RU2014103798A - Пьезоэлектрический элемент, многослойный пьезоэлектрический элемент, головка для выброса жидкости, устройство для выброса жидкости, ультразвуковой двигатель, оптическое устройство и электронное устройство - Google Patents

Пьезоэлектрический элемент, многослойный пьезоэлектрический элемент, головка для выброса жидкости, устройство для выброса жидкости, ультразвуковой двигатель, оптическое устройство и электронное устройство Download PDF

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RU2014103798A
RU2014103798A RU2014103798/04A RU2014103798A RU2014103798A RU 2014103798 A RU2014103798 A RU 2014103798A RU 2014103798/04 A RU2014103798/04 A RU 2014103798/04A RU 2014103798 A RU2014103798 A RU 2014103798A RU 2014103798 A RU2014103798 A RU 2014103798A
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weight
parts
piezoelectric element
perovskite
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RU2561601C1 (ru
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Дзумпеи ХАЯСИ
Кенити ТАКЕДА
Синя КОЯМА
Кенити АКАСИ
Тацуо ФУРУТА
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Кэнон Кабусики Кайся
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Abstract

1. Пьезоэлектрический элемент, содержащий:первый электрод;второй электрод; ипьезоэлектрический материал, включающий в свой составв качестве основного компонента оксид металла типа перовскита, представленный общей формулой (1), имарганец, включенный в состав оксида металла типа перовскита(BaCa)(TiZr)O(где 1,00≤a≤1,01, 0,02≤x≤0,30, 0,020≤y<0,095 и y≤x) (1),причем содержание марганца на металлической основе по отношению к 100 весовым частям оксида металла типа перовскита составляет 0,02 весовые части или более и 0,40 весовые части или менее,причем содержание вспомогательного компонента, не являющегося марганцем, по отношению к 100 весовым частям оксида металла типа перовскита составляет менее 2,1 весовых частей на оксидной основе,причем пьезоэлектрический материал образован кристаллическими зернами, имеющими средний круговой эквивалентный диаметр больше, чем 0,8 мкм и меньше, чем 182,0 мкм,причем пьезоэлектрический материал имеет относительную плотность 89,0% или более и 100% или менее.2. Пьезоэлектрический элемент по п. 1, в котором пьезоэлектрический материал образован кристаллическими зернами, имеющими средний круговой эквивалентный диаметр 1 мкм или более и 10 мкм или менее.3. Пьезоэлектрический элемент по п. 1 или 2, в котором пьезоэлектрический материал имеет относительную плотность 93% или более и 100% или менее.4. Пьезоэлектрический элемент по п. 1 или 2, в котором x и y в основном компоненте пьезоэлектрического материала удовлетворяет условиям 0,125≤x≤0,175 и 0,055≤y≤0,09, соответственно, и содержание марганца на металлической основе по отношению к 100 весовым частям оксида металла типа перовскита составляет 0,02 весовые части или более и 0,10 весовых час�

Claims (11)

1. Пьезоэлектрический элемент, содержащий:
первый электрод;
второй электрод; и
пьезоэлектрический материал, включающий в свой состав
в качестве основного компонента оксид металла типа перовскита, представленный общей формулой (1), и
марганец, включенный в состав оксида металла типа перовскита
(Ba1-xCax)a(Ti1-yZry)O3
(где 1,00≤a≤1,01, 0,02≤x≤0,30, 0,020≤y<0,095 и y≤x) (1),
причем содержание марганца на металлической основе по отношению к 100 весовым частям оксида металла типа перовскита составляет 0,02 весовые части или более и 0,40 весовые части или менее,
причем содержание вспомогательного компонента, не являющегося марганцем, по отношению к 100 весовым частям оксида металла типа перовскита составляет менее 2,1 весовых частей на оксидной основе,
причем пьезоэлектрический материал образован кристаллическими зернами, имеющими средний круговой эквивалентный диаметр больше, чем 0,8 мкм и меньше, чем 182,0 мкм,
причем пьезоэлектрический материал имеет относительную плотность 89,0% или более и 100% или менее.
2. Пьезоэлектрический элемент по п. 1, в котором пьезоэлектрический материал образован кристаллическими зернами, имеющими средний круговой эквивалентный диаметр 1 мкм или более и 10 мкм или менее.
3. Пьезоэлектрический элемент по п. 1 или 2, в котором пьезоэлектрический материал имеет относительную плотность 93% или более и 100% или менее.
4. Пьезоэлектрический элемент по п. 1 или 2, в котором x и y в основном компоненте пьезоэлектрического материала удовлетворяет условиям 0,125≤x≤0,175 и 0,055≤y≤0,09, соответственно, и содержание марганца на металлической основе по отношению к 100 весовым частям оксида металла типа перовскита составляет 0,02 весовые части или более и 0,10 весовых частей или менее.
5. Пьезоэлектрический элемент по п. 1 или 2, в котором x и y в основном компоненте пьезоэлектрического материала удовлетворяет 0,155≤x≤0,300 и 0,041≤y≤0,069, соответственно, и содержание марганца на металлической основе по отношению к 100 весовым частям оксида металла типа перовскита составляет 0,12 весовых частей или более и 0,40 весовых частей или менее.
6. Многослойный пьезоэлектрический элемент, содержащий:
слои пьезоэлектрического материала; и
электроды, включая в себя внутренний электрод, при этом слои пьезоэлектрического материала и электроды укладываются поочередно;
каждый слой пьезоэлектрического материала содержит в качестве основного компонента оксид металла типа перовскита, представленный с помощью общей формулы (1), и
марганец, включенный в состав оксида металла типа перовскита
(Ba1-xCax)a(Ti1-yZry)O3
(где 1,00≤a≤1,01, 0,02≤x≤0,30, 0,020≤y≤0,095 и y≤x) (1); и
содержание марганца на металлической основе по отношению к 100 весовым частям оксида металла типа перовскита составляет 0,02 весовые части или более и 0,40 весовых частей или менее.
7. Головка для выброса жидкости, содержащая:
емкость для жидкости, содержащую вибрирующий узел, который включает в свой состав пьезоэлектрический элемент по п. 1 или многослойный пьезоэлектрический элемент по п. 6; и
выпускное отверстие, соединенное с емкостью для жидкости.
8. Устройство для выброса жидкости, содержащее:
узел перемещения, выполненный с возможностью перемещать носитель информации; и
головку для выброса жидкости по п. 7.
9. Ультразвуковой двигатель, содержащий:
преобразователь, включающий в себя пьезоэлектрический элемент по п. 1 или многослойный пьезоэлектрический элемент по п. 6; и
подвижный элемент, находящийся в контакте с колеблющимся элементом.
10. Оптическое устройство, содержащее:
узел привода, включающий в себя ультразвуковой двигатель по п. 9.
11. Электронное устройство, содержащее:
пьезоэлектрический акустический компонент, включающий в себя пьезоэлектрический элемент по п. 1 или многослойный пьезоэлектрический элемент по п. 6.
RU2014103798/04A 2011-07-05 2012-06-26 Пьезоэлектрический элемент, многослойный пьезоэлектрический элемент, головка для выброса жидкости, устройство для выброса жидкости, ультразвуковой двигатель, оптическое устройство и электронное устройство RU2561601C1 (ru)

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