KR930022515A - 클린룸용 밀폐식 컨테이너 - Google Patents

클린룸용 밀폐식 컨테이너

Info

Publication number
KR930022515A
KR930022515A KR1019930004904A KR930004904A KR930022515A KR 930022515 A KR930022515 A KR 930022515A KR 1019930004904 A KR1019930004904 A KR 1019930004904A KR 930004904 A KR930004904 A KR 930004904A KR 930022515 A KR930022515 A KR 930022515A
Authority
KR
South Korea
Prior art keywords
inert gas
container
clean room
passage hole
gas cylinder
Prior art date
Application number
KR1019930004904A
Other languages
English (en)
Other versions
KR100273842B1 (ko
Inventor
뎃베이 야마시다
마사나오 무라다
쓰요시 다나가
데루야 모리다
히도시 가와노
아스시 오구노
마사노리 쓰다
미쓰히로 하야시
Original Assignee
스즈끼 아끼오
신꼬덴끼 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 스즈끼 아끼오, 신꼬덴끼 가부시끼가이샤 filed Critical 스즈끼 아끼오
Publication of KR930022515A publication Critical patent/KR930022515A/ko
Application granted granted Critical
Publication of KR100273842B1 publication Critical patent/KR100273842B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packages (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

가스보급을 위해 불활성 가스퍼지스테이션까지 이동시키지 아니하고도 되는, 시스템의 부담을 경감시킬 수 있는 반도체 제조시스템에서 사용되는 클린룸용 밀폐식 컨테이너를 제공하는 것을 목적으로 한다. 그 구성은 웨이퍼를 수납하고 내부를 불활성가스 영위기로 하여 반도체등 제조시스템의 장치에서 장치로 반송되는 밀폐식 컨테이너(10)에 있어서, 당해 컨테이너는 일단이 내부로 개구되고 타단은 외부로 개구하는 가스 통로공(31)을 가지며, 이 가스통로공의 상기 타단부에 가반식(可搬式)의 불활성가스 봄베(20)가 착탈 가능토록 설치되고 당해 불활성 가스 봄베는 컨테이너 누출 가스량 보급용임을 특징으로 한다.

Description

클린룸용 밀폐식 컨테이너
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 실시예를 표시한 단면도.
제2도는 상기 실시예에서의 요부의 확대 단면도.

Claims (1)

  1. 웨이퍼를 수납하고 내부를 불활성가스영위기로 하여 반도체 등 제조시스템의 장치에서 장치로 반송되고 밀폐식 컨테이너에 있어서, 당해 컨테이너에는 일단이 내부에 개구되고, 타단은 외부로 개구하는 가스 통로공을 가지며, 이 가스 통로공의 타단부에 가반식(可搬式)의 불활성 가스 봄베(20)가 착탈 가능토록 설치되고, 당해 불활성 가스 봄베는 컨테이너 누출 가스량 보급용임을 특징으로 하는 클린룸용 말폐식 컨테이너.
KR1019930004904A 1992-04-07 1993-03-29 클린룸용 밀폐식 컨테이너 KR100273842B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP92-084411 1992-04-07
JP8441192A JP3191392B2 (ja) 1992-04-07 1992-04-07 クリーンルーム用密閉式コンテナ

Publications (2)

Publication Number Publication Date
KR930022515A true KR930022515A (ko) 1993-11-24
KR100273842B1 KR100273842B1 (ko) 2001-01-15

Family

ID=13829852

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930004904A KR100273842B1 (ko) 1992-04-07 1993-03-29 클린룸용 밀폐식 컨테이너

Country Status (5)

Country Link
US (1) US5320218A (ko)
EP (1) EP0565001B1 (ko)
JP (1) JP3191392B2 (ko)
KR (1) KR100273842B1 (ko)
DE (1) DE69304385T2 (ko)

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