JP5107528B2 - Exhaust gas treatment unit - Google Patents

Description

  The present invention relates to an exhaust gas processing unit for discharging a gas generated in a furnace for heat-treating an object to be processed to the outside after being decomposed by a catalyst.

  In a heat treatment apparatus that heats an object to be processed such as a glass substrate for a plasma display coated with an organic substance or a binder inside a furnace, a gas containing binder volatiles is generated from the heated object to be processed. Therefore, the heat treatment apparatus discharges this gas from the exhaust pipe to the outside of the furnace. Some heat treatment apparatuses have an exhaust gas processing unit on an exhaust pipe (see, for example, Patent Document 1). The gas introduced into the exhaust pipe is exhausted after passing through the exhaust gas processing unit and subjected to oxidative decomposition or the like.

  Inside the exhaust gas processing unit, a filter unit and a catalyst unit are arranged in this order along the exhaust direction. The filter unit accommodates a metal honeycomb rectangular parallelepiped filter. The filter removes solids contained in the gas passing through the filter unit in the exhaust direction. The catalyst unit accommodates a rectangular parallelepiped catalyst carrier of a metal honeycomb. The catalyst carrier oxidizes and decomposes the binder volatiles contained in the gas passing through the inside of the catalyst unit in the exhaust direction.

  The filter and the catalyst carrier are periodically replaced because their performance deteriorates with use. The replacement is performed for each filter unit and catalyst unit in consideration of the convenience of work. Specifically, after stopping the furnace, the nut at the top of the exhaust gas treatment unit is removed, the upper lid is opened, the filter unit to be replaced is removed, and a new filter unit is mounted. Thereafter, the upper lid is closed and fixed with a nut, and the furnace is again driven to start heat treatment. Since the filter unit and the catalyst unit have a rectangular parallelepiped shape, the filter unit and the catalyst unit can be easily attached and detached.

The reason why the driving of the furnace is stopped at the time of replacement is that gas that has not been oxidized and decomposed may leak when the upper cover is opened and the filter unit or the like is removed. This is because the gas before treatment may be harmful to the human body or may have a strange odor, and is discharged at a high temperature.
Japanese Patent Laid-Open No. 2004-316987

  However, in the configuration of the above-described Patent Document 1, driving of the furnace must be stopped in order to replace the filter unit and the catalyst unit, and productivity is reduced.

  An object of the present invention is to provide an exhaust gas treatment unit capable of safely and easily exchanging a catalyst carrier while driving a furnace.

The exhaust gas treatment unit of the present invention includes a catalyst storage chamber. The catalyst chamber storage chamber is located inside or outside the furnace on the exhaust path for guiding the gas generated inside the furnace to heat-treat the object to be processed in a predetermined exhaust direction and exhausting it outside, and pellets carrying the catalyst A catalyst support in the form of a cylinder is stored. Further, the catalyst chamber storage chamber has a part of the outer wall formed of a ventilation surface through which gas can pass through the chamber in the exhaust direction. Further, the catalyst storage chamber is provided with an openable and closable catalyst insertion port for introducing a new catalyst carrier into the room on the upper side and a catalyst carrier housed in the room on the lower side with respect to the outdoor side. And an openable and closable catalyst discharge port for discharge to the outside of the furnace. The direction of the catalyst inlet and the direction of the catalyst outlet are vertical, and the exhaust direction is horizontal .

  In this configuration, the gas passing through the catalyst storage chamber is decomposed by the catalyst carrier. The catalyst carrier in the catalyst storage chamber is exchanged by discharging a predetermined amount from the catalyst inlet after being discharged from the catalyst outlet. Since this catalyst carrier is in the form of pellets, it has high fluidity. Moreover, since the catalyst discharge port is disposed on the lower side of the main unit, the used catalyst carrier flows out of the catalyst storage chamber due to its own weight during discharge. In addition, since the catalyst charging port is disposed on the upper side of the main unit, the unused catalyst carrier flows into the catalyst storage chamber under its own weight when being loaded. Therefore, the catalyst carrier can be easily replaced.

Also, since the direction of the catalyst inlet and the direction of the catalyst outlet are different from the gas exhaust direction, the gas flows out from the catalyst inlet and the catalyst outlet when the catalyst carrier is replaced. Can be prevented. Thus, the replacement operation can be performed safely without stopping the driving of the furnace during the replacement operation of the catalyst carrier.
That is, the catalyst carrier is discharged from the room in the vertical direction and charged into the room in the vertical direction. On the other hand, the gas is guided in the horizontal direction and is sequentially discharged through the pretreatment agent storage chamber and the catalyst storage chamber. Therefore, since the charging direction and discharging direction of the catalyst carrier are completely different from the exhausting direction of the gas, the gas flows out from the catalyst charging port, the catalyst discharging port, the processing agent charging port, and the processing agent discharging port at the time of replacement. It can be prevented more reliably. Further, since the loading direction and the discharging direction of the catalyst carrier are vertical, the fluidity due to the weight of the catalyst carrier is the highest, and replacement can be performed more easily.

The exhaust gas processing unit of the present invention can further include a pretreatment agent storage chamber. The pretreatment agent storage chamber stores a pellet-shaped filter member, is located upstream of the catalyst storage chamber in the exhaust direction, and a part of the outer wall is formed by a vent surface through which gas can pass through the chamber in the exhaust direction. ing. The pretreatment agent storage chamber includes an openable and closable treatment agent inlet for introducing a new filter member into the room located on the upper side, and a filter member housed in the room located on the lower side. An openable and closable treatment agent discharge port for discharging outside the chamber is exposed to the outside of the furnace. The direction of the processing agent inlet and the direction of the processing agent outlet are formed in the vertical direction .

  In this configuration, the solid matter contained in the gas passing through the pretreatment agent storage chamber is removed by the filter member. Thereafter, the gas passes through the catalyst storage chamber and is decomposed by the catalyst carrier. The filter member stored in the pretreatment agent storage chamber is exchanged by discharging a predetermined amount from the processing agent inlet after being discharged from the processing agent outlet. Since this treatment agent carrier is in the form of pellets, it has high fluidity. In addition, since the treatment agent discharge port is disposed on the lower side of the main unit, the used filter member flows out of the pretreatment agent storage chamber due to its own weight during discharge. Further, since the treatment agent charging port is arranged on the upper side of the main body unit, the unused filter member flows into the pretreatment agent storage chamber by its own weight at the time of charging. Therefore, the filter member can be easily replaced.

In addition, since the direction of the processing agent inlet and the direction of the processing agent outlet are different from the gas exhaust direction, the gas is discharged from the processing agent inlet and the processing agent outlet when the filter member is replaced. It can prevent outflow. Thus, the replacement work can be performed safely without stopping the driving of the furnace during the replacement work of the filter member.
That is, the filter member is discharged from the room in the vertical direction and is put into the room in the vertical direction. On the other hand, the gas is guided in the horizontal direction and is sequentially discharged through the pretreatment agent storage chamber and the catalyst storage chamber. Therefore, since the filter member input direction and discharge direction are completely different from the gas exhaust direction, it is more likely that gas flows out of the catalyst input port, catalyst discharge port, treatment agent input port, and treatment agent discharge port during replacement. It can be surely prevented. Moreover, since the input direction and the discharge direction of the filter member are vertical directions, the fluidity due to the weight of the filter member is the highest, and replacement can be performed more easily.

  In the exhaust gas processing unit of the present invention, the catalyst storage chamber and the pretreatment agent storage chamber can communicate with each other through a common vent surface.

  In this configuration, the catalyst storage chamber and the pretreatment agent storage chamber communicate with each other with a common ventilation surface formed in a part of the outer wall. Therefore, the size of the main unit can be made compact, and the cost increase can be suppressed by reducing the number of parts by using the ventilation surface in common.

  In the exhaust gas processing unit of the present invention, the passage surface of the catalyst storage chamber and the pretreatment agent storage chamber can be formed of a metal mesh.

  In this configuration, the generated gas passes through the vent surface formed of a metal mesh and passes through the catalyst storage chamber and the pretreatment agent storage chamber. Therefore, the strength of the catalyst storage chamber and the pretreatment agent storage chamber for storing the catalyst carrier and the filter member can be easily secured without increasing the cost.

  According to the exhaust gas processing unit of the present invention, the catalyst carrier can be safely and easily replaced while the furnace is driven, so that productivity can be improved and the burden on the replacement operator can be reduced. it can.

  Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a cross-sectional view showing a schematic configuration of a heat treatment apparatus including an exhaust gas treatment unit according to an embodiment of the present invention. The heat treatment apparatus 100 includes a continuous firing furnace 10, an exhaust pipe line 30, an exhaust gas treatment unit 50, and the like, and performs heat treatment on an object to be processed such as a glass substrate for plasma display coated with an organic substance or a binder.

  The continuous firing furnace 10 has a flat rectangular parallelepiped shape formed by a bottom wall 10A, a top wall 10B, and left and right side walls 10C, 10C made of a thick plate-like hard heat insulating material obtained by vacuum forming ceramic fibers. In the continuous firing furnace 10, a plurality of electric heaters 10D are embedded in the top wall 10B and the like. The electric heater 10 heats the inside of the continuous firing furnace 10.

  The continuous firing furnace 10 is formed long in the front-rear direction (perpendicular to the paper surface of FIG. 1), and includes a plurality of conveying rollers 2 having both ends penetrating the left and right side walls 10C, 10C. The plurality of transport rollers 2 are arranged with a certain interval in the front-rear direction. Each of the plurality of conveying rollers 2 includes a sprocket 2A that is rotatably supported at both ends outside the continuous baking furnace 10 and meshes with a common driving chain (not shown) at one end.

  The plurality of transport rollers 2 are simultaneously rotated at a predetermined rotational speed via the sprocket 2A by the rotation of the drive chain, and transport the workpiece W in the front-rear direction at a constant speed.

  Moreover, the continuous baking furnace 10 is equipped with the gas suction member 20 above the inside. The gas suction member 20 has a tubular shape with both ends closed, and is provided over substantially the entire width of the continuous firing path 10 in the left-right direction in FIG. A large number of holes 21 are formed in the gas suction member 20 throughout. The hole 21 sucks in an atmospheric gas (hereinafter referred to as gas) containing binder volatiles generated from the workpiece W.

  The gas suction member 20 is connected to the exhaust pipe 30. The exhaust pipe 30 which is the exhaust path of the present invention guides the gas sucked into the gas suction member 20 in the direction of the arrow X which is the exhaust direction and discharges it to the outside. The exhaust pipe 30 is formed of a plurality of (three in FIG. 1) branch paths 301 to 303 on one end side. The branch paths 301 to 303 penetrate from the outside into the continuous firing path 10 and are connected to the gas suction member 20.

  The exhaust pipe line 30 between the branch paths 301 to 303 and the exhaust gas processing unit 50 is formed in duplicate by a heat retaining heater 30A and a heat retaining heat insulating material 30B. Therefore, there is no concern that the temperature of the gas sucked from the gas suction member 20 is lowered and the binder volatiles are solidified before being led to the exhaust gas processing unit 50. The heat retaining heater 30A and the heat insulating material 30B reduce the distance of the exhaust pipe 30 from the continuous firing furnace 10 to the exhaust gas processing unit 50 by bringing the exhaust gas processing unit 50 closer to the continuous firing furnace 10. Is not necessary.

  Further, an ejector 40 using a venturi effect is connected to the tip of the exhaust pipe 30. The gas in the continuous firing furnace 10 is discharged to the outside through the gas suction member 20 and the exhaust pipe line 30 by the negative pressure generated by driving the ejector 40. Instead of the ejector 40, the exhaust pipe 30 may be connected to an exhaust blower to perform exhaust.

  The exhaust gas processing unit 50 is located between the branch paths 301 to 303 of the exhaust pipe 30 and the ejector 40, and oxidatively decomposes the gas passing therethrough. The exhaust gas processing unit 50 includes a heater portion 51, a pretreatment agent storage chamber 52, a catalyst storage chamber 53, and the like that are sequentially arranged along the arrow X direction.

  The heater unit 51 includes an auxiliary heater 511 and the like. The auxiliary heater 511 heats the passing gas to the catalyst activation temperature or higher, preferably 350 ° C. or higher. The pretreatment agent storage chamber 52 stores a plurality of pellet-shaped filter members. The filter member removes solids contained in the gas that passes through the pretreatment agent storage chamber 52.

The catalyst storage chamber 53 stores a plurality of pellet-shaped catalyst carriers. The catalyst carrier oxidizes and decomposes the binder volatiles contained in the gas passing through the catalyst storage chamber 53. The catalyst carrier is preferably a ceramic or refractory metal porous carrier on which an oxidation catalyst such as Pt, Pd, Ag ₂ O having an activation temperature in the range of 200 to 350 ° C. is carried. The filter member preferably does not carry the catalyst of the catalyst carrier.

  2A and 2B are a front view and a side cross-sectional view showing the configuration of the pretreatment agent storage chamber 52 and the catalyst storage chamber 53, respectively. Note that FIG. 2A is a diagram viewed from the arrow Y direction illustrated in FIG. In the pretreatment agent storage chamber 52, an outer wall portion through which gas passes is formed by ventilation surfaces 60 and 61 of a metal mesh. In the catalyst storage chamber 53, the outer wall portion through which the gas passes is formed of a ventilation surface 61, 62 of a metal mesh.

  The treatment agent storage chamber 52 and the catalyst storage chamber 53 have the same shape and communicate with each other through a ventilation surface 61 used as a common outer wall. Thereby, the size of the exhaust gas processing unit 50 can be made compact, and the cost increase can be suppressed by reducing the number of parts by using the ventilation surface 61 in common. Note that the pretreatment agent storage chamber 52 and the catalyst storage chamber 53 do not need to communicate with each other, and the pretreatment agent storage chamber 52 only needs to be positioned upstream of the catalyst storage chamber 53 in the arrow X direction.

  Further, the treatment agent storage chamber 52 and the catalyst storage chamber 53 are covered with a heat insulating material 54 on the entire outer wall except the ventilation surfaces 60 to 61.

  The gas in the exhaust pipe 30 passes through the ventilation surface 60, and after the solid matter is removed by the filter member in the pretreatment agent storage chamber 52, the gas passes through the ventilation surface 61 and the binder volatiles are removed by the catalyst carrier. It is oxidatively decomposed. Thereafter, the gas passes through the ventilation surface 62 and is discharged from the ejector 40 to the outside.

  The pretreatment agent storage unit 52 includes a treatment agent inlet 52A that can be opened and closed by a stopper 52B at an upper portion, and a treatment agent discharge port 52C that can be opened and closed by a stopper 52D at a lower portion. The processing agent inlet 52A and the processing agent outlet 52C are open in the vertical direction. The processing agent inlet 52A and the processing agent outlet 52C are used when the stored filter member is replaced.

  For example, first, the stopper 52D is removed to open the treatment agent discharge port 52C. Here, since the processing agent discharge port 52C has a vertical direction and the filter member is in a pellet form and has high fluidity, when the processing agent discharge port 52C is opened, the used filter member is caused by its own weight. It flows out of the pretreatment agent storage chamber 52. The filter member that flows out is collected in a collection container or the like. Next, the processing agent discharge port 52C is closed with the stopper 52D, the stopper 52B is removed, and the processing agent inlet 52A is opened. Thereafter, a new filter member is introduced by a predetermined amount from the processing agent inlet 52A. Here, the direction of the processing agent inlet 52A is vertical, and the filter member has high fluidity as described above. Therefore, the new filter member falls by its own weight and flows into the pretreatment agent storage chamber 52. Thereafter, the plug 52B closes the processing agent inlet 52A to complete the replacement operation.

  Similar to the pretreatment agent storage chamber 52, the catalyst storage chamber 53 includes a catalyst inlet 53A that is openable and closable at the top by a plug 53B, and a treatment agent discharge port 53C that is closable by a plug 53D at the bottom. Yes. The catalyst inlet 53A and the catalyst outlet 53C are open in the vertical direction. The catalyst inlet 53A and the catalyst outlet 53C are used when replacing the catalyst carrier housed in the same procedure as the filter member replacement procedure described above.

  The filter member and the catalyst carrier can be replaced simultaneously with the discharge operation and the input operation.

  As described above, the inlets 52A and 53A of the pretreatment agent storage chamber 52 and the catalyst storage chamber 53 are arranged in the upper part, and the outlets 52C and 53C are arranged in the lower part. Since the catalyst carrier can be easily discharged and charged by its own weight, the filter member and the catalyst carrier can be easily exchanged.

  Also, the direction of the inlets 52A and 53A and the direction of the outlets 52C and 53C, which are vertical directions, and the direction of gas exhaustion in the pretreatment agent storage chamber 52 and the catalyst storage chamber 53 which are horizontal directions are completely different. Therefore, when the filter member and the catalyst carrier are exchanged, the gas can be prevented from flowing out from the input ports 52A and 53A and the exhaust ports 52C and 53C. Thus, the replacement operation can be performed safely without stopping the driving of the furnace during the replacement operation of the filter member and the catalyst carrier.

  Therefore, since the filter member and the catalyst carrier can be exchanged safely and easily while the continuous firing furnace 10 is driven, productivity can be improved and the burden on the exchange operator can be reduced.

  In the present embodiment, the direction of the inlets 52A and 53A and the outlets 52C and 53C is the vertical direction, and the exhaust direction of the gas is the horizontal direction. However, the present invention is not limited to this, and the inlets 52A and 53A In addition, the direction of the discharge ports 52C and 53C and the exhaust direction of the gas may be different. Further, the arrangement positions of the input ports 52A, 53A and the discharge ports 52C, 53C are not limited to the upper and lower portions of the storage chambers 52, 53, but the storage chambers where the filter member and the catalyst carrier flow by their own weight. What is necessary is just the upper side and the lower side of 52,53.

  In the present embodiment, the exhaust gas processing unit 50 connected to the continuous firing furnace 10 has been described. However, the present invention is not particularly limited to this, and heat treatment that generates gas when heat treatment is performed on an object to be processed inside. The present invention can be applied to any exhaust gas treatment unit connected to the apparatus.

  Moreover, in this embodiment, although the exhaust gas processing unit 50 is installed outside the continuous firing furnace 10, it may be installed inside a furnace that performs heat treatment. For example, a part of the exhaust pipe is provided inside the furnace, and a catalyst storage chamber and a pretreatment agent storage room are installed in a part of the exhaust pipe. The catalyst inlet of the catalyst storage chamber and the processing agent inlet of the pretreatment agent storage chamber extend from the upper side of the exhaust gas treatment unit so that the catalyst carrier and the filter member can flow into the chamber from the outside. It arrange | positions in the state exposed outside with the outer wall above.

  On the other hand, the catalyst discharge port of the catalyst storage chamber and the treatment agent discharge port of the pretreatment agent storage chamber extend from the lower side of the exhaust gas processing unit so that the catalyst carrier and the filter member flow out from the room to the outside, It is arranged in a state where it is exposed to the outside on the outer wall below the unit.

  Since the interior of the furnace is heated by heating means such as an electric heater, the temperature does not decrease until the gas is introduced to the exhaust gas treatment unit. There is no need to provide a heater. Thereby, an increase in cost can be suppressed.

  Further, in the present embodiment, the exhaust gas processing unit is provided with the pretreatment agent storage chamber, but may be configured without.

It is sectional drawing which shows the schematic structure of the heat processing apparatus provided with the exhaust gas processing unit which concerns on embodiment of this invention. It is the front view and side sectional view showing composition of a pretreatment agent storage room and a catalyst storage room.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Continuous firing furnace 30 Exhaust pipe 50 Exhaust gas processing unit 52 Pretreatment agent storage chamber 52A Treatment agent inlet 52C Treatment agent outlet 53 Catalyst storage chamber 53A Catalyst inlet 53C Catalyst outlet 54 Insulation material 60-62 Ventilation surface

Claims (4)

A pellet-shaped catalyst carrier that carries a catalyst is located inside or outside the furnace on an exhaust path that guides a gas generated inside the furnace to heat-treat the object to be treated in a predetermined exhaust direction and discharges the gas to the outside. A catalyst storage chamber for storing the gas, wherein the gas storage chamber includes a catalyst storage chamber in which a part of an outer wall is formed with a vent surface that can freely pass through the chamber in the exhaust direction;
The catalyst storage chamber includes an openable and closable catalyst inlet for introducing a new catalyst carrier into the chamber located on the upper side, and the catalyst carrier accommodated in the chamber located on the lower side. An openable and closable catalyst outlet for discharging outside the chamber, exposed outside the furnace,
The direction of the catalyst inlet and the direction of the catalyst outlet are vertical.
Exhaust gas treatment unit and the exhaust direction, wherein the horizontal der Rukoto. A pretreatment agent storage chamber for storing a pellet-shaped filter member, which is located upstream of the catalyst storage chamber in the exhaust direction, and has a ventilation surface that allows the gas to pass through the chamber in the exhaust direction. It has a pretreatment agent storage chamber in which a part is formed,
The pretreatment agent storage chamber is located on the upper side, and an openable / closable treatment agent introduction port for introducing a new filter member into the chamber, and the filter member located on the lower side and accommodated in the chamber And an openable and closable treatment agent discharge port for discharging the liquid to the outside, exposed to the outside of the furnace,
Exhaust gas treatment unit according to claim 1 orientation and orientation of the treatment agent outlet of the treatment agent inlet is characterized by vertical der Rukoto.   The exhaust gas processing unit according to claim 2, wherein the catalyst storage chamber and the pretreatment agent storage chamber communicate with each other through the common ventilation surface. The exhaust gas processing unit according to claim 2 or 3 , wherein the passage surface of the catalyst storage chamber and the pretreatment agent storage chamber is formed of a wire mesh.

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