TWI358519B - - Google Patents

Description

[Technical Field] The present invention relates to a gas processing unit attached to a heat treatment unit for heat-treating a material to be heat-treated. [Prior Art]

The heat treatment apparatus is heated in the heat treatment chamber while the air in the heat treatment chamber is prevented from being circumvented, whereby the heat-treated material accommodated in the heat treatment chamber is heat-treated. Such a heat treatment device is used, for example, in a manufacturing process of a flat panel display (FPD. Flat Display Panel) for pre-bake and post-baking of a photoresist or an organic film. When the heat-treated material such as a glass substrate is subjected to heat treatment, the volatile component contained in the photo-etching material is vaporized, and a large amount of sublimate is generated, and there is a problem that the above-mentioned rise (four) recrystallization is scattered or adhered to the heat treatment apparatus. In order to solve the above problem (4), for example, Japanese Patent Laid-Open Publication No. 141868 discloses that the external air is heated and sent into the above-mentioned 埶 processing chamber, ./± ^ ^ ^ , ... 蜒While the air in the heat treatment chamber is drained through the discharge pipe, the heat treatment chamber is ventilated in the heat treatment chamber. Thus, the heat treatment chamber can suppress the recrystallization of the sublimate and adhere to the heat treatment device. ^ ~ 141868 The heat exchanger of the present invention and the heat treatment device for the purpose of heating, and in the Japanese Patent Laid-Open Publication No. Gas in the inner and outer loop of the heat treatment chamber of the drum 2014-9696-pp 5 - treatment of σ 卩 and heat treatment part _ body is placed in the outer wall of the heat treatment section and heat treatment 1 this is present if the gas treatment part of the blower or the heating thief electric The failure of the equipment is a problem that the heat treatment operation cannot be performed before the repair is completed. [Disclosure] It is an object of the present invention to provide a gas treatment unit that can solve the above problems. The heat treatment material (4) treatment portion is provided as a gas treatment unit, which is provided with a gas processing unit having a plurality of electrical equipment such as a machine or a heater, and is attached to a heat chamber having a heat treatment chamber, jy τ 〇Ό an early 70, even if The electrical equipment such as a blower or a heater is faulty, and the fault condition can be quickly treated. The present invention provides a gas processing unit attached to a heat treatment unit having a heat treatment chamber for accommodating the quilt and the lining 'The heat-treated material contained in the house can be taken out from the heat treatment chamber; and the gas introduction portion and the gas outlet portion are divided into The gas processing unit includes: a gas passage having an inlet pipe detachably connected to the gas introduction portion through the first connection I5, and detachably connected to the gas outlet portion through the first connection portion. a gas passage for introducing a heat treatment gas into the gas introduction portion, and deriving a gas from the gas discharge portion; the catalyst 'decomposing a rugby contained in the gas derived from the gas discharge portion' The sublimate is produced from the above-mentioned processed matter; the heater heats at least the above catalyst; and a 2014'9696-ρρ 6 1358519 or two or more blowers 'derived the above-mentioned crucible, the processing gas, and the body-derived portion The gas is directed to the specified direction, ^ ^ ^ ^ From this, even if the electrical equipment such as the blower or the heater fails, the fault condition is quickly treated. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a detailed description of a heat treatment apparatus according to a first embodiment of the present invention is shown in the accompanying drawings. FIG. 1 is a schematic view of a heat treatment apparatus according to a first embodiment of the present invention. The device is as simple as 70 and connected to the heat treatment unit of the gas treatment early element. The above-mentioned "here", the processing device 1A is used, for example, in the manufacturing process of a flat panel display, is a so-called clean chess phase (c1 ean oven) installed in the helmet dust < „„ In the heat treatment unit ilA, the gas treatment unit 20A is attached to the heat treatment early-1〇. The heat treatment unit 10 has a heat treatment chamber 11 for accommodating a heat-treated product (hereinafter referred to as a workpiece) W, and the heat-treated material W can be It is taken out from the rail processing chamber η. The gas processing unit 20 has a gas passage 21A for introducing a heat treatment gas (for example, heating air) into the heat treatment chamber η of the heat treatment unit 10, and from the heat treatment The gas after the heat treatment is performed (for example, the air after the heat treatment). The heat treatment early element 1Q has a gas guiding portion 12 for introducing a heat treatment gas from the gas processing unit 20A, and a gas discharge portion 13 for

The gas after the heat treatment is taken out from the heat treatment chamber 11. The outer side of the heat treatment chamber U is surrounded by the heat insulating wall 11a. 2014-9696-PF 7 丄 358519 The inside of the heat treatment chamber 11 is provided with a heat-retaining member, for example, a heat-receiving state. The holding member is placed in the circle 1 and is double-punched. The gas guiding portion 12 has a tubular shape and communicates with the eschar 1 disposed in the gas introduction portion 12 at a heat place, and the distance π & Μ on the inlet side end of the | 1 ζ. The gas lead-out portion 13 also communicates with the heat treatment chamber 11 in a view, and has an outlet j 5 disposed in the gas discharge portion 13. The connection flange on the L 1 鳊, the gas passage 2U of the gas treatment unit 20A has an introduction pipe 22 connected to the gas introduction portion 12, a discharge pipe 23 connected to the gas discharge unit 13 , and a gas treatment pipe 24 Import between f22 and export (four). A connection flange 25 is provided on the air outlet side end of the introduction pipe 22, and the connection flange 25 is connected to the connection flange 14 of the gas introduction portion 12. The flanges 14, 25 constitute a first connecting portion. A connection (four) 26 is provided on the intake side end of the outlet pipe 23, and the connection flange 26 is connected to the connection flange 15 of the gas discharge portion 13. The flanges 15, 26 constitute a second connecting portion. For example, the flanges 25 and the flanges 14 in the first connecting portion are connected by a connecting means such as a bolt or a nut, and the flanges are attached to the second connecting portion by a connecting means such as a bolt or a nut. The flange 26 and the flanges 15 are connected to the heat treatment chamber 11 of the heat treatment unit 1 and the gas passage 21 of the gas treatment unit 20A to "connect these to form a loop passage. Moreover, the appropriate position of the money passage 2ia is set. There is a vibrator (not shown) for adjusting the air volume. Further, the gas treatment pipe 24 is provided with a catalyst (catalyst catalyst) 30, a heater 31, a blower 32, and a pretreatment 2014-9696-PF 8 1358519 agent 33. The blower 32 is for circulating air in the above-mentioned circulation passage, and the heater 31 is for heating the catalyst 30 and the air. The air heated by the heater 31 enters the heat treatment chamber 11 through the introduction pipe 22, and is heated in the heat treatment chamber. The heat-treated material W. When the heat treatment of the heat-treated material w is performed, a sublimate is generated from the heat-treated material W. The air after the heat treatment contains the sublimate, the sublimate Air unit 13 through said gas outlet and said outlet pipe 23 flows through the catalyst 30.

The catalyst 30 is used to promote the oxidative decomposition reaction of the sublimate contained in the air after the heat treatment, and for example, an active metal such as a platinum metal (pt) or palladium (pd) or an alloy of these noble metals may be used. The above catalyst can obtain catalytic properties at a temperature of about 1 50 to 350 ° C. Therefore, in the present embodiment, the heater 31 is disposed on the front side of the catalyst 30 (a position upstream of the catalyst 30 in the direction in which the air flows through the loop passage). In addition, when a substance called a catalytic poison (for example, an organic compound containing Si, P, or S) is mixed into a sublimate, there is a possibility that the catalyst 30 is poisoned (ineffective). In order to prevent poisoning of the catalyst 30, it is desirable to provide the pretreatment agent 33 on the front side of the catalyst 30. As described above, the gas processing unit 2 〇 a according to the first embodiment has the air blower 32 and the heater 3, and the gas processing unit m is detachably attached to the processing unit 1 having the heat treatment 胄n(4). Therefore, even if the blower 32 or the heater 31 fails, the heat treatment can be restarted immediately by the following procedure P, that is, the connecting means (for example, bolts and nuts) are removed from the flanges 14, 25 of the first connection. And the connecting device is removed from the flanges 15 and 26 of the connecting portion (for example, screw inspection, 2014-9696-pf 9 1358519), thereby judging the event from the heat treatment unit 1 The gas processing unit 20A' is removed from the gas processing unit 20, which has been prepared in advance by the gas processing unit 20A', and is attached to the gas processing sapon 20A, which is removed, to be attached to the case where the blower 32 is quickly wound. Early on the 1st. Therefore, it can be additionally, as shown in Figure 2, and - there is a phase w to look at the gas processing capacity.) The two gas processing units of the same structure of the dragon 10 Bu ^ L early 20A women in the same hot two The heat treatment unit 10 which is larger than the volume of the processing chamber 11 can be used as it is, and the larger the heat treatment unit 10 is, for example, hot or hot. The heat treatment capacity σ of the heat treatment unit iG is adjusted according to m ^ ^ . 〇ΛΑ 』 from the adjustment of the number of installations of the early U0A with the same structure of the gas. Therefore, it is not necessary to separately fabricate the gas treatment capacity '(catalytic: = oxidative decomposition ability to sublimate) and the heat treatment unit according to the various heat treatment capabilities of the pores 1〇. . Compatible with different gas handling units? nA m 乂 旎 皂 皂 2 2 2 ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ Early

Further, in the first embodiment, a loop path through which the gas from the heat treatment chamber sequentially flows through the discharge pipe 23, the gas treatment pipe 24, and the guide pipe = flows back to the heat treatment chamber U is formed, and therefore, The blower 32 allows the gas to be looped, and with the heater 31: the drum heats both the catalyst 30 and the gas. As shown in Fig. 2, in order to mount two gas processing units, two gas introduction portions 12, 12a and two gas deriving portions 13, 13a are provided in the 埶 processing unit ίο. 14a is a connecting flange provided in the gas introduction portion i2a, and 15a in Fig. 2 is a connecting flange provided in the gas outlet portion i d a . In this configuration, only one gas is used for introduction.丨12 and 2014-9696'PF 10 1358519 When another gas blocking gas is introduced into one gas discharge portion 13, the introduction portion 12a and the gas discharge portion 13a are attached to the cover portion 18a and the gas discharge portion as shown in Fig. 3 13a. Alternatively, it is also possible to apply two or more gas processing units 20A to one heat treatment unit, and the plurality of gas chambers 20A may include gas processing units having different gas treatment capacities. (Second Embodiment) Fig. 4 is a schematic view showing a heat treatment apparatus relating to a household according to a second embodiment of the present invention, in which a gas processing unit is connected to a processing unit. In Fig. 4, the same components as those of Fig. i are denoted by the same reference numerals. In the heat treatment apparatus 1D, the gas treatment unit 20D of the second embodiment is attached to the heat treatment unit 1G. The structure of the gas treatment unit 20D in the second embodiment is different from that of the gas treatment unit 2 in the first embodiment. . That is, the gas processing unit 20D includes a gas passage 2D having an open end 22a' provided at the intake side end of the introduction pipe 22, and an open end 24a provided at the outlet side end of the gas treatment pipe 24, gas treatment A catalyst 30 and a heater 31 are disposed in the tube 24, and a blower 34 and a heater 35 are disposed in the introduction tube 22. Further, the introduction pipe 22, the discharge pipe 23, and the gas treatment officer 24 are all supported by the common support member 29, whereby the positional relationship of the flanges 25, 26 is maintained. Further, although the pretreatment agent is not shown in FIG. 4, a pretreatment agent may be provided in the gas treatment tube 24. The gas flow in the heat treatment apparatus 1D having the above structure is as follows. That is, the air that has flowed into the introduction pipe 22 from the open end 22a is heated by the heater 2014-9696-PF 11 1358519 35, and then flows into the heat treatment chamber u, and the workpiece W is heat-treated in the heat treatment chamber u. The sublimated material is contained in the air that has been heat treated (the air after the heat = the air). The heat-treated air is introduced into the gas treatment pipe 24' through the outlet 23 to be in contact with the catalyst in the gas treatment pipe 24. Thus, the air subjected to the heat treatment is removed by oxidative decomposition reaction, and then discharged from the open end 24a. Further, reference numeral 16 in Fig. 4 is a baffle plate for preventing back flow of air inside the heat treatment chamber u, and allowing air to flow from the gas introduction portion 12 to the gas discharge portion 13, which is provided in the heat treatment chamber U β, a channel 16a is formed on the side opposite to the gas introduction portion 12. The baffle 16 is disposed in the heat treatment chamber u. As described above, the gas processing unit 2A of the second embodiment is also detachably attached to the heat treatment unit 1A having the heat treatment chamber n, and therefore, even if the blower 34 or the heater 315 is malfunctioning, the first In the same manner as the embodiment, the failure can be quickly handled by replacing the malfunctioning gas processing unit_ with the other gas processing unit 2GD prepared in advance. In addition, the second embodiment is the same, if it is possible to treat two or more gases: 兀20D (which may include a gas treatment unit having different gas treatment capabilities installed on the heat treatment unit 10, it is not necessary to The various heat treatment capabilities respectively produce different gas treatment units 2〇D, thus reducing the type of gas treatment unit 2〇]). Further, in the above configuration, the gas introduction portion and the gas outlet portion which are not used may be sealed by a cap (not shown). Further, since the air in the process chamber (4) is heated by the gas heating heater 35 provided in the introduction pipe 22, the gas heating heater 35 can be exclusively used for the heat treatment chamber.

The temperature control of 2014-9696-PF 12 1358519, and the twister 设置 disposed in the gas processing tube 24 is specifically used for temperature control of the catalyst 30. Therefore, the temperature of the (4) 3 () is set to the optimum temperature at which the catalytic performance can be obtained without receiving the state τ of the heating temperature of the material k to be heat-treated.

"And' In the second embodiment, since the air taken in from the open intake side end 22a of the introduction pipe 22 is first heated by the heater 35 and then introduced into the heat treatment chamber 11, (4) Processing MUM gas does not contain sublimate. Since A ' can always introduce fresh gas into the heat = chamber 1!", it is difficult to reduce the oxidative decomposition reactivity of the catalyst 3G to the sublimate. Further, in the gas processing unit A 201), since the introduction gas processing tube 24 communicates through the heat treatment chamber u, the air blower 34 is provided in the inlet 22, so that the gas can be introduced into the heat treatment and the gas can be led out from the heat treatment chamber 11. Further, in the second embodiment described above, the tube 22 is, but not limited to, only. For example, it is placed in one of the introduction pipe 22 and the gas treatment pipe 24 in the outlet pipe 23 and the gas treatment pipe 24. The blower 34 may be disposed in the guide. The blower 34' may also be incorporated into at least 34 of the blower and the outlet tube 23 (third embodiment). Fig. 5 is a view of the present invention in the heat treatment apparatus. In Fig. 5, the members of the heat treatment unit of the heat treatment apparatus relating to the embodiment of the heat treatment apparatus are attached to the heat treatment unit door, and the same reference numerals are attached to the heat treatment apparatus 1C, and the gas treatment of the third embodiment is performed. single

2014-9696-PF 13 1358519

The crucible 20C is attached to the same heat treatment unit 10 as the heat treatment unit 1 shown in Fig. 4 . The gas processing unit 2 〇c of the third embodiment is different from the gas processing unit 2〇d of the second embodiment in that it has the connecting pipe 28. That is, the gas processing unit 20C includes a gas passage 21C having a connecting pipe 28 for communicating the gas processing pipe 24 with the introduction pipe 22. One end of the connection manager 28 is connected between the position where the catalyst 30 heater 31 and the blower 32 are disposed in the gas processing tube 24 and the outlet side end 24a. The other end of the connecting pipe 28 is connected to a midway portion of the introduction pipe 22. In the gas processing unit 20C, the heater 35 and the blower 34 are disposed at positions closer to the downstream side of the portion where the connection pipe 28 is connected to the introduction member 22. Further, although the pretreatment agent is not shown in Fig. 5, it may be provided. Pretreatment agent. In addition, the above-described blower 32 can be omitted. The gas flow in the heat treatment apparatus 1c having the above structure is as follows. That is, the air that has flowed into the introduction f 22 from the open end 22a is heated by the heater %, flows into the heat treatment chamber u, and heat-treats the workpiece W in the heat treatment chamber u. The heat-treated air used for the heat treatment contains a sublimate. The H after the heat treatment is introduced into the gas processing tube 24 via the lead-out tube 23 to come into contact with the catalyst 3G. The heat-treated air is oxidatively decomposed by the catalyst 30, whereby the sublimate is removed, and then discharged from the = discharge end 24a, or returned to the heat treatment chamber 11 through the connection pipe 28 and the introduction 1 . In addition, Figure 5 consists of a beta plate. 16疋 The same gear as the second embodiment is attached to the heat treatment unit 10 having the heat treatment chamber 11 of the gas treatment unit 20C according to the second embodiment as described above, and therefore, 2014-9696-PF 14 1358519 even The blower 32 or 34 or the twisting and Ή&, _P杳A ..., state 31 or 35 is faulty, and the fish is the same as the % example, and the gas//the upper bamboo body is treated earlier and replaced by 2〇c. The gas treatment unit 2〇(: 丰盥盥, n 疋2〇C, can quickly treat the fault condition. In addition, -9nr, if known, can process more than two gases, 20C (can include gas treatment) The different gas treatment units 20C) are mounted on a heat treatment unit ln, and the different gas treatment units are not separately prepared according to the various heat treatment capacities of the heat treatment unit 1

Therefore, the kind of the gas processing unit 20C can be reduced. Further, in such a configuration, it is sufficient to attach a lid (not shown) to the gas introduction portion and the gas outlet portion that are not used. Further, since the air introduced into the heat treatment chamber is heated by the gas heating heater 35 provided in the introduction pipe 22, the gas heating heater 35 can be exclusively used for the temperature control of the heat treatment chamber u and will be set to the gas. The heater Μ in the treatment tube 24 is exclusively used for temperature control of the catalyst 30, and the temperature of the catalyst 3Q can be set to an optimum temperature at which catalytic performance can be obtained without being subjected to the heating temperature of the material W to be heat-treated. Further, in the above-described gas processing unit 2, the fresh air is introduced into the introduction pipe 22 because the intake side end 22a of the introduction pipe is in an open state. Further, the air derived from the heat treatment chamber u is pressurized by the catalyst 3. The crucible is purified and heated by the heater 31, and then flows into the introduction pipe 22 through the connection pipe 28, and is mixed with the air taken in from the open intake side end 22a of the introduction pipe 22 and introduced into the heat treatment chamber 11, thereby reducing Heat Loss. (Fourth Embodiment) Fig. 6 is a diagram of a heat exchanger of the fourth embodiment of the present invention, taken on the basis of a heat exchanger of the present invention, in the heat treatment apparatus. In Fig. 6, in Fig. 6, The same components of the gas processing unit connected to the heat treatment unit 5 are denoted by the same reference numerals in the heat treatment assembly_attached to the disk of FIG. 4'. The heat treatment unit 10 of the gas processing unit of the gas processing unit of the fourth embodiment The fourth embodiment includes a gas passage having a second connecting pipe 27, one end of which is connected to the inlet pipe 22, which is more expensive than the portion to which the connecting pipe 28 is connected, _ sin is downstream, and is set There are a gas heating heating piano 35 and a blower 34 of the ... 15 tube 27 and the guide tube 22 at a position near the upstream to make the middle portion of the second connection outlet tube 23 open. The second connection tube 27 is another The end is connected to the through. The second connecting pipe '2;: is such that the second connecting pipe 27 and the outlet pipe 23 are connected by a heat insulating wall. The gas processing pipe 24 of the passage 21B is provided with Catalyst 3, 匕 (9), and blower 32. As described above, in the introduction pipe μ, a blower a..., a device 35 is provided at a position closer to the downstream than the position at which the first connection is connected. The heater 35 is used to be introduced. Further, heating is performed in the heat treatment chamber j. Further, a heat treatment chamber (4) is provided inside. Further, although the pretreatment agent is not shown in the figure (1), the ruthenium treatment agent may be placed. The treatment device 1β includes the gas treatment having the above structure. The gas flow in the heat treatment device 18 is as follows: that is, the air from the open introduction pipe 22 is heated by the heater 35, and then the heat treatment 胄U is performed, and the workpiece is heat-treated in the heat treatment chamber u. The air that is heat treated for the workpiece will be heat treated. There liters

2014-9696-PF 16 1358519 Chinese. The heat-treated air is introduced into the outlet two connecting pipe 27 and the gas processing pipe 24 to be branched. The air from the guide τ8 to the second connecting pipe 27 is again heated by the heater 35, and then flows back to the heat processing chamber 11 via the guide soil. That is, the air is looped between the heat treatment chamber u and the second connecting pipe 27. On the other hand, the heat-treated air containing the sublimate in the gas processing tube 24 is brought into contact with the catalyst 3G, and an oxidative decomposition reaction is performed to remove the sublimate' and then discharged from the open end 24a, or through a connecting tube and an introduction tube. 22, flowing back to the heat treatment chamber 11. As described above, the gas processing unit of the fourth embodiment is also detachably attached to the heat treatment unit 1 having the heat treatment chamber U, and therefore, even if the blower 32 "34 or the heater 31 < 35 malfunctions, The same embodiment can be quickly treated as a failure by replacing the gas treatment unit & 2〇b with another gas treatment unit 20B prepared in advance. Further, as in the above-described embodiment, if a structure in which two or more gas treatment sheets 20B (which may include gas treatment units having different gas treatment capacities) are mounted on one heat treatment unit 1Q is employed, it is not necessary to use the heat treatment unit 1 The various heat treatment capabilities of the crucible are separately produced by different gas treatment units, so that the type of the gas treatment unit 2QB can be reduced. Further, in the above configuration, the gas introduction portion and the gas discharge port which are not used may be sealed by attaching a lid (not shown). Further, since the air to be introduced into the heat treatment chamber U is heated by the gas heating heater 35 provided in the introduction pipe 22, the temperature of the heat treatment chamber 11 for the gas heating can be controlled by the gas heating chamber 35, and will be set in The heater μ in the gas processing tube 24 is dedicated to the temperature control of the catalyst 30. Therefore, the temperature of the catalyst 30 can be set to an optimum temperature at which catalytic performance can be obtained without being affected by the heating temperature of the heat-treated 2014-9696-PF 17 1358519.

Further, in the above-described gas processing unit 20B, the intake side end 22a of the introduction pipe 22 is in an open state and air is circulated through the connection pipe 28, so that the same effect as that of the third embodiment can be obtained, and, The second connecting pipe 27 forms a loop passage closer to the heat treatment chamber 11 than the loop passage formed by the connecting pipe 28, and the gas heating heater 35 disposed in the loop passage including the second connecting pipe 27 is disposed therein. The air in the loop is heated, so that the air with a smaller temperature drop can be reused. In the first to fourth embodiments described above, the connecting means for connecting the gas introduction portion 12 and the gas discharge portion 13 of the heat treatment unit 1A to the gas passages (21A to 21D) of the gas treatment unit includes a flange for connection. 14, 15, 15, and bolts, nuts, but the invention is not limited to this. For example, it can be connected or separated by other methods such as screwing or welding. (Summary of the embodiment) and the gas treatment of the blower. Even if the gas processing unit is added, the gas unit can be replaced immediately. In addition, on the heat treatment unit, it can be used. In other words, according to the gas having the same structure (1) in the present embodiment, in the present embodiment, the heat treatment single heater and the blower having the heater unit attached to the heat treatment chamber are malfunctioned, and also removed into other gases prepared in advance. Processing unit, heat treatment operation. Therefore, the heating can be quickly performed by installing a plurality of gas processing units on a heat treatment capability of a heat treatment chamber having a large heat treatment capability, and the number of installations of the 2014-9696-PF 18 ratio 8519 can be adjusted. Thereby adapting to the heat treatment capability of the heat treatment unit. Therefore, it is not necessary to separately manufacture different gas processing units having gas treatment capacities in accordance with the heat treatment capabilities of the heat treatment unit in accordance with various heat treatment capacities of the heat treatment unit, so that the type of the gas treatment unit can be reduced. Here, a gas processing unit having a different gas treatment capability may be included in a plurality of gas processing units connected to the heat treatment unit. (2) In the gas processing unit, the intake side end of the introduction pipe and the outlet side end of the outlet pipe may be connected by a gas processing pipe, and the intake side end is located on a side opposite to the first connection portion The gas outlet side is located on the opposite side of the second connecting portion, and the catalyst and the heater may be disposed in the gas processing tube. According to this configuration, in the case where the gas processing unit is connected to the heat treatment unit, the gas which is led out from the heat treatment unit can be sequentially flowed through the outlet pipe, the gas treatment pipe, and the introduction pipe, and then flows back to the heat treatment chamber again. aisle. Therefore, the gas can be looped by a blower, and both the catalyst and the gas can be heated by the heater. (7) The gas processing unit t, the intake side end of the introduction pipe may be in an open state, the intake side end being located on a side opposite to the first connection portion, and the gas discharge side end of the outlet f may be connected to a gas treatment a tube, the outlet side end is located on a side opposite to the second connection portion, and the catalyst and the heater may be disposed in the gas chamber; the heater may be provided in the introduction unit. The blower may be provided in at least # of the outlet pipe, the gas treatment pipe, and the inlet pipe. 2014-9696-PF 19 With this structure, the gas that is in the open state from the inlet pipe is sucked into the oxygen-containing side by the gas, and is introduced into the intake side of the heat treatment chamber. The gas sucked in the end does not contain the sublimate. Therefore, the introduction of the fresh air into the drum is used to always prevent the catalyst from being completely blocked, thereby suppressing deterioration of the catalyst performance, and in this structure, the performance of the catalyst is lowered. * One of the inlets, the outlet pipe, and the gas treatment pipe are provided with at least one of them - the gas can be introduced into the heat treatment chamber and the gas is led out from the heat treatment chamber. ', processed to the inside, and in the gas treatment In the unit, the intake side end of the inlet pipe may be in a state of being placed/disposed, and the inlet side end is located opposite to the first connection portion, and the gas treatment pipe may be connected to the outlet side of the outlet, and the _ side end is located at The opposite side of the second connecting portion, wherein the catalyst and the heater may be disposed in the rolling body processing tube, and the ratio of the gas processing tube is provided with the catalyst and The portion near the downstream of the position of the heater and the intermediate portion of the introduction pipe may be connected and communicated through a connecting pipe, and a gas which is disposed downstream of a position closer to the connecting pipe than the connecting pipe may be provided with a gas. The heater for heating and the above-mentioned blower. This structure is used because the inlet side of the inlet pipe is open, so that fresh air can be introduced. In addition, the gas derived from the heat treatment chamber is purified by the catalyst and heated by the heater. After that, it flows into the introduction pipe through the connecting pipe, and is mixed with the gas sucked from the intake side of the inlet of the inlet of the introduction, and is introduced into the heat treatment, that is, the gas heated by the heater can be used to improve the gas from 2014-9696-PF. The temperature of the gas introduced at the open side of the open side of 20 S is reduced, so that the heat loss can be reduced. The gas to be introduced into the heat treatment chamber is heated by the heater for heating the emulsion in the guide I. Therefore, the gas heating can be used exclusively for the temperature control of the heat treatment chamber, and the heater disposed in the gas treatment e is used exclusively for urging Temperature control agent. This project, in a state without being heat-treated in the heating temperature, the temperature of the catalyst may be set to the optimum temperature of the catalytic performance can be obtained.

(5) In the gas processing unit, the portion of the introduction pipe that is closer to the downstream than the position where the connection is connected to the connection and is closer to the upstream than the gas heating heater and the blower, and the intermediate portion of the outlet pipe may be Connected and connected through a second connecting pipe. Privately using this structure 'Because the intake side end of the introduction pipe is in an open state, and the gas is looped through the connection pipe, @ this can obtain the same effect as the above (4), and, since the second connection pipe is used to form the specific connection pipe The loop channel formed is closer to the loop channel of the heat treatment chamber, and is used to set back

The gas heating in the loop passage is heated by the heater, so that the gas having a smaller temperature drop can be reused again. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view of a heat treatment apparatus according to a first embodiment of the present invention. Fig. 2 is a schematic view of a heat treatment apparatus according to another embodiment of the present invention. Figure 3 is a simplified view of a heat treatment apparatus for a heat treatment apparatus of a heat treatment apparatus of a heat treatment apparatus according to another embodiment of the present invention.

1A, 1B, 1C, 1D~ heat treatment device; 1 2 ~ gas introduction portion; 11a~ heat insulation wall; 14, 15, 25, 26 to connection flange; 23~ outlet tube; 3 0~ catalyst;

Figure. Figure '4 is a diagram of the present invention. Figure 5 is a diagram of the present invention. Figure 3 is a diagram of the invention. The second embodiment relates to the fourth embodiment related to the fourth embodiment [main element symbol description] 10~heat treatment unit. 11~heat treatment chamber; 13~gas outlet portion; 20~gas treatment unit; 22~introduction tube 24~ gas treatment tube; 31~heater; 32~ blower; 33~ pretreatment agent; W~ heat treated material; 21A, 21B, 21C, 21D~ gas passage; 20A, 20B, 20C, 20D~ gas treatment unit . 2014-9696-PF 22

Claims (1)

1358519 ___________ . No. 097119482 stipulations|(5) more) Replacement page September 2, 100, revised replacement page X. Patent application scope: 1. A gas processing unit attached to a heat treatment unit having: a heat treatment chamber And accommodating the heat-treated material, the heat-treated material contained therein is taken out from the heat treatment chamber, and the gas introduction portion and the gas discharge portion are respectively communicated with the heat treatment chamber, and are characterized by comprising: a gas passage having a first connection portion a guide tube detachably connected to the gas introduction portion, and a discharge tube detachably connected to the gas discharge portion via the second connection portion, and a connection to the outlet tube and opposite to the second connection portion a gas processing tube on the side for guiding the heat treatment gas into the gas guiding portion, and deriving a gas from the gas outlet portion; internally decomposing the sublimate from the gas from the gas to be disposed in the catalyst The sublimate contained in the gas derived from the gas processing tube lead-out portion is generated by the heat-treated product; a heater, which is disposed in the above-mentioned ventilator, at least a catalyst; and heats one or more of the above-mentioned blasters, and 1 m is broken and placed in the gas, and the heat treatment gas is stored And from the U body channel, 4 cut i body lead out the guide in the direction. In the oxygen direction guide of Hawthorn et al., the intake side end of the introduction pipe is connected to the above-mentioned lead-out unit: the above-mentioned gas processing pipe, and the side of the outlet side of S passes through the opposite side of the joint portion. The above-mentioned intake side end is located on the side opposite to the first connection 2014-9696-PF1 outlet side end and the second connection part phase 23 1358519 No. 097119482. The gas processing unit according to the first aspect of the present invention, wherein the intake side of the s is in an open state, and the intake side end is located at the first connection portion with the first connection portion. On the opposite side, the gas processing tube is connected to the outlet side of the lead g, and the outlet side end is located on the opposite side of the second connecting portion, and a gas heating heater is provided in the introduction tube. At least one of the inside of the tube, the gas treatment tube, and the introduction tube is provided with the above-described air blower. 4. The gas processing unit according to claim 1, wherein the intake side of the second guide tube is in an open state, and the position is less than the _ side of the first connection portion. Connecting the gas processing tube on the line side end of the outlet tube to the side opposite to the second connecting portion, the gas processing tube is disposed at a ratio of the catalyst and the portion close to the downstream. The tube is connected and connected, and the middle portion of the e is connected to the introduction tube, and the gas heating heater and the blasting machine are provided near the portion of the connecting tube. 5. In the gas treatment according to the fourth aspect of the invention, the position of the introduction member closer to the connection pipe is closer to the next and is closer to the gas heating heater and the blower: and the above-mentioned derivation; & The middle portion of the sub-portion & is connected and connected through the second connecting pipe. 2014-9696-PF1 24