JP2008011928A - Sterilization system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To increase sterilizing effects in a treatment chamber for carrying in and out equipment. <P>SOLUTION: A sterilization system circuit (50) is equipped with a sterilizing gas supply main flow passage (52) for distributing a sterilizing gas and for supplying to each treatment chamber (2a, 2b, 2c). Furthermore, the sterilization system circuit (50) is equipped with a fourth sterilizing gas supply passage (68) for supplying the sterilizing gas only to the first treatment chamber (2a) at a large flow volume and a circulating flow passage (95) for a pass box (PB) for returning a part of the sterilizing gas supplied to the first treatment chamber (2a) to the fourth sterilizing gas supply passage (68). Since the sterilizing gas is supplied to and discharged from the first treatment chamber (2a) at a large flow volume, the sterilizing gas spreads over the details of the equipment. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

    The present invention relates to a sterilization system that sterilizes a plurality of processing chambers including processing chambers for loading and unloading equipment.

2. Description of the Related Art Conventionally, a sterilization system (sterilization apparatus) is known that supplies hydrogen peroxide vapor to a sealable processing chamber (for example, a pharmaceutical manufacturing chamber) to sterilize the processing chamber. For example, the sterilization apparatus of Patent Document 1 includes a hydrogen peroxide supply passage provided with a hydrogen peroxide vapor generator that generates hydrogen peroxide vapor, and an air supply passage that supplies aseptic air to the processing chamber. . In this sterilizer, hydrogen peroxide vapor is supplied from the hydrogen peroxide supply passage to the processing chamber. Thereafter, aseptic air is introduced into the processing chamber from the air supply passage and hydrogen peroxide in the processing chamber is dispersed, so that the processing chamber is sterilized.
JP-A-10-328276

    By the way, in this kind of sterilizer, it is also possible to target a plurality of processing chambers arranged in parallel. In that case, if the sterilization apparatus of the said patent document 1 is applied, a hydrogen peroxide supply path and an air supply path will branch on the way, and will be connected to each process chamber. Then, hydrogen peroxide vapor and aseptic air are distributed and supplied to each processing chamber.

    Here, as one of the processing chambers, there may be provided a device for carrying in equipment for use in another processing chamber and performing sterilization processing on the equipment. In such a processing chamber, in order to sterilize the equipment reliably, it is important to distribute the sterilization gas to every corner of the equipment. However, as described above, since the hydrogen peroxide vapor is distributed and supplied to other processing chambers in this processing chamber, the diffusion amount of the hydrogen peroxide vapor is insufficient and the sterilization effect of the equipment is insufficient. There was a problem. As a result, there was a problem that hydrogen peroxide vapor did not reach the details of the equipment, and the equipment could not be sterilized reliably.

    The present invention has been made in view of such points, and an object thereof is sterilization in which sterilization is performed with hydrogen peroxide vapor on a plurality of processing chambers arranged in parallel including processing chambers for loading and unloading equipment. In the system, it is to increase the sterilization capacity of the processing room for carrying in the equipment and to sterilize the equipment reliably.

    The first invention includes a hydrogen peroxide generator (110) for generating hydrogen peroxide gas, and the hydrogen peroxide generator (2a, 2b, 2c) is disposed in parallel with the hydrogen peroxide generator (110). The sterilization system is equipped with a sterilization system circuit (50) that performs sterilization of the processing chambers (2a, 2b, 2c) by supplying and discharging hydrogen peroxide gas of 110). The sterilization system circuit (50) includes a supply flow path (52) that distributes and supplies the hydrogen peroxide gas of the hydrogen peroxide generation section (110) to the processing chambers (2a, 2b, 2c), On the other hand, the sterilization system circuit (50) includes a plurality of processing chambers (2a, 2b, 2c), and a discharge channel (57) through which hydrogen peroxide gas discharged from each processing chamber (2a, 2b, 2c) joins. ), The hydrogen peroxide gas from the hydrogen peroxide generator (110) is supplied only to the first processing chamber (2a), and the concentration of the hydrogen peroxide gas is changed from the supply flow path (52) to the first treatment chamber (2a). The first processing chamber dedicated supply path (68) having a concentration higher than that of the hydrogen peroxide gas supplied to the one processing chamber (2a) is provided.

    In the above invention, the first processing chamber (2a) is, for example, for loading / unloading equipment. When sterilizing all the processing chambers (2a, 2b, 2c) including the first processing chamber (2a) at the same time, the hydrogen peroxide gas generated in the hydrogen peroxide generator (110) is mixed with air. Then, it is distributed and supplied from the supply channel (52) to each processing chamber (2a, 2b, 2c). Then, the hydrogen peroxide gas discharged from each processing chamber (2a, 2b, 2c) joins the discharge flow path (57). Further, when the sterilization process is performed only on the first processing chamber (2a), the hydrogen peroxide gas generated in the hydrogen peroxide generating section (110) passes through the first processing chamber dedicated supply path (68) and passes through the first processing chamber (2a). It is supplied to the processing chamber (2a). At that time, the concentration of the hydrogen peroxide gas into the first processing chamber (2a) is high. That is, in the first processing chamber (2a), the supply amount of the hydrogen peroxide gas increases, and the concentration of the hydrogen peroxide gas in the chamber increases. As a result, the hydrogen peroxide gas spreads throughout the first processing chamber (2a) and reaches every corner of the equipment. Therefore, the sterilization effect of the equipment is improved.

    As described above, in the present invention, since the dedicated supply path for the first processing chamber (2a) for supplying the hydrogen peroxide gas at a high concentration is provided, the other processing chambers (2b, 2c) are not affected. Equipment can be sterilized reliably.

    In a second aspect based on the first aspect, the discharge channel (57) is configured such that the combined hydrogen peroxide gas is discharged to the outside. On the other hand, in the sterilization system circuit (50), the peroxide in the first processing chamber (2a) is separated from the flow path of the hydrogen peroxide gas discharged from the first processing chamber (2a) to the discharge flow path (57). A circulation channel (95) for discharging the hydrogen gas and returning it to the first processing chamber dedicated supply channel (68) is provided.

    In the above invention, part of the hydrogen peroxide gas supplied from the first processing chamber dedicated supply path (68) to the first processing chamber (2a) passes through the circulation channel (95) and is again dedicated to the first processing chamber. Return to supply channel (68). The returned hydrogen peroxide gas merges with new hydrogen peroxide gas from the hydrogen peroxide generating section (110) and is supplied to the first processing chamber (2a). Therefore, compared with the case where all of the hydrogen peroxide gas in the first processing chamber (2a) is discharged outside the discharge channel (57), the amount of hydrogen peroxide gas generated in the hydrogen peroxide generating portion (110) is smaller. Less.

    According to a third aspect of the present invention, in the first or second aspect of the present invention, the hydrogen peroxide gas from the hydrogen peroxide generating section (110) is supplied to the first processing chamber (2a) into the first processing chamber dedicated supply path (68). A supply fan (89) is provided for intermittent supply to ().

    In said invention, the supply fan (89) provided in the 1st process chamber exclusive supply path (68) repeats an operation | movement and a stop alternately. Thereby, in the 1st processing chamber (2a), hydrogen peroxide gas is intermittently supplied and the pulsation of the air flow containing hydrogen peroxide gas arises. Accordingly, diffusion of hydrogen peroxide gas in the first processing chamber (2a) is promoted. As a result, hydrogen peroxide gas spreads to every corner of the equipment.

    According to a fourth aspect of the present invention, in any one of the first to third aspects, the first processing chamber (2a) is a processing chamber for performing sterilization processing on the equipment carried from the outside.

    In the above invention, the equipment used outside the first processing chamber (2a) is carried into the first processing chamber (2a), and the equipment is sterilized to every corner. Thereby, even if equipment is brought into another processing chamber (2b, 2c), there is no possibility that the inside of the processing chamber (2b, 2c) will be contaminated.

    According to the present invention, the dedicated supply path (68) for supplying the high-concentration hydrogen peroxide gas only to the first processing chamber (2a) is provided, so that the other processing chambers (2b, 2c) are provided. The hydrogen peroxide gas can be reliably diffused into the first processing chamber (2a) without affecting the above. Therefore, the hydrogen peroxide gas can be spread over the details of the equipment, and the sterilization effect of the equipment can be enhanced. As a result, it is possible to reliably prevent contamination of the other processing chambers (2b, 2c) due to the introduction of equipment.

    Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

    The sterilization system (1) of the present embodiment performs air conditioning and sterilization in a processing chamber related to pharmaceuticals and the like. As shown in FIG. 1, the sterilization system (1) is directed to three processing chambers (2a, 2b, 2c) adjacent to each other in order. In the present embodiment, the first processing chamber (2a) is a pass box PB (also referred to as a “passroom”) for carrying in and out manufacturing equipment, inspection equipment, and the like, and the second processing chamber (2b) is for manufacturing pharmaceuticals and the like. The third processing chamber (2c) is an auxiliary chamber where workers enter and exit. The processing chambers (2a, 2b, 2c) are provided with an opening / closing door (3) for entering and exiting, and the processing chambers (2a, 2b, 2c) communicate with each other by opening the opening / closing door (3). . Further, these processing chambers (2a, 2b, 2c) constitute an aseptic chamber.

    The sterilization system (1) includes an air conditioning system circuit (5) and a sterilization system circuit (50). The air conditioning system circuit (5) includes an air supply system (10) that supplies air to each processing chamber (2a, 2b, 2c) and an exhaust system (30) that discharges air from each processing chamber (2a, 2b, 2c). ).

    The air supply system (10) includes an air supply side main flow path (11) and three air supply flow paths (12, 13, 14).

    The supply-side main flow path (11) flows through the outside air. The air supply side main flow path (11) is provided with an outside air processing air conditioner (21) and a sensible heat air conditioner (23) in order from the upstream side. In the outside air processing air conditioner (21), a medium performance filter (21a), a HEPA filter (high efficiency particulate air filter) (21b), and an air supply fan (21c) are arranged in this order from the upstream side. In the outside air processing air conditioner (21), dust and the like are removed from the taken-in air by the medium performance filter (21a) and the HEPA filter (21b). The sensible heat air conditioner (23) is provided with a cooling coil (23a), an electric heater (23b), a humidifier (23c) and an air supply fan (23d) in order from the upstream side. In this sensible heat air conditioner (23), the air that has exited the outside air treatment air conditioner (21) is taken in, cooled by the cooling coil (23a) as necessary, heated by the electric heater (23b), and the humidifier ( Humidified in 23c). A main cutoff damper (22) is provided between the outside air processing air conditioner (21) and the sensible heat air conditioner (23) in the supply side main flow path (11). The main cutoff damper (22) is configured to perform switching to open and shut off the flow path. The same applies to various cutoff dampers described later.

    Each of the air supply channels (12, 13, 14) is connected in parallel to the downstream portion of the sensible heat air conditioner (23) in the air supply side main channel (11). The first air supply channel (12) is in the first processing chamber (2a), the second air supply channel (13) is in the second processing chamber (2b), and the third air supply channel (14) is in the third processing. It is connected to each room (2c). Each air supply flow path (12, 13, 14) has a shut-off damper (25) and a constant air volume device (26) in order from the upstream side, and from the air supply side main flow path (11) to the processing chamber (2a, 2b, Supply air to 2c). Although not shown, the constant air volume device (26) is an air supply amount adjusting means including a valve and a wind speed sensor. In other words, the constant air volume device (26) adjusts the valve opening based on the measured value of the air speed sensor so that the air supply volume (air volume) to the processing chamber (2a, 2b, 2c) is constant. The In addition, the HEPA filter (27) is provided in the inlet part which the air supply flow path (12,13,14) of each process chamber (2a, 2b, 2c) connects.

    The exhaust system (30) includes an exhaust side main flow path (31) and three exhaust flow paths (32, 33, 34).

    The exhaust side main flow path (31) is provided with an exhaust fan (43), and a main exhaust cutoff damper (44) is provided downstream thereof. The exhaust passages (32, 33, 34) are connected in parallel to each other upstream of the exhaust fan (43) in the exhaust side main passage (31). The first exhaust channel (32) is in the first processing chamber (2a), the second exhaust channel (33) is in the second processing chamber (2b), and the third exhaust channel (34) is in the third processing chamber. It is connected to each room (2c). Each exhaust passage (32, 33, 34) is provided with a blocking damper (42). Only the first exhaust flow path (32) is provided with two blocking dampers (42) in series. In the exhaust system (30), the exhaust fan (43) causes the air in the processing chambers (2a, 2b, 2c) to pass through the exhaust flow paths (32, 33, 34) and the exhaust side main flow path (31). Is discharged. Note that the air supply passage (12, 13, 14) and the exhaust passage (32, 33, 34) of each processing chamber (2a, 2b, 2c) constitute an air supply passage and a discharge passage according to the present invention. ing.

    In the exhaust system (30), in addition to the shutoff damper (42), an adjustment damper having a variable opening is provided. Specifically, each of the exhaust flow paths (32, 33, 34) is provided with one adjustment damper (41) as an exhaust amount adjusting means on the upstream side of the shut-off damper (42). The exhaust-side main flow path (31) is provided with a main adjustment damper (45) on the downstream side of the main cutoff damper (44). In this exhaust system (30), the exhaust amount of each processing chamber (2a, 2b, 2c) is adjusted by adjusting the opening of each adjusting damper (41), and the chamber pressure of that processing chamber (2a, 2b, 2c) is adjusted. Control is performed. Moreover, the HEPA filter (46) is provided in the exit part which the exhaust flow path (32, 33, 34) of each process chamber (2a, 2b, 2c) connects. In the present embodiment, the constant air volume device (26) of the air supply system (10) and the adjustment damper (41) of the exhaust system (30) respectively provide the air supply amount adjusting means and the exhaust amount adjusting means according to the present invention. It is composed.

    A return air flow path (36) having a regulating damper (37) is connected between the air supply system (10) and the exhaust system (30). One end on the inlet side of the return air flow path (36) is connected between the exhaust fan (43) and the main shutoff damper (44) in the exhaust side main flow path (31). The other end on the outlet side of the return air flow path (36) is connected between the main cutoff damper (22) and the sensible heat air conditioner (23) in the supply air main flow path (11). That is, the return air flow path (36) constitutes a circulation flow path for returning part or all of the air discharged from the processing chambers (2a, 2b, 2c) to the exhaust system (30) to the air supply system (10). ing.

    The sterilization system circuit (50) includes a sterilization gas circulation channel (51), a sterilization gas supply main channel (52), three sterilization gas supply channels (53, 54, 55), and a sterilization gas return main channel ( 57) and three sterilization gas return paths (58, 59, 61).

    The downstream end of the sterilization gas circulation channel (51) is connected to the sterilization gas supply main channel (52) via the sterilization side air conditioner (85). The upstream end of the sterilization gas circulation channel (51) is connected to the sterilization gas return main channel (57) via the sterilization gas circulation fan (86). A sterilization gas generator (81) is provided in the middle of the sterilization gas circulation channel (51), and an inlet shut-off damper (74) and an outlet shut-off are provided on the inlet side and the outlet side of the sterilization gas generator (81). A damper (73) is provided. ing. Details of the sterilization gas generator (81) and the sterilization side air conditioner (85) will be described later.

    The three sterilization gas supply paths (53, 54, 55) are connected between the sterilization gas supply main flow path (52) and the air supply flow paths (12, 13, 14) of the air supply system (10). Yes. Specifically, each upstream end of the first to third sterilization gas supply paths (53, 54, 55) is connected to the sterilization gas supply main flow path (52). Each downstream end of the first to third sterilization gas supply passages (53, 54, 55) is located between the shut-off damper (25) and the constant air flow device (26) in each of the air supply passages (12, 13, 14). It is connected. Each sterilization gas supply path (53, 54, 55) is provided with one shut-off damper (56).

    The three sterilization gas return paths (58, 59, 61) are connected between the sterilization gas return main flow path (57) and the exhaust flow paths (32, 33, 34) of the exhaust system (30). . Specifically, the upstream ends of the first to third sterilization gas return paths (58, 59, 61) are respectively connected to the adjustment damper (41) and the cutoff damper (42) in each exhaust flow path (32, 33, 34). Connected between. Each downstream end of the first to third sterilization gas return channels (58, 59, 61) is connected to the sterilization gas return main channel (57). Each sterilization gas return path (58, 59, 61) is provided with one shut-off damper (63). The sterilization gas supply main channel (52) constitutes a supply channel that distributes and supplies the sterilization gas to each processing chamber (2a, 2b, 2c), and the sterilization gas return main channel (57) A discharge flow path is formed in which the sterilized gas discharged from the chambers (2a, 2b, 2c) joins.

    An air supply channel (92) having an outside air processing air conditioner (91) is connected to the sterilization gas generator (81). The outside air processing air conditioner (91) of the air supply flow path (92) is similar to the above-described outside air processing air conditioner (21) of the air conditioning system circuit (5), with a medium performance filter (91a) and a HEPA filter (91b). An air supply fan (91c) is provided. Further, a constant air volume device (93) is provided in the air supply passage (92) downstream of the outside air processing air conditioner (91). That is, in the air supply flow path (92), the outside air taken in by the outside air processing air conditioner (91) is controlled to a constant air volume by the constant air volume device (93) and then supplied to the sterilization gas generator (81).

    Here, the internal structure of the sterilization gas generator (81) will be described with reference to FIG. The sterilization gas generator (81) has a first passage (101), a second passage (102), and a return passage (103). The upstream end of the first passage (101) is connected to both the inlet-side sterilization gas circulation channel (51) and the air supply channel (92), and the downstream end is connected to the outlet-side sterilization gas circulation channel (51). It is connected. Both the upstream and downstream ends of the second passage (102) are open to the outside of the room. In the first passage (101), the first fan (104), primary cooler (105), adsorption rotor (106), secondary cooler (107), heater (108), humidifier are arranged in order from the upstream side. (108) and a hydrogen peroxide generator (110) are provided. The adsorption rotor (106) carries an adsorbent capable of adsorbing and desorbing moisture, and is configured to be rotatable. In the second passage (102), a regenerative heater (111), the above-described adsorption rotor (106), and the second fan (112) are provided in this order from the upstream side. That is, the adsorption rotor (106) is disposed across both the first passage (101) and the second passage (102). The return passage (103) is connected to the first passage (101). Specifically, one end of the return passage (103) is connected between the humidifier (108) and the hydrogen peroxide generator (110), and the other end is connected upstream of the first fan (104). The hydrogen peroxide generator (110) is configured to generate a hydrogen peroxide gas from an aqueous solution of hydrogen peroxide and apply it to the air in the first passage (101) to generate a sterilization gas.

    In the first passage (101), when the air cooled by the primary cooler (105) passes through the adsorption rotor (106), moisture in the air is adsorbed and dehumidified. If necessary, the temperature of the dehumidified air is adjusted by the secondary cooler (107) and the heater (108), and the humidity is adjusted by the humidifier (108). Further, in the second passage (102), the air taken in from the outside is heated by the regenerative heater (111) and passes through the adsorption rotor (106), so that the first passage (101) in the adsorption rotor (106) The adsorbed part is regenerated. The regeneration portion of the adsorption rotor (106) rotates and moves again to the first passage (101), and dehumidifies the air in the first passage (101). In this sterilization gas generator (81), the adsorption rotor (106), the cooler (105, 107), the heater (108), the humidifier (108) and the regenerative heater (111) are connected to the temperature / humidity adjusting unit (114 ). As described above, the sterilization gas generator (81) is configured to flow the temperature / humidity-adjusted air to which the hydrogen peroxide gas is applied to the sterilization gas circulation channel (51). The sterilization gas generator (81) can appropriately operate or stop only one of the hydrogen peroxide generation unit (110) and the temperature / humidity adjustment unit (114).

    The sterilization side air conditioner (85) is provided with a cooling coil (85a), an electric heater (85b), and a supply fan (85c) in order from the upstream side. And the supply fan (85c) is connected to the sterilization gas supply main flow path (52) mentioned above.

    The sterilization system circuit (50) includes a decomposition channel (65), a dehumidification channel (66), a bypass channel (67), a fourth sterilization gas supply channel (68), and a sterilization gas. A discharge channel (69) is provided.

    The decomposition channel (65), the dehumidification channel (66), and the bypass channel (67) are connected in parallel to the sterilization gas circulation channel (51). That is, the decomposition channel (65), the dehumidification channel (66), and the bypass channel (67) are all located between the sterilization gas circulation fan (86) and the inlet shut-off damper (74) at the upstream end. The downstream end is connected between the sterilization side air conditioner (85) and the outlet shut-off damper (73). The decomposition channel (65) is provided with a hydrogen peroxide decomposer (82) composed of a Pt catalyst. The hydrogen peroxide decomposer (82) is configured to decompose and remove hydrogen peroxide gas from the passing sterilizing gas. A dehumidifier (84) is provided in the dehumidifying channel (66). The dehumidifier (84) is configured to dehumidify the taken outside air (air) and flow it to the dehumidifying channel (66). Further, the decomposition channel (65) and the dehumidification channel (66) include an inlet blocking damper (72, 76) and an inlet side outlet and an outlet side of the hydrogen peroxide decomposer (82) and the dehumidifier (84). Outlet blocking dampers (71, 75) are provided, respectively. The bypass passage (67) is provided with a cutoff damper (77).

    The upstream end of the fourth sterilization gas supply path (68) is connected between the sterilization gas generator (81) and the outlet shut-off damper (73) in the sterilization gas circulation path (51). The downstream end of the fourth sterilization gas supply path (68) is connected between the shutoff damper (25) and the constant air volume device (26) in the first air supply path (12) of the air supply system (10). . The fourth sterilization gas supply path (68) is provided with a cutoff damper (78), a mixing chamber (88), a sterilization gas supply fan (89), and a cutoff damper (79) in this order from the upstream side. In addition, a PB circulation channel (95) is connected to the fourth sterilization gas supply channel (68). The PB circulation channel (95) has an upstream end connected to the HEPA filter (46) at the outlet of the first processing chamber (2a) and a downstream end connected to the mixing chamber (88). The mixing chamber (88) mixes the sterilized gas discharged from the first processing chamber (2a) into the PB circulation channel (95) and the sterilized gas from the sterilization gas generator (81). In addition, the 4th sterilization gas supply path (68) comprises the 1st process chamber exclusive supply path which concerns on this invention.

    The upstream end of the sterilization gas discharge path (69) is connected between the adjustment damper (41) and the shutoff damper (42) in the first exhaust flow path (32) of the exhaust system (30). The downstream end of the sterilization gas discharge channel (69) opens to the outside of the room. The sterilization gas discharge path (69) is provided with a cutoff damper (94), a sterilization gas exhaust fan (87), and a hydrogen peroxide decomposer (83) in this order from the upstream side. The hydrogen peroxide decomposer (83) is configured in the same manner as that provided in the decomposition flow path (65) described above.

    A connection channel (96) having a shut-off damper (97) is connected to the decomposition channel (65) and the sterilization gas discharge channel (69). One end of the connection channel (96) is connected to the upstream side of the inlet blocking damper (72) in the disassembly channel (65), and the other end is a sterilization gas exhaust fan (87) in the sterilization gas discharge channel (69). And a hydrogen peroxide decomposer (83).

    The sterilization system (1) includes a controller (120) and various sensors (131, 132).

    Each processing chamber (2a, 2b, 2c) is provided with a door switch (131). The door switch (131) detects an open state and a closed state of the open / close door (3), and is provided for each open / close door (3). Each processing chamber (2a, 2b, 2c) is provided with a pressure sensor (132) as pressure detecting means for detecting the chamber pressure.

    The controller (120) includes a mode switching unit (121), a sterilization control unit (122), and a steady-state control unit (123). The mode switching unit (121) is configured to switch various operation modes described later. The sterilization control unit (122) and the steady-state control unit (123) are designed to prevent the entry of fungi from outside into the processing chamber (2a, 2b, 2c). Is controlled to be slightly positive pressure (slight positive pressure) from outside air.

    Specifically, the sterilization control unit (122) is configured so that the chamber pressures of all the processing chambers (2a, 2b, 2c) are maintained at the same set pressure (slight positive pressure) during the sterilization operation described later. Controls the opening of the adjustment damper (41). On the other hand, the steady state control unit (123) maintains the chamber pressures of the processing chambers (2a, 2b, 2c) at different set pressures (set values) determined in accordance with the importance during the steady operation described later. Thus, the opening degree of each adjustment damper (41) is controlled. That is, during steady operation, the set chamber pressure of each processing chamber (2a, 2b, 2c) is set higher as the importance (sterilization level or aseptic level) of the processing chamber (2a, 2b, 2c) is higher. . In the case of this embodiment, the setting chamber pressure of the second processing chamber (2b) is the highest, and the setting chamber pressures of the first processing chamber (2a) and the third processing chamber (2c) are set to the same pressure. The sterilization control unit (122) and the steady-state control unit (123) control the opening of the adjustment damper (41) based on the detected value of the pressure sensor (132) of each processing chamber (2a, 2b, 2c). .

    Furthermore, the steady-state control unit (123) includes a “special mode” that is performed when the open / close door (3) is opened during steady operation. For example, when the open / close door (3) between the processing chambers (2a, 2b, 2c) is opened, adjustment of the processing chamber (2a, 2b, 2c) having a high set chamber pressure communicated by the opening for the first predetermined time. The opening degree of the damper (41) is decreased, and the opening degree of the adjustment damper (41) of the processing chambers (2a, 2b, 2c) having a low set chamber pressure is increased. The open / close door (3) facing the outside (that is, the open / close door (3) on the left side of the first processing chamber (2a) in FIG. 1 or the open / close door (3) on the right side of the third processing chamber (2c)). When is opened, the opening degree of the adjustment damper (41) of the first processing chamber (2a) or the third processing chamber (2c) is decreased for a predetermined time. In this special mode, the opening control of the adjustment damper (41) is performed based on the detection value of the pressure sensor (132) until the second predetermined time elapses after the first predetermined time elapses. The opening degree control of the adjustment damper (41) is configured such that the response to the detection value of the pressure sensor (132) is delayed as compared with the control when the open / close door (3) is in the closed state. Further, in this special mode, the opening control of the adjustment damper (41) is stopped until the opening / closing door (3) is closed after the second predetermined time has elapsed. The steady state control unit (123) receives the detection signal of the door switch (131), and determines the open state and the closed state of the open / close door (3) based on the signal.

-Driving action-
Next, the operation of the sterilization system (1) will be described, and then the chamber pressure control of the processing chambers (2a, 2b, 2c) will be described in detail.

    In the sterilization system (1), various operation modes can be switched. Specifically, the mode switching unit (121) of the controller (120) includes the “preparation mode”, “adjustment mode”, “sterilization mode”, “first dilution mode”, “second dilution mode”, and “steady mode”. And the operation mode of "PB independent sterilization mode" is switched.

<Preparation mode>
This preparation mode is an operation in which the temperature and humidity of the processing chambers (2a, 2b, 2c) are set to appropriate values (target values) in order to enhance the sterilization effect by the subsequent adjustment mode or sterilization mode. For example, the target temperature is set to 25 ° C., and the target humidity is set to 30% relative humidity.

    As shown in FIG. 3, in this preparation mode, the cutoff dampers (56, 63,...) Of the lines indicated by bold lines are set to the open state, and the other cutoff dampers (22, 25,...) Are closed. Set to state. Moreover, the adjustment damper (41) of each sterilization gas return path (58, 59, 61) is set to an appropriate opening degree. In this state, operation is performed in the sterilization system circuit (50). Specifically, the temperature / humidity adjustment unit (114), dehumidifier (84), sterilization side air conditioner (85), outside air treatment air conditioner (91) and sterilization gas circulation fan (86) of the sterilization gas generator (81) Driven. In addition, the hydrogen peroxide generation part (110) of the sterilization gas generator (81) is stopped.

    First, the air taken into the outside air processing air conditioner (91) from the outside is supplied to the sterilization gas generator (81) with a constant air volume by the constant air volume device (93). The temperature and humidity of the air supplied to the sterilization gas generator (81) are adjusted by the temperature / humidity adjustment unit (114), and flow into the sterilization gas circulation channel (51). On the other hand, in the dehumidifier (84), the air taken in from the outside is dehumidified and flows to the dehumidifying channel (66). The air in the dehumidifying channel (66) flows into the sterilizing gas circulation channel (51) and merges with the air from the sterilizing gas generator (81). The combined air flows to the sterilization side air conditioner (85) and the temperature is adjusted. The temperature-adjusted air flows from the sterilization gas supply main channel (52) to each sterilization gas supply channel (53, 54, 55), and passes through each constant chamber (26) and the HEPA filter (27) to each processing chamber ( 2a, 2b, 2c). Note that the air supplied to the processing chambers (2a, 2b, 2c) is controlled to a constant air volume by the constant air volume device (26).

    Subsequently, the air in each processing chamber (2a, 2b, 2c) is sterilized by a sterilizing gas circulation fan (86) through a HEPA filter (46) and an adjustment damper (41) in that order (58, 59). , 61) and flows to the sterilization gas return main flow path (57). Thereafter, the air flows to the sterilization gas circulation channel (51) and is divided into the decomposition channel (65), the dehumidification channel (66), and the bypass channel (67). The air that has flowed to the decomposition channel (65) flows to the sterilization gas discharge channel (69) through the connection channel (96), and the hydrogen peroxide is decomposed and removed by the hydrogen peroxide decomposer (83). Is discharged. The air that has flowed to the dehumidifying channel (66) is mixed with the outside air by the dehumidifier (84) and dehumidified again. The air that has flowed to the bypass flow path (67) flows to the sterilization gas circulation flow path (51), and merges with the air from the sterilization gas generator (81) and the dehumidifier (84).

    In this manner, air whose temperature and humidity are adjusted by the sterilization gas generator (81), the dehumidifier (84), and the sterilization side air conditioner (85) is supplied to the processing chambers (2a, 2b, 2c). When the temperature and humidity of each processing chamber (2a, 2b, 2c) reach the target values, the preparation mode ends. That is, in the first processing chamber (2a), the degree of passage of the sterilizing gas through the HEPA filter (27, 46) is higher than in the other processing chambers (2b, 2c), so that the sterilizing gas dust and the like are removed. The rate is improved.

<Adjustment mode and sterilization mode>
When the preparation mode ends, the mode switching unit (121) of the controller (120) sequentially switches to the adjustment mode and the sterilization mode. First, in the adjustment mode, the sterilization gas generated by the sterilization gas generator (81) is supplied to each processing chamber (2a, 2b, 2c), and the concentration of hydrogen peroxide in the processing chamber (2a, 2b, 2c) is adjusted. A target concentration (for example, 300 ppm) is set. In the sterilization mode, the concentration of hydrogen peroxide is maintained within a predetermined range (for example, target concentration −10% to target concentration + 10%) for a predetermined time. The processing chambers (2a, 2b, 2c) are provided with concentration sensors (not shown) for detecting the concentration of hydrogen peroxide.

    As shown in FIG. 4, in the adjustment mode, the dehumidifier (84) is stopped, and the inlet blocking damper (76) and the outlet blocking damper (75) of the dehumidifying channel (66) are set in a closed state. . Further, the inlet shut-off damper (74) of the sterilization gas generator (81) is set to an open state. In the sterilization gas generator (81), the temperature / humidity adjustment unit (114) is stopped, while the hydrogen peroxide generation unit (110) is operated. Others are the same as in the preparation mode.

    First, the air supplied from the outside air processing air conditioner (91) to the sterilization gas generator (81) is provided with hydrogen peroxide gas by the hydrogen peroxide generation unit (110) to become sterilization gas. The sterilization gas flows from the sterilization gas circulation channel (51) into the sterilization side air conditioner (85), and the temperature is adjusted. Thereafter, the sterilization gas is supplied from the respective sterilization gas supply paths (53, 54, 55) to the processing chambers (2a, 2b, 2c). The air in each processing chamber (2a, 2b, 2c) is discharged to the sterilization gas return path (58, 59, 61) and flows to the sterilization gas circulation path (51). A part of this air flows into the sterilization gas generator (81), and the remaining part is divided into the decomposition channel (65) and the bypass channel (67). The air that has flowed into the sterilization gas generator (81) is mixed with the air from the outside air treatment air conditioner (91), and after being provided with hydrogen peroxide gas, it flows into the sterilization gas circulation channel (51). This sterilizing gas merges with the air from the bypass channel (67) and flows to the sterilization side air conditioner (85), and this circulation is repeated. Note that the air that has flowed into the decomposition channel (65) is discharged to the outside through the hydrogen peroxide decomposer (83), as in the preparation mode.

    As described above, in the adjustment mode, the sterilization gas is supplied to the processing chamber (2a, 2b, 2c), while the air in the processing chamber (2a, 2b, 2c) is discharged, so that the processing chamber (2a, 2b) , 2c) the hydrogen peroxide concentration gradually increases. When the hydrogen peroxide concentration reaches the target value, the adjustment mode ends and the sterilization mode is started.

    As shown in FIG. 5, in the sterilization mode, the inlet shut-off damper (74) of the sterilization gas generator (81) is set in a closed state. In the sterilization gas generator (81), the temperature / humidity adjustment unit (114) is operated together with the hydrogen peroxide generation unit (110). Others are the same as in the adjustment mode.

    In this case, in the sterilization gas generator (81), the sterilization gas discharged from each processing chamber (2a, 2b, 2c) does not flow, and only new air from the outside air processing air conditioner (91) is supplied. The air flowing into the sterilization gas generator (81) is provided with hydrogen peroxide gas, and the temperature and humidity are appropriately adjusted. That is, unlike the adjustment mode, a sterilizing gas whose temperature and humidity are appropriately adjusted is supplied to each processing chamber (2a, 2b, 2c). As a result, in each processing chamber (2a, 2b, 2c), the hydrogen peroxide concentration is maintained within a predetermined range, and the temperature and humidity are maintained at values suitable for sterilization (temperature 25 ° C., relative humidity 30%). The Therefore, the sterilization effect is effectively exhibited. Then, the sterilization mode ends when a predetermined time is performed.

<First dilution mode>
When the sterilization mode ends, the mode switching unit (121) of the controller (120) switches to the first dilution mode. The first dilution mode is an operation for reducing the concentration of hydrogen peroxide in the processing chamber (2a, 2b, 2c) to a predetermined value (for example, 10 ppm) or less.

    As shown in FIG. 6, in the first dilution mode, the inlet cutoff damper (72) and the outlet cutoff damper (71) of the decomposition channel (65) are set in the open state. Further, in the sterilization gas generator (81), the hydrogen peroxide generator (110) is stopped. The other conditions are the same as in the sterilization mode.

    In this state, the sterilization gas discharged from each processing chamber (2a, 2b, 2c) flows into the sterilization gas circulation channel (51). This sterilizing gas is divided into the decomposition channel (65) and the bypass channel (67). Part of the sterilization gas that has flowed into the decomposition channel (65) flows directly into the hydrogen peroxide decomposer (82) of the decomposition channel (65), where hydrogen peroxide is decomposed and removed, and then sterilized gas circulation It flows to the channel (51). The remainder of the sterilization gas that flowed into the decomposition channel (65) flows from the connection channel (96) to the sterilization gas discharge channel (69), where hydrogen peroxide is decomposed and removed by the hydrogen peroxide decomposer (83). It is discharged outside the room.

    On the other hand, the air whose temperature and humidity are appropriately adjusted by the sterilization gas generator (81) flows to the sterilization gas circulation channel (51). The sterilizing gas that has flowed into the bypass channel (67) is combined with the air from the sterilizing gas generator (81) and the hydrogen peroxide decomposer (82) in the sterilizing gas circulation channel (51) and diluted. The diluted sterilization gas is supplied to each processing chamber (2a, 2b, 2c), and this circulation is repeated. Thereby, the hydrogen peroxide concentration in each processing chamber (2a, 2b, 2c) gradually decreases. Then, when the hydrogen peroxide concentration in each processing chamber (2a, 2b, 2c) falls below a predetermined value (10 ppm), the first dilution mode ends.

<Second dilution mode>
When the first dilution mode ends, the mode switching unit (121) of the controller (120) switches to the second dilution mode. The second dilution mode is an operation for setting the hydrogen peroxide concentration in the processing chamber (2a, 2b, 2c) to a lower value (for example, 1 ppm). That is, in this mode, aseptic air is supplied to the processing chambers (2a, 2b, 2c), and low-concentration sterilization gas in the processing chambers (2a, 2b, 2c) is directly discharged to the outside of the chamber. Furthermore, according to the second dilution mode, the temperature and humidity of the processing chambers (2a, 2b, 2c) are controlled to target values. For example, the target temperature is set to 22 ° C., and the target humidity is set to 50% relative humidity.

    As shown in FIG. 7, in the second dilution mode, the operation of the sterilization system circuit (50) is stopped and only the air conditioning system circuit (5) is operated. Specifically, in the sterilization system circuit (50), all the shut-off dampers (56, 58,...) Are set in a closed state. In the air conditioning system circuit (5), the cutoff dampers (25, 42,...) Indicated by the thick lines in FIG. 7 are set to the open state, and the main adjustment damper (45) and the adjustment damper (37, 41). Is set to an appropriate opening.

    In this state, the outside air processing air conditioner (21), the sensible heat air conditioner (23), and the exhaust fan (43) are operated. Then, first, the air taken into the air supply side main flow path (11) from the outside is removed by the outside air processing air conditioner (21) and flows into the sensible heat air conditioner (23). In the sensible heat air conditioner (23), the temperature and humidity of the air are adjusted. The adjusted air flows to the air supply passages (12, 13, 14), passes through the HEPA filter (27), and is supplied to the processing chambers (2a, 2b, 2c). Here, the supplied air is aseptic air by the outside air processing air conditioner (21) and the HEPA filter (27). The temperature of the air flowing into the second air supply channel (13) and the third air supply channel (14) is finely adjusted by the reheat coil (24).

    Air (low-concentration sterilized gas) in each processing chamber (2a, 2b, 2c) is exhausted by the exhaust fan (43) through the HEPA filter (46) to the exhaust flow path (32, 33, 34). , Flows to the exhaust side main flow path (31). Part of the air in the exhaust-side main flow path (31) flows to the return air flow path (36), and the remaining air passes through the main adjustment damper (45) and is discharged to the outside. The air that has flowed to the return air flow path (36) flows to the supply-side main flow path (11) and merges with the air from the outside air processing air conditioner (21). Here, the amount of air discharged to the outside and the amount of air flowing to the return air flow path (36) are adjusted by opening control of the main adjustment damper (45) and the adjustment damper (37).

    Thus, in the processing chamber (2a, 2b, 2c), new sterile air is supplied while sterilization gas is discharged outside the chamber, so the concentration of hydrogen peroxide in the processing chamber (2a, 2b, 2c) Is further reduced. Then, in the processing chambers (2a, 2b, 2c), when the hydrogen peroxide concentration becomes a predetermined value (1 ppm) or less and the temperature and humidity reach the target values (temperature 22 ° C., relative humidity 50%), the second Dilution mode ends. In the present embodiment, a series of operations from the preparation mode to the second dilution mode is performed, and the sterilization processing of the processing chambers (2a, 2b, 2c) is completed.

<Stationary mode>
When the second dilution mode ends, the mode switching unit (121) of the controller (120) switches to the steady mode. In this steady mode, the temperature and humidity of each processing chamber (2a, 2b, 2c) are maintained at the values set in the second dilution mode (temperature 22 ° C., relative humidity 50%) and the processing chambers (2a, 2b, 2c) Air-conditioning operation that maintains the sterility of

    Specifically, in this steady mode, air flows as in the second dilution mode shown in FIG. That is, the air taken in from the outside is sterilized by the outside air processing air conditioner (21) and the HEPA filter (27), and the temperature and humidity are adjusted by the sensible heat air conditioner (23) and the reheat coil (24). Then, the adjusted aseptic air is supplied to each processing chamber (2a, 2b, 2c), and the air in the processing chamber (2a, 2b, 2c) is discharged to the outside. Therefore, by the operation in the steady mode, the temperature and humidity of the processing chambers (2a, 2b, 2c) are maintained at the set values and the aseptic state is maintained.

-Single operation-
Next, the sterilization system (1) of the present embodiment can perform sterilization processing or air conditioning for any of the processing chambers (2a, 2b, 2c) alone.

    For example, when only the second processing chamber (2b) is sterilized alone, the shut-off damper (25) of the first sterilization gas supply path (53) and the third sterilization gas supply path (55) and the first sterilization gas return The shut-off dampers (63) of the path (58) and the third sterilization gas return path (61) are each set to a closed state. In this state, the above-described operation from the preparation mode to the second dilution mode is sequentially performed. In this case, for example, in the sterilization mode, the state shown in FIG. 8 is obtained. The sterilization gas that has flowed from the sterilization side air conditioner (85) to the sterilization gas supply main channel (52) is supplied to the second processing chamber (2b) only through the second sterilization gas supply channel (54). Then, the air in the second processing chamber (2b) is discharged to the second sterilization gas return path (59) and flows from the sterilization gas return main channel (57) to the sterilization gas circulation channel (51). Therefore, sterilization gas can be supplied only to the second processing chamber (2b), and sterilization can be performed alone.

    As described above, the shut-off dampers (56, 63) are provided in the sterilization gas supply paths (53, 54, 55) and the sterilization gas return paths (58, 59, 61) of the processing chamber (2a, 2b, 2c). Therefore, any one of the processing chambers (2a, 2b, 2c) can be sterilized independently by simply switching the shut-off damper (56, 63). Therefore, since it is not necessary to make it into the processing chamber (2a, 2b, 2c) which does not need sterilization processing, complication of operation can be avoided. In addition, the amount of hydrogen peroxide gas generated in the hydrogen peroxide generating part (110) is only as much as necessary in the second processing chamber (2b), that is, in the target processing chamber (2a, 2b, 2c). Just do it. Therefore, economical operation can be performed without generating wasteful hydrogen peroxide gas in the hydrogen peroxide generating section (110).

    The same applies to the air conditioning operation in the steady mode. That is, since the shutoff dampers (25, 42) are provided in the air supply channels (12, 13, 14) and the exhaust channels (32, 33, 34) of the processing chamber (2a, 2b, 2c), it is necessary. If only the shut-off dampers (25, 42) corresponding to the processing chambers (2a, 2b, 2c) are opened, the air conditioning operation can be performed independently for the processing chambers (2a, 2b, 2c).

    Further, although not shown, in the present embodiment, the air conditioning operation is performed on the other processing chambers (2a, 2b, 2c) while performing the sterilization processing on any of the processing chambers (2a, 2b, 2c). You can also For example, a case where air conditioning operation is performed on the second processing chamber (2b) and the third processing chamber (2c) while performing sterilization processing on the first processing chamber (2a) will be described. In this case, the shutoff dampers (25, 42) of the first air supply passage (12) and the first exhaust passage (32) are closed, and the first sterilization gas supply passage (53) and the first sterilization gas return passage ( 58) The shut-off dampers (56, 63) are respectively set to the open state. Further, the shutoff dampers (25, 42) of the second air supply passage (13), the third air supply passage (14), the second exhaust passage (33), and the third exhaust passage (34) are opened. Set and shut off dampers (56, 63) of the second sterilization gas supply path (54), the third sterilization gas supply path (55), the second sterilization gas return path (59) and the third sterilization gas return path (61) Is set to the closed state. Thereby, hydrogen peroxide gas is supplied to the first processing chamber (2a), and aseptic air is supplied to the second processing chamber (2b) and the third processing chamber (2c).

-Room pressure control-
Next, the chamber pressure control of each processing chamber (2a, 2b, 2c) will be described.

    During operation from the above-described preparation mode to the second dilution mode (hereinafter referred to as sterilization operation), the chamber pressure in the processing chamber (2a, 2b, 2c) is controlled by the sterilization control unit (122) of the controller (120). Be controlled. Further, during operation in the steady mode (hereinafter referred to as steady operation), the chamber pressures in the processing chambers (2a, 2b, 2c) are controlled by the steady-state control unit (123) of the controller (120).

    At the time of sterilization operation, each exhaust flow path (15 to 20 Pa) is set so that the chamber pressure of all the processing chambers (2a, 2b, 2c) becomes the same set pressure (micro positive pressure: 15 to 20 Pa) by the sterilization control unit (122). The opening degree of the adjustment damper (41) of 32, 33, 34) is controlled. Specifically, the opening degree of the adjustment damper (41) is adjusted when the deviation between the set pressure and the detected value of the pressure sensor (105) becomes a first predetermined amount (for example, 10% of the predetermined value) or more. . For example, when the detected value of the pressure sensor (105) is lower than the set pressure by 12%, the opening of the adjustment damper (41) corresponding to the processing chamber (2a, 2b, 2c) is reduced and the processing chamber ( Reduce the displacement from 2a, 2b, 2c). As a result, the chamber pressure in the processing chamber (2a, 2b, 2c) increases. Conversely, if the detected value of the pressure sensor (105) is 12% higher than the set pressure, the opening of the adjustment damper (41) corresponding to the processing chamber (2a, 2b, 2c) is increased and the processing chamber is increased. Increase the displacement from (2a, 2b, 2c). Thereby, the chamber pressure of the processing chamber (2a, 2b, 2c) is lowered. Further, when the deviation between the detected value of the pressure sensor (132) and the set pressure is less than the first predetermined amount (for example, 8% of the set pressure), the opening degree of the adjustment damper (41) is not adjusted. In this way, the amount of air supplied to each processing chamber (2a, 2b, 2c) is constantly controlled by the constant air volume device (26), so the amount of exhaust from each processing chamber (2a, 2b, 2c) is changed. By doing so, the chamber pressure is adjusted. By this chamber pressure control, the processing chambers (2a, 2b, 2c) are maintained at a slightly positive pressure, so that invasion of fungi from the outside can be prevented.

    During steady operation, the steady state controller (123) causes the chamber pressures of the first processing chamber (2a) and the third processing chamber (2c) to become the first set pressure (slight positive pressure: 15 to 20 Pa). The opening degree of the adjustment damper (41) is controlled so that the chamber pressure of the second processing chamber (2b) becomes a second set pressure (slight positive pressure: 35 to 40 Pa) higher than the first set pressure. Specifically, when all the open / close doors (3) are in the closed state, the opening degree of the adjustment damper (41) is the same as that of the sterilization control unit (122) and the set pressure and the pressure sensor (105). Adjustment is made when the deviation from the detected value is equal to or greater than a first predetermined amount (for example, 10% of the predetermined value).

    Here, for example, when the open / close door (3) between the first processing chamber (2a) and the second processing chamber (2b) is opened, a detection signal is sent from the door switch (131) to the steady-state control unit (123). Entered. When input, the steady-state control unit (123) performs chamber pressure control of the processing chambers (2a, 2b, 2c) in a special mode. Specifically, immediately after the opening / closing door (3) is opened, the opening degree of the adjustment damper (41) for the first processing chamber (2a) is increased by several percent, and the adjustment damper (41) for the second processing chamber (2b) is increased. Is reduced by several percent. Then, the exhaust amount increases in the first processing chamber (2a) and the chamber pressure tends to decrease, and in the second processing chamber (2b), the exhaust amount decreases and the chamber pressure tends to increase. That is, the exhaust amount of the processing chamber (2b) having a high set pressure is decreased and the exhaust amount of the processing chamber (2a) having a low set pressure is increased. Accordingly, immediately after the opening / closing door (3) is opened, the chamber pressure in the second processing chamber (2b) can be reliably maintained higher than the chamber pressure in the first processing chamber (2a). Therefore, an air flow (air flow) from the second processing chamber (2b) toward the first processing chamber (2a) can be reliably formed. That is, intrusion of air from the first processing chamber (2a) having a low importance (sterilization level) can be prevented in the second processing chamber (2b) having a high importance (sterilization level).

    If this control is not performed, immediately after opening of the open / close door (3), air temporarily flows from the second processing chamber (2b) to the first processing chamber (2a) due to the difference in the chamber pressure. It becomes an equilibrium state. Then, air may enter the first processing chamber (2a) from the second processing chamber (2b), and the sterilization state of the second processing chamber (2b) may be impaired. However, by performing the above control, the sterilization state of the second processing chamber (2b) can be reliably ensured.

    Next, if the open / close door (3) is still open after a certain period of time has elapsed since the open / close door (3) is opened, it corresponds to each of the first processing chamber (2a) and the second processing chamber (2b). The opening degree of the adjusting damper (41) is controlled based on the detected value of the pressure sensor (132). Specifically, the opening degree of the adjustment damper (41) is equal to or greater than a second predetermined amount (for example, 20% of the predetermined value) in which the deviation between the set pressure and the detected value of the pressure sensor (105) is greater than the first predetermined amount. Will be adjusted. In other words, the responsiveness of the opening control of the adjustment damper (41) based on the detection value of the pressure sensor (132) is delayed, and the adjustment damper (41) can be opened even if the chamber pressure in the processing chamber (2a, 2b) slightly increases or decreases. The degree was not changed.

    Here, a problem that occurs when the deviation from the set pressure remains at the first predetermined amount will be described. In a state where air flows from the second processing chamber (2b) to the first processing chamber (2a), the chamber pressure of the first processing chamber (2a) becomes higher than the first set pressure, and the second processing chamber (2b) The chamber pressure is lower than the second set pressure. Then, the opening degree of the adjustment damper (41) for the first processing chamber (2a) is increased, the chamber pressure of the first processing chamber (2a) is decreased, and the adjustment damper (2) for the second processing chamber (2b) 41) is decreased, and the chamber pressure in the second processing chamber (2b) is increased. However, even if a chamber pressure difference occurs, the flow velocity of air from the second processing chamber (2b) to the first processing chamber (2a) increases correspondingly, and the chamber pressures of both do not readily approach the set pressure. Therefore, the opening degree of the adjustment damper (41) in the first processing chamber (2a) is further increased, the opening degree of the adjustment damper (41) in the second processing chamber (2b) is further reduced, and finally the adjustment damper ( 41) is the minimum or maximum opening. When the open / close door (3) is closed in this state, the first processing chamber (2a) is in an excessive negative pressure state, and the second processing chamber (2b) is in an excessively high pressure state. As a result, fungi may enter the first processing chamber (2a), and the working environment is deteriorated in the second processing chamber (2b). Further, while the open / close door (3) is opened, an excessive air flow from the second processing chamber (2b) to the first processing chamber (2a) is generated, and the working environment is deteriorated. However, as in this embodiment, the opening degree of the adjustment damper (41) becomes extremely small or large while the opening / closing door (3) is opened by delaying the responsiveness of the opening control of the adjustment damper (41). Can be suppressed. As a result, immediately after the open / close door (3) is closed, an excessively high pressure or low pressure state in the processing chamber (2a, 2b) can be suppressed, and fungus intrusion and deterioration of the working environment can be suppressed. The longer the opening time of the open / close door (3), the greater the suppression effect.

    The room pressure control in the special mode described above is performed in the same manner when the open / close door (3) facing the outside is opened. For example, when the open / close door (3) facing the outside of the first processing chamber (2a) is opened, the opening degree of the adjustment damper (41) for the first processing chamber (2a) is reduced by several percent. Then, in the first processing chamber (2a), the exhaust amount increases and the chamber pressure tends to increase. Therefore, immediately after the opening / closing door (3) is opened, an air flow (air flow) discharged from the first processing chamber (2a) to the outside is surely formed. Thereby, invasion of fungi in the first processing chamber (2a) can be prevented, and a sterilized state can be secured. When a predetermined time elapses after the opening degree of the adjustment damper (41) decreases by several percent, the adjustment damper (41) for the first processing chamber (2a) is controlled based on the detection value of the pressure sensor (132). Is done. In this state, the opening degree of the adjustment damper (41) is gradually reduced to the minimum opening degree. However, since the control response of the adjustment damper (41) is delayed, it can be suppressed. Thereby, immediately after the opening / closing door (3) is closed, it is possible to suppress the first processing chamber (2a) from being in an excessively high pressure state, and it is possible to suppress deterioration of the working environment.

<PB single sterilization mode>
The mode switching unit (121) of the controller (120) can be appropriately switched to the PB single sterilization mode during steady operation.

    In the PB single sterilization mode, the sterilization operation is performed independently in the first processing chamber (2a) while the steady operation is performed in the second processing chamber (2b) and the third processing chamber (2c). For example, this mode is for performing sterilization processing on the equipment and the like carried into the first processing chamber (2a) from the outside. In this case, in order to surely sterilize the equipment, it is not necessary to simply supply the sterilization gas to the first processing chamber (2a), and it is important to distribute the sterilization gas to the gaps between the equipment. In this mode, special operation is performed in consideration of this point.

    Specifically, in this mode, the sterilization gas of the sterilization gas generator (81) is supplied only to the first processing chamber (2a), the concentration of hydrogen peroxide in the first processing chamber (2a) is set to the target concentration, Thereafter, the hydrogen peroxide concentration is maintained within a predetermined range (for example, target concentration −10% to target concentration + 10%) for a predetermined time. The target concentration is set to a higher concentration (for example, 800 ppm) than the target concentration (300 ppm) in the sterilization mode described above. This enhances the sterilization effect of the imported equipment.

    As shown in FIG. 9, in the PB single sterilization mode, the shutoff dampers (25, 42) of the first air supply passage (12) and the first exhaust passage (32) are set to the closed state from the steady mode state. Is done. Thereby, the first processing chamber (2a) is independent from the air conditioning system circuit (5). Further, in the sterilization system circuit (50), the shut-off dampers (68, 79, 94) of the fourth sterilization gas supply path (68) and the sterilization gas discharge path (69) are set in the open state. In this state, the outside air processing air conditioner (91), the temperature / humidity adjustment unit (114) and the hydrogen peroxide generation unit (110) in the sterilization gas generator (81), the sterilization gas supply fan (89) and the sterilization gas exhaust fan ( 87) is driven.

    In the above state, the temperature and humidity of the air supplied from the outside air treatment air conditioner (91) to the sterilization gas generator (81) are adjusted by the temperature / humidity adjustment unit (114), and the hydrogen peroxide generation unit (110) Hydrogen peroxide gas is applied from the sterilization gas to become a sterilization gas. Here, as a feature of this operation, the amount of hydrogen peroxide gas applied to the air from the hydrogen peroxide generating part (110) is larger than that in the sterilization mode described above. That is, the concentration of the hydrogen peroxide gas in the sterilization gas generated by the sterilization gas generator (81) is higher than that in the sterilization mode described above.

    The sterilization gas of the sterilization gas generator (81) flows through the sterilization gas supply path (53, 54, 55) to the first supply air flow path (12), and passes through the constant air volume device (26) and the HEPA filter (27). It passes through and is supplied to the first processing chamber (2a). The air in the first processing chamber (2a) is discharged to the first exhaust passage (32) and the PB circulation passage (95). The air discharged to the first exhaust flow path (32) flows to the sterilization gas discharge path (69), and after the hydrogen peroxide is decomposed and removed by the hydrogen peroxide decomposer (83), it is discharged outside the room. The air discharged to the PB circulation flow path (95) flows to the mixing box (88) and is mixed with the sterilization gas from the sterilization gas generator (81). The mixed sterilization gas (air) is again supplied from the first air supply channel (12) to the first processing chamber (2a), and this circulation is repeated. The sterilization operation ends when the hydrogen peroxide concentration in the first processing chamber (2a) reaches the target concentration (800 ppm) and is operated for a predetermined time while maintaining the target concentration. During this operation, the sterilization control unit (122) controls the first exhaust flow path (32) so that the chamber pressure of the first processing chamber (2a) becomes a set pressure (micro positive pressure: 15 to 20 Pa). ) Of the adjustment damper (41) is controlled.

    In this operation, the sterilization gas supply fan (89) is controlled such that a larger amount of sterilization gas is supplied to the first processing chamber (2a) than in the above-described steady mode and sterilization mode. And most of the supplied sterilization gas is discharged | emitted to the circulation flow path (95) for PB. That is, the amount of ventilation of the sterilizing gas increases in the first processing chamber (2a). By the ventilation action of the sterilization gas having a high concentration and a large air volume, the sterilization gas surely reaches the gaps between the equipments, and the sterilization effect is enhanced.

    Further, in this operation, the sterilization gas supply fan (89) is operated intermittently rather than continuously. That is, the sterilization gas supply fan (89) is repeatedly operated and stopped at a large air flow rate every predetermined time. Thereby, in the 1st processing chamber (2a), sterilization gas is intermittently supplied and pulsation of sterilization gas arises. Due to this pulsation effect, diffusion of sterilization gas in the first processing chamber (2a) is promoted. Therefore, the sterilization effect is further enhanced.

    Further, by promoting the diffusion of the sterilizing gas, the hydrogen peroxide concentration in the first processing chamber (2a) quickly reaches the target concentration. Therefore, since the first processing chamber (2a) is frequently loaded with equipment and the like, it is necessary to frequently perform sterilization operation. However, the operation can be completed in a short time, and the frequent operation is troublesome. Can be eliminated.

    In this embodiment, the sterilization gas is circulated by the PB circulation channel (95). That is, in the first processing chamber (2a), a part of the sterilization gas hydrogen peroxide gas is decomposed and discharged to the sterilization gas discharge passage (69), but the remaining hydrogen peroxide gas is discharged into the PB circulation passage. (95) is supplied again to the first processing chamber (2a). Therefore, the amount of sterilization gas generated in the sterilization gas generator (81) and the amount of outside air taken up in the outside air treatment air conditioner (91) are reduced by the amount of sterilization gas circulation through the PB circulation channel (95). I'm sorry. As a result, low-cost operation is possible.

    Although not shown, a preparatory operation corresponding to the above-described preparatory mode is performed before this sterilization operation. This preparatory operation is performed in the same state as the sterilization operation except that the hydrogen peroxide generator (110) of the sterilization gas generator (81) is stopped. In other words, in order to enhance the effect of the sterilization operation, air whose temperature and humidity are adjusted by the temperature / humidity adjusting unit (114) of the sterilization gas generator (81) is supplied to the first processing chamber (2a), and the first processing chamber is supplied. The temperature and relative humidity of (2a) are set to target values (25 ° C., 20%). Although not shown, after the sterilization operation is completed, a dilution operation corresponding to the first and second dilution modes described above is performed. This dilution operation is performed in the same state as in the preparation operation. When this dilution operation is completed, the operation of the sterilization system circuit (50) is stopped and the shutoff dampers (25, 42) of the first air supply passage (12) and the first exhaust passage (32) are opened. The state is set, and the steady operation is returned to the first processing chamber (2a).

-Effect of the embodiment-
As described above, according to the present embodiment, the fourth sterilization gas supply path (68) dedicated to the first processing chamber (2a) is provided to supply the high concentration hydrogen peroxide gas. The concentration of hydrogen peroxide gas in only one processing chamber (2a) can be increased. Therefore, the hydrogen peroxide gas can be diffused throughout the first processing chamber (2a) without affecting the other processing chambers (2b, 2c). Thereby, hydrogen peroxide gas can be spread over the details of the equipment, and the sterilization effect of the equipment can be enhanced. As a result, it is possible to reliably prevent contamination of the other processing chambers (2b, 2c) due to the introduction of equipment.

    Furthermore, in this embodiment, since the ventilation amount of the sterilizing gas in the first processing chamber (2a) is increased from that in the normal sterilization mode, the hydrogen peroxide gas in the first processing chamber (2a) is caused by this ventilation action. Can be promoted. As a result, the sterilization effect of the equipment can be further enhanced.

<< Other Embodiments >>
About the said embodiment, it is good also as the following structures.

    For example, in the above-described embodiment, the case where there are three processing chambers (2a, 2b, 2c) has been described, but the present invention is also applied to the case where there are two or four or more chambers.

    In addition, the above embodiment is an essentially preferable illustration, Comprising: It does not intend restrict | limiting the range of this invention, its application thing, or its use.

    As described above, the present invention is useful as a sterilization system that sterilizes a plurality of processing chambers arranged in parallel.

It is a piping system figure showing the whole sterilization system composition concerning an embodiment. It is a block diagram which shows the structure of the sterilization gas generator which concerns on embodiment. It is a piping system diagram which shows the air flow at the time of preparation mode. It is a piping system diagram which shows the air flow at the time of adjustment mode. It is a piping system diagram which shows the air flow at the time of sterilization mode. It is a piping system figure showing the air flow at the time of the 1st dilution mode. It is a piping system diagram which shows the air flow at the time of the 2nd dilution mode and a steady mode. It is a piping system diagram which shows the air flow at the time of a single operation. It is a piping system diagram which shows the air flow at the time of PB independent sterilization mode.

Explanation of symbols

1 Sterilization system
50 Sterilization system circuit
52 Sterile gas supply main channel (supply channel)
57 Sterile gas return main channel (discharge channel)
68 Fourth sterilization gas supply path (Supply path dedicated to the first processing chamber)
89 Sterile gas supply fan (supply fan)
95 PB circulation channel (circulation channel)
110 Hydrogen peroxide generator
2a, 2b, 2c processing chamber

Claims (4)

A hydrogen peroxide generator (110) for generating hydrogen peroxide gas is provided, and the hydrogen peroxide in the hydrogen peroxide generator (110) is disposed in parallel with respect to a plurality of processing chambers (2a, 2b, 2c) arranged in parallel. A sterilization system comprising a sterilization system circuit (50) for performing sterilization of a processing chamber (2a, 2b, 2c) by supplying and discharging gas,
The sterilization system circuit (50) includes a supply channel (52) that distributes and supplies the hydrogen peroxide gas from the hydrogen peroxide generation section (110) to the treatment chambers (2a, 2b, 2c), and each treatment. A discharge channel (57) through which the hydrogen peroxide gas discharged from the chamber (2a, 2b, 2c) joins,
The sterilization system circuit (50) supplies the hydrogen peroxide gas of the hydrogen peroxide generation part (110) only to the first processing chamber (2a) among the plurality of processing chambers (2a, 2b, 2c), And the supply path (68) for exclusive use of the 1st processing chamber in which the concentration of the hydrogen peroxide gas is higher than the concentration of the hydrogen peroxide gas supplied to the 1st processing chamber (2a) from the supply channel (52). A sterilization system comprising: In claim 1,
The discharge channel (57) is configured so that the combined hydrogen peroxide gas is discharged to the outside,
In the sterilization system circuit (50), the hydrogen peroxide gas in the first processing chamber (2a) is separated from the flow path for the hydrogen peroxide gas discharged from the first processing chamber (2a) to the discharge flow path (57). A sterilization system comprising a circulation flow path (95) for discharging the gas and returning it to the first processing chamber dedicated supply path (68). In claim 1 or 2,
A supply fan (89) for intermittently supplying the hydrogen peroxide gas from the hydrogen peroxide generator (110) to the first processing chamber (2a) is provided in the first processing chamber dedicated supply path (68). A sterilization system characterized in that In any one of Claims 1 thru | or 3,
The first processing chamber (2a) is a sterilization system characterized in that it is a processing chamber for performing sterilization processing on equipment carried from outside.

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