KR20100045909A - 전자 부품용 패키지, 압전 디바이스 및 그 제조 방법 - Google Patents

전자 부품용 패키지, 압전 디바이스 및 그 제조 방법 Download PDF

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Publication number
KR20100045909A
KR20100045909A KR20090091799A KR20090091799A KR20100045909A KR 20100045909 A KR20100045909 A KR 20100045909A KR 20090091799 A KR20090091799 A KR 20090091799A KR 20090091799 A KR20090091799 A KR 20090091799A KR 20100045909 A KR20100045909 A KR 20100045909A
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KR
South Korea
Prior art keywords
substrate
sealing hole
sealing
hole
inner space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR20090091799A
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English (en)
Korean (ko)
Inventor
히로야스 사이타
Original Assignee
엡슨 토요콤 가부시키 가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엡슨 토요콤 가부시키 가이샤 filed Critical 엡슨 토요콤 가부시키 가이샤
Publication of KR20100045909A publication Critical patent/KR20100045909A/ko
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
KR20090091799A 2008-10-24 2009-09-28 전자 부품용 패키지, 압전 디바이스 및 그 제조 방법 Withdrawn KR20100045909A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2008274040 2008-10-24
JPJP-P-2008-274040 2008-10-24
JP2009120593A JP5369887B2 (ja) 2008-10-24 2009-05-19 電子部品用パッケージ、圧電デバイスおよびその製造方法
JPJP-P-2009-120593 2009-05-19

Publications (1)

Publication Number Publication Date
KR20100045909A true KR20100045909A (ko) 2010-05-04

Family

ID=42116787

Family Applications (1)

Application Number Title Priority Date Filing Date
KR20090091799A Withdrawn KR20100045909A (ko) 2008-10-24 2009-09-28 전자 부품용 패키지, 압전 디바이스 및 그 제조 방법

Country Status (5)

Country Link
US (1) US8334639B2 (https=)
JP (1) JP5369887B2 (https=)
KR (1) KR20100045909A (https=)
CN (1) CN101729037B (https=)
TW (1) TWI399874B (https=)

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JP5476964B2 (ja) 2009-12-09 2014-04-23 セイコーエプソン株式会社 振動子、発振器、ジャイロ及び電子機器
JP5384406B2 (ja) * 2010-03-30 2014-01-08 日本電波工業株式会社 音叉型水晶振動片の製造方法、水晶デバイス
JP2016154368A (ja) * 2011-03-30 2016-08-25 日本電波工業株式会社 圧電デバイス及び圧電デバイスの製造方法
JP2012217155A (ja) * 2011-03-30 2012-11-08 Nippon Dempa Kogyo Co Ltd 圧電デバイス及び圧電デバイスの製造方法
JP5831871B2 (ja) * 2011-08-31 2015-12-09 アルプス電気株式会社 電子部品
US9038463B2 (en) * 2011-09-22 2015-05-26 Seiko Epson Corporation Electronic device, manufacturing method thereof, and electronic apparatus
US9620702B2 (en) 2011-09-30 2017-04-11 Daishinku Corporation Electronic component package, electronic component package sealing member and method for producing the electronic component package sealing member
JP2013179228A (ja) * 2012-02-29 2013-09-09 Seiko Epson Corp 電子デバイスの製造方法および電子機器
US8691607B2 (en) * 2012-06-07 2014-04-08 Texas Instruments Incorporated Hermetically sealed MEMS device and method of fabrication
CN104051357B (zh) 2013-03-15 2017-04-12 财团法人工业技术研究院 环境敏感电子装置以及其封装方法
DE102014202801B4 (de) * 2014-02-17 2023-08-24 Robert Bosch Gmbh Verfahren zum Herstellen eines mikromechanischen Bauelements
US20160033273A1 (en) * 2014-07-31 2016-02-04 Seiko Epson Corporation Method for manufacturing physical quantity sensor, physical quantity sensor, electronic device, and moving body
WO2017016316A1 (zh) * 2015-07-28 2017-02-02 纳智源科技（唐山）有限责任公司 电子烟气动传感器、气流处理装置及电子烟
US9567208B1 (en) 2015-11-06 2017-02-14 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor device and method for fabricating the same
DE102016200497A1 (de) * 2016-01-15 2017-07-20 Robert Bosch Gmbh Verfahren zum Herstellen eines mikromechanischen Bauelements
CN107564890B (zh) * 2017-08-03 2019-09-20 华进半导体封装先导技术研发中心有限公司 一种应力传感器结构及其制作方法
JP2020036063A (ja) * 2018-08-27 2020-03-05 セイコーエプソン株式会社 振動デバイス、振動デバイスの製造方法、電子機器、および移動体
JP7266501B2 (ja) * 2019-09-25 2023-04-28 新光電気工業株式会社 ステム
US11174151B2 (en) * 2019-11-19 2021-11-16 Invensense, Inc. Integrated MEMS cavity seal
JP7361343B2 (ja) * 2021-09-29 2023-10-16 三安ジャパンテクノロジー株式会社 モジュール

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JP5189378B2 (ja) * 2008-02-18 2013-04-24 セイコーインスツル株式会社 圧電振動子の製造方法
JPWO2010013712A1 (ja) * 2008-07-28 2012-01-12 勝 中原 水素の製造方法

Also Published As

Publication number Publication date
JP2010124448A (ja) 2010-06-03
JP5369887B2 (ja) 2013-12-18
CN101729037A (zh) 2010-06-09
TW201025690A (en) 2010-07-01
US20100102678A1 (en) 2010-04-29
US8334639B2 (en) 2012-12-18
TWI399874B (zh) 2013-06-21
CN101729037B (zh) 2013-05-08

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