MXPA05005676A - Sensor magnetico y metodo para compensar la caracteristica dependiente de la temperatura del sensor magnetico. - Google Patents

Sensor magnetico y metodo para compensar la caracteristica dependiente de la temperatura del sensor magnetico.

Info

Publication number
MXPA05005676A
MXPA05005676A MXPA05005676A MXPA05005676A MXPA05005676A MX PA05005676 A MXPA05005676 A MX PA05005676A MX PA05005676 A MXPA05005676 A MX PA05005676A MX PA05005676 A MXPA05005676 A MX PA05005676A MX PA05005676 A MXPA05005676 A MX PA05005676A
Authority
MX
Mexico
Prior art keywords
elements
magnetic sensor
vicinity
heating coil
heating
Prior art date
Application number
MXPA05005676A
Other languages
English (en)
Inventor
Hideki Sato
Original Assignee
Yamaha Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamaha Corp filed Critical Yamaha Corp
Publication of MXPA05005676A publication Critical patent/MXPA05005676A/es

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C17/00Compasses; Devices for ascertaining true or magnetic north for navigation or surveying purposes
    • G01C17/38Testing, calibrating, or compensating of compasses
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/0005Geometrical arrangement of magnetic sensor elements; Apparatus combining different magnetic sensor types
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/0064Arrangements or instruments for measuring magnetic variables comprising means for performing simulations, e.g. of the magnetic variable to be measured
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/0206Three-component magnetometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/091Constructional adaptation of the sensor to specific applications
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/093Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02Bonding areas ; Manufacturing methods related thereto
    • H01L24/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04042Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits

Abstract

Un sensor magnetico 10 incluye elementos GMR 11-18 y bobinas termicas 21-24 que sirven como elementos generadores de calor. Los elementos 11-14 y 15-18 se encuentran interconectados en puente para constituir sensores en el eje X y en el eje Y, respectivamente. Las bobinas termicas 21, 22, 23, y 24 se encuentran colocadas adyacentes a los elementos 11 y 12, a los elementos 13 y 14, a los elementos 15 y 16, y a los elementos 17, y 18, respectivamente. Las bobinas termicas 21-24, cuando son activadas electricamente, calientan principalmente los elementos adyacentes. Por lo tanto, los elementos pueden ser calentados y enfriados en un periodo corto en el cual se puede asegurar un geomagnetismo constante. Datos para la compensacion de la caracteristica dependiente de la temperatura (relacion del cambio en el valor de salida del sensor, con respecto a la variacion de la temperatura del elemento) se obtiene en base a las temperaturas de los elementos, antes y despues del calentamiento, y las salidas del sensor magnetico antes y despues del calentamiento. Subsecuentemente, las caracteristicas de temperatura de los elementos son compensadas en base a los datos. La figura mas representativa de la invencion es la numero 1.
MXPA05005676A 2002-11-29 2002-11-29 Sensor magnetico y metodo para compensar la caracteristica dependiente de la temperatura del sensor magnetico. MXPA05005676A (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2002/012476 WO2004051298A1 (ja) 2002-11-29 2002-11-29 磁気センサ、及び磁気センサの温度依存特性補償方法

Publications (1)

Publication Number Publication Date
MXPA05005676A true MXPA05005676A (es) 2005-10-18

Family

ID=32375632

Family Applications (1)

Application Number Title Priority Date Filing Date
MXPA05005676A MXPA05005676A (es) 2002-11-29 2002-11-29 Sensor magnetico y metodo para compensar la caracteristica dependiente de la temperatura del sensor magnetico.

Country Status (14)

Country Link
US (5) US7053607B2 (es)
EP (2) EP1566649B1 (es)
JP (1) JP4333582B2 (es)
CN (3) CN1695066A (es)
AT (1) ATE495458T1 (es)
AU (1) AU2002349615B2 (es)
BR (1) BR0215939A (es)
CA (1) CA2507819C (es)
DE (1) DE60238951D1 (es)
HK (1) HK1080148A1 (es)
MX (1) MXPA05005676A (es)
RU (3) RU2303791C2 (es)
TW (1) TWI251083B (es)
WO (1) WO2004051298A1 (es)

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US7573262B2 (en) 2009-08-11
US20060103379A1 (en) 2006-05-18
EP1566649B1 (en) 2011-01-12
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JPWO2004051298A1 (ja) 2006-04-06
RU2331900C1 (ru) 2008-08-20
RU2303791C2 (ru) 2007-07-27
CA2507819A1 (en) 2004-06-17
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