TWI406332B - Vacuum chamber and vacuum treatment device - Google Patents

Vacuum chamber and vacuum treatment device Download PDF

Info

Publication number
TWI406332B
TWI406332B TW095132454A TW95132454A TWI406332B TW I406332 B TWI406332 B TW I406332B TW 095132454 A TW095132454 A TW 095132454A TW 95132454 A TW95132454 A TW 95132454A TW I406332 B TWI406332 B TW I406332B
Authority
TW
Taiwan
Prior art keywords
main frame
frame body
reinforcing
vacuum chamber
substrate
Prior art date
Application number
TW095132454A
Other languages
English (en)
Chinese (zh)
Other versions
TW200731391A (en
Inventor
岡部星兒
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TW200731391A publication Critical patent/TW200731391A/zh
Application granted granted Critical
Publication of TWI406332B publication Critical patent/TWI406332B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0462—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the processing chambers, e.g. modular processing chambers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0452—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers
    • H10P72/0454—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers surrounding a central transfer chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3212—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips or lead frames

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
TW095132454A 2005-09-02 2006-09-01 Vacuum chamber and vacuum treatment device TWI406332B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005255294A JP4791110B2 (ja) 2005-09-02 2005-09-02 真空チャンバおよび真空処理装置

Publications (2)

Publication Number Publication Date
TW200731391A TW200731391A (en) 2007-08-16
TWI406332B true TWI406332B (zh) 2013-08-21

Family

ID=37817679

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095132454A TWI406332B (zh) 2005-09-02 2006-09-01 Vacuum chamber and vacuum treatment device

Country Status (4)

Country Link
JP (1) JP4791110B2 (https=)
KR (1) KR100856145B1 (https=)
CN (1) CN100421212C (https=)
TW (1) TWI406332B (https=)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI294155B (en) 2002-06-21 2008-03-01 Applied Materials Inc Transfer chamber for vacuum processing system
KR101101757B1 (ko) * 2005-11-07 2012-01-05 주성엔지니어링(주) 제조비용을 절감한 진공챔버
KR101309363B1 (ko) * 2007-12-14 2013-09-17 가부시키가이샤 알박 챔버 및 성막 장치
JP5551346B2 (ja) * 2008-06-10 2014-07-16 東京エレクトロン株式会社 チャンバ及び処理装置
WO2010082467A1 (ja) * 2009-01-14 2010-07-22 株式会社アルバック プラズマｃｖｄ装置
FI122940B (fi) * 2009-02-09 2012-09-14 Beneq Oy Reaktiokammio
KR20110067939A (ko) * 2009-12-15 2011-06-22 주식회사 테스 로드락 챔버
KR101598176B1 (ko) * 2010-03-30 2016-02-26 주식회사 원익아이피에스 진공챔버
JP5526988B2 (ja) * 2010-04-28 2014-06-18 東京エレクトロン株式会社 基板処理装置及び基板処理システム
KR101363064B1 (ko) * 2012-05-22 2014-02-14 박종민 진공 챔버 구조
JP2016537805A (ja) * 2013-09-26 2016-12-01 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 基板処理のための混合プラットフォームの装置、システム、及び方法
JP7023097B2 (ja) * 2016-12-28 2022-02-21 東京エレクトロン株式会社 真空チャンバおよび真空チャンバの扉の施錠方法
JP6625597B2 (ja) * 2017-11-13 2019-12-25 平田機工株式会社 搬送チャンバ
JP7277137B2 (ja) * 2018-12-28 2023-05-18 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、および搬送モジュール
KR102193096B1 (ko) 2019-01-31 2020-12-21 (주)에프티엘 진공챔버의 리브를 용접하기 위한 용접지그장치
KR102720200B1 (ko) * 2019-10-10 2024-10-21 주성엔지니어링(주) 클러스터형 기판처리장치
KR20260049865A (ko) * 2023-08-31 2026-04-14 캐논 톡키 가부시키가이샤 진공 챔버 및 성막 장치
KR102785109B1 (ko) 2024-08-30 2025-03-26 주식회사 창하이앤지 리브를 용접하기 위한 용접 테이블 장치
KR102785110B1 (ko) 2024-08-30 2025-03-26 주식회사 창하이앤지 용접용 지그

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003005200A (ja) * 2001-06-20 2003-01-08 Shimadzu Corp 真空チャンバ及びその真空チャンバを用いた液晶注入装置
JP2004089872A (ja) * 2002-08-30 2004-03-25 Tsukishima Kikai Co Ltd 真空装置
TWI249186B (en) * 2003-06-02 2006-02-11 Jusung Eng Co Ltd Transfer chamber for cluster system

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3608065B2 (ja) * 1996-10-31 2005-01-05 東京エレクトロン株式会社 縦型熱処理装置およびそのボートと保温筒のメンテナンス方法
US5914493A (en) * 1997-02-21 1999-06-22 Nikon Corporation Charged-particle-beam exposure apparatus and methods with substrate-temperature control
US6241117B1 (en) * 1997-11-26 2001-06-05 Steven R. Wickins Pressure differential containment structure
JP4253107B2 (ja) * 2000-08-24 2009-04-08 キヤノンアネルバ株式会社 基板処理装置及びその増設方法
JP2003077974A (ja) * 2001-08-31 2003-03-14 Hitachi Kokusai Electric Inc 基板処理装置および半導体装置の製造方法
JP2003188226A (ja) * 2001-12-18 2003-07-04 Anelva Corp 真空搬送処理装置
JP2004311640A (ja) * 2003-04-04 2004-11-04 Tokyo Electron Ltd 処理容器
SG115678A1 (en) * 2003-04-22 2005-10-28 Asml Netherlands Bv Substrate carrier and method for making a substrate carrier
JP2004335743A (ja) * 2003-05-08 2004-11-25 Ulvac Japan Ltd 真空処理装置用真空チャンバー
JP4833512B2 (ja) * 2003-06-24 2011-12-07 東京エレクトロン株式会社 被処理体処理装置、被処理体処理方法及び被処理体搬送方法
JP4767574B2 (ja) * 2005-03-31 2011-09-07 東京エレクトロン株式会社 処理チャンバおよび処理装置
JP4079157B2 (ja) * 2005-04-12 2008-04-23 東京エレクトロン株式会社 ゲートバルブ装置及び処理システム

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003005200A (ja) * 2001-06-20 2003-01-08 Shimadzu Corp 真空チャンバ及びその真空チャンバを用いた液晶注入装置
JP2004089872A (ja) * 2002-08-30 2004-03-25 Tsukishima Kikai Co Ltd 真空装置
TWI249186B (en) * 2003-06-02 2006-02-11 Jusung Eng Co Ltd Transfer chamber for cluster system

Also Published As

Publication number Publication date
KR20070026215A (ko) 2007-03-08
CN100421212C (zh) 2008-09-24
JP4791110B2 (ja) 2011-10-12
JP2007073542A (ja) 2007-03-22
CN1925111A (zh) 2007-03-07
TW200731391A (en) 2007-08-16
KR100856145B1 (ko) 2008-09-03

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