JP4589942B2 - Gas processing unit - Google Patents

Description

  The present invention relates to a gas processing unit attached to a heat treatment unit for heat treating an object to be heat treated.

  As an apparatus for performing the above-described heat treatment, there is known an apparatus for heat-treating the object to be heat-treated by heating while circulating the air in the heat-treatment chamber in a state where the object to be heat-treated is accommodated in a heat treatment chamber of a heat treatment unit. ing.

  An apparatus that performs such heat treatment may be used, for example, in a photoresist or organic thin film pre-bake or post-bake process in an FPD (flat panel display) manufacturing process. In these processes, when a heat-treated object made of a glass substrate or the like is heat-treated, a volatile component contained in the photoresist or the like is vaporized to generate a large amount of sublimated material, and the sublimated material is recrystallized and heat-treated. There were problems such as scattering around the device and adhering to the periphery.

As a countermeasure for this problem, for example, Patent Document 1 describes that the outside of the heat treatment chamber is ventilated by heating the outside air and sending the air into the heat treatment chamber while allowing the air in the heat treatment chamber to flow into the outlet duct. . By ventilating in this way, recrystallization of the sublimate and adhesion to the surroundings can be suppressed.
JP-A-10-141868

  However, in the apparatus for performing the heat treatment of Patent Document 1, a gas processing unit having a blower and a heater for circulating air into and out of the heat treatment chamber is provided between the outer wall of the heat treatment unit and the heat treatment chamber. Because it is provided integrally with the heat treatment section, if an electrical device such as a blower or a heater of the gas treatment section fails, the heat treatment operation cannot be performed until the repair is completed. was there.

  The present invention has been made in view of such circumstances, and the heat treatment unit and the gas treatment unit are separate units, and the gas treatment unit having an electric device such as a blower or a heater is a heat treatment unit having a heat treatment chamber. An object of the present invention is to provide a gas processing unit that is configured to be attached to the apparatus and can quickly cope with a failure of an electric device such as a blower or a heater.

The invention according to claim 1 is a gas processing unit attached to a heat treatment unit having a gas introduction part and a gas lead-out part which are accommodated in the heat treatment room so that the object to be heat treated can be taken in and out, and communicate with the heat treatment room. Te, wherein the first inlet duct which is detachably connected via a connecting part, deriving the duct and the outlet duct are detachably connected via the second connection portion prior SL gas outlet portion to said gas introduction portion and the second connecting portion has a gas processing duct connected to the opposite side, provided with a gas passage for leading the thermally processed gas from the introduced heat treatment gas to the gas introduction portion and the gas outlet portion, wherein the gas processing duct, said included in the heat-treated gas, the catalyst for decomposing sublimate generated from the heat-treated, a heater for heating at least the catalyst is provided, before The gas passage, characterized in that one or more blowers for guiding the heat treatment gas and the heat treated gas in a predetermined direction is provided.

According to a second aspect of the present invention, in the gas processing unit according to the first aspect, the gas processing duct has an inlet end opposite to the first connecting portion of the introduction duct and the second connection of the outlet duct. the parts characterized in that it connects the output end of the opposite side.

According to a third aspect of the present invention, in the gas processing unit according to the first aspect, the inlet end of the introduction duct opposite to the first connection portion is opened, and the gas processing duct is connected to the outlet duct. wherein the second connecting portion is consolidated on the opposite side of the exit end, before SL gas heating heater is provided in the inlet duct, the outlet duct of the gas processing duct and the inlet duct The blower is provided in at least one of the above.

According to a fourth aspect of the present invention, in the gas processing unit according to the first aspect, an inlet end opposite to the first connection portion of the introduction duct is opened, and the gas processing duct is connected to the outlet duct. wherein the second connecting portion is consolidated on the opposite side of the exit end Rutotomoni, midway connection duct of the inlet duct and a downstream position than locations with the catalyst of the gas processing duct and said heater is provided The heater for gas heating and the said air blower are provided in the downstream from the confluence | merging point with the connection duct of the introduction duct, It is characterized by the above-mentioned.

  According to a fifth aspect of the present invention, in the gas processing unit according to the fourth aspect of the present invention, the downstream side of the junction with the connecting duct of the introduction duct and the upstream side of the heater for gas heating and the blower. The position and the middle of the lead-out duct are connected in communication via a second connection duct.

  According to the first aspect of the present invention, since the gas processing unit having the heater and the blower is attached to the heat treatment unit having the heat treatment chamber, the gas processing unit can be used even if the heater and the fan fail. By removing and replacing with another gas processing unit prepared in advance, it is possible to immediately perform a heat treatment operation and to deal with it quickly. Further, by attaching a plurality of gas processing units having a single configuration to one heat treatment unit, it is possible to cope with a heat treatment unit having a large heat treatment capacity. In other words, the number of gas processing units having a single configuration may be adjusted in accordance with the heat treatment capacity of the heat treatment unit. Therefore, it is not necessary to produce a gas processing unit having a gas processing capacity corresponding to the heat processing capacity of the heat processing unit for each heat processing capacity of the heat processing unit, and the types of gas processing units can be reduced. However, some of the plurality of gas processing units connected to the heat treatment unit may include different gas processing capabilities.

  According to the second aspect of the present invention, when the gas treatment unit is connected to the heat treatment unit, the circulation path for the gas led out from the heat treatment unit to return to the heat treatment chamber again through the lead-out duct, the gas treatment duct and the introduction duct in this order is provided. It is comprised, and while being able to circulate gas with one air blower, both a catalyst and gas can be heated with a heater.

According to the third aspect of the present invention, the gas sucked from the open inlet end of the introduction duct is heated by the gas heating heater and introduced into the heat treatment chamber, and is led out through the lead-out duct and the gas treatment duct. Therefore, the gas sucked from the inlet side end of the introduction duct has no sublimation. For this reason, since fresh gas is always introduced into the heat treatment chamber, it is possible to make it difficult to reduce the oxidative decomposition reaction of the sublimate by the catalyst. Further, in this invention, the introduction duct, by providing at least one air blower of the guide exit duct and a gas processing duct, it is possible and gas outlet from the heat treatment chamber and the gas introduced into the heat treatment chamber.

  According to the fourth aspect of the invention, since the inlet end of the introduction duct is opened, fresh gas can be introduced. Further, the gas led out from the heat treatment chamber is purified by the catalyst and heated by the heater, enters the introduction duct through the connection duct, and the gas sucked from the open entry side end of the introduction duct. Since they are mixed and introduced into the heat treatment chamber, heat loss can be reduced. In addition, since the gas introduced into the heat treatment chamber is heated by the gas heating heater provided in the introduction duct, the gas heating heater is used for temperature control of the heat treatment chamber, and the heater provided in the gas treatment duct is Each can be used exclusively for temperature control of the catalyst. Therefore, the catalyst can be set to an optimum activation temperature regardless of the heating temperature of the object to be heat treated.

  According to the invention of claim 5, since the inlet end of the introduction duct is opened and the gas circulates through the connecting duct, it is needless to say that the same effect as that of claim 4 can be obtained. That is, the circulation path closer to the heat treatment chamber than the circulation path by the connecting duct is formed by the second connecting duct and is heated by the gas heating heater provided in the circulation path. A small amount of gas can be reused.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the drawings.

(First embodiment)
FIG. 1 is a schematic configuration diagram showing a heat treatment apparatus formed by connecting a gas treatment unit according to the first embodiment of the present invention to a heat treatment unit. This heat treatment apparatus 1A is used in, for example, an FPD manufacturing process, and is called a so-called clean oven installed in a clean room.

  1 A of heat processing apparatuses introduce | transduce the gas for heat processing into the heat processing chamber 11 of the heat processing unit 10, for example, heating air with respect to the heat processing unit 10 which has the heat processing chamber 11 in which the to-be-processed object (it is also called workpiece | work) W is accommodated. At the same time, a gas processing unit 20A having a gas passage 21A for leading heat-treated gas, for example, heat-treated air, from the heat treatment chamber 11 is provided.

  The heat treatment unit 10 includes a gas introduction portion 12 into which the heat treatment gas from the gas treatment unit 20A is introduced, and a gas lead-out portion 13 that leads out the heat-treated air from the heat treatment chamber 11, and the outside of the heat treatment chamber 11 is thermally insulated. It is surrounded by a wall 11a.

  Inside the heat treatment chamber 11, for example, a holding member (not shown) capable of holding one or two or more objects to be heat treated W in a predetermined state is provided at a position indicated by a two-dot chain line. The gas introduction part 12 has a tubular shape communicating with the heat treatment chamber 11 and is provided with a connecting flange 14 at the inlet end thereof. The gas lead-out portion 13 is also in a tubular shape communicating with the heat treatment chamber 11 and is provided with a connecting flange 15 at the outlet end thereof.

  On the other hand, the gas passage 21 </ b> A in the gas processing unit 20 </ b> A is provided between the introduction duct 22 connected to the gas introduction part 12, the lead-out duct 23 connected to the gas lead-out part 13, and the lead-in duct 22 and the lead-out duct 23. Gas treatment duct 24. A connection flange 25 connected to the connection flange 14 of the gas introduction part 12 is provided at the outlet end of the introduction duct 22, and these flanges 14, 25 constitute a first connection part. On the other hand, a connecting flange 26 connected to the connecting flange 15 of the gas outlet 13 is provided at the inlet end of the outlet duct 23, and these flanges 15 and 26 constitute a second connecting portion. Then, the flanges 25 and 14 constituting the first connection part are coupled by fastening means, for example, bolts and nuts, and in addition, the flanges 26 and 15 constituting the second connection part are coupled by fastening means, for example, bolts and nuts. The heat treatment chamber 11 of the heat treatment unit 10 and the gas passage 21A of the gas treatment unit 20A are connected in communication to form a circulation passage. The gas passage 21A is provided with a damper (not shown) for adjusting the air volume at an appropriate position.

  The gas treatment duct 24 is provided with a catalyst 30, a heater 31, a blower 32, and a pretreatment agent 33. The blower 32 is for allowing air to circulate and flow through the circulation passage, and the heater 31 is for heating the catalyst 30 and the air. The air heated by the heater 31 enters the heat treatment chamber 11 through the introduction duct 22, and heats the workpiece W to be heat treated. At the time of this heat treatment, a sublimation product is generated from the workpiece W. The heat-treated air contains the sublimate and is given to the catalyst 30 via the gas outlet 13 and the outlet duct 23.

  The catalyst 30 is for accelerating the oxidative decomposition reaction of the sublimate contained in the heat-treated air. For example, a noble metal such as platinum (Pt) or palladium (Pd) or an active metal such as an alloy of these noble metals is used. Adopted. Such a catalyst 30 exhibits catalytic activity in a temperature atmosphere of about 150 to 350 ° C. Therefore, in the present embodiment, the heater 31 is disposed on the front side of the catalyst 30 (upstream side of the catalyst 30 in the direction in which air flows in the circulation passage). Further, if the sublimation contains an organic compound containing a catalyst poison, for example, Si, P, S, etc., and the catalyst 30 may be poisoned, the pretreatment agent 33 is used to prevent the poisoning. Is preferably disposed on the front side of the catalyst 30.

  Therefore, in the case of the gas processing unit 20A according to the first embodiment configured as described above, the gas processing unit 20A having the blower 32 and the heater 31 can be attached to and detached from the heat processing unit 10 having the heat processing chamber 11. Since it is an attached structure, even if one of the blower 32 and the heater 31 fails, the connecting means (for example, bolts and nuts) is removed from the flanges 14 and 25 constituting the first connection portion, and the second The connecting means (for example, bolts and nuts) are removed from the flanges 15 and 26 constituting the connecting portion, the gas treatment unit 20A is removed from the heat treatment unit 10, and the heat treatment unit 10 is replaced with another gas treatment unit 20A prepared in advance. By attaching in the same manner, it becomes possible to immediately perform a heat treatment operation and to deal with it quickly.

  In addition, as shown in FIG. 2, by attaching two gas processing units 20A having a single configuration [the same gas processing capacity (described later)] to one heat processing unit 10, heat processing capacity (for example, heat quantity or heat processing chamber 11) This can correspond to the heat treatment unit 10 having a large volume. In other words, the number of gas processing units 20A having a single configuration is adjusted in accordance with the heat treatment capability of the heat treatment unit 10. Therefore, it is not necessary to produce the gas processing unit 20A having the gas processing capability corresponding to the heat processing capability of the heat processing unit 10 (the ability to oxidatively decompose the sublimate by the catalyst 30) for each heat processing capability of the heat processing unit 10, and thus The number of types of 20A can be reduced. In order to attach two gas processing units 20A, the heat treatment unit 10 is provided with two sets of gas introduction parts 12, 12a and gas outlet parts 13, 13a. Further, 14a in FIG. 2 is a connecting flange provided in the gas introduction part 12a, and 15a is a connecting flange provided in the gas outlet part 13a. In addition, in such a configuration, when only one set of gas introduction part 12 and gas lead-out part 13 is used, as shown in FIG. 3, the other set of gas introduction part 12a and gas lead-out part 13a is covered with a lid. Just install 18 and close it. However, three or more gas processing units 20A may be attached to one heat treatment unit 10, or some of the plurality of gas processing units 20A may have different gas processing capabilities. Good.

  Furthermore, in the first embodiment, a circulation path is configured in which the gas led out from the heat treatment chamber 11 returns to the heat treatment chamber 11 again through the lead-out duct 23, the gas treatment duct 24, and the introduction duct 22 in this order. A single blower 32 can circulate the gas, and the heater 31 can heat both the catalyst 30 and the gas.

(Second Embodiment)
FIG. 4 is a schematic configuration diagram of a heat treatment apparatus configured by connecting a gas treatment unit according to the second embodiment of the present invention to a heat treatment unit. In addition, the same code | symbol is attached | subjected to the same part as FIG.

In this heat treatment apparatus 1D, the gas treatment unit 20D of the second embodiment is attached to the heat treatment unit 10, and the gas treatment unit 20D of the second embodiment is different from the gas treatment unit 20A of the first embodiment. It has a different configuration. That is, the open end 22a to the inlet side of the introduction duct 22 has a gas passage 21D which open end 24a is provided on the outlet side of the gas processing duct 24, the gas processing unit 20D and the catalyst 30 to the gas processing duct 24 heated A blower 34 and a heater 35 are provided in the introduction duct 22. The introduction duct 22, the lead-out duct 23, and the gas processing duct 24 are supported by a common support member 29 so that the positional relationship between the flanges 25 and 26 is kept constant. Although the pretreatment agent is omitted in FIG. 4, it may be provided.

  The air flow of the heat treatment apparatus 1D configured as described above is as follows. That is, the air that has entered from the open end 22a is heated by the heater 35 and enters the heat treatment chamber 11 through the introduction duct 22 and contributes to the heat treatment. The heat-treated air contains a sublimation product, enters the outlet duct 23, is guided to the gas processing duct 24, undergoes an oxidative decomposition reaction of the sublimate by the catalyst 30, and is then discharged from the open end 24a. . 4 is a baffle plate for allowing air to flow from the gas introduction part 12 to the gas outlet part 13 without recirculating in the heat treatment room 11, and the gas introduction part of the heat treatment room 11. 12 is provided so that a passage 16 a is formed on the side opposite to the side 12.

  Therefore, even in the gas processing unit 20D, the gas processing unit 20D having the blower 34 and the heaters 31 and 35 is detachably attached to the heat treatment unit 10 having the heat treatment chamber 11, so that the blower Even if one of the heater 34 and one of the heaters 31 and 35 breaks down, it can be quickly dealt with by replacing with another gas processing unit 20D prepared in advance. Also, as before, by having a configuration in which two or more gas processing units 20D having a single configuration (the gas processing capabilities of some gas processing units 20D may be different) are attached to one heat treatment unit 10, It is possible to reduce the types of gas processing units 20D. Further, in such a configuration, a lid (not shown) may be attached and closed to a gas introduction part and a gas lead-out part that are not used. Furthermore, since the air introduced into the heat treatment chamber 11 is heated by the gas heating heater 35 provided in the introduction duct 22, the gas heating heater 35 is used for the temperature management of the heat treatment chamber 11 for the gas treatment duct 24. Each of the heaters 31 provided in the can be used exclusively for temperature control of the catalyst 30. Therefore, the catalyst 30 can be set to an optimum activation temperature without being influenced by the heating temperature of the workpiece W.

  Further, in the second embodiment, the air sucked from the inlet side open end 22 a of the introduction duct 22 is heated by the heater 35 and introduced into the heat treatment chamber 11, and is led out through the lead-out duct 23 and the gas treatment duct 24. Thus, the air sucked from the open end 22a of the introduction duct 22 is free from sublimation. For this reason, since fresh air is always introduced into the heat treatment chamber 11, it is possible to make it difficult to lower the oxidative decomposition reaction of the sublimate by the catalyst 30. Further, in this gas processing unit 20 </ b> D, by providing a blower 34 in the introduction duct 22, gas introduction into the heat treatment chamber 11 and gas discharge from the heat treatment chamber 11 are possible.

  In addition, in this 2nd Embodiment, although the air blower 34 is provided in the introduction duct 22, it is not restricted to this. For example, it may be provided in the outlet duct 23 or the gas processing duct 24, or a blower may be provided in at least one of the introduction duct 22, the gas processing duct 24, and the outlet duct 23.

(Third embodiment)
FIG. 5 is a schematic configuration diagram of a heat treatment apparatus configured by connecting a gas treatment unit according to the third embodiment of the present invention to a heat treatment unit. In addition, the same code | symbol is attached | subjected to the same part as FIG.

In this heat treatment apparatus 1C, the gas treatment unit 20C of the third embodiment is added to the same heat treatment unit 10 as in FIG. 4, and the gas treatment unit 20C of the third embodiment is the gas of the second embodiment. It is different from the processing unit 20D. That is, the portion of the gas treatment duct 24 where the catalyst 30, the heater 31, and the blower 32 are provided and the open end 24a on the outlet side and the middle of the introduction duct 22 are connected to each other via the connection duct 28. The gas processing unit 20 </ b> C has a configuration in which a heater 35 and a blower 34 are provided at a position downstream of the joining point of the connection duct 28 of the introduction duct 22. Although the pretreatment agent is omitted in FIG. 5, it may be provided. Further, the blower 32 can be omitted.

  The air flow of the heat treatment apparatus 1 </ b> C configured as described above is as follows. That is, the air that has entered from the open end 22a is heated by the heater 35 and enters the heat treatment chamber 11 through the introduction duct 22 and contributes to the heat treatment. The heat-treated air contains a sublimation product. After entering the outlet duct 23, the heat-treated air is led to the gas processing duct 24 and subjected to the oxidation decomposition reaction of the sublimate by the catalyst 30, and then discharged from the open end 24a. Alternatively, it is returned to the heat treatment chamber 11 through the connection duct 28 and the introduction duct 22. In addition, 16 in FIG. 5 is a baffle plate similar to 2nd Embodiment.

  Therefore, even in the gas processing unit 20C according to the third embodiment, the gas processing unit 20C having the fans 32 and 34 and the heaters 31 and 35 is detachably attached to the heat processing unit 10 having the heat processing chamber 11. Therefore, even if one of the blowers 32 and 34 and the heaters 31 and 35 breaks down, it can be quickly replaced with another gas processing unit 20C prepared in advance as before. Can be dealt with. Also, as before, by having a configuration in which two or more gas processing units 20C having a single configuration (the gas processing capabilities of some gas processing units 20C may be different) are attached to one heat treatment unit 10, It is possible to reduce the types of gas processing units 20C. Further, in such a configuration, a lid (not shown) may be attached and closed to a gas introduction part and a gas lead-out part that are not used. Furthermore, since the air introduced into the heat treatment chamber 11 is heated by the gas heating heater 35 provided in the introduction duct 22, the gas heating heater 35 is used for the temperature management of the heat treatment chamber 11 for the gas treatment duct 24. Each of the heaters 31 provided in the can be used exclusively for temperature control of the catalyst 30. Therefore, the catalyst 30 can be set to an optimum activation temperature without being influenced by the heating temperature of the workpiece W.

  Furthermore, in the gas processing unit 20C, since the inlet side end 22a of the introduction duct 22 is opened, fresh air can be introduced. Further, the air led out from the heat treatment chamber 11 is purified by the catalyst 30 and heated by the heater 31 and enters the introduction duct 22 through the connection duct 28, and the open entry side end of the introduction duct 22. Since it is mixed with the air sucked from 22a and introduced into the heat treatment chamber 11, heat loss can be reduced.

(Fourth embodiment)
FIG. 6 is a schematic configuration diagram of a heat treatment apparatus configured by connecting a gas treatment unit according to the fourth embodiment of the present invention to a heat treatment unit. The same parts as those in FIG. 5 are denoted by the same reference numerals.

  In this heat treatment apparatus 1B, a gas treatment unit 20B of the fourth embodiment is attached to the heat treatment unit 10 identical to that in FIG. The gas processing unit 20B according to the fourth embodiment is downstream of the junction point of the introduction duct 22 and the connecting duct 28 and upstream of the position where the gas heating heater 35 and the blower 34 are provided. And the middle of the lead-out duct 23 have a gas passage 21 </ b> B connected in communication via a second connection duct 27.

  The gas processing duct 24 in the gas passage 21 </ b> B is provided with a catalyst 30, a heater 31, and a blower 32. The gas processing duct 24 is located in the middle of the introduction duct 22 and downstream of the junction of the second connection duct 27. As described above, the blower 34 and the heater 35 are provided. The heater 35 is provided for the purpose of heating the air introduced into the heat treatment chamber 11. Further, the baffle plate 16 is provided inside the heat treatment chamber 11. Although the pretreatment agent is omitted in FIG. 6, it may be provided.

  The air flow of the heat treatment apparatus 1B having the gas processing unit 20B configured as described above is as follows. That is, the air that has entered from the open end 22a is heated by the heater 35 and enters the heat treatment chamber 11 through the introduction duct 22 and contributes to the heat treatment. The heat-treated air contains a sublimate, and after entering the outlet duct 23, branches toward the second connecting duct 27 and the gas processing duct 24, and the air guided to the second connecting duct 27 is again It is heated by the heater 35 and returns to the heat treatment chamber 11 through the introduction duct 22. That is, it circulates between the heat treatment chamber 11 and the second connection duct 27. On the other hand, the heat-treated air containing the sublimate guided toward the gas processing duct 24 is exhausted from the open end 24a after being subjected to the oxidation decomposition reaction of the sublimate by the catalyst 30, or the connection duct 28 and the introduction. It returns to the heat treatment chamber 11 through the duct 22.

  Accordingly, even in the gas processing unit 20B of the fourth embodiment, the gas processing unit 20B having the fans 32 and 34 and the heaters 31 and 35 is detachably attached to the heat processing unit 10 having the heat processing chamber 11. Therefore, even if one of the fans 32 and 34 and the heaters 31 and 35 breaks down, it can be quickly dealt with by replacing with another gas processing unit 20B prepared in advance as before. can do. Also, as before, by having a configuration in which two or more gas processing units 20B having a single configuration (the gas processing capabilities of some gas processing units 20B may be different) are attached to one heat treatment unit 10, It is possible to reduce the types of gas processing units 20B. Further, in such a configuration, a lid (not shown) may be attached and closed to a gas introduction part and a gas lead-out part that are not used. Furthermore, since the air introduced into the heat treatment chamber 11 is heated by the gas heating heater 35 provided in the introduction duct 22, the gas heating heater 35 is used for the temperature management of the heat treatment chamber 11 for the gas treatment duct 24. Each of the heaters 31 provided in the can be used exclusively for temperature control of the catalyst 30. Therefore, the catalyst 30 can be set to an optimum activation temperature without being influenced by the heating temperature of the workpiece W.

  Furthermore, in this gas processing unit 20B, since the entrance end 22a of the introduction duct 22 is opened and air is circulated through the connection duct 28, the same effect as in the third embodiment is obtained. Of course, a circulation path closer to the heat treatment chamber 11 than the circulation path by the connecting duct 28 is formed by the second connecting duct 27, and heating for gas heating provided in the circulating path including the second connecting duct 27 is performed. Since it becomes the structure heated with the container 35, it becomes possible to recycle the air with few temperature drops.

  In the first to fourth embodiments described above, the connecting flanges 14 and 25 are used as means for connecting the gas introduction part 12 and the gas outlet part 13 of the heat treatment unit 10 and the gas passages (21A to 21D). One connecting portion is detachably connected by fastening means (bolts and nuts), and the second connecting portion including the connecting flanges 15 and 26 is detachably connected by fastening means (bolts and nuts). The invention is not limited to this. For example, the first and second connection portions may be connected by other means such as screws or welding, or the connection may be released.

It is a schematic block diagram of the heat processing apparatus which concerns on 1st Embodiment of this invention. It is a schematic block diagram of the heat processing apparatus which concerns on other embodiment of this invention. It is a schematic block diagram of the heat processing apparatus which concerns on other embodiment of this invention. It is a schematic block diagram of the heat processing apparatus which concerns on 2nd Embodiment of this invention. It is a schematic block diagram of the heat processing apparatus which concerns on 3rd Embodiment of this invention. It is a schematic block diagram of the heat processing apparatus which concerns on 4th Embodiment of this invention.

Explanation of symbols

1A to 1D Heat treatment apparatus 10 Heat treatment unit 11 Heat treatment chamber 12, 12a Gas introduction part 13, 13a Gas outlet part 14, 25 Connecting flange (first connection part)
15, 26 Connecting flange (second connecting part)
20A to 20D Gas processing unit 21A to 21D Gas passage 22 Introduction duct 23 Outlet duct 27 Second connection duct 28 Connection duct 30 Catalyst 31, 35 Heater 32, 34 Blower

Claims (5)

A gas processing unit which is attached to a heat treatment unit having a gas introduction part and a gas lead-out part communicating with the heat treatment room together so that an object to be heat treated can be taken in and out of the heat treatment room,
It said gas introduction portion first introduction duct connecting portion via a detachably connected to the front Symbol the second in derivation duct and the outlet duct to the gas outlet portion through a second connecting portion is detachably connected the connecting part has a gas processing duct connected to the opposite side, provided with a gas passage for leading the thermally processed gas from the introduced heat treatment gas to the gas introduction portion and the gas outlet portion,
The gas treatment duct is provided with a catalyst for decomposing sublimates generated from the heat-treated material, contained in the heat-treated gas, and a heater for heating at least the catalyst, and the gas passage includes gas processing unit, characterized in that one or more blowers for guiding the heat treatment gas and the heat treated gas in a predetermined direction is provided. The gas processing unit according to claim 1,
The gas processing duct and characterized in that it connects the other side of the exit-side end and the second connecting portion of the outlet duct on the opposite side of the entry end and the first connecting portion of the inlet duct Gas processing unit. The gas processing unit according to claim 1,
From the first connecting portion of the inlet duct entry end of the opposite side it is opened, and the second connecting portion of the gas processing duct the outlet duct have been consolidated on the opposite side of the exit end , before SL and gas heating heater provided in the inlet duct, the outlet duct, a gas processing, characterized in that said blower is provided to at least one of said gas processing duct and the inlet duct unit. The gas processing unit according to claim 1,
The introduction and the first connecting portion of the duct entry end of the opposite side is opened, and the gas processing duct is consolidated on the opposite side of the exit-side end and the second connecting portion of the outlet duct Rutotomoni , said middle of said catalyst and said a heater and a downstream position than locations provided with the induction duct of the gas processing duct is communicatively connected via a connection duct, the joining point between the connecting duct inlet duct A gas processing unit, wherein a gas heating heater and the blower are provided on the downstream side. The gas processing unit according to claim 4,
A position downstream of the junction with the connection duct of the introduction duct and upstream of the gas heating heater and the blower and the middle of the outlet duct are connected to each other via a second connection duct. The gas processing unit characterized by being made.

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