TWI476356B - Heat treatment device - Google Patents

Description

Heat treatment device

The present invention relates to a heat treatment apparatus for heat-treating a material to be heat treated.

In the conventional heat treatment apparatus, the heat-treated room is heated while the air in the heat treatment chamber is looped, thereby heat-treating the object to be heat-treated in the heat treatment chamber. Such a heat treatment apparatus is used in a pre-bake process or a post-bake process of a photoresist or an organic film, for example, in the manufacturing process of a flat panel display (FPD: Flat Display Panel). In the heat treatment of the heat-treated material such as a glass substrate, the volatile component contained in the photoresist or the like is vaporized to generate a large amount of sublimate, and the sublimate is recrystallized, scattered or adhered to the heat treatment apparatus. The problem.

For example, Japanese Patent Laid-Open No. Hei 10-141868 discloses a method in which air in the heat treatment chamber is discharged through a discharge pipe while heating and feeding the outside air into the heat treatment chamber. The air in the above heat treatment chamber is ventilated. By ventilating the heat treatment chamber in this manner, the sublimate can be prevented from recrystallizing and adhering to the heat treatment apparatus.

In the heat treatment apparatus of Japanese Laid-Open Patent Publication No. Hei 10-141868, a gas processing portion having a heater and a heat treatment for air is provided between the outer wall of the heat treatment portion and the heat treatment chamber. The inside and outside of the chamber of the blower, the problem is that When the sublimate adhering to the inner wall of the heat treatment chamber or the like is to be cleaned and removed, the cleaning device for cleaning may cause malfunction of an electric device such as a blower or a heater of the gas treatment unit.

An object of the present invention is to provide a heat treatment apparatus which can clean a heat treatment chamber of a heat treatment portion while preventing a malfunction of a blower or a heater.

The heat treatment apparatus according to the present invention includes: a heat treatment unit having a gas introduction portion and a gas discharge portion that communicate with the heat treatment chamber, wherein the heat treatment chamber is for accommodating the object to be heat-treated, and the heat-treated product to be contained can be taken out from the heat treatment chamber; And the gas processing unit, wherein the gas passage is configured to introduce a heat treatment gas into the gas introduction unit, and to derive a gas after the heat treatment from the gas discharge unit, wherein the gas passage is provided with a catalyst. Decomposing a sublimate generated from the heat-treated material when heat-treating the heat-treated material; heating the at least the catalyst; and one or two or more blowers, and the gas for heat treatment and the gas after the heat treatment Guide the direction. Thereby, it is possible to clean the heat treatment chamber of the heat treatment portion while preventing the blower or the heater from malfunctioning.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

(First Embodiment)

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic view of a heat treatment apparatus according to a first embodiment of the present invention. The heat treatment apparatus 1A is used, for example, in a manufacturing process of a flat panel display, and is a so-called clean oven installed in a clean room.

The heat treatment apparatus 1A includes a heat treatment unit 10 and a gas treatment unit 20A. The heat treatment unit 10 has a heat treatment chamber 11 for accommodating a heat-treated product (hereinafter also referred to as a workpiece) W, and the heat-treated material W can be taken out from the heat treatment chamber 11. The gas processing unit 20 has a gas passage 21A for discharging a gas subjected to heat treatment from the heat treatment chamber 11 (for example, air subjected to heat treatment), and introducing a heat treatment gas (for example, heating air) into the heat treatment. The heat treatment chamber 11 of the portion 10 is inside.

The heat treatment unit 10 includes a gas introduction unit 12 for introducing a heat treatment gas from the gas treatment unit 20A, and a gas discharge unit 13 for discharging the gas subjected to the heat treatment from the heat treatment chamber 11. The outer side of the heat treatment chamber 11 is surrounded by the heat insulating wall 11a.

A holding member (not shown) is provided inside the heat treatment chamber 11, and the holding member can support and hold one or two or more heat-treated objects W in a predetermined state, for example. The holding member is placed at a position shown by a chain double-dashed line in FIG. The gas introduction portion 12 has a tubular shape and extends outward from the heat insulating wall 11a of the heat treatment chamber 11 and communicates with the heat treatment chamber 11. A connection flange 14 is provided on the intake side end of the gas introduction portion 12. The gas discharge portion 13 also has a tubular shape and extends outward from the heat insulating wall 11a of the heat treatment chamber 11 and communicates with the heat treatment chamber 11. The outlet side of the gas discharge portion 13 A connecting flange 15 is provided on the upper side.

The gas passage 21A has an introduction pipe 22 connected to the gas introduction portion 12, a discharge pipe 23 connected to the gas discharge portion 13, and a gas treatment pipe 24 provided between the introduction pipe 22 and the outlet pipe 23. A connection flange 25 is provided on the air outlet side end of the introduction pipe 22, and the connection flange 25 is connected to the connection flange 14 of the gas introduction portion 12. A connection flange 26 is provided on the intake side end of the outlet pipe 23, and the connection flange 26 is connected to the connection flange 15 of the gas discharge portion 13. For example, the flange 25 of the introduction pipe 22 and the flange 14 of the gas introduction portion 12 are connected by a connecting means such as a bolt or a nut, and the flange 26 of the discharge pipe 23 and the convex portion of the gas discharge portion 13 are connected by, for example, a connecting means such as a bolt or a nut. With the edge 15, the heat treatment chamber 11 of the heat treatment portion 10 and the gas passage 21A of the gas treatment portion 20A can be connected to each other to form a loop passage. Further, a vibrator (not shown) for adjusting the air volume is provided at an appropriate position of the gas passage 21A.

Further, a catalyst (catalyst) 30, a heater 31, a blower 32, and a pretreatment agent 33 are provided in the gas treatment tube 24. The blower 32 is for circulating air in the above-mentioned loop passage, and the heater 31 is for heating the catalyst 30 and the air. The air heated by the heater 31 enters the heat treatment chamber 11 through the introduction pipe 22, and heats the material to be heatd W in the heat treatment chamber 11. When the heat treatment of the heat-treated material W is performed, a sublimate is generated from the object W to be heat-treated. The sublimate is contained in the air after the heat treatment, and the sublimate-containing air flows through the catalyst 30 through the gas deriving portion 13 and the outlet tube 23.

The catalyst 30 is used to promote the liter contained in the air after the heat treatment For the oxidative decomposition reaction of the organic matter, for example, a noble metal such as platinum (Pt) or palladium (Pd) or an active metal such as an alloy of these noble metals may be used. The above catalyst 30 can obtain catalytic performance at a temperature of about 150 to 350 ° C. Therefore, in the present embodiment, the heater 31 is disposed on the front side of the catalyst 30 (a position upstream of the catalyst 30 in the direction in which the air flows through the loop passage). In addition, when a substance called a catalytic poison (for example, an organic compound containing Si, P, S, or the like) is mixed into a sublimate, there is a possibility that the catalyst 30 is poisoned (failed), and the catalyst 30 is prevented from being poisoned. Preferably, a pretreatment agent 33 is provided on the front side of the catalyst 30.

As described above, in the heat treatment apparatus 1A of the first embodiment having the above-described configuration, since the air blower 32 and the heater 31 are disposed in the gas passage 21A (outside the heat treatment portion 10) provided separately from the heat treatment portion 10, The inside of the heat treatment chamber 11 can be cleaned in a state where the blower 32 or the heater 31 is prevented from malfunctioning. Further, since the gas passage 21A is detachably connected to the gas introduction portion 12 and the gas outlet portion 13 of the heat treatment portion 10 by the connection means including the connection flanges 14, 15, 25, 26, bolts, nuts, and the like, By removing the gas processing unit 20A having the air blower 32 and the heater 31 provided in the gas passage 21A from the heat treatment unit 10, the gas processing unit 20A and the heat treatment unit 10 can be separated, whereby the blower can be surely prevented The inside of the heat treatment chamber 11 is cleaned in a state where 32 or the heater 31 is malfunctioning.

Further, since the gas derived from the heat treatment chamber 11 sequentially flows through the outlet pipe 23, the gas processing pipe 24, and the introduction pipe 22 in the above-described circulation passage. Thereafter, it flows back into the heat treatment chamber 11, so that the gas can be circulated by a blower 32, and both the catalyst 30 and the gas can be heated by the heater 31. Further, by separating the heat treatment portion 10 and the gas treatment portion 20A, it is possible to exchange only the heat treatment portion 10 or only the gas treatment portion 20A.

(Second embodiment)

Figure 2 is a schematic view of a heat treatment apparatus according to a second embodiment of the present invention. In FIG. 2, the same members as those in FIG. 1 are denoted by the same reference numerals.

This heat treatment apparatus 1D includes a gas treatment unit 20D that is different from the gas treatment unit 20A of the first embodiment. That is, the gas processing section 20D includes a gas passage 21D having an open end 22a provided at the intake side end of the introduction pipe 22, and an open end 24a provided at the outlet side end of the gas processing pipe 24. The gas processing tube 24 of the gas processing unit 20D is provided with a catalyst 30 and a heater 31, and the introduction tube 22 is provided with a blower 34 and a heater 35. Further, although the pretreatment agent is not shown in FIG. 4, a pretreatment agent may be provided.

The gas flow in the heat treatment apparatus 1D having the above structure is as follows. That is, the air that has flowed into the introduction pipe 22 from the open end 22a is heated by the heater 35, and then flows into the heat treatment chamber 11. This heated air is used to heat treat the workpiece W. The air (heat-treated air) that has been heat-treated to the workpiece W contains a sublimate, which flows into the discharge pipe 23 and is guided into the gas processing pipe 24. In the gas processing tube 24, the heat-treated air passes through the catalyst 30 to cause oxygen to be contained in the sublimate contained therein. The decomposition reaction is then discharged from the open end 24a. Further, 16 in Fig. 2 is a baffle plate for preventing backflow of air inside the heat treatment chamber 11, and causing air to flow from the gas introduction portion 12 to the gas discharge portion 13, which is provided in the heat treatment chamber 11 due to the provision of the baffle plate 16. Inside, a side opposite to the gas introduction portion 12 forms a passage 16a.

As described above, the air blower 34 and the heaters 31 and 35 are also disposed in the gas passage 21D (outside the heat treatment portion 10) provided separately from the heat treatment portion 10 in the heat treatment apparatus 1D, so that the blower 34 or the heater 31 can be prevented. The inside of the heat treatment chamber 11 is cleaned in a state where the failure occurs at 35. Further, since the gas passage 21D is detachably connected to the gas introduction portion 12 and the gas discharge portion 13 of the heat treatment portion 10 by the connection means including the connection flanges 14, 15, 25, 26, bolts, nuts, and the like, The gas processing unit 20D having the air blower 34 and the heaters 31 and 35 provided in the gas passage 21D can be separated from the heat treatment unit 10. Thereby, it is possible to clean the inside of the heat treatment chamber 11 while surely preventing the blower 34 or the heaters 31, 35 from malfunctioning.

Further, by separating the heat treatment portion 10 and the gas treatment portion 20D, it is possible to exchange only the heat treatment portion 10 or only the gas treatment portion 20D.

Further, the air taken in from the open intake side end 22a of the introduction pipe 22 is heated by the heater 35, introduced into the heat treatment chamber 11, and then discharged through the outlet pipe 23 and the gas treatment pipe 24, so that it is introduced into the heat treatment. The air in chamber 11 contains no sublimate. Therefore, since fresh air can always be introduced into the heat treatment chamber 11, it is difficult to reduce the oxidative decomposition reaction performance of the catalyst 30 on the sublimate. In addition, in the gas processing unit 20D In the middle, since the air is circulated in one direction and the blower 34 is provided in the introduction pipe 22, the gas can be introduced into the heat treatment chamber 11 through the introduction pipe 22, and the gas can be led out from the heat treatment chamber 11 through the discharge pipe 23.

Further, in the second embodiment described above, the air blower 34 is provided in the introduction pipe 22, but it is not limited thereto. For example, the blower 34 may be disposed in the outlet pipe 23 and the gas processing pipe 24, or the blower 34 may be disposed in at least one of the introduction pipe 22, the gas processing pipe 24, and the outlet pipe 23.

(Third embodiment)

Figure 3 is a schematic view of a heat treatment apparatus according to a third embodiment of the present invention. In FIG. 3, the same members as those in FIG. 2 are denoted by the same reference numerals.

This heat treatment apparatus 1C includes a gas treatment unit 20C that is different from the gas treatment unit 20D of the second embodiment. That is, the gas processing section 20C includes a gas passage 21C having a connecting pipe 28 for communicating the introduction pipe 22 and the gas processing pipe 24. One end portion of the connecting pipe 28 is connected between the position where the catalyst 30, the heater 31, and the blower 32 are disposed in the gas processing pipe 24 and the outlet side end 24a. The other end of the connecting pipe 28 is connected to a midway portion of the introduction pipe 22. In the gas processing unit 20C, the heater 35 and the blower 34 are disposed at positions downstream of the portion where the connection pipe 28 is connected to the introduction pipe 22. Further, although the pretreatment agent is not shown in FIG. 3, a pretreatment agent may be provided. In addition, the above-described blower 32 can be omitted.

The air flow in the heat treatment apparatus 1C having the above structure is as follows Show. That is, the air that has flowed into the introduction pipe 22 from the open end 22a is heated by the heater 35, and then flows into the heat treatment chamber 11. This heated air is used to heat treat the workpiece W. The sublimate is contained in the air after the heat treatment, and the air after the heat treatment flows into the discharge pipe 23, and then introduced into the gas processing pipe 24. In the gas treatment tube 24, the air subjected to the heat treatment passes through the catalyst 30 to cause an oxidative decomposition reaction of the sublimate contained therein, and then is discharged from the open end 24a, or flows back to the heat treatment chamber 11 through the connection pipe 28 and the introduction pipe 22. Further, 16 in Fig. 3 is the same baffle as the second embodiment.

As described above, in the heat treatment apparatus 1C of the third embodiment, since the blowers 32 and 34 and the heaters 31 and 35 are disposed in the gas passage 21C (outside the heat treatment portion 10) provided separately from the heat treatment portion 10, The inside of the heat treatment chamber 11 is cleaned in a state where the blowers 32, 34 or the heaters 31, 35 are prevented from malfunctioning. Further, since the gas passage 21C is detachably connected to the gas introduction portion 12 and the gas discharge portion 13 of the heat treatment portion 10 by the connection means including the connection flanges 14, 15, 25, 26, bolts, nuts, and the like, The gas processing unit 20C having the air blowers 32 and 34 and the heaters 31 and 35 provided in the gas passage 21C can be separated from the heat treatment unit 10. Thereby, it is possible to clean the inside of the heat treatment chamber 11 while surely preventing the blowers 32, 34 or the heaters 31, 35 from malfunctioning, and it is possible to exchange only the heat treatment portion 10 or only the gas treatment portion 20C.

Further, in the heat treatment apparatus 1C, since the intake side end 22a of the introduction pipe 22 is in an open state, fresh air can be introduced into the introduction pipe 22 in. Further, since the air derived from the heat treatment chamber 11 is purified by the catalyst 30, heated by the heater 31, and then flows into the introduction pipe 22 through the connection pipe 28, heat loss can be reduced. Further, since the gas heating heater 35 provided in the introduction pipe 22 is used for the temperature control of the heat treatment chamber 11, and the heater 31 provided in the gas processing pipe 24 is used for the temperature control of the catalyst 30, it is possible to separately The heaters 35, 31 are exclusively utilized. Thereby, the temperature of the catalyst 30 is set to an optimum temperature at which catalytic performance can be obtained without receiving the heating temperature (set temperature) of the material W to be heat-treated.

(Fourth embodiment)

Figure 4 is a schematic view of a heat treatment apparatus according to a fourth embodiment of the present invention. In FIG. 4, the same members as those in FIG. 3 are denoted by the same reference numerals.

The heat treatment apparatus 1B includes a gas passage 21B having a second connecting pipe 27. One end portion of the second connecting pipe 27 is connected to a position downstream of the inlet pipe 22 than the portion where the connecting pipe 28 is connected, and is located closer to the upstream than the position where the gas heating heater 35 and the blower 34 are provided, so that the second portion The connecting pipe 27 and the inlet pipe 22 are in communication. The other end portion of the second connecting pipe 27 is connected to a midway portion of the outlet pipe 23 so that the second connecting pipe 27 and the outlet pipe 23 communicate with each other. The second connecting pipe 27 is surrounded by a heat insulating wall.

The structure of the gas processing unit 20B is as follows. The gas processing tube 24 is provided with a catalyst 30, a heater 31, and a blower 32. As described above, in the introduction pipe 22, the blower 34 and the heater 35 are provided at a position closer to the downstream than the position at which the second connection pipe 27 is connected. Heater 35 is used to be imported The air in the heat treatment chamber 11 is heated. Further, the baffle 16 is provided inside the heat treatment chamber 11. Further, although the pretreatment agent is not shown in FIG. 4, a pretreatment agent may be provided.

The gas flow in the heat treatment apparatus 1B having the above structure is as follows. That is, the air that has flowed into the introduction pipe 22 from the open end 22a is heated by the heater 35, flows into the heat treatment chamber 11, and is used for heat treatment in the heat treatment chamber 11. The air after the heat treatment contains a sublimate. The air after the heat treatment is introduced into the outlet pipe 23, and then branched to the second connecting pipe 27 and the gas processing pipe 24. The air introduced into the second connecting pipe 27 is again heated by the heater 35, and then flows back to the heat treatment chamber 11 through the introduction pipe 22. That is, the air is circulated between the heat treatment chamber 11 and the second connection pipe 27. On the other hand, the heat-treated air containing the sublimate introduced into the gas processing tube 24 is contacted by the catalyst 30 to cause the sublimate contained therein to undergo oxidative decomposition reaction, and then discharged from the open end 24a, or through the connecting pipe 28 and introduced. The tube 22 flows back to the heat treatment chamber 11.

As described above, in the heat treatment apparatus 1B, since the air blowers 32 and 34 and the heaters 31 and 35 are disposed in the gas passage 21B (outside the heat treatment portion 10) provided separately from the heat treatment portion 10, the blower 32 can be prevented. 34 or the inside of the heat treatment chamber 11 is cleaned in a state where the heaters 31, 35 are malfunctioning. Further, since the gas passage 21B is detachably connected to the gas introduction portion 12 and the gas discharge portion 13 of the heat treatment portion 10 by the connection means including the connection flanges 14, 15, 25, 26, bolts, nuts, and the like, The gas processing unit 20B having the air blowers 32 and 34 and the heaters 31 and 35 provided in the gas passage 21B can be separated from the heat treatment unit 10. Thereby, it is possible to clean the inside of the heat treatment chamber 11 while surely preventing the blowers 32, 34 or the heaters 31, 35 from malfunctioning, and it is possible to exchange only the heat treatment portion 10 or only the gas treatment portion 20B.

Further, in the gas processing unit 20B described above, the intake side end 22a of the introduction pipe 22 is in an open state, and the air is circulated through the connection pipe 28, so that the same effects as those of the third embodiment can be obtained. Moreover, since the second connecting pipe 27 is provided to form a loop passage closer to the heat treatment chamber 11 than the loop passage formed by the connecting pipe 28, and the gas passage for heating is provided in the loop passage including the second connecting pipe 27. The heater 35 is thus capable of reusing air having a small temperature drop.

In the first to fourth embodiments described above, the connecting means for connecting the gas introduction portion 12 and the gas outlet portion 13 of the heat treatment portion 10 to the gas passages (21A to 21D) includes the connection flanges 14, 25, and 15 26, bolts and nuts, but the invention is not limited thereto. For example, a connecting device composed of a combination of a screw and a nut may be used, and other connecting devices may be used.

Further, in the above-described first to fourth embodiments, the gas introduction portion 12 and the gas discharge portion of the heat treatment portion 10 are detachably separated by the connection means (the connection flanges 14, 15, 25, 26 and the bolts and the nuts). 13 is connected to the gas passages (21A to 21D), but the present invention is not limited thereto. For example, the gas introduction portion 12 and the introduction tube 22 may be connected by welding or the like, and the gas discharge portion 13 and the discharge tube 23 may be connected by welding or the like. In the case of using this connection method, the air blower 32 and the like, the heater 31, and the like are also disposed in the gas passage (outside the heat treatment portion 10) provided separately from the heat treatment portion 10. In (21A to 21D), it is difficult for the cleaning liquid or the like to fly to the blower 32 or the like, the heater 31, and the like, and the heat treatment chamber 11 can be cleaned while preventing the blower and the heater from malfunctioning, and the object of the present invention can be attained.

Further, in the above-described first to fourth embodiments, one gas processing unit (20A to 20D) is provided in one heat treatment unit 10. However, the invention is not limited thereto, and two or more heat treatment units 10 may be provided. Gas treatment department. For example, a case where two gas processing units are provided in one heat treatment unit 10 will be described with reference to Fig. 5 .

In the heat treatment unit 10 shown in FIG. 5, in addition to one gas introduction portion 12 and the gas discharge portion 13, one gas introduction portion 12a and a gas introduction portion 13a are provided. The gas introduction portion 12 and the gas introduction portion 13 are connected to the gas passage 21A of the gas treatment portion 20A to connect these, and the gas introduction portion 12a and the gas discharge portion 13a are connected to the gas passage 21A of the gas treatment portion 20A having the same configuration. Connected to make these connected. In this configuration, when only one gas introduction portion 12 and the gas introduction portion 13 are used, as shown in Fig. 6, the additional gas passage 21A is removed, and the gas introduction portion 12a and the gas discharge portion 13a are attached. The upper top cover 18 is ok.

Further, in the above embodiment, the catalyst 30 is provided only in the gas processing tube 24, but the present invention is not limited thereto. For example, as shown in FIG. 7, another catalyst 17 may be provided inside the heat treatment chamber 11. At this time, the baffle 16 may or may not be provided inside the heat treatment chamber 11. In the case of adopting such a structure, the oxidative decomposition reaction of the sublimate can be efficiently performed by the two catalysts 30, 17.

(Summary of Embodiment)

The above embodiment is summarized as follows: (1) In the heat treatment apparatus of the present embodiment, since the blower and the heater are disposed in the gas passage (the outside of the heat treatment portion) provided in the heat treatment portion, the blower or the heating can be prevented. The heat treatment chamber of the heat treatment portion is cleaned in a state where the device malfunctions.

(2) In the above heat treatment apparatus, it is preferable that the gas passage has an introduction pipe that is detachably connected to the gas introduction portion by a connection unit, and a discharge pipe that is detachably connected to the gas discharge portion by a connection unit. According to this configuration, since the connecting means is used, the introduction pipe and the outlet pipe of the gas processing portion can be opened from the heat treatment portion. In the case where the gas processing portion is opened from the heat treatment portion, the heat treatment chamber of the heat treatment portion can be cleaned in a state where the blower or the heater is surely prevented from malfunctioning. Further, by opening the gas processing portion from the heat treatment portion, it is possible to exchange only the heat treatment portion or only the gas treatment portion.

(3) In the above heat treatment apparatus, the gas passage has a gas processing pipe through which an intake side end of the introduction pipe and an outlet side end of the outlet pipe are connectable, and the gas treatment pipe can be disposed There are the above catalysts and the above heaters. In this configuration, a gas which is discharged from the heat treatment chamber sequentially flows through the outlet pipe, the gas treatment pipe, and the introduction pipe, and then flows back to the heat treatment chamber. Thus, the gas can be circulated by means of a blower, and the catalyst and gas can be heated by the heater of the gas treatment tube.

(4) in the above heat treatment apparatus, the gas passage has a gas a treatment tube, the inlet side end of the introduction tube may be in an open state, and a gas heating heater may be disposed in the introduction tube, and the gas treatment tube may be connected to an outlet side end of the outlet tube, the gas treatment The tube and the heater are disposed in the tube, and the blower may be disposed in at least one of the outlet tube, the gas treatment tube, and the introduction tube.

According to this configuration, since the gas absorbed from the open intake side end of the introduction pipe is heated by the gas heating heater and introduced into the heat treatment chamber, and is led out through the outlet pipe and the gas treatment pipe, it is introduced into the heat treatment chamber. The gas does not contain sublimates. Therefore, the fresh gas can always be introduced into the heat treatment chamber, and it is difficult to reduce the oxidative decomposition reaction performance of the catalyst on the sublimate. Further, with this configuration, since the gas is unidirectionally looped, a blower is provided in at least one of the introduction pipe, the outlet pipe, and the gas treatment pipe, so that the gas can be introduced into the heat treatment chamber, and the gas can be led out from the heat treatment chamber.

(5) In the above heat treatment apparatus, the gas passage has a gas treatment pipe and a connection pipe, and when the outlet side end of the outlet pipe is connected to a gas treatment pipe provided with the catalyst and the heater, the above-described discharge can be performed a gas processing tube is disposed at an outlet side end of the tube, and the gas processing tube is provided with the catalyst and the heater, and the gas processing tube is disposed closer to a downstream portion of the catalyst and the heater than the inlet tube. The inlet side of the inlet pipe may be open, and the inlet pipe may be provided with a portion closer to the downstream than the pipe connected to the pipe. A gas heating heater and the above air blower.

According to this configuration, since the intake side end of the introduction pipe is in an open state, fresh gas can be introduced. Further, since the gas derived from the heat treatment chamber is purified by the catalyst and heated by the heater, it is introduced into the introduction pipe through the connection pipe. Therefore, since the gas absorbed from the open intake side end of the introduction pipe can be heated and introduced into the heat treatment chamber, heat loss can be reduced. Further, since the gas heating heater provided in the introduction pipe can be used for temperature management of the heat treatment chamber, the heater provided in the gas treatment pipe is used for temperature management of the catalyst, and therefore these heaters can be utilized exclusively. Thereby, the temperature of the catalyst can be set to an optimum temperature at which catalytic performance can be obtained without being subjected to the heating temperature of the object to be heat-treated.

(6) In the above-described heat treatment apparatus, the gas passage has a second connecting pipe, and the position of the inlet pipe closer to the downstream than the position at which the connecting pipe is connected is closer to the upstream than the gas heating heater and the blower The outlet tubes can be connected by the second connecting tube described above. According to this configuration, since the intake side end of the introduction pipe is in an open state, and the gas is looped through the connection pipe, the same effect as the above heat treatment device can be obtained. Moreover, since the second connecting pipe is provided to form a loop passage closer to the heat treatment chamber than the loop passage formed by the connecting pipe, and the gas heating heater is provided in the loop passage, the temperature reduction can be reused Small gas.

(7) In the above heat treatment apparatus, a catalyst may be provided in the heat treatment chamber of the heat treatment unit. With this structure, it can be The capacity of the heat treatment chamber or the amount of sublimation produced, and the ability of the gas treatment unit is selected and selected.

1A‧‧‧The heat treatment unit

10‧‧‧ Heat Treatment Department

11‧‧‧ Heat treatment room

11a‧‧‧Insulation wall

12‧‧‧Gas introduction department

13‧‧‧Gas Derivation Department

14, 15, 25, 26‧‧‧ Connection flanges

20‧‧‧Gas Handling Department

20A‧‧‧Gas Handling Department

21A‧‧‧ gas passage

22‧‧‧Introduction tube

23‧‧‧Extraction tube

24‧‧‧ gas treatment tube

30‧‧‧ Catalyst

31‧‧‧heater

32‧‧‧Blowers

33‧‧‧Pretreatment agent

W‧‧‧ Heat treated material

Fig. 1 is a schematic view of a heat treatment apparatus according to a first embodiment of the present invention.

Fig. 2 is a schematic view of a heat treatment apparatus of a second embodiment of the present invention.

Figure 3 is a schematic view of a heat treatment apparatus of a third embodiment of the present invention.

Fig. 4 is a schematic view of a heat treatment apparatus of a fourth embodiment of the present invention.

Fig. 5 is a schematic view of a heat treatment apparatus according to another embodiment of the present invention.

Figure 6 is a schematic view of a heat treatment apparatus according to another embodiment of the present invention.

Figure 7 is a schematic view of a heat treatment apparatus according to another embodiment of the present invention.

1A‧‧‧The heat treatment unit

10‧‧‧ Heat Treatment Department

11‧‧‧ Heat treatment room

11a‧‧‧Insulation wall

12‧‧‧Gas introduction department

13‧‧‧Gas Derivation Department

14, 15, 25, 26‧‧‧ Connection flanges

20‧‧‧Gas Handling Department

20A‧‧‧Gas Handling Department

21A‧‧‧ gas passage

22‧‧‧Introduction tube

23‧‧‧Extraction tube

24‧‧‧ gas treatment tube

30‧‧‧ Catalyst

31‧‧‧heater

32‧‧‧Blowers

33‧‧‧Pretreatment agent

W‧‧‧ Heat treated material

Claims (6)

A heat treatment apparatus comprising: a heat treatment portion having a gas introduction portion and a gas discharge portion that communicate with a heat treatment chamber, wherein the heat treatment chamber is for accommodating a material to be heat-treated, and the heat-treated material to be contained can be taken out from the heat treatment chamber The heat treatment unit is not provided with a blower and a heater; and the gas treatment unit has a gas passage for introducing a heat treatment gas into the gas introduction unit, and deriving from the gas discharge unit to perform heat treatment. The gas passage has: an introduction pipe connected to the gas introduction portion by a first connection device; a discharge pipe connected to the gas discharge portion by a second connection device; and a gas treatment pipe and an outlet side end of the outlet pipe Connecting the gas processing tube of the gas passage; the catalyst is disposed to decompose the sublimate generated from the heat-treated material when the heat-treated material is heat-treated; and the heater heats at least the catalyst; a connecting device for detaching the introduction tube And connecting to the gas introduction unit; the second connection device is configured to detachably connect the outlet tube to the gas outlet unit; the introduction tube is provided with a gas heating heater, and the outlet tube and the gas treatment tube One or two or more blowers are provided in at least one of the introduction pipes, and the gas for heat treatment and the gas after the heat treatment are guided in a predetermined direction. The heat treatment apparatus according to claim 1, wherein the inlet end of the introduction tube is connected to the gas treatment tube. The heat treatment apparatus according to claim 1, wherein the intake side end of the introduction pipe is in an open state. The heat treatment apparatus according to claim 1, wherein the gas passage has a connection pipe; and the gas treatment pipe passes through the introduction pipe at a position further downstream than a portion where the catalyst and the heater are provided The connection pipe is connected to each other; the intake side end of the introduction pipe is in an open state, and the gas heating heater and the air blower are provided at a downstream side of the introduction pipe at a position closer to the connection pipe. . The heat treatment apparatus according to claim 4, wherein the gas passage has a second connecting pipe; a position at which the connecting pipe is connected to the inlet pipe and a position where the gas heating heater and the blower are provided Between the two, the outlet tube is connected to the second connecting tube. The heat treatment apparatus according to any one of claims 1 to 5, wherein a catalyst is also provided in the heat treatment chamber of the heat treatment unit.