KR840008537A - 반도체장치 - Google Patents
반도체장치 Download PDFInfo
- Publication number
- KR840008537A KR840008537A KR1019840001637A KR840001637A KR840008537A KR 840008537 A KR840008537 A KR 840008537A KR 1019840001637 A KR1019840001637 A KR 1019840001637A KR 840001637 A KR840001637 A KR 840001637A KR 840008537 A KR840008537 A KR 840008537A
- Authority
- KR
- South Korea
- Prior art keywords
- source region
- drain
- field effect
- effect transistor
- semiconductor device
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims 8
- 230000005669 field effect Effects 0.000 claims 7
- 239000010408 film Substances 0.000 claims 6
- 239000012535 impurity Substances 0.000 claims 6
- 239000002184 metal Substances 0.000 claims 5
- 239000010409 thin film Substances 0.000 claims 5
- 230000008018 melting Effects 0.000 claims 4
- 238000002844 melting Methods 0.000 claims 4
- 229910021332 silicide Inorganic materials 0.000 claims 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000009826 distribution Methods 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000009827 uniform distribution Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
- H01L21/2251—Diffusion into or out of group IV semiconductors
- H01L21/2254—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides
- H01L21/2257—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides the applied layer being silicon or silicide or SIPOS, e.g. polysilicon, porous silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823828—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
- H01L21/823835—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes silicided or salicided gate conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
- H01L27/0927—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors comprising a P-well only in the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41775—Source or drain electrodes for field effect devices characterised by the proximity or the relative position of the source or drain electrode and the gate electrode, e.g. the source or drain electrode separated from the gate electrode by side-walls or spreading around or above the gate electrode
- H01L29/41783—Raised source or drain electrodes self aligned with the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
- H01L29/456—Ohmic electrodes on silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66613—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation
- H01L29/66628—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation recessing the gate by forming single crystalline semiconductor material at the source or drain location
Abstract
내용 없음.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도 내지 제5도는 본 발명의 제1의 실시예의 제조 공정을 공정순으로 도시한 단면도.
Claims (11)
- 전계 효과 트랜지스터에 있어서, 반도체 기판과 반대 도전형의 드레인 또는 소오스 영역에 있어서의 최대 불순물 농도가 1020㎝-3미만 내지 1018㎝-3이상에서 구성되고, 또, 상기 드레인 또는 소오스영역 표면의 적어도 일부는, 높은 융점 금속층, 또는 그 실리싸이드 층과 50㎚을 초과하지 않는 두께를 가진 높은 불순물 농도 영역으로 되는 높은 도전층과 접하고 있는 것을 특징으로 하는 반도체장치.
- 특허청구의 범위 제1항 기재의 전계 효과 트랜지스터에 있어서, 상기 높은 도전층이 고융점 금속층 또는 그 실리싸이드 층만으로 구성되어 있는 것을 특징으로 하는 반도체장치.
- 특허청구의 범위 제1항 기재의 전계효과 트랜지스터에 있어서, 상기 드레인 또는 소오스 영역의 적어도 일부가 게이트 전극 아래에 존재하는 것을 특징으로 하는 반도체장치.
- 특허청구의 범위 제1항 기재의 전계 효과 트랜지스터에 있어서, 상기 드레인 또는 소오스 영역의 적어도 한쪽이, 적어도 2회의 이온 주입에 의해서 형성되는 것을 특징으로 하는 반도체장치.
- 특허청구의 범위 제3항 기재의 전계 효과 트랜지스터에 있어서, 상기 게이트 전극이 Mo 박막, 또는 실리콘 박막으로 구성되는 것을 특징으로 하는 반도체장치.
- 특허청구의 범위 제3항 기재의 전계효과 트랜지스터에 있어서, 상기 게이트 전극 측벽부에 비유전률이 실리콘산화막 보다 높음 게이트 측벽 절연막을 형성하여 되는 것을 특징으로 하는 반도체장치.
- 특허청구의 범위 제6항 기재의 전계 효과 트랜지스터에 있어서, 상기 측벽 절연막을 실리콘 질화막으로 구성한 것을 특징으로 하는 반도체장치.
- 불순물 확산 영역의 최대 불순물 농도가 1018내지 1020㎝-3정도의 N형 드레인 또는 소오스 영역과 최대 불순물 농도가 1017내지 1019㎝-3정도의 P형 드레인 또는 소오스 영역을 가지며, 또 상기 각 드레인 또는 소오스 영역을 가지며, 또 상기 각 드레인 또는 소오스 영역의 적어도 일부가 높은 융점 금속 또는 해당 금속의 실리싸이드 층과 접합되여서 구성되고 있는 것을 특징으로 하는 반도체장치.
- 상기 각 드레인 또는 소오스 영역의 일부는, 반도체 기관표면 위에 절연막을 거쳐서, 구성된 게이트 전극과 해당 게이트 전극의 측벽에 형성된 절연막을 거쳐서, 인접해서 형성되는 것을 특징으로 하는 특허청구의 범위 제8항 기재의 반도체 장치.
- 상기 N형 드레인 또는 소오스 영역은, 고융점 금속 또는 그 실리싸이드 층 바로 아래의 불순물 석출영역과, 실리콘 박막 내부의 대략 균일한 분포의 영역과, 급준한 농도 분포 영역의 3개의 불순물 농도 분포 영역을 수직방향으로 갖고 있는 것을 특징으로 하는 특허청구의 범위 제8항 기재의 반도체장치.
- 상기 각 드레인 또는 소오스 영역의 일부는 다결정 박막 또는 비정질 박막으로 형성되는 것을 특징으로 하는 특허청구의 범위 제9항 기재의 반도체장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5507583A JPS59205759A (ja) | 1983-04-01 | 1983-04-01 | Mis型電界効果トランジスタ |
JP55075 | 1983-04-01 | ||
JP58-55075 | 1983-04-01 | ||
JP58121185A JPS6014461A (ja) | 1983-07-04 | 1983-07-04 | 相補型絶縁ゲート電界効果トランジスタの製造方法 |
JP121185 | 1983-07-04 | ||
JP58-121185 | 1983-07-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR840008537A true KR840008537A (ko) | 1984-12-15 |
KR910006249B1 KR910006249B1 (ko) | 1991-08-17 |
Family
ID=26395924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019840001637A KR910006249B1 (ko) | 1983-04-01 | 1984-03-29 | 반도체 장치 |
Country Status (4)
Country | Link |
---|---|
US (1) | US4769686A (ko) |
EP (1) | EP0123936B1 (ko) |
KR (1) | KR910006249B1 (ko) |
DE (1) | DE3476144D1 (ko) |
Families Citing this family (88)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6153761A (ja) * | 1984-08-24 | 1986-03-17 | Hitachi Ltd | 半導体装置 |
DE3677627D1 (de) * | 1985-04-24 | 1991-04-04 | Gen Electric | Halbleiteranordnung mit isoliertem gate. |
US4849802A (en) * | 1986-01-21 | 1989-07-18 | Ibm Corporation | Thermally stable low resistance contact |
US4978628A (en) * | 1986-11-19 | 1990-12-18 | Teledyne Industries, Inc. | Drail-well/extension high voltage MOS transistor structure and method of fabrication |
US4796082A (en) * | 1987-03-16 | 1989-01-03 | International Business Machines Corporation | Thermally stable ohmic contact for gallium-arsenide |
JP2609619B2 (ja) * | 1987-08-25 | 1997-05-14 | 三菱電機株式会社 | 半導体装置 |
US4907048A (en) * | 1987-11-23 | 1990-03-06 | Xerox Corporation | Double implanted LDD transistor self-aligned with gate |
US4914500A (en) * | 1987-12-04 | 1990-04-03 | At&T Bell Laboratories | Method for fabricating semiconductor devices which include sources and drains having metal-containing material regions, and the resulting devices |
IT1216476B (it) * | 1988-02-29 | 1990-03-08 | Sgs Thomson Microelectronics | Processo per l'ottenimento di transitori a canale n per alta tensione, particolarmente per memorie eeprom con tecnologia cmos. |
US5208472A (en) * | 1988-05-13 | 1993-05-04 | Industrial Technology Research Institute | Double spacer salicide MOS device and method |
JPH01298765A (ja) * | 1988-05-27 | 1989-12-01 | Fujitsu Ltd | 半導体装置及びその製造方法 |
US5012100A (en) * | 1988-06-08 | 1991-04-30 | Siemens Aktiengesellschaft | Method and apparatus for investigating the latch-up propagation in complementary-metal-oxide semiconductor (CMOS) circuits |
US4949136A (en) * | 1988-06-09 | 1990-08-14 | University Of Connecticut | Submicron lightly doped field effect transistors |
US5063422A (en) * | 1988-06-20 | 1991-11-05 | At&T Bell Laboratories | Devices having shallow junctions |
US5270252A (en) * | 1988-10-25 | 1993-12-14 | United States Of America As Represented By The Secretary Of The Navy | Method of forming platinum and platinum silicide schottky contacts on beta-silicon carbide |
US5221853A (en) * | 1989-01-06 | 1993-06-22 | International Business Machines Corporation | MOSFET with a refractory metal film, a silicide film and a nitride film formed on and in contact with a source, drain and gate region |
US4951100A (en) * | 1989-07-03 | 1990-08-21 | Motorola, Inc. | Hot electron collector for a LDD transistor |
US5258645A (en) * | 1990-03-09 | 1993-11-02 | Fujitsu Limited | Semiconductor device having MOS transistor and a sidewall with a double insulator layer structure |
US5283449A (en) * | 1990-08-09 | 1994-02-01 | Nec Corporation | Semiconductor integrated circuit device including two types of MOSFETS having source/drain region different in sheet resistance from each other |
US5300813A (en) * | 1992-02-26 | 1994-04-05 | International Business Machines Corporation | Refractory metal capped low resistivity metal conductor lines and vias |
US6624477B1 (en) | 1992-10-09 | 2003-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
TW232751B (en) * | 1992-10-09 | 1994-10-21 | Semiconductor Energy Res Co Ltd | Semiconductor device and method for forming the same |
US5501989A (en) * | 1993-03-22 | 1996-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Method of making semiconductor device/circuit having at least partially crystallized semiconductor layer |
US5539217A (en) * | 1993-08-09 | 1996-07-23 | Cree Research, Inc. | Silicon carbide thyristor |
US5439831A (en) * | 1994-03-09 | 1995-08-08 | Siemens Aktiengesellschaft | Low junction leakage MOSFETs |
JP2560637B2 (ja) * | 1994-04-28 | 1996-12-04 | 日本電気株式会社 | 電界効果トランジスタ及びその製造方法 |
US5675167A (en) | 1994-11-24 | 1997-10-07 | Nippondenso Co., Ltd. | Enhancement-type semiconductor having reduced leakage current |
JPH09186324A (ja) * | 1995-12-21 | 1997-07-15 | Texas Instr Inc <Ti> | ケイ化物化されたゲートおよび接触体を備えた電力用トランジスタ |
US5897363A (en) * | 1996-05-29 | 1999-04-27 | Micron Technology, Inc. | Shallow junction formation using multiple implant sources |
US6236085B1 (en) | 1996-11-11 | 2001-05-22 | Denso Corporation | Semiconductor memory device having high-concentration region around electric-field moderating layer in substrate |
US5793083A (en) * | 1996-11-25 | 1998-08-11 | Texas Instruments Incorporated | Method for designing shallow junction, salicided NMOS transistors with decreased electrostatic discharge sensitivity |
US5844276A (en) * | 1996-12-06 | 1998-12-01 | Advanced Micro Devices, Inc. | CMOS integrated circuit and method for implanting NMOS transistor areas prior to implanting PMOS transistor areas to optimize the thermal diffusivity thereof |
US5852306A (en) * | 1997-01-29 | 1998-12-22 | Micron Technology, Inc. | Flash memory with nanocrystalline silicon film floating gate |
JP4401448B2 (ja) * | 1997-02-24 | 2010-01-20 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US6838320B2 (en) * | 2000-08-02 | 2005-01-04 | Renesas Technology Corp. | Method for manufacturing a semiconductor integrated circuit device |
US6794255B1 (en) * | 1997-07-29 | 2004-09-21 | Micron Technology, Inc. | Carburized silicon gate insulators for integrated circuits |
US7196929B1 (en) | 1997-07-29 | 2007-03-27 | Micron Technology Inc | Method for operating a memory device having an amorphous silicon carbide gate insulator |
US5886368A (en) | 1997-07-29 | 1999-03-23 | Micron Technology, Inc. | Transistor with silicon oxycarbide gate and methods of fabrication and use |
US6965123B1 (en) | 1997-07-29 | 2005-11-15 | Micron Technology, Inc. | Transistor with variable electron affinity gate and methods of fabrication and use |
US7154153B1 (en) | 1997-07-29 | 2006-12-26 | Micron Technology, Inc. | Memory device |
US6936849B1 (en) | 1997-07-29 | 2005-08-30 | Micron Technology, Inc. | Silicon carbide gate transistor |
US6031263A (en) | 1997-07-29 | 2000-02-29 | Micron Technology, Inc. | DEAPROM and transistor with gallium nitride or gallium aluminum nitride gate |
US6746893B1 (en) | 1997-07-29 | 2004-06-08 | Micron Technology, Inc. | Transistor with variable electron affinity gate and methods of fabrication and use |
US6417110B1 (en) * | 1997-08-23 | 2002-07-09 | Radiant Technologies Inc | Method for constructing heat resistant electrode structures on silicon substrates |
US6306712B1 (en) * | 1997-12-05 | 2001-10-23 | Texas Instruments Incorporated | Sidewall process and method of implantation for improved CMOS with benefit of low CGD, improved doping profiles, and insensitivity to chemical processing |
WO2000010198A1 (en) * | 1998-08-11 | 2000-02-24 | Koninklijke Philips Electronics N.V. | Method of selectively forming silicide |
US6878968B1 (en) * | 1999-05-10 | 2005-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US6137126A (en) * | 1999-08-17 | 2000-10-24 | Advanced Micro Devices, Inc. | Method to reduce gate-to-local interconnect capacitance using a low dielectric constant material for LDD spacer |
JP2001119021A (ja) * | 1999-10-20 | 2001-04-27 | Nec Corp | 半導体装置の製造方法 |
JP3833903B2 (ja) * | 2000-07-11 | 2006-10-18 | 株式会社東芝 | 半導体装置の製造方法 |
JP4819215B2 (ja) * | 2000-07-24 | 2011-11-24 | ルネサスエレクトロニクス株式会社 | 不揮発性半導体記憶装置およびその製造方法 |
KR100493206B1 (ko) * | 2001-01-16 | 2005-06-03 | 가부시키가이샤 히타치세이사쿠쇼 | 반도체장치 및 그 제조방법 |
JP4676069B2 (ja) * | 2001-02-07 | 2011-04-27 | パナソニック株式会社 | 半導体装置の製造方法 |
US7084423B2 (en) | 2002-08-12 | 2006-08-01 | Acorn Technologies, Inc. | Method for depinning the Fermi level of a semiconductor at an electrical junction and devices incorporating such junctions |
US6833556B2 (en) | 2002-08-12 | 2004-12-21 | Acorn Technologies, Inc. | Insulated gate field effect transistor having passivated schottky barriers to the channel |
JP4413779B2 (ja) * | 2002-12-10 | 2010-02-10 | 株式会社半導体エネルギー研究所 | 発光装置およびその作製方法 |
JP4711595B2 (ja) * | 2002-12-10 | 2011-06-29 | 株式会社半導体エネルギー研究所 | Elディスプレイ及び電子機器 |
US7615822B1 (en) * | 2002-12-23 | 2009-11-10 | Volterra Semiconductor Corporation | Diffused drain transistor |
TWI253684B (en) * | 2003-06-02 | 2006-04-21 | Tokyo Electron Ltd | Method and system for using ion implantation for treating a low-k dielectric film |
US7220633B2 (en) * | 2003-11-13 | 2007-05-22 | Volterra Semiconductor Corporation | Method of fabricating a lateral double-diffused MOSFET |
US7074659B2 (en) * | 2003-11-13 | 2006-07-11 | Volterra Semiconductor Corporation | Method of fabricating a lateral double-diffused MOSFET (LDMOS) transistor |
US7163856B2 (en) | 2003-11-13 | 2007-01-16 | Volterra Semiconductor Corporation | Method of fabricating a lateral double-diffused mosfet (LDMOS) transistor and a conventional CMOS transistor |
US7081655B2 (en) * | 2003-12-03 | 2006-07-25 | Advanced Micro Devices, Inc. | Formation of abrupt junctions in devices by using silicide growth dopant snowplow effect |
US7514762B2 (en) * | 2003-12-15 | 2009-04-07 | Koninklijke Philips Electronics N.V. | Active matrix pixel device with photo sensor |
US7504327B2 (en) * | 2004-06-14 | 2009-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing thin film semiconductor device |
US7745293B2 (en) | 2004-06-14 | 2010-06-29 | Semiconductor Energy Laboratory Co., Ltd | Method for manufacturing a thin film transistor including forming impurity regions by diagonal doping |
US7179696B2 (en) * | 2004-09-17 | 2007-02-20 | Texas Instruments Incorporated | Phosphorus activated NMOS using SiC process |
US7405443B1 (en) | 2005-01-07 | 2008-07-29 | Volterra Semiconductor Corporation | Dual gate lateral double-diffused MOSFET (LDMOS) transistor |
US8461628B2 (en) * | 2005-03-18 | 2013-06-11 | Kovio, Inc. | MOS transistor with laser-patterned metal gate, and method for making the same |
US7326609B2 (en) * | 2005-05-06 | 2008-02-05 | Chartered Semiconductor Manufacturing, Ltd. | Semiconductor device and fabrication method |
US8901699B2 (en) | 2005-05-11 | 2014-12-02 | Cree, Inc. | Silicon carbide junction barrier Schottky diodes with suppressed minority carrier injection |
US7767515B2 (en) * | 2006-02-27 | 2010-08-03 | Synopsys, Inc. | Managing integrated circuit stress using stress adjustment trenches |
TW200742087A (en) * | 2006-03-14 | 2007-11-01 | Koninkl Philips Electronics Nv | Source and drain formation |
KR100770536B1 (ko) * | 2006-07-19 | 2007-10-25 | 동부일렉트로닉스 주식회사 | 고전압 반도체 소자 및 이의 제조 방법 |
JP2008192985A (ja) * | 2007-02-07 | 2008-08-21 | Seiko Instruments Inc | 半導体装置、及び半導体装置の製造方法 |
US7691693B2 (en) * | 2007-06-01 | 2010-04-06 | Synopsys, Inc. | Method for suppressing layout sensitivity of threshold voltage in a transistor array |
US7895548B2 (en) * | 2007-10-26 | 2011-02-22 | Synopsys, Inc. | Filler cells for design optimization in a place-and-route system |
US20090108408A1 (en) * | 2007-10-29 | 2009-04-30 | Synopsys, Inc. | Method for Trapping Implant Damage in a Semiconductor Substrate |
US9472423B2 (en) * | 2007-10-30 | 2016-10-18 | Synopsys, Inc. | Method for suppressing lattice defects in a semiconductor substrate |
JP5239548B2 (ja) * | 2008-06-25 | 2013-07-17 | 富士通セミコンダクター株式会社 | 半導体装置及び半導体装置の製造方法 |
JP4845937B2 (ja) * | 2008-07-24 | 2011-12-28 | 株式会社東芝 | スピンmosfetおよびこのスピンmosfetを用いたリコンフィギュラブル論理回路 |
US8120058B2 (en) * | 2009-10-28 | 2012-02-21 | International Business Machines Corporation | High-drive current MOSFET |
KR101990622B1 (ko) | 2011-11-23 | 2019-06-18 | 아콘 테크놀로지스 인코포레이티드 | 계면 원자 단일층의 삽입에 의한 ⅳ족 반도체에 대한 금속 접점의 개선 |
US9390928B2 (en) * | 2013-10-22 | 2016-07-12 | Globalfoundries Inc. | Anisotropic dielectric material gate spacer for a field effect transistor |
US20160071791A1 (en) * | 2014-09-09 | 2016-03-10 | Globalfoundries Inc. | Multimetal interlayer interconnects |
US9966141B2 (en) * | 2016-02-19 | 2018-05-08 | Nscore, Inc. | Nonvolatile memory cell employing hot carrier effect for data storage |
US9620611B1 (en) | 2016-06-17 | 2017-04-11 | Acorn Technology, Inc. | MIS contact structure with metal oxide conductor |
WO2018094205A1 (en) | 2016-11-18 | 2018-05-24 | Acorn Technologies, Inc. | Nanowire transistor with source and drain induced by electrical contacts with negative schottky barrier height |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3590471A (en) * | 1969-02-04 | 1971-07-06 | Bell Telephone Labor Inc | Fabrication of insulated gate field-effect transistors involving ion implantation |
US4005450A (en) * | 1970-05-13 | 1977-01-25 | Hitachi, Ltd. | Insulated gate field effect transistor having drain region containing low impurity concentration layer |
FR2130094B1 (ko) * | 1971-03-16 | 1977-04-01 | Ibm | |
US4141022A (en) * | 1977-09-12 | 1979-02-20 | Signetics Corporation | Refractory metal contacts for IGFETS |
JPS55143068A (en) * | 1979-04-25 | 1980-11-08 | Hitachi Ltd | Insulated gate semiconductor device |
US4384301A (en) * | 1979-11-07 | 1983-05-17 | Texas Instruments Incorporated | High performance submicron metal-oxide-semiconductor field effect transistor device structure |
US4339869A (en) * | 1980-09-15 | 1982-07-20 | General Electric Company | Method of making low resistance contacts in semiconductor devices by ion induced silicides |
US4374700A (en) * | 1981-05-29 | 1983-02-22 | Texas Instruments Incorporated | Method of manufacturing silicide contacts for CMOS devices |
JPS584924A (ja) * | 1981-07-01 | 1983-01-12 | Hitachi Ltd | 半導体装置の電極形成方法 |
-
1984
- 1984-03-29 KR KR1019840001637A patent/KR910006249B1/ko not_active IP Right Cessation
- 1984-03-30 EP EP84103566A patent/EP0123936B1/en not_active Expired
- 1984-03-30 DE DE8484103566T patent/DE3476144D1/de not_active Expired
-
1987
- 1987-06-19 US US07/063,785 patent/US4769686A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE3476144D1 (en) | 1989-02-16 |
US4769686A (en) | 1988-09-06 |
KR910006249B1 (ko) | 1991-08-17 |
EP0123936B1 (en) | 1989-01-11 |
EP0123936A1 (en) | 1984-11-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR840008537A (ko) | 반도체장치 | |
KR940010367A (ko) | 반도체장치 및 그 제조방법 | |
KR950012753A (ko) | 박막형 반도체장치 및 그 제작방법 | |
KR980005382A (ko) | Soi소자 및 그 제조방법 | |
KR950021772A (ko) | 적어도 하나의 모오스(mos) 트랜지스터를 구비한 집적회로의 제조방법 | |
KR930005257A (ko) | 박막 전계효과 소자 및 그의 제조방법 | |
KR930006972A (ko) | 전계 효과 트랜지스터의 제조 방법 | |
KR910001886A (ko) | 반도체장치와 그 제조방법 | |
KR970017963A (ko) | 반도체 장치 및 그 제조방법 | |
KR920704361A (ko) | 핫 캐리어가 억압된 미세 misfet 소자 | |
KR960002556A (ko) | 반도체소자 및 그 제조방법 | |
KR940020576A (ko) | 반도체트랜지스터구조(Metal oxide semiconductor transistors having a polysilicon gate electrode with nonuniform doping in source-drain direction) | |
KR940004846A (ko) | 반도체장치 및 그 제조방법 | |
KR910019260A (ko) | 반도체장치및 그의 제조방법 | |
KR920017279A (ko) | Mos형 반도체장치 및 그 제조방법 | |
KR910003838A (ko) | 박막 전계 효과 트랜지스터 및 그 제조 방법 | |
KR920005280A (ko) | Mos형 반도체장치 | |
KR960015858A (ko) | 반도체장치 및 그 제조방법 | |
KR870006679A (ko) | 전기효과 트랜지스터 | |
KR870004529A (ko) | 반도체 기억장치 | |
KR960002889A (ko) | 반도체 장치 및 그 제조방법 | |
KR970024284A (ko) | T형 게이트와 자기정렬 LDD 구조를 갖는 전계효과 트랜지스터의 제조방법(Production Method for Ion-implanted MESFET Comprising Self-aligned Lightly Doped Drain Structure and T-gate) | |
JPS5691470A (en) | Semiconductor | |
KR920022563A (ko) | 반도체 장치 및 그 제조방법 | |
KR850005170A (ko) | 반도체 장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20030801 Year of fee payment: 13 |
|
EXPY | Expiration of term |