KR102083919B1 - 진공흡착장치 - Google Patents

진공흡착장치 Download PDF

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Publication number
KR102083919B1
KR102083919B1 KR1020120104947A KR20120104947A KR102083919B1 KR 102083919 B1 KR102083919 B1 KR 102083919B1 KR 1020120104947 A KR1020120104947 A KR 1020120104947A KR 20120104947 A KR20120104947 A KR 20120104947A KR 102083919 B1 KR102083919 B1 KR 102083919B1
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KR
South Korea
Prior art keywords
adsorption
workpiece
sheet
suction
vacuum
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KR1020120104947A
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English (en)
Korean (ko)
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KR20130036144A (ko
Inventor
요시히로 후카노
슈조 사쿠라이
마사히코 소메야
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에스엠시 가부시키가이샤
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • B25B11/007—Vacuum work holders portable, e.g. handheld
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/30—End effector
    • Y10S901/40—Vacuum or mangetic

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
KR1020120104947A 2011-10-03 2012-09-21 진공흡착장치 Active KR102083919B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011218831A JP2013078810A (ja) 2011-10-03 2011-10-03 真空吸着装置
JPJP-P-2011-218831 2011-10-03

Publications (2)

Publication Number Publication Date
KR20130036144A KR20130036144A (ko) 2013-04-11
KR102083919B1 true KR102083919B1 (ko) 2020-03-03

Family

ID=47878739

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120104947A Active KR102083919B1 (ko) 2011-10-03 2012-09-21 진공흡착장치

Country Status (6)

Country Link
US (1) US8960749B2 (https=)
JP (1) JP2013078810A (https=)
KR (1) KR102083919B1 (https=)
CN (1) CN103029985A (https=)
DE (1) DE102012019327A1 (https=)
TW (1) TWI538791B (https=)

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KR102696239B1 (ko) 2023-10-31 2024-08-19 주식회사 남경 흡착 베이스

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JP6127728B2 (ja) * 2013-05-30 2017-05-17 三星ダイヤモンド工業株式会社 脆性材料基板の搬送ヘッド
TWI520258B (zh) * 2013-09-27 2016-02-01 華亞科技股份有限公司 起吊裝置及自動化搬運系統
DE102013017728B4 (de) * 2013-10-23 2015-05-07 Beumer Gmbh & Co. Kg Sauggreifvorrichtung
CN103640912B (zh) * 2013-12-02 2016-01-20 中国航天科技集团公司第五研究院第五一三研究所 一种纳米薄膜转运工装
JP6331656B2 (ja) * 2014-04-28 2018-05-30 三星ダイヤモンド工業株式会社 脆性材料基板の搬送方法及び搬送装置
CN104096980B (zh) * 2014-06-26 2016-01-20 长春光华微电子设备工程中心有限公司 激光切割真空吸附平台
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CN105398932A (zh) * 2015-12-18 2016-03-16 合肥加亦信息科技有限公司 带防滑吸盘的机械手吊具
US20180015618A1 (en) * 2016-07-15 2018-01-18 Georgia Tech Research Corporation Topologically and mechanically adaptive reversible attachment systems and methods
TW201808651A (zh) * 2016-09-07 2018-03-16 台灣格雷蒙股份有限公司 可撓性基板剝離裝置
EP3296239B1 (de) * 2016-09-20 2023-02-01 Hans-Jürgen Kasprich Greiferanordnung zum erfassen von teigstücken oder backwaren
KR101749997B1 (ko) * 2017-01-17 2017-06-22 주식회사 21세기 Mlcc 적층용 상부금형
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CN106672619A (zh) * 2017-02-15 2017-05-17 苏州迈瑞微电子有限公司 塑封料转运设备及方法
US10632596B2 (en) 2017-05-30 2020-04-28 James Alan Buckus Apparatus for binding to a surface and method of use thereof
JP2019010692A (ja) * 2017-06-29 2019-01-24 日本電産サンキョー株式会社 産業用ロボットのハンドおよび産業用ロボット
US11227787B2 (en) * 2017-07-14 2022-01-18 Industrial Technology Research Institute Transfer support and transfer module
WO2019028242A1 (en) * 2017-08-03 2019-02-07 Soft Robotics, Inc. ROBOTIC PREHENSOR FOR HANDLING CARNEOUS PRODUCTS
CN107642607B (zh) * 2017-08-16 2020-02-21 Oppo广东移动通信有限公司 治具、密封组件的安装结构及其分离方法
TWI634969B (zh) * 2017-11-10 2018-09-11 大銀微系統股份有限公司 真空吸附平台
JP6881284B2 (ja) * 2017-12-27 2021-06-02 株式会社Sumco 吸着チャック
TWI638759B (zh) * 2018-04-17 2018-10-21 威光自動化科技股份有限公司 異形薄片物件的負壓吸附器
CN110544661A (zh) * 2018-05-29 2019-12-06 普因特工程有限公司 微led转印头及利用其的微led转印系统
US10625428B2 (en) * 2018-06-26 2020-04-21 Amazon Technologies, Inc. End effector with selectively deformable interface
CN110648956A (zh) * 2018-06-27 2020-01-03 普因特工程有限公司 微发光二极管转印头
CN108995200B (zh) * 2018-08-28 2023-06-30 莱芜钢铁集团有限公司 气体提取式薄膜铺设装置及方法
KR102560167B1 (ko) * 2018-10-04 2023-07-25 코닝 인코포레이티드 디본딩 서포트 장치 및 이를 이용한 디본딩 방법
DE102018126684A1 (de) * 2018-10-25 2020-04-30 J. Schmalz Gmbh Sauggreifer
CN110146239B (zh) * 2019-05-16 2024-04-16 沈阳飞机工业（集团）有限公司 一种弹性试验夹具及使用方法
CN110394713A (zh) * 2019-06-18 2019-11-01 上饶市东腾光学有限公司 一种光学镜片冷加工固定盘
EP4034374A1 (en) * 2019-09-23 2022-08-03 NIKE Innovate C.V. Manufacturing systems for applying materials to articles of apparel and methods of using the same
JP2021115677A (ja) * 2020-01-28 2021-08-10 株式会社ナノテム パッドユニット、真空チャック装置及びワーク搬送装置
CN111546363B (zh) * 2020-04-13 2021-10-15 清华大学 多功能自适应可控粘附软体机械手
US11660761B2 (en) * 2020-09-24 2023-05-30 Gm Global Technology Operations, Llc Flexible robotic system using end-effector with pass-through suction modules
US11826904B2 (en) * 2020-11-25 2023-11-28 The Boeing Company End effector, system and method for picking up and placing an object
FR3129865A1 (fr) * 2021-12-02 2023-06-09 Safran Nacelles Préhenseur de patch à forte pégosité
CN114523090A (zh) * 2022-01-25 2022-05-24 烟台路通精密科技股份有限公司 一种大型薄壁件的浸渗方法及装置
JP2023144341A (ja) * 2022-03-28 2023-10-11 Smc株式会社 吸着盤
IT202200015504A1 (it) * 2022-07-22 2024-01-22 Clevertech S P A Apparato per impilare strati di contenitori
WO2025202966A1 (en) * 2024-03-28 2025-10-02 Sacmi Tech S.P.A. Handling device for substantially flat ceramic articles
JP2025158258A (ja) * 2024-04-04 2025-10-17 アサヒ繊維工業株式会社 吸着プレート及びその製造方法

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JP2008251653A (ja) * 2007-03-29 2008-10-16 Sharp Corp 低負荷搬送装置
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Publication number Priority date Publication date Assignee Title
KR102696239B1 (ko) 2023-10-31 2024-08-19 주식회사 남경 흡착 베이스

Also Published As

Publication number Publication date
KR20130036144A (ko) 2013-04-11
JP2013078810A (ja) 2013-05-02
TW201332869A (zh) 2013-08-16
DE102012019327A1 (de) 2013-04-04
CN103029985A (zh) 2013-04-10
US8960749B2 (en) 2015-02-24
US20130082475A1 (en) 2013-04-04
TWI538791B (zh) 2016-06-21

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