JP6381294B2 - 圧電材料、圧電素子、および電子機器 - Google Patents
圧電材料、圧電素子、および電子機器 Download PDFInfo
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- JP6381294B2 JP6381294B2 JP2014109341A JP2014109341A JP6381294B2 JP 6381294 B2 JP6381294 B2 JP 6381294B2 JP 2014109341 A JP2014109341 A JP 2014109341A JP 2014109341 A JP2014109341 A JP 2014109341A JP 6381294 B2 JP6381294 B2 JP 6381294B2
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- piezoelectric
- piezoelectric material
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Images
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8536—Alkaline earth metal based oxides, e.g. barium titanates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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Description
前記金属酸化物100重量部に対して、
前記Mnの含有量が金属換算で0.04重量部以上0.36重量部以下、
前記Liの含有量αが金属換算で0.0012重量部以下(0重量部を含む)、
前記Biの含有量βが金属換算で0.042重量部以上0.850重量部以下であることを特徴とする圧電材料。
(Ba 1−x Ca x ) a (Ti 1−y−z Zr y Sn z )O 3 (1)
(式中、0.09≦x≦0.30、0.025≦y≦0.085、0≦z≦0.02、0.986≦a≦1.02)であることを特徴とする。
一般式(1)(Ba1−xCax)a(Ti1−y−zZrySnz)O3 (1)
(式中、0.09≦x≦0.30、0.025≦y≦0.085、0≦z≦0.02、0.986≦a≦1.02)
(式2)χ=C/(T−θ) (C:キュリー定数、θ:常磁性キュリー温度)
本発明に係る積層圧電素子は、複数の圧電材料層と、内部電極を含む複数の電極とが交互に積層された積層圧電素子であって、前記圧電材料層が本発明の圧電材料よりなることを特徴とする。
本発明に係る液体吐出ヘッドは、前記圧電素子または前記積層圧電素子を配した振動部を備えた液室と、前記液室と連通する吐出口を少なくとも有することを特徴とする。本発明の液体吐出ヘッドによって吐出する液体は流動体であれば特に限定されず、水、インク、燃料などの水系液体や非水系液体を吐出することができる。
次に、本発明の液体吐出装置について説明する。本発明の液体吐出装置は、被転写体の載置部と前記液体吐出ヘッドを備えたものである。
本発明に係る超音波モータは、前記圧電素子または前記積層圧電素子を配した振動体と、前記振動体と接触する移動体とを少なくとも有することを特徴とする。図6は、本発明の超音波モータの構成の一実施態様を示す概略図である。本発明の圧電素子が単板からなる超音波モータを、図6(a)に示す。超音波モータは、振動子201、振動子201の摺動面に不図示の加圧バネによる加圧力で接触しているロータ202、ロータ202と一体的に設けられた出力軸203を有する。前記振動子201は、金属の弾性体リング2011、本発明の圧電素子2012、圧電素子2012を弾性体リング2011に接着する有機系接着剤2013(エポキシ系、シアノアクリレート系など)で構成される。本発明の圧電素子2012は、不図示の第一の電極と第二の電極によって挟まれた圧電材料で構成される。本発明の圧電素子に位相がπ/2の奇数倍異なる二相の交番電圧を印加すると、振動子201に屈曲進行波が発生し、振動子201の摺動面上の各点は楕円運動をする。この振動子201の摺動面にロータ202が圧接されていると、ロータ202は振動子201から摩擦力を受け、屈曲進行波とは逆の方向へ回転する。不図示の被駆動体は、出力軸203と接合されており、ロータ202の回転力で駆動される。圧電材料に電圧を印加すると、圧電横効果によって圧電材料は伸縮する。金属などの弾性体が圧電素子に接合している場合、弾性体は圧電材料の伸縮によって曲げられる。ここで説明された種類の超音波モータは、この原理を利用したものである。次に、積層構造を有した圧電素子を含む超音波モータを図6(b)に例示する。振動子204は、筒状の金属弾性体2041に挟まれた積層圧電素子2042よりなる。積層圧電素子2042は、不図示の複数の積層された圧電材料により構成される素子であり、積層外面に第一の電極と第二の電極、積層内面に内部電極を有する。金属弾性体2041はボルトによって締結され、圧電素子2042を挟持固定し、振動子204となる。圧電素子2042に位相の異なる交番電圧を印加することにより、振動子204は互いに直交する2つの振動を励起する。この二つの振動は合成され、振動子204の先端部を駆動するための円振動を形成する。なお、振動子204の上部にはくびれた周溝が形成され、駆動のための振動の変位を大きくしている。ロータ205は、加圧用のバネ206により振動子204と加圧接触し、駆動のための摩擦力を得る。ロータ205はベアリングによって回転可能に支持されている。
次に、本発明の光学機器について説明する。本発明の光学機器は、駆動部に前記超音波モータを備えたことを特徴とする。
粒子、粉体、液滴の搬送、除去等で利用される振動装置は、電子機器等で広く使用されている。
次に、本発明の撮像装置について説明する。本発明の撮像装置は、前記塵埃除去装置と撮像素子ユニットとを少なくとも有する撮像装置であって、前記塵埃除去装置の振動板を前記撮像素子ユニットの受光面側に設けたことを特徴とする。図12および図13は本発明の撮像装置の好適な実施形態の一例であるデジタル一眼レフカメラを示す図である。
次に、本発明の電子機器について説明する。本発明の電子機器は、前記圧電素子または前記積層圧電素子を備えた圧電音響部品を配したことを特徴とする。圧電音響部品にはスピーカ、ブザー、マイク、表面弾性波(SAW)素子が含まれる。
原料粉末としては、平均粒径100nmのチタン酸バリウム(BaTiO3、Ba/Ti=0.9985)、チタン酸カルシウム(CaTiO3、Ca/Ti=0.9978)、ジルコン酸カルシウム(CaZrO3、Ca/Zr=0.999)およびすず酸カルシウム(CaSnO3、Ca/Sn=1.0137)とBaとCaのモル数の和に対する、Ti、Zr、及びSnのモル数の和の比aを調整するために蓚酸バリウム等を用いた。これら主成分の原料粉末を、金属換算で表1に示すような比率になるよう秤量した。前記主成分の金属酸化物100重量部に対して、第1副成分のMn、第2副成分のLiおよび第3副成分のBiの含有量が金属換算で表1に示すような比率となるように、三酸化四マンガン、炭酸リチウムおよび酸化ビスマスを秤量した。これらの秤量粉は、ボールミルを用いて24時間の乾式混合によって混合した。得られた混合粉を造粒するために、混合粉の3重量部のPVAバインダーを、それぞれスプレードライヤー装置を用いて、混合粉表面に付着させた。なお、実施例37から40および実施例76には、Mg重量が金属換算でそれぞれ0.0049、0.0099、0.0499、0.0999および0.4999重量部になるよう酸化マグネシウムを混合した。
原料粉末として、平均粒径100nmのチタン酸バリウム、チタン酸カルシウム、ジルコン酸カルシウム、炭酸リチウム、酸化ビスマス、及び三酸化四マンガン、SiとBを含むガラス助剤(SiO2を30〜50重量%、B2O3を21.1重量%含む)を用いた。これらの原料粉末を表3に示した比率になるよう秤量した。その後、表1記載の試料と同様な手法で成形体を作成した。得られた成形体を電気炉に入れ、1200℃で5時間保持し、合計24時間かけて大気雰囲気で焼結した。その後、表1記載の試料と同様の加工と評価を行った。
チタン酸バリウム(BaTiO3)、チタン酸カルシウム(CaTiO3)、ジルコン酸カルシウム(CaZrO3)、炭酸リチウム(Li2CO3)、酸化ビスマス(Bi2O3)、三酸化四マンガン(Mn3O4)、SiとBを含むガラス助剤(SiO2を30〜50重量%、B2O3を21.1重量%含む)を、表3の実施例54記載の組成になるよう秤量した。秤量した原料粉末を混合し、ボールミルで一晩混合して混合粉を得た。
実施例61と同様の手法で混合粉を作成した。得られた混合粉をロータリーキルンで回転させながら1000℃で大気中3時間仮焼を行い、仮焼粉を得た。ボールミルを用いて、得られた仮焼粉を解砕した。得られた解砕粉にPVBを加えて混合した後、ドクターブレード法によりシート形成して厚み50μmのグリーンシートを得た。上記グリーンシートに内部電極用の導電ペーストを印刷した。導電ペーストには、Niペーストを用いた。導電ペーストを塗布したグリーンシートを9枚積層して、その積層体を熱圧着した。
実施例20の圧電素子を用いて、図3に示される液体吐出ヘッドを作製した。入力した電気信号に追随したインクの吐出が確認された。
実施例63の液体吐出ヘッドを用いて、図4に示される液体吐出装置を作製した。入力した電気信号に追随したインクの吐出が記録媒体上に確認された。
実施例20の圧電素子を用いて、図6(a)に示される超音波モータを作製した。交番電圧の印加に応じたモータの回転が確認された。
実施例65の超音波モータを用いて、図7に示される光学機器を作製した。交番電圧の印加に応じたオートフォーカス動作が確認された。
実施例20の圧電素子を用いて、図9に示される塵埃除去装置を作製した。プラスチック製ビーズを散布し、交番電圧を印加したところ、良好な塵埃除去率が確認された。
実施例67の塵埃除去装置を用いて、図12に示される撮像装置を作製した。動作させたところ、撮像ユニットの表面の塵を良好に除去し、塵欠陥の無い画像が得られた。
実施例61の積層圧電素子を用いて、図3に示される液体吐出ヘッドを作製した。入力した電気信号に追随したインクの吐出が確認された。
実施例69の液体吐出ヘッドを用いて、図4に示される液体吐出装置を作製した。入力した電気信号に追随したインクの吐出が記録媒体上に確認された。
実施例61の積層圧電素子を用いて、図6(b)に示される超音波モータを作製した。交番電圧の印加に応じたモータの回転が確認された。
実施例71の超音波モータを用いて、図7に示される光学機器を作製した。交番電圧の印加に応じたオートフォーカス動作が確認された。
実施例61の積層圧電素子を用いて、図9に示される塵埃除去装置を作製した。プラスチック製ビーズを散布し、交番電圧を印加したところ、良好な塵埃除去率が確認された。
実施例67の塵埃除去装置を用いて、図12に示される撮像装置を作製した。動作させたところ、撮像ユニットの表面の塵を良好に除去し、塵欠陥の無い画像が得られた。
実施例61の積層圧電素子を用いて、図14に示される電子機器を作製した。交番電圧の印加に応じたスピーカ動作が確認された。
102 個別液室 103 振動板 104 液室隔壁 105 吐出口
106 連通孔 107 共通液室 108 バッファ層 1011 第一の電極
1012 圧電材料 1013 第二の電極 201 振動子 202 ロータ
203 出力軸 204 振動子 205 ロータ 206 バネ
2011 弾性体リング 2012 圧電素子 2013 有機系接着剤
2041 金属弾性体 2042 積層圧電素子 310 塵埃除去装置
320 振動板 330 圧電素子 331 圧電材料 332 第1の電極
333 第2の電極 336 第1の電極面 337 第2の電極面
51 第一の電極 53 第二の電極 54 圧電材料層 55 内部電極
501 第一の電極 503 第二の電極 504 圧電材料層
505a 内部電極 505b 内部電極 506a 外部電極
506b 外部電極 601 カメラ本体 602 マウント部
605 ミラーボックス 606 メインミラー 200 シャッタユニット
300 本体シャーシ 400 撮像ユニット 701 前群レンズ
702 後群レンズ(フォーカスレンズ) 711 着脱マウント
712 固定筒 713 直進案内筒 714 前群鏡筒 715 カム環
716 後群鏡筒 717 カムローラ 718 軸ビス 719 ローラ
720 回転伝達環 722 コロ 724 マニュアルフォーカス環
725 超音波モータ 726 波ワッシャ 727 ボールレース
728 フォーカスキー 729 接合部材 732 ワッシャ
733 低摩擦シート 881 液体吐出装置 882 外装 883 外装
884 外装 885 外装 887 外装 890 回復部 891 記録部
892 キャリッジ 896 装置本体 897 自動給送部 898 排出口
899 搬送部 901 光学装置 908 レリーズボタン
909 ストロボ発光部 912 スピーカ 914 マイク
916 補助光部 931 本体 932 ズームレバー 933 電源ボタン
Claims (21)
- 下記一般式(1)で表わされるペロブスカイト型金属酸化物、Mn、Li、およびBiを含有する圧電材料であって、
前記金属酸化物100重量部に対して、
前記Mnの含有量が金属換算で0.04重量部以上0.36重量部以下、
前記Liの含有量αが金属換算で0.0012重量部以下(0重量部を含む)、
前記Biの含有量βが金属換算で0.042重量部以上0.850重量部以下であることを特徴とする圧電材料。
(Ba 1−x Ca x ) a (Ti 1−y−z Zr y Sn z )O 3 (1)
(式中、0.09≦x≦0.30、0.025≦y≦0.085、0≦z≦0.02、0.986≦a≦1.02) - 前記yが0.055≦y≦0.085であることを特徴とする請求項1に記載の圧電材料。
- Mgの含有量が前記酸化物100重量部に対して金属換算で0.10重量部以下(ただし0重量部を除く)であることを特徴とする請求項1または2に記載の圧電材料。
- SiまたはBの少なくとも一方を含む成分の含有量が前記酸化物100重量部に対して金属換算で0.001重量部以上4.000重量部以下であることを特徴とする請求項1乃至3のいずれか1項に記載の圧電材料。
- y+z≦(11x/14)−0.037であることを特徴とする請求項1乃至4のいずれか1項に記載の圧電材料。
- x≦0.17であることを特徴とする請求項1乃至5のいずれか1項に記載の圧電材料。
- 前記圧電材料のキュリー温度が100℃以上であることを特徴とする請求項1乃至6のいずれか1項に記載の圧電材料。
- 前記圧電材料の周波数1kHzにおける誘電正接が0.006以下であることを特徴とする請求項1乃至7のいずれか1項に記載の圧電材料。
- 電極、および圧電材料部を有する圧電素子であって、前記圧電材料部を構成する圧電材料が請求項1乃至8のいずれか1項に記載の圧電材料であることを特徴とする圧電素子。
- 前記電極、および前記圧電材料部が交互に積層された請求項9に記載の圧電素子。
- 前記電極がAgとPdを含み、前記Agの含有重量M1と前記Pdの含有重量M2との重量比M1/M2が0.25≦M1/M2≦4.0であることを特徴とする請求項10に記載の圧電素子。
- 前記電極がNiおよびCuの少なくともいずれか1種を含むことを特徴とする請求項10に記載の圧電素子。
- 請求項9乃至12のいずれか1項に記載の圧電素子を配した振動部を備えた液室と、前記液室と連通する吐出口を有することを特徴とする液体吐出ヘッド。
- 被転写体の載置部と請求項13に記載の液体吐出ヘッドを備えたことを特徴とする液体吐出装置。
- 請求項9乃至12のいずれか1項に記載の圧電素子を配した振動体と、前記振動体と接触する移動体とを有することを特徴とする超音波モータ。
- 駆動部に請求項15に記載の超音波モータを備えたことを特徴とする光学機器。
- 請求項9乃至12のいずれか1項に記載の圧電素子を振動板に配した振動体を有することを特徴とする振動装置。
- 請求項17に記載の振動装置を振動部に備えたことを特徴とする塵埃除去装置。
- 請求項18に記載の塵埃除去装置と撮像素子ユニットとを有する撮像装置であって、前記塵埃除去装置の振動板を前記撮像素子ユニットの受光面側に設けたことを特徴とする撮像装置。
- 請求項9乃至12のいずれか1項に記載の積層圧電素子を備えた圧電音響部品。
- 請求項9乃至12のいずれか1項に記載の積層圧電素子を備えた電子機器。
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