIG. 1 which is a piping system diagram of this embodiment, the sterilization system (1) includes an air conditioning system side circuit (10) and a sterilization system side circuit (30).

  The air conditioning system side circuit (10) of this sterilization system (1) regulates the temperature and humidity of the outside air, and is connected to the processing chamber (2) via the air supply passage (11) and the return air passage (12). The outside air processing air conditioner (13) is equipped. An air inlet from the supply passage (11) to the processing chamber (2) and an outlet from the processing chamber (2) to the return air passage (12) have a HEPA filter (high efficiency particulate air filter) as a filter mechanism. ) (14) is provided.

  A return passage (15) is connected between the return air passage (12) and the supply air passage (11), and a part of the supply air passage (11) and a part of the return air passage (12) are returned. The passage (15) constitutes an air conditioning side circulation passage (16) through which the air in the processing chamber (2) circulates. The air conditioning side circulation passage (16) is provided with a sensible heat air conditioner (17) that only adjusts the temperature of air on the air supply side, and a circulation fan (18) that circulates air on the exhaust side. . Further, a mixing chamber (19) is provided at the junction of the return passage (15) and the air supply passage (11).

  In the sterilization system side circuit (30), a sterilization side circulation passage (32) including a hydrogen peroxide generator (31) is connected to the processing chamber (2). The hydrogen peroxide generator (31) is provided in the hydrogen peroxide generation channel (33), and the hydrogen peroxide generation channel (33) is in parallel with the main channel (34) of the sterilization side circulation channel (32). Is provided. The ratio of the air volume on the main flow path (34) side and the air volume on the hydrogen peroxide generation flow path (33) side is determined to be about 10: 1. The hydrogen peroxide generator (31) is a device that generates hydrogen peroxide vapor by atomizing an aqueous solution of hydrogen peroxide.

  The sterilization side circulation passage (32) is provided with a hydrogen peroxide decomposition passage (35) branched upstream of the hydrogen peroxide generation passage (33). The hydrogen peroxide decomposition passage (35) A hydrogen peroxide decomposer (36) is provided. The downstream side of the hydrogen peroxide decomposer (36) in the hydrogen peroxide decomposition channel (35) is the circulation side passage (37) joining the sterilization side circulation passage (32) and the return of the outside air treatment air conditioner (13). It branches into a return air side passage (return air side communication passage) (38) that joins the air passage (12).

  The inlet side to the treatment chamber (2) in the sterilization side circulation passage (32) is connected to the HEPA filter (14) on the air supply passage (11) side, and the treatment chamber (2) in the sterilization side circulation passage (32). The outlet side of the air is connected to the HEPA filter (14) on the return air passage (12) side.

  In this sterilization system (1), the air supply side communication passage (39) for introducing outside air from the outside air treatment air conditioner (13) to the sterilization side circulation passage (32) and the hydrogen peroxide decomposer (36) It is characterized in that the return air side communication passage (38) connected to the return air passage (12) of the machine (13) is provided.

-Detailed configuration-
Next, details of the configuration of the sterilization system (1) will be described.

<Air conditioning system side circuit>
First, the configuration of the air conditioning system side circuit (10) will be described.

  The outside air processing air conditioner (13) is separated into a first passage (13b) and a second passage (13c) by a partition wall (13a), and carries an adsorbent capable of adsorbing and desorbing moisture in the air. The honeycomb-shaped adsorption rotor (13d) is provided to be rotatable about a rotation shaft (not shown) provided along the partition wall (13a). In the first passage (13b), in order from the upstream side, the first outside air intake (13e), the first cooling coil (13f), the adsorption rotor (13d), the second cooling coil (13g), the first heating coil (13h), a humidifier (13i), a fan (13j), and an air supply port (13k) are provided. The second passage (13c) is provided with a second outside air inlet (13l), a second heating coil (13m), an adsorption rotor (13d), and an exhaust port (13n). The exhaust port (13n) is connected to an exhaust fan (not shown).

  In the first passage (13b), moisture in the outside air (first air) cooled by the first cooling coil (13f) is adsorbed by the adsorption rotor (13d), and the first air is dehumidified. Thereafter, the temperature and humidity of the first air are adjusted by the second cooling coil (13g), the first heating coil (13h), and the humidifier (13i), and the first air is blown out from the air supply port (13k). The adsorption rotor (13d) rotates continuously or intermittently, and the portion that has adsorbed moisture eventually moves into the second passage (13c). In the second passage (13c), outside air (second air) is heated by the second heating coil (13m) and then passes through the adsorption rotor (13d), whereby the adsorption rotor (13d) is regenerated. The regenerated portion of the adsorption rotor (13d) further rotates and moves toward the first passage (13b), so that the first air can be dehumidified again.

  A medium performance filter (20) and a first air supply switching damper (21a) are provided in the air supply passage (11) between the outside air processing air conditioner (13) and the mixing chamber (19). The sensible heat air conditioner (17) is provided downstream of the mixing chamber (19) in the air supply passage (11). The sensible heat air conditioner (17) includes an air inlet (17a), a cooling coil (17b), a fan (17c), and an air outlet (17d) in this order from the upstream side.

  The treatment room (2) consists of three drug manufacturing rooms (2a, 2b, 2c), and the supply side is connected to the supply passage (11) for each drug manufacturing room (2a, 2b, 2c). A HEPA filter (14) is provided. The air supply passage (11) branches to three air supply pipes (11a, 11b, 11c) corresponding to each HEPA filter (14), and each air supply pipe (11a, 11b, 11c) is fixed from the upstream side. An air volume device (22a, 22b, 22c) and an air supply side airtight damper (23a, 23b, 23c) are provided.

  A return air-side HEPA filter (14) is provided at the connection portion of the return air passage (12) to each pharmaceutical manufacturing room (2a, 2b, 2c). The return air passage (12) branches into three return air pipes (12a, 12b, 12c) corresponding to each HEPA filter (14), and returns to each return air pipe (12a, 12b, 12c) from the upstream side. Air-side airtight dampers (24a, 24b, 24c) and room pressure control dampers (25a, 25b, 25c) are provided. The chamber pressure control dampers (25a, 25b, 25c) constitute a pressure adjusting mechanism (25) that adjusts the pressure in the processing chamber (2).

  In the return air passage (12), the circulation fan (18) is provided on the downstream side of the junction of the return air pipes (12a, 12b, 12c). Further, a return air adjustment damper (26) is provided between the circulation fan (18) and the return passage (15) in the return air passage (12), and the return passage (15) in the return air passage (12) and the outside air A return air switching damper (27) is provided between the processing air conditioners (13).

  The return air passage (12) of the outside air processing air conditioner (13) is provided with an exhaust passage (28) branched between the circulation fan (18) and the return air adjustment damper (26). The exhaust passage (28) is provided with an exhaust adjustment damper (29). By opening the exhaust control damper (29), it is possible to prevent the pressure in the processing chamber (2) from increasing excessively during the operation of the outside air processing air conditioner (13).

<Sterilization system side circuit>
Next, the configuration of the sterilization system side circuit (30) will be described.

  The sterilization side circulation passage (32) includes the main passage (34), three supply side passages (40a, 40b, 40c) branched from the main passage (34), and the main passage (34). And three return air flow paths (41a, 41b, 41c) branched from the. Each air supply side flow path (40a, 40b, 40c) is provided with an air supply side gas valve (42a, 42b, 42c), and the return air side flow path (41a, 41b, 41c) is provided with a return air side gas valve (43a , 43b, 43c). The main flow path (34) is provided with a sterilization gas circulation fan (44) and a first sterilization gas switching valve (45a) in order from the return air side to the air supply side. The hydrogen peroxide generation flow path (33) provided with the hydrogen peroxide generator (31) is mainstream between the first sterilization gas switching valve (45a) and each supply side flow path (40a, 40b, 40c). It is connected in parallel with the path (34).

  One end of the hydrogen peroxide decomposition channel (35) is connected between the sterilization gas circulation fan (44) and the first sterilization gas switching valve (45a), and the other end of the hydrogen peroxide decomposition channel (35). Is connected between the downstream end of the hydrogen peroxide generation flow path (33) in the main flow path (34) and the supply side flow paths (40a, 40b, 40c). In order from the upstream side to the hydrogen peroxide decomposition flow path (35), the second sterilization gas switching valve (45b), the Pt catalyst as the hydrogen peroxide decomposition device (36), and the third sterilization gas switching valve (45c) ) Is provided. The hydrogen peroxide decomposition flow path (35) includes the return air side communication path (38) branched from between the hydrogen peroxide decomposer (36) and the third sterilization gas switching valve (45c) on the downstream side. It joins the return air passage (12) of the outside air processing air conditioner (13). The return air side communication passage (38) is provided with a fourth sterilization gas switching valve (45d).

  The air supply passage (11) of the outside air processing air conditioner (13) branches to the air supply side communication passage (39) between the medium performance filter (20) and the first air supply switching damper (21a). . This air supply side communication path (39) is connected between the return air side flow path (41a, 41b, 41c) and the sterilization gas circulation fan (44) in the main flow path (34) of the sterilization side circulation path (32). Has been. A second air supply switching damper (21b) is provided in the air supply side communication path (39).

-Operation control-
Next, operation control and specific operation of the sterilization system (1) will be described.

  The sterilization system (1) includes a controller (control means) (50) for controlling the operation of the air conditioning system side circuit (10) and the sterilization system side circuit (30). This controller (50) is equipped with a preparatory operation for reducing the humidity of the processing chamber (2), a sterilization operation for sterilizing the processing chamber (2), and hydrogen peroxide after the sterilization of the processing chamber (2) is completed. A dilution operation (first dilution operation and second dilution operation) for lowering the concentration and a steady operation in which the air conditioning of the processing chamber (2) is performed after the dilution is completed are performed. The preparatory operation for lowering the processing chamber (2) before sterilization operation is because when sterilizing with hydrogen peroxide, the lower the humidity in the processing chamber (2), the higher the sterilization effect is obtained. It is.

<Preparation operation>
The preparatory operation is a step of reducing the humidity of the processing chamber (2) below a predetermined value by the outside air processing air conditioner (13) while the hydrogen peroxide generator (31) is stopped. In this state, the outside air introduction amount is reduced to about ½, and the inside of the processing chamber (2) is reduced in humidity. In preparation for sterilization, manufacturing equipment such as pharmaceuticals is opened and fixtures are glazed. The air flow in this preparation operation is shown in FIG.

  At this time, in the sterilization system side circuit (30), the sterilization gas circulation fan (44) and the hydrogen peroxide generator (31) are stopped. Moreover, each valve | bulb (42a, 42b, 42c) (43a, 43b, 43c) (45a, 45b, 45c, 45d) of the sterilization system side circuit (30) will be in the closed state, and the 2nd air supply switching damper (21b) Is also closed. On the other hand, the first air supply switching damper (21a), the return air switching damper (27), the return air adjusting damper (26), each constant air volume device (22a, 22b, 22c), each room of the air conditioning system side circuit (10) The pressure control dampers (25a, 25b, 25c), the air supply side airtight dampers (23a, 23b, 23c), and the return air side airtight dampers (24a, 24b, 24c) are opened, and the exhaust control dampers ( 29) is closed.

  In this state, when the outside air processing air conditioner (13), the sensible heat air conditioner (17), and the circulation fan (18) are operated, the air whose temperature and humidity are adjusted by the outside air processing air conditioner (13) is supplied to the air supply passage. When passing through (11), it passes through the mixing chamber (19) and sensible heat air conditioner (17) in order, and low-humidity air passes through the HEPA filter (14) on the supply side from each supply pipe (11a, 11b, 11c). To the processing chamber (2).

  The air in the processing chamber (2) flows out through the HEPA filter (14) on the exhaust side, joins in each return air pipe (12a, 12b, 12c) in the return air passage (12), and is circulated by the circulation fan (18). A part is sent to the sensible heat air conditioner (17) through the mixing chamber (19), and the other part is sent to the outside air processing air conditioner (13). The preparatory operation is performed until the room temperature in the processing chamber (2) is about 25 ° C. and the relative humidity is about 30% by circulating air as described above. In the processing chamber (2), a temperature sensor and a humidity sensor are provided to detect temperature and humidity.

<Sterilization operation>
When the preparatory operation is completed, the air conditioner is stopped, the damper settings are switched, and the sterilization operation is started. In sterilization operation, the hydrogen peroxide vapor generated by the hydrogen peroxide generator (31) is circulated in the sterilization side circulation passage (32) of the sterilization system side circuit (30), so that the treatment chamber (2) has a predetermined concentration. This is a step of supplying a gas containing hydrogen peroxide. The flow of sterilization gas during this sterilization operation is shown in FIG.

  At this time, in the air conditioning system side circuit (10), the outside air processing air conditioner (13), the sensible heat air conditioner (17), and the circulation fan (18) are stopped, and the air supply switching dampers (21a, 21b), return The air switching damper (27), the return air adjusting damper (26), and the exhaust adjusting damper (29) are closed. Also, each constant air volume device (22a, 22b, 22c), each chamber pressure control damper (25a, 25b, 25c), each air supply side airtight damper (23a, 23b, 23c), each return air side airtight damper (24a, 24b, 24c) are also stopped or closed. On the other hand, in the sterilization system side circuit (30), the sterilization gas circulation fan (44) and the hydrogen peroxide generator (31) are operated, and each supply side gas valve (42a, 42b, 42c) and each return air side gas valve ( 43a, 43b, 43c) is opened. The first sterilization gas switching valve (45a) is opened, and the second sterilization gas switching valve (45b), the third sterilization gas switching valve (45c), and the fourth sterilization gas switching valve (45d) are closed.

  When the sterilization gas circulation fan (44) and the hydrogen peroxide generator (31) are operated in this state, the hydrogen peroxide vapor generated by the hydrogen peroxide generator (31) joins the air in the main flow path (34). The sterilized gas is supplied to the processing chamber (2) from the supply side flow path (40a, 40b, 40c) through the supply side HEPA filter (14).

  The sterilizing gas in the processing chamber (2) flows out through the HEPA filter (14) on the return air side, and merges from each return air side channel (41a, 41b, 41c) in the main channel (34). Part of the combined sterilized gas flows through the hydrogen peroxide generation flow path (33) and the rest flows through the main flow path (34) by the sterilization gas circulation fan (44). As described above, the ratio of the amount of air flowing through the main channel (34) and the amount of air flowing through the hydrogen peroxide generating channel (33) is set to about 10: 1. By doing so, it is possible to obtain an effect of sufficiently diffusing hydrogen peroxide in the air and thus uniformly in the processing chamber (2).

  On the other hand, a pressure sensor (not shown) is provided in the processing chamber (2) in order to control an increase in the indoor pressure accompanying the generation of hydrogen peroxide vapor. When the chamber pressure in the processing chamber (2) increases or the chamber humidity increases during the sterilization operation, the hydrogen peroxide decomposition channel (35) is peroxidized as shown by the thick broken line in the figure. A part of the gas in the processing chamber (2) is decomposed from the hydrogen decomposer (36) through the return air side communication passage (38) and then returned to the outside air processing air conditioner (13). The reason why the sterilized gas is returned to the outside air treatment air conditioner through the hydrogen peroxide decomposer (36) is to prevent corrosion of the outside air treatment air conditioner and ducts.

  During this operation, the second sterilization gas switching valve (45b) and the fourth sterilization gas switching valve (45d) are opened, and the outside air processing air conditioner (13) is operated. Then, the second air supply switching damper (21b) is opened and returned to the sterilization side circulation passage (32) while adjusting the air volume of the humidity adjusted by the outside air processing air conditioner (13). The pressure can be adjusted. If the humidity in the processing chamber (2) increases and condensation occurs, the sterilization effect is significantly reduced, so the upper limit of the indoor humidity is set to about 50%, for example. If it is only necessary to prevent an increase in the chamber pressure in the processing chamber (2), the sterilization gas in the processing chamber (2) is decomposed by the hydrogen peroxide decomposer (36) and then passed through the outside air treatment air conditioner (13). May be released.

  The sterilization operation is performed until the hydrogen peroxide concentration in the processing chamber (2) reaches about 500 ppm by circulating the gas as described above through the sterilization side circulation passage (32), and a predetermined time elapses at that concentration. In order to detect the hydrogen peroxide concentration, a hydrogen peroxide concentration sensor (not shown) is provided on the return air side of the sterilization side circulation passage (32).

<Dilution operation>
After completion of the sterilization operation, the hydrogen peroxide concentration in the processing chamber (2) is about 500 ppm. In this high-concentration state, aseptic air treated with the outside air processing air conditioner (13), sensible heat air conditioner (17), and HEPA filter (14) is introduced into the processing chamber (2) and the processing chamber (2) Since the gas cannot be released outside, the first dilution operation is performed in which the hydrogen peroxide is decomposed by the catalyst until the hydrogen peroxide concentration in the processing chamber (2) reaches about 5 to 10 ppm (FIG. 4). After that, aseptic air treated with the outside air processing air conditioner (13), sensible heat air conditioner (17), and HEPA filter (14) is introduced into the processing chamber (2) and the gas in the processing chamber (2) is released to the outside. The second dilution operation is performed (FIG. 5). Since the hydrogen peroxide concentration of the sterilizing gas released to the outside during the second dilution operation is sufficiently low, there is no influence on the atmosphere.

(First dilution operation)
In the first dilution operation, the hydrogen peroxide generator (31) is stopped and the gas in the treatment chamber (2) is circulated in the sterilization side circulation passage (32) while the hydrogen peroxide concentration is increased in the hydrogen peroxide decomposer (36). Is a step of decomposing until the first set value (5 to 10 ppm) or less is reached, and FIG. 4 shows the air flow.

  At this time, the setting of the air conditioning system side circuit (10) is basically the same as in the sterilization operation, and the outside air processing air conditioner (13), the sensible heat air conditioner (17), and the circulation fan (18) are stopped. Each damper (21a, 21b) (23a, 23b, 23c) (24a, 24b, 24c) (25a, 25b, 25c) (26) (27) (29) and constant air volume devices (22a, 22b, 22c) Etc. are closed or stopped. On the other hand, in the sterilization system side circuit (30), the sterilization gas circulation fan (44) is operated but the hydrogen peroxide generator (31) is stopped, and each supply side gas valve (42a, 42b, 42c) and each return The gas side gas valves (43a, 43b, 43c) remain open. The first sterilization gas switching valve (45a) is closed, the second sterilization gas switching valve (45b) and the third sterilization gas switching valve (45c) are opened, and the fourth sterilization gas switching valve (45d) is closed. The

  When the sterilization gas circulation fan (44) is operated in this state, the air in the processing chamber (2) passes through the hydrogen peroxide decomposer (36) when circulating through the sterilization side circulation passage (32), and the sterilization gas Hydrogen peroxide inside is decomposed. The first dilution operation is performed until the detection value (hydrogen peroxide concentration) by the hydrogen peroxide concentration sensor becomes 5 to 10 ppm.

  During the first dilution operation, sterilization gas leaks from the air supply side airtight dampers (23a, 23b, 23c) and the return air side airtight dampers (24a, 24b, 24c). When the pressure drops, as shown by the thick broken line in the figure, the outside air processing air conditioner (13) is operated and the second air supply switching damper (21b) is opened, and the inside of the processing chamber (2) is predetermined. An operation of maintaining the pressure (for example, several tens of Pa) is performed.

(Second dilution operation)
In the second dilution operation, the hydrogen peroxide concentration is set to the first while supplying air from the outside air processing air conditioner (13) to the processing chamber (2) through the HEPA filter (14) on the supply side which is a filter mechanism. This is a ventilation process in which exhausting is performed until it becomes equal to or lower than a second set value (1 ppm) lower than the value (5 to 10 ppm) (FIG. 5). The second set value is set to a concentration at which an operator can enter the processing chamber (2). In this way, the air conditioning system side circuit (10) is used in the second dilution operation because the low air volume dilution operation (first dilution operation) in the sterilization system side circuit (30) is continued. Since a considerably long time is required for the concentration to reach the second set value, the operation is performed with a large air volume.

  At this time, the setting of the air conditioning system side circuit (10) and the setting of the sterilization system side circuit (30) are basically the same as the preparation operation. However, in the preparatory operation, the return air adjustment damper (26) was opened and the exhaust adjustment damper (29) was closed, whereas in the second dilution operation, the return air adjustment damper (26) was reduced to a small opening. The exhaust adjustment damper (29) is set to an opening close to full open.

  In this state, when the outside air treatment air conditioner (13), sensible heat air conditioner (17), and circulation fan (18) are operated, the temperature and humidity of the outside air treatment air conditioner (13) and sensible heat air conditioner (17) are reduced. Aseptic air that has been adjusted and purified by the HEPA filter (14) on the air supply side is supplied to the processing chamber (2) and is uniformly mixed with the sterilizing gas in the processing chamber (2). The diluted sterilization gas flows out of the processing chamber (2) through the HEPA filter (14) on the return air side. Most of this sterilized gas is exhausted through the exhaust control damper (29), and part of the sterilized gas flows into the mixing chamber (19) through the return air control damper (26) and then from the outside air processing air conditioner (13). It is mixed with the conditioned air and flows to the sensible heat air conditioner (17).

  In the second dilution operation, the conditioned air and the sterilizing gas are circulated as described above until the hydrogen peroxide concentration in the processing chamber (2) is about 1 ppm or less. The reason why the exhaust control damper (29) is set to an opening degree close to full open is to keep the indoor pressure at a pressure (for example, about 15 Pa) lower than the steady value by measures against building air leakage.

The opening degrees of the return air adjustment damper (26) and the exhaust adjustment damper (29) may be appropriately changed according to the operating state. For example, in this embodiment shaped state (circulating air conditioning side circulation path (16)) is opened to the minute opening the return air regulation damper (26) returning a portion of the sterilization gas sensible heat air conditioner to (17) so However, it is not always necessary to return a part of the sterilized gas to the sensible heat air conditioner (17).

  Also, during the transition from the first dilution operation to the second dilution operation, the outside air processing air conditioner (13), the sensible heat air conditioner (17), and the circulation fan (18) are started slowly to avoid sudden changes in the room pressure. And make a stable transition.

<Normal operation>
The steady operation is a step of circulating the conditioned air through the sensible heat air conditioner (17) in the air conditioning side circulation passage (16) while taking in the outside air processed by the outside air processing air conditioner (13). The flow of air in this steady operation is shown in FIG.

  At this time, the setting of the air conditioning system side circuit (10) and the setting of the sterilization system side circuit (30) are basically the same as the preparation operation. However, while the exhaust adjustment damper (29) is closed in the preparation operation, the exhaust adjustment damper (29) is set to a predetermined opening degree in this steady operation.

  In this state, when the outside air treatment air conditioner (13), sensible heat air conditioner (17), and circulation fan (18) are operated, the temperature and humidity of the outside air treatment air conditioner (13) and sensible heat air conditioner (17) are reduced. Aseptic air that has been adjusted and purified by the HEPA filter (14) on the supply side is supplied to the processing chamber (2). Aseptic air in the processing chamber (2) flows out of the processing chamber (2) through the HEPA filter (14) on the return air side. Part of this sterile air is exhausted through the exhaust control damper (29) and most of it enters the mixing chamber (19) through the return air control damper (26) and then from the outside air treatment air conditioner (13). It is mixed with the conditioned air and flows to the sensible heat air conditioner (17).

  In steady operation, air-conditioned sterile air circulates in the air-conditioning system side circuit (10) as described above, so that the temperature and humidity of the processing chamber (2) are maintained at the set values and the sterility is maintained. Is done.

- implementation-shaped state of the effect -
According to the present form condition, the sterilization system (1), outside air processing air conditioner (13) and the sensible heat air conditioner (17) and HEPA filter (14) and the air conditioning system side circuit having a (10), over A sterilization system side circuit (30) equipped with a hydrogen oxide generator (31) and a hydrogen peroxide decomposer (36) is provided, and an air conditioning system side circuit (10) and a sterilization system side circuit (30) are supplied. By connecting the air side communication passage (39) and the return air side communication passage (38), the preparatory operation, the sterilization operation, the first dilution operation, the second dilution operation, and the steady operation are automatically performed as a series of operations. It can be done efficiently. During the second dilution operation, the sterilization gas in the treatment chamber (2) can be diluted with a large amount of air from the outside air treatment air conditioner (13) and the sensible heat air conditioner (17), so that hydrogen peroxide diffuses indoors. In addition to preventing variations in sterilization performance due to poor effects, it is also possible to prevent problems that require a long time for steady operation. Further, the sterilization system using hydrogen peroxide (1), but to keep the process as described above chamber in (2) in a low humidity is important in order to enhance the sterilizing effect, the air conditioning in this embodiment shaped condition Since the humidity in the processing chamber (2) can be adjusted in advance by the outside air processing air conditioner (13) of the system side circuit (10), a high sterilization effect can be expected.

Further, in this embodiment shaped state, since there is provided a pressure adjusting mechanism for adjusting the pressure in the processing chamber (2) (25), sterilizing operation, a first dilution operation, and the like when performing a second dilution operation Since the indoor pressure suitable for each operation can be maintained, sterilization operation and dilution operation can be performed efficiently.

  Furthermore, since the inlet side to the processing chamber (2) in the sterilization side circulation passage (32) is connected to the HEPA filter (14) on the air supply passage (11) side, the chamber of the processing chamber (2) is sterilized. Hydrogen peroxide supplied to the water passes through the HEPA filter (14). Therefore, since the fungi captured by the HEPA filter (14) can be killed on the HEPA filter (14), the sterilization efficiency is improved.

  In addition, if hydrogen peroxide is supplied to the treatment chamber (2) during sterilization operation and the indoor humidity increases or the indoor pressure increases, the hydrogen peroxide decomposer (36) decomposes the hydrogen peroxide gas. Returning air to the outside air treatment air conditioner (13) and returning the air with adjusted humidity and air volume from the outside air treatment air conditioner (13) to the sterilization side circulation passage (32), the humidity of the treatment room (2) And the pressure can be adjusted to values suitable for sterilization.

  Further, when sterilization gas leaks from the processing chamber (2) to the air conditioning system side circuit (10) during the first dilution operation, the conditioned air is sent from the outside air processing air conditioner (13) to the sterilization side circulation passage (32 ), It is possible to prevent the pressure from dropping excessively, so that the operation can be performed while maintaining the pressure suitable for the first dilution operation. In addition, during the second dilution operation, conditioned air is supplied to the processing chamber (2) from the outside air processing air conditioner (13) and the sensible heat air conditioner (17) through the HEPA filter (14), and the processing chamber (2) Since a part of the gas in the processing chamber (2) is circulated in the air conditioning side circulation passage (16) while exhausting the gas, a uniform dilution effect can be obtained.

《 Reference technology 》
Reference technology will be described.

-Overall configuration-
The reference technology, like on purpose above described type, as a processing chamber manufacturing chamber of pharmaceutical products, to a sterilization system for the sterilization and conditioning of the processing chamber. In this reference technique , a sterilization system (1) is configured for one processing chamber. As shown in FIG. 7 which is a piping system diagram of this reference technology, the sterilization system (1) includes an air conditioning system side circuit (10) and a sterilization system side circuit (30).

  The air conditioning system side circuit (10) of the sterilization system (1) includes an air supply passage (11) connected to the inlet of the processing chamber (2) and an exhaust passage (28 connected to the outlet of the processing chamber (2). ). An air inlet from the supply passage (11) to the processing chamber (2) and an outlet from the processing chamber (2) to the exhaust passage (28) have a high efficiency particulate air filter (HEPA filter) (14) as a filter mechanism. ) Is provided.

A return passage (15) is connected between the air supply passage (11) and the exhaust passage (28) to return the air in the processing chamber (2) from the exhaust passage (28) to the air supply passage (11). Has been. The part of the air supply passage (11), the part of the return air passage (12) and the return passage (15) constitute an air conditioning side circulation passage (16) through which the air in the processing chamber (2) circulates. ing. Note that the merging portion of the return passage (15) and the supply passage (11), on purpose likewise the above-described type may be provided with a mixing chamber. In the exhaust passage (28), a circulation fan (18) is provided on the upstream side of the connection portion with the return passage (15).

The air supply passage (11) is provided with an outside air processing air conditioner (13) configured as a dehumidifier and a sensible heat air conditioner (17) that only adjusts the temperature of air. The outside air processing air conditioner (13) and the sensible heat air conditioner (17) constitute an air conditioner. The outside air processing air conditioner (13), similar to those of the above-described type condition, is to dehumidify air with adsorption rotor rotating (13d). However, in the outside air treatment air conditioner (13) of the present reference technology , the second cooling coil (13g), the first heating coil (13h), and the humidifier (13i) are omitted. Other configurations, explanation therefor is collected by almost the same of the above described type condition will be omitted. In this outside air processing air conditioner (13), ducts are connected to the outside air intake port (13e) and the exhaust port (13n), respectively, and the medium performance filter (20) is connected to the duct on the outside air intake port (13e) side. Is provided.

  The sensible heat air conditioner (17) has an air inlet (17a), a cooling coil (17b), an electric heater (17e), a fan (17c), and an air outlet (17d) in order from the upstream side. Yes. A medium performance filter (20) is provided between the sensible heat air conditioner (17) and the outside air processing air conditioner (13). The return passage (15) is connected between the outside air processing air conditioner (13) and the medium performance filter (20) in the air supply passage (11).

  The air conditioning system side circuit (10) is provided with three air conditioning gas switching valves (56). Specifically, a first air-conditioning gas switching valve (56a) is provided between the sensible heat air conditioner (17) and the processing chamber (2) in the air supply passage (11). A second air conditioning gas switching valve (56b) is provided between the processing chamber (2) and the circulation fan (18) in the exhaust passage (28). A third air-conditioning gas switching valve (56c) is provided on the downstream side of the connection portion between the exhaust passage (28) and the return passage (15).

  The sterilization system side circuit (30) includes a main channel (34), a hydrogen peroxide generation channel (33), a hydrogen peroxide decomposition channel (35), a circulation side channel (37), and an exhaust side channel ( 54). One end of the main flow path (34) is connected downstream of the first air-conditioning gas switching valve (56a) in the air supply passage (11), and the other end is connected to the second air-conditioning gas switching valve (56b) in the exhaust passage (28). Connected upstream. As a result, a part of the supply air passage (11), a part of the return air passage (12) and the main flow path (34) constitute a sterilization side circulation passage (32) through which the air in the processing chamber (2) circulates. Has been.

A sterilization side air conditioner (53) is provided in the main channel (34). The sterilization side air conditioner (53) is an air conditioner having the same configuration as the sensible heat air conditioner (17) and having a smaller processing air volume than the sensible heat air conditioner (17). The sterilization side air conditioner (53) has an air inlet (53a), a cooling coil (53b), an electric heater (53e), a fan (53c), and an air outlet (53d) in order from the upstream side. . The sterilization-side air conditioner (53) of this reference technique has a processing air volume smaller than that of the sensible heat air conditioner (17), but may be greater than or equal to the sensible heat air conditioner (17).

  In the upstream part of the sterilization side air conditioner (53) of the main flow path (34), a hydrogen peroxide decomposition flow path (35), a circulation side path (37), and a hydrogen peroxide generation flow path (33) are arranged in order from the upstream side. Is connected. The circulation side passage (37) branches off from the hydrogen peroxide decomposition passage (35). That is, the portion composed of the hydrogen peroxide decomposition channel (35) and the circulation side channel (37) is in parallel with the main channel (34).

The hydrogen peroxide generation channel (33) is provided with a sterilization gas generator (58), and the end opposite to the main channel (34) is open to the atmosphere. The sterilization gas generator (58) includes a dehumidifier (57) and a hydrogen peroxide generator (31). The dehumidifier (57) dehumidifies the air taken from outside. The hydrogen peroxide generator (31) generates hydrogen peroxide vapor by atomizing an aqueous solution of hydrogen peroxide. The reason for dehumidifying with the dehumidifier (57) is that hydrogen in the low humidity air tends to evaporate. In this reference technique , the ratio of the air volume on the main channel (34) side and the air volume on the hydrogen peroxide generating channel (33) side is determined to be about 10: 1.

  The hydrogen peroxide decomposition channel (35) is provided with a Pt catalyst that is a hydrogen peroxide decomposer (36) and an exhaust fan (55) from the main channel (34) side. The hydrogen peroxide decomposition flow path (35) has an end opposite to the main flow path (34) branched into a circulation side passage (37) and an exhaust side passage (54). The exhaust-side passage (54) is open to the atmosphere at the end opposite to the hydrogen peroxide decomposition passage (35).

  The sterilization system side circuit (30) is provided with six sterilization gas switching valves (45). Specifically, a first sterilization gas switching valve (45a) is provided on the upstream side of the connection portion of the hydrogen peroxide decomposition channel (35) in the main channel (34). A second sterilization gas switching valve (45b) is provided upstream of the hydrogen peroxide decomposer (36) in the hydrogen peroxide decomposition channel (35). A third sterilization gas switching valve (45c) is provided between the connection part of the hydrogen peroxide decomposition flow path (35) and the connection part of the circulation side passage (37) in the main flow path (34). The circulation side passage (37) is provided with a fourth sterilization gas switching valve (45d). A fifth sterilization gas switching valve (45e) is provided on the downstream side of the sterilization gas generator (58) in the hydrogen peroxide generation flow path (33). A sixth sterilization gas switching valve (45f) is provided downstream of the sterilization side air conditioner (53) in the main channel (34).

-Operation control-
Next, operation control and specific operation of the sterilization system (1) will be described.

The sterilization system (1), similar to the above-described type condition, and a controller which controls the operation of the air conditioning system side circuit (10) with a sterile system side circuit (30) (control means) (50). The controller (50) is configured to perform a preparation operation, a sterilization operation, a dilution operation (a first dilution operation and a second dilution operation), and a steady operation.

<Preparation operation>
The preparatory operation is a process of reducing the humidity of the processing chamber (2) by the outside air processing air conditioner (13) so that the humidity of the processing chamber (2) becomes the target humidity with the sterilization gas generator (58) stopped. In this operation, the amount of outside air introduced is about ½ of the state in steady operation described later, and the inside of the processing chamber (2) is reduced in humidity. In the preparatory operation, the target humidity of the processing chamber (2) is set to a predetermined value of 20% to 30% relative humidity. Note that the target humidity is not limited to a range of 20% to 30%, and may be a range of 10% to 50%. Moreover, in preparation operation, in preparation for sterilization, a manufacturing apparatus, such as a pharmaceutical, is opened and the fittings are glazed. The flow of air in this preparation operation is shown in FIG.

  At this time, each valve (56a, 56b, 56c) of the air conditioning system side circuit (10) is opened. On the other hand, each valve (45a, 45b, 45c, 45d, 45e, 45f) of the sterilization system side circuit (30) is closed.

  In this state, when the outside air processing air conditioner (13), the sensible heat air conditioner (17), and the circulation fan (18) are operated, the air dehumidified by the outside air processing air conditioner (13) is sensible heat air conditioner (17). The low-humidity air whose temperature is adjusted is supplied to the processing chamber (2) via the HEPA filter (14) on the inlet side.

  The air in the processing chamber (2) flows out through the HEPA filter (14) on the outlet side, circulates through the exhaust passage (28) by the circulation fan (18), and part of it flows to the air supply passage (11). It returns to the sensible heat air conditioner (17) and the remainder is exhausted from the outlet of the exhaust passage (28). The preparatory operation is performed until the room temperature in the processing chamber (2) reaches 25 ° C. and the relative humidity reaches a predetermined value (for example, 30%). In the processing chamber (2), a temperature sensor and a humidity sensor are provided to detect temperature and humidity.

<Sterilization operation>
When the preparatory operation is completed, in order to stop the supply of air from the air conditioning system side circuit (10) to the processing chamber (2), the outside air processing air conditioner (13) and the sensible heat air conditioner (17) that constitute the air conditioner And the circulation fan (18) are stopped, and the setting of the valve is switched to shift to the sterilization operation. The sterilization operation is performed by supplying hydrogen peroxide from the sterilization gas generator (58) to the processing chamber (2), thereby setting the concentration of hydrogen peroxide in the processing chamber (2) to a predetermined concentration (for example, 500 ppm). This is a step of maintaining the concentration state for a predetermined time. In sterilization operation, the operation control of the sterilization gas generator (58) includes an adjustment mode until the concentration of hydrogen peroxide in the processing chamber (2) reaches a predetermined concentration, and a sterilization mode for maintaining the predetermined concentration. In each mode, the supply amount of hydrogen peroxide to the processing chamber (2) is adjusted. In order to detect the concentration of hydrogen peroxide in the processing chamber (2), a hydrogen peroxide concentration sensor is provided in the processing chamber (2) (not shown). The air flow during this sterilization operation is shown in FIG.

  At this time, the valves (56a, 56b, 56c) of the air conditioning system side circuit (10) are closed. On the other hand, the valves of the sterilization system side circuit (30) are opened except for the fourth sterilization gas switching valve (45d).

  In this state, when the sterilization gas generator (58), the sterilization side air conditioner (53), and the exhaust fan (55) are operated, the air taken from outside is sent to the sterilization gas generator (58). The air flowing into the sterilization gas generator (58) is dehumidified by the dehumidifier (57) and then given oxygen peroxide by the hydrogen peroxide generator (31). Then, air containing hydrogen peroxide (sterilization gas) merges with the air in the main flow path (34), and after the temperature is adjusted by the sterilization side air conditioner (53), it is processed through the HEPA filter (14) on the inlet side. Supplied to chamber (2). As described above, the ratio of the amount of air flowing through the main channel (34) and the amount of air flowing through the hydrogen peroxide generating channel (33) is set to about 10: 1. By doing so, it is possible to obtain an effect of sufficiently diffusing hydrogen peroxide in the air and thus uniformly in the processing chamber (2).

  The sterilization gas in the processing chamber (2) flows out through the HEPA filter (14) on the outlet side, and flows from the exhaust passage (28) into the main channel (34) constituting the sterilization side circulation passage (32). Part of the sterilized gas that has flowed into the main flow path (34) flows directly through the main flow path (34), passes through the sterilization side air conditioner (53), and is then supplied to the treatment chamber (2), with the remainder being decomposed by hydrogen peroxide. It flows into the channel (35). The sterilization gas that has flowed into the hydrogen peroxide decomposition channel (35) is decomposed by the exhaust fan (55) after the hydrogen peroxide in the sterilization gas is decomposed by the hydrogen peroxide decomposer (36). It is discharged outside from the exit.

  Note that exhausting the air in the sterilization side circulation passage (32) from the exhaust side passage (54) controls the increase in the chamber pressure in the processing chamber (2) accompanying the inflow of sterilization gas from the main flow path (34). Because. The amount of air exhausted from the exhaust side passageway (54) to the outside, that is, the flow rate of the sterilizing gas in the hydrogen peroxide decomposition flow path (35), is a pressure sensor (not shown) provided in the processing chamber (2). Although it is adjusted based on the measured value, the value is substantially close to the flow rate of the hydrogen peroxide generation flow path (33). Therefore, the flow rate of the sterilizing gas flowing into the hydrogen peroxide decomposer (36) is considerably smaller than that of the main flow path (34). Here, in this sterilization system (1), a hydrogen peroxide decomposer (36) having a decomposition capability corresponding to the flow rate of the main flow path (34) is used. For this reason, the sterilization gas flowing into the hydrogen peroxide decomposer (36) in the sterilization operation has a high concentration but the amount of hydrogen peroxide is small. Therefore, the hydrogen peroxide decomposer (36) peroxidizes the sterilization gas. The concentration of hydrogen can be reduced to a level at which it can be discharged outside the room.

<Dilution operation>
After completion of the sterilization operation, the concentration of hydrogen peroxide in the processing chamber (2) is a predetermined concentration of about 500 ppm. In this high concentration state, even if the sterilization gas in the treatment chamber (2) is passed through the hydrogen peroxide decomposer (36) to decompose the hydrogen peroxide, the hydrogen peroxide can be discharged to a level that can be discharged outside the chamber. The concentration cannot be reduced. Therefore, air is circulated between the treatment chamber (2) and the hydrogen peroxide decomposer (36) until the concentration of hydrogen peroxide in the treatment chamber (2) becomes a predetermined value (for example, 10 ppm) or less. A first dilution operation (circulation operation) is performed in which the hydrogen peroxide in the air is decomposed by the hydrogen peroxide decomposer (36) (FIG. 10). Then, while operating the outside air processing air conditioner (13) and sensible heat air conditioner (17) and supplying aseptic air treated with the HEPA filter (14) to the processing chamber (2), the inside of the processing chamber (2) A second dilution operation (exhaust operation) for discharging the air to the outside is performed (FIG. 11). If the concentration of hydrogen peroxide in the sterilization gas is 10 ppm (concentration at the end of the first dilution operation), it cannot be discharged to the outside as it is, but if it is 10 ppm or less, the hydrogen peroxide in the sterilization gas is decomposed into hydrogen peroxide. The concentration of hydrogen peroxide can be reduced to a level at which it can be discharged outside by being decomposed by the vessel (36).

(First dilution operation)
In the first dilution operation, the sterilization gas generator (58) is stopped and the sterilization side air conditioner (53) is operated. FIG. 10 shows the air flow during the first dilution operation.

  At this time, the setting of the air conditioning system side circuit (10) is basically the same as in the sterilization operation, and the outside air processing air conditioner (13), the sensible heat air conditioner (17), and the circulation fan (18) are stopped. Each valve (56a, 56b, 56c) is closed. On the other hand, the valves of the sterilization system side circuit (30) are opened except for the third sterilization gas switching valve (45c) and the fifth sterilization gas switching valve (45e).

  When the sterilization side air conditioner (53) and the exhaust fan (55) are operated in this state, excess air in the air is circulated when the air circulates between the treatment chamber (2) and the hydrogen peroxide decomposer (36). Hydrogen oxide is decomposed by the hydrogen peroxide decomposer (36). The first dilution operation is performed until the value detected by the hydrogen peroxide concentration sensor (hydrogen peroxide concentration) becomes a predetermined value (10 ppm) or less.

  If the pressure in the processing chamber (2) decreases during the first dilution operation, the sterilization gas generator (58) is stopped and the fifth sterilization gas switching valve (45e) is opened to generate hydrogen peroxide. Outside air is introduced from the passage (33), and an operation for maintaining the inside of the processing chamber (2) at a predetermined pressure (for example, several tens of Pa) is performed.

(Second dilution operation)
In the second dilution operation, the concentration of hydrogen peroxide further exceeds a predetermined value (10 ppm) while supplying air from the outside air treatment air conditioner (13) to the treatment chamber (2) via the HEPA filter (14) on the inlet side. This is a ventilation process in which exhaust is performed until the value becomes lower than 1 ppm (FIG. 11).

  At this time, the sterilization gas generator (58) and the circulation fan (18) are stopped. Each valve of the air conditioning system side circuit (10) opens only the first air conditioning gas switching valve (56a). On the other hand, each valve of the sterilization system side circuit (30) opens the first sterilization gas switching valve (45a) and the second sterilization gas switching valve (45b). Further, the exhaust fan (55) is operated.

  In this state, when the outside air treatment air conditioner (13), sensible heat air conditioner (17), and exhaust fan (55) are operated, the temperature and humidity of the outside air treatment air conditioner (13) and sensible heat air conditioner (17) are reduced. Sterile air that has been adjusted and purified by the HEPA filter (14) on the inlet side is supplied to the processing chamber (2) and uniformly mixed with the sterilizing gas in the processing chamber (2). The diluted sterilization gas flows out of the processing chamber (2) through the HEPA filter (14) on the outlet side. The sterilizing gas flows from the exhaust passage (28) into the hydrogen peroxide decomposition passage (35) through the main passage (34) of the sterilization system side circuit (30). The sterilization gas that has flowed into the hydrogen peroxide decomposition channel (35) is decomposed by the hydrogen peroxide decomposer (36) and discharged from the outlet of the exhaust side passage (54) to the outside. The

  In this second dilution operation, unlike the first dilution operation, the air that has passed through the hydrogen peroxide decomposer (36) is not returned to the processing chamber (2), so that the processing chamber is shorter in time than the first dilution operation. It is possible to reduce the concentration of hydrogen peroxide in (2). Moreover, the supply of air to the processing chamber (2) is performed using an outside air processing air conditioner (13) and a sensible heat air conditioner (17) constituting the air conditioner. These air conditioners (13, 17) are configured as devices that can supply a larger volume of air than the sterilization side air conditioner (53), so the amount of air exchanged in the processing chamber (2) per unit time Is greater than in the first dilution operation. Also in this point, it is possible to reduce the concentration of hydrogen peroxide in the processing chamber (2) in a shorter time than in the first dilution operation.

  The second dilution operation is performed until the hydrogen peroxide concentration in the processing chamber (2) is about 1 ppm or less. At that time, the first sterilization gas switching valve (45a) and the second sterilization gas switching valve (45b) are used in order to maintain the indoor pressure at a pressure lower than the steady value (for example, about 15 Pa) by taking measures against building air leakage. Adjust the opening of each.

  Also, during the transition from the first dilution operation to the second dilution operation, the outside air treatment air conditioner (13), the sensible heat air conditioner (17), and the exhaust fan (55) are started slowly to avoid sudden changes in the room pressure. And make a stable transition.

<Normal operation>
Steady operation is a process of exhausting the air in the processing chamber (2) to the outside in order to ventilate the inside of the processing chamber (2) and maintain the room pressure while taking in the outside air processed by the outside air processing air conditioner (13). . The flow of air in this steady operation is shown in FIG. The air flow is substantially the same as that in the second dilution operation, but differs in that the air in the processing chamber (2) is discharged from the exhaust passage (28) instead of the exhaust side passage (54).

  At this time, each valve (56a, 56b, 56c) of the air conditioning system side circuit (10) is opened. On the other hand, each valve (45a, 45b, 45c, 45d, 45e, 45f) of the sterilization system side circuit (30) is closed. Further, the exhaust fan (55) is stopped and the circulation fan (18) is operated.

  In this state, when the outside air treatment air conditioner (13), sensible heat air conditioner (17), and circulation fan (18) are operated, the temperature and humidity of the outside air treatment air conditioner (13) and sensible heat air conditioner (17) are reduced. Aseptic air that has been adjusted and purified by the HEPA filter (14) on the inlet side is supplied to the processing chamber (2). Aseptic air in the processing chamber (2) flows out of the processing chamber (2) through the HEPA filter (14) on the outlet side. Most of this sterile air is discharged from the outlet of the exhaust passage (28) through the third air-conditioning gas switching valve (56c), and part is returned to the air supply passage (11) from the return passage (15), It further flows to the sensible heat air conditioner (17). In the steady operation, the temperature and humidity of the processing chamber (2) are maintained at the set values and the aseptic state is maintained.

-Effect of reference technology-
In this reference technology , the external air processing air conditioner (13) and the sensible heat air conditioner (17) that constitute the air conditioner are linked with the sterilization gas generator (58) and the hydrogen peroxide decomposer (36) to perform sterilization operation. Preparation operation to dehumidify the processing chamber (2) so that a high sterilization effect can be expected, sterilization operation in which sterilization is performed at low humidity, and dilution to reduce the concentration of hydrogen peroxide in the processing chamber (2) Operation is performed as a series of operations. That is, in this reference technology , the sterilization system (1) including the air conditioner is configured to enhance the effect of sterilization treatment using hydrogen peroxide. Therefore, the sterilization performance can be improved in the sterilization system (1) that sterilizes the processing chamber (2) using hydrogen peroxide.

Further, in the present reference technology , in the dilution operation, when the concentration of hydrogen peroxide in the processing chamber (2) becomes a predetermined value or less in the first dilution operation, the processing chamber (2) has a shorter time than the first dilution operation. Is switched to the second dilution operation capable of lowering the concentration of hydrogen peroxide. Therefore, the dilution operation can be performed efficiently by setting in advance a predetermined value that can be switched to the second dilution operation.

Moreover, in this reference technique , the filter mechanism (14) is provided so that the fungi in the air supplied to the processing chamber (2) may be captured in the second dilution operation. Accordingly, the amount of fungi that enter the processing chamber (2) from the outside during the second dilution operation can be reduced.

In addition, in this reference technology , an external air treatment air conditioner (13) and a sensible heat air conditioner that can supply a larger air volume than the sterilization side air conditioner (53) operated in the first dilution operation in the second dilution operation. Air is supplied to the processing chamber (2) using the machine (17). Thereby, since the concentration of hydrogen peroxide in the processing chamber (2) can be lowered in a short time, the second dilution operation can be completed in a short time.

In this reference technique , the relative humidity in the processing chamber (2) is adjusted to a predetermined value in the range of 20% to 30% in the preparation operation. Therefore, since a high sterilization effect is obtained in the sterilization operation, the sterilization performance can be improved.

In addition, in this reference technology , the concentration of hydrogen peroxide in the treatment chamber (2) is not affected by the outside air treatment air conditioner (13) and the sensible heat air conditioner (17). As controlled by the control, the supply of air from the outside air processing air conditioner (13) and the sensible heat air conditioner (17) to the processing chamber (2) is stopped during the sterilization operation. Accordingly, during the sterilization operation, it is only necessary to control the operation of the sterilization gas generator (58), so that the concentration of hydrogen peroxide in the processing chamber (2) can be easily adjusted.

In this reference technology , the sterilization side air conditioner (53) is provided so that the temperature of the air containing hydrogen peroxide introduced into the processing chamber (2) can be adjusted in the sterilization operation. Therefore, the temperature in the processing chamber (2) can be adjusted in a state where the supply of air from the air conditioner (13, 17) to the processing chamber (2) is stopped.

-Modification of reference technology 1-
A first modification of the reference technique will be described. As shown in FIG. 13, the sterilization system (1) of the first modification is configured such that outside air is taken into the sterilizing gas generator (58) via the outside air processing air conditioner (13).

  Specifically, an outside air introduction passage (59) that connects the air supply passage (11) and the sterilization gas generator (58) is provided. The outside air introduction passage (59) is branched from the air supply passage (11) between the connection portion between the air supply passage (11) and the return passage (15) and the outside air processing air conditioner (13). In the sterilization operation, when the fifth sterilization gas switching valve (45e) is opened and the first air conditioning gas switching valve (56a) is closed, the air dehumidified by the outside air processing air conditioner (13) is supplied to the sterilization gas generator ( 58).

-Modification of reference technology 2-
A modification 2 of the reference technique will be described. As shown in FIG. 14, in the sterilization system (1) of the second modification, the main flow path (34) of the sterilization system side circuit (30) is connected to the air supply path (11) and the exhaust of the air conditioning system side circuit (10). It is connected directly to the processing chamber (2), not the passage (28).

-Modification of reference technology 3-
A third modification of the reference technique will be described. In Modification 3, the sterilization system (1) is configured for a plurality of processing chambers. In this case, similarly to the above-described type state, the path connected branched from the supply passage (11) and the exhaust passage (28) to the processing chamber (2), respectively the damper (23,24,25 ) Install a constant air volume device (22). Thereby, it becomes possible to perform the sterilization process of each process chamber (2) separately. Dampers (23, 24, 25) so that the air conditioned by the outside air treatment air conditioner (13) and the sensible heat air conditioner (17) through the steady operation flows into the processing chamber (2) that has not been sterilized. ) Adjust the constant air volume device (22).

-Modification of reference technology 4-
A modification 4 of the reference technique will be described. As shown in FIG. 15, in the fourth modification, the air conditioning system side circuit (10) is not provided, and the sterilization process of the processing chamber (2) is executed only by the sterilization system side circuit (30). Has been.

  In this sterilization system (1), in the preparatory operation, the sterilization gas generator (58) is controlled to stop the hydrogen peroxide generator (31) and operate only the dehumidifier (57). As a result, the air taken from outside and dehumidified by the sterilization gas generator (58) is adjusted in temperature by the sterilization side air conditioner (53) and flows into the processing chamber (2), and the processing chamber (2) is targeted. Adjusted to humidity.

<< Other Embodiments >>
About the said embodiment, it is good also as the following structures.

  For example, in the above embodiment, the sterilization operation is a high concentration operation in which the concentration of hydrogen peroxide in the sterilization gas is about 500 ppm, but it is not always necessary to perform the high concentration sterilization operation every time sterilization is performed. When processing in a short time, such as at night, when the manufacturing room is not used, a preparatory operation, a sterilization operation with a low concentration of about 5 to 10 ppm, and a second dilution operation that ventilates the processing chamber (2) are performed. One dilution operation may be omitted.

  In the above embodiment, the operation for sterilizing all the pharmaceutical manufacturing rooms (2a, 2b, 2c) at the same time has been described. However, the operation for individually sterilizing each manufacturing room (2a, 2b, 2c) may be performed. In that case, the valve should be opened and closed according to the sterilization room (2a, 2b, 2c). In addition, the pharmaceutical manufacturing rooms (2a, 2b, 2c) are not limited to three rooms, and may be a plurality of rooms other than the three rooms or a single room.

  In addition, the above embodiment is an essentially preferable illustration, Comprising: It does not intend restrict | limiting the range of this invention, its application thing, or its use.

  As described above, the present invention is useful for a sterilization system that sterilizes a processing chamber with hydrogen peroxide.

A piping diagram of a sterilization system according to exemplary form status of the present invention. It is a figure which shows the operation | movement of a preparatory operation in the sterilization system of FIG. It is a figure which shows operation | movement of the sterilization driving | operation in the sterilization system of FIG. It is a figure which shows operation | movement of the 1st dilution driving | operation in the sterilization system of FIG. It is a figure which shows operation | movement of the 2nd dilution driving | operation in the sterilization system of FIG. It is a figure which shows operation | movement of steady operation in the sterilization system of FIG. It is a piping system diagram of the sterilization system concerning a reference technology . It is a figure which shows the operation | movement of a preparatory operation in the sterilization system of FIG. It is a figure which shows operation | movement of the sterilization driving | operation in the sterilization system of FIG. It is a figure which shows operation | movement of a 1st dilution driving | operation in the sterilization system of FIG. It is a figure which shows operation | movement of the 2nd dilution driving | operation in the sterilization system of FIG. It is a figure which shows operation | movement of steady operation in the sterilization system of FIG. It is a piping system diagram of the sterilization system concerning modification 1 of a reference technique . It is a piping system diagram of the sterilization system concerning modification 2 of a reference technique . It is a piping system diagram of the sterilization system concerning modification 4 of a reference technique .

1 Sterilization system
2 Processing chamber
10 Air conditioning system side circuit
11 Air supply passage
12 Return passage
13 Outside air treatment air conditioner (air conditioner)
14 HEPA filter (filter mechanism)
15 Return passage
16 Air conditioning side circulation passage
17 Sensible heat air conditioner (air conditioner)
25 Pressure adjustment mechanism
30 Sterilization system side circuit
31 Hydrogen peroxide generator
32 Sterilization side circulation passage
36 Hydrogen peroxide decomposer
38 Return air side passage
39 Supply side communication passage
50 controller (control means)
53 Sterilization side air conditioner
57 Dehumidifier

Claims (7)

A sterilization system that performs air conditioning and sterilization in the processing chamber (2),
An outside air processing air conditioner (13) connected to the processing chamber (2) via an air supply passage (11) and a return air passage (12), while adjusting the temperature and humidity of the outside air;
A filter mechanism (14) provided at an air inlet from the air supply passage (11) to the processing chamber (2);
An air conditioning side circulation passage (16) configured by connecting the return passage (15) from the return air passage (12) to the air supply passage (11);
A sensible heat air conditioner (17) provided in the air conditioning side circulation passage (16);
A sterilization side circulation passage (32) connected to the treatment chamber (2) and provided with a hydrogen peroxide generator (31);
A supply side communication passage (39) for introducing outside air from the outside air processing air conditioner (13) to the sterilization side circulation passage (32);
A hydrogen peroxide decomposer (36) connected in parallel with the hydrogen peroxide generator (31) in the sterilization side circulation passage (32);
A return side communication passage (38) connecting the hydrogen peroxide decomposer (36) to the return air passage (12) of the outside air treatment air conditioner (13);
A sterilization system comprising: In claim 1,
A sterilization system comprising a pressure adjusting mechanism (25) for adjusting the pressure in the processing chamber (2). In claim 1 or 2,
The sterilization system, wherein an inlet side to the processing chamber (2) in the sterilization side circulation passage (32) is connected to a filter mechanism (14) of the air supply passage (11). In claim 1, 2 or 3,
A control means (50) for performing operation control is provided, and the control means (50)
With the hydrogen peroxide generator (31) stopped, a preparatory operation for reducing the humidity of the processing chamber (2) below a predetermined value by the outside air processing air conditioner (13),
A sterilization operation for supplying hydrogen peroxide to a predetermined concentration to the treatment chamber (2) by circulating the hydrogen peroxide generated by the hydrogen peroxide generator (31) in the sterilization side circulation passage (32);
Stop the hydrogen peroxide generator (31) and circulate the gas in the processing chamber (2) through the sterilization side circulation passage (32) while the hydrogen peroxide concentration in the hydrogen peroxide decomposer (36) is the first set value. A first dilution operation that decomposes until:
While supplying air from the outside air processing air conditioner (13) to the processing chamber (2) through the filter mechanism (14), exhausting until the hydrogen peroxide concentration becomes lower than the second set value lower than the first set value. A second dilution operation for performing
Steady operation of circulating the conditioned air through the sensible heat air conditioner (17) in the air conditioning side circulation passage (16) while taking in the outside air treated by the outside air treatment air conditioner (13);
A sterilization system characterized by being configured to be capable of. In claim 4,
When the indoor humidity of the processing chamber (2) during sterilization operation increases or when the indoor pressure increases, the gas from the processing chamber (2) is discharged from the hydrogen peroxide decomposer (36) through the return air side communication passage (38). A sterilization system configured to return to (13). In claim 4,
A sterilization system configured to supply conditioned air from the outside air processing air conditioner (13) to the sterilization side circulation passage (32) when the pressure in the processing chamber (2) is reduced during the first dilution operation. . In claim 4,
During the second dilution operation, conditioned air is supplied to the processing chamber (2) through the filter mechanism (14) from the outside air processing air conditioner (13) and the sensible heat air conditioner (17) and the gas in the processing chamber (2) is supplied. A sterilization system characterized in that a part of the gas in the processing chamber (2) is circulated in the air conditioning side circulation passage (16) while exhausting.

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