TWI446847B - 佈線板,其製造方法及半導體封裝 - Google Patents

佈線板,其製造方法及半導體封裝 Download PDF

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Publication number
TWI446847B
TWI446847B TW098115511A TW98115511A TWI446847B TW I446847 B TWI446847 B TW I446847B TW 098115511 A TW098115511 A TW 098115511A TW 98115511 A TW98115511 A TW 98115511A TW I446847 B TWI446847 B TW I446847B
Authority
TW
Taiwan
Prior art keywords
wiring
layer
wiring board
wiring layer
disposed
Prior art date
Application number
TW098115511A
Other languages
English (en)
Chinese (zh)
Other versions
TW201002171A (en
Inventor
依田稔久
松元俊一郎
佐藤雅子
Original Assignee
新光電氣工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 新光電氣工業股份有限公司 filed Critical 新光電氣工業股份有限公司
Publication of TW201002171A publication Critical patent/TW201002171A/zh
Application granted granted Critical
Publication of TWI446847B publication Critical patent/TWI446847B/zh

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/11—Printed elements for providing electric connections to or between printed circuits
    • H05K1/111—Pads for surface mounting, e.g. lay-out
    • H05K1/112—Pads for surface mounting, e.g. lay-out directly combined with via connections
    • H05K1/113—Via provided in pad; Pad over filled via
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • H10W70/685—Shapes or dispositions thereof comprising multiple insulating layers
    • H10W70/687—Shapes or dispositions thereof comprising multiple insulating layers characterized by the outer layers being for protection, e.g. solder masks, or for protection against chemical or mechanical damage
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09372—Pads and lands
    • H05K2201/094—Array of pads or lands differing from one another, e.g. in size, pitch or thickness; Using different connections on the pads
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09372—Pads and lands
    • H05K2201/09472—Recessed pad for surface mounting; Recessed electrode of component
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/095—Conductive through-holes or vias
    • H05K2201/096—Vertically aligned vias, holes or stacked vias
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621—Components characterised by their electrical contacts
    • H05K2201/10674—Flip chip
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621—Components characterised by their electrical contacts
    • H05K2201/10734—Ball grid array [BGA]; Bump grid array
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)
TW098115511A 2008-05-15 2009-05-11 佈線板,其製造方法及半導體封裝 TWI446847B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008128196A JP2009277916A (ja) 2008-05-15 2008-05-15 配線基板及びその製造方法並びに半導体パッケージ

Publications (2)

Publication Number Publication Date
TW201002171A TW201002171A (en) 2010-01-01
TWI446847B true TWI446847B (zh) 2014-07-21

Family

ID=41315960

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098115511A TWI446847B (zh) 2008-05-15 2009-05-11 佈線板,其製造方法及半導體封裝

Country Status (5)

Country Link
US (1) US8119927B2 (enExample)
JP (1) JP2009277916A (enExample)
KR (1) KR101550467B1 (enExample)
CN (1) CN101582406A (enExample)
TW (1) TWI446847B (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011138868A (ja) * 2009-12-28 2011-07-14 Ngk Spark Plug Co Ltd 多層配線基板
JP5623308B2 (ja) * 2010-02-26 2014-11-12 日本特殊陶業株式会社 多層配線基板及びその製造方法
TWI419277B (zh) * 2010-08-05 2013-12-11 日月光半導體製造股份有限公司 線路基板及其製作方法與封裝結構及其製作方法
US20120032337A1 (en) * 2010-08-06 2012-02-09 Taiwan Semiconductor Manufacturing Company, Ltd. Flip Chip Substrate Package Assembly and Process for Making Same
US20120152606A1 (en) * 2010-12-16 2012-06-21 Ibiden Co., Ltd. Printed wiring board
US8624392B2 (en) 2011-06-03 2014-01-07 Taiwan Semiconductor Manufacturing Company, Ltd. Electrical connection for chip scale packaging
US8912668B2 (en) 2012-03-01 2014-12-16 Taiwan Semiconductor Manufacturing Company, Ltd. Electrical connections for chip scale packaging
US9548281B2 (en) 2011-10-07 2017-01-17 Taiwan Semiconductor Manufacturing Company, Ltd. Electrical connection for chip scale packaging
JP2013135080A (ja) * 2011-12-26 2013-07-08 Ngk Spark Plug Co Ltd 多層配線基板の製造方法
US9196573B2 (en) 2012-07-31 2015-11-24 Taiwan Semiconductor Manufacturing Company, Ltd. Bump on pad (BOP) bonding structure
US8829673B2 (en) 2012-08-17 2014-09-09 Taiwan Semiconductor Manufacturing Company, Ltd. Bonded structures for package and substrate
US9673161B2 (en) 2012-08-17 2017-06-06 Taiwan Semiconductor Manufacturing Company, Ltd. Bonded structures for package and substrate
JP2015032649A (ja) * 2013-08-01 2015-02-16 イビデン株式会社 配線板の製造方法および配線板
JP6316609B2 (ja) 2014-02-05 2018-04-25 新光電気工業株式会社 配線基板及び半導体装置と配線基板の製造方法及び半導体装置の製造方法
KR20160010960A (ko) * 2014-07-21 2016-01-29 삼성전기주식회사 인쇄회로기판 및 그 제조방법
CN106817836A (zh) * 2015-12-02 2017-06-09 富葵精密组件(深圳)有限公司 电路板及其制作方法
US20180350630A1 (en) * 2017-06-01 2018-12-06 Qualcomm Incorporated Symmetric embedded trace substrate
US20240074048A1 (en) * 2022-08-23 2024-02-29 Micron Technology, Inc. Semiconductor packaging with reduced standoff height

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04286392A (ja) * 1991-03-15 1992-10-12 Fujitsu Ltd 印刷回路基板
JPH1126945A (ja) * 1997-07-07 1999-01-29 Toagosei Co Ltd 多層プリント配線板の製造方法
JP4127442B2 (ja) * 1999-02-22 2008-07-30 イビデン株式会社 多層ビルドアップ配線板及びその製造方法
KR100855529B1 (ko) * 1998-09-03 2008-09-01 이비덴 가부시키가이샤 다층프린트배선판 및 그 제조방법
JP3232562B2 (ja) 1999-10-22 2001-11-26 日本電気株式会社 電磁干渉抑制部品および電磁干渉抑制回路
JP2002289911A (ja) * 2000-12-06 2002-10-04 Ibiden Co Ltd 光通信用デバイス
JP3910379B2 (ja) * 2001-06-12 2007-04-25 インターナショナル・ビジネス・マシーンズ・コーポレーション ボール・グリッド・アレイ・モジュール用の多層基板の製造方法
JP2003152311A (ja) 2001-11-15 2003-05-23 Ngk Spark Plug Co Ltd 配線基板の製造方法

Also Published As

Publication number Publication date
KR20090119704A (ko) 2009-11-19
US8119927B2 (en) 2012-02-21
TW201002171A (en) 2010-01-01
US20090284943A1 (en) 2009-11-19
JP2009277916A (ja) 2009-11-26
KR101550467B1 (ko) 2015-09-04
CN101582406A (zh) 2009-11-18

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