JP2014087761A - Dry room system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dry room system in which intrusion of the outside moisture is small, a dew point can be kept low, and energy consumption is small.SOLUTION: A dry room system includes a dehumidifier including a desiccant rotor 4. Dry air leaving an adsorption zone 7 of the dehumidifier is supplied into the dry room 17, and the air in the dry room 17 is returned to the adsorption zone 7 and a purge zone 5 of the dehumidifier through a damper 21 for flow control. The air leaving the purge zone 5 is, after passing a regeneration zone 6 of the dehumidifier, let pass through a regeneration zone 3 of the dehumidifier and is discharged outside. The outside air is let pass through an adsorption zone 2 of the dehumidifier and is put into the adsorption zone 7 of the dehumidifier together with the circulating air in the dry room 17. Furthermore, a pressure inside the dry room 17 is set slightly higher than the outside pressure, so that any part of the dry room has a positive pressure.

Description

  The present invention relates to a drying chamber apparatus that can easily maintain a high degree of dryness and maintain a low carbon dioxide concentration.

  A room (hereinafter referred to as a “drying room”) in which dry air is produced by a dehumidifier using a honeycomb rotor carrying a moisture adsorbent such as silica gel or zeolite and sent to a sealed room (hereinafter referred to as “drying room”) is a lithium battery (on the electrode). Primary batteries and secondary batteries that use lithium) are used in the production and experimentation of organic electroluminescence (organic EL) or certain chemicals that do not like humidity. In the case of experiments and production of lithium batteries, dry air having a dew point of minus 40 degrees (in the following description, all temperatures are in degrees Celsius) or less is required.

  As such a drying room, what is called a dry room (registered trademark) that allows people to enter inside, and a glove that is operated inside by inserting a hand through a glove from the outside rather than the size that a person can enter There is what is called a box.

  In both cases, if the outside air inadvertently enters, there is a problem that the dew point of the indoor air easily rises. For this reason, as shown in Patent Document 1, there is one in which the indoor pressure is set higher than the outside air pressure so that the outside air does not enter the inside.

  Further, since lithium is converted into lithium carbonate by carbon dioxide in the air, it is desirable to remove carbon dioxide from experiments accompanying the development of lithium batteries and environments where mass production of lithium batteries is performed. For this reason, it is conceivable to use an apparatus that removes carbon dioxide while performing dehumidification as disclosed in Patent Document 2.

Japanese Patent Laid-Open No. 11-094299 JP 2002-126438 A

  Problems to be solved are that moisture cannot be prevented from entering the room and that the atmospheric pressure in the room cannot be set to a desired value while removing carbon dioxide from the room.

  That is, as disclosed in Patent Document 1, even if the indoor pressure is set higher than the outside air so that the outside air does not enter the room, there is a problem that moisture enters from the outside. That is, if the indoor pressure is made higher than the outside air, a clearance is generated in the door, window, and other parts in order to release the pressure, and the indoor air leaks through the clearance. If there is no gap, the pressure in the room will rise, so this gap is essential. The gap causes air to flow from the inside to the outside. Despite this air flow, moisture diffuses along the wall surface of the gap, and moisture enters the room from the outside.

  In other words, moisture (water molecules) moves along the wall surface from the higher humidity to the lower humidity, so it can penetrate even with a small gap. Even if there is a flow of air in the gap opposite to the moving direction of moisture, there is a problem that the moisture moves against the flow. This is because moisture moves along the wall surface, so that even if there is an air flow in the direction opposite to the moving direction, the air flow cannot prevent the moisture from moving. This movement of moisture is not generally known, and is hereinafter referred to as “back diffusion”.

  Further, according to the apparatus shown in Patent Document 2, while the regeneration air of the dehumidification rotor is released to the outside, the dehumidification air is supplied to the room, so it is extremely difficult to keep the atmospheric pressure slightly positive from the outside. Met. In other words, in order to maintain the indoor pressure at a predetermined value, a pressure sensor is provided, and the operation of the blower is controlled according to the output of this sensor. The blower has a motor and a fan, and the rotating object Due to the inertia, the response to control is poor.

  The present invention has a dehumidifier, supplies dry air that has exited the adsorption zone of the dehumidifier into the room, and returns the indoor air to the adsorption zone and the purge zone of the dehumidifier via the flow control damper, and passes through the purge zone. The exhaust air passes through the regeneration zone of the dehumidifier and is released to the outside, and the outside air enters the adsorption zone of the dehumidifier along with the indoor return air, and does not control the rotation of the blower. The main feature is that the air pressure in the drying chamber is kept slightly positive from the outside. Here, the slight positive pressure is 10 Pa to 30 Pa as a specific numerical value. With such a positive pressure, no negative pressure is generated near the return air outlet for returning air from the drying chamber, that is, the pressure is as small as possible within a range where no negative pressure is generated in any part of the drying chamber. That is, it is set so that no negative pressure is generated in any part, and is set so as to be the lowest pressure in this state. By doing so, air is prevented from coming out while the gaps between the doors and windows are expanded by positive pressure. Hereinafter, this level of positive pressure is defined as “slight positive pressure”.

  In the drying chamber apparatus of the present invention, the amount of air supplied to the room and the amount of return air from the room are equalized by the above configuration. For this reason, since indoor air is not exhausted from a gap or the like, and external moisture does not enter through reverse diffusion from a portion that is opened along with exhaust, there is an advantage that the dew point can be kept low. In other words, if the pressure of room air is high, the room air leaks outside while widening the gaps between the doors and windows. Moisture back-diffusion occurs through the gap created by this spreading.

  Further, since the indoor return air is dehumidified and then returned to the room again, there is little mixing with the outside air, and carbon dioxide contained in the outside air is less likely to enter. In particular, when a synthetic zeolite having an action of adsorbing carbon dioxide with moisture is used as a dehumidifying rotor of a dehumidifier, carbon dioxide is also adsorbed together with moisture and can be released to the outside. This has the advantage that the carbon dioxide concentration in the room decreases. When there is a person in the room, oxygen is reduced, but oxygen is about 20% in the air, and oxygen lost by human metabolism is negligible.

  Thus, by keeping the atmospheric pressure in the room slightly positive from the outside, it is possible to prevent back diffusion of moisture from the outside and to further reduce the carbon dioxide concentration. Thus, the lithium battery is not adversely affected, particularly when the lithium battery is tested or produced.

  In addition, by keeping the atmospheric pressure slightly positive from the outside, the air pressure in the vicinity of the return air outlet of the indoor air does not become negative, and external air does not enter due to this negative pressure. . Therefore, the dehumidifying load can be minimized. In other words, it is possible to prevent moisture from entering from outside by controlling the damper provided in the return air passage so that the positive pressure is as low as possible without causing negative pressure in any part of the drying chamber. .

FIG. 1 is a flowchart showing Example 1 of the drying chamber apparatus of the present invention. FIG. 2 is a flowchart showing Example 2 of the drying chamber apparatus of the present invention.

  The present invention has a dehumidifier, supplies the dry air that has exited the adsorption zone of the dehumidifier into the room, and returns the indoor air to the adsorption zone and the purge zone of the dehumidifier via the flow control damper. The air that has passed passes through the regeneration zone of the dehumidifier and is released to the outside, and the outside air passes through the adsorption zone of the dehumidifier and enters the adsorption zone of the dehumidifier together with the return air in the room. By keeping the pressure in the drying chamber slightly positive, the purpose of preventing back diffusion and maintaining the indoor environment at a low dew point has been realized by realistic means.

  A first embodiment of the present invention will be described with reference to FIG. Reference numeral 4 denotes a dehumidifying rotor, which is a honeycomb body on which a moisture adsorbent such as silica gel or zeolite is supported. The dehumidifying rotor 4 is divided into a purge zone 5, a regeneration zone 6, and an adsorption zone 7, with a division ratio of 1: 1: 3, and an air volume ratio passing through each zone is 1: 1: 4.

  A filter 8 removes dust from the outside air. 11 is a damper, which adjusts the amount of outside air. Reference numeral 12 denotes a precooler that cools outside air, and is supplied with a refrigerant from the refrigerator 13. Reference numeral 14 denotes a blower that allows outside air to pass through the filter 8, the damper 11, the precooler 12, and the adsorption zone 7 by the suction force. Further, the discharge side of the blower 14 is branched into two, one of which sends air to the adsorption zone 7 of the dehumidifying rotor 4 and the other to the purge zone 5.

  Reference numeral 15 denotes an aftercooler, which cools dry air that has left the adsorption zone 7 and has risen in temperature, and is supplied with refrigerant from the refrigerator 13. Reference numeral 16 denotes an after heater, which is provided to supply the air cooled by the after cooler 15 to the drying chamber 17 at a desired temperature.

  Here, although it seems to be useless to heat the cooled air, it is due to the following reason. That is, the cooler that evaporates the refrigerant and cools the air has to adjust the flow rate of the refrigerant with the valve in order to adjust the temperature, and fine adjustment is difficult. On the other hand, when an electric heater is used as a heater, a device for finely interrupting current using a thyristor is generally marketed, and temperature adjustment can be finely performed.

  Reference numeral 18 denotes a regenerative heater that heats the air that has exited the purge zone 5, thereby increasing the temperature of the air sent to the regenerative zone 6. Reference numeral 20 denotes an exhaust blower that discharges air that has passed through the regeneration zone 6 to the atmosphere.

    As described above, the drying chamber apparatus of the present invention is configured, and the dew point of the air in the drying chamber 17 is kept at about minus 40 degrees. When the dehumidifying rotor 4 uses synthetic zeolite having carbon dioxide adsorbing action as the moisture adsorbent of the dehumidifying rotor 4, the carbon dioxide concentration in the drying chamber 17 gradually decreases. That is, the air in the drying chamber 17 returns to the drying chamber 17 again through the damper 21, the precooler 12, the blower 14, the adsorption zone 7, the aftercooler 15, and the afterheater 16. Therefore, carbon dioxide is adsorbed in the adsorption zone and gradually released to the outside.

  When the pressure in the drying chamber 17 reaches a predetermined value, that is, 10 Pa to 30 Pa or more, when the damper 21 is opened, the suction port of the blower 14 is connected to the outlet side of the precooler 12 and the damper is connected to the inlet side of the precooler 12. Since 21 is connected, this part is always a negative pressure, and the air in the drying chamber 17 is sucked out via the damper 21, and the pressure in the drying chamber 17 decreases. Conversely, when the pressure in the drying chamber 17 becomes lower than the predetermined value, the pressure in the drying chamber 17 increases due to the discharge pressure of the blower 14 by closing the damper 21.

  When it is desired to increase the amount of air passing through the regeneration zone 6, the degree of opening of the damper 11 is increased, and in the opposite case, the degree of opening of the damper 11 is decreased. In this way, the pressure in the drying chamber 17 and the amount of air passing through the regeneration zone 6 can be adjusted. The dew point of the air in the drying chamber 17 can be adjusted.

  The carbon dioxide adsorption action of synthetic zeolite is generally weaker than the moisture adsorption action, but the air entering the adsorption zone 7 is a mixture of the return air from the drying chamber 17 and the outside air and condensed and dehumidified by a precooler. Therefore, carbon dioxide is effectively adsorbed because of low humidity.

  Moreover, since the atmospheric pressure inside the drying chamber 17 can be kept slightly positive by the damper 11 and the damper 21 as described above, it is not exhausted through the gap from the drying chamber 17 or outside air does not enter. . For this reason, the gap does not widen due to the entry and exit of air, and moisture does not enter due to reverse diffusion. As a result, the dew point of the air in the drying chamber 17 can be kept low, and energy is not expended in eliminating moisture that has entered from the outside, resulting in energy saving.

  Here, when the door of the drying chamber 17 is open, if the door is opened to allow a person to enter the drying chamber 17, the pressure in the drying chamber 17 may be a negative pressure for a short time. . In this case, external air enters through the gap, and the dew point of the air in the drying chamber 17 rises. However, the pressure in the drying chamber 17 is maintained at a slightly positive pressure, and the entry of air from the outside is suppressed.

  The air in the drying chamber 17 is sucked into the blower 14 through the damper 21. That is, there is a possibility that the vicinity of the return air opening of the drying chamber 17 may be negative pressure, but the negative pressure is maintained by the slight positive pressure described above. Thus, even if there is a window or the like in the vicinity of the return air port, external air does not enter from the gap between the window frame and the glass.

  The drying chamber 17 is provided with an emergency release valve (not shown). For example, when the pressure in the drying chamber 17 becomes minus 5 Pa or less due to a failure of the damper 21 or when the pressure becomes 105 Pa or more. In the meantime, this valve is activated and the drying chamber 17 is opened.

  Of the air sent to the drying chamber 17, the air not from circulation but from the outside becomes equal to the amount of air passing through the purge zone 5, that is, the amount of air passing through the regeneration zone 6. As the number of people in the drying chamber 17 increases, the required amount of oxygen increases and the release of moisture also increases. In this case, increasing the output of the blower 20 and increasing the amount of air passing through the purge zone 5 increases the amount of outside air introduced and increases the supply of oxygen, and the regeneration of the dehumidifying rotor 4 also proceeds. The humidity in 17 is also maintained.

  A second embodiment of the present invention will be described with reference to FIG. Here, the same components as those in the first embodiment are given the same numbers, and redundant descriptions are omitted. In the second embodiment, the first-stage dehumidifying device is added to the first embodiment so that air having a lower dew point can be supplied.

  Reference numeral 1 denotes a first dehumidifying rotor, which is a honeycomb body carrying a moisture adsorbent such as silica gel or zeolite. Further, the dehumidification rotor 1 is divided into an adsorption zone 2 and a regeneration zone 3, and the division ratio and the air volume ratio are 1: 1. Reference numeral 4 denotes a second dehumidifying rotor, which is also a honeycomb body on which a moisture adsorbent such as silica gel or zeolite is supported. The dehumidifying rotor 4 is divided into a purge zone 5, a regeneration zone 6, and an adsorption zone 7, and the division ratio and the air volume ratio are 1: 1: 6.

  A filter 8 removes dust from the outside air. Reference numeral 9 denotes a precooler that cools the outside air with the refrigerant from the refrigerator 10. Reference numeral 11 denotes a damper that adjusts the amount of air exiting the adsorption zone 7. Reference numeral 12 denotes a precooler (intercooler) that cools dry air that has exited the adsorption zone 2 and has risen in temperature, and is supplied with refrigerant from the refrigerator 13.

  Reference numeral 14 denotes a blower that allows outside air to pass through the filter 8, the precooler 9, the suction zone 2, the damper 11, the precooler (intercooler) 12, and the suction zone 7 by the suction force. Further, the discharge side of the blower 14 is branched into two, one of which sends air to the adsorption zone 7 of the dehumidifying rotor 4 and the other to the purge zone 5.

  Reference numeral 15 denotes an aftercooler, which cools dry air that has left the adsorption zone 7 and has risen in temperature, and is supplied with refrigerant from the refrigerator 13. Reference numeral 16 denotes an after heater, which is provided to supply the air cooled by the after cooler 15 to the drying chamber 17 at a desired temperature.

  Here, although it seems to be useless to heat the cooled air, it is due to the following reason. That is, the cooler that evaporates the refrigerant and cools the air has to adjust the flow rate of the refrigerant with the valve in order to adjust the temperature, and fine adjustment is difficult. On the other hand, when an electric heater is used as a heater, a device for finely interrupting current using a thyristor is generally marketed, and temperature adjustment can be finely performed.

  Reference numeral 18 denotes a regenerative heater that heats the air that has exited the purge zone 5, thereby increasing the temperature of the air sent to the regenerative zone 6. The temperature of the air leaving the regeneration zone 6 decreases due to heat of desorption, and the humidity increases. This air is heated by the regenerative heater 19, and the air whose temperature has risen decreases in relative humidity and is sent to the regeneration zone 3 of the dehumidification rotor 1 of the preceding stage dehumidifier.

  The moisture adsorbed on the dehumidifying rotor 1 is desorbed by the air sent to the regeneration zone 3. After leaving the regeneration zone 3, the air whose temperature has decreased and humidity has been increased is discharged to the outside by the blower 20.

  21 is a damper which adjusts the amount of air which returns the return air from the drying chamber 17 to the front of the precooler 12. The damper 21 is adjusted to keep the pressure in the drying chamber slightly positive. Here, when the drying room is in the clean room, the pressure is set slightly higher than the room pressure of the clean room.

  As described above, the dehumidifier of Example 2 is configured in two stages, a front stage and a rear stage. Therefore, it is not necessary to make the dew point of the air exiting the adsorption zone 2 of the front-stage dehumidifier so low, but rather the dehumidification rotor 1 of the front-stage dehumidifier can effectively perform dehumidification even when the temperature of the regeneration air is low and save energy. The split ratio and the air volume ratio between the adsorption zone 2 and the regeneration zone 3 are 1: 1. Further, the latter-stage dehumidifier needs to lower the dew point of the adsorption zone 7 outlet air, and the air volume ratio of the purge zone 5, the regeneration zone 6 and the adsorption zone 7 of the dehumidification rotor 4 of the latter-stage dehumidifier is 1: 1: 6. The dew point temperature is lowered. As a result of the experiment, the dew point of the air in the drying chamber 17 is kept at about minus 80 degrees.

  When the pressure in the drying chamber 17 is higher than the outside, when the damper 21 is opened, the suction port of the blower 14 is connected to the outlet side of the precooler (intercooler) 12 and the inlet side of the precooler (intercooler) 12 is connected. Since the damper 21 is connected to this, this portion is always at a negative pressure, and the air in the drying chamber 17 is sucked out through the damper 21. Conversely, when the pressure in the drying chamber 17 becomes lower than the outside, the pressure in the drying chamber 17 increases due to the discharge pressure of the blower 14 by closing the damper 21.

  In order to increase the amount of air passing through the regeneration zone 4 and the regeneration zone 3, the degree of opening of the damper 11 is increased, and in the opposite case, the degree of opening of the damper 11 is decreased. In this way, the pressure in the drying chamber 17 and the amount of air passing through the regeneration zone 6 and the regeneration zone 3 can be adjusted.

  The carbon dioxide adsorption action of the synthetic zeolite is generally weaker than the moisture adsorption action, but the air entering the adsorption zone 7 passes through the return air from the drying chamber 17 and the adsorption zone 2 of the dehumidifying rotor 1. Since the humidity is low, carbon dioxide is effectively adsorbed.

  Moreover, since the atmospheric pressure inside the drying chamber 17 can be kept slightly positive by the damper 11 and the damper 21 as described above, it is not exhausted through the gap from the drying chamber 17 or outside air does not enter. . For this reason, the gap does not widen due to the entry and exit of air, and moisture does not enter due to reverse diffusion. As a result, the dew point of the air in the drying chamber 17 can be kept low, and energy is not expended in eliminating moisture that has entered from the outside, resulting in energy saving. Hereinafter, despreading will be described using a calculation formula. That is, it can be hypothesized that if the pressure in the drying chamber 17 is extremely high and the flow rate of the drying air flowing out from the gap is extremely high, back diffusion does not occur. In this case, the flow rate at which the reverse diffusion does not occur is determined by calculation.

First, air (component A) is (-v) in the gap of thickness (z ₂ -z ₁ ) separating the outside of the drying chamber 17 (z = z ₁ ) and the inside of the drying chamber 17 (z = z ₂ ). ) It is assumed that the air is blown out from the drying chamber 17 to the outside of the drying chamber 17 at a speed of [m / s]. (If the direction from the outside of the drying chamber 17 into the drying chamber 17 is positive, v itself is a negative value). The velocity N _Bz [mol / m ² .s] at which moisture (B) diffuses from the outside of the drying chamber 17 (molar fraction x _B1 ) to the inside of the drying chamber 17 (molar fraction x _B2 ) against this flow is determined.

When the total molarity is c [mol / m ³ ] and the diffusion coefficient is D [m ² / s], the diffusion rate N _z across the fixed coordinate is expressed by Equation 1 and Equation 2 according to Fick's law. . Here, Equation 1 represents the diffusion rate of air A, and Equation 2 represents the diffusion rate of moisture.

Strictly speaking, the sum of the diffusion rates of air and moisture can be expressed by Equation 3 using the average number of molecules v * of the mixture.

However, when a low molar fraction x _B of the solute, velocity v * is the average number of molecules, it is approximated by the weight average speed (so-called normal wind velocity) v, so the number 4.

Substituting Equation 4 into Equation 1, Equation 1 can be expressed as Equation 5 below.

When the above equation (5) is rewritten, it becomes a typical linear differential equation as shown in equation (6).

When the terms of Equation 6 are multiplied by the Equation 7 integration factor, the following Equation 8 is obtained.

When this equation 8 is integrated, the following equation 9 is obtained.

That is, it can be expressed by Equation 10.

When the boundary conditions of Equations 11 and 12 are substituted into Equation 10, Equations 13 and 14 are obtained.

Here, the diffusion rate is obtained as shown in Equation 15.

Here, Pe is defined as in Expression 16. This is a dimensionless parameter called the Beckley number or the Peclet number.

The Beckley number represents the relative importance of the convection velocity carried by the flow velocity (-v) and the molecular diffusion rate. Similarly, the diffusion rate of moisture (solute) B can be expressed by Equations 17 and 18.

The right side of Equation 17 represents the contribution of molecular diffusion, and Equation 18 represents the contribution of convection. For pure molecular diffusion with a flow rate = 0, Equation 19 is obtained.

If the ratio between this value and the diffusion rate of moisture is defined as the diffusion rate ratio Y, this can be expressed as in Equation 20 and Equation 21.

By substituting Equation 15 into Equations 12 and 13, and rearranging it with respect to the mole fraction X _A , a spatial distribution of mole fractions in the voids is obtained as in Equations 22 and 23.

Here, Z is defined by a dimensionless space coordinate, as shown in Equation 24. Here, Z = 0 indicates the outside of the drying chamber 17, and Z = 1 indicates the inside of the drying chamber 17.

  The ratio of back diffusion to the rate of pure molecular diffusion is defined by Y in Formula 20, and this value is a function of only the Peclay number Pe. When Pe is 0.5 or less, the value of Y is close to 1 due to molecular diffusion control, and the influence of the flow velocity v hardly appears. On the other hand, when Pe is 5 or more, Y decreases rapidly and the effect of the flow velocity v becomes significant. Therefore, the reverse diffusion from the outside of the drying chamber 17 can be prevented by setting the flow velocity v so that Pe becomes 5 or more.

  That is, the reverse diffusion from the outside of the drying chamber 17 can be prevented by setting the flow velocity v so that Pe is 5 or more in every gap in the drying chamber 17. For this reason, if reverse diffusion is prevented by increasing the pressure in the drying chamber 17, it can be seen that a large amount of dry air flows out from the gap and is a waste of energy. Therefore, in the present invention, the packing that maintains the airtightness of the windows and doors of the drying chamber 17 is set to a pressure just before the outside is deformed outward by the pressure in the drying chamber 17 and is set to a positive pressure that can maintain the airtightness of the packing.

  Whether to employ the above-described example 1 or 2 depends on the cost, the humidity load in the drying chamber 17, and the required dew point temperature in the drying chamber. That is, when there are many workers in the drying chamber 17 or when the dew point temperature in the drying chamber is lowered, the one of Example 2 having a high dehumidifying capacity is adopted. On the contrary, when the humidity load is small, the one of the first embodiment with lower cost may be adopted.

  It can be applied to a drying room apparatus that supplies dry air to maintain the indoor environment at a negative dew point, and in that, manufacture of products that hate humidity and development experiments can be performed.

DESCRIPTION OF SYMBOLS 1 Dehumidification rotor 2 Adsorption zone 3 Regeneration zone 4 Dehumidification rotor 5 Purge zone 6 Regeneration zone 7 Adsorption zone 8 Filter 9 Precooler 10 Refrigerator 11 Damper 12 Precooler 13 Refrigerator 14 Blower 15 After cooler 16 After heater 17 Drying chamber 18 Regeneration heater 19 Regenerative heater 20 Blower 21 Damper

Claims (5)

  It has a dehumidifier and supplies dry air that has exited the adsorption zone of the dehumidifier into the room, and returns the room air to the adsorption zone and purge zone of the dehumidifier via the flow control damper, and the air that has passed through the purge zone It passes through the regeneration zone of the dehumidifier and is released to the outside, and the outside air enters the adsorption zone of the dehumidifier together with the indoor return air, and the air pressure in the drying chamber is adjusted by the flow control damper to the drying chamber. A drying chamber apparatus characterized in that all parts are maintained at a positive pressure and a pressure as low as possible.   The drying chamber apparatus according to claim 1, wherein the dehumidification rotor is divided into a purge zone, a regeneration zone, and an adsorption zone, and the air flow ratio is 1: 1: 4.   It has a front-stage dehumidifier and a rear-stage dehumidifier, supplies dry air that has exited the adsorption zone of the rear-stage dehumidifier into the room, and supplies the indoor air through the flow control damper to the adsorption zone and purge of the rear-stage dehumidifier After returning to the zone, the air that has passed through the purge zone passes through the regeneration zone of the second-stage dehumidifier, passes through the regeneration zone of the first-stage dehumidifier, and is released to the outside. Passes through the adsorption zone and enters the adsorption zone of the subsequent dehumidifier together with the return air in the room, and the flow control damper causes the pressure in the drying chamber to be positive at any part of the drying chamber and as low as possible. A drying chamber apparatus characterized by being maintained so as to become.   4. The drying chamber apparatus according to claim 3, further comprising a damper that adjusts a flow rate of air that has passed through an adsorption zone of a dehumidifier at a subsequent stage.   The dehumidification rotor of the first-stage dehumidifier is divided into an adsorption zone and a regeneration zone, and the air volume ratio is 1: 1, and the second dehumidification rotor is divided into a purge zone, a regeneration zone, and an adsorption zone, and the air volume ratio is 4. The drying chamber apparatus according to claim 3, wherein the ratio is 1: 1: 6.

Images