JP5070185B2 - Exhaust gas treatment equipment - Google Patents

Exhaust gas treatment equipment Download PDF

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JP5070185B2
JP5070185B2 JP2008281814A JP2008281814A JP5070185B2 JP 5070185 B2 JP5070185 B2 JP 5070185B2 JP 2008281814 A JP2008281814 A JP 2008281814A JP 2008281814 A JP2008281814 A JP 2008281814A JP 5070185 B2 JP5070185 B2 JP 5070185B2
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exhaust gas
sublimate
gauge
filter layer
casing
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JP2010104960A (en
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正行 向井
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Koyo Thermo Systems Co Ltd
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Description

本発明は、熱処理炉から排出された排気ガスに含まれる昇華物を除去する排気ガス処理装置に関する。   The present invention relates to an exhaust gas processing apparatus that removes sublimates contained in exhaust gas discharged from a heat treatment furnace.

従来、液晶パネル（カラーフィルタ）製造用のガラス基板の加熱処理には、熱風循環式の熱処理炉が多用されている。この熱風循環式の熱処理炉は、加熱器で加熱した空気を炉内（熱処理槽内）で循環させて、炉内に配置したガラス基板を加熱するものである。
このガラス基板の加熱処理においては、例えばガラス基板に塗布された溶剤等が高温に加熱されることにより、当該溶剤に含まれる昇華成分が気化して、処理雰囲気が昇華成分により汚染される。このような処理雰囲気中では、ガラス基板も汚染されてその品質が低下することになるので、処理雰囲気の一部を排出して炉内の清浄度を確保することが行われている。この炉内から排出された排気ガスについては、排気ガス処理装置に導入して昇華物を除去した後、熱交換器によって熱処理炉に供給される空気と熱交換させて、大気中に排出することが行われている。 Conventionally, hot air circulation type heat treatment furnaces are frequently used for heat treatment of glass substrates for manufacturing liquid crystal panels (color filters). This hot air circulation type heat treatment furnace circulates air heated by a heater in the furnace (in a heat treatment tank) to heat a glass substrate disposed in the furnace.
In the heat treatment of the glass substrate, for example, when a solvent or the like applied to the glass substrate is heated to a high temperature, the sublimation component contained in the solvent is vaporized, and the treatment atmosphere is contaminated with the sublimation component. In such a processing atmosphere, the glass substrate is also contaminated and the quality of the glass substrate is deteriorated. Therefore, a part of the processing atmosphere is discharged to ensure the cleanliness in the furnace. Exhaust gas discharged from the furnace is introduced into an exhaust gas processing device, sublimates are removed, and then heat exchange is performed with the air supplied to the heat treatment furnace by a heat exchanger, which is then discharged into the atmosphere. Has been done.

前記排気ガス処理装置には、前記排気ガス中の昇華物を除去する昇華物除去部材が設けられている。この昇華物除去部材は、排気ガスが透過可能な板状、ペレット状又はハニカム状のものであり、それぞれ排気ガスの流路に沿って所定間隔毎にあるいは一体的に、いずれにしても層状に配列されている。この昇華物除去部材に排気ガスを透過させることにより、昇華物を除去することができ、これにより、熱交換器の内部に昇華物が堆積することに起因して熱交換効率が低下するのを防止している。   The exhaust gas treatment device is provided with a sublimate removal member for removing sublimate in the exhaust gas. This sublimation removing member is a plate-like, pellet-like or honeycomb-like material through which exhaust gas can permeate, and is arranged in layers either at predetermined intervals or integrally along the exhaust gas flow path. It is arranged. By allowing the exhaust gas to permeate through the sublimate removal member, it is possible to remove the sublimate, thereby reducing the heat exchange efficiency due to the deposition of the sublimate inside the heat exchanger. It is preventing.

前記昇華物除去部材は、昇華物によって徐々に汚染されるので、昇華物の除去能力が徐々に低下する。このため、熱交換器の内部に昇華物が徐々に堆積して、その熱交換効率が経時的に低下する。このため、前記昇華物除去部材の汚染状態を検知するための検知装置が提案されている。この検知装置として、例えば、前記昇華物除去部材の上流側と下流側との差圧を検出するもの、熱交換器の上流側と下流側との差圧を検出するもの（例えば特許文献１参照）、および昇華物除去部材の表面や熱交換器に付着した昇華物の量を、光学センサで検出するもの等が提案されている。   Since the sublimate removal member is gradually contaminated by the sublimate, the ability to remove the sublimate gradually decreases. For this reason, sublimates gradually accumulate inside the heat exchanger, and the heat exchange efficiency decreases with time. For this reason, the detection apparatus for detecting the contamination state of the said sublimate removal member is proposed. As this detection device, for example, a device that detects a differential pressure between the upstream side and the downstream side of the sublimate removal member, or a device that detects a differential pressure between the upstream side and the downstream side of the heat exchanger (see, for example, Patent Document 1). ), And an optical sensor for detecting the amount of sublimate adhering to the surface of the sublimate removal member or the heat exchanger.

特開平７−３２４８９３号公報JP-A-7-324893

ところが、前記差圧を検出する検知装置は、熱処理炉の炉内圧力の変化や昇華物の種類等によって、前記昇華物除去部材や熱交換器の上流側と下流側との差圧が変動し易い。また、光学センサを用いた検知装置については、光学センサ自体あるいは光学センサを昇華物から遮蔽する透明ガラスが昇華物で汚染される。このため、昇華物除去部材の汚染状態を正確に検知することができないという問題があった。また、いずれの検知装置についても、構造が複雑で装置のコストが高くつくという問題もあった。   However, in the detection device that detects the differential pressure, the differential pressure between the upstream side and the downstream side of the sublimate removal member or the heat exchanger varies depending on the change in the furnace pressure of the heat treatment furnace or the type of the sublimate. easy. Moreover, about the detection apparatus using an optical sensor, the transparent glass which shields an optical sensor itself or an optical sensor from a sublimation object is contaminated with a sublimation object. For this reason, there was a problem that the contamination state of the sublimate removal member could not be detected accurately. In addition, each of the detection devices has a problem that the structure is complicated and the cost of the device is high.

この発明は、前記問題点に鑑みてなされたものであり、簡素な構造にて昇華物除去部材の汚染状態を正確に検知することができる排気ガス処理装置を提供することを目的としている。   The present invention has been made in view of the above problems, and an object of the present invention is to provide an exhaust gas treatment device that can accurately detect the contamination state of a sublimation product removing member with a simple structure.

前記目的を達成するためのこの発明の排気ガス処理装置は、熱処理炉から排出される排気ガスを導入して排出する筐体と、この筐体の内部に設けられ、前記排気ガスを透過させて当該排気ガスに含まれる昇華物を除去する昇華物除去部材とを備える排気ガス処理装置であって、前記昇華物除去部材が、前記昇華物を捕集するフィルタ層と、このフィルタ層を透過させた排気ガスに残留する昇華物を酸化燃焼させる触媒層とを有し、前記フィルタ層および触媒層を、前記排気ガスの流路に沿って設置しているとともに、前記筐体の内部に、前記昇華物を付着させるゲージを、前記排気ガスの流路に沿ってフィルタ層および触媒層の少なくとも一方に挿通した状態で、当該筐体から引き抜き可能に設けていることを特徴としている。 In order to achieve the above object, an exhaust gas treatment apparatus of the present invention includes a housing for introducing and exhausting exhaust gas discharged from a heat treatment furnace, and an exhaust gas treatment device provided inside the housing for allowing the exhaust gas to pass therethrough. An exhaust gas treatment device comprising a sublimate removal member that removes sublimation contained in the exhaust gas, wherein the sublimation removal member allows the filter layer to collect the sublimate and permeate the filter layer. A catalyst layer that oxidizes and burns sublimates remaining in the exhaust gas, and the filter layer and the catalyst layer are disposed along the flow path of the exhaust gas, and inside the casing, A gauge for attaching a sublimate is provided so as to be able to be pulled out from the casing in a state where the gauge is attached to at least one of the filter layer and the catalyst layer along the flow path of the exhaust gas .

前記の構成の排気ガス処理装置によれば、前記ゲージに排気ガス中の昇華物を経時的に付着させることができるので、前記ゲージを筐体から引き抜いて、当該ゲージにおける昇華物の付着状態を目視観察することにより、前記昇華物除去部材の汚染状態を検知することができる。このため、簡素な構造にて前記昇華物除去部材の汚染状態を正確に検知することができる。 According to the exhaust gas treatment apparatus of the construction described above, since the sublimate in the exhaust gas to the gauge can be temporally attached to the gauge, minus unplug from the housing, the adhesion of a sublimate in the gauge By visually observing the state, the contamination state of the sublimate removal member can be detected. For this reason, the contamination state of the sublimate removal member can be accurately detected with a simple structure.

また、前記ゲージを前記排気ガスの流路に沿ってフィルタ層および触媒層の少なくとも一方に挿通しているので、筐体から引き抜いたゲージのフィルタ層および触媒層の少なくとも一方に対応する位置の汚染状態を目視観察することにより、フィルタ層および触媒層の少なくとも一方の汚染状態を、排気ガスの流路に沿って容易に検知することができる。
さらに、前記排気ガス処理装置は、前記フィルタ層および／または触媒層が、排気ガスの流路に沿って複数層設置され、前記ゲージが複数層のフィルタ層および／または触媒層を挿通しており、前記ゲージには、フィルタ層および／または触媒層の汚染状態を排気ガスの流路に沿って検知するための目盛が形成されているのが好ましい。 Further, since the gauge is inserted through at least one of the filter layer and the catalyst layer along the exhaust gas flow path, contamination at a position corresponding to at least one of the filter layer and the catalyst layer of the gauge pulled out from the housing By visually observing the state, the contamination state of at least one of the filter layer and the catalyst layer can be easily detected along the flow path of the exhaust gas.
Further, in the exhaust gas treatment device, the filter layer and / or the catalyst layer are provided in a plurality of layers along the exhaust gas flow path, and the gauge passes through the plurality of filter layers and / or the catalyst layer. The gauge is preferably provided with a scale for detecting the contamination state of the filter layer and / or the catalyst layer along the flow path of the exhaust gas.

この発明の排気ガス処理装置によれば、昇華物除去部材の汚染状態を、簡素な構造にてコスト安価にかつ正確に検知することができる。   According to the exhaust gas processing apparatus of the present invention, the contamination state of the sublimate removal member can be accurately detected at a low cost with a simple structure.

次に、本発明の好ましい実施形態について添付図面を参照しながら説明する。
図１は、本発明の一実施形態に係る排気ガス処理装置Ｂを備える廃熱回収装置Ａを示すブロック図であり、図２は前記排気ガス処理装置Ｂの要部斜視図である。
前記廃熱回収装置Ａは、前記排気ガス処理装置Ｂと、この排気ガス処理装置Ｂによって処理された排気ガスと熱処理炉Ｘに供給される空気（外気）との間で熱交換を行なわせる熱交換器Ｃとを備えている。 Next, preferred embodiments of the present invention will be described with reference to the accompanying drawings.
FIG. 1 is a block diagram showing a waste heat recovery apparatus A including an exhaust gas processing apparatus B according to an embodiment of the present invention, and FIG. 2 is a perspective view of a main part of the exhaust gas processing apparatus B.
The waste heat recovery device A is heat that exchanges heat between the exhaust gas processing device B, the exhaust gas processed by the exhaust gas processing device B, and the air (outside air) supplied to the heat treatment furnace X. And an exchanger C.

前記排気ガス処理装置Ｂは、熱処理炉Ｘの炉内から排出される昇華物を含む高温の排気ガスを導入して排出する筐体１と、この筐体１に導入された排気ガス中の昇華物を除去する昇華物除去部材２とを有している。
前記筐体１は、排気ガスの流路の上流側に設けられた第１の筐体１１と、この第１の筐体１１の下流側に設けられた第２の筐体１２とによって構成されている。前記第１の筐体１１の吸気側１１ａは、第１のダクトＤ１を介して前記熱処理炉Ｘの炉内に連通されており、排気側１１ｂは、第２のダクトＤ２を介して前記第２の筐体１２の吸気側１２ａに連通されている。 The exhaust gas treatment device B introduces a high-temperature exhaust gas containing a sublimate discharged from the furnace of the heat treatment furnace X and discharges it, and sublimation in the exhaust gas introduced into the case 1. And a sublimation product removing member 2 for removing a product.
The casing 1 is composed of a first casing 11 provided on the upstream side of the exhaust gas flow path and a second casing 12 provided on the downstream side of the first casing 11. ing. The intake side 11a of the first casing 11 is communicated with the inside of the heat treatment furnace X via a first duct D1, and the exhaust side 11b is communicated with the second duct D2 via the second duct D2. The housing 12 communicates with the intake side 12a.

前記昇華物除去部材２は、第１の筐体１１の内部に設けられたフィルタ層２ａと、第２の筐体１２の内部に設けられた触媒層２ｂの２種類で構成されている。
前記フィルタ層２ａは、排気ガス中に含まれる昇華物の固化物や、触媒毒とされるイオウ（Ｓ）やリン（Ｐ）を含有する気体成分を捕集する板状のメッシュフィルタ、あるいはアルミナ（Ａｌ2Ｏ3）等のセラミック材料等からなるペレット状の層等で構成されている。
また、前記触媒層２ｂは、フィルタ層２ａを透過した排気ガス中に残留する昇華物を酸化燃焼させるものであり、ハニカム触媒や粒状（ペレット）触媒によって構成された層状のものである。この触媒層２ｂについても、排気ガスの流路に沿って設置されている。
前記昇華物除去部材２は、各筐体１１，１２の内部において当該筐体１１，１２の内壁に対して気密性を有して設けられている。 The sublimation product removing member 2 includes two types of filter layer 2 a provided in the first housing 11 and catalyst layer 2 b provided in the second housing 12.
The filter layer 2a is a plate-like mesh filter that collects solidified substances of sublimates contained in exhaust gas, and gas components containing sulfur (S) and phosphorus (P) that are considered to be catalyst poisons, or alumina. It is composed of a pellet-like layer made of a ceramic material such as (Al 2 O 3 ).
The catalyst layer 2b oxidizes and burns sublimates remaining in the exhaust gas that has passed through the filter layer 2a, and is a layered structure composed of a honeycomb catalyst or a granular (pellet) catalyst. The catalyst layer 2b is also installed along the exhaust gas flow path.
The sublimation product removing member 2 is provided inside the housings 11 and 12 so as to be airtight with respect to the inner walls of the housings 11 and 12.

前記第１の筐体１１の内部には、フィルタ層２ａの汚染状態を目視観察するためのゲージ５が導入されている。このゲージ５は長尺の棒材からなり、その先端側に格子状の目盛り５１が形成されている（図３参照）。このゲージ５は、その長手方向を排気ガスの流路に沿わせた状態で、筐体１１の内部に抜き取り可能に差し込まれている。このゲージ５はフィルタ層２ａに設けられた貫通孔２ｃを挿通しており（図２参照）、その目盛５１は、ゲージ５の先端部から排気側１１ｂのフィルタ層２ａの下流側に至る範囲に形成されている。前記ゲージ５と昇華物除去部材２の貫通孔２ｃとの間には、隙間が形成されており、この隙間により少量の排気ガスをゲージ５の目盛り５１部分に導いて、当該目盛り５１部分に排気ガス中の昇華物を付着させるようにしている。   A gauge 5 for visually observing the contamination state of the filter layer 2a is introduced into the first housing 11. The gauge 5 is made of a long bar, and a grid-like scale 51 is formed on the tip side (see FIG. 3). The gauge 5 is detachably inserted into the housing 11 in a state where its longitudinal direction is along the flow path of the exhaust gas. The gauge 5 is inserted through a through hole 2c provided in the filter layer 2a (see FIG. 2), and the scale 51 extends from the tip of the gauge 5 to the downstream side of the filter layer 2a on the exhaust side 11b. Is formed. A gap is formed between the gauge 5 and the through hole 2c of the sublimate removal member 2, and a small amount of exhaust gas is guided to the scale 51 portion of the gauge 5 through this gap, and exhausted to the scale 51 portion. The sublimate in gas is made to adhere.

前記熱交換器Ｃは、筐体４の内部を隔壁４ｃによって排気室４ａと給気室４ｂとに区画したものであり、排気ガス処理装置Ｂによって昇華物が除去された排気ガスが、第３のダクトＤ３を介して排気室４ａに導入され、外気が給気室４ｂに導入されて、隔壁４ｃを介して排気ガスと外気との熱交換が行われる。   In the heat exchanger C, the inside of the housing 4 is partitioned into an exhaust chamber 4a and an air supply chamber 4b by a partition wall 4c, and the exhaust gas from which sublimates have been removed by the exhaust gas processing device B is the third. The air is introduced into the exhaust chamber 4a through the duct D3, the outside air is introduced into the air supply chamber 4b, and heat exchange between the exhaust gas and the outside air is performed through the partition wall 4c.

前記の構成の排気ガス処理装置Ｂによれば、前記第１の筐体１１の内部を通過する排気ガス中の昇華物を、ゲージ５に経時的に付着させることができるので、前記ゲージ５を筐体１１から定期的に引き抜き抜いて、昇華物の付着状態を目視観察することにより、前記フィルタ層２ａの汚染状態（劣化状態）を検知することができる。したがって、フィルタ層２ａの使用限度に対応する汚染状態を予め把握しておくことにより、フィルタ層２ａの交換時期を判別することができる。このように、前記排気ガス処理装置Ｂは、ゲージ５を用いてフィルタ層２ａの汚染状態を検知するものであるので、簡素な構造にて当該フィルタ層２ａの汚染状態を正確かつコスト安価に検知することができる。   According to the exhaust gas processing apparatus B having the above-described configuration, the sublimate in the exhaust gas passing through the inside of the first housing 11 can be attached to the gauge 5 over time. By periodically pulling out the housing 11 and visually observing the attached state of the sublimate, the contamination state (deterioration state) of the filter layer 2a can be detected. Therefore, it is possible to determine the replacement time of the filter layer 2a by grasping in advance the contamination state corresponding to the use limit of the filter layer 2a. As described above, the exhaust gas processing device B detects the contamination state of the filter layer 2a using the gauge 5, and thus the contamination state of the filter layer 2a is accurately and inexpensively detected with a simple structure. can do.

特に、前記ゲージ５が排気ガスの流路に沿った状態でフィルタ層２ａを挿通しているので、フィルタ層２ａの汚染状態を、ゲージ５によって容易に検知することができる。すなわち、第１の筐体１１から引き抜いたゲージ５の目盛り５１部分のうちの、フィルタ層２ａの位置と対応する部分における汚染状態を判別することにより、フィルタ層２ａの汚染状態を排気ガスの流路に沿って知ることができる。このため、使用限度まで汚染が進んだフィルタ層２ａを容易に検知することができるので、フィルタ層２ａの不必要な交換やメンテンナンス作業を防止することができる。   In particular, since the gauge 5 is inserted through the filter layer 2a along the exhaust gas flow path, the contamination state of the filter layer 2a can be easily detected by the gauge 5. That is, the contamination state of the filter layer 2a is determined by determining the contamination state in the portion corresponding to the position of the filter layer 2a in the scale 51 portion of the gauge 5 pulled out from the first housing 11. You can know along the road. For this reason, it is possible to easily detect the filter layer 2a that has been contaminated to the limit of use, so that unnecessary replacement and maintenance work of the filter layer 2a can be prevented.

前記ゲージ５は、第１の筐体１１の内部だけでなく第２の筐体１２の内部にも引き抜き可能に設けられていてもよい。この場合には、前記第１の筐体１１の内部のフィルタ層２ａを透過させた排気ガスに残留する昇華物を、第２の筐体１２内のゲージ５に経時的に付着させることができるので、前記ゲージ５を第２の筐体１２から引き抜き抜いて、昇華物の付着状態を目視観察することにより、触媒層２ｂの汚染状態を排気ガスの流路に沿って検知することもできる。   The gauge 5 may be provided not only inside the first housing 11 but also inside the second housing 12 so that it can be pulled out. In this case, the sublimate remaining in the exhaust gas that has passed through the filter layer 2a inside the first casing 11 can be adhered to the gauge 5 in the second casing 12 over time. Therefore, the contamination state of the catalyst layer 2b can be detected along the exhaust gas flow path by pulling out the gauge 5 from the second housing 12 and visually observing the attached state of the sublimate.

さらに、前記ゲージ５は、第２の筐体１２の内部のみに引き抜き可能に設けられていてもよい。この場合には、前記ゲージ５を第２の筐体１２から引き抜き抜いて、昇華物の付着状態を目視観察することにより、フィルタ層２ａの全体的な汚染状態を検知することができるとともに、前記触媒層２ｂの汚染状態を排気ガスの流路に沿って検知することができる。   Furthermore, the gauge 5 may be provided only in the second housing 12 so that it can be pulled out. In this case, by pulling out the gauge 5 from the second housing 12 and visually observing the attached state of the sublimate, it is possible to detect the overall contamination state of the filter layer 2a, and The contamination state of the catalyst layer 2b can be detected along the exhaust gas flow path.

なお、この発明は、前記実施の形態に限定されるものではない。例えば、第１の筐体１１と第２の筐体１２とは一体形成して実施する場合もある。また、昇華物除去部材２については、昇華物の種類に応じてフィルタ層２ａまたは触媒層２ｂの何れか一方のみで構成する場合もある。
さらに、前記筐体１に、少量の排ガスを通す分岐路を形成し、この分岐路に臨ませてゲージ５を配置してもよく、この場合には、ゲージ５を昇華物除去部材２に挿通させることなく配置することができる。 The present invention is not limited to the above embodiment. For example, the first casing 11 and the second casing 12 may be formed integrally. In addition, the sublimation product removing member 2 may be configured by only one of the filter layer 2a and the catalyst layer 2b depending on the type of sublimation product.
Further, a branch passage through which a small amount of exhaust gas is passed may be formed in the casing 1, and a gauge 5 may be disposed facing the branch passage. In this case, the gauge 5 is inserted into the sublimate removal member 2. It can arrange without making it.

この発明の一実施形態に係る排気ガス処理装置を備える廃熱回収装置示すブロック図である。It is a block diagram showing a waste heat recovery device provided with an exhaust gas processing device concerning one embodiment of this invention. 前記排気ガス処理装置の要部斜視である。It is a principal part perspective view of the said exhaust gas processing apparatus. ゲージの要部拡大図である。It is a principal part enlarged view of a gauge.

符号の説明Explanation of symbols

１ 筐体
１１ 第１の筐体
１２ 第２の筐体
２ 昇華物除去部材
２ａ フィルタ層
２ｂ 触媒層
５ ゲージ
Ａ 廃熱回収装置
Ｂ 排気ガス処理装置
Ｃ 熱交換器
Ｘ 熱処理炉 DESCRIPTION OF SYMBOLS 1 Housing | casing 11 1st housing | casing 12 2nd housing | casing 2 Sublimation removal member 2a Filter layer 2b Catalyst layer 5 Gauge A Waste heat recovery apparatus B Exhaust gas processing apparatus C Heat exchanger X Heat treatment furnace

Claims (2)

熱処理炉から排出される排気ガスを導入して排出する筐体と、この筐体の内部に設けられ、前記排気ガスを透過させて当該排気ガスに含まれる昇華物を除去する昇華物除去部材とを備える排気ガス処理装置であって、
前記昇華物除去部材が、前記昇華物を捕集するフィルタ層と、このフィルタ層を透過させた排気ガスに残留する昇華物を酸化燃焼させる触媒層とを有し、前記フィルタ層および触媒層を、前記排気ガスの流路に沿って設置しているとともに、
前記筐体の内部に、前記昇華物を付着させるゲージを、前記排気ガスの流路に沿ってフィルタ層および触媒層の少なくとも一方に挿通した状態で、当該筐体から引き抜き可能に設けていることを特徴とする排気ガス処理装置。 A casing that introduces and discharges exhaust gas discharged from the heat treatment furnace, and a sublimate removing member that is provided inside the casing and that allows the exhaust gas to permeate and remove sublimates contained in the exhaust gas. An exhaust gas treatment device comprising:
The sublimate removal member has a filter layer that collects the sublimate, and a catalyst layer that oxidizes and burns sublimate remaining in the exhaust gas that has passed through the filter layer. And installed along the flow path of the exhaust gas,
A gauge for attaching the sublimate to the inside of the casing is provided so as to be able to be pulled out from the casing in a state of being inserted into at least one of the filter layer and the catalyst layer along the flow path of the exhaust gas . An exhaust gas treatment device characterized by the above. 前記フィルタ層および／または触媒層が、排気ガスの流路に沿って複数層設置され、前記ゲージが複数層のフィルタ層および／または触媒層を挿通しており、前記ゲージには、フィルタ層および／または触媒層の汚染状態を排気ガスの流路に沿って検知するための目盛が形成されている請求項１記載の排気ガス処理装置。 A plurality of the filter layers and / or catalyst layers are installed along the exhaust gas flow path, and the gauge passes through the plurality of filter layers and / or catalyst layers. The exhaust gas processing apparatus according to claim 1, wherein a scale for detecting a contamination state of the catalyst layer along the exhaust gas flow path is formed .
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