JP2008298300A - Heat treatment device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a heat treatment device capable of cleaning the inside of a heat treatment chamber of a heat treatment portion in a state of preventing the failure of a blower and a heater. <P>SOLUTION: This heat treatment device comprises a heat treatment portion 10 receiving a heat treatment object W in a heat treatment chamber 11 in a state of being taken in and out, and having a gas lead-in portion 12 and a gas lead-out portion 13, and a gas passage 21A constituted to lead a gas for heat treatment to the gas lead-in portion 12 of the heat treatment portion 10 and to lead a heat-treated gas out from the gas lead-out portion 13. The gas passage 21A is provided with a catalyst 30 for decomposing a sublimate generated from the heat treatment object W in performing the heat treatment on the heat treatment object W, a gas treatment portion 20A provided with the heater 31 for heating at least the catalyst 30, and the air blower 32, and connectors (connection flanges 14, 15, 25, 26 and bolt/nut) for detachably connecting the gas passage 21A to the gas lead-in portion 12 and the gas lead-out portion 13 of the heat treatment portion 10. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a heat treatment apparatus for heat treating an object to be heat treated.

  2. Description of the Related Art Conventionally, as a heat treatment apparatus, a heat treatment apparatus is known in which heat treatment is performed by heating the object to be heat treated while circulating the air in the heat treatment chamber in a state where the object to be heat treated is accommodated in a heat treatment chamber of a heat treatment unit.

  Such a heat treatment apparatus may be used, for example, in a pre-bake or post-bake process of a photoresist or an organic thin film in an FPD (flat panel display) manufacturing process. In these processes, when a heat-treated object made of a glass substrate or the like is heat-treated, a volatile component contained in the photoresist or the like is vaporized to generate a large amount of sublimated material, and the sublimated material is recrystallized and heat-treated. There were problems such as scattering around the device and adhering to the periphery.

As a countermeasure for this problem, for example, Patent Document 1 describes that the outside of the heat treatment chamber is ventilated by heating the outside air and feeding the air into the heat treatment chamber while allowing the air in the heat treatment chamber to flow into the outlet duct. . By ventilating in this way, recrystallization of the sublimate and adhesion to the surroundings can be suppressed.
JP-A-10-141868

  However, in the heat treatment apparatus of Patent Document 1, a gas treatment unit having a blower and a heater for circulating air into and out of the heat treatment chamber is provided between the outer wall of the heat treatment portion and the heat treatment chamber. When trying to remove the sublimated material adhering to the inner wall of the heat treatment chamber by cleaning, there is a risk that an electric device such as a blower or a heater of the gas processing unit may be damaged by the cleaning liquid used for cleaning.

  This invention is made | formed in view of such a situation, and it aims at providing the heat processing apparatus which can wash | clean the heat processing chamber of a heat processing part in the state which prevents failure of a fan or a heater.

  According to the first aspect of the present invention, there is provided a heat treatment part having a gas introduction part and a gas lead part communicating with the heat treatment room, in which a material to be heat treated can be taken in and out of the heat treatment room, and a gas for heat treatment to the gas introduction part. Introducing a gas passage for introducing and heat-treating the gas from the gas lead-out section, in order to decompose the sublimate generated from the heat-treated material when the heat-treated material is heat-treated in the gas passage And a gas processing section provided with at least a heater for heating the catalyst, and one or more blowers for guiding the heat treatment gas and the heat treated gas in a predetermined direction. And

  According to a second aspect of the present invention, in the heat treatment apparatus according to the first aspect, the gas passage includes an introduction duct in which an outlet side end is detachably connected to the gas introduction part via a coupling means, and the gas lead-out And a lead-out duct having an inlet side end detachably connected to the part via a connecting means.

  The invention according to claim 3 is the heat treatment apparatus according to claim 2, wherein an inlet side end of the introduction duct and an outlet side end of the lead-out duct are connected via a gas processing duct, and the gas processing duct Further, the catalyst and the heater are provided.

  The invention according to claim 4 is the heat treatment apparatus according to claim 2, wherein an inlet side end of the introduction duct is opened, and a gas processing duct is connected to an outlet side end of the outlet duct. The catalyst and the heater are provided in a duct, the heater for gas heating is provided in the introduction duct, and the blower is provided in at least one of the outlet duct, the gas processing duct, and the introduction duct. It is provided.

  The invention according to claim 5 is the heat treatment apparatus according to claim 2, wherein an inlet side end of the introduction duct is opened, and a gas processing duct is connected to an outlet side end of the outlet duct. The catalyst and the heater are provided in the duct, and the downstream position of the gas processing duct where the catalyst and the heater are provided and the middle of the introduction duct are connected to each other via a connecting duct. And the heater for gas heating and the said air blower are provided downstream from the confluence | merging point with the connection duct of an introduction duct, It is characterized by the above-mentioned.

  The invention according to claim 6 is the heat treatment apparatus according to claim 5, wherein the position is downstream of the junction point of the introduction duct with the connection duct and upstream of the gas heating heater and the blower. And the middle of the lead-out duct are connected in communication via a second connection duct.

  The invention according to claim 7 is the heat treatment apparatus according to any one of claims 1 to 6, characterized in that another catalyst is also provided in the heat treatment chamber of the heat treatment section.

  According to the first aspect of the present invention, since the blower and the heater are disposed in the gas passage outside the heat treatment part away from the heat treatment part, the heat treatment chamber of the heat treatment part is in a state of preventing failure of the fan and the heater. Can be washed.

  According to the invention which concerns on Claim 2, it becomes possible to isolate | separate the introduction duct and derivation | leading-out duct of a gas processing part from a heat processing part by a connection means. In this disconnected state, the heat treatment chamber of the heat treatment section can be washed in a state that reliably prevents the blower and the heater from failing. Further, by separating the heat treatment part and the gas processing part, it is possible to exchange only the heat treatment part or to exchange only the gas treatment part.

  According to the invention of claim 3, a circulation path is formed in which the gas led out from the heat treatment chamber returns to the heat treatment chamber again in this order through the lead-out duct, the gas treatment duct, and the introduction duct, and the gas is circulated by one blower. And the catalyst and the gas can be heated by the heater.

  According to the fourth aspect of the present invention, the gas sucked from the open inlet end of the introduction duct is heated by the gas heating heater and introduced into the heat treatment chamber, and is led out through the lead-out duct and the gas treatment duct. Therefore, the gas sucked from the inlet side end of the introduction duct has no sublimation. For this reason, since fresh gas is always introduced into the heat treatment chamber, it is possible to make it difficult to reduce the oxidative decomposition reaction of the sublimate by the catalyst. Moreover, in this invention, by providing a blower in at least one of the introduction duct, the introduction duct, and the gas treatment duct, gas introduction into the heat treatment chamber and gas discharge from the heat treatment chamber are possible.

  According to the invention which concerns on Claim 5, since the entrance side end of the introduction duct is open | released, introduction of fresh gas is attained. Further, the gas led out from the heat treatment chamber is purified by the catalyst and heated by the heater, enters the introduction duct through the connection duct, and the gas sucked from the open entry side end of the introduction duct. Since they are mixed and introduced into the heat treatment chamber, heat loss can be reduced. In addition, since the gas introduced into the heat treatment chamber is heated by the gas heating heater provided in the introduction duct, the gas heating heater is used for temperature control of the heat treatment chamber, and the heater provided in the gas treatment duct is Each can be used exclusively for temperature control of the catalyst. Therefore, the catalyst can be set to an optimum activation temperature regardless of the heating temperature of the object to be heat treated.

  According to the invention of claim 6, since the inlet end of the introduction duct is opened and the gas is circulated through the connecting duct, it is of course possible to obtain the same effect as that of claim 5. That is, the circulation path closer to the heat treatment chamber than the circulation path by the connecting duct is formed by the second connecting duct and is heated by the gas heating heater provided in the circulation path. A small amount of gas can be reused.

  According to the invention which concerns on Claim 7, the capability of a gas processing part can be selected and selected according to the volume of a heat processing chamber, and the generation amount of a sublimate.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the drawings.

(First embodiment)
FIG. 1 is a schematic configuration diagram of a heat treatment apparatus according to the first embodiment of the present invention. This heat treatment apparatus 1A is used in, for example, an FPD manufacturing process, and is called a so-called clean oven installed in a clean room.

  1 A of heat processing apparatuses introduce | transduce the gas for heat processing, for example, heating air, into the heat processing part 10 which has the heat processing chamber 11 in which the to-be-processed object (it is also called workpiece | work) W is accommodated so that insertion / removal is possible, A gas processing unit 20A having a gas passage 21A for extracting heat-treated gas, for example, heat-treated air, from the heat treatment chamber 11 is provided.

  The heat treatment part 10 has a gas introduction part 12 into which the gas for heat treatment from the gas treatment part 20A is introduced, and a gas lead-out part 13 that leads out the heat-treated air from the heat treatment room 11, and the outside of the heat treatment room 11 is insulated. It is surrounded by a wall 11a.

  Inside the heat treatment chamber 11, for example, a holding member (not shown) capable of holding one or two or more objects to be heat treated W in a predetermined state is provided at a position indicated by a two-dot chain line. The gas introduction part 12 has a tubular shape communicating with the heat treatment chamber 11 and is provided with a connecting flange 14 at the inlet end thereof. The gas lead-out portion 13 is also in a tubular shape communicating with the heat treatment chamber 11 and is provided with a connecting flange 15 at the outlet end thereof.

  The gas passage 21 </ b> A includes an introduction duct 22 connected to the gas introduction part 12, a lead-out duct 23 connected to the gas lead-out part 13, and a gas processing duct 24 provided between the lead-in duct 22 and the lead-out duct 23. Have. A connecting flange 25 connected to the connecting flange 14 of the gas inlet 12 is provided at the outlet end of the introduction duct 22, and a connecting flange 15 of the gas outlet 13 is provided at the inlet end of the outlet duct 23. A connecting flange 26 is provided to be connected to each other. Then, the connection flange 25 of the introduction duct 22 and the connection flange 14 of the gas introduction part 12 are connected by fastening means such as bolts and nuts, and the connection flange 26 of the lead-out duct 23 and the gas lead-out part 13 are connected. When the flange 15 is connected by fastening means such as bolts and nuts, the heat treatment chamber 11 of the heat treatment section 10 and the gas passage 21A of the gas treatment section 20A are connected in communication to form a circulation passage. The gas passage 21A is provided with a damper (not shown) for adjusting the air volume at an appropriate position.

  The gas treatment duct 24 is provided with a catalyst 30, a heater 31, a blower 32, and a pretreatment agent 33. The blower 32 is for allowing air to circulate and flow through the circulation passage, and the heater 31 is for heating the catalyst 30 and the air. The air heated by the heater 31 enters the heat treatment chamber 11 through the introduction duct 22, and heats the workpiece W to be heat treated. At the time of this heat treatment, a sublimation product is generated from the workpiece W. The heat-treated air contains the sublimate and is given to the catalyst 30 via the gas outlet 13 and the outlet duct 23.

  The catalyst 30 is for accelerating the oxidative decomposition reaction of the sublimate contained in the heat-treated air. For example, a noble metal such as platinum (Pt) or palladium (Pd) or an active metal such as an alloy of these noble metals is used. Adopted. Such a catalyst 30 exhibits catalytic activity in a temperature atmosphere of about 150 to 350 ° C. Therefore, in the present embodiment, the heater 31 is disposed on the front side of the catalyst 30 (upstream side of the catalyst 30 in the direction in which air flows in the circulation passage). Further, if the sublimation contains an organic compound containing a catalyst poison, for example, Si, P, S, etc., and the catalyst 30 may be poisoned, the pretreatment agent 33 is used to prevent the poisoning. Is preferably disposed on the front side of the catalyst 30.

  Therefore, in the case of the heat treatment apparatus 1A according to the first embodiment configured as described above, the blower 32 and the heater 31 are disposed in the gas passage 21A outside the heat treatment unit 10 away from the heat treatment unit 10. The inside of the heat treatment chamber 11 can be cleaned while preventing the blower 32 and the heater 31 from being broken. In addition, the gas passage 21 </ b> A is detachably connected to the gas introduction part 12 and the gas lead-out part 13 of the heat treatment part 10 through connection means composed of connection flanges 14, 15, 25, 26 and bolts and nuts. Therefore, the blower 32 and the heater 31 provided in the gas passage 21A can be separated from the heat treatment part 10 by separating the gas treatment part 20A from the heat treatment part 10, thereby causing a failure of the blower 32 and the heater 31. The inside of the heat treatment chamber 11 can be cleaned in a state where it is reliably prevented. Moreover, since the gas led out from the heat treatment chamber 11 passes through the lead-out duct 23, the gas treatment duct 24, and the introduction duct 22 in this order, and returns to the heat treatment chamber 11 again, the gas is supplied by one blower 32. While being able to circulate, the heater 30 can heat the catalyst 30 and gas. Furthermore, by separating the heat treatment unit 10 and the gas processing unit 20A, it is possible to replace only the heat treatment unit 10 or to replace only the gas processing unit 20A.

(Second Embodiment)
FIG. 2 is a schematic configuration diagram of a heat treatment apparatus according to the second embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same part as FIG.

  This heat treatment apparatus 1D includes a gas processing unit 20D that is different from the gas processing unit 20A of the first embodiment. That is, it has a gas passage 21D in which an open end 22a is provided on the entry side of the introduction duct 22 and an open end 24a is provided on the exit side of the gas treatment duct 24. The gas treatment unit 20D is heated by the catalyst 30 and the gas treatment duct 24. A blower 34 and a heater 35 are provided in the introduction duct 22. In FIG. 2, the pretreatment agent is omitted, but it may be provided.

  The air flow of the heat treatment apparatus 1D configured as described above is as follows. That is, the air that has entered from the open end 22a is heated by the heater 35 and enters the heat treatment chamber 11 through the introduction duct 22 and contributes to the heat treatment. The heat-treated air contains a sublimation product, enters the outlet duct 23, is guided to the gas processing duct 24, undergoes an oxidative decomposition reaction of the sublimate by the catalyst 30, and is then discharged from the open end 24a. . 2 is a baffle plate for allowing air to flow from the gas introduction part 12 to the gas outlet part 13 without recirculating inside the heat treatment room 11, and the gas introduction part of the heat treatment room 11. 12 is provided so that a passage 16 a is formed on the side opposite to the side 12.

  Therefore, even in the heat treatment apparatus 1D, the blower 34 and the heaters 31 and 35 are disposed in the gas passage 21D outside the heat treatment unit 10 away from the heat treatment unit 10, and thus the blower 34 and the heaters 31 and 35 are disposed. The inside of the heat treatment chamber 11 can be cleaned in a state that prevents this failure. In addition, the gas passage 21D is detachably connected to the gas introduction part 12 and the gas lead-out part 13 of the heat treatment part 10 through connection means composed of connection flanges 14, 15, 25, 26 and bolts and nuts. Therefore, the blower 34 and the heaters 31 and 35 provided in the gas passage 21D can be separated from the heat treatment unit 10 by separating the gas treatment unit 20D from the heat treatment unit 10, and thereby the blower 34 and the heater 31, The inside of the heat treatment chamber 11 can be cleaned in a state that reliably prevents 35 failures. Further, by separating the heat treatment unit 10 and the gas processing unit 20D, it is possible to replace only the heat treatment unit 10 or to replace only the gas processing unit 20D. Further, the air sucked from the inlet side open end 22 a of the introduction duct 22 is heated by the heater 35 and introduced into the heat treatment chamber 11, and is led out through the lead-out duct 23 and the gas treatment duct 24. Therefore, the air sucked from the open end 22a of the introduction duct 22 is free of sublimation. For this reason, since fresh air is always introduced into the heat treatment chamber 11, it is possible to make it difficult to lower the oxidative decomposition reaction of the sublimate by the catalyst 30. Further, in this heat treatment apparatus 1 </ b> D, by providing the blower 34 in the introduction duct 22, gas introduction into the heat treatment chamber 11 and gas discharge from the heat treatment chamber 11 are possible.

  In addition, in this 2nd Embodiment, although the air blower 34 is provided in the introduction duct 22, it is not restricted to this. For example, it may be provided in the outlet duct 23 or the gas processing duct 24, or a blower may be provided in at least one of the introduction duct 22, the gas processing duct 24, and the outlet duct 23.

(Third embodiment)
FIG. 3 is a schematic configuration diagram of a heat treatment apparatus according to the third embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same part as FIG.

  This heat treatment apparatus 1C has a gas processing unit 20C different from the gas processing unit 20D of the second embodiment. That is, the gas in which the portion of the gas processing duct 24 where the catalyst 30, the heater 31 and the blower 32 are provided and the outlet end 24a and the middle of the introduction duct 22 are connected via the connection duct 28. The gas processing unit 20 </ b> C has a passage 21 </ b> C, and has a configuration in which a heater 35 and a blower 34 are provided at a downstream position from the junction of the connection duct 28 of the introduction duct 22. Although the pretreatment agent is omitted in FIG. 3, it may be provided. Further, the blower 32 can be omitted.

  The air flow of the heat treatment apparatus 1 </ b> C configured as described above is as follows. That is, the air that has entered from the open end 22a is heated by the heater 35 and enters the heat treatment chamber 11 through the introduction duct 22 and contributes to the heat treatment. The heat-treated air contains a sublimation product, enters the outlet duct 23, is guided to the gas processing duct 24, undergoes an oxidative decomposition reaction of the sublimate by the catalyst 30, and is then discharged from the open end 24a. Alternatively, it is returned to the heat treatment chamber 11 through the connection duct 28 and the introduction duct 22. In addition, 16 in FIG. 3 is a baffle plate similar to 2nd Embodiment.

  Therefore, even in the heat treatment apparatus 1C according to the third embodiment, the fans 32 and 34 and the heaters 31 and 35 are disposed in the gas passage 21C outside the heat treatment unit 10 away from the heat treatment unit 10. The inside of the heat treatment chamber 11 can be cleaned while preventing the blowers 32 and 34 and the heaters 31 and 35 from being broken. In addition, the gas passage 21 </ b> C is detachably connected to the gas introduction part 12 and the gas outlet part 13 of the heat treatment part 10 through connection means composed of connection flanges 14, 15, 25, 26 and bolts and nuts. Therefore, the blowers 32 and 34 and the heaters 31 and 35 provided in the gas passage 21C can be separated from the heat treatment unit 10 by separating the gas treatment unit 20C from the heat treatment unit 10, whereby the blowers 32 and 34 and The inside of the heat treatment chamber 11 can be cleaned in a state that reliably prevents the failure of the heaters 31 and 35, and only the heat treatment unit 10 can be replaced or only the gas treatment unit 20C can be replaced. .

  Moreover, in the heat treatment apparatus 1C, the inlet side end 22a of the introduction duct 22 is opened, so that fresh air can be introduced. In addition, the air led out from the heat treatment chamber 11 is purified by the catalyst 30 and heated by the heater 31 and enters the introduction duct 22 through the connection duct 28, and opens the inlet side end of the introduction duct 22. Since it is mixed with the air sucked from 22a and introduced into the heat treatment chamber 11, heat loss can be reduced. Furthermore, since the air introduced into the heat treatment chamber 11 is heated by the gas heating heater 35 provided in the introduction duct 22, the gas heating heater 35 is used for the temperature management of the heat treatment chamber 11 for the gas treatment duct 24. Each of the heaters 31 provided in the can be used exclusively for temperature control of the catalyst 30. Therefore, the catalyst 30 can be set to an optimum activation temperature without being influenced by the heating temperature of the workpiece W.

(Fourth embodiment)
FIG. 4 is a schematic configuration diagram of a heat treatment apparatus according to the fourth embodiment of the present invention. The same parts as those in FIG. 3 are denoted by the same reference numerals.

  This heat treatment apparatus 1B has a position on the downstream side of the junction with the connecting duct 28 of the introduction duct 22 and on the upstream side of the position where the gas heating heater 35 and the blower 34 are provided, and the outlet duct. 23 has a gas passage 21 </ b> B communicated and connected via the second connection duct 27.

  The gas processing unit 20B is configured as follows. That is, the gas treatment duct 24 is provided with the catalyst 30, the heater 31, and the blower 32. As described above, in the middle of the introduction duct 22 and downstream of the joining point of the second connection duct 27. A blower 34 and a heater 35 are provided. The heater 35 is provided for the purpose of heating the air introduced into the heat treatment chamber 11. Further, the baffle plate 16 is provided inside the heat treatment chamber 11. Although the pretreatment agent is omitted in FIG. 4, it may be provided.

  The air flow of the heat treatment apparatus 1B configured as described above is as follows. That is, the air that has entered from the open end 22a is heated by the heater 35 and enters the heat treatment chamber 11 through the introduction duct 22 and contributes to the heat treatment. The heat-treated air contains a sublimate, and after entering the outlet duct 23, branches toward the second connecting duct 27 and the gas processing duct 24, and the air guided to the second connecting duct 27 is again It is heated by the heater 35 and returns to the heat treatment chamber 11 through the introduction duct 22. That is, it circulates between the heat treatment chamber 11 and the second connection duct 27. On the other hand, the heat-treated air containing the sublimate guided toward the gas processing duct 24 is exhausted from the open end 24a after being subjected to the oxidation decomposition reaction of the sublimate by the catalyst 30, or the connection duct 28 and the introduction. It returns to the heat treatment chamber 11 through the duct 22.

  Accordingly, even in this heat treatment apparatus 1B, the fans 32 and 34 and the heaters 31 and 35 are disposed in the gas passage 21B outside the heat treatment part 10 away from the heat treatment part 10, and therefore the fans 32 and 34 and the heating The inside of the heat treatment chamber 11 can be cleaned in a state in which failure of the vessels 31 and 35 is prevented. In addition, the gas passage 21B is detachably connected to the gas introduction part 12 and the gas lead-out part 13 of the heat treatment part 10 through connection means composed of connection flanges 14, 15, 25, 26 and bolts and nuts. Therefore, the blowers 32 and 34 and the heaters 31 and 35 provided in the gas passage 21B can be separated from the heat treatment unit 10 by separating the gas treatment unit 20B from the heat treatment unit 10, and thus the blowers 32 and 34 and It is possible to clean the inside of the heat treatment chamber 11 in a state that reliably prevents the failure of the heaters 31 and 35, and it is possible to replace only the heat treatment unit 10 or replace only the gas treatment unit 20B. .

  Moreover, in this heat treatment apparatus 1B, since the entrance end 22a of the introduction duct 22 is opened and air is circulated through the connection duct 28, the same effect as that of the third embodiment can be obtained. Needless to say, the gas heating heater provided in the circulation path including the second connection duct 27, in which a circulation path closer to the heat treatment chamber 11 than the circulation path by the connection duct 28 is formed by the second connection duct 27. Since it becomes the structure heated by 35, it becomes possible to recycle the air with few temperature drops.

  In the first to fourth embodiments described above, the connecting flanges 14, 15, 25, as means for connecting the gas introduction part 12 and the gas outlet part 13 of the heat treatment part 10 and the gas passages (21A to 21D), However, the present invention is not limited to this. For example, a coupling means that combines a male screw and a female screw, or another mechanism may be used.

  In the first to fourth embodiments described above, the gas introduction part 12 and the gas outlet part 13 of the heat treatment part 10 and the gas passages (21A to 21D) are connected to the connecting means (the connecting flanges 14, 15, 25, 26 and However, the present invention is not limited to this, and the gas inlet 12 and the inlet duct 22 are connected by welding or the like, and the gas outlet 13 and the outlet duct 23 are connected by welding or the like. It is good also as a connected structure. Even in this configuration, since the blower 32 and the heater 31 are disposed in the gas passages (21A to 21D) outside the heat treatment unit 10 away from the heat treatment unit 10, the blower 32 and the heater 31 etc. It becomes difficult for the cleaning liquid or the like to reach, so that the heat treatment chamber 11 can be cleaned in a state in which the blower and the heater are prevented from being broken, and the object of the present invention can be achieved.

Furthermore, in the first to fourth embodiments described above, one gas processing unit (20A to 20D) is arranged for one heat treatment unit 10, but the present invention is not limited to this, and one It is good also as a structure which arrange | positions two or more gas processing parts with respect to the heat processing part 10. FIG. For example, a case where two gas processing units are provided for one heat treatment unit 10 will be described with reference to FIG.
As shown in FIG. 5, in addition to the one set of gas introduction part 12 and the gas derivation part 13, another set of gas introduction part 12 a and gas derivation part 13 a is provided in the heat treatment part 10. The gas passage 21A of the gas processing unit 20A may be connected to the gas outlet 13 and the gas passage 21A of the same gas processing unit 20A may be connected to the gas inlet 12a and the gas outlet 13a. In this configuration, when only one set of the gas introduction part 12 and the gas lead-out part 13 is used, a lid 18 may be attached to the gas lead-in part 12a and the gas lead-out part 13a as shown in FIG. .

  Furthermore, in the above-described embodiment, the catalyst 30 is disposed only in the gas processing duct 24, but the present invention is not limited to this. For example, as shown in FIG. 7, another catalyst 17 may be disposed inside the heat treatment chamber 11. At this time, the baffle plate 16 may or may not be provided inside the heat treatment chamber 11. With such a configuration, the two catalysts 30 and 17 can perform the oxidative decomposition reaction of the sublimate with high efficiency.

It is a schematic block diagram of the heat processing apparatus which concerns on 1st Embodiment of this invention. It is a schematic block diagram of the heat processing apparatus which concerns on 2nd Embodiment of this invention. It is a schematic block diagram of the heat processing apparatus which concerns on 3rd Embodiment of this invention. It is a schematic block diagram of the heat processing apparatus which concerns on 4th Embodiment of this invention. It is a schematic block diagram of the heat processing apparatus which concerns on other embodiment of this invention. It is a schematic block diagram of the heat processing apparatus which concerns on other embodiment of this invention. It is a schematic block diagram of the heat processing apparatus which concerns on other embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1A-1D Heat processing apparatus 10 Heat processing part 11 Heat processing chamber 12 Gas introduction part 13 Gas derivation | leading-out part 14, 15, 25, 26 Flange for connection (connection means)
20A to 20D Gas processing unit 21A to 21D Gas passage 22 Introduction duct 23 Derivation duct 27 Second connection duct 28 Connection duct 30 Catalyst 31, 35 Heater 32, 34 Blower

Claims (7)

A heat treatment part having a gas introduction part and a gas lead part communicating with the heat treatment room, wherein the object to be heat treated is detachably accommodated in the heat treatment room, and
A gas passage for introducing a heat treatment gas into the gas introduction section and for deriving a heat-treated gas from the gas lead-out section; A gas provided with a catalyst for decomposing sublimates generated from the gas, at least a heater for heating the catalyst, and one or more blowers for guiding the heat treatment gas and the heat treated gas in a predetermined direction A heat treatment apparatus comprising: a processing unit. The heat treatment apparatus according to claim 1,
The gas passage includes an introduction duct whose detachable end is detachably connected to the gas introduction part via a connecting means, and a lead which is detachably connected to the gas lead-out part via a connecting means. A heat treatment apparatus comprising a duct. The heat treatment apparatus according to claim 2,
The inlet side end of the introduction duct and the outlet side end of the outlet duct are connected via a gas processing duct, and the catalyst and the heater are provided in the gas processing duct. Heat treatment equipment. The heat treatment apparatus according to claim 2,
The inlet end of the introduction duct is opened, and a gas processing duct is connected to the outlet end of the outlet duct. The gas processing duct is provided with the catalyst and the heater. A heat treatment apparatus, wherein a heating heater is provided, and the blower is provided in at least one of the lead-out duct, the gas processing duct, and the introduction duct. The heat treatment apparatus according to claim 2,
An inlet end of the introduction duct is opened, and a gas processing duct is connected to an outlet end of the outlet duct. The catalyst and the heater are provided in the gas processing duct. A downstream position and a midway of the introduction duct are connected to each other through a connecting duct from a location where the catalyst and the heater are provided, and gas heating is performed downstream from a junction with the connecting duct of the introduction duct. A heat treatment apparatus comprising a heater for heating and the blower. The heat treatment apparatus according to claim 5,
A position downstream of the junction with the connection duct of the introduction duct and upstream of the gas heating heater and the blower and the middle of the lead-out duct are connected through a second connection duct. The heat processing apparatus characterized by the above-mentioned. The heat treatment apparatus according to any one of claims 1 to 6,
A heat treatment apparatus, wherein another catalyst is also provided in the heat treatment chamber of the heat treatment section.

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