DE69433428D1 - Durch ein gehäuse umschlossener verschliessbarer halbleiterscheibenhalter - Google Patents
Durch ein gehäuse umschlossener verschliessbarer halbleiterscheibenhalterInfo
- Publication number
- DE69433428D1 DE69433428D1 DE69433428T DE69433428T DE69433428D1 DE 69433428 D1 DE69433428 D1 DE 69433428D1 DE 69433428 T DE69433428 T DE 69433428T DE 69433428 T DE69433428 T DE 69433428T DE 69433428 D1 DE69433428 D1 DE 69433428D1
- Authority
- DE
- Germany
- Prior art keywords
- holder
- semiconductor wafer
- housing connected
- wafer holder
- semiconductor holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 235000012431 wafers Nutrition 0.000 abstract 4
- 238000010926 purge Methods 0.000 abstract 2
- 239000011261 inert gas Substances 0.000 abstract 1
- 238000002955 isolation Methods 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67376—Closed carriers characterised by sealing arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
- Y10S414/138—Wafers positioned vertically within cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/209,227 US5472086A (en) | 1994-03-11 | 1994-03-11 | Enclosed sealable purgible semiconductor wafer holder |
PCT/US1994/007357 WO1995024348A1 (en) | 1994-03-11 | 1994-06-29 | Enclosed sealable purgible semiconductor wafer holder |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69433428D1 true DE69433428D1 (de) | 2004-01-29 |
DE69433428T2 DE69433428T2 (de) | 2004-10-07 |
Family
ID=22777887
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69433428T Expired - Lifetime DE69433428T2 (de) | 1994-03-11 | 1994-06-29 | Durch ein gehäuse umschlossener verschliessbarer halbleiterscheibenhalter |
Country Status (6)
Country | Link |
---|---|
US (2) | US5472086A (de) |
EP (1) | EP0749393B1 (de) |
JP (1) | JP3202991B2 (de) |
AT (1) | ATE256915T1 (de) |
DE (1) | DE69433428T2 (de) |
WO (1) | WO1995024348A1 (de) |
Families Citing this family (56)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5472086A (en) * | 1994-03-11 | 1995-12-05 | Holliday; James E. | Enclosed sealable purgible semiconductor wafer holder |
US6833035B1 (en) * | 1994-04-28 | 2004-12-21 | Semitool, Inc. | Semiconductor processing system with wafer container docking and loading station |
JP3257328B2 (ja) * | 1995-03-16 | 2002-02-18 | 株式会社日立製作所 | プラズマ処理装置及びプラズマ処理方法 |
KR960043084A (ko) * | 1995-05-22 | 1996-12-23 | 웨인 피이 베일리 | 단일 구조의 퍼드 및 카세트 조립체 |
US5833726A (en) * | 1995-05-26 | 1998-11-10 | Extraction System, Inc. | Storing substrates between process steps within a processing facility |
USD378873S (en) * | 1995-10-13 | 1997-04-22 | Empak, Inc. | 300 mm microenvironment pod with door on side |
USD387903S (en) * | 1995-10-13 | 1997-12-23 | Empak, Inc. | Shipping container |
USD383898S (en) * | 1995-10-13 | 1997-09-23 | Empak, Inc. | Combination shipping and transport cassette |
USRE41231E1 (en) * | 1995-10-13 | 2010-04-20 | Entegris, Inc. | 300 mm microenvironment pod with door on side |
US5873468A (en) * | 1995-11-16 | 1999-02-23 | Sumitomo Sitix Corporation | Thin-plate supporting container with filter means |
US6723174B2 (en) | 1996-03-26 | 2004-04-20 | Semitool, Inc. | Automated semiconductor processing system |
US6942738B1 (en) | 1996-07-15 | 2005-09-13 | Semitool, Inc. | Automated semiconductor processing system |
US6003674A (en) * | 1996-05-13 | 1999-12-21 | Brooks; Ray Gene | Method and apparatus for packing contaminant-sensitive articles and resulting package |
US5724748A (en) * | 1996-07-24 | 1998-03-10 | Brooks; Ray G. | Apparatus for packaging contaminant-sensitive articles and resulting package |
US5921397A (en) * | 1996-12-10 | 1999-07-13 | Empak, Inc. | Disk cassette |
US5833067A (en) * | 1997-03-10 | 1998-11-10 | Seagate Technologies, Inc. | Disk caddy and lid with barrier means |
US6736268B2 (en) * | 1997-07-11 | 2004-05-18 | Entegris, Inc. | Transport module |
US6010008A (en) * | 1997-07-11 | 2000-01-04 | Fluoroware, Inc. | Transport module |
US6076585A (en) * | 1998-03-02 | 2000-06-20 | Motorola, Inc. | Method of manufacturing a semiconductor device and apparatus therefor |
JP3656701B2 (ja) * | 1998-03-23 | 2005-06-08 | 東京エレクトロン株式会社 | 処理装置 |
JP3370279B2 (ja) * | 1998-07-07 | 2003-01-27 | 信越ポリマー株式会社 | 精密基板収納容器 |
US6267245B1 (en) | 1998-07-10 | 2001-07-31 | Fluoroware, Inc. | Cushioned wafer container |
US6216874B1 (en) * | 1998-07-10 | 2001-04-17 | Fluoroware, Inc. | Wafer carrier having a low tolerance build-up |
US6095335A (en) * | 1998-07-10 | 2000-08-01 | H-Square Corporation | Wafer support device having a retrofit to provide size convertibility |
US6464081B2 (en) * | 1999-01-06 | 2002-10-15 | Entegris, Inc. | Door guide for a wafer container |
AUPP914099A0 (en) | 1999-03-12 | 1999-04-01 | Kyrwood, William Stephen | Golf club support |
US6168364B1 (en) * | 1999-04-19 | 2001-01-02 | Tdk Corporation | Vacuum clean box, clean transfer method and apparatus therefor |
US6561894B1 (en) | 1999-04-19 | 2003-05-13 | Tdk Corporation | Clean box, clean transfer method and apparatus therefor |
JP3556519B2 (ja) * | 1999-04-30 | 2004-08-18 | 信越ポリマー株式会社 | 基板収納容器の識別構造及び基板収納容器の識別方法 |
JP3226511B2 (ja) * | 1999-06-23 | 2001-11-05 | ティーディーケイ株式会社 | 容器および容器の封止方法 |
JP3998386B2 (ja) * | 2000-01-26 | 2007-10-24 | 三菱電機株式会社 | 液晶表示装置の製造装置および液晶表示装置の製造方法 |
EP1332349A4 (de) * | 2000-07-07 | 2008-12-17 | Semitool Inc | Automatisiertes verarbeitungssystem |
EP1184724A1 (de) | 2000-08-29 | 2002-03-06 | Motorola, Inc. | Elektronische Vorrichtung für einen lithographischen Maskenbehälter und Verfahren unter Verwendung derselben |
CN1128470C (zh) | 2000-09-01 | 2003-11-19 | 陈正明 | 晶片减薄后与载体分离的工艺方法及其装置 |
JP4128811B2 (ja) * | 2001-08-10 | 2008-07-30 | 株式会社トプコン | 表面検査装置 |
US6866150B2 (en) * | 2001-11-15 | 2005-03-15 | The Mason Box Company, Inc. | Containment unit for protecting medical slides during transit |
JP4329541B2 (ja) * | 2001-11-27 | 2009-09-09 | インテグリス・インコーポレーテッド | ドアにより機能化されるアース経路を有した前方開閉型ウエハーキャリア及びウエハーキャリアのドアを経由したアース経路を設ける方法 |
US7175026B2 (en) | 2002-05-03 | 2007-02-13 | Maxtor Corporation | Memory disk shipping container with improved contaminant control |
US6719142B1 (en) * | 2002-07-16 | 2004-04-13 | Ion Systems, Inc. | Apparatus and method for measuring static charge on wafers, disks, substrates, masks, and flat panel displays |
US6781205B1 (en) * | 2002-10-11 | 2004-08-24 | Ion Systems, Inc. | Electrostatic charge measurement on semiconductor wafers |
DE602004030538D1 (en) * | 2003-03-04 | 2011-01-27 | Shinetsu Polymer Co | Präzisionssubstratlagerbehälter |
US7201276B2 (en) * | 2003-11-07 | 2007-04-10 | Entegris, Inc. | Front opening substrate container with bottom plate |
US7252199B2 (en) * | 2004-03-26 | 2007-08-07 | Entegris, Inc. | Disk cassette system |
US7584851B2 (en) * | 2004-10-08 | 2009-09-08 | Seagate Technology Llc | Container for disk drives |
US7596456B2 (en) * | 2005-11-18 | 2009-09-29 | Texas Instruments Incorporated | Method and apparatus for cassette integrity testing using a wafer sorter |
US7810639B2 (en) * | 2006-02-10 | 2010-10-12 | Seagate Technology Llc | Container for consumer electronics |
KR100788005B1 (ko) * | 2006-04-27 | 2007-12-21 | 에스에스알 엠에프지 코포레이션 | 박막 디스크용 카세트 뚜껑 개폐장치 |
US20080019811A1 (en) * | 2006-07-11 | 2008-01-24 | Michael Krolak | Method and apparatus for vertical wafer transport, buffer and storage |
WO2009008047A1 (ja) * | 2007-07-09 | 2009-01-15 | Kondoh Industries, Ltd. | 半導体ウエハ収納容器内へのドライエアまたは窒素ガス充填装置並びに該装置を用いたウエハ静電除去装置 |
US20100020440A1 (en) * | 2008-07-25 | 2010-01-28 | Seagate Technology Llc | Low profile substrate shipper |
TWI346638B (en) * | 2008-12-26 | 2011-08-11 | Gudeng Prec Industral Co Ltd | A purging valve and a wafer container having the purging valve |
KR20140035377A (ko) | 2011-05-03 | 2014-03-21 | 인티그리스, 인코포레이티드 | 입자 쉴드를 가지는 웨이퍼 용기 |
US20120288355A1 (en) * | 2011-05-11 | 2012-11-15 | Ming-Teng Hsieh | Method for storing wafers |
JP5888288B2 (ja) * | 2013-06-26 | 2016-03-16 | 株式会社ダイフク | 物品保管設備の検査装置 |
US10566226B2 (en) * | 2014-11-11 | 2020-02-18 | Applied Materials, Inc. | Multi-cassette carrying case |
JP6451453B2 (ja) * | 2015-03-31 | 2019-01-16 | Tdk株式会社 | ガスパージ装置、ロードポート装置、パージ対象容器の設置台およびガスパージ方法 |
Family Cites Families (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3926305A (en) * | 1973-07-12 | 1975-12-16 | Fluoroware Inc | Wafer basket |
US3918756A (en) * | 1973-12-26 | 1975-11-11 | Fluoroware Inc | Wafer holder |
US3939973A (en) * | 1974-01-14 | 1976-02-24 | Fluoroware, Inc. | Wafer basket and easily attached and detached carrier for same |
US3923156A (en) * | 1974-04-29 | 1975-12-02 | Fluoroware Inc | Wafer basket |
US3913749A (en) * | 1974-08-12 | 1975-10-21 | Fluoroware Systems Corp | Wafer basket transfer apparatus |
US3961877A (en) * | 1974-09-11 | 1976-06-08 | Fluoroware, Inc. | Reinforced wafer basket |
US3923191A (en) * | 1974-09-11 | 1975-12-02 | Fluoroware Inc | Wafer basket and handle |
US4043451A (en) * | 1976-03-18 | 1977-08-23 | Fluoroware, Inc. | Shipping container for silicone semiconductor wafers |
US4061228A (en) * | 1976-12-20 | 1977-12-06 | Fluoroware, Inc. | Shipping container for substrates |
US4248346A (en) * | 1979-01-29 | 1981-02-03 | Fluoroware, Inc. | Shipping container for semiconductor substrate wafers |
US4471716A (en) * | 1981-01-15 | 1984-09-18 | Fluoroware, Inc. | Wafer carrier |
US4450960A (en) * | 1982-08-30 | 1984-05-29 | Empak Inc. | Package |
US4520925A (en) * | 1983-08-09 | 1985-06-04 | Empak Inc. | Package |
US4557382A (en) * | 1983-08-17 | 1985-12-10 | Empak Inc. | Disk package |
US4532970A (en) * | 1983-09-28 | 1985-08-06 | Hewlett-Packard Company | Particle-free dockable interface for integrated circuit processing |
US4543389A (en) * | 1984-04-10 | 1985-09-24 | Shell Oil Company | Copolymerization catalyst and process for polymerizing impact resistant ethylene-propylene polymers |
DE3413837A1 (de) * | 1984-04-12 | 1985-10-17 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verpackung fuer halbleiterscheiben |
US4588086A (en) * | 1984-06-07 | 1986-05-13 | Coe Thomas U | Substrate and media carrier |
USRE33361E (en) * | 1984-06-07 | 1990-10-02 | Substrate and media carrier | |
US4815912A (en) * | 1984-12-24 | 1989-03-28 | Asyst Technologies, Inc. | Box door actuated retainer |
IT1181778B (it) * | 1985-05-07 | 1987-09-30 | Dynamit Nobel Silicon Spa | Contenitore per l'immagazzinamento ed il trasporto di dischetti (fette) di silicio |
US4966519A (en) * | 1985-10-24 | 1990-10-30 | Texas Instruments Incorporated | Integrated circuit processing system |
US4739882A (en) * | 1986-02-13 | 1988-04-26 | Asyst Technologies | Container having disposable liners |
US4721207A (en) * | 1986-04-28 | 1988-01-26 | Tensho Electric Industrial Co., Ltd. | Hard disk container |
US4684021A (en) * | 1986-06-23 | 1987-08-04 | Fluoroware, Inc. | Bottom loading wafer carrier box |
US4817799A (en) * | 1986-10-06 | 1989-04-04 | Empak, Inc. | Disk package |
US4747488A (en) * | 1986-12-01 | 1988-05-31 | Shoji Kikuchi | Hard disk container |
US4752007A (en) * | 1986-12-11 | 1988-06-21 | Fluoroware, Inc. | Disk shipper |
US4718552A (en) * | 1986-12-11 | 1988-01-12 | Fluoroware, Inc. | Disk shipper and transfer tray |
US4827110A (en) * | 1987-06-11 | 1989-05-02 | Fluoroware, Inc. | Method and apparatus for monitoring the location of wafer disks |
US4872554A (en) * | 1987-07-02 | 1989-10-10 | Fluoroware, Inc. | Reinforced carrier with embedded rigid insert |
US4966284A (en) * | 1987-07-07 | 1990-10-30 | Empak, Inc. | Substrate package |
US4793488A (en) * | 1987-07-07 | 1988-12-27 | Empak, Inc. | Package for semiconductor wafers |
US5025926A (en) * | 1987-07-07 | 1991-06-25 | Empak, Inc. | Package |
US4930634A (en) * | 1987-09-29 | 1990-06-05 | Fluoroware, Inc. | Carrier for flat panel displays |
US4817795A (en) * | 1988-03-04 | 1989-04-04 | Fluoroware, Inc. | Robotic accessible wafer shipper assembly |
US4880116A (en) * | 1988-03-04 | 1989-11-14 | Fluoroware, Inc. | Robotic accessible wafer shipper assembly |
US5024329A (en) * | 1988-04-22 | 1991-06-18 | Siemens Aktiengesellschaft | Lockable container for transporting and for storing semiconductor wafers |
US4949848A (en) * | 1988-04-29 | 1990-08-21 | Fluoroware, Inc. | Wafer carrier |
US4833306A (en) * | 1988-05-18 | 1989-05-23 | Fluoroware, Inc. | Bar code remote recognition system for process carriers of wafer disks |
US5046615A (en) * | 1989-04-03 | 1991-09-10 | Fluoroware, Inc. | Disk shipper |
US4995430A (en) * | 1989-05-19 | 1991-02-26 | Asyst Technologies, Inc. | Sealable transportable container having improved latch mechanism |
US5137063A (en) * | 1990-02-05 | 1992-08-11 | Texas Instruments Incorporated | Vented vacuum semiconductor wafer cassette |
US5217053A (en) * | 1990-02-05 | 1993-06-08 | Texas Instruments Incorporated | Vented vacuum semiconductor wafer cassette |
US5111936A (en) * | 1990-11-30 | 1992-05-12 | Fluoroware | Wafer carrier |
US5207324A (en) * | 1991-03-08 | 1993-05-04 | Fluoroware, Inc. | Wafer cushion for shippers |
US5253755A (en) * | 1991-03-20 | 1993-10-19 | Fluoroware, Inc. | Cushioned cover for disk container |
US5184723A (en) * | 1991-05-14 | 1993-02-09 | Fluoroware, Inc. | Single wafer robotic package |
US5228568A (en) * | 1991-08-30 | 1993-07-20 | Shin-Etsu Handotai Co., Ltd. | Semiconductor wafer basket |
US5154301A (en) * | 1991-09-12 | 1992-10-13 | Fluoroware, Inc. | Wafer carrier |
US5255783A (en) * | 1991-12-20 | 1993-10-26 | Fluoroware, Inc. | Evacuated wafer container |
US5255797A (en) * | 1992-02-26 | 1993-10-26 | Fluoroware, Inc. | Wafer carrier with wafer retaining cushions |
US5295522A (en) * | 1992-09-24 | 1994-03-22 | International Business Machines Corporation | Gas purge system for isolation enclosure for contamination sensitive items |
US5472086A (en) * | 1994-03-11 | 1995-12-05 | Holliday; James E. | Enclosed sealable purgible semiconductor wafer holder |
-
1994
- 1994-03-11 US US08/209,227 patent/US5472086A/en not_active Expired - Lifetime
- 1994-06-29 AT AT94922053T patent/ATE256915T1/de not_active IP Right Cessation
- 1994-06-29 JP JP52342795A patent/JP3202991B2/ja not_active Expired - Lifetime
- 1994-06-29 DE DE69433428T patent/DE69433428T2/de not_active Expired - Lifetime
- 1994-06-29 WO PCT/US1994/007357 patent/WO1995024348A1/en active IP Right Grant
- 1994-06-29 EP EP94922053A patent/EP0749393B1/de not_active Expired - Lifetime
-
1996
- 1996-09-11 US US08/712,140 patent/US5755332A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0749393A4 (de) | 1997-07-02 |
DE69433428T2 (de) | 2004-10-07 |
WO1995024348A1 (en) | 1995-09-14 |
JP3202991B2 (ja) | 2001-08-27 |
JPH09507726A (ja) | 1997-08-05 |
EP0749393A1 (de) | 1996-12-27 |
US5472086A (en) | 1995-12-05 |
EP0749393B1 (de) | 2003-12-17 |
US5755332A (en) | 1998-05-26 |
ATE256915T1 (de) | 2004-01-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: ENTEGRIS, INC., CHASKA, MINN., US |
|
8364 | No opposition during term of opposition |