JP2007202677A - Sterilization apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve reliability of a sterilization apparatus (1) which performs a sterilization treatment on a treatment room (2) by using a hydrogen peroxide vapor generator (31) generating hydrogen peroxide vapor. <P>SOLUTION: A sterilization state examining means (46) carries out a sterilization examining operation to examine the sterilization state of the treatment room (2) after hydrogen peroxide vapor is supplied from the generator (31) to the treatment room (2). If the sterilization of the treatment room (2) is verified, the time series variations of the amount of the hydrogen peroxide vapor supplied to the treatment room (2) at the time of the examination are stored in a storage means (50a). During the normal operation after the sterilization examining operation, an adjusting means (50b) adjusts the amount of the hydrogen peroxide vapor supplied to the treatment room (2) from the time series variations of the supplied amount of the hydrogen peroxide vapor stored in the storage means (50a). <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a sterilizer for supplying hydrogen peroxide vapor to a processing chamber to sterilize the processing chamber.

  Conventionally, as this type of sterilization apparatus, a process chamber (for example, a pharmaceutical manufacturing room) that can be sealed is provided with a gas suction passage provided with a vacuum pump for sucking the gas in the process chamber, and hydrogen peroxide vapor is generated. A hydrogen peroxide supply passage provided with a hydrogen peroxide vapor generator, an air supply passage for supplying sterile air into the processing space, and a gas circulation passage for decomposing hydrogen peroxide with a catalyst while circulating the gas in the processing chamber Are connected to each other (see, for example, Patent Document 1).

In the sterilization apparatus of Patent Document 1, first, the vacuum pump is activated to bring the processing chamber into a vacuum state, and then hydrogen peroxide vapor is supplied into the processing chamber to perform sterilization. Next, aseptic air is introduced into the processing chamber from the air supply passage, and hydrogen peroxide is dispersed in the processing chamber. Then, when the sterilization of the processing chamber is completed by repeating the suction step by the vacuum pump, the hydrogen peroxide vapor supply step, and the sterile air introduction step several times, the step of removing hydrogen peroxide from the processing chamber is performed. In this step, the gas in the processing chamber is circulated while decomposing hydrogen peroxide by the catalyst in the gas circulation passage. By doing so, the concentration of hydrogen peroxide vapor in the processing chamber after sterilization is lowered.
JP-A-10-328276

  By the way, in this kind of sterilization apparatus, it is common to adjust the supply amount of hydrogen peroxide vapor to the processing chamber based on the measurement value of the concentration sensor that measures the concentration of hydrogen peroxide vapor in the processing chamber. However, the concentration sensor for hydrogen peroxide vapor may cause an error in the measured value, for example, in some cases it may detect water vapor in addition to hydrogen peroxide vapor.

  In addition, if the concentration of hydrogen peroxide vapor in the processing chamber is increased considering the error of the concentration sensor, the reliability of sterilization is improved, but the actual concentration of hydrogen peroxide vapor in the processing chamber becomes too high. May end up. In this case, there is a problem that the influence of hydrogen peroxide vapor leaking from the processing chamber is increased, and equipment in the processing chamber is easily oxidized.

  For this reason, the set concentration of the hydrogen peroxide vapor in the processing chamber cannot be increased unnecessarily, and the amount of hydrogen peroxide vapor supplied to the processing chamber is adjusted based on the measurement value of the concentration sensor. There was a risk that the fungi could not be killed.

  The present invention has been made in view of such a point, and an object thereof is to improve the reliability of a sterilization apparatus that performs sterilization of a processing chamber using a hydrogen peroxide vapor generator that generates hydrogen peroxide vapor. That is.

  The first invention comprises a hydrogen peroxide vapor generator (31) for supplying hydrogen peroxide vapor to the processing chamber (2), a sterilization state verification means (46) for verifying the sterilization state of the processing chamber (2), The operation of supplying hydrogen peroxide vapor from the hydrogen peroxide vapor generator (31) to the treatment chamber (2) while adjusting the supply amount of hydrogen peroxide vapor is performed, and then the sterilization state verification means (46) is used. Supply amount of hydrogen peroxide vapor to the processing chamber (2) when it is verified that the processing chamber (2) is sterilized in the sterilization verification operation for verifying the sterilization state of the processing chamber (2) In the normal operation after the sterilization verification operation, based on the time series change in the supply amount of hydrogen peroxide vapor stored in the storage means (50a). 2) Sterilization equipment provided with adjusting means (50b) for adjusting the supply amount of hydrogen peroxide vapor to (1).

  In the first aspect of the invention, after the hydrogen peroxide vapor is supplied from the hydrogen peroxide vapor generator (31) to the processing chamber (2), the sterilization state verification means (46) verifies the sterilization state of the processing chamber (2). Sterilization verification operation is performed. If it is verified that the processing chamber (2) is sterilized in the sterilization verification operation, the time-series change in the amount of hydrogen peroxide vapor supplied to the processing chamber (2) at the time of verification is stored. The means (50a) stores it. In the normal operation after the sterilization verification operation, the adjusting means (50b) causes the hydrogen peroxide vapor to enter the processing chamber (2) based on the time-series change in the supply amount of the hydrogen peroxide vapor stored in the storage means (50a). Adjust the supply amount. That is, in the first invention, the adjusting means (50b) is based on the amount of hydrogen peroxide vapor supplied to the processing chamber (2) when it is verified that the processing chamber (2) is sterilized. Adjust the amount of hydrogen peroxide vapor supplied to the treatment chamber (2) during normal operation.

  According to a second invention, in the first invention, the concentration sensor (47) for detecting the concentration of hydrogen peroxide vapor in the processing chamber (2), and the inside of the processing chamber (2) detected by the concentration sensor (47) Feedback adjustment means (48) for adjusting the amount of hydrogen peroxide vapor supplied to the processing chamber (2) during the sterilization verification operation, reflecting the concentration of hydrogen peroxide vapor.

  In the second invention, the concentration of hydrogen peroxide vapor in the processing chamber (2) during the sterilization verification operation is generally grasped by the concentration sensor (47). The detected value of the concentration sensor (47) is fed back to the adjustment of the supply amount of hydrogen peroxide vapor to the processing chamber (2) in the sterilization verification operation.

  According to a third invention, in the first or second invention, the adjusting means (50b) adjusts the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31), while the storage means ( 50a) stores time-series changes in the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31) when it is verified that the processing chamber (2) is sterilized in the sterilization verification operation. To do.

  In the third aspect of the invention, the amount of hydrogen peroxide vapor supplied to the processing chamber (2) is adjusted by adjusting the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31). That is, the adjusting means (50b) generates hydrogen peroxide vapor in the hydrogen peroxide vapor generator (31) when it is verified that the processing chamber (2) stored in the storage means (50a) is sterilized. Based on the amount, the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31) in normal operation is adjusted.

  According to a fourth invention, in any one of the first to third inventions, the sterilization state verification means (46) includes a biological indicator.

  In the fourth aspect of the invention, verification of the sterilization state of the processing chamber (2) during the sterilization verification operation is performed using the biological indicator (46). The biological indicator (46) serves as an index body for determining whether or not sterilization is ensured, and the sterilization state can be easily verified.

  In the present invention, based on the amount of hydrogen peroxide vapor supplied to the processing chamber (2) when it is verified that the processing chamber (2) is sterilized, the processing chamber (2) in normal operation is supplied to the processing chamber (2). The supply amount of hydrogen peroxide vapor is adjusted. That is, in normal operation, an amount of hydrogen peroxide vapor capable of killing fungi is supplied to the processing chamber (2) each time. Therefore, since the sterilization process of the processing chamber (2) can always be performed reliably, the reliability of the sterilization apparatus (1) can be improved.

  In the second invention, the concentration of the hydrogen peroxide vapor in the processing chamber (2) generally grasped by the concentration sensor (47) is the amount of hydrogen peroxide vapor supplied to the processing chamber (2) in the sterilization verification operation. Feedback is provided for adjustment. That is, the supply amount of hydrogen peroxide vapor to the processing chamber (2) in the sterilization verification operation is adjusted using the detection value of the concentration sensor (47) as a guide and further reflecting the detection value. Therefore, since it becomes easy to adjust the processing chamber (2) to the target concentration, the sterilization verification operation can be performed efficiently.

  In the fourth invention, the sterilization state of the processing chamber (2) at the time of the sterilization verification operation is verified using the biological indicator (46) that can easily verify the sterilization state. . Therefore, the sterilization apparatus (1) that performs the sterilization verification operation with a simple configuration can be configured.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<< Embodiment of the Invention >>
An embodiment of the present invention will be described.

-Overall configuration-
This embodiment relates to a sterilization apparatus that performs sterilization processing in a processing chamber (2) serving as a pharmaceutical manufacturing chamber or the like with hydrogen peroxide vapor. This sterilizer (1) is configured to be able to execute sterilization in the processing chamber (2) and air conditioning of the processing chamber (2). FIG. 1 shows a schematic configuration diagram of a sterilization apparatus (1) of the present embodiment. This sterilizer (1) is provided for one processing chamber (2).

  The sterilizer (1) includes a sterilization system side circuit (30), an air conditioning system side circuit (10), a controller (50), a biological indicator (46), a concentration sensor (47), and an adjustment device (48). ing. In this sterilizer (1), for example, when the sterilizer (1) is installed with respect to the processing chamber (2), the sterilizer (1) for actually using the processing chamber (2) as a pharmaceutical manufacturing room, etc. The sterilization verification operation in which the controller (50) stores the time-series change in the amount of generated hydrogen peroxide vapor in the hydrogen peroxide vapor generator (31) during the normal operation before the normal operation is started. The biological indicator (46) and the adjusting device (48) are provided only during the sterilization verification operation. Details of the sterilization verification operation will be described later.

  The sterilization system side circuit (30) includes a main flow path (34), a hydrogen peroxide generation flow path (33), a hydrogen peroxide decomposition flow path (35), a return flow path (37), and an exhaust flow path (54). And. The main flow path (34) has one end connected to the inlet of the processing chamber (2) and the other end connected to the outlet of the processing chamber (2). That is, the main channel (34) constitutes a sterilization side circulation channel through which the gas in the processing chamber (2) circulates. An HEPA filter (high efficiency particulate air filter) (14) is provided as a filter mechanism between the inlet of the processing chamber (2) to which one end of the main channel (34) is connected and the outlet of the processing chamber (2) to which the other end is connected. ) Is provided.

  A sterilization side air conditioner (53) is provided in the main channel (34). The sterilization side air conditioner (53) has an air inlet (53a), a cooling coil (53b), an electric heater (53e), a fan (53c), and an air outlet (53d) in order from the upstream side. .

  In the upstream part of the sterilization side air conditioner (53) of the main flow path (34), the hydrogen peroxide decomposition flow path (35), the return flow path (37), and the hydrogen peroxide generation flow path (33) are arranged in order from the upstream side. And are connected. The return channel (37) branches off from the hydrogen peroxide decomposition channel (35). That is, the gas flowing from the main channel (34) into the hydrogen peroxide decomposition channel (35) returns to the main channel (34) through the return channel (37).

  The hydrogen peroxide generation channel (33) is open to the atmosphere at the end opposite to the main channel (34) side. The pipe diameter of the hydrogen peroxide generation channel (33) is set so that the air volume is about 1/10 of the air volume of the main channel (34). The hydrogen peroxide generation flow path (33) is provided with a sterilization gas generator (58) for supplying hydrogen peroxide vapor to the processing chamber (2).

  The sterilization gas generator (58) includes a dehumidifier (57) and a hydrogen peroxide vapor generator (31). The dehumidifier (57) dehumidifies the air taken from outside. The hydrogen peroxide vapor generator (31) applies hydrogen peroxide vapor generated by atomizing an aqueous solution of hydrogen peroxide to the air dehumidified by the dehumidifier (57). The reason why the outdoor air is dehumidified by the dehumidifier (57) is that hydrogen peroxide is more likely to evaporate in low humidity air.

  The hydrogen peroxide decomposition channel (35) has an end opposite to the main channel (34) branching into a return channel (37) and an exhaust channel (54). The exhaust channel (54) is open to the atmosphere at the end opposite to the hydrogen peroxide decomposition channel (35) side. The hydrogen peroxide decomposition channel (35) is provided with a hydrogen peroxide decomposer (36) and an exhaust fan (55) composed of a Pt catalyst in this order from the main channel (34) side.

  The sterilization system side circuit (30) is provided with seven sterilization gas switching valves (45). Specifically, a first sterilization gas switching valve (45a) is provided on the upstream side of the connection portion of the hydrogen peroxide decomposition channel (35) in the main channel (34). A second sterilization gas switching valve (45b) is provided upstream of the hydrogen peroxide decomposer (36) in the hydrogen peroxide decomposition channel (35). A third sterilization gas switching valve (45c) is provided between the connection part of the hydrogen peroxide decomposition flow path (35) and the connection part of the return flow path (37) in the main flow path (34). The return flow path (37) is provided with a fourth sterilization gas switching valve (45d). A fifth sterilization gas switching valve (45e) is provided on the downstream side of the sterilization gas generator (58) in the hydrogen peroxide generation flow path (33). A sixth sterilization gas switching valve (45f) is provided downstream of the sterilization side air conditioner (53) in the main channel (34). The exhaust passage (54) is provided with a seventh sterilization gas switching valve (45g).

  The air conditioning system side circuit (10) includes an air supply passage (11), an exhaust passage (28), and a circulation passage (15). The air supply channel (11) is connected to the downstream side of the sixth sterilization gas switching valve (45f) in the main channel (34). The exhaust passage (28) is connected to the upstream side of the first sterilization gas switching valve (45a) in the main passage (34). A circulation channel (15) is connected between the air supply channel (11) and the exhaust channel (28). That is, a part of the supply flow path (11), a part of the exhaust flow path (28), and a circulation flow path (15) are formed by using a part of the main flow path (34), so that the processing chamber (2) It constitutes a circulation channel on the air conditioning side through which the gas inside circulates.

  The supply air flow path (11) is provided with an outside air processing air conditioner (13) configured as a dehumidifier and a sensible heat air conditioner (17) that only adjusts the temperature of air. The exhaust passage (28) is provided with a circulation fan (18) on the upstream side of the connection portion with the circulation passage (15).

  The outside air processing air conditioner (13) dehumidifies air using a rotating adsorption rotor (13d). The outside air processing air conditioner (13) is separated into a first passage (13b) and a second passage (13c) by a partition wall (13a), and carries an adsorbent capable of adsorbing and desorbing moisture in the air. A honeycomb-like adsorption rotor (13d) is provided so as to be rotatable about a rotation shaft (not shown) provided along the partition wall (13a).

  The first passage (13b) is provided with an outside air intake port (13e), a cooling coil (13f), an adsorption rotor (13d), a fan (13j), and an air supply port (13k) in order from the upstream side. . In the second passage (13c), an outside air intake (13e), a heating coil (13m), an adsorption rotor (13d), and an exhaust port (13n) are provided in this order from the upstream side. Although not shown, an exhaust fan is provided in the second passage (13c). Also, ducts are connected to the outside air intake port (13e) and the exhaust port (13n), respectively. A medium performance filter (20) is provided in the duct on the outside air intake (13e) side.

  In the first passage (13b), moisture in the outside air (first air) cooled by the cooling coil (13f) is adsorbed by the adsorption rotor (13d), and the first air is dehumidified. The dehumidified first air is blown out from the air supply port (13k). The adsorption rotor (13d) rotates continuously or intermittently, and the portion that has adsorbed moisture eventually moves into the second passage (13c). In the second passage (13c), outside air (second air) is heated by the heating coil (13m) and then passes through the adsorption rotor (13d), whereby the adsorption rotor (13d) is regenerated. The regenerated portion of the adsorption rotor (13d) further rotates and moves toward the first passage (13b), so that the first air can be dehumidified again.

  The sensible heat air conditioner (17) has an air inlet (17a), a cooling coil (17b), an electric heater (17e), a fan (17c), and an air outlet (17d) in order from the upstream side. Yes. A medium performance filter (20) is provided between the sensible heat air conditioner (17) and the outside air processing air conditioner (13). The circulation channel (15) is connected between the outside air processing air conditioner (13) and the medium performance filter (20) in the air supply channel (11).

  The air conditioning system side circuit (10) is provided with three air conditioning gas switching valves (56). Specifically, a first air-conditioning gas switching valve (56a) is provided on the downstream side of the sensible heat air conditioner (17) in the air supply channel (11). A second air-conditioning gas switching valve (56b) is provided between the connection portion of the exhaust passage (28) with the main passage (34) and the circulation fan (18). A third air-conditioning gas switching valve (56c) is provided on the downstream side of the connection portion between the exhaust passage (28) and the circulation passage (15).

  The biological indicator (46) serves as an index body for determining whether or not sterilization is ensured, and constitutes a sterilization state verification means. As the biological indicator (46), a test paper type is used. This test strip type biological indicator (46) is provided with a carrier to which a predetermined spore is attached, and the sterilization state of the treatment chamber (2) is obtained by culturing the carrier after the sterilization treatment of the treatment chamber (2). It is possible to verify. The biological indicator (46) is attached to the wall of the processing chamber (2) before performing the sterilization verification operation, and is peeled off after the sterilization verification operation.

  The controller (50) includes a storage unit (50a) that is a storage unit and an adjustment unit (50b) that is an adjustment unit. The storage unit (50a) is configured to be capable of storing a time-series change in the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31), that is, an output pattern of the hydrogen peroxide vapor generator (31). . The adjustment unit (50b) is configured to be able to adjust the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31). In this embodiment, the amount of generated hydrogen peroxide vapor in the hydrogen peroxide vapor generator (31) when the storage unit (50a) is verified that the processing chamber (2) is sterilized in the sterilization verification operation. The time series change of is memorized. In addition, the adjustment unit (50b) performs hydrogen peroxide vapor generation during normal operation so that the amount of hydrogen peroxide vapor generation in the hydrogen peroxide vapor generator (31) stored in the storage unit (50a) changes over time. Adjust the amount of hydrogen peroxide vapor generated in the steam generator (31).

  The concentration sensor (47) is for detecting the concentration of hydrogen peroxide vapor. The adjusting device (48) performs PID control based on the detection value of the concentration sensor (47), so that the concentration of hydrogen peroxide vapor in the processing chamber (2) becomes a target concentration described later. The amount of hydrogen peroxide vapor generated in the steam generator (31) is adjusted. In other words, the adjusting device (48) is a device that feeds back the detection value of the concentration sensor (47) to adjust the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31), and constitutes a feedback adjusting means. is doing. The adjusting device (48) is connected to the concentration sensor (47) and the controller (50) during the sterilization verification operation. The adjusting device (48) is also connected to the hydrogen peroxide vapor generator (31) (not shown).

-Operation control of sterilization verification operation-
Operation control and specific operation in the sterilization verification operation will be described. FIG. 2 is a flowchart showing the flow of the sterilization verification operation. In the sterilization verification operation, each operation is executed in the order of preparation operation (ST1), sterilization operation (ST2), dilution operation (ST3), and “verification of sterilization” (ST4). If it is determined that the treatment chamber (2) has been sterilized, the process proceeds from "Verification of sterilization status" (ST4) to "Determination of output pattern" (ST5), and "Verification of sterilization status" (ST4) If it is determined that the sterilization of the processing chamber (2) is not completed, the process returns to the preparation operation (ST1). Further, as described above, the biological indicator (46) and the adjusting device (48) are provided during the sterilization verification operation.

<Preparation operation>
In the sterilization verification operation, a preparation operation (ST1) is first performed. The preparatory operation (ST1) is an operation in which the humidity of the processing chamber (2) is reduced to the target humidity by reducing the humidity of the processing chamber (2) by the outside air processing air conditioner (13). In the preparatory operation (ST1), the target humidity of the processing chamber (2) is set to a predetermined value of 20% to 30% relative humidity. The air flow in this preparation operation (ST1) is shown in FIG.

  In the preparatory operation (ST1), each valve (56a, 56b, 56c) of the air conditioning system side circuit (10) is set to an open state, and each valve (45a, 45b, 45c, 45d) of the sterilization system side circuit (30) is set. , 45e, 45f, 45g) are closed.

  In this state, when the outside air processing air conditioner (13), the sensible heat air conditioner (17), and the circulation fan (18) are operated, the air dehumidified by the outside air processing air conditioner (13) is sensible heat air conditioner (17 ), And the low-humidity air whose temperature is adjusted is supplied to the processing chamber (2) through the HEPA filter (14) on the inlet side.

  The air in the processing chamber (2) flows out through the HEPA filter (14) on the outlet side, and circulates through the exhaust passage (28) by the circulation fan (18). ) Is returned to the air supply passage (11) and sent to the sensible heat air conditioner (17), and the remainder is exhausted from the outlet of the exhaust passage (28). The preparation operation (ST1) is performed until the room temperature in the processing chamber (2) reaches 25 ° C. and the relative humidity reaches a predetermined value (for example, 30%). In the processing chamber (2), a temperature sensor and a humidity sensor are provided to detect temperature and humidity (not shown).

<Sterilization operation>
When the preparatory operation (ST1) is completed, the outside air processing air conditioner (13), the sensible heat air conditioner (17), and the circulation fan (18) are stopped and the process proceeds to the sterilization operation (ST2). The sterilization operation (ST2) is an operation in which hydrogen peroxide vapor is supplied from the hydrogen peroxide vapor generator (31) to the treatment chamber (2) to sterilize the treatment chamber (2). The sterilization operation (ST2) is performed in the order of “target concentration setting” (ST2-1), adjustment mode (ST2-2), and sterilization mode (ST2-3).

  In “Target concentration setting” (ST2-1), the target concentration of hydrogen peroxide vapor in the processing chamber (2) is set. The target concentration is set to, for example, 500 ppm in the initial sterilization operation (ST2). In the sterilization operation (ST2) after shifting from the “verification of sterilization state” (ST4) to the preparation operation (ST1), the target concentration is set to a value larger than the previous sterilization operation (ST2).

  The adjustment mode (ST2-2) is an operation for causing the concentration of the hydrogen peroxide vapor in the processing chamber (2) to reach the target concentration. The sterilization mode (ST2-2) is an operation for maintaining the concentration of hydrogen peroxide vapor in the processing chamber (2) within a predetermined concentration range (for example, target concentration −10% to target concentration + 10%). It is.

  In the adjustment mode (ST2-2) and the sterilization mode (ST2-3), the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31) is adjusted by the adjustment device (48). This amount of generation is adjusted, for example, at regular time intervals. The adjusting device (48) performs PID control based on the detection value of the concentration sensor (47), and determines the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31). The adjusting device (48) inputs the determined generation amount as a PID control output signal to the hydrogen peroxide vapor generator (31).

  In the sterilization operation (ST2), the PID control output signal is also input to the storage unit (50a) of the controller (50). The storage unit (50a) stores the input PID control output signal. Thereby, the time series change of the generation amount of hydrogen peroxide vapor in the hydrogen peroxide vapor generator (31) during the sterilization operation (ST2) is stored in the storage unit (50a).

  Note that in the sterilization operation (ST2) after the preparatory operation (ST1) transferred from "Verification of sterilization state" (ST4), the storage unit (50a) stores the peroxidation stored in the previous sterilization operation (ST2). The time-series change in the amount of hydrogen peroxide vapor generated in the hydrogen vapor generator (31) is updated to new data.

  When the concentration of hydrogen peroxide vapor in the processing chamber (2) reaches the target concentration in the adjustment mode (ST2-2), the mode shifts to the sterilization mode (ST2-3). When a certain time (for example, 10 minutes) elapses in the sterilization mode (ST2-3), the process proceeds to the dilution operation (ST4).

  The air flow during this sterilization operation (ST2) is shown in FIG. In the sterilization operation (ST2), each valve (56a, 56b, 56c) of the air conditioning system side circuit (10) is set to a closed state, and each valve of the sterilization system side circuit (30) is set to the fourth sterilization gas switching valve ( Set to open except for 45d).

  In this state, when the sterilization gas generator (58), the sterilization side air conditioner (53), and the exhaust fan (55) are operated, the air taken from the outside is sent to the sterilization gas generator (58). The air that has flowed into the sterilization gas generator (58) is dehumidified by the dehumidifier (57), and then oxygen peroxide vapor is applied from the hydrogen peroxide vapor generator (31). The air containing hydrogen peroxide vapor (sterilization gas) merges with the air in the main flow path (34), and after the temperature is adjusted by the sterilization side air conditioner (53), passes through the HEPA filter (14) on the inlet side. Supplied to the processing chamber (2).

  The sterilization gas in the processing chamber (2) flows into the main channel (34) through the HEPA filter (14) on the outlet side. Part of the sterilized gas that has flowed into the main flow path (34) flows directly through the main flow path (34), passes through the sterilization side air conditioner (53), and is then supplied to the treatment chamber (2), with the remainder being decomposed by hydrogen peroxide. It flows into the channel (35). The sterilization gas that has flowed into the hydrogen peroxide decomposition channel (35) is exhausted by the exhaust fan (55) after the hydrogen peroxide in the sterilization gas is decomposed by the hydrogen peroxide decomposer (36). It is discharged from the exit of the room.

  Note that exhausting the sterilization gas in the processing chamber (2) from the exhaust flow path (54) controls the increase in the chamber pressure in the processing chamber (2) due to the inflow of sterilization gas from the main flow path (34). It is to do. The amount of sterilization gas discharged from the exhaust passage (54) to the outside of the room, that is, the flow rate of the sterilization gas in the hydrogen peroxide decomposition passage (35) is a pressure sensor (not shown) provided in the processing chamber (2). Although it is adjusted based on the measured value of (1), the value is substantially close to the flow rate of the hydrogen peroxide generation flow path (33). That is, the flow rate of the sterilizing gas flowing into the hydrogen peroxide decomposer (36) is considerably smaller than that of the main flow path (34). Here, in this sterilizer (1), a hydrogen peroxide decomposer (36) having a decomposition capability corresponding to the flow rate of the main flow path (34) is used. For this reason, the sterilization gas flowing into the hydrogen peroxide decomposer (36) in the sterilization operation (ST2) is high in concentration but the amount of hydrogen peroxide is small. The concentration of hydrogen peroxide vapor can be reduced to a level at which it can be discharged to the outside.

<Dilution operation>
After completion of the sterilization operation (ST2), the concentration of hydrogen peroxide vapor in the processing chamber (2) is high. In this high concentration state, even if the sterilization gas in the treatment chamber (2) is passed through the hydrogen peroxide decomposer (36) to decompose the hydrogen peroxide, the hydrogen peroxide vapor can be discharged to the outside. The concentration of can not be reduced. Therefore, the first hydrogen peroxide vapor concentration in the processing chamber (2) is reduced without exhausting until the concentration of the hydrogen peroxide vapor in the processing chamber (2) becomes a predetermined value (for example, 10 ppm) or less. Dilution operation is performed (FIG. 5).

(First dilution operation)
In the first dilution operation, the sterilization gas generator (58) is stopped and the sterilization side air conditioner (53) is operated. At this time, the setting of the air conditioning system side circuit (10) is basically the same as that during sterilization operation, and the outside air processing air conditioner (13), sensible heat air conditioner (17), and circulation fan (18) are stopped. Each valve (56a, 56b, 56c) is set in a closed state. On the other hand, the valves of the sterilization system side circuit (30) are opened except for the third sterilization gas switching valve (45c), the fifth sterilization gas switching valve (45e), and the seventh sterilization gas switching valve (45g). Set.

  In this state, when the sterilization side air conditioner (53) and the exhaust fan (55) are operated, the sterilization gas is circulated between the treatment chamber (2) and the hydrogen peroxide decomposer (36). The hydrogen peroxide inside is decomposed by the hydrogen peroxide decomposer (36). The first dilution operation is performed until the detection value of the concentration sensor (47) becomes a predetermined value (for example, 10 ppm) or less.

  If the pressure in the processing chamber (2) decreases during the first dilution operation, the hydrogen peroxide vapor generator (31) is stopped and the fifth sterilization gas switching valve (45e) is opened to remove hydrogen peroxide. Outside air is introduced from the generation flow path (33), and an operation of maintaining the inside of the processing chamber (2) at a predetermined pressure (for example, several tens Pa) is performed.

(Second dilution operation)
The second dilution operation is performed by operating the outside air processing air conditioner (13) and the sensible heat air conditioner (17) and supplying aseptic air treated with the HEPA filter (14) to the processing chamber (2). (2) The operation is to discharge the air inside the room through the hydrogen peroxide decomposer (36) (Fig. 6). If the concentration of hydrogen peroxide vapor in the sterilization gas is 10 ppm or less, the hydrogen peroxide in the sterilization gas is decomposed by the hydrogen peroxide decomposer (36) to a level at which it can be discharged outside the room. The vapor concentration can be reduced.

  At this time, the sterilization gas generator (58) and the circulation fan (18) are stopped. Each valve of the air conditioning system side circuit (10) is set so that only the first air conditioning gas switching valve (56a) is open. On the other hand, each valve of the sterilization system side circuit (30) is set to open the first sterilization gas switching valve (45a), the second sterilization gas switching valve (45b), and the seventh sterilization gas switching valve (45f). To do.

  In this state, when the outside air treatment air conditioner (13), the sensible heat air conditioner (17), and the exhaust fan (55) are operated, the outside air treatment air conditioner (13) and the sensible heat air conditioner (17) Aseptic air whose humidity is adjusted and purified by the HEPA filter (14) on the inlet side is supplied to the processing chamber (2) and mixed with sterilized gas in the processing chamber (2). The diluted sterilization gas flows out of the processing chamber (2) through the HEPA filter (14) on the outlet side. This sterilizing gas flows into the hydrogen peroxide decomposition channel (35) through the main channel (34). The sterilization gas that has flowed into the hydrogen peroxide decomposition channel (35) is decomposed by the hydrogen peroxide decomposer (36) and discharged from the outlet of the exhaust channel (54) to the outside. Is done. The second dilution operation is performed until the detection value of the concentration sensor (47) becomes a predetermined value (1 ppm) or less.

  In the second dilution operation, unlike the first dilution operation, the air that has passed through the hydrogen peroxide decomposer (36) is not returned to the processing chamber (2), so that the processing chamber is shorter in time than the first dilution operation. It is possible to reduce the concentration of hydrogen peroxide in (2).

<Verification of sterilization condition>
In “Verification of Sterilization Status” (ST4), the sterilization status of the processing chamber (2) is verified. In "Verification of sterilization state" (ST4), the sterilizer (1) is stopped.

  In "Verification of sterilization state" (ST4), the biological indicator (46) as the sterilization state verification means is taken out from the processing chamber (2). And then. The removed biological indicator (46) is cultured, and the sterilization state of the processing chamber (2) is verified.

  If it is determined in the “Verification of Sterilization Status” (ST4) that the treatment chamber (2) has been sterilized, the process proceeds to “Determination of Output Pattern” (ST5), and it has been determined that sterilization has not been completed In this case, the process moves to the preparatory operation (ST1) again, and the sterilization process of the processing chamber (2) is performed again. In addition, which one is transferred is input to the sterilizer (1) by, for example, a person who has verified the sterilization state of the processing chamber (2).

<Determination of output pattern>
“Determination of output pattern” (ST5) is an operation for determining the output pattern of the hydrogen peroxide vapor generator (31) during normal operation. In “Determination of output pattern” (ST5), the storage unit (50a) displays the time-series change in the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31) stored during the sterilization operation (ST2). This is stored as an output pattern of the hydrogen peroxide vapor generator (31) during normal operation. The storage unit (50a) stores time-series changes in the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31) when it is verified that the processing chamber (2) is sterilized. Become.

  The output pattern obtained by this sterilization verification operation can also be used for the sterilization verification operation in the case where sterilization state verification is required again due to changes in the conditions of the processing chamber (2). That is, in the sterilization verification operation again, the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31) is not adjusted by PID control based on the detection value of the concentration sensor (47), but before that. The adjustment is made based on the output pattern of the sterilization verification operation stored in the storage unit (50a).

-Operation control for normal operation-
The operation control and the specific operation in normal operation will be described. In normal operation, each operation is performed in the order of preparation operation, sterilization operation, dilution operation, and steady operation. Since the preparation operation and the dilution operation are the same as in the sterilization verification operation, they are omitted.

<Sterilization operation>
In a normal operation sterilization operation, the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31) is adjusted by the adjusting unit (50b) of the controller (50). Note that the air flow, the operation of the air conditioner and the like, and the setting of the valves and the like during this sterilization operation are the same as the sterilization operation (ST2) in the sterilization verification operation, and are therefore omitted.

  Specifically, when the sterilization operation is started, the storage unit (50a) inputs the stored output pattern to the adjustment unit (50b). The adjusting unit (50b) adjusts the output of the hydrogen peroxide vapor generator (31), that is, the amount of generated hydrogen peroxide vapor, so that the input output pattern is obtained.

  As a result, in the normal operation sterilization operation, the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31) when it is verified that the treatment chamber (2) is sterilized in the sterilization verification operation. Series changes are reproduced. In order to sterilize the inside of the processing chamber (2) more reliably, the generated amount of hydrogen peroxide vapor in normal operation is not the same as the generated amount stored in the storage unit (50a). The data may be processed by multiplying a predetermined magnification.

<Normal operation>
In normal operation, when the dilution operation ends, the operation moves to a steady operation. Steady operation is the air in the processing chamber (2) for ventilation and maintenance of the chamber pressure while taking in the outside air treated by the outside air processing air conditioner (13) and sensible heat air conditioner (17). It is the operation | movement which discharges to the outdoors. In steady operation, control of the outside air processing air conditioner (13) and the sensible heat air conditioner (17) is performed to maintain the temperature and humidity of the processing chamber (2) at set values. Other than that, the operation is the same as the preparatory operation, and the description is omitted. By performing the steady operation, the temperature and humidity of the processing chamber (2) are maintained at the set values, and the aseptic state is maintained.

-Effect of the embodiment-
In the present embodiment, based on the amount of hydrogen peroxide vapor supplied to the processing chamber (2) when it is verified that the processing chamber (2) is sterilized, the processing chamber (2) in normal operation is supplied to the processing chamber (2). The supply amount of hydrogen peroxide vapor is adjusted. That is, in normal operation, an amount of hydrogen peroxide vapor capable of killing fungi is reliably supplied to the processing chamber (2) each time. Therefore, since the sterilization process of the processing chamber (2) can always be performed reliably, the reliability of the sterilization apparatus (1) can be improved.

  Moreover, according to this embodiment, it is not necessary to use the biological indicator (46) in order to confirm whether the processing chamber (2) is sterilized in normal operation.

  In this embodiment, the concentration of the hydrogen peroxide vapor in the processing chamber (2), which is roughly grasped by the concentration sensor (47), adjusts the supply amount of the hydrogen peroxide vapor to the processing chamber (2) in the sterilization verification operation. To be fed back. That is, the supply amount of hydrogen peroxide vapor to the processing chamber (2) in the sterilization verification operation is adjusted using the detection value of the concentration sensor (47) as a guide and further reflecting the detection value. Therefore, since it becomes easy to adjust the processing chamber (2) to the target concentration, the sterilization verification operation can be performed efficiently.

  In the present embodiment, the sterilization state of the processing chamber (2) during the sterilization verification operation is verified using the biological indicator (46) that can easily verify the sterilization state. Therefore, the sterilization apparatus (1) that performs the sterilization verification operation with a simple configuration can be configured.

-Modification of the embodiment-
A modification of the embodiment shown in FIG. 7 will be described. In this modification, the amount of hydrogen peroxide vapor supplied to the processing chamber (2) is not adjusted by adjusting the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31), The amount of hydrogen peroxide vapor supplied to the treatment chamber (2) is adjusted by adjusting the opening. In FIG. 7, the controller (50), biological indicator (46), concentration sensor (47), and adjustment device (48) are not shown.

  Specifically, the sterilization system side circuit (30) includes a communication channel (51) that connects the hydrogen peroxide generation channel (33) and the hydrogen peroxide decomposition channel (35). One end of the communication channel (51) is connected between the fifth sterilization gas switching valve (45e) and the sterilization gas generator (58) in the hydrogen peroxide generation channel (33), and the other end is hydrogen peroxide. Connected upstream of the second sterilization gas switching valve (45b) in the decomposition channel (35).

  In this sterilization apparatus (1), when supplying hydrogen peroxide vapor from the sterilization gas generator (58) to the processing chamber (2), the second sterilization gas switching valve (45b) and the fifth sterilization gas switching valve (45e) ) To adjust the amount of hydrogen peroxide vapor supplied to the treatment chamber (2).

<< Other Embodiments >>
About the said embodiment, it is good also as the following structures.

  In the above embodiment, the sterilization verification operation is performed for each condition by changing the conditions of the processing chamber (2), and the amount of hydrogen peroxide vapor supplied to the processing chamber (2) corresponding to each condition is stored in the storage unit (50a ) May be stored. That is, the storage unit (50a) may store a plurality of output patterns.

  Moreover, about the said embodiment, as shown in FIG. 8, you may provide the sterilizer (1) with respect to several process chambers (2, 2, ...). The sterilization apparatus (1) is configured so that air conditioning of a processing chamber (2) that is not sterilized can be performed even in a state where sterilization is performed in another processing chamber (2). An eighth sterilization gas switching valve (45h) is provided downstream of each processing chamber (2). In FIG. 8, the controller (50), biological indicator (46), concentration sensor (47), and adjusting device (48) are not shown.

  Moreover, you may use a chemical indicator as a sterilization state verification means (46) about the said embodiment.

  In the above embodiment, in the sterilization verification operation without providing the adjustment device (48), the concentration sensor (47) is connected to the adjustment unit (50b) of the controller (50), and the process chamber (2) is overoxidized. The adjustment unit (50b) may adjust the supply amount of the hydrogen vapor. In this case, the adjustment unit (50b) is configured to adjust the supply amount of hydrogen peroxide vapor to the processing chamber (2) by PID control based on the detection value of the concentration sensor (47).

  In addition, the above embodiment is an essentially preferable illustration, Comprising: It does not intend restrict | limiting the range of this invention, its application thing, or its use.

  As described above, the present invention is useful for a sterilization apparatus that supplies hydrogen peroxide vapor to a processing chamber to sterilize the processing chamber.

It is a schematic structure figure of a sterilizer concerning an embodiment of the present invention. It is a flowchart which shows the flow of the sterilization verification driving | operation which concerns on embodiment of this invention. It is a figure which shows the flow of the air of preparation operation | movement in the sterilizer of FIG. It is a figure which shows the flow of the air of the sterilization operation | movement in the sterilizer of FIG. It is a figure which shows the flow of the air of the 1st dilution operation | movement in the sterilizer of FIG. It is a figure which shows the flow of the air of the 2nd dilution operation | movement in the sterilizer of FIG. It is a schematic block diagram of the sterilizer which concerns on the modification of embodiment of this invention. It is a schematic block diagram of the sterilizer which concerns on other embodiment.

Explanation of symbols

1 Sterilizer
2 Processing chamber
31 Hydrogen peroxide vapor generator
46 Biological indicators (sterilization verification means)
47 Concentration sensor
48 Adjustment device (feedback adjustment means)
50a Storage unit (storage means)
50b Adjustment part (Adjustment means)

Claims (4)

A hydrogen peroxide vapor generator (58) for supplying hydrogen peroxide vapor to the processing chamber (2);
Sterilization state verification means (46) for verifying the sterilization state of the processing chamber (2);
The operation of supplying hydrogen peroxide vapor from the hydrogen peroxide vapor generator (31) to the treatment chamber (2) while adjusting the supply amount of hydrogen peroxide vapor is performed, and then the sterilization state verification means (46) is used. Supply amount of hydrogen peroxide vapor to the processing chamber (2) when it is verified that the processing chamber (2) is sterilized in the sterilization verification operation for verifying the sterilization state of the processing chamber (2) Storage means (50a) for storing the time series change of
In the normal operation after the sterilization verification operation, the supply amount of the hydrogen peroxide vapor to the processing chamber (2) is adjusted based on the time series change of the supply amount of the hydrogen peroxide vapor stored in the storage means (50a). A sterilizing apparatus comprising an adjusting means (50b). In claim 1,
A concentration sensor (47) for detecting the concentration of hydrogen peroxide vapor in the processing chamber (2);
Reflecting the concentration of hydrogen peroxide vapor in the processing chamber (2) detected by the concentration sensor (47), the amount of hydrogen peroxide vapor supplied to the processing chamber (2) during the sterilization verification operation is adjusted. A sterilizing apparatus comprising a feedback adjusting means (48) for performing the above-described operation. In claim 1 or 2,
While the adjusting means (50b) adjusts the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31),
The storage means (50a) is the amount of hydrogen peroxide vapor generated in the hydrogen peroxide vapor generator (31) when it is verified that the processing chamber (2) is sterilized in the sterilization verification operation. A sterilizer characterized by storing series changes. In any one of Claims 1 thru | or 3,
The sterilization apparatus is characterized in that the sterilization state verification means (46) comprises a biological indicator.

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