KR20020011440A - 가요성 접점을 구비한 전자 소자 및 그 전자 소자의 제조방법 - Google Patents
가요성 접점을 구비한 전자 소자 및 그 전자 소자의 제조방법 Download PDFInfo
- Publication number
- KR20020011440A KR20020011440A KR1020017016160A KR20017016160A KR20020011440A KR 20020011440 A KR20020011440 A KR 20020011440A KR 1020017016160 A KR1020017016160 A KR 1020017016160A KR 20017016160 A KR20017016160 A KR 20017016160A KR 20020011440 A KR20020011440 A KR 20020011440A
- Authority
- KR
- South Korea
- Prior art keywords
- flexible
- electronic device
- protrusions
- conductive
- electronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/01—Manufacture or treatment
- H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
- H10W72/251—Materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
- H10W72/29—Bond pads specially adapted therefor
Landscapes
- Wire Bonding (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19927750.8 | 1999-06-17 | ||
| DE19927750 | 1999-06-17 | ||
| PCT/DE2000/001123 WO2000079589A1 (de) | 1999-06-17 | 2000-04-11 | Elektronisches bauelement mit flexiblen kontaktierungsstellen und verfahren zum herstellen eines derartigen bauelements |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20020011440A true KR20020011440A (ko) | 2002-02-08 |
Family
ID=7911618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020017016160A Ceased KR20020011440A (ko) | 1999-06-17 | 2000-04-11 | 가요성 접점을 구비한 전자 소자 및 그 전자 소자의 제조방법 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US6956287B2 (https=) |
| EP (1) | EP1186035A1 (https=) |
| JP (2) | JP2003502866A (https=) |
| KR (1) | KR20020011440A (https=) |
| WO (1) | WO2000079589A1 (https=) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6870272B2 (en) * | 1994-09-20 | 2005-03-22 | Tessera, Inc. | Methods of making microelectronic assemblies including compliant interfaces |
| US6284563B1 (en) * | 1995-10-31 | 2001-09-04 | Tessera, Inc. | Method of making compliant microelectronic assemblies |
| US6211572B1 (en) * | 1995-10-31 | 2001-04-03 | Tessera, Inc. | Semiconductor chip package with fan-in leads |
| WO2000079589A1 (de) | 1999-06-17 | 2000-12-28 | Infineon Technologies Ag | Elektronisches bauelement mit flexiblen kontaktierungsstellen und verfahren zum herstellen eines derartigen bauelements |
| DE10014300A1 (de) * | 2000-03-23 | 2001-10-04 | Infineon Technologies Ag | Halbleiterbauelement und Verfahren zu dessen Herstellung |
| DE10016132A1 (de) | 2000-03-31 | 2001-10-18 | Infineon Technologies Ag | Elektronisches Bauelement mit flexiblen Kontaktierungsstellen und Verfahren zu dessen Herstellung |
| DE10063914A1 (de) | 2000-12-20 | 2002-07-25 | Pac Tech Gmbh | Kontakthöckeraufbau zur Herstellung eines Verbindungsaufbaus zwischen Substratanschlussflächen |
| US20020170897A1 (en) * | 2001-05-21 | 2002-11-21 | Hall Frank L. | Methods for preparing ball grid array substrates via use of a laser |
| DE10126296B4 (de) * | 2001-05-30 | 2008-04-17 | Qimonda Ag | Verfahren zur Herstellung eines elektronischen Bauelements |
| DE10143790B4 (de) * | 2001-09-06 | 2007-08-02 | Infineon Technologies Ag | Elektronisches Bauteil mit wenigstens einem Halbleiterchip |
| JP2003124393A (ja) * | 2001-10-17 | 2003-04-25 | Hitachi Ltd | 半導体装置およびその製造方法 |
| JP2003163312A (ja) * | 2001-11-28 | 2003-06-06 | Shinkawa Ltd | 半導体装置の製造方法 |
| DE10233641B4 (de) * | 2002-07-24 | 2007-08-23 | Infineon Technologies Ag | Verfahren zur Verbindung einer integrierten Schaltung mit einem Substrat und entsprechende Schaltungsanordnung |
| DE10239080A1 (de) * | 2002-08-26 | 2004-03-11 | Infineon Technologies Ag | Integrierte Schaltung |
| DE10261410B4 (de) * | 2002-12-30 | 2008-09-04 | Qimonda Ag | Verfahren zur Verbindung einer integrierten Schaltung mit einem Substrat und entsprechende Schaltungsanordnung |
| JP3945415B2 (ja) * | 2003-02-14 | 2007-07-18 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
| JP2006518944A (ja) * | 2003-02-25 | 2006-08-17 | テッセラ,インコーポレイテッド | バンプを有するボールグリッドアレー |
| DE10318074B4 (de) * | 2003-04-17 | 2009-05-20 | Qimonda Ag | Verfahren zur Herstellung von BOC Modul Anordnungen mit verbesserten mechanischen Eigenschaften |
| US7294929B2 (en) * | 2003-12-30 | 2007-11-13 | Texas Instruments Incorporated | Solder ball pad structure |
| JP3873986B2 (ja) * | 2004-04-16 | 2007-01-31 | セイコーエプソン株式会社 | 電子部品、実装構造体、電気光学装置および電子機器 |
| DE102004030140B3 (de) * | 2004-06-22 | 2006-01-19 | Infineon Technologies Ag | Flexible Kontaktierungsvorrichtung |
| DE102004030813B4 (de) * | 2004-06-25 | 2007-03-29 | Infineon Technologies Ag | Verfahren zur Verbindung einer integrierten Schaltung mit einem Substrat und entsprechende Schaltungsanordnung |
| US8680534B2 (en) | 2005-01-11 | 2014-03-25 | Semileds Corporation | Vertical light emitting diodes (LED) having metal substrate and spin coated phosphor layer for producing white light |
| US8012774B2 (en) * | 2005-01-11 | 2011-09-06 | SemiLEDs Optoelectronics Co., Ltd. | Coating process for a light-emitting diode (LED) |
| WO2006091793A1 (en) * | 2005-02-25 | 2006-08-31 | Tessera, Inc. | Microelectronic assemblies having compliancy |
| US7749886B2 (en) | 2006-12-20 | 2010-07-06 | Tessera, Inc. | Microelectronic assemblies having compliancy and methods therefor |
| TWI381464B (zh) * | 2008-08-29 | 2013-01-01 | 瀚宇彩晶股份有限公司 | The bump structure and its making method |
| JP5149876B2 (ja) * | 2009-07-23 | 2013-02-20 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
| US8912021B2 (en) | 2011-09-12 | 2014-12-16 | SemiLEDs Optoelectronics Co., Ltd. | System and method for fabricating light emitting diode (LED) dice with wavelength conversion layers |
| US8841146B2 (en) | 2011-09-12 | 2014-09-23 | SemiLEDs Optoelectronics Co., Ltd. | Method and system for fabricating light emitting diode (LED) dice with wavelength conversion layers having controlled color characteristics |
| US8410508B1 (en) | 2011-09-12 | 2013-04-02 | SemiLEDs Optoelectronics Co., Ltd. | Light emitting diode (LED) package having wavelength conversion member and wafer level fabrication method |
| US8492746B2 (en) | 2011-09-12 | 2013-07-23 | SemiLEDs Optoelectronics Co., Ltd. | Light emitting diode (LED) dice having wavelength conversion layers |
| WO2013066663A2 (en) | 2011-10-31 | 2013-05-10 | Ticona Llc | Thermoplastic composition for use in forming a laser direct structured substrate |
| AT17082U1 (de) * | 2020-04-27 | 2021-05-15 | Zkw Group Gmbh | Verfahren zur befestigung eines elektronischen bauteils |
Family Cites Families (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3641254A (en) * | 1969-06-27 | 1972-02-08 | W S Electronic Services Corp | Microcircuit package and method of making same |
| US4001870A (en) * | 1972-08-18 | 1977-01-04 | Hitachi, Ltd. | Isolating protective film for semiconductor devices and method for making the same |
| US4074342A (en) * | 1974-12-20 | 1978-02-14 | International Business Machines Corporation | Electrical package for lsi devices and assembly process therefor |
| JPS5519850A (en) * | 1978-07-31 | 1980-02-12 | Hitachi Ltd | Semiconductor |
| JPS601846A (ja) * | 1983-06-18 | 1985-01-08 | Toshiba Corp | 多層配線構造の半導体装置とその製造方法 |
| US4902606A (en) * | 1985-12-20 | 1990-02-20 | Hughes Aircraft Company | Compressive pedestal for microminiature connections |
| US4740700A (en) * | 1986-09-02 | 1988-04-26 | Hughes Aircraft Company | Thermally insulative and electrically conductive interconnect and process for making same |
| US4885126A (en) * | 1986-10-17 | 1989-12-05 | Polonio John D | Interconnection mechanisms for electronic components |
| US4813129A (en) * | 1987-06-19 | 1989-03-21 | Hewlett-Packard Company | Interconnect structure for PC boards and integrated circuits |
| JP2781560B2 (ja) | 1988-01-22 | 1998-07-30 | 日本電気株式会社 | 半導体装置及びその製造方法 |
| US5074947A (en) * | 1989-12-18 | 1991-12-24 | Epoxy Technology, Inc. | Flip chip technology using electrically conductive polymers and dielectrics |
| US5679977A (en) * | 1990-09-24 | 1997-10-21 | Tessera, Inc. | Semiconductor chip assemblies, methods of making same and components for same |
| US5148265A (en) * | 1990-09-24 | 1992-09-15 | Ist Associates, Inc. | Semiconductor chip assemblies with fan-in leads |
| US5148266A (en) * | 1990-09-24 | 1992-09-15 | Ist Associates, Inc. | Semiconductor chip assemblies having interposer and flexible lead |
| US5072520A (en) * | 1990-10-23 | 1991-12-17 | Rogers Corporation | Method of manufacturing an interconnect device having coplanar contact bumps |
| US5180311A (en) * | 1991-01-22 | 1993-01-19 | Hughes Aircraft Company | Resilient interconnection bridge |
| JP2958136B2 (ja) * | 1991-03-08 | 1999-10-06 | 株式会社日立製作所 | 半導体集積回路装置、その製造方法および実装構造 |
| JP3294647B2 (ja) * | 1991-12-13 | 2002-06-24 | ヘキスト・アクチェンゲゼルシャフト | L−ホスフィノトリシンおよびその誘導体の製造方法 |
| JP2833326B2 (ja) * | 1992-03-03 | 1998-12-09 | 松下電器産業株式会社 | 電子部品実装接続体およびその製造方法 |
| JPH05251455A (ja) * | 1992-03-04 | 1993-09-28 | Toshiba Corp | 半導体装置 |
| WO1994003036A1 (en) * | 1992-07-24 | 1994-02-03 | Tessera, Inc. | Semiconductor connection components and methods with releasable lead support |
| JPH0684917A (ja) | 1992-08-31 | 1994-03-25 | Tanaka Kikinzoku Kogyo Kk | 高周波用バンプの形成方法 |
| US6544825B1 (en) * | 1992-12-26 | 2003-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating a MIS transistor |
| DE4300652C1 (de) * | 1993-01-13 | 1994-03-31 | Bosch Gmbh Robert | Verfahren zur Herstellung einer hybrid integrierten optischen Schaltung und Vorrichtung zur Emission von Lichtwellen |
| JP3214186B2 (ja) * | 1993-10-07 | 2001-10-02 | 三菱電機株式会社 | 半導体装置の製造方法 |
| JPH07115096A (ja) * | 1993-10-18 | 1995-05-02 | Fujitsu Ltd | バンプ電極 |
| US5455390A (en) * | 1994-02-01 | 1995-10-03 | Tessera, Inc. | Microelectronics unit mounting with multiple lead bonding |
| US5508228A (en) * | 1994-02-14 | 1996-04-16 | Microelectronics And Computer Technology Corporation | Compliant electrically connective bumps for an adhesive flip chip integrated circuit device and methods for forming same |
| US5491302A (en) * | 1994-09-19 | 1996-02-13 | Tessera, Inc. | Microelectronic bonding with lead motion |
| US5777379A (en) * | 1995-08-18 | 1998-07-07 | Tessera, Inc. | Semiconductor assemblies with reinforced peripheral regions |
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| DE19639934A1 (de) | 1996-09-27 | 1998-04-09 | Siemens Ag | Verfahren zur Flipchip-Kontaktierung eines Halbleiterchips mit geringer Anschlußzahl |
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| WO1998050950A1 (fr) | 1997-05-07 | 1998-11-12 | Hitachi, Ltd. | Dispositif semi-conducteur et production de ce dispositif |
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| DE19723734C2 (de) | 1997-06-06 | 2002-02-07 | Gerhard Naundorf | Leiterbahnstrukturen auf einem nichtleitenden Trägermaterial und Verfahren zu ihrer Herstellung |
| JPH1167776A (ja) | 1997-08-21 | 1999-03-09 | Citizen Watch Co Ltd | 突起電極およびその製造方法 |
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| US6100175A (en) * | 1998-08-28 | 2000-08-08 | Micron Technology, Inc. | Method and apparatus for aligning and attaching balls to a substrate |
| US6075712A (en) * | 1999-01-08 | 2000-06-13 | Intel Corporation | Flip-chip having electrical contact pads on the backside of the chip |
| US6426564B1 (en) * | 1999-02-24 | 2002-07-30 | Micron Technology, Inc. | Recessed tape and method for forming a BGA assembly |
| US6225206B1 (en) * | 1999-05-10 | 2001-05-01 | International Business Machines Corporation | Flip chip C4 extension structure and process |
| WO2000079589A1 (de) | 1999-06-17 | 2000-12-28 | Infineon Technologies Ag | Elektronisches bauelement mit flexiblen kontaktierungsstellen und verfahren zum herstellen eines derartigen bauelements |
-
2000
- 2000-04-11 WO PCT/DE2000/001123 patent/WO2000079589A1/de not_active Ceased
- 2000-04-11 JP JP2001505058A patent/JP2003502866A/ja active Pending
- 2000-04-11 EP EP00934894A patent/EP1186035A1/de not_active Withdrawn
- 2000-04-11 KR KR1020017016160A patent/KR20020011440A/ko not_active Ceased
-
2001
- 2001-12-17 US US10/022,226 patent/US6956287B2/en not_active Expired - Fee Related
-
2005
- 2005-05-06 US US11/124,515 patent/US7820482B2/en not_active Expired - Fee Related
- 2005-11-24 JP JP2005339301A patent/JP4226589B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| WO2000079589A1 (de) | 2000-12-28 |
| EP1186035A1 (de) | 2002-03-13 |
| JP2006108705A (ja) | 2006-04-20 |
| JP4226589B2 (ja) | 2009-02-18 |
| US6956287B2 (en) | 2005-10-18 |
| US7820482B2 (en) | 2010-10-26 |
| US20050208703A1 (en) | 2005-09-22 |
| US20020089058A1 (en) | 2002-07-11 |
| JP2003502866A (ja) | 2003-01-21 |
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| P22-X000 | Classification modified |
St.27 status event code: A-2-2-P10-P22-nap-X000 |
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| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-3-3-R10-R18-oth-X000 |
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| P22-X000 | Classification modified |
St.27 status event code: A-2-2-P10-P22-nap-X000 |
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| P22-X000 | Classification modified |
St.27 status event code: A-2-2-P10-P22-nap-X000 |